JP2013026932A5 - - Google Patents
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本発明は上記の課題を鑑みて為されたものであり、一の態様は、アナログ信号と参照信号との比較結果を示す比較結果信号を出力する比較器と、前記比較結果信号に基づいてデジタル信号を保持するメモリとを含む回路部を複数有し、該複数の回路部が、それらの一部から成る第１の回路部と、該第１の回路部以外の少なくとも一部から成る第２の回路部とを含み、前記アナログ信号をデジタル信号に変換するアナログデジタル変換回路であって、前記第１の回路部に含まれる第１のメモリに第１のデジタル信号を保持させるための第１のテスト信号、及び、前記第２の回路部に含まれる第２のメモリに前記第１のデジタル信号とは異なる信号値の第２のデジタル信号を保持させるための第２のテスト信号を、前記第１及び第２のメモリにそれぞれ供給するテスト信号供給部と、出力比較部と、前記第１及び第２のメモリのそれぞれが保持したデジタル信号を前記出力比較部に転送する転送部とを備え、前記出力比較部において、前記第１のメモリから転送されたデジタル信号と前記第１のデジタル信号とを比較し、さらに、前記第２のメモリから転送されたデジタル信号と前記第２のデジタル信号とを比較することによって、前記第１及び第２のメモリの検査を行うことを特徴とするアナログデジタル変換回路である。 The present invention has been made in view of the above problems, and one aspect thereof is a comparator that outputs a comparison result signal indicating a comparison result between an analog signal and a reference signal, and a digital signal based on the comparison result signal. A plurality of circuit parts including a memory for holding a signal, and the plurality of circuit parts include a first circuit part including a part of the circuit part and a second part including at least a part other than the first circuit part. and a circuit portion of the an analog-digital converter for converting an analog signal into a digital signal, for holding the first digital signal in a first memory included in the first circuit portion before Symbol No. 1 test signal and a second test signal for causing a second memory included in the second circuit unit to hold a second digital signal having a signal value different from the first digital signal, The first and second memories are And respectively supplies the test signal supply unit, and the output comparator unit, a digital signal each of which holds the first and second memory and a transfer unit for transferring to the output comparator unit, before SL output comparator unit By comparing the digital signal transferred from the first memory with the first digital signal, and further comparing the digital signal transferred from the second memory with the second digital signal The analog-digital conversion circuit is characterized in that the first and second memories are inspected.
別の態様は、アナログ信号と参照信号との比較結果を示す比較結果信号を出力する比較器と、前記比較結果信号に基づいてデジタル信号を保持するメモリとを含む回路部を複数有し、該複数の回路部が、それらの一部から成る第１の回路部と、該第１の回路部以外の少なくとも一部から成る第２の回路部とを含み、前記アナログ信号をデジタル信号に変換するアナログデジタル変換回路の検査方法であって、前記第１の回路部に含まれる第１のメモリに第１のデジタル信号を保持させるための第１のテスト信号を供給し、前記第２の回路部に含まれる第２のメモリに前記第１のデジタル信号とは異なる信号値の第２のデジタル信号を保持させるための第２のテスト信号を供給する工程と、前記第１のメモリに保持されたデジタル信号と前記第１のデジタル信号とを比較し、また、前記第２のメモリに保持されたデジタル信号と前記第２のデジタル信号とを比較する工程と、によって前記第１及び第２のメモリの検査を行うことを特徴とするアナログデジタル変換回路の検査方法である。 Another aspect includes a plurality of circuit units including a comparator that outputs a comparison result signal indicating a comparison result between an analog signal and a reference signal, and a memory that holds a digital signal based on the comparison result signal, The plurality of circuit units include a first circuit unit including a part thereof and a second circuit unit including at least a part other than the first circuit unit, and converts the analog signal into a digital signal. an inspection method of the analog-to-digital converter, before Symbol first supplying a first test signal for holding the digital signal to the first memory included in the first circuit portion, the second circuit Supplying a second test signal for holding a second digital signal having a signal value different from that of the first digital signal to a second memory included in the unit; and holding the second test signal in the first memory Digital signal and And comparing the digital signal held in the second memory with the second digital signal, and inspecting the first and second memories. This is a method for inspecting an analog-digital conversion circuit.
