JP2013002992A - Cross-sectional area measuring device, program - Google Patents

Abstract

PROBLEM TO BE SOLVED: To accurately measure a cross-sectional area of a measuring object.SOLUTION: A displacement measuring device (cross-sectional area measuring device) measures displacement in a plurality of measuring points in a cross-sectional shape output range where a measuring object is mounted, selects intermediate displacement information except displacement contained in a predetermined first proportion from the greatest side and except displacement contained in a predetermined second proportion from the smallest side when a plurality of pieces of displacement information corresponding to the plurality of the measuring points are ordered according to their sizes, when calculating shape data of the measuring object from the measured displacement, and measures a cross-sectional area of the measuring object by adding compression displacement information in which compression processing has been applied to the intermediate displacement information using a compression coefficient.

Description

  The present invention relates to a technique for measuring a cross-sectional area of a measurement object.

  For example, a displacement measuring apparatus that irradiates a measurement object with light such as laser light and measures displacement information of the measurement object is known (for example, Patent Document 1). In this apparatus, light such as laser light is emitted to a measurement object, reflected light reflected in the coaxial direction with the emitted light is received, and displacement information is measured. By receiving the reflected light reflected in the coaxial direction, the shape range of the measurable measurement object can be expanded compared to when measuring displacement information using reflected light reflected in a different direction from the emitted light. it can. The displacement measuring device analyzes the received reflected light and measures displacement information between the reflecting surface on which the emitted light is reflected and the displacement measuring device. In this apparatus, displacement information between the measurement object and the displacement measurement device is measured from the reflected light reflected from the surface of the measurement object, and the surface of the base member on which the measurement object is placed and the displacement measurement device The height of the measurement object can be measured by subtracting the displacement information between the measurement object and the displacement measurement device from the displacement information between Moreover, the cross-sectional area and cross-sectional shape of the measurement object in the predetermined cross section can be measured by measuring the height while moving the measurement object along the predetermined cross section of the measurement object.

JP-T-2002-504716

  However, in a displacement measuring apparatus that receives reflected light reflected in the coaxial direction, the inclination of the surface of the measurement object that can be measured without error is limited. Therefore, when measuring the cross-sectional shape of a measurement object, the surface of the measurement object can be measured without error at a part of the cross-section for measuring the cross-sectional shape of a measurement object whose surface inclination continuously changes. Even if it is an inclination, the measurement error on the surface of the measurement object may become large in another part of the cross-section for measuring the cross-sectional shape. In the part where the measurement error on the surface of the measurement object becomes large, the displacement information of the measured object does not indicate the actual shape of the measurement object, and the cross-sectional area of the measurement object is measured accurately. There was a problem that could not be done.

  The present specification discloses a new technique for measuring the cross-sectional area of an object to be measured.

  A cross-sectional area measuring apparatus according to the present invention is a cross-sectional area measuring apparatus that measures a cross-sectional shape of a measuring object from a displacement of a measuring object having translucency placed on the surface of a base member, and the base member And a light output part that emits light toward at least one of the measurement objects in a vertical direction, and the light is reflected in the coaxial direction from at least one of the surface of the base member and the surface of the measurement object with the emission. A cross-sectional area measurement for measuring the cross-sectional area of the object to be measured by analyzing the frequency of the interference light, and a light-receiving unit that receives the interference light that interferes with the reflected light passing through the birefringent crystal and the polarizing means. When a detection unit that detects displacement information at a plurality of detection points in the range and a plurality of displacement information corresponding to the plurality of detection points are ordered by size, the first ratio is set in advance from the largest side. included A compression value that is an average value of intermediate displacement information excluding position information and displacement information included in a predetermined second ratio from the smallest side is calculated, and each displacement information is subtracted from the compression value. A calculation unit that calculates a difference value, calculates a difference obtained by multiplying the difference value by a predetermined compression coefficient, and adds the compression value as compression displacement information of the corresponding displacement information, and adds the compression displacement information And a cross-sectional area detector that detects a cross-sectional area of the measurement object, and the compression coefficient is greater than 0 and less than 1.

  Usually, in the part where the surface of the measuring object is not tilted with high accuracy, the displacement information of the measuring object to be measured becomes a noise component, and extremely large or extremely small values are irregularly included. . In this cross-sectional area measuring apparatus, when calculating the shape data of the measurement object from the detected displacement information, the cross-sectional area is detected based on the intermediate displacement information excluding the displacement information on the largest side or the smallest side. Therefore, when the displacement information acquired due to the inclination of the surface of the measurement object contains a noise component, the cross-sectional area can be detected based on the displacement information excluding the noise component. The cross-sectional area of the measurement object can be measured with high accuracy.

  In the cross-sectional area measuring apparatus, the cross-sectional area measurement range is equal to a cross-sectional shape output range that outputs a cross-sectional shape of the measurement object, and the compression displacement information in the cross-sectional shape output range is obtained from the measurement object. It is good also as a structure provided with the output part output as shape data. According to this cross-sectional area measuring apparatus, the compression displacement information calculated based on the intermediate displacement information is calculated as shape data, so that the cross-sectional shape of the measurement object can be measured with high accuracy.

