JP2013027098A - Motor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a motor which prevents a gas from leaking even under a vacuum environment.SOLUTION: First support bodies 16b are attached to a housing 11, and both end parts of each first partition wall 16a is hermetically joined to the first support bodies 16b at welded parts M by welding. Further, each first support body 16b is hermetically sealed to the housing 11 by a sealing member 25. This structure allows a stator 13, enclosed by an inner wall of the housing 11 and a first partition member 16, to be hermetically sealed.

Description

  The present invention relates to a motor, and more particularly to a technique for preventing leakage of gas generated from components.

  For example, a vacuum apparatus such as a multi-chamber CVD apparatus is provided with a transfer device for transferring a film to be formed between a charging / unloading chamber and a processing chamber. Such a conveying apparatus is composed of, for example, a roller that supports and moves the substrate, and a motor that rotates the roller. Conventionally, a motor used in a transfer device is disposed outside a chamber serving as a vacuum environment, that is, in contact with outside air, and a motor shaft (rotating shaft) is connected to a roller disposed in the chamber, thereby the inside of the chamber. The roller was rotating. For this reason, an airtight seal for keeping the airtightness in the chamber is provided at a portion where the motor shaft penetrates the wall surface of the chamber.

  However, in a structure in which the motor of the transfer device is installed outside the chamber and the motor shaft is connected to the roller in the chamber via an airtight seal, the entire transfer device becomes large, which is an obstacle to downsizing the vacuum device. It was. In addition, there is a problem that the structure is complicated, for example, an airtight seal is required between the motor shaft and the chamber wall surface. Furthermore, such a hermetic seal can keep the airtightness in the chamber only when the rotation speed of the motor shaft is about 500 rpm. It was an obstacle.

  For this reason, the vacuum apparatus provided with the conveying apparatus which has arrange | positioned the motor of the conveying apparatus inside the chamber is also known (for example, refer patent document 1). By disposing the motor inside the chamber, an airtight seal between the motor shaft and the chamber wall surface becomes unnecessary, the structure can be simplified, the vacuum apparatus can be miniaturized, and the airtightness inside the chamber can be maintained. The number of rotations of the motor can be increased to enable high-speed conveyance of the film formation.

JP 2007-277617 A

  However, the motor installed in the chamber is inevitably placed in a vacuum environment as the pressure in the chamber is reduced. A magnetic member such as a coil or a magnet is provided inside the motor, and such a coil or magnet has a problem of generating gas when placed in a vacuum environment. That is, the magnet is generally a porous material, and gas is released from a large number of holes.

  In addition, the coil is released by gasifying the adhesive and the solvent molding the wound metal wire. When the gas released from the coils and magnets constituting such a motor diffuses into the chamber, there is a concern that the film-formed object is contaminated.

  The present invention has been made to solve the above problems, and provides a motor in which gas does not leak even in a vacuum environment.

In order to solve the above problems, the present invention provides the following motor.
That is, the motor of the present invention includes a housing, a rotor that is rotatably supported by the housing and a magnetic member provided around the shaft, and a stator that is disposed so as to surround the rotor. A motor for rotating the rotor by a magnetic field generated between the rotor and the stator,
A partition member comprising a partition wall disposed between the magnetic member and the stator and a support body supporting an end of the partition wall, wherein the partition wall and the support body form a welded structure. To do.

The partition member is composed of a first partition member and a second partition member,
The first partition member includes a first support body that extends along a side surface of the stator, and a first partition wall that extends along the axial direction of the shaft and is welded to the first support body. The stator is hermetically sealed between
The second partition member includes a second support extending along a side surface of the magnetic member, and a second partition extending along the axial direction of the shaft and welded to the second support, and the shaft The magnetic member is hermetically sealed between.

The partition is integrally formed with a rib for preventing bending.
The partition is a metal plate, and the partition and the support are made of different materials.

A seal member that hermetically seals between the support and the housing is further provided.
Further, the magnetic member and the stator are constituted by magnets or electromagnetic coils.

    According to the motor of the present invention, even if the motor is installed in a vacuum environment, gas generated from the rotor and stator constituting the motor is not released to the outside of the housing. That is, the rotor and the stator are covered with the housing, the shaft, and the partition member. In addition, the partition walls and the support body constituting the partition wall members are welded in an airtight manner by the welds. Further, the support body is airtightly attached to the housing. As a result, the rotor and the stator are hermetically sealed in a space surrounded by the partition member, the housing, and the shaft.

