CN1399074A - Dry vacuum pump - Google Patents
Dry vacuum pump Download PDFInfo
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- CN1399074A CN1399074A CN 01123498 CN01123498A CN1399074A CN 1399074 A CN1399074 A CN 1399074A CN 01123498 CN01123498 CN 01123498 CN 01123498 A CN01123498 A CN 01123498A CN 1399074 A CN1399074 A CN 1399074A
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- toothed region
- casing
- vacuum pump
- dry vacuum
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
- F05C2201/00—Metals
- F05C2201/04—Heavy metals
- F05C2201/0433—Iron group; Ferrous alloys, e.g. steel
- F05C2201/0436—Iron
- F05C2201/0439—Cast iron
- F05C2201/0442—Spheroidal graphite cast iron, e.g. nodular iron, ductile iron
Abstract
The dry vacuum pump includes a box with inner tube to communicate the suction port and the exhaust port; spiral rotors on the shaft supporting the box and with spiral toth part held inside the iner tube when in mesh state; mutually meshed timing gear installed onto the shafts of the two spiral rotors; and locking mechanism fixing the timing gear onto the shaft. The shafts and the toothed parts are made of nodular cast iron for required vacuum degree. In addition, the toothed part has a conic section in the exhaust end and a small diameter ground pin section to prevent sintering of the toothed part. There is a section straight tube for eliminating silencer and preventing deposit in pipeline.
Description
Technical field
The present invention is a kind of dry vacuum pump about the helical rotor form, particularly the gas that semiconductor-fabricating device took place is necessary the corrosion resistance vacuum pump that uses, and contact has the casing of corrosive fluid, the helical rotor material adopts the dry vacuum pump of tool corrosion resistance nickel alloy material, and the reaction product that prevents the semiconductor-fabricating device processing gas is deposited in the dry vacuum pump on the pipeline that spues.
Background technique
According to the helical rotor form dry vacuum pump of the explanation of Fig. 1, the casing of pump includes: main tank 1; Be installed in the suction side side case 2 of main tank 1 right flank; Be installed on the exhaust end side case 3 of main tank 1 left surface, and the gear-box 4 that is installed on exhaust end side case 3 left sides.5 in motor is installed on the gear-box 4.
Axle direction at main box body 1 internal run-through main tank 1 is provided with inner cylinder portion 1a, in the inner right side of inner cylinder portion 1a, main box body 1 is set is communicated with suction port 6, and the left side of inner cylinder portion 1a is communicated with discharge opening 7 and is located at exhaust end side case 3, and mark 8 is the cooling water chamber of main shaft 1.
Suction side side case 2 is provided with 2 through holes 9, and the bearing housing 10 of inner built-in bearing 11 is installed on through hole 9.At exhaust end side case 32 through holes 12 are set, 13 of the bearing housings that inside keeps bearing 14 are arranged at through hole 12.
2 helical rotors 15 are to be shaped as twin-screw curve, circular arc, the formed spiral helicine toothed region 15a of similar Archimedian curve by the axle right-angle cross-section, constitute with the axial region 15b that is arranged at toothed region 15a two ends.Toothed region 15a is housed under intermeshing state in the inner cylinder portion 1a, and axial region 15b is then supported by bearing 11,14 respectively.
In 2 helical rotors 15,, insert logical timing gear 16 in the left part of axial region 15b at the driving side helical rotor 15 shown in Fig. 1 downside, and fixing with locking mechanism 17.The left end of axial region 15b then links the force-output shaft of motor 5 by connector 18.At the slave end helical rotor 15 shown in Fig. 1 upside, insert logical be engaged in timing gear 16 and timing gear 19 in axial region 15b left part, and fixing with locking mechanism 17.
Fig. 2 is the part enlarged view of Fig. 1, locking mechanism 17 is made of latch members 20 and locking member 21, one side in latch members 20, formation is embedded in the embedding part 22 of the outer circumferential face of axial region 15b, the set spiral hole 23 of end face at relative axial region 15b is provided with through hole 24, forms in the outside of embedding part 22 and presses projection 25.After the embedding part 22 of latch members 20 embedded axial region 15b, what then latch members 20 was very smooth-going was installed on the axial region 15b, simultaneously, pressed projection 25 and was located at the bottom that the side of timing gear 16 connects annular groove 26.
