JP2013026395A - Film inspection device and method of thin film solar cell - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method and a device capable of accurately performing film inspection on solar cells.SOLUTION: Plural cells connected to each other in series in a row direction are virtually divided in a predetermined length respectively in a column direction to obtain plural virtual divided units. Assuming that the divided units are aligned in a matrix, in a state that three probes are brought into contact with electrodes of the three virtual divided units aligned in the row direction, and two neighboring probes in the three probes are set as a set and two sets are irradiated with a beam of light from a light source, the two sets are subjected to a first measurement to obtain first current voltage characteristics of single power generation element of the virtual divided units. Subsequently, a second measurement is made with the two probes at both ends to obtain second current voltage characteristics of a combined power generation elements of the two virtual divided units connected to each other in the row direction. The first measurement and the second measurement are repeatedly performed to determine the state of the film in a solar cell module on the basis of the first current voltage characteristics and the second current voltage characteristics.

Description

  The present invention relates to a thin film solar cell deposition inspection apparatus and method.

  With the recent increase in environmental awareness, various types of solar cells are on the market. Among these, thin film solar cells such as compound solar cells and amorphous solar cells require a small amount of silicon and are attracting attention as a relatively inexpensive solar cell.

  In the manufacturing stage of a solar cell module such as a thin film solar cell, the film formation state of various films as components of the thin film solar cell and the like is appropriately evaluated before the step of making a final module, and the uniformity of the film formation is confirmed. If the degree can be determined, a thin-film solar cell module can be finally produced efficiently, which leads to a reduction in manufacturing cost. Patent Document 1 discloses an automatic quality control test apparatus for such a thin film solar cell. In the measurement method disclosed herein, the output of each cell constituting the solar cell module is measured by a movable probe, the measured value is compared with a predetermined value, and the measurement target cell is defective. It is determined whether or not.

US Pat. No. 7,554,346

  However, in the measurement method of Patent Document 1, the position of the light source is fixed, and the irradiance of each cell is uneven. For this reason, this measurement method cannot accurately determine whether or not each cell has a defect.

  In general, the electrical characteristics of a thin film solar cell vary depending on the film formation state. Therefore, when the cells are joined to each other and the film formation state of each cell is different, a loss of power generation due to the joining of the cells occurs. In Patent Document 1, no mention is made of this loss measurement.

  The subject of this invention is providing the method and apparatus which can implement the film-forming test | inspection in a solar cell module more accurately in view of the above problems.

The thin film solar cell film formation inspection apparatus of the present invention is
A solar cell module film forming inspection apparatus in which a plurality of cells having a length in a column direction are sequentially connected in series in a row direction,
By considering each cell to be composed of a plurality of virtual division units virtually divided for each predetermined length in the column direction, the solar cell module is arranged in a matrix form of the plurality of virtual division units A measurement unit that performs measurement on the assumption that the measurement unit includes at least three probes that scan the virtual division unit, and in the scan, the three probes are used as electrodes of the three virtual division units arranged in a row direction. The first measurement for obtaining the first current-voltage characteristic as the performance of the single power generation element of the virtual divided unit is performed by a total of two sets of two adjacent probes in contact with each other. And the second as the performance of the combined power generation element of the two virtual divided units connected to each other in the row direction by the two probes at both ends. Performing a second measurement to obtain a current-voltage characteristic, and a measuring section,
A light source for illuminating the virtual dividing unit;
A moving mechanism that moves the measurement unit and the light source in a two-dimensional direction in synchronization with each other in a fixed positional relationship;
With
Furthermore, the measurement unit is configured to repeat the first measurement and the second measurement while scanning.
Further, the film formation state of the solar cell module is determined based on the first current voltage characteristics and the second current voltage characteristics obtained each time the first measurement and the second measurement are performed. Is configured to include a determination device.