  Therefore, even if the magnetic member or stator of the rotor is a magnet or an electromagnetic coil in which a thin metal wire is wound and molded with a resin material, the magnetic member or stator of the rotor is not easily generated even in a vacuum environment. By gas-tightly covering with the partition member, it is possible to prevent the gas generated from the rotor and the stator from leaking out of the motor.

It is sectional drawing which shows the motor (vacuum motor) in one Embodiment of this invention.

    Hereinafter, a motor according to the present invention will be described with reference to the drawings. Note that this embodiment is described by way of example in order to better understand the gist of the invention, and does not limit the present invention unless otherwise specified. In addition, in the drawings used in the following description, in order to make the features of the present invention easier to understand, there is a case where a main part is shown in an enlarged manner for convenience, and the dimensional ratio of each component is the same as the actual one. Not necessarily.

FIG. 1 is a cross-sectional view showing a configuration example of a motor in the first embodiment of the present invention.
For example, a vacuum motor (motor) 10 used for a substrate transport mechanism of a vacuum apparatus includes a housing (exterior body) 11, a rotor 12 accommodated in the housing 11, and a stator 13. The rotor 12 includes a shaft 21 and a magnetic member 22 formed around the shaft 21.

  The housing is made of, for example, metal, resin, or the like, and bearings 14 a and 14 b are formed at two locations along the axial direction L of the shaft 21. The bearings 14a and 14b only need to be composed of, for example, a bearing and a receiving member that supports the bearing.

  The shaft 21 is pivotally supported at two locations along the rotation axis by bearings 14 a and 14 b attached to the housing 11. Thus, the rotor 12 is rotatably supported inside the housing 11.

  The magnetic member 22 formed on the peripheral surface of the shaft 21 is composed of, for example, a permanent magnet. Specific examples include ferrite magnets, samarium cobalt magnets, and neodymium magnets. Many of these permanent magnets are obtained by molding and sintering magnetically pulverized magnetic particles, and there are fine cavities inside, and gas is easily generated in a vacuum environment.

  The stator 13 is fixed to the housing 11 and is formed so as to surround the rotor 12 with a predetermined distance from the rotor 12. The stator 13 is composed of, for example, an electromagnetic coil. The electromagnetic coil is made of, for example, a thin wire such as copper wound around a magnetic body and molded with a resin material such as an adhesive. Such a resin material such as an adhesive is likely to be gasified and released in a vacuum environment due to volatilization of a resin constituent material itself or a solvent.

  The vacuum motor (motor) 10 generates electric field between the magnetic member 22 of the rotor 12 and the stator 13 by supplying electric power from the outside to the electromagnetic coils constituting the stator 13, and the shaft 21 together with the magnetic member 22. Rotate.

A partition member 15 is disposed between the magnetic member 22 of the rotor 12 and the stator 13. In the present embodiment, the partition member 15 includes a first partition member 16 and a second partition member 17.
The first partition member 16 includes a first partition 16a and a first support (support) 16b integrally formed at an end of the first partition 16a. The first partition wall 16 a extends along the axial direction L of the shaft 21 and is disposed so as to cover the rotor 12 side exposed surface of the stator 13.
The first support body 16b extends along both side surfaces of the stator 13, and is formed so as to be thicker than the first partition wall 16a.

  Such a first support 16 b is attached to the housing 11. And the both ends of the 1st partition 16a are airtightly joined by the welding part M with respect to the 1st support body 16b, respectively. The first support 16 b is hermetically sealed with the seal member 25 with respect to the housing 11. As a result, the stator 13 surrounded by the inner wall of the housing 11 and the first partition member 16 is hermetically sealed.

  The first partition 16a may be formed of a metal plate that generates less dust and emits gas, such as Fe, Al, Cu, and SUS. Moreover, the 1st support body 16b should just be formed from metals, such as Fe, Al, Cu, and SUS. The first partition 16a may be a metal plate having a thickness of about 0.1 mm to 2 mm, for example. The first partition 16a and the first support 16b are preferably composed of different members, but may be the same member and are not limited.

  The welded portion M between the first partition wall 16a and the first support 16b is welded by direct welding using various welding methods such as arc welding, spot welding, seam welding, laser welding, and gas welding. Further, indirect welding (brazing) using a low melting point brazing material or the like may be used.

  Ribs 26 are formed in a portion adjacent to the welded portion M of the first partition wall 16a and in the vicinity of the center. The rib 26 is a part where, for example, a part of a metal plate forming the first partition wall 16a extending along the axial direction L of the shaft 21 is bent in a spine shape.