Locking member 21 is a screw, and front end is locked spiral hole 23 by the through hole 24 of latch members 20, presses projection 25 and depresses timing gear 16, and timing gear 16 and bearing 14 crampings are in pressing projection 25 and being fixed in axial region 15b.
After motor 5 rotations, rotate driving side helical rotor 15 simultaneously with connector 18, the rotation of driving side helical rotor 15 is to be conveyed to slave end helical rotor 15 by timing gear 16,19, two helical rotors rotate round about with same speed, and the fluid that sucks from suction port 6 is sent toward discharge opening 7.Owing to reduce pressure gradually in the suction port field, and the spin manifold temperature rising, must carry out water cooling to casing.
As everyone knows, in the employed vacuum pump of semiconductor-fabricating device,, therefore, generally speaking, plate the resin of corrosion resistance all on the surface of inner cylinder portion 1a and helical rotor 15 owing to absorb corrosive gas.For example, with teflon coating, defric coating (polyamide resin) etc., on the surface of helical rotor 15, the inner face electroplating thickness of inner cylinder portion 1a is 25～30 microns.
But, in semiconductor-fabricating device, make the electricity consumption oar make micro machining recently and more and more come into one's own, with the purpose of peace and quietization, CF flows in manufacture process
4, C
2F
6Having begun majority in the fluoride device is used.Particularly, electric oar CVD (Chemical vapour deposition) and electric oar etcher majority are used, and this process step is the nitrogenize resultant of paying on device in order to remove, and this gas evokes the plain F* of being of electric oar generation activate fluorine.Because this F* is chemically very active, with the H in the processing gas
2Reaction forms HF.HF corrosivity is extremely strong, both can corrode plated resin, also can make its efflorescence.Particularly adopting the vacuum pump that resultant technology takes place, is in order to prevent that resultant from solidifying accumulation in casing, promote the reaction of HF that electrodeposited resin is peeled off owing to impose high temperature.
When imposing on after helical rotor 15 surfaces, inner cylinder portion 1a surface thickness are about 25～30 microns plated resin and peel off, between helical rotor 15 and inner cylinder portion 1a, produce 100～200 microns gap, the deterioration that the vacuum pump performance is extreme.Because dry vacuum pump does not use the relation of sealing liquid, being expanded into of this gap is great defective.
A kind of way is that helical rotor, casing 1 are not electroplated, and changes the material that uses good corrosion resistance into, as solving countermeasure.Because as the awkward material that cuts of SUS (stainless steel) material of corrosion resistance material, both complicated and to require high dimensional accuracy be unsuitable for the shape of helical rotor 15, and it is big and be easy to generate the shortcoming of sintering to have a thermal expansion coefficient, therefore can't use.
For this reason, in the high nodular cast iron of mechanical strength, add nickel, make its one-tenth have the corrosion resistance material, and make helical rotor 15 and casing 1, thermal expansion coefficient is different with the adding quantity of nickel, because the thermal expansion coefficient of the locking mechanism made from low carbon steel 17 is different, therefore, on-stream locking mechanism 17 becomes flexible, and timing gear 16,19 is produced slide, and helical rotor 15 comes in contact problem each other.
Because of the bearing 14 that supports axial region 15 and the bearing embedding part of bearing housing 13 crawl taking place easily again, and then forms the damage of bearing 14.
The present invention utilizes the thermal expansion coefficient characteristics different with the adding quantity of nickel, makes the identical nickeliferous nodular cast iron made from low carbon steel of locking mechanism 17 thermal expansion coefficient, in the hope of addressing the above problem.
In addition, as previously mentioned, words when the rotation of the force-output shaft of motor 5, the helical rotor 15 of driving side rotates thereupon, via timing gear 16, the helical rotor 15 of 19 slave ends, also rotate round about with same speed, toothed region 15a, 15a is under intermeshing state, in the inner cylinder portion 1a of main tank 1, rotate, the fluid that suction port 6 from main tank 1 is sucked, send discharge opening 7 (with reference to Fig. 8) to side case 3, still, because toothed region 15a, the temperature-rise ratio suction side of 15a exhaust end is big, therefore, consider the thermal expansion of exhaust end, at toothed region 15a, the external diameter of 15a is towards exhaust end, and (L is toothed region 15a to be arranged to the conical surface of 1/ (10L) path, the length of 15a).