Furthermore, the film formation inspection method for the thin film solar cell of the present invention is
A method for inspecting film formation of a solar cell module in which a plurality of cells having a length in a column direction are sequentially connected in series in a row direction,
Each cell is virtually divided into predetermined lengths in the column direction to form a plurality of virtual division units, and the solar cell module is assumed to be arranged in a matrix in the plurality of virtual division units,
A total of two sets of the three probes in the measurement unit are brought into contact with the electrodes of the three virtual division units arranged in the row direction, and two adjacent probes among the three probes are used as a light source. In the irradiated state, in each of the two sets, the first measurement for obtaining the first current-voltage characteristic of the single power generation element of the virtual split unit is performed, and the two probes at both ends perform the first measurement. Performing a second measurement to obtain a second current-voltage characteristic of the combined power generation element of the two virtual divided units connected in the direction;
The first measurement and the second measurement are repeated for a plurality of the virtual division units by moving the light source and the measurement unit in a two-dimensional direction in synchronization with each other in a fixed positional relationship,
Determining the film formation state of the solar cell module based on the first current-voltage characteristics and the second current-voltage characteristics obtained each time the first measurement and the second measurement are performed;
Configured as a thing.

  ADVANTAGE OF THE INVENTION According to this invention, the production | generation state of the thin film of a thin film solar cell can be test | inspected from the viewpoint of both sides of the power generation performance for every position, and the transmission performance for every position.

It is a figure explaining embodiment of this invention, Comprising: (a) The perspective view of a certain thin film solar cell module as a test object, (b) It is explanatory drawing which shows the example of a scan. It is a perspective view which shows the positional relationship of the measurement part (probe) and light source in one measurement state in embodiment of this invention, (a) When a solar cell module is a thin film silicon type solar cell module, (b) Sun It is a figure in case a battery module is a chalcopyrite type compound solar battery module. An equivalent circuit diagram at the time of measurement in an embodiment of the present invention is shown. In embodiment of this invention, it is perspective explanatory drawing which shows the example of the apparatus which drives a measurement part and a light source synchronously when a solar cell module has a light-receiving surface and an electrode on the opposite side. (A) is a perspective view which shows the example from which the said apparatus differs, (b), (c) is side explanatory drawing of the state where the probe fell and the state where it raised, respectively. In embodiment of this invention, when a solar cell module has a light-receiving surface and an electrode in the same side, it is a perspective explanatory view which shows the example of the apparatus which drives a measurement part and a light source synchronously. (A) shows the power generation performance of the virtual division unit itself, and (b) shows an example of the transmission performance between the virtual division units as an image. It is a flowchart of an example of the test | inspection of this invention.

  Although the embodiment of the present invention will be described in detail later, the measurement by the measurement unit and the illumination by the light source are performed in the same positional relationship, the same area of the solar cell module can be evaluated while irradiating with the same light, and further by the light source This is advantageous in that the problem of so-called optical uniformity can be eliminated. In order to achieve this, in the embodiment of the present invention, the entire surface of the solar cell module is covered by scanning of the measurement unit.

  Fig.1 (a) shows the solar cell module 1 as a measuring object.

  Although there are various types of solar cell modules 1, FIG. 1 (a) shows a case where there are a light receiving surface and electrodes on both sides of the solar cell module, respectively.

  This solar cell module 1 has a plurality of cells 2 [2 (A1), 2 (A2),..., 2 (Ax)] having a length in the Y direction (column direction) in the drawing. The plurality of cells 2 are arranged in the X direction (row direction) in the figure, and those adjacent in the X direction (row direction) are sequentially connected (joined) and electrically connected in series. . As will be described later, each cell 2 is virtually divided into a plurality of virtual division units 3, 3,.

