JP2012525534A - Vacuum pump - Google Patents

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JP2012525534A
JP2012525534A JP2012507816A JP2012507816A JP2012525534A JP 2012525534 A JP2012525534 A JP 2012525534A JP 2012507816 A JP2012507816 A JP 2012507816A JP 2012507816 A JP2012507816 A JP 2012507816A JP 2012525534 A JP2012525534 A JP 2012525534A
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pumping
section
vacuum pump
stage
growth
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JP5636042B2 (en
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エマニュエル ウゾマ オコローフォー
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エドワーズ リミテッド
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/123—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially or approximately radially from the rotor body extending tooth-like elements, co-operating with recesses in the other rotor, e.g. one tooth
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2210/00—Fluid
    • F04C2210/10—Fluid working
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/30—Use in a chemical vapor deposition [CVD] process or in a similar process
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
    • F05C2201/00—Metals
    • F05C2201/04—Heavy metals
    • F05C2201/0433—Iron group; Ferrous alloys, e.g. steel
    • F05C2201/0436—Iron
    • F05C2201/0439—Cast iron
    • F05C2201/0442—Spheroidal graphite cast iron, e.g. nodular iron, ductile iron

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

腐食性の流体をポンピングするための複数段の真空ポンプであって、第１の流路の材料は、この第１の流路の下流の第２の流路の材料よりも耐腐食性に劣る材料である。
【選択図】 図１A multi-stage vacuum pump for pumping corrosive fluid, wherein the material of the first flow path is less corrosion resistant than the material of the second flow path downstream of the first flow path. Material.
[Selection] Figure 1

Description

本発明は真空ポンプに関し、特に腐食性の流体をポンピングするのに適した真空ポンプに関する。   The present invention relates to a vacuum pump, and more particularly to a vacuum pump suitable for pumping corrosive fluid.

ポンピング機構５２を有する従来の真空ポンプ５０を図７に示している。このポンピング機構は、高真空度の流体のための入口５８と低真空度から大気圧ほどの流体のための出口６０の間の流体流路５６に沿った複数のポンピング段５４を有する。５段のポンピング段５４が示されている。モーター６２は各ポンピング段５４内で、ステーターＳに対してローターＲを回転駆動する。   A conventional vacuum pump 50 having a pumping mechanism 52 is shown in FIG. The pumping mechanism has a plurality of pumping stages 54 along a fluid flow path 56 between an inlet 58 for high vacuum fluid and an outlet 60 for low vacuum to atmospheric pressure fluid. A five-stage pumping stage 54 is shown. The motor 62 rotationally drives the rotor R with respect to the stator S in each pumping stage 54.

くみ出される流体がフッ素のような腐食剤を含む場合、ポンピング機構５２が腐食する。時間が経過すると、ポンピング機構の部材表面に腐食層が成長し、ポンピング段５４のローターＲとステーターＳとの間の運転隙間が減少してしまう。長時間にわたるポンプ動作が続くと、腐食によってポンプ段のローターとステーターが接触するようになり、ポンプが故障してしまう。   If the pumped fluid contains a corrosive agent such as fluorine, the pumping mechanism 52 will corrode. As time passes, a corrosion layer grows on the surface of the member of the pumping mechanism, and the operating gap between the rotor R and the stator S of the pumping stage 54 is reduced. If the pump operation continues for a long time, the rotor and the stator of the pump stage come into contact with each other due to corrosion, and the pump breaks down.

耐腐食性の材料でポンピング機構を製造することにより、真空ポンプ内の腐食を減らすことが可能であるが、一般的にそのような材料は高価である。   While it is possible to reduce the corrosion in the vacuum pump by manufacturing the pumping mechanism with a corrosion resistant material, such materials are generally expensive.