Thereby, the internal diameter of corresponding main tank 1 inner cylinder portion 1a, the suction side outer end diameter dimension D 1 of toothed region 15a, 15a, forming diameter is the size in the gap of 0.2～0.25mm; Corresponding to the internal diameter of main tank 1 inner cylinder portion 1a, the exhaust end outer end diameter dimension D 2 of toothed region 15a, 15a, forming diameter is the size in the gap of 0.3～0.35mm.
The Ni-hard of dry vacuum pump has very high corrosion resistance, and this kind occasion is effectively, but also has following problem:
This material has corrosion resistance, the reverse side machinability is but not good, the length of main tank 1 inner cylinder portion 1a, if length reaches the about five times situation of inner cylinder portion 1a internal diameter, this inner cylinder portion 1a adds man-hour holing, because drilling rod BB bears very big cutting opposing, thereby can bend, and the problem (with reference to Fig. 9) of drilling rod BB front end tool BT escape also can take place.
If with the inner face of main tank 1 inner cylinder portion 1a, 1/2L processes respectively from both sides, then drilling rod BB can shorten.But owing to after a side 1/2L done boring, main tank 1 is become the relation of readjusting towards 180 degree, therefore the center line of two inner faces can produce the deviation of 1/100～2/100mm after process finishing.If positional deviation a little takes place center line, the internal diameter of inner cylinder portion 1a inner face central part is the same when diminishing, and formation is contacted with the outer circumferential face (with reference to Figure 10) of toothed region 15a, the 15a of spiral 15,15 easily.
In addition, Ni-hard is bigger than general cast iron thermal expansion coefficient, can produce the inequality of being heated during high temperature and cause the problem of being out of shape.
Because the high temperature of case is not just being added casing during the pump running, after this problem of sintering phenomenon, the corresponding way that does not also address this problem at present will take place in the slide part branch of casing and helical rotor.
For addressing the above problem, carried out all experiments, still, because the performance requirement of dry vacuum pump, at least from running (from cooling time), in 15～20/domestic demand arrival 10
-3The degree of vacuum of Torr (about 1pa), the way that enlarges the gap that helical rotor diminished just to preventing sintering can not be dealt with problems.
Also have the method for coating resin film in the helical rotor outside and since above-mentioned about 20～30 microns resin film peel off and the gap enlarges more, pump performance is greatly reduced, so resin film mode and inadvisable.By all experiments, the case of Ni-hard manufacturing and helical rotor be the thermal expansion when high temperature and the inequality of being heated really, if near the casing central part to exhaust end, fully take into account the centre deviation of thermal expansion amount, amount of deformation and present machining accuracy, to guarantee the gap, can be described as best countermeasure.
The present invention provides a kind of dry vacuum pump, find out from doing experimental result, construct according to the accurate to dimension scope that it allowed, the cast iron material that will contain cutting property nickel in distress is made casing and helical rotor, by the dimensional accuracy of guaranteeing that experimental result allows, even make pump under high-temperature condition, also sintering phenomenon can not take place in the running.
Further, also there is other problems in dry vacuum pump:
As shown in figure 13, the fluid that the suction port 6 by casing 1 is sucked is sent to the discharge opening 7 of case 1, by continuing at the pipeline 30 that spues of discharge opening 7, midway by baffler 31, is expelled to gas washer 32 from the end of the pipeline 30 that spues.
If the processing gas of semiconductor-fabricating device is a low pressure, reaction with the processing gas such as CVD (Chemical Vapour Desposition), TEOSAL Etcher of film former nitride, the dry vacuum pump of the processing gas of its resultant generally is called the hard processing gas and uses.
Flow into the processing gas in the dry vacuum pump A casing 1, when discharge opening 7 (with reference to Figure 13) by high compression, AlCl2, the NH3CI etc. that generate by the heat of compression, hard processing are enhanced temperature and do not solidify in casing 1, and send from discharge opening 7.