別の態様は、各々が光電変換部を含む複数の画素が複数列状に配置された画素部と、前記画素部の各列から出力されたアナログ信号をデジタル信号に変換するアナログデジタル変換回路とを有し、前記アナログデジタル変換回路が、前記アナログ信号と参照信号との比較結果を示す比較結果信号を出力する比較器と、前記比較結果信号に基づいてデジタル信号を保持するメモリとを含む回路部を複数有し、該複数の回路部が、それらの一部から成る第１の回路部と、該第１の回路部以外の少なくとも一部から成る第２の回路部とを含む撮像装置の検査方法であって、テストパターンを前記画素部で撮像することによって、前記第１の回路部に含まれる第１の比較器から第１のメモリに第１のデジタル信号を保持させるための第１のテスト信号を供給し、前記第２の回路部に含まれる第２の比較器から第２のメモリに前記第１のデジタル信号とは異なる信号値の第２のデジタル信号を保持させるための第２のテスト信号を供給する工程と、前記第１のメモリに保持されたデジタル信号と前記第１のデジタル信号とを比較し、また、前記第２のメモリに保持されたデジタル信号と前記第２のデジタル信号とを比較する工程と、によって前記第１及び第２のメモリの検査を行うことを特徴とする撮像装置の検査方法である。 Another aspect includes a pixel unit in which a plurality of pixels each including a photoelectric conversion unit are arranged in a plurality of columns, an analog-digital conversion circuit that converts an analog signal output from each column of the pixel unit into a digital signal, and The analog-to-digital conversion circuit includes a comparator that outputs a comparison result signal indicating a comparison result between the analog signal and a reference signal, and a memory that holds a digital signal based on the comparison result signal An imaging device including a plurality of sections, wherein the plurality of circuit sections include a first circuit section including a part thereof and a second circuit section including at least a part other than the first circuit section. an inspection method, by imaging the test pattern in the pixel portion, the second for holding the first digital signal to the first memory from the first comparator included in said first circuit section 1 test signal A second test signal for supplying the second digital signal having a signal value different from the first digital signal from the second comparator included in the second circuit unit to the second memory; The digital signal held in the first memory and the first digital signal, and the digital signal held in the second memory and the second digital signal And a step of comparing the first and second memories by the step of comparing the first and second memories.
Claims (21)
出力比較部と、
前記第１及び第２のメモリのそれぞれが保持したデジタル信号を前記出力比較部に転送する転送部と、を備え、前記出力比較部において、前記第１のメモリから転送されたデジタル信号と前記第１のデジタル信号とを比較し、さらに、前記第２のメモリから転送されたデジタル信号と前記第２のデジタル信号とを比較することによって、前記第１及び第２のメモリの検査を行うことを特徴とするアナログデジタル変換回路。 A plurality of circuit units each including a comparator that outputs a comparison result signal indicating a comparison result between the analog signal and the reference signal; and a memory that holds a digital signal based on the comparison result signal. An analog-to-digital conversion circuit that includes a first circuit unit including a part thereof and a second circuit unit including at least a part other than the first circuit unit, and converts the analog signal into a digital signal. there, the first test signal for holding the first digital signal in a first memory included in the first circuit portion before reporting, and, in a second memory included in the second circuit section A test signal supply unit for supplying a second test signal for holding a second digital signal having a signal value different from that of the first digital signal to each of the first and second memories;
An output comparison unit;
And a transfer unit for transferring a digital signal each of which holds the first and second memory to said output comparator unit, before SL output comparator unit, the digital signal transferred from said first memory The first and second memories are inspected by comparing the first digital signal and further comparing the digital signal transferred from the second memory and the second digital signal. An analog-digital conversion circuit characterized by
を特徴とする請求項１に記載のアナログデジタル変換回路。 2. The analog-digital conversion circuit according to claim 1, wherein the plurality of first memories and the plurality of second memories are alternately arranged adjacent to each other.