本発明は、腐食性の流体をポンピングするための真空ポンプであって、高真空度の流体の入口と低真空度の流体の出口の間の流体流路に沿った複数のポンピング段を有するポンピング機構を備え、前記流路の第１のセクションにおける前記ポンピング機構の材料は、前記第１のセクションの下流側の前記流路の第２のセクションにおける前記ポンピング機構の材料よりも耐腐食性に劣った材料である。   The present invention is a vacuum pump for pumping corrosive fluid having a plurality of pumping stages along a fluid flow path between a high vacuum fluid inlet and a low vacuum fluid outlet And the material of the pumping mechanism in the first section of the flow path is less resistant to corrosion than the material of the pumping mechanism in the second section of the flow path downstream of the first section. Material.

本発明のその他の好ましい及び／又は任意的な態様は付随する特許請求の範囲で定義されている。   Other preferred and / or optional aspects of the invention are defined in the appended claims.

真空ポンプの簡略化した断面図である。It is the simplified sectional view of a vacuum pump. 相対的に耐腐食性に劣った材料で製造されたポンピング機構を有するポンプについて、ポンプ参照温度に対し、時間経過による腐食層の成長を示すグラフである。It is a graph which shows the growth of the corrosion layer over time with respect to pump reference temperature about the pump which has a pumping mechanism manufactured with the material inferior to corrosion resistance. 相対的に耐腐食性に優れた材料で製造されたポンピング機構を有するポンプについて、ポンプ参照温度に対し、時間経過による腐食層の成長を示すグラフである。It is a graph which shows the growth of the corrosion layer with the passage of time with respect to pump reference temperature about the pump which has a pumping mechanism manufactured with the material excellent in corrosion resistance relatively. 相対的に耐腐食性に優れた材料と相対的に耐腐食性に劣った材料とで製造されたポンピング機構を有するポンプについて、ポンプ参照温度に対し、時間経過による腐食層の成長を示すグラフである。A graph showing the growth of a corrosive layer over time for a pump with a pumping mechanism made of a material with relatively good corrosion resistance and a material with relatively poor corrosion resistance against the pump reference temperature. is there. 耐腐食性に優れた材料と耐腐食性に劣った材料の特性を示す表である。It is a table | surface which shows the characteristic of the material excellent in corrosion resistance, and the material inferior in corrosion resistance. 耐腐食性に優れた材料の組成の一例を示す表である。It is a table | surface which shows an example of a composition of the material excellent in corrosion resistance. 従来の真空ポンプの簡略化した断面図である。It is the simplified sectional view of the conventional vacuum pump.

本発明がより理解されるよう、あくまでも例示にすぎない本発明の実施形態を、図面を参照しながら説明する。   For better understanding of the present invention, embodiments of the present invention that are merely examples will be described with reference to the drawings.

図１に腐食性の流体をポンピングするための複数段の真空ポンプ１０を示している。ポンピング機構１２は、高真空度の流体のための入口１８と低真空度から大気圧ほどの流体のための出口２０の間の流体流路１６に沿った、流体をポンピングするための複数のポンピング段１４を有している。この例では５段のポンピング段が示されている。モーター２２は各ポンピング段１４内で、ステーターＳに対してローターＲを回転駆動する。   FIG. 1 shows a multi-stage vacuum pump 10 for pumping corrosive fluid. The pumping mechanism 12 includes a plurality of pumping pumps for pumping fluid along a fluid flow path 16 between an inlet 18 for high vacuum fluid and an outlet 20 for low vacuum to atmospheric pressure fluid. It has a stage 14. In this example, five pumping stages are shown. The motor 22 rotationally drives the rotor R with respect to the stator S in each pumping stage 14.