  The present invention is also embodied in a program used for realizing the cross-sectional area measuring device. This program stores the base member and the measurement object on a computer used in a cross-sectional area measuring apparatus that measures the cross-sectional shape of the measurement object from the displacement of the measurement object having translucency placed on the surface of the base member. A light emission process for emitting light toward at least one of the objects in a vertical direction, and reflected light that is reflected in the coaxial direction from at least one of the surface of the base member and the surface of the measurement object along with the emission. A plurality of cross-sectional area measurement ranges for measuring the cross-sectional area of the object to be measured by receiving the interference light that has been interfered by passing through the birefringent crystal and the polarization means, and analyzing the frequency of the interference light. When the detection processing for detecting the displacement information at the detection points and the plurality of displacement information corresponding to the plurality of detection points are ordered by size, the first predetermined from the largest side is determined. And calculating a compression value that is an average value of the intermediate displacement information excluding the displacement information included in the case and the displacement information included in the second ratio predetermined from the smallest side, and each displacement is calculated from the compression value. A calculation process for calculating a difference value obtained by subtracting information, and calculating a result obtained by multiplying the difference value by a predetermined compression coefficient and adding the compression value as compression displacement information of the corresponding displacement information; and the compression And a cross-sectional area detection process for detecting a cross-sectional area of the measurement object by adding displacement information, and the compression coefficient is larger than 0 and smaller than 1. According to the present invention, shape data of a measurement object can be measured with high accuracy.

  According to the present invention, the cross-sectional area of the measurement object can be accurately measured.

The figure which shows the structure of the displacement measuring apparatus 10 roughly The figure which shows the detailed structure of the light-receiving part 18 The flowchart which shows the back surface process of Embodiment 1. Displacement measurement and measurement results Displacement measurement and measurement results Flow chart showing the cross-sectional area measurement process Displacement information in the measurement range determination process Displacement information in the measurement range determination process Displacement information in the measurement range determination process Displacement information in the measurement range determination process Displacement information in the measurement range determination process Displacement information in the measurement range determination process Displacement information in the measurement range determination process Displacement information during the compression process The figure which shows the problem of the displacement measuring apparatus 10 The flowchart which shows the back surface process of Embodiment 2.

<Embodiment 1>
The first embodiment will be described with reference to FIGS.

1. Mechanical Configuration of Displacement Measuring Device FIG. 1 is a schematic diagram of the overall configuration of a displacement measuring device (also a cross-sectional area measuring device) 10 of this embodiment. The displacement measuring device 10 is disposed so as to face the measurement object, and has a function of optically measuring the height and cross-sectional area of the measurement object. In this embodiment, a high-viscosity sealing material (hereinafter referred to as a sealing material) 22 placed on a glass plate (an example of a base member) 20 for a liquid crystal panel having a flat surface 20A is used as a measurement object. An example is shown. A plurality of wiring patterns, which are metal films having a high reflectivity such as aluminum used for a liquid crystal panel, are formed on the glass plate 20, and part of the wiring patterns are formed near and below the sealing material 22. Is also provided. The displacement measuring device 10 irradiates light in a direction perpendicular to the glass plate 20 and receives light reflected in a direction perpendicular to the glass plate 20 accordingly, thereby reducing the height and cross-sectional area of the sealing material 22. taking measurement. The sealing material 22 is formed with a width of about 600 μm and a height of about 20 μm in an arbitrary cross section. Both the glass plate 20 and the sealing material 22 have translucency, and the refractive index nc of the sealing material 22 is higher than the refractive index ng of the glass plate 20.

As shown in FIG. 1, the displacement measuring apparatus 10 includes a central processing unit (hereinafter referred to as “CPU”) 12, a memory 14 such as a ROM or a RAM, a light emitting unit 16, and a light receiving unit 18.
In addition to various parameters, the memory 14 stores various programs for controlling the operation of the displacement measuring apparatus 10, and the CPU 12 detects the detection unit 30, the determination unit 32, and the disconnection according to the program read from the memory 14. It functions as an area detection unit 34, a processing unit 36, a determination unit 38, a calculation unit 40, an output unit 41, and the like, and controls each unit.

  The light emitting unit 16 emits laser light to the glass plate 20 and the sealing material 22 based on a command from the CPU 12. In the present embodiment, the light output section 16 emits a laser beam having a diameter of 90 μm to the glass plate 20 and the sealing material 22. As indicated by the phantom line 24, the light receiving unit 18 is disposed coaxially with the light emitting unit 16 emitting laser light in the displacement measuring device 10, and the light emitting unit 16 of the light emitting unit 16 is based on a command from the CPU 12. The reflected light reflected in the coaxial direction with the emission is received. That is, the imaginary line 24 extends in a direction perpendicular to the glass plate 20.

2. FIG. 2 shows a specific configuration of the light receiving unit 18. The light receiving unit 18 includes an objective lens 42, a polarizing beam splitter 44, a first polarizing plate (an example of polarizing means) 46, a crystal (an example of a birefringent crystal) 48, a second polarizing plate (another example of a polarizing means) 50, an image. The sensor 52 is provided, and these are arranged in this order in the direction of the virtual line 24.

  The polarization beam splitter 44 is provided with a half mirror 44A inside. When the CPU 12 functioning as the detection unit 30 starts a displacement measurement process for measuring the displacement from the displacement measuring device 10 to the glass plate 20 and the sealing material 22, the light emitting unit 16 is used to apply the polarization measurement to the polarization beam splitter 44 of the light receiving unit 18. A laser beam is emitted. The laser beam emitted from the light exit unit 16 is irradiated to the half mirror 44A through the light incident lens 54 and reflected. The laser light reflected by the half mirror 44 </ b> A travels in the direction along the imaginary line 24 and is directly irradiated onto the glass plate 20 and the sealing material 22 through the objective lens 42.