前記出力比較部において、前記第１の転送回路が転送したデジタル信号と第１のデジタル信号とを比較し、また、前記第２の転送回路が転送したデジタル信号と前記第２のデジタル信号とを比較することで前記第１及び第２のメモリの検査を行うことを特徴とする請求項１〜３のいずれかに記載のアナログデジタル変換回路。 The transfer portion includes a first and a second transfer circuit for transferring digital signals the first and second memory are respectively held in the output comparator unit, before Symbol first transfer circuit the first The digital signal held in the memory is transferred, and the second transfer circuit transfers the digital signal held in the second memory,
In the output comparison unit, the digital signal transferred by the first transfer circuit is compared with the first digital signal, and the digital signal transferred by the second transfer circuit is compared with the second digital signal. 4. The analog-to-digital conversion circuit according to claim 1, wherein the first and second memories are inspected by comparison.
前記出力比較部において、前記第１及び第２の転送回路のそれぞれから、前記第１及び第２のデジタル信号が交互に転送されるかを検出することで、前記転送部の検査を行うことを特徴とする請求項４に記載のアナログデジタル変換回路。 Supplying pre Symbol test signal the first test signal supply unit to the first memory, after supplying the second test signal to said second memory, said first transfer circuit the first The digital signal held in the first memory and the digital signal held in the second memory are alternately transferred, and the second transfer circuit transfers the digital signal held in the first memory and the second memory. Alternately transfer digital signals held by
In the output comparison unit, the transfer unit is inspected by detecting whether the first and second digital signals are alternately transferred from each of the first and second transfer circuits. 5. The analog-digital conversion circuit according to claim 4, wherein
前記第１及び第２のメモリの前記検査の代わりに、
前記テスト信号供給部が前記第１のメモリに前記第１のテスト信号を供給し、前記第２のメモリに前記第２のテスト信号を供給した後、前記第１の転送回路は前記第１のメモリが保持したデジタル信号と前記第２のメモリが保持したデジタル信号とを交互に転送し、さらに、前記第２の転送回路は前記第１のメモリが保持したデジタル信号と前記第２のメモリが保持したデジタル信号とを交互に転送し、前記出力比較部において、前記第１及び第２の転送回路のそれぞれから、前記第１及び第２のデジタル信号が交互に転送されるかを検出することで、前記転送部と前記第１及び第２のメモリの検査を行うことを特徴とする請求項１〜３のいずれかに記載のアナログデジタル変換回路。 The transfer unit includes first and second transfer circuits that transfer digital signals held by the first and second memories to the output comparison unit, respectively.
Instead of the examination of the first and second memories ,
Supplying pre Symbol test signal the first test signal supply unit to the first memory, after supplying the second test signal to said second memory, said first transfer circuit the first The digital signal held in the first memory and the digital signal held in the second memory are alternately transferred, and the second transfer circuit transfers the digital signal held in the first memory and the second memory. Are alternately transferred, and the output comparator detects whether the first and second digital signals are alternately transferred from the first and second transfer circuits, respectively. The analog-to-digital conversion circuit according to claim 1, wherein the transfer unit and the first and second memories are inspected.
前記出力比較部において、前記第１の転送回路と前記第２の転送回路とが転送するデジタル信号を互いに比較することで前記転送部の検査を行うことを特徴とする請求項５又は６に記載のアナログデジタル変換回路。 Before SL act of said first digital signal memory is held the first and second transfer circuit is transferred in synchronization, the second memory holding digital signal to said first and second transfer circuit Performs time-sharing with the synchronous transfer operation,
7. The output comparison unit according to claim 5, wherein the transfer unit is inspected by comparing digital signals transferred by the first transfer circuit and the second transfer circuit with each other. Analog-digital conversion circuit.
前記第１の転送回路にデジタル信号を転送する前記第１のメモリと、前記第２の転送回路にデジタル信号を転送する前記第１のメモリとが互いに隣接して配置された第１の組と、
前記第１の転送回路にデジタル信号を転送する前記第２のメモリと、前記第２の転送回路にデジタル信号を転送する前記第２のメモリとが互いに隣接して配置された第２の組と、を有し、
前記第１の組と前記第２の組とが交互に並んでいることを特徴とする請求項５〜７のいずれかに記載のアナログデジタル変換回路。 The memory for transferring a digital signal to the first transfer circuit and the memory for transferring a digital signal to the second transfer circuit are alternately arranged,
First set and the first memory to transfer the pre SL digital signal to the first transfer circuit, the first memory to transfer the digital signal to the second transfer circuit is arranged adjacent to each other When,
A second set in which the second memory for transferring a digital signal to the first transfer circuit and the second memory for transferring a digital signal to the second transfer circuit are arranged adjacent to each other; Have
The analog-digital conversion circuit according to claim 5, wherein the first set and the second set are alternately arranged.