  FIG. 2A shows an example of the detailed structure of the solar cell module 1. That is, as can be seen from FIG. 2 (a), each of the cells 2 [2 (A0), 2 (A1),...] Constituting the solar cell module 1 is laminated on a common glass substrate 100. The ITO film 101, the Si layer 102, and the electrode 103 are provided. Further, the electrodes 103 of the cells 2 and 2 adjacent to each other in the X direction (row direction) and the ITO film 101 are electrically connected (joined) sequentially. Due to this connection, in some cases, a decrease in inter-cell transmission performance (inter-cell junction loss) can be considered as an effect on electrical characteristics. This inter-cell junction loss is the object of measurement in the embodiment of the present invention. In other words, in the embodiment of the present invention, the power generation performance as a combined power generation element of two connected cells (more specifically, as described later, two connected virtual division units) is a measurement target. Naturally, in the embodiment of the present invention, the power generation performance as a single power generation element of a single cell (specifically, as will be described later, one virtual divided unit) can be measured. As will be described later, the inter-cell junction loss is obtained from the difference between the power generation performance as a single power generation element and the power generation performance as a combined power generation element.

  For example, as shown in FIG. 1 (a), each cell 2 having a length along the Y direction (column direction) is assumed to be virtual for each predetermined length indicated by a dotted line along the Y direction (column direction). Are divided into a plurality of virtual division units 3. For example, cell 2 (A0) is virtually assigned to a plurality of virtual division units 3 [3 (A0, B1), 3 (A0, B2), 3 (A0, B3),..., 3 (A1, By)]. Is divided. The other cells 2 [2 (A1) -2 (Ax)] are virtually divided into predetermined lengths along the Y direction (column direction) in the same manner as this. By such virtual division, in the thin-film silicon-based solar cell module 1, as can be seen from FIG. 1A, a plurality of virtual division units 3 [3 (A0, B1) -3 (Ax, By)] Are arranged in a matrix. That is, it is considered that the virtual division units 3, 3 are arranged in a matrix of y rows × (x + 1) columns. Here, in the embodiment of the present invention, as described briefly above, each of the virtual division units 3 is considered to function as a single power generation element that can generate power. Further, it is considered that the two virtual division units 3 and 3 arranged in the row direction are combined to function as a combined power generation element. Therefore, in the embodiment of the present invention, the plurality of virtual division units 3 are assumed to be individual power generation elements, and measurement is performed as described later. In addition, measurement is performed using a plurality (for example, two) of virtual division units 3 arranged in the X direction (row direction) as a combined power generation element. Further, the junction loss of, for example, two virtual division units 3 and 3 arranged in the X direction is measured. In these measurements, it is natural to irradiate the virtual division units 3 and 3 to be measured with a light source.

  In the embodiment of the present invention, as can be seen from the above, not only the single power generation performance of the virtual divided unit 3 but also the combined power generation performance of the virtual divided units 3 and 3 arranged in the X direction (row direction). In addition, so-called inter-cell junction loss is also measured. In order to achieve this, as can be seen from FIG. 2A, the measurement unit 5 is provided with three or more probes 5a, 5b, 5c.

  FIG. 2A shows a specific structure of the measurement unit 5 and an actual measurement state. That is, as shown in FIG. 2A, the three probes 5a, 5b, and 5c in the measuring unit 5 are arranged in three virtual division units 3 (A0, B1), 3 (A1, B1) and 3 (A2, B1) are in contact with the upper electrodes 103, 103, 103. The equivalent circuit at this time is shown in FIG. As can be seen from this equivalent circuit, the virtual divided units 3 (A1, B1), 3 (A2, B1) are power generation elements as measurement objects.

  At this time, as can be seen from FIG. 2A and FIG. 3, the current-voltage characteristics (IV characteristics) of the virtual divided unit 3 (A1, B1) by the probes 5a, 5b of the three probes 5a, 5b, 5c. Is measured (first measurement), and the current-voltage characteristic IVb of the virtual divided unit 3 (A2, B1) is measured by the probes 5b and 5c (first measurement). taking measurement. The second current-voltage characteristic (synthetic power generation performance) corresponding to the current-voltage characteristic (IV characteristic) of the virtual divided units 3 (A1, B1) and 3 (A2, B1) connected in series by the probes 5a and 5c. IVc is measured (second measurement).

  The first current-voltage characteristics (single power generation performance) as a single unit of each virtual divided unit 3 are obtained by the first current-voltage characteristics IVa and IVb measured in this way, and two adjacent virtual voltages are obtained from the current-voltage characteristics IVc. A second current-voltage characteristic (synthetic power generation performance) in which the divided units 3 and 3 are joined is obtained.