  The laser light applied to the glass plate 20 and the sealing material 22 is reflected by the glass plate 20 and the sealing material 22, or is transmitted through the sealing material 22 and reflected by the glass plate 20, and is transmitted through the polarizing beam splitter 44. One polarizing plate 46 is irradiated. As a result, of the laser light irradiated to the first polarizing plate 46, the component of the laser light having a polarization direction parallel to the polarization direction of the first polarizing plate 46 is transmitted through the first polarizing plate 46 and irradiated to the crystal 48. Is done.

  The crystal 48 is a birefringent crystal, and has two axial directions with different refractive indexes on a plane perpendicular to the virtual line 24. For this reason, the laser light applied to the crystal 48 is changed in polarization when passing through the crystal 48 and is applied to the second polarizing plate 50. As a result, the laser light component having a polarization direction parallel to the polarization direction of the second polarizing plate 50 out of the laser light irradiated to the second polarizing plate 50 passes through the second polarizing plate 50 and is transmitted to the image sensor 52. Irradiated. As a result, an interference waveform 52A is observed in the image sensor 52. The image sensor 52 measures the interval between bright line portions with high luminance from the interference waveform 52A, and transmits this to the CPU 12.

3. Backside Processing As shown in FIG. 3, the CPU 12 executes the backside processing when information on the bright line interval is transmitted from the image sensor 52 in the displacement measurement processing. FIG. 3 shows a flowchart of the back surface processing executed by the CPU 12 according to a predetermined program. When starting the back surface processing, the CPU 12 performs fast Fourier transform (an example of frequency analysis) on the bright line interval transmitted from the image sensor 52. As a result, among the laser beams irradiated to the image sensor 52, the components of the laser beams reflected by the glass plate 20, the sealing material 22 and the like are separated from each other, and the displacement (an example of displacement information) Z of each component is determined. , Detected in association with the reflection intensity of each component. Here, “displacement Z of each component” means a displacement from the displacement measuring device 10 to the reflection surface on which each component is reflected. For example, the laser beam reflected by the surface 22A of the sealing material 22 is reflected. If it is a component, it means the displacement from the displacement measuring device 10 to the surface 22A of the sealing material 22. The CPU 12 functioning as the detection unit 30 includes the displacement Z1 of the first measurement value D1 having the highest reflection intensity among the displacements Z of each component (an example of first displacement information) Z1 and the reflection intensity next to the first measurement value D1. The displacement (an example of the second displacement information) Z2 of the second measurement value D2 having a high value is selected and stored in the memory 14 in a state associated with the reflection intensity (S2).

  Next, the CPU 12 calculates a differential displacement (absolute value) between the displacements Z1 and Z2. The memory 14 stores a reference displacement ZK in advance, and the reference displacement ZK is set to be approximately equal to the thickness L in the direction perpendicular to the glass plate 20. After calculating the differential displacement, the CPU 12 reads the reference displacement ZK from the memory 14 and compares it with the differential displacement (S4).

  When measuring the displacement from the displacement measuring device 10 to the surface 20 </ b> A of the glass plate 20, the laser light is directly applied to the glass plate 20 having a relatively high reflectance. In this case, as shown in FIG. 4, the measured values D1 and D2 may be detected in a relatively close displacement range, and it is possible to determine which displacement Z is the displacement Z up to the surface 20A of the glass plate 20. (See the dotted line in the measurement results in FIG. 4).

  In the present embodiment, the CPU 12 functioning as the determination unit 32 compares the differential displacement between the displacements Z1 and Z2 with the reference displacement ZK, and when the differential displacement and the differential displacement between the comparative displacements Z1 and Z2 are smaller than the reference displacement ZK (S4: YES), the displacement Z1 of the first measurement value D1 is determined as the displacement from the displacement measuring device 10 to the surface 20A of the glass plate 20 (S6), and the second measurement value D2 having a low reflection intensity is the first measurement having a high reflection intensity. It is determined that the noise component is the value D1. The CPU 12 determines the displacement Z1 of the first measurement value D1 as the displacement from the displacement measuring device 10 to the surface 20A of the glass plate 20, thereby eliminating the noise component and accurately detecting the displacement of the glass plate 20 from the displacement measuring device 10. The displacement Z up to the surface 20A can be measured.

  Moreover, when measuring the displacement from the displacement measuring apparatus 10 to 22 A of surfaces of the sealing material 22, a laser beam is directly irradiated to the glass plate 20 which has translucency. In this case, as shown in FIG. 5, the measured value D is measured on the front surface 22 </ b> A of the sealing material 22 and on the back surface 20 </ b> B of the glass plate 20. On the other hand, since the refractive index nc of the sealing material 22 is set higher than the refractive index ng of the glass plate 20, the laser light is hardly reflected by the surface 20 </ b> A of the glass plate 20, and the measured value D is that of the sealing material 22. Not measured at surface 22A. As shown by the solid line and the dotted line in FIG. 5, the measured value D measured on the front surface 22 </ b> A of the sealing material 22 and the measured value D measured on the back surface 20 </ b> B of the glass plate 20 are the material of the sealing material 22. In addition, the magnitude relationship varies depending on the surface shape of the sealing material 22. Therefore, when the displacement Z1 of the first measurement value D1 is determined as the displacement from the displacement measuring device 10 to the surface 22A of the sealing material 22 as in the prior art, as shown by the dotted line in FIG. The displacement Z from the displacement measuring device 10 to the rear surface 20B of the glass plate 20 may be measured instead of the displacement Z from the surface 22A of the sealing material 22 to the surface 22A of the sealing material 22. Z could not be measured.