But, 10
0～10
-3Pressure absorption about torr is atmosphere pressure state 1/1000～10 from processing gas
-6The rarefied gas of degree, because temperature height and thermal capacity are little, simply in the pipeline 30 that spues, baffler 31 coolings, resultant in the cooling after coagulation gas stops up the pipeline that spues time and again, make the motor 5 of the dry vacuum pump A in the semiconductor manufacturing take place to stop automatically or the sintering accident, bring tremendous loss to semiconductor production.
In order to prevent solidifying of resultant, be necessary to prevent that rarefied gas from reducing temperature in the pipeline 30 that spues, load onto heater 33 and insulation equipment 34, rarefied gas can not cooled off at the pipeline 30 that spues, or the pipeline 30 decomposition cleanings that often will spue, the resultant of being piled up is removed.
But, if adopt heater 33, on preventing fire or save the energy aspect and inappropriate.For fear of the decomposition cleaning of trouble, under the situation of not using heater 33, the temperature of the pipeline 30 that must prevent to spue reduces.
Summary of the invention
Purpose of the present invention will provide a kind of dry vacuum pump exactly, reduces except preventing the processing gas temperature, simultaneously, makes the dry vacuum pump pipeline 30 that spues not pile up resultant.
For reaching above-mentioned purpose, first kind of dry vacuum pump provided by the invention includes: casing has the inner cylinder portion that is communicated with suction port and discharge opening; A plurality of helical rotors, it is integrally formed with a right angle section configuration by twin-screw curve, camber line, the formed spiral helicine toothed region of class Archimedian curve for being supported on this casing axial region, and this toothed region is housed in the above-mentioned inner cylinder portion under intermeshing state; Timing gear, the son axle that being installed in these a plurality of spirals respectively changes is gone up and is meshing with each other; And locking mechanism, be used for this timing gear is fixed on above-mentioned axle; The material of above-mentioned helical rotor with mass ratio, for containing the nodular cast iron material of 20%～30% nickel, and has essentially identical thermal expansion coefficient with the above-mentioned locking mechanism of low carbon steel manufacturing.Above-mentioned locking mechanism is the latch members that presses protruding point that is connected above-mentioned timing gear by the end outer circumferential face embedding part with chimeric above-mentioned axial region with front end, and constitutes in order to this is pressed the tie member that projection and above-mentioned timing gear compress.
Second kind of dry vacuum pump provided by the invention, its helical rotor is to be the axial region that casing supported by two end part, and the toothed region that is formed at except the outer surface these axial region two end part constitutes, and the axle right-angle cross-section shape of this toothed region is by twin-screw curve, camber line, reaches the asymmetric spiral that the Archimedian curve is constituted, and the toothed region of a pair of helical rotor is meshing with each other, and in the inner cylinder portion of above-mentioned casing, rotate, the fluid in the casing is delivered to discharge opening from suction port.
The present invention can only revise the helical rotor size, also can revise helical rotor and case size simultaneously.
The invention of only revising the helical rotor size is: when the toothed region length of above-mentioned helical rotor is decided to be L, the toothed region external diameter is provided with from the toothed region central part is the conical surface of the path of 1/ (20L) to the fluid exhaust end, what the diameter that forms above-mentioned toothed region towards this conical surface from the position of the above-mentioned toothed region mediad about 10mm in suction side was 3/100～4/100mm path simultaneously grinds the pin working surface.
Revising the invention of helical rotor and case size simultaneously is: when the toothed region length of above-mentioned helical rotor is decided to be L, make the toothed region external diameter be provided with the conical surface that is the path of 6/ (100L)～7/ (100L) from the toothed region central part to the fluid exhaust end, simultaneously from the mediad suction side of above-mentioned toothed region by about 10mm position towards exhaust end, the internal diameter of above-mentioned inner cylinder portion is expanded into 3/100～4/100mm.
In the third dry vacuum pump provided by the invention, its right-angle cross-section shape, be by twin-screw curve, circular arc, and similar Archimedian curve form right-hand screw, with a pair of rotor engaged of left hand screw, be housed in the case, and the processing gas that the suction port from case attracts is discharged from the discharge opening of casing; The helical pitch of this helical rotor is made majority, and the discharge opening position is communicated with N near case
2Supplying pipe, and will link the pipeline that spues of above-mentioned discharge opening and gas washer or trap, be used as the straight tube of removing baffler.