  By forming the ribs 26 in the first partition 16a, the first partition 16a may be bent or buckled by stress even when a thin and light metal plate is used as the first partition 16a. Can be prevented, and the strength in the surface spreading direction can be increased.

  The seal member 25 may be an O-ring extending around the axis of the shaft 21 and is made of an elastic member that retains elasticity even in a vacuum environment. Specific examples of the elastic member constituting the seal member 25 include fluororesin, silicon resin, nitrile resin, ethylene propylene rubber, acrylic rubber, etc., but those that do not generate constituent gas in a vacuum environment. It is preferable to select.

The 2nd partition member 17 consists of the 2nd partition 17a and the 2nd support body (support body) 17b integrally formed in the edge part of this 2nd partition wall 17a. The second partition wall 17a extends along the axial direction L of the shaft 21 and is disposed so as to cover the exposed surface of the magnetic member 22 on the stator 13 side.
The second support member 17b extends along both side surfaces of the magnetic material 22, and is formed to be thicker than the second partition wall 17a.

  Such a second support 17 b is attached to the shaft 21. Then, both end portions of the second partition wall 17a are airtightly joined to the second support body 17b by welding at the welded portion M, respectively. Further, the second support 17 b is hermetically sealed with respect to the shaft 21 by a seal member 28. As a result, the peripheral surface of the shaft 21 and the magnetic member 22 surrounded by the second partition member 17 are hermetically sealed. And the rotation of the shaft 21 causes the second partition member 17 to rotate together with the magnetic member 22.

  The second partition wall 17a may be formed from a metal plate with little dust generation such as Fe, Al, Cu, SUS, for example. Moreover, the 2nd support body 17b should just be formed from metals, such as Fe, Al, Cu, and SUS. The second partition wall 17a may be a metal plate having a thickness of about 0.1 mm to 2 mm, for example. The second partition wall 17a and the first support member 17b are preferably composed of different members, but may be the same member and are not limited.

  The welded part M between the second partition wall 17a and the second support 17b is welded by direct welding using various welding methods such as arc welding, spot welding, seam welding, laser welding, gas welding, and the like. Further, indirect welding (brazing) using a low melting point brazing material or the like may be used.

  The rib 27 is formed in the part adjacent to the welding part M of the 2nd partition 17a, and the center vicinity similarly to the 1st partition 16a. The rib 27 is a part where a part of the metal plate forming the second partition wall 17a extending along the axial direction L of the shaft 21 is bent in a spine shape, for example.

  By forming the ribs 27 on the second partition wall 17a, the second partition wall 17a may be bent or buckled by stress even when a thin and light metal plate is used as the second partition wall 17a. Can be prevented, and the strength in the surface spreading direction can be increased.

  The seal member 28 may be an O-ring extending around the axis of the shaft 21 and is made of an elastic member that retains elasticity even in a vacuum environment. Specific examples of the elastic member constituting the seal member 28 include fluororesin, silicon resin, nitrile resin, ethylene propylene rubber, acrylic rubber, etc., but those that do not generate constituent gas in a vacuum environment. It is preferable to select.

  It is preferable that an encoder 29 for detecting the axial position and the rotational speed of the vacuum motor (motor) 10 is further formed on one end side of the shaft 21. Such an encoder includes, for example, a rotating plate that is formed with an index and rotates with the shaft, a sensor that detects the index, and the like.

  According to the vacuum motor (motor) 10 of the embodiment of the present invention having the above-described configuration, for example, the vacuum motor 10 is used as a transport motor for transporting an object to be deposited (substrate) in a vacuum apparatus. Even when installed in a chamber serving as an environment, the gas generated from the magnetic member 22 of the rotor 12 and the gas generated from the stator 13 are not released to the outside of the housing 11.

  That is, the stator 13 composed of an electromagnetic coil or the like is covered with the inner wall surface of the housing 11 and the first partition member 16. And the 1st partition 16a and the 1st support body 16b which comprise the 1st partition member 16 are welded by the welding part M airtightly. In addition, the first support 16 b is airtightly attached to the housing 11 by a seal member 25. As a result, the stator 13 is hermetically sealed in a space surrounded by the first partition member 16 and the housing 11.

  The electromagnetic coil constituting the stator 13 is made of, for example, a wire wound with a thin wire such as copper and molded with a resin material such as an adhesive. However, even if gas is generated from the stator 13 by airtightly covering the entire stator 13 within a region defined by the first partition member 16 and the housing 11, such gas leaks out of the vacuum motor 10. To prevent.