  In the present embodiment, the CPU 12 functioning as the determination unit 32 compares the differential displacement between the displacements Z1 and Z2 with the reference displacement ZK, and when the differential displacement between the displacements Z1 and Z2 is greater than or equal to the reference displacement ZK (S4: YES), the displacement A smaller one of Z1 and Z2 is determined as a displacement from the displacement measuring device 10 to the surface 22A of the sealing material 22 (S8). Thereby, even when the magnitude relationship between the measured value D measured on the front surface 22A of the sealing material 22 and the measured value D measured on the back surface 20B of the glass plate 20 changes, the displacement Z1 and Z2 change to the displacement measuring device 10. The displacement Z to the surface 22A of the sealing material 22 existing on the near side can be selected.

  In this embodiment, both the glass plate 20 and the sealing material 22 have translucency, and the refractive index nc of the sealing material 22 is set higher than the refractive index ng of the glass plate 20. Therefore, when the laser beam is irradiated onto the sealing material 22 and two measured values D with a differential displacement that is more than the reference displacement ZK are detected, these are reflected light and glass reflected by the surface 22A of the sealing material 22. It can be seen that it is any of the reflected light reflected by the back surface 20B of the plate 20. Therefore, when the reference displacement ZK is set, by setting the reference displacement ZK to about the thickness L of the glass plate 20, these measurement values D can be reliably determined, and the measurement object is accurately obtained. Displacement information up to can be selected.

4). Cross-sectional area measurement process Next, with reference to FIG. 6 thru | or FIG. 15, the process in CPU12 in the case of measuring the cross-sectional area of the sealing material 22 is demonstrated.

(Measurement range determination process)
FIG. 6 shows a flowchart of the cross-sectional area measurement process executed by the CPU 12 according to a predetermined program. In the CPU 12, the displacement measuring device 10 is arranged so as to face the surface 20A of the glass plate 20 on which the sealing material 22 is placed by the user, and an instruction to measure the cross-sectional area is input via an operation unit (not shown). Then, the process is started.

  When starting the process, the CPU 12 first executes a sampling process (S12). In the displacement measuring apparatus 10, a displacement measuring range HS for measuring displacement is predetermined by the user (see FIG. 1). The CPU 12 functioning as the detecting unit 30 relatively moves the displacement measuring device 10 along the surface 20A of the glass plate 20 by a driving unit (not shown), and a plurality of measuring points set at regular intervals within the displacement measuring range HS. Then, the displacement Z is measured, and the plurality of measured displacements Z are stored in the memory 14 in association with the measurement points. As a result, as shown in FIG. 7, the displacement Z in the displacement measurement range HS is stored in the memory 14. In addition, the measuring method of the displacement Z is as above-mentioned, and the overlapping description is abbreviate | omitted.

  Next, the CPU 12 executes a first process (S14). The memory 14 stores a program for executing median filter processing (an example of leveling processing). The CPU 12 functioning as the processing unit 36 executes a first process that is a median filter process using 15 displacements Z (an example of the first information number) among a plurality of displacements Z measured in the sampling process, First processing information JS1 shown in FIG. 8 is generated.

  Next, the CPU 12 functioning as the determination unit 38 executes a first search process for determining the area target range HM from the first process information JS1 (S16). Here, the “area target range HM” is an example of a range in which the cross-sectional area of the sealing material 22 is measured, and is a cross-sectional area measurement range before being corrected by a second search process described later. Normally, when measuring the cross-sectional area of the sealing material 22, the user sets a displacement measurement range HS wider than the sealing material 22 placed so that a part of the sealing material 22 is not lost. . In the present embodiment, the surface 20A of the glass plate 20 on which the sealing material 22 is placed is formed flat, so that the displacement Z measured when the surface 20A of the glass plate 20 is measured becomes a constant value. Is set to Therefore, when the displacement Z measured by the displacement measuring device 10 in the displacement measuring range HS becomes a value different from the constant value indicating the surface 20A of the glass plate 20, it is detected that the sealing material 22 is placed. The area target range HM is determined.

  In the first process, the area target range HM is determined from the first process information JS1 generated by executing the median filter process which is a kind of the leveling process on the displacement Z. According to the median filter processing, an extremely deviated value within a certain range can be removed by setting the intermediate value as the displacement Z from within a certain range of displacement information including the displacement Z. Since the first processing information JS1 is generated by executing the leveling process, local noise N1 (see FIG. 7) due to reflection from the wiring pattern having a high reflectance is removed, and these noises are removed. The area target range HM can be accurately determined without being affected by N1.

Specifically, the CPU 12 determines the area target range HM by the following procedure.
First, in the first search process, the CPU 12 performs a differentiation process on the first process information JS1, generates the leveling information JH shown in FIG. 9, and calculates the average value JHA of the leveling information JH in the displacement measurement range HS. To do. The memory 14 stores a threshold coefficient KS in advance, and after calculating the average value JHA, the CPU 12 reads the threshold coefficient KS from the memory 14 and multiplies the average value JHA by the threshold coefficient KS to calculate the first threshold value SV1. . Further, the CPU 12 detects the peak value (maximum value) JHP of the leveling information JH, and compares the leveling information JH with the first threshold value SV1. Here, the “peak value” refers to a value having the largest absolute value in the leveling information JH. The CPU 12 detects the specific side range HT in which the leveling information JH is on the same side as the peak value JHP with respect to the first threshold value SV1 (in this embodiment, it is greater than the first threshold value SV1).