前記第１のメモリは前記第１のテスト信号に基づいて前記カウント信号をデジタル信号として保持し、前記第２のメモリは前記第２のテスト信号に基づいて前記カウント信号をデジタル信号として保持することを特徴とする請求項１〜８のいずれかに記載のアナログデジタル変換回路。 A counter that supplies the count signal obtained by counting the clock signal in common to the plurality of memories;
Before SL first memory holds the count signal based on the first test signal as a digital signal, the second memory is the count signal retained as a digital signal on the basis of the second test signal 9. The analog-digital conversion circuit according to claim 1, wherein
複数の前記メモリの各々が前記クロック信号を計数したカウント信号を生成するカウンタを有し、
前記第１のメモリは前記第１のテスト信号に基づいて前記カウント信号をデジタル信号として保持し、前記第２のメモリは前記第２のテスト信号に基づいて前記カウント信号をデジタル信号として保持することを特徴とする請求項１〜８のいずれかに記載のアナログデジタル変換回路。 A clock signal supply unit for supplying a clock signal to the plurality of memories;
Each of the plurality of memories has a counter that generates a count signal obtained by counting the clock signal;
Before SL first memory holds the count signal based on the first test signal as a digital signal, the second memory is the count signal retained as a digital signal on the basis of the second test signal 9. The analog-digital conversion circuit according to claim 1, wherein
テスト装置に備えられたテスト信号供給部に、前記第１の回路部に含まれる第１のメモリ及び前記第２の回路部に含まれる第２のメモリを接続するための第１の端子と、同じく前記テスト装置に備えられた出力比較部に接続するための第２の端子と、前記第１及び第２のメモリのそれぞれが保持したデジタル信号を前記第２の端子を介して前記出力比較部に転送する転送部とを備え、
前記テスト信号供給部から前記第１のメモリに第１のデジタル信号を保持させるための第１のテスト信号、及び、前記第２のメモリに第２のデジタル信号を保持させるための第２のテスト信号を、前記第１及び第２のメモリにそれぞれ供給した後、前記出力比較部において、前記第１のメモリから転送されたデジタル信号と前記第１のデジタル信号とを比較し、また、前記第２のメモリから転送されたデジタル信号と前記第２のデジタル信号とを比較することによって、前記第１及び第２のメモリの検査を行うことを特徴とするアナログデジタル変換回路。 A plurality of circuit units each including a comparator that outputs a comparison result signal indicating a comparison result between the analog signal and the reference signal; and a memory that holds a digital signal based on the comparison result signal. An analog-to-digital conversion circuit that includes a first circuit unit including a part thereof and a second circuit unit including at least a part other than the first circuit unit, and converts the analog signal into a digital signal. There,
A first terminal for connecting a first memory included in the first circuit unit and a second memory included in the second circuit unit to a test signal supply unit provided in the test apparatus; Similarly, a second terminal for connection to an output comparison unit provided in the test apparatus, and a digital signal held in each of the first and second memories via the second terminal, the output comparison unit. And a transfer unit for transferring to
Before Symbol test signal supply section a first test signal for holding the first digital signal to said first memory, and said second memory for holding the second digital signal a second After supplying a test signal to each of the first and second memories, the output comparison unit compares the digital signal transferred from the first memory with the first digital signal, and An analog-to-digital conversion circuit characterized in that the first and second memories are inspected by comparing a digital signal transferred from a second memory with the second digital signal.
各々が光電変換部を含む複数の画素が複数列状に配置された画素部とを有し、
前記画素部の各列から出力されたアナログ信号が、前記アナログデジタル変換回路の各回路部の前記比較器に入力するように構成されたことを特徴とする撮像装置。 The analog-digital conversion circuit according to any one of claims 1 to 12,
A plurality of pixels each including a photoelectric conversion unit, and a pixel unit arranged in a plurality of columns,
An image pickup apparatus configured to input an analog signal output from each column of the pixel portion to the comparator of each circuit portion of the analog-to-digital conversion circuit.
