JP2013015681A5 - - Google Patents

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Publication number
JP2013015681A5
JP2013015681A5 JP2011148463A JP2011148463A JP2013015681A5 JP 2013015681 A5 JP2013015681 A5 JP 2013015681A5 JP 2011148463 A JP2011148463 A JP 2011148463A JP 2011148463 A JP2011148463 A JP 2011148463A JP 2013015681 A5 JP2013015681 A5 JP 2013015681A5
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JP
Japan
Prior art keywords
scanning confocal
confocal observation
reflecting
rotating member
observation apparatus
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Application number
JP2011148463A
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English (en)
Japanese (ja)
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JP2013015681A (ja
JP5726656B2 (ja
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Priority to JP2011148463A priority Critical patent/JP5726656B2/ja
Priority claimed from JP2011148463A external-priority patent/JP5726656B2/ja
Publication of JP2013015681A publication Critical patent/JP2013015681A/ja
Publication of JP2013015681A5 publication Critical patent/JP2013015681A5/ja
Application granted granted Critical
Publication of JP5726656B2 publication Critical patent/JP5726656B2/ja
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JP2011148463A 2011-07-04 2011-07-04 ディスク走査型共焦点観察装置 Active JP5726656B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011148463A JP5726656B2 (ja) 2011-07-04 2011-07-04 ディスク走査型共焦点観察装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011148463A JP5726656B2 (ja) 2011-07-04 2011-07-04 ディスク走査型共焦点観察装置

Publications (3)

Publication Number Publication Date
JP2013015681A JP2013015681A (ja) 2013-01-24
JP2013015681A5 true JP2013015681A5 (cg-RX-API-DMAC7.html) 2014-07-17
JP5726656B2 JP5726656B2 (ja) 2015-06-03

Family

ID=47688411

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011148463A Active JP5726656B2 (ja) 2011-07-04 2011-07-04 ディスク走査型共焦点観察装置

Country Status (1)

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JP (1) JP5726656B2 (cg-RX-API-DMAC7.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6579618B2 (ja) * 2014-12-17 2019-09-25 オリンパス株式会社 走査装置、共焦点観察装置、及びディスク走査装置
US9733462B2 (en) 2014-12-17 2017-08-15 Olympus Corporation Scanning apparatus, confocal observation apparatus and disk scanning apparatus

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5386317A (en) * 1992-05-13 1995-01-31 Prometrix Corporation Method and apparatus for imaging dense linewidth features using an optical microscope
JP4315794B2 (ja) * 2002-12-27 2009-08-19 オリンパス株式会社 共焦点顕微鏡
JP4086664B2 (ja) * 2003-01-07 2008-05-14 三菱電機株式会社 照明光学系構造及び投写型表示装置
JP2005195739A (ja) * 2004-01-05 2005-07-21 Nikon Corp 共焦点光学系及び高さ測定装置

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