  FIG. 10 shows the specific side range HT. As shown in FIG. 8, generally, there are a plurality of irregularities in the first processing information JS1 due to the surface 22A of the sealing material 22, and a plurality of specific side ranges HT are included in the displacement measurement range HS accordingly. included. The memory 14 stores a reference distance LK in advance, and the CPU 12 compares the distance between adjacent specific side ranges HT with the reference distance LK. When the distance between the adjacent specific side ranges HT is equal to or less than the reference distance LK, the CPU 12 generates the area target candidate range HK by combining the specific side ranges HT and the range therebetween. On the other hand, when the distance between the adjacent specific side ranges HT is longer than the reference distance LK, the CPU 12 does not have these specific side ranges HT caused by the same measurement object, or any one specific side. It is determined that the range HT is caused by noise or the like, and the area target candidate range HK is not generated. As a result, as shown in FIG. 11, a plurality of area target candidate ranges HK that are smaller in number than the specific-side range HT are generated in the displacement measurement range HS. The CPU 12 selects the area target candidate range HK having the maximum width from the plurality of area target candidate ranges HK, determines this as the area target range HM (see FIG. 12), and ends the first search process.

  In the first search process, the area target range HM is determined from the leveling information JH generated by performing a differentiation process on the first process information JS1. The value of the leveling information JH is likely to change greatly at the end of the sealing material 22 where the presence or absence of the sealing material 22 is switched. Therefore, when the area target range HM is determined using the first threshold SV1, the area target range HM can be determined with high accuracy by determining the area target range HM from the leveling information JH.

  After executing the first search process, the CPU 12 executes an inclination correction process (S18). The CPU 12 determines a fixed section (see FIG. 12) that is a fixed distance away from the area target range HM in the displacement measurement range HS. The CPU 12 detects the inclination of the glass plate 20 with respect to the displacement measuring device 10 from the first processing information JS1 in a certain section, and corrects the first processing information JS1 so that this inclination becomes “0”.

  Next, the CPU 12 executes a base calculation process (S20). The CPU 12 functioning as the calculation unit 40 calculates the displacement from the displacement measuring device 10 to the surface 20A of the glass plate 20 from the corrected first processing information JS1 in a certain section. At this time, the CPU 12 performs an intermediate average process on the corrected first process information JS1 in a certain section.

  In the intermediate average process, the CPU 12 orders the plurality of displacement information included in the corrected first processing information JS1 in a certain section by size, and the displacement information included in 10% from the maximum side and the minimum side in the order. Select intermediate displacement information excluding. The CPU 12 calculates the average value of the intermediate displacement information as the displacement from the displacement measuring device 10 to the surface 20 </ b> A of the glass plate 20.

  In this embodiment, since the surface 20A of the glass plate 20 is formed flat, in the base calculation process, from the displacement measuring device 10 obtained from the first processing information JS1 in a certain section to the surface 20A of the glass plate 20. By calculating the displacement, the displacement up to the surface 20A of the glass plate 20 can be calculated. That is, in the displacement measuring apparatus 10 of this embodiment, the displacement to the surface 22A of the sealing material 22 in the area target range HM and the displacement to the surface 20A of the glass plate 20 in the area target range HM are measured by measuring the displacement Z once. Both of these displacements Z can be measured, and using the difference between these displacements Z, the height and the cross-sectional area of the sealing material 22 can be measured.

  Next, the CPU 12 executes a second process (S22). The CPU 12 functioning as the processing unit 36 executes median filter processing using three (an example of the second information number) displacements Z among the plurality of displacements Z measured in the sampling processing, and the first processing shown in FIG. 2 Process information JS2 is generated. As shown in FIG. 13, the second processing information JS2 is smoother than the first processing information JS1 because the number of information of the displacement Z used in the median filter processing is smaller than the first processing information JS1 shown in FIG. On the other hand, the shape of the sealing material 22 is included more than the first processing information JS1.

  After generating the second processing information JS2, the CPU 12 corrects the inclination of the second processing information JS2 using the inclination of the glass plate 20 detected in S20 (S24). Next, the CPU 12 functioning as the determination unit 38 executes the second search process for correcting the area target range HM using the corrected second processing information JS2 and determining the cross-sectional area measurement range HD (S26). Here, the “cross-sectional area measurement range HD” is another example of a range in which the cross-sectional area of the sealing material 22 is measured. The above-described area target range HM is corrected and the cross-sectional area of the sealing material 22 is actually measured. This is the cross-sectional area measurement range used in the process.

  The memory 14 stores a second threshold value SV2 in advance. In the second search process, the CPU 12 reads the second threshold value SV2 from the memory 14 and compares it with the second process information JS2 in the area target range HM. As shown in FIG. 13, the CPU 12 detects the range using the second threshold value SV2 set to a value larger than the first threshold value SV1, and determines the range as the cross-sectional area measurement range HD.

  In the displacement Z measured by the sampling process, the value is likely to change greatly at the end portion of the sealing material 22 where the presence or absence of the sealing material 22 is switched at the boundary portion of the sealing material 22. Therefore, at the end of the sealing material 22, the displacement Z may be measured lower than the surface 20A of the glass plate 20 (on the left side of the paper), or may be measured higher than the surface 20A of the glass plate 20 ( On the right side of the drawing), noise N2 (see FIG. 7) is likely to occur in this portion. In the second search process, by using the second threshold value SV2 set to a value larger than the first threshold value SV1, the influence of the noise N1 can be removed and the area target range HM can be accurately determined.