本発明に至るまでに、図７に示しているような従来技術の解析が行われ、図２に従来のポンプについて、ポンプ参照温度に対する、時間経過（この例では１００００時間である）による腐食層の成長をプロットしたグラフを示している。グラフ中の第１の線は流路５６に沿った中間部のポンピング段のローター及びステーターの表面の成長を示し、第２の線は流路５６に沿った最終ポンピング段のローター及びステーターの表面の成長を示している。この例における中間ポンピング段は第３段である。腐食層の成長はミクロン単位で測定され、温度はセ氏温度で測定されている。グラフ中で使用されている温度は最終ポンピング段で測定されたポンプ参照温度である。中間ポンピング段における温度はグラフに示された温度より低いが、簡略化のために示されていないことがわかる。ポンプ参照温度は動作中に上昇し、この上昇は吸引される流体のタイプやポンプにより実行される仕事、といった多くの要素に依存する。   Prior to the present invention, the prior art analysis as shown in FIG. 7 was performed, and FIG. 2 shows the corrosion layer of the conventional pump over time with respect to the pump reference temperature (10,000 hours in this example). The graph which plotted the growth of is shown. The first line in the graph shows the growth of the intermediate pumping stage rotor and stator along the flow path 56 and the second line shows the final pumping stage rotor and stator surface along the flow path 56. Shows growth. The intermediate pumping stage in this example is the third stage. Corrosion layer growth is measured in microns and the temperature is measured in degrees Celsius. The temperature used in the graph is the pump reference temperature measured at the final pumping stage. It can be seen that the temperature in the intermediate pumping stage is lower than that shown in the graph, but is not shown for simplicity. The pump reference temperature rises during operation, and this rise depends on many factors, such as the type of fluid being aspirated and the work performed by the pump.

図７において、ポンピング機構の材料は、比較的耐腐食性に劣るものである。このような材料の例として、球状黒鉛鉄（ＳＧ ｉｒｏｎ）がある。図２から分かるように、最終段の腐食層の成長は中間のポンピング段の成長よりも相当大きく、ポンプ参照温度が２００℃のとき特に大きい。この参照温度において、中間段の腐食層の成長が５０μｍあまりにすぎないのに対し、最終段の腐食層の成長はちょうど４００μｍに満たない程になっている。   In FIG. 7, the material of the pumping mechanism is relatively inferior in corrosion resistance. An example of such a material is spheroidal graphite iron (SG iron). As can be seen from FIG. 2, the growth of the last stage corrosion layer is much larger than the growth of the intermediate pumping stage and is particularly large when the pump reference temperature is 200 ° C. At this reference temperature, the growth of the intermediate stage corrosion layer is only 50 μm, whereas the growth of the final stage corrosion layer is just less than 400 μm.

図３には、図２に示されたグラフと同等のものであるが、ポンプの材料が比較的耐腐食性に優れている場合を示している。このような材料の例としてニッケルリッチの球状黒鉛鉄（Ｎｉ−ｒｉｃｈ ＳＧ ｉｒｏｎ）がある。図３において、中間ポンピング段および最終ポンピング段のどちらにおいても腐食層の成長が減少しているが、中間ポンピング段における成長が約３０μｍ減少して約２０μｍとなったのにすぎないのに対し、最終ポンピング段における成長は約３００μｍ減少して、ちょうど１００μｍを下回る程度になっている。   FIG. 3 is equivalent to the graph shown in FIG. 2, but shows a case where the pump material is relatively excellent in corrosion resistance. An example of such a material is nickel-rich spheroidal graphite iron (Ni-rich SG iron). In FIG. 3, the growth of the corrosion layer is reduced in both the intermediate pumping stage and the final pumping stage, while the growth in the intermediate pumping stage is reduced by about 30 μm to only about 20 μm. The growth in the final pumping stage has decreased by about 300 μm, just below 100 μm.

図７に示されたポンプでは、流路５６に沿った流体の圧力は、典型的には流路に沿ってひとつのポンピング段から次のポンピング段へと圧縮比が上がっていくような各ポンピング段５４によって流体が圧縮されるため、入口５８から出口６０にかけて上昇していく。流体とポンピング機構の温度もまた流路に沿って上昇していく。   In the pump shown in FIG. 7, the pressure of the fluid along the flow path 56 is typically such that each compression pump increases in compression ratio from one pumping stage to the next along the flow path. Since the fluid is compressed by the stage 54, it rises from the inlet 58 to the outlet 60. The temperature of the fluid and the pumping mechanism also increases along the flow path.