  That is, in the embodiment of the present invention, since the three current-voltage characteristics (IV characteristics) are measured, the IV characteristics of individual cells (virtual division units) can be measured, and further cells adjacent in the row direction ( It is possible to measure the transfer characteristics of the virtual divided units).

  From the measured current-voltage characteristics IVa and IVb, for example, the short circuit current Isc, the release voltage Voc, the maximum output Pmax, the conversion efficiency FF, the series resistance Rs, and the like of each virtual divided unit 3 can be obtained. Further, the junction loss between the cells of the two virtual divided units 3 and 3 adjacent to each other from the current-voltage characteristics IVa, IVb, IVc can be obtained from the current-voltage characteristics (IVa + IVb) -IVc.

  More specifically, attention is focused on the maximum output PmaxA of the virtual division unit 3 (A1, B1), the maximum output PmaxB of the virtual division unit 3 (A2, B1), and these two maximum outputs PmaxC. Now, if PmaxA≈PmaxB, the maximum output PmaxC between the two points is almost the same as PmaxA + PmaxB, so that the balance between the two cells is good and the transmission performance between the cells is good. On the other hand, for example, when PmaxA> PmaxB, PmaxC does not become PmaxA + PmaxB. This is because PmaxB having a low output becomes a bottleneck, and the maximum output operating current ipm of PmaxA is suppressed to a value equivalent to PmaxB. The reason why PmaxA and PmaxB are not equal is considered to be due to non-uniform film formation. When PmaxA and PmaxB are not equal, as described above, only the current having the lower output of PmaxA and PmaxB flows through each cell, which is a loss of the amount of power generated due to the junction of the cells. Therefore, according to the embodiment of the present invention, the cell-to-cell transmission performance that greatly affects the power generation efficiency of the solar cell can be measured at an arbitrary position, and the film formation state in the entire solar cell module can be determined satisfactorily. .

  At the time of measuring such current-voltage characteristics IVa, IVb, IVc, as briefly described above, as can be seen from FIG. 2A, the light source 7 uses two virtual divided units 3 (A1, B1), 3 (A2, B1) is evenly irradiated from below. In FIG. 2A, since the solar cell module 1 having a light receiving surface and an electrode on different surfaces is used, the solar cell module 1 is sandwiched between the light source 7 and the measurement unit 5. In addition, although it explains in full detail later, when the chalcopyrite compound solar cell module by the chalcopyrite compound (CIGS) in which a light-receiving surface and an electrode are on the same surface is used as the solar cell module 1, a probe (measurement unit) Naturally, the light source must be located on the same side as 5A).

  The measurement of the current-voltage characteristics as described above is performed on the virtual division unit 3 on the entire surface by scanning the solar cell module 1 with the probes 5a, 5b, and 5c. At this time, in the embodiment of the present invention, as can be seen from FIG. 2A, the measurement unit 5 and the light source 7 are fixed with respect to the solar cell module 1 so that the relative positional relationship between the measurement unit 5 and the light source 7 is fixed. In this state, even if the measurement position changes, the two virtual division units 3 and 3 as the measurement target are irradiated with the same illuminance even if the measurement position changes. In this way, the entire surface of the solar cell module 1 is so-called scanned while irradiating the two virtual division units 3 and 3 as the measurement object with the same illuminance. Various scanning methods can be used. Referring to FIG. 1B, the scan of the first mode will be described. In the first row B1, three probes 5a, 5b, and 5c are moved from the coordinate position T (A1-A3, B1) along the arrow ARxf. Move in the direction and scan to the coordinate position T (Ax-2-Ax, By). Thereafter, the same scanning as described above is performed with the three probes 5a, 5b, and 5c as the coordinate position T (A1-A3, B2). This is repeated, and the three probes 5a, 5b, and 5c scan to the final coordinate position (Ax-2-Ax, By).