  In the displacement measuring apparatus 10 of this embodiment, when determining the cross-sectional area measurement range HD from the displacement measurement range HS, the area target range HM is determined using the first processing information JS1, and the second processing information JS2 is used. The area target range HM is corrected, and the cross-sectional area measurement range HD used for measuring the cross-sectional area of the sealing material 22 is determined. The first processing information JS1 and the second processing information JS2 are common in that they are leveling processes executed using a plurality of displacements Z, but the number of displacements Z used for the processes is different. In this displacement measuring apparatus 10, when the area target range HM is determined, the first processing information JS1 generated using more displacement Z than the second processing information JS2 is used, thereby reflecting from the wiring pattern. The local noise N1 due to can be removed, and the area target range HM can be determined with high accuracy. Further, when the cross-sectional area measurement range HD is determined, the second processing information JS2 generated using the displacement Z smaller than the first processing information JS1 is used, so that the seal material 22 can be obtained from the first processing information JS1. The cross-sectional area measurement range HD can be determined using the second processing information JS2 including the feature of the displacement Z, whereby the cross-sectional area of the sealing material 22 can be measured with high accuracy.

(Cross shape output processing)
Next, the CPU 12 executes a compression process (S28).
In the compression process, the CPU 12 functioning as the calculation unit 40 first selects the corrected second process information JS2 included in the cross-sectional area measurement range HD, and performs an intermediate average process on the selected second process information JS2. As shown in FIG. 14, the CPU 12 calculates an average value from intermediate displacement information excluding displacement information included in 10% from the maximum side and the minimum side, and stores the average value in the memory 14 as a compression value AT.

Next, the CPU 12 calculates compression displacement information ZA. The CPU 12 calculates a difference value obtained by subtracting the compression value AT for each selected second processing information JS2. A compression coefficient AK is stored in the memory 14 in advance, and the compression coefficient AK is set to a value larger than “0” and smaller than “1”. After calculating the difference value corresponding to each second processing information JS2, the CPU 12 reads the compression coefficient AK from the memory 14, multiplies the difference value by the compression coefficient AK and adds the compression value AT, and adds the compression value AT to the second processing information JS2. Corresponding compression displacement information ZA is calculated.
0 <AK <1, ZA = (JS2-AT) × AK + AT

  The CPU 12 functioning as the output unit 41 outputs the calculated compression displacement information ZA to the display 19 outside the displacement measuring apparatus 10 (S29). Thereby, the display device 19 displays the compression displacement information ZA calculated in the cross-sectional area measurement range HD as the cross-sectional shape of the sealing material 22, and the cross-sectional shape of the sealing material 22 is measured. That is, the cross-sectional area measurement range HD also serves as a cross-sectional shape output range, and the compression displacement information ZA also serves as shape data for transmitting the measured shape of the sealing material 22 to the display 19.

(Cross section detection process)
Next, the CPU 12 executes a cross-sectional area detection process (S30). The CPU 12 functioning as the cross-sectional area detection unit 34 subtracts the compression displacement information ZA in the cross-sectional area measurement range HD calculated in S28 from the displacement Z from the displacement measuring device 10 calculated in S20 to the surface 20A of the glass plate 20. The displacement is calculated and added over the cross-sectional area measurement range HD to detect the cross-sectional area of the sealing material 22.

  In the displacement measuring apparatus 10 of the present embodiment, the cross-sectional shape is displayed using the second processing information JS2 in the cross-sectional area measurement range HD, and when the cross-sectional area is calculated, an intermediate average process is performed, and the second processing information JS2 The compression value AT is obtained based on the intermediate displacement information excluding the displacement information on the largest side or the smallest side, and the sectional area is calculated. Therefore, when obtaining the compression value AT, the displacement information on the largest side or the smallest side is not used.

  Since the sealing material 22 formed on the glass plate 20 is not usually shaped and formed, the shape of the surface thereof changes continuously, and the inclination of the surface changes accordingly. As shown in FIG. 15, the displacement measuring apparatus 10 that irradiates light in a direction perpendicular to the glass plate 20 and receives light reflected in the direction perpendicular to the glass plate 20 according to the embodiment as shown in FIG. The tilt range of the surface of the measurement object that can be measured with high accuracy is limited. Therefore, in the measurement of the cross-sectional area of the sealing material 22 or the like whose surface shape continuously changes, as shown in FIG. 14, the noise information is included in the displacement information at a plurality of measurement points included in the cross-section, and correct measurement is performed. It is difficult.

  As a result, when the cross-sectional shape data is calculated from the displacement information and output to the external display 19 to measure the cross-sectional shape, or when the cross-sectional area is measured from the displacement information, the cross-sectional shape reproduction accuracy and The measurement accuracy of the cross-sectional area will deteriorate.

  In the displacement measuring apparatus 10 of the present embodiment, a noise component is included in the generated second processing information JS2 due to the inclination of the surface of the sealing material 22 by obtaining the compression value AT based on the intermediate displacement information. In this case, the noise component can be removed, and the cross-sectional shape reproduction accuracy and the cross-sectional area measurement accuracy can be improved.