このため、くみ出される流体がフッ素のような腐食剤を含む場合、ポンピング機構５２に生じる腐食の量は、温度や圧力が上昇するため、流路５６に沿って増加する。圧力上昇によって、ポンピング機構を腐食する腐食性分子の量は増加し、温度上昇によって腐食性の反応が増加する。従って、腐食層の成長は中間のポンピング段よりも最終ポンピング段の方がより大きくなる。このため、成長が最大になるポンピング機構の最終段で運転隙間が減少し、ポンプの故障が発生してしまう。図３に示しているように耐腐食性が向上する一方で、ポンピング機構の最終段でしばしば故障が発生する。   For this reason, when the pumped fluid contains a corrosive agent such as fluorine, the amount of corrosion generated in the pumping mechanism 52 increases along the flow path 56 because the temperature and pressure increase. The increase in pressure increases the amount of corrosive molecules that corrode the pumping mechanism, and the increase in temperature increases the corrosive reaction. Therefore, the growth of the corrosion layer is greater in the final pumping stage than in the intermediate pumping stage. For this reason, the operating gap is reduced at the final stage of the pumping mechanism where the growth is maximum, and a pump failure occurs. While corrosion resistance is improved as shown in FIG. 3, failures often occur at the final stage of the pumping mechanism.

図１に示しているポンプにおいて、ポンピング機構は第１のセクション２４と第２のセクション２６とを有している。第２のセクション２６は第１のセクション２４の下流にある。動作の間、下流のセクション２６の温度と圧力は上流のセクション２４の温度と圧力よりも高くなっている。従って、腐食性の流体をポンピングするとき、セクション２４の腐食はセクション２６の腐食よりも少ない。セクション２４のローターとステーター上への腐食層の成長はセクション２６よりも少ないため、第１のセクション２４は第２のセクション２６よりも耐腐食性に劣ったものにする。このため、第２のセクションの材料よりも相対的に安価な材料で第１のセクションを製造することができる。   In the pump shown in FIG. 1, the pumping mechanism has a first section 24 and a second section 26. The second section 26 is downstream of the first section 24. During operation, the temperature and pressure of the downstream section 26 is higher than the temperature and pressure of the upstream section 24. Thus, when pumping a corrosive fluid, the section 24 is less corroded than the section 26 is corroded. Because the corrosion layer grows on the rotor and stator of section 24 less than section 26, first section 24 is less resistant to corrosion than second section 26. Therefore, the first section can be manufactured with a material that is relatively cheaper than the material of the second section.

第１のセクション２４と第２のセクション２６はそれぞれ複数のポンピング段１４を有している。第１のセクションは流体流路に沿って第２のセクションと隣接している。図１では、第１のセクションは第１、第２、第３のポンピング段を有し、第２のセクションは第４、第５のポンピング段を有している。他の配置では、第１のセクションと第２のセクションの一方を単一のポンピング段にしてもよい。例えば、第１のセクションが第１ないし第４のポンピング段を有するようにして、第２のセクションが第５のポンピング段を有するようにしてもよい。第１ないし第４段は耐腐食性に劣った材料で製造してもよいが、最終の下流ポンピング段において温度と圧力は最大となるため、この段は耐腐食性の材料で作るのが望ましい。代替として、第１のセクションが第１のポンピング段を有し、第２のセクションが第２ないし第５のポンピング段を有するようにしてもよい。   Each of the first section 24 and the second section 26 has a plurality of pumping stages 14. The first section is adjacent to the second section along the fluid flow path. In FIG. 1, the first section has first, second, and third pumping stages, and the second section has fourth and fifth pumping stages. In other arrangements, one of the first section and the second section may be a single pumping stage. For example, the first section may have first to fourth pumping stages, and the second section may have fifth pumping stages. The first through fourth stages may be made of a material with poor corrosion resistance, but because the temperature and pressure are maximized in the final downstream pumping stage, this stage is preferably made of a corrosion resistant material. . Alternatively, the first section may have a first pumping stage and the second section may have second to fifth pumping stages.