  This scan can also be performed in a second mode such as so-called one-stroke writing. That is, when the coordinate position T (A1-A3, B1) reaches the coordinate position T (Ax-2-Ax, By), it moves to the coordinate position (Ax-2-Ax, B2) and reverses along the arrow ARxr. Move in the direction and scan to the coordinate position (A1-A3, B2). Thereafter, this scanning operation is repeated. In such a scan, it is natural that the light source 7 is moved following the measuring unit 5A.

  As described above, in the embodiment of the present invention, not only the measurement unit 5 is moved in the scan, but the measurement unit 5 and the light source 7 are simultaneously moved while maintaining a relative position. That is, the measuring unit 5 and the light source 7 are moved synchronously with the relative position being fixed in a state where the solar cell module 1 is sandwiched. Thereby, even if the measurement position of the measurement unit 5 is changed by scanning, the light source 7 continuously irradiates the two virtual division units 3 and 3 as the measurement target with the same illuminance. Thereby, even if a measurement position changes by a scan, the measurement of the two virtual division units 3 and 3 by the measurement part 5 can be performed appropriately in a state without irradiation unevenness.

  As shown in FIG. 1A, in the embodiment of the present invention, three probes 5a, 5b, and 5c of the measurement unit 5 are provided, and these are moved in the XY directions for measurement. For this reason, for example, regarding the virtual division unit 3 (A2, B1) in the B1 row of the solar cell module 1, the single power generation performance of the virtual division unit 3 (A2, B1) itself is measured twice. Therefore, the single power generation performance can be obtained as a more appropriate value using the two measured values. For example, it is possible to take an arbitrary measure such as taking an average value of two measurement values, discarding a measurement value above / below a certain value, and using the remaining measurement value.

  The case where there are three probes of the measurement unit 5 has been described above. If a predetermined condition, for example, a plurality of virtual division units as measurement targets by the light source 7 can be evenly irradiated and the measurement unit can be configured to have a desired number of probes, the number of probes can be increased to four or more. . In this way, the measurement time can be shortened.

  Various configurations can be employed to move the measurement unit 5 and the light source 7 in a synchronized manner while maintaining the relative positions. Examples thereof will be described with reference to FIGS. As described above, these examples are examples in which a solar cell module having a light receiving surface and an electrode on different surfaces as shown in FIG. 2A is used as the solar cell module 1. 4 and 5, the solar cell module 1 as a measurement target is sandwiched between the measurement unit and the light source, but the illustration of the solar cell module is omitted here. The measurement unit 5 and the light source 7 are simplified as blocks.

  First, the apparatus shown in FIG. 4 will be described. The upward movement mechanism 11 in this apparatus is configured to be movable in the Z direction (up and down direction). The upper movement mechanism 11 includes a pair of upper support portions 11a and 11a that face each other in the X direction (row direction), and an upper connection portion 11b that connects these. As can be seen from FIG. 4, the upper connecting portion 11b is attached to the upper support portion 15a so as to be movable in the Y direction (row direction). The measuring part 5 is attached to the upper connecting part 11b so as to be movable in the X direction. Thereby, the measurement part 5 is movable along the X, Y, and Z axes. Although the probes 5a, 5b, and 5c are not shown, the probes 5a, 5b, and 5c are brought into and out of contact with the solar cell module by moving the upper moving mechanism 11 up and down. In order to reduce the impact when the probes 5a, 5b, 5c are brought into contact with the solar cell module, it is desirable to set the descending speed and the contact pressure appropriately.

  The lower moving mechanism 13 is configured in substantially the same manner. That is, the lower moving mechanism 13 can also be configured to be movable in the Z direction (vertical direction). The lower movement mechanism 13 includes a pair of lower support portions 13a and 13a that face each other in the X direction, and a lower connection portion 13b that connects them. As can be seen from FIG. 4, the lower connecting portion 13b is attached to the lower support portion 13a so as to be movable in the Y direction. The light source 7 is attached to the lower connecting portion 13b so as to be movable in the X direction. Thereby, the light source 7 is movable at least along the X and Y axes.