  In the displacement measuring apparatus 10 of the present embodiment, the compression coefficient AK is set to a value larger than “0” and smaller than “1”. Since the compression coefficient AK is set to a positive value smaller than “1”, the difference value between the compression displacement information ZA and the compression value AT is set to be larger than the difference value between the second processing information JS2 and the compression value AT. The variation of the second processing information JS2 caused by noise or the like can be reduced. Further, since the compression coefficient AK is set to a positive value larger than “0”, the feature of the shape of the sealing material 22 included in the second processing information JS2 can be left in the compression displacement information ZA.

<Embodiment 2>
The second embodiment will be described with reference to FIG. The displacement measuring apparatus 10 of the present embodiment is different from the displacement measuring apparatus 10 of the first embodiment in the back surface processing in the displacement measuring process. In this embodiment, when the sealing material 22 is irradiated with laser light, in addition to the reflected light reflected by the front surface 22A of the sealing material 22 and the reflected light reflected by the back surface 20B of the glass plate 20, the glass plate 20 An explanation will be given using an example in which reflected light reflected by the surface 20A may exist. In the following description, the same description as that of the first embodiment will not be repeated.

(Back side treatment)
When the displacement Z of each component is detected in association with the reflection intensity of each component in the back surface processing, the CPU 12 detects the displacement Z1 of the first measurement value D1 having the highest reflection intensity among the displacement Z of each component, The displacement Z2 of the second measurement value D2 having the second highest reflection intensity after the first measurement value D1 and the displacement Z3 of the third measurement value D3 having the second highest reflection intensity after the second measurement value D2 are selected, and the reflection intensity and The associated state is stored in the memory 14 (S32).

  Next, the CPU 12 obtains a differential displacement (absolute value) ΔZ12 of the displacements Z1 and Z2, a differential displacement ΔZ23 of the displacements Z2 and Z3, and a differential displacement ΔZ31 of the displacements Z1 and Z3. After calculating the differential displacements ΔZ12, ΔZ23, and ΔZ31, the CPU 12 reads the reference displacement ZK from the memory 14 and compares it with the differential displacement (S34). In the present embodiment, the reference displacement ZK does not necessarily have to be set substantially equal to the thickness L in the direction perpendicular to the glass plate 20.

  When the differential displacements ΔZ12, ΔZ23, and ΔZ31 are all smaller than the reference displacement ZK, the CPU 12 determines that the reflection surface from which the reflected light is reflected is reflected only from the surface 22A of the sealing material 22, and executes the first determination processing. (S36). In the first determination process, the CPU 12 determines that the displacement Z1 of the first measurement value D1 having the highest reflection intensity among the detected measurement values D is the displacement from the displacement measuring device 10 to the surface 22A of the sealing material 22.

  Further, the CPU 12 determines that the differential displacement ΔZ23 is smaller than the reference displacement ZK and the differential displacements ΔZ12, ΔZ31 are equal to or larger than the reference displacement ZK, or the differential displacement ΔZ31 is smaller than the reference displacement ZK, and the differential displacements ΔZ12, ΔZ23 are the reference. When the displacement ZK is greater than or equal to the difference displacement ΔZ12 is smaller than the reference displacement ZK and the difference displacements ΔZ23 and ΔZ31 are greater than or equal to the reference displacement ZK, the reflection surface from which the reflected light is reflected is the surface 22A of the sealing material 22; It is determined that the light is reflected from either the front surface 20A or the back surface 20B of the glass plate 20. At this time, the CPU 12 executes a second determination process (S38). In the first determination process, the CPU 12 selects a measurement value D having a higher reflection intensity from the two measurement values D in which the differential displacement ΔZ is smaller than the reference displacement ZK. The CPU 12 determines that the smaller one of the selected displacement Z of the measured value D and the remaining measured value D is the displacement from the displacement measuring device 10 to the surface 22A of the sealing material 22.

  In addition, when the differential displacements ΔZ12, ΔZ23, and ΔZ31 are all equal to or larger than the reference displacement ZK, the CPU 12 reflects the reflection surfaces on which the reflected light is reflected by the surface 22A of the sealing material 22, the surface 20A, and the back surface 20B of the glass plate 20. The third determination process is executed (S40). In the third determination process, the CPU 12 determines that a smaller one of the displacements Z1, Z2, and Z3 is a displacement from the displacement measuring device 10 to the surface 22A of the sealing material 22.

  In the displacement measuring apparatus 10 of the present embodiment, even when the laser light is reflected by three different reflecting surfaces, that is, the front surface 22A of the sealing material 22, the front surface 20A of the glass plate 20, and the back surface 20B, The measurement value D by reflected light can be selected, and displacement information up to the measurement object can be selected with high accuracy.

<Other embodiments>
The present invention is not limited to the embodiments described with reference to the above description and the drawings, and for example, the following various aspects are also included in the technical scope of the present invention.
(1) In the above embodiment, the displacement measuring apparatus 10 has one CPU 12, and the functions of the detection unit 30, the determination unit 32, the cross-sectional area detection unit 34, the processing unit 36, the determination unit 38, the calculation unit 40, etc. Although shown using the example performed by the two CPUs 12, the present invention is not limited to this. For example, each unit may be configured by different CPUs or systems.

(2) In the above embodiment, the example in which the tilt correction process and the base calculation process are executed in the measurement range determination process has been described. For example, prior to the measurement range determination process, the tilt and displacement measuring device of the glass plate 20 is measured. 10 and the surface 20 </ b> A of the glass plate 20 are not necessarily executed when the displacement is known in advance.