図２および図３に示したグラフと同等のグラフを図４に示している。このグラフは図１に示したポンプにおけるポンプ参照温度に対して腐食層の成長をプロットしたものである。図４によると、２００℃においてポンピング機構の最終段の腐食層の成長が、図２に示されていた約４００μｍから、図３に示した耐腐食性ポンプの場合と同様にちょうど１００μｍを下回る程度にまで減少している。しかしながら、図４においては、中間のもしくは第３段の腐食層の成長が、図２に示した非耐腐食性のポンプについてのものと同様となっている。この点について、中間段が非耐腐食性の材料（例えば球状黒鉛鉄）で製造され、最終段が耐腐食性の材料（例えばニッケルリッチの鉄）で製造されていながらも、中間段の腐食層の成長が最終段のものよりも小さい約５０μｍとなっている。従って、ポンピング機構の第１のセクションと第２のセクションをともに耐腐食性の材料で製造することには利点がなく、このようにするとポンプの無用のコスト増を招くことになる。   A graph equivalent to the graphs shown in FIGS. 2 and 3 is shown in FIG. This graph plots the growth of the corrosion layer against the pump reference temperature in the pump shown in FIG. According to FIG. 4, at 200 ° C., the growth of the corrosion layer in the final stage of the pumping mechanism is less than about 100 μm from about 400 μm shown in FIG. 2 as in the case of the corrosion-resistant pump shown in FIG. It has decreased to. However, in FIG. 4, the growth of the intermediate or third stage corrosion layer is similar to that for the non-corrosion resistant pump shown in FIG. In this regard, the intermediate stage is made of a non-corrosion resistant material (eg spheroidal graphite iron) and the final stage is made of a corrosion resistant material (eg nickel-rich iron), but the intermediate stage corrosion layer The growth is about 50 μm, which is smaller than that of the final stage. Therefore, it is not advantageous to manufacture both the first and second sections of the pumping mechanism with a corrosion-resistant material, which incurs unnecessary cost increases for the pump.

第１のセクションと第２のセクションの材料は、第１のセクションにおける腐食層の成長が第２のセクションにおける腐食層の成長と等しいか、それよりも小さくなるように選択するべきである。腐食性ガスをポンピングする間の各段における腐食層の成長が、各段の間で互いにほぼ等しくなるように選択された材料で、前記ポンピング段の部材が製造されるのが好ましい。このようにすると、様々なポンピング段のための材料をコスト効率よく選択することができ、同時に耐腐食性も受容できる水準を維持できる。 図１では、第２のセクション２６の各ポンピング段１４のローターＲとステーターＳはニッケルリッチ鉄で製造され、第１のセクション２４の各ポンピング段１４のローターＲとステーターＳは球状黒鉛鉄（ＳＧ ｉｒｏｎ、ｓｐｈｅｒｏｉｄａｌ ｇｒａｐｈｉｔｅ ｉｒｏｎ）で製造されている。   The material of the first section and the second section should be selected such that the growth of the corrosion layer in the first section is equal to or less than the growth of the corrosion layer in the second section. Preferably, the pumping stage members are made of materials selected such that the growth of the corrosive layer at each stage during pumping of the corrosive gas is approximately equal to each other between stages. In this way, materials for various pumping stages can be selected cost-effectively while maintaining acceptable levels of corrosion resistance. In FIG. 1, the rotor R and stator S of each pumping stage 14 of the second section 26 are made of nickel-rich iron, and the rotor R and stator S of each pumping stage 14 of the first section 24 are spheroidal graphite (SG). iron, spheroidal graphite iron).

これらの材料の例を図５に示しているが、要求に応じて他の材料を選択することも可能である。例えば、ニッケルはフッ素に対する耐性があるが、くみ出される流体が他の腐食剤を含んでいるときは、適切な耐性材料を選択することが望ましい。さらに、ポンピング機構の第１のセクションは球状黒鉛鉄以外の材料で製造してもよい。   Examples of these materials are shown in FIG. 5, but other materials can be selected according to demand. For example, nickel is resistant to fluorine, but when the fluid being pumped contains other corrosive agents, it is desirable to select an appropriate resistant material. Furthermore, the first section of the pumping mechanism may be made of a material other than spheroidal graphite iron.