前記撮像装置から出力されたデジタル信号を処理する信号処理部と、
を有することを特徴とする撮像システム。 An imaging device according to claim 13;
A signal processing unit for processing a digital signal output from the imaging device;
An imaging system comprising:
前記第１の回路部に含まれる第１のメモリに第１のデジタル信号を保持させるための第１のテスト信号を供給し、前記第２の回路部に含まれる第２のメモリに前記第１のデジタル信号とは異なる信号値の第２のデジタル信号を保持させるための第２のテスト信号を供給する工程と、
前記第１のメモリに保持されたデジタル信号と前記第１のデジタル信号とを比較し、また、前記第２のメモリに保持されたデジタル信号と前記第２のデジタル信号とを比較する工程と、
によって前記第１及び第２のメモリの検査を行うことを特徴とするアナログデジタル変換回路の検査方法。 A plurality of circuit units each including a comparator that outputs a comparison result signal indicating a comparison result between the analog signal and the reference signal; and a memory that holds a digital signal based on the comparison result signal. An analog-to-digital conversion circuit for converting the analog signal into a digital signal, comprising: a first circuit unit comprising a part thereof; and a second circuit unit comprising at least a part other than the first circuit unit. An inspection method,
Supplying a first test signal for holding the first digital signal in a first memory included in the first circuit portion before reporting, the second memory included in the second circuit portion first Providing a second test signal for holding a second digital signal having a signal value different from the one digital signal;
Comparing the digital signal held in the first memory with the first digital signal, and comparing the digital signal held in the second memory with the second digital signal;
A method for inspecting the analog-digital conversion circuit, wherein the first and second memories are inspected by
前記転送部によって、前記出力比較部に前記第１のメモリの保持するデジタル信号と、前記第２のメモリの保持するデジタル信号とが交互に転送されることを特徴とする請求項１５に記載のアナログデジタル変換回路の検査方法。 In the analog-digital conversion circuit, a plurality of the first memories and a plurality of the second memories are alternately arranged adjacent to each other, and are further held in the first and second memories. An output comparison unit that compares the digital signal that has been received with the first and second digital signals, and a transfer unit that transfers the digital signal held by each of the first and second memories to the output comparison unit; With
The front Symbol transfer unit, according to claim 15 in which the digital signals held in the first memory to the output comparator unit, a digital signal held in the second memory is characterized in that it is transferred alternately Inspection method for analog-digital conversion circuit.
前記第１の転送回路は前記第１のメモリが保持したデジタル信号を転送し、前記第２の転送回路は前記第２のメモリが保持したデジタル信号を転送し、
前記出力比較部において前記第１の転送回路が転送したデジタル信号と第１のデジタル信号とを比較し、また、前記第２の転送回路が転送したデジタル信号と前記第２のデジタル信号とを比較することで前記第１及び第２のメモリの検査を行うことを特徴とする請求項１５または１６に記載のアナログデジタル変換回路の検査方法。 The analog-to-digital conversion circuit further includes an output comparison unit that compares the digital signals held in the first and second memories with the first and second digital signals, and the first and second memories A transfer unit including first and second transfer circuits for transferring the held digital signals to the output comparison unit,
Prior Symbol first transfer circuit transfers the digital signal to the first memory is held, the second transfer circuit transfers the digital signal to which the second memory is held,
The output comparison unit compares the digital signal transferred by the first transfer circuit with the first digital signal, and compares the digital signal transferred by the second transfer circuit with the second digital signal. 17. The method for inspecting an analog-digital conversion circuit according to claim 15, wherein the first and second memories are inspected.