  As described above, the measurement unit 5 and the light source 7 are configured to move synchronously while maintaining the positional relationship in the XY plane. That is, the measurement unit 5 and the light source 7 move while maintaining a relative position in the XY plane. Thereby, for example, the two virtual division units 3 and 3 to be measured are always irradiated in the same manner even if the measurement position is changed by scanning.

  Next, the apparatus shown in FIG. Similarly to the apparatus of FIG. 4, this apparatus is also capable of moving in the X direction (row direction) and the Y direction (column direction) in synchronization with the measurement unit 5 and the light source 7 being fixed in relative positions. That is, this apparatus includes a moving mechanism 15. By this moving mechanism 15, the measuring unit 5 and the light source 7 can be moved synchronously along at least the X direction (row direction) and the Y direction (column direction) while maintaining their relative positions. . The movement mechanism 15 includes a basic support portion 15A that runs in the Y direction and a movement support portion 15B that runs in the X direction. The moving support portion 15B is attached to the basic support portion 15A so as to be movable in the Y direction. The movement support portion 15B includes an upper attachment portion 15a, a lower attachment portion 15b, and a connecting portion 15c that integrates them. The measurement part 5 is attached to the upper attachment part 15a, and the light source 7 is attached to the lower attachment part 15b. As can be seen from FIGS. 5B and 5C, the probes 5a, 5b, and 5c in the measurement unit 5 perform measurement and movement, and therefore, the probes 5a and 5b are connected to the solar cell module 1 by various drive mechanisms. , 5c can be contacted and separated. As this drive mechanism, for example, a drive mechanism including an actuator and a spring can be employed.

  As described above, such a scan is performed to obtain the first current-voltage characteristics IVa, IVb, IVc for each measurement position. From these measured values, various single power generation performances of the virtual divided units are obtained by the arithmetic device. Further, the combined power generation performance (cell junction efficiency) is obtained from the second current-voltage characteristic (IVa + IVb) −IVc by an arithmetic device. Based on these data, the characteristics of the solar cell can be measured. That is, various characteristics such as the short-circuit current Isc can be obtained from the current-voltage characteristics (single power generation performance) of each virtual divided unit, and the current-voltage characteristics (synthetic power generation performance) of the two virtual divided units 3 and 3. From this, transmission performance can be obtained.

  The single power generation performance and the combined power generation performance obtained in this way are arranged by an arithmetic processing unit. The image processing apparatus performs an operation based on the arrangement, and displays the power generation performance of the so-called cell (virtual division unit) itself and the transmission performance between cells (between virtual division units) as images.

  FIG. 7 shows an example of image display. (A) shows the power generation performance of the cell (virtual division unit) itself, and (b) shows the transmission performance between cells (between virtual division units). 7A and 7B, the display method of each small window is different because the single power generation characteristic of each virtual divided unit itself is different and the combined current-voltage characteristic between the virtual divided units is different. This is an image. Therefore, it is natural that the number of small windows, that is, the number of rows, is smaller by one in the number of small windows in (b) than in FIG.

  The above description has been given for the case where the light receiving surface and the electrode are on opposite surfaces as the solar cell module 1. On the other hand, the case where the light receiving surface and the electrode are on the same surface side as the solar cell module 1 as in the chalcopyrite compound solar cell module will be described. In this case as well, the above explanation and the basic idea are the same. However, the chalcopyrite-based compound solar cell module differs from the thin-film silicon-based solar cell module 1 in the following points due to the presence of the electrode on the light receiving surface side.

  That is, as can be seen from FIG. 2B, in the case of the chalcopyrite compound solar cell module, unlike the case of FIG. 2A, it is necessary to provide the measurement unit and the light source on the same side. For this reason, the structure of a specific measurement apparatus is different.

  FIG.2 (b) is sectional explanatory drawing which shows an example of the measurement state in the case of a chalcopyrite type compound solar cell module. In FIG. 2B, attention is focused on one cell 2 (A1) in the chalcopyrite compound solar cell module. The cell 2 (A1) includes a lower electrode 110, a light absorption layer (CIGS) 111, a buffer layer 112, a transparent electrode 113, and an upper electrode 114 formed on a common substrate 100. The transparent electrode 114 is connected to the lower electrode 110 of the cell 2 (A2) adjacent in the X direction.