このポンプが特に腐食性の強い流体をポンピングするのに用いられる場合、第１のセクションをニッケルリッチ球状黒鉛鉄のような耐腐食性の材料で製造してもよく、第２のセクションを鋳造ステンレス鋼やニッケル合金などの更に耐腐食性に優れた材料で製造してもよい。   If this pump is used to pump a particularly corrosive fluid, the first section may be made of a corrosion resistant material such as nickel-rich spheroidal graphite iron and the second section is cast stainless steel. You may manufacture with the material which was further excellent in corrosion resistance, such as steel and a nickel alloy.

球状黒鉛鉄とニッケルリッチ球状黒鉛鉄の例をそれぞれ３例ずつ、図５に示している。第１のセクションの材料と第２のセクションの材料として、線膨張係数が同様の材料を選ぶのが好ましい。この点について、Ｎｉ−ｒｅｓ Ｄ−５Ｓは、その線膨張係数が１２．６ｍ／ｍＫと、球状黒鉛鉄の係数１２．５ｍ／ｍＫと似ているため、好ましい耐腐食材料である。   FIG. 5 shows three examples each of spheroidal graphite iron and nickel-rich spheroidal graphite iron. It is preferable to select a material having a similar linear expansion coefficient as the material of the first section and the material of the second section. In this regard, Ni-res D-5S is a preferred corrosion resistant material because its linear expansion coefficient is 12.6 m / mK, which is similar to the coefficient of 12.5 m / mK for spheroidal graphite iron.

ニッケルリッチ球状黒鉛鉄材料の組成で、良好な耐腐食性を示すとともに、高温度条件下で良好な強度と剛性を示すものを図６に示している。このような材料において、ニッケルの組成は２４ないし３２重量％と相対的に高いことがわかる。   FIG. 6 shows a composition of nickel-rich spheroidal graphite iron material that shows good corrosion resistance and good strength and rigidity under high temperature conditions. It can be seen that in such materials, the composition of nickel is relatively high, from 24 to 32% by weight.

部材が異なる熱膨張率を有することに伴う問題を避けるため、各セクションのローターＲとステーターＳに、同一の又は類似した材料を用いるのが好ましい。   In order to avoid problems with the members having different coefficients of thermal expansion, it is preferred to use the same or similar materials for the rotor R and stator S of each section.

真空ポンプ１０が図１に簡略化された形で示されている。真空ポンプはクロータイプのポンピング機構を有してもよく、ルートタイプのポンピング機構やその他のタイプのドライポンピング機構、特に効率向上のためにポンピング機構の部材間の運転隙間を小さくする必要のあるポンピング機構を有するようにしてもよい。   A vacuum pump 10 is shown in simplified form in FIG. A vacuum pump may have a claw-type pumping mechanism, a root-type pumping mechanism and other types of dry pumping mechanisms, especially pumping that requires a smaller operating gap between pumping mechanism members to improve efficiency. You may make it have a mechanism.

Claims (9)