  On the other hand, the magnetic member 22 of the rotor 12 is covered with the peripheral surface of the shaft 21 and the second partition member 17. In addition, the second partition wall 17a and the second support body 17b constituting the second partition wall member 17 are welded in an airtight manner by the welding portion M. Further, the second support body 17 b is airtightly attached to the shaft 21 by a seal member 28. As a result, the magnetic material 22 is hermetically sealed in a space surrounded by the peripheral surface of the shaft 21 and the second partition member 17.

  The magnetic member 22 is composed of, for example, a permanent magnet. Among these permanent magnets, the sintered body has a fine cavity inside, and gas is easily generated in a vacuum environment. By covering the partition member 17 and the peripheral surface of the shaft 21 in an airtight manner, even if gas is generated from the magnetic member 22, such gas is prevented from leaking out of the vacuum motor 10.

  Therefore, even if the vacuum motor 10 of this embodiment is installed in a vacuum environment such as in the chamber of a vacuum apparatus, the gas generated in the rotor 12 and the stator 13 of the vacuum motor 10 is not released into the chamber. In addition, it is possible to prevent defects such as film formation defects and impurity contamination of an object to be formed.

  In addition, the first partition member 16 and the second partition member 17 are configured so that only the first support 16b and the second support 17b that support the end portions of the first partition 16a and the second partition 17a are the first partition 16a and the second partition 17b. The first partition 16a and the second partition 17a that cover the stator 13 and the magnetic member 22 other than that are thicker than 17a, and are thinner. Thus, even if the first partition member 16 and the second partition member 17 are provided inside the housing 11, the size of the vacuum motor 10 can be prevented from becoming significantly large, impurity gas is not released, and a compact vacuum can be obtained. The motor 10 can be realized.

  In the embodiment described above, the magnetic member 22 of the rotor 12 is constituted by a permanent magnet and the stator 13 is constituted by an electromagnetic coil. Conversely, the magnetic member of the rotor may be constituted by an electromagnetic coil and the stator by a permanent magnet.

  In the embodiment described above, the two partition members 15, the first partition member 16 and the second partition member 17, are formed between the rotor 12 and the stator 13. However, for example, by using one permanent magnet that generates less gas even in a vacuum environment, the magnetic material of the rotor or the single partition member that hermetically seals only one of the stators may be used. Good.

  In the above-described embodiment, the first support 16 b of the first partition member 16 is formed separately from the housing 11 and is airtightly bonded to the housing 11 via the seal member 25. However, the first support 16b may be integrally formed as a part of the housing 11, and the first partition 16a may be welded to the first support 16b that is a part of the housing 11.

  Similarly, the second support 17 b of the second partition member 17 is formed separately from the shaft 21 and is airtightly bonded to the shaft 21 via the seal member 28. However, the second support 17b is integrally formed as a part of the shaft 21 (for example, a wall surface protruding outward in the circumferential direction), and the second partition wall 17a is formed with respect to the second support 17b that is a part of the shaft 21. The structure which welds may be sufficient.

  In addition, the motor of this invention is not limited to the kind of motor, It can apply to the motor of various systems. Table 1 exemplifies types of motors to which the configuration of the present invention can be applied, and combinations of the stators and rotors thereof.

DESCRIPTION OF SYMBOLS 10 Vacuum motor (motor), 11 Housing, 12 Rotor, 13 Stator, 15 Partition member, 16a Partition, 16b Support body, 21 Shaft, 22 Magnetic member.

Claims (6)

A rotor comprising a housing, a shaft rotatably supported by the housing, and a magnetic member provided around the shaft; and a stator arranged to surround the rotor, the rotor and the stator A motor for rotating the rotor by a magnetic field generated between
A partition member comprising a partition wall disposed between the magnetic member and the stator, and a support member that supports an end of the partition wall;
The motor, wherein the partition wall and the support body form a welded structure. The partition member is composed of a first partition member and a second partition member,
The first partition member includes a first support body that extends along a side surface of the stator, and a first partition wall that extends along the axial direction of the shaft and is welded to the first support body. The stator is hermetically sealed between
The second partition member includes a second support extending along a side surface of the magnetic member, and a second partition extending along the axial direction of the shaft and welded to the second support, and the shaft The motor according to claim 1, wherein the magnetic member is hermetically sealed.   3. The motor according to claim 1, wherein a rib for preventing bending is formed integrally with the partition wall.   4. The motor according to claim 1, wherein the partition is a metal plate, and the partition and the support are made of different materials.   The motor according to any one of claims 1 to 4, further comprising a seal member that hermetically seals between the support and the housing. The motor according to any one of claims 1 to 5, wherein the magnetic member and the stator are composed of a magnet or an electromagnetic coil.

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