前記出力比較部において、前記第１及び第２の転送回路のそれぞれから、前記第１及び第２のデジタル信号が交互に転送されるかを検出することで、前記転送部の検査を行うことを特徴とする請求項１７に記載のアナログデジタル変換回路の検査方法。 Before SL supplies the first test signal to the first memory, after supplying the second test signal to the second memory, each of said first and second transfer circuit, the first Alternately transferring the digital signal transferred from the second memory and the digital signal transferred from the second memory,
In the output comparison unit, the transfer unit is inspected by detecting whether the first and second digital signals are alternately transferred from each of the first and second transfer circuits. The method for inspecting an analog-digital conversion circuit according to claim 17, wherein:
前記第１及び第２のメモリの前記検査の代わりに、
前記第１のメモリに前記第１のテスト信号を供給し、前記第２のメモリに前記第２のテスト信号を供給した後、前記第１及び第２の転送回路のそれぞれが、前記第１のメモリから転送されたデジタル信号と、前記第２のメモリから転送されたデジタル信号とを交互に転送し、前記出力比較部において、前記第１及び第２の転送回路のそれぞれから、前記第１及び第２のデジタル信号が交互に転送されるかを検出することで、前記転送部と前記第１及び第２のメモリの検査を行うことを特徴とする請求項１５又は１６に記載のアナログデジタル変換回路の検査方法。 The analog-to-digital conversion circuit further includes an output comparison unit that compares the digital signals held in the first and second memories with the first and second digital signals, and the first and second memories A transfer unit including first and second transfer circuits for transferring the held digital signals to the output comparison unit,
Instead of the examination of the first and second memories,
Before SL supplies the first test signal to the first memory, after supplying the second test signal to the second memory, each of said first and second transfer circuit, the first The digital signal transferred from the first memory and the digital signal transferred from the second memory are alternately transferred, and in the output comparison unit, the first and second transfer circuits respectively transmit the first signal and the second transfer circuit. 17. The analog-digital according to claim 15, wherein the transfer unit and the first and second memories are inspected by detecting whether the second digital signal and the second digital signal are alternately transferred. Inspection method of conversion circuit.
前記出力比較部において、前記第１の転送回路と前記第２の転送回路とが転送するデジタル信号を互いに比較することで前記転送部の検査を行うことを特徴とする請求項１７〜１９のいずれかに記載のアナログデジタル変換回路の検査方法。 Before SL act of said first digital signal memory is held the first and second transfer circuit is transferred in synchronization, the second memory holding digital signal to said first and second transfer circuit Performs time-sharing with the synchronous transfer operation,
20. The output comparing unit checks the transfer unit by comparing digital signals transferred by the first transfer circuit and the second transfer circuit with each other. An inspection method for an analog-digital conversion circuit according to claim 1.
前記画素部の各列から出力されたアナログ信号をデジタル信号に変換するアナログデジタル変換回路とを有し、前記アナログデジタル変換回路が、前記アナログ信号と参照信号との比較結果を示す比較結果信号を出力する比較器と、前記比較結果信号に基づいてデジタル信号を保持するメモリとを含む回路部を複数有し、該複数の回路部が、それらの一部から成る第１の回路部と、該第１の回路部以外の少なくとも一部から成る第２の回路部とを含む撮像装置の検査方法であって、
テストパターンを前記画素部で撮像することによって、前記第１の回路部に含まれる第１の比較器から第１のメモリに第１のデジタル信号を保持させるための第１のテスト信号を供給し、前記第２の回路部に含まれる第２の比較器から第２のメモリに前記第１のデジタル信号とは異なる信号値の第２のデジタル信号を保持させるための第２のテスト信号を供給する工程と、
前記第１のメモリに保持されたデジタル信号と前記第１のデジタル信号とを比較し、また、前記第２のメモリに保持されたデジタル信号と前記第２のデジタル信号とを比較する工程と、
によって前記第１及び第２のメモリの検査を行うことを特徴とする撮像装置の検査方法。 A pixel portion in which a plurality of pixels each including a photoelectric conversion portion are arranged in a plurality of columns;
An analog-to-digital conversion circuit that converts an analog signal output from each column of the pixel unit into a digital signal, and the analog-to-digital conversion circuit outputs a comparison result signal indicating a comparison result between the analog signal and a reference signal. A plurality of circuit units including a comparator for outputting and a memory for holding a digital signal based on the comparison result signal, the plurality of circuit units comprising a first circuit unit comprising a part thereof; An inspection method for an imaging apparatus including a second circuit unit including at least a part other than the first circuit unit,
By imaging the test pattern in the pixel unit, supplying a first test signal for holding the first digital signal to the first memory from the first comparator included in said first circuit section And a second test signal for holding a second digital signal having a signal value different from the first digital signal from the second comparator included in the second circuit unit to the second memory. Supplying, and
Comparing the digital signal held in the first memory with the first digital signal, and comparing the digital signal held in the second memory with the second digital signal;
An inspection method for an image pickup apparatus, wherein the first and second memories are inspected by:
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