  In FIG. 2B, the measurement unit 5A and the light source 7A are located on the same side. The probes 5a, 5b, and 5c of the measurement unit 5A are in contact with the upper electrodes 114 of the cells 2 (A1), 2 (A2), and 2 (A3), respectively. The light source 7 uniformly irradiates at least the light absorption layers 111 of the two virtual divided units in the cells 2 (A1) and 2 (A2). And similarly to the case of the previous embodiment, even when the measurement unit 5A and the light source 7A are moved by scanning the solar cell module 1, they move synchronously while maintaining the same position. Irradiate the virtual divided unit of two new cells 2 equally.

  FIG. 6 shows an example of an apparatus for driving the measurement unit 5A and the light source 7A shown in FIG. This apparatus is different from the apparatus of FIGS. 4 and 5 described above in that the measurement unit 5A and the light source 7A are on the same side as described above. In practice, this device is used, for example, with the top and bottom inverted. A chalcopyrite compound solar cell module is installed below the inverted device with the light receiving surface and the terminal surface positioned above.

  As shown in FIG. 6, this apparatus includes a pair of support portions 21a and 21a in which the moving mechanism 21 runs in the Y direction. A connecting portion 21b is provided between the support portions 21a and 21a so as to be movable in the Y direction. The measuring part 5A and the light source 7A are attached to the connecting part 21b so as to be movable along the X direction. The measurement unit 5A is configured in a so-called frame shape. The measurement unit 5A includes three probes 5a, 5b, and 5c as in the measurement unit 5 of FIG. 2, but is not illustrated. A light source 7A is provided in a gap inside the frame-shaped measuring unit 5A. Thereby, light is irradiated toward the light receiving surface of each virtual divided unit of the chalcopyrite compound solar cell module, and the electric signal generated thereby is measured as single power generation performance and combined power generation performance by the measurement unit 5A. .

  Next, an example of a measurement procedure according to the embodiment of the present invention will be described with reference to FIG.

  The scan in this procedure employs the procedure of the first scan mode described above with reference to FIG.

  First, the measurement unit 5 is moved to the start position [3 (A1, B1), 3 (A2, B1), 3 (A3, B1)] (S1).

  First, at the start position, single current voltage characteristics IVa, IVb, IVc are measured (S2).

  The measurement results at the start position are arranged by an arithmetic processing unit to obtain arrangement data (S3).

  Further, the combined current-voltage characteristics (IVa + IVb) -IVc are obtained from these measurement results by the arithmetic processing unit and arranged to obtain array data (S4).

  The above processing is repeated for all columns (columns) B2-By (S5, S6, S1-S4).

  Next, the measuring unit 5 is shifted by one to the right in FIG. 1A in the row (row) B1, and the coordinates [3 (A1, B1), 3 (A2, B1), 3 (A3, B1) ] And repeat the above process (S7-S9, S2-S6).

  That is, steps S2-S9 can be said to be so-called data collection steps.

  In this way, when the measurement for all the virtual divided units 3, 3,... Of the solar cell module is completed, an image is displayed from the array data as shown in FIGS. S10).

  Next, the array data and the defective value are compared (S11).

  The result of the comparison is judged based on a predetermined reference value, a pass / fail (OK, NG) as a product is determined (S12), OK display and NG display are performed (S13, S14), and the measurement is terminated.