(3) In the above embodiment, the description has been given using the sealing material 22 as the measurement object and the glass plate 20 as the base member on which the measurement object is placed, but the present invention is not limited to this. The measurement object may have another light-transmitting property or may not have the light-transmitting property.

(4) Although the above embodiment has been described using the glass plate 20 having translucency as the base member, the present invention is not limited to this. The base member may be a mirror body having a mirror surface such as a chromium deposition surface, and the measurement object may be placed on the mirror surface. When the measurement object is placed on the mirror surface of the mirror body, a noise component is often detected, and the measurement values D1 and D2 are often detected in a relatively close displacement range. According to the present invention, it is possible to accurately measure the displacement Z from the displacement measuring device 10 to the mirror surface of the mirror body by eliminating noise components.

(5) In the above embodiment, the number of displacements Z used in the median filter process in the first process has been described as 15 and the number of displacements Z used in the median filter process in the second process has been described as 3. If the number of displacements Z used in the median filter process in the first process is smaller than the number of displacements Z used in the median filter process in the second process, the number of displacements Z used in the median filter process in each process is Not limited to. Further, the leveling process to be performed is not limited to the median filter process. For example, a generally known moving average process may be used. According to the moving average process, the value obtained by averaging the displacement information in a certain range including the displacement Z is set as the displacement Z, so that an extremely deviated value in the certain range can be leveled.

(6) In the above embodiment, the description has been given using an example in which 10% of displacement information is removed from the maximum side and the minimum side when selecting the intermediate displacement information in the intermediate averaging process. Not limited to. For example, it may be 5% or 15%. Further, the ratio set on the maximum side and the ratio set on the minimum side may be different.

10: displacement measuring device, 12: CPU, 14: memory, 16: light emitting unit, 18: light receiving unit, 20: glass plate, 22: sealing material, 30: detecting unit, 32: determining unit, 34: cross-sectional area detecting unit 36: processing unit, 38: determination unit, 40: calculation unit, 41: output unit, 46, 50: polarizing plate, 48: crystal, Z: displacement, ZK: reference displacement, nc: refractive index of sealing material, ng : Refractive index of glass plate, JS1: first processing information, SV1: first threshold, JS2: second processing information, JH: leveling information, SV2: second threshold, HS: displacement measurement range, HM: area target range , HT: specific side range, HD: cross-sectional area measurement range, HK: area target candidate range, LK: reference distance, AK: compression coefficient, AT: compression value, ZA: compression displacement information

Claims (3)

It is a cross-sectional area measuring device that measures the cross-sectional shape of the measurement object from the displacement of the measurement object having translucency placed on the surface of the base member,
A light output part that emits light in a vertical direction to at least one of the base member and the measurement object;
Interference light obtained by causing reflected light reflected in at least one of the surface of the base member and the surface of the measurement object in the coaxial direction along with the emission to pass through the birefringent crystal and the polarization unit is interfered. A light receiving unit for receiving light;
A detection unit that detects displacement information at a plurality of detection points in a cross-sectional area measurement range that measures a cross-sectional area of the measurement object by performing frequency analysis of the interference light;
When the plurality of displacement information corresponding to the plurality of detection points are ordered by size, the displacement information included in the first ratio predetermined from the largest side and the second predetermined from the smallest side. A displacement value included in the ratio and an average value of intermediate displacement information excluding the displacement value are calculated, and a difference value obtained by subtracting each displacement information from the compression value is calculated, and the difference value is predetermined. A calculation unit for calculating the compression displacement information of the corresponding displacement information by multiplying the compression coefficient and adding the compression value;
A cross-sectional area detector that detects the cross-sectional area of the measurement object by adding the compression displacement information;
With
The cross-sectional area measuring device, wherein the compression coefficient is larger than 0 and smaller than 1. The cross-sectional area measuring device according to claim 1,
The cross-sectional area measurement range is equal to the cross-sectional shape output range for outputting the cross-sectional shape of the measurement object,
An output unit that outputs the compression displacement information in the cross-sectional shape output range as shape data of the measurement object;
A cross-sectional area measuring apparatus comprising: In a computer used in a cross-sectional area measuring device that measures the cross-sectional shape of the measurement object from the displacement of the measurement object having translucency placed on the surface of the base member,
A light emission process for emitting light in a vertical direction to at least one of the base member and the measurement object;
Interference light obtained by causing reflected light reflected in at least one of the surface of the base member and the surface of the measurement object in the coaxial direction along with the emission to pass through the birefringent crystal and the polarization unit is interfered. A light receiving process for receiving light;
A detection process for detecting displacement information at a plurality of detection points in a cross-sectional area measurement range for measuring a cross-sectional area of the measurement object by frequency analysis of the interference light;
When the plurality of displacement information corresponding to the plurality of detection points are ordered by size, the displacement information included in the first ratio predetermined from the largest side and the second predetermined from the smallest side. A displacement value included in the ratio and an average value of intermediate displacement information excluding the displacement value are calculated, and a difference value obtained by subtracting each displacement information from the compression value is calculated, and the difference value is predetermined. A calculation process for calculating a value obtained by multiplying the compression coefficient by adding the compression value as the compression displacement information of the corresponding displacement information;
A cross-sectional area detection process for detecting the cross-sectional area of the measurement object by adding the compression displacement information;
And execute
The program for a cross-sectional area measuring apparatus, wherein the compression coefficient is larger than 0 and smaller than 1.

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