腐食性の流体をポンピングするための真空ポンプであって、
高真空度の流体の入口と低真空度の流体の出口の間の流体流路に沿った複数のポンピング段を有するポンピング機構を備え、
前記流路の第１のセクションにおける前記ポンピング機構の材料は、前記第１のセクションの下流側の前記流路の第２のセクションにおける前記ポンピング機構の材料よりも耐腐食性に劣る材料である、真空ポンプ。 A vacuum pump for pumping corrosive fluid,
A pumping mechanism having a plurality of pumping stages along a fluid flow path between a high vacuum fluid inlet and a low vacuum fluid outlet;
The material of the pumping mechanism in the first section of the flow path is a material that is less resistant to corrosion than the material of the pumping mechanism in the second section of the flow path downstream of the first section. Vacuum pump. 前記第１のセクションと前記第２のセクションの材料はそれぞれ、前記第１のセクションの腐食層の成長が前記第２のセクションの腐食層の成長と等しいか、それよりも少なくなるようになっている、請求項１記載の真空ポンプ。   The material of the first section and the second section is such that the growth of the corrosion layer of the first section is equal to or less than the growth of the corrosion layer of the second section, respectively. The vacuum pump according to claim 1. 前記第１のセクションと前記第２のセクションは、前記複数のポンピング段のそれぞれによって定義される、請求項１又は２記載の真空ポンプ。   The vacuum pump according to claim 1 or 2, wherein the first section and the second section are defined by each of the plurality of pumping stages. 前記第１のセクションは前記流体流路にそって前記第２のセクションに隣接している、請求項１ないし３のいずれか１項に記載の真空ポンプ。   The vacuum pump according to any one of claims 1 to 3, wherein the first section is adjacent to the second section along the fluid flow path. 前記ポンピング段はそれぞれステーターとローターを備えている、請求項１ないし４のいずれか１項に記載の真空ポンプ。   The vacuum pump according to claim 1, wherein each of the pumping stages includes a stator and a rotor. 前記第２のセクションのポンピング段はそれぞれニッケルリッチの鉄から製造された部材を備えている、請求項１ないし５のいずれか１項に記載の真空ポンプ。   6. A vacuum pump according to any one of the preceding claims, wherein the pumping stages of the second section each comprise a member made from nickel-rich iron. 前記第１のセクションのポンピング段は球状黒鉛鉄から製造された部材を備えている、請求項１ないし６のいずれか１項に記載の真空ポンプ。   7. A vacuum pump according to any one of the preceding claims, wherein the pumping stage of the first section comprises a member made from spheroidal graphite iron. 前記ポンピング段の部材は、腐食性気体のポンピングの間の各段における腐食層の成長がお互いにほぼ等しくなるように選択された材料で製造される、請求項１ないし７のいずれか１項に記載の真空ポンプ。   8. The pumping stage member according to any one of claims 1 to 7, wherein the pumping stage member is made of a material selected such that the growth of the corrosive layer at each stage during the pumping of the corrosive gas is approximately equal to each other. The vacuum pump described. 前記ポンピング段はルーツポンピング機構またはクローポンピング機構を備える、請求項１ないし８のいずれか１項に記載の真空ポンプ。   The vacuum pump according to any one of claims 1 to 8, wherein the pumping stage comprises a root pumping mechanism or a claw pumping mechanism.
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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3710782A1 (en) * 1987-03-31 1988-10-20 Vacuubrand Gmbh & Co Method and device for pumping out vapours and/or vaporous mixtures and/or gas-vapour mixtures or similar media
JP2004100593A (en) * 2002-09-10 2004-04-02 Toyota Industries Corp Vacuum pump

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9604486D0 (en) * 1996-03-01 1996-05-01 Boc Group Plc Improvements in vacuum pumps
DE19745615A1 (en) * 1997-10-10 1999-04-15 Leybold Vakuum Gmbh Screw vacuum pump with rotors
DE19882986B4 (en) * 1998-03-23 2007-12-27 Taiko Kikai Industries Co., Ltd. Dry vacuum pump
CN1399074A (en) * 2001-07-27 2003-02-26 大晃机械工业株式会社 Dry vacuum pump
GB0223767D0 (en) * 2002-10-14 2002-11-20 Boc Group Plc Pump cleaning
JP2006520873A (en) * 2003-03-19 2006-09-14 株式会社荏原製作所 Positive displacement vacuum pump
JP2005098210A (en) * 2003-09-25 2005-04-14 Aisin Seiki Co Ltd Multistage dry pump
GB0609306D0 (en) 2006-05-11 2006-06-21 Boc Group Plc Vacuum pump
GB2440944B (en) * 2006-08-11 2011-10-12 Itt Mfg Enterprises Inc Rotary lobe pump
GB0705971D0 (en) * 2007-03-28 2007-05-09 Boc Group Plc Vacuum pump

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3710782A1 (en) * 1987-03-31 1988-10-20 Vacuubrand Gmbh & Co Method and device for pumping out vapours and/or vaporous mixtures and/or gas-vapour mixtures or similar media
JP2004100593A (en) * 2002-09-10 2004-04-02 Toyota Industries Corp Vacuum pump

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