2 cell 3 virtual division unit 5 measuring section 5a-5c probe 7 light source 13 moving mechanism

Claims (10)

A solar cell film formation inspection apparatus in which a plurality of cells having a length in a column direction are sequentially connected in series in a row direction,
By considering each cell to be composed of a plurality of virtual division units virtually divided for each predetermined length in the column direction, the solar cell module is arranged in a matrix form of the plurality of virtual division units A measurement unit that performs measurement on the assumption that the measurement unit includes at least three probes that scan the virtual division unit, and in the scan, the three probes are used as electrodes of the three virtual division units arranged in a row direction. The first measurement for obtaining the first current-voltage characteristic as the performance of the single power generation element of the virtual divided unit is performed by a total of two sets of two adjacent probes in contact with each other. And the second as the performance of the combined power generation element of the two virtual divided units connected to each other in the row direction by the two probes at both ends. Performing a second measurement to obtain a current-voltage characteristic, and a measuring section,
A light source for illuminating the virtual dividing unit;
A moving mechanism that moves the measurement unit and the light source in a two-dimensional direction in synchronization with each other in a fixed positional relationship;
With
Furthermore, the measurement unit is configured to repeat the first measurement and the second measurement while scanning.
Further, the film formation state of the solar cell module is determined based on the first current voltage characteristics and the second current voltage characteristics obtained each time the first measurement and the second measurement are performed. A solar cell film formation inspection apparatus, comprising: a determination device.   Based on the first current-voltage characteristics obtained in each of the two sets and the second current-voltage characteristics of the combined power generation element, two adjacent cells in the row direction by connecting the cells in the row direction The solar cell film-formation inspection apparatus according to claim 1, further comprising an arithmetic processing unit that calculates an inter-cell junction loss of the virtual division unit. An arithmetic processing unit that arranges the first current-voltage characteristic and the second current-voltage characteristic obtained each time the first measurement and the second measurement are performed;
An image processing device that performs image processing according to an array, and displays power generation performance for each of the virtual division units and transmission performance between the connected virtual division units as images,
The film formation inspection apparatus for a solar cell according to claim 1, further comprising:   4. The solar cell film formation inspection apparatus according to claim 1, wherein the light source and the measurement unit are arranged on opposite surfaces of the solar cell module. 5.   4. The solar cell film formation inspection apparatus according to claim 1, wherein the light source and the measurement unit are arranged on the same surface side of the solar cell module. 5. A method of inspecting film formation of a solar cell in which a plurality of cells having a length in a column direction are sequentially connected in series in a row direction,
Each cell is virtually divided into predetermined lengths in the column direction to form a plurality of virtual division units, and the solar cell module is assumed to be arranged in a matrix in the plurality of virtual division units,
A total of two sets of the three probes in the measurement unit are brought into contact with the electrodes of the three virtual division units arranged in the row direction, and two adjacent probes among the three probes are used as a light source. In the irradiated state, in each of the two sets, the first measurement for obtaining the first current-voltage characteristic of the single power generation element of the virtual split unit is performed, and the two probes at both ends perform the first measurement. Performing a second measurement to obtain a second current-voltage characteristic of the combined power generation element of the two virtual divided units connected in the direction;
The first measurement and the second measurement are repeated for a plurality of the virtual division units by moving the light source and the measurement unit in a two-dimensional direction in synchronization with each other in a fixed positional relationship,
Determining the film formation state of the solar cell module based on the first current-voltage characteristics and the second current-voltage characteristics obtained each time the first measurement and the second measurement are performed; A method for inspecting the film formation of a solar cell.   From the first current-voltage characteristic for each of the two sets and the second current-voltage characteristic for the combined power generation element, two virtual lines adjacent in the row direction by connecting the cells in the row direction The method for inspecting the film formation of a solar cell according to claim 6, wherein an inter-cell junction loss of the divided unit is calculated.   Performing an operation for arranging the first current voltage characteristic and the second current voltage characteristic obtained each time the first measurement and the second measurement are performed, and performing image processing according to the arrangement; 7. The method for inspecting film formation of a solar cell according to claim 6, wherein the power generation performance for each virtual division unit and the transmission performance between the connected virtual division units are each displayed as an image.   The solar cell film formation inspection method according to claim 6, wherein the light source and the measurement unit are arranged on opposite sides of the solar cell module.   The solar cell film formation inspection method according to claim 6, wherein the light source and the measurement unit are arranged on the same surface side of the solar cell module.

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