Above-mentioned dry vacuum pump can be used to the processing gas of semiconductor-fabricating device etc. to absorb hardware processing.
Description of drawings
Fig. 1 is the cross-sectional view of dry vacuum pump.
Fig. 2 is the part expanded view of Fig. 1.
Fig. 3 contains nickel ball ratio for nodular cast iron and linear expansion coeffcient concerns schematic representation.
Fig. 4 is the major component longitudinal section of explanation about second kind of vacuum pump the 1st embodiment's spiral rotor-type dry vacuum size provided by the invention.
Fig. 5 is the major component longitudinal section of explanation about second kind of vacuum pump the 2nd embodiment's spiral rotor-type dry vacuum size provided by the invention.
Fig. 6 is the longitudinal section of the known dry vacuum size of explanation.
Fig. 7 is the cross-sectional view of dry vacuum.
Fig. 8 is the longitudinal section of Fig. 7.
Fig. 9 is the drill pipe buckling explanatory drawing.
Figure 10 is the inconsistent explanatory drawing in processing inner face center during from the boring of the both sides of main tank.
Figure 11 is for using hard to add the part sectional plain-view drawing of dry vacuum shown in man-hour about the third vacuum pump provided by the invention.
Figure 12 is the in-built cross-sectional view of expression spiral rotor-type dry vacuum.
Figure 13 uses the known dry vacuum part sectional plain-view drawing of hard processing for expression.
Embodiment
Describe embodiments of the present invention in detail below in conjunction with accompanying drawing.
First kind of dry vacuum pump provided by the invention:
Because the present invention is suitable for dry vacuum shown in Figure 1, therefore use the part symbol identical with the dry vacuum of Fig. 1, it describes omission in detail.
Fig. 3 is for when transverse axis is represented the ratio (mass ratio) that contains nickel in the nodular cast iron, and its longitudinal axis is then represented linear expansion coeffcient α.Clearly, according to the amount variation of nickel, linear expansion coeffcient α has very big variation.
The corrosion resistance of the nodular cast iron of nickel content 28～30%, as shown in table 1, to compare with cast iron, its superiority is very obvious.
Table 1
| The kind of liquid | Temperature (℃) | Rate of corrosion (g/m3hr) | Remove corrosion product | ||
| Graphite cast iron | Cast iron | Nickeliferous 28～30% graphite cast iron | |||
| Fluoric acid 10% | 10～20 | ????4.6 | ????0.02 | ||
| | 20 | ????3.4 | ????24.8 | Have | |
| ????4.5 | ????23.4 | Do not have | |||
| Hydrochloric acid 1.8% | Room temperature | ????22.6 | ????0.25 | ||
| Hydrochloric acid 3.7% | Room temperature | ????25.9 | ????0.19 | ||
| Hydrochloric acid 10.0% | Room temperature | ????25.8 | ????0.35 | ||
| Hydrochloric acid 19.0% | Room temperature | ????26.2 | ????0.96 | ||
| Hydrochloric acid 28.0% | Room temperature | ????25.8 | ????2.6 | ||
| Acetic acid 0.5% | ????0.043 | ????1800 | Do not have | ||
Promptly be, if with cast iron, nodular cast iron, and nickeliferous 28～30% nodular cast iron compare with the speed that watery hydrochloric acid corrodes, then become 90.4: 12.4: 1, nickeliferous nodular cast iron clearly has sufficient corrosion resistance.
If when helical rotor 15 is made nickeliferous 28～30% nodular cast iron, because thermal expansion coefficient is identical with locking mechanism 17, locking mechanism 17 takes place loosening, timing gear 16,19 is unlikely to produce sliding problem, but the temperature rising thermal expansion that forms during running, even how helical rotor 15 fastens locking mechanism 17 also it doesn't matter, because in the present invention, the nickel content ratio (mass ratio) of nodular cast iron expanded as 20～30%.
The toothed region 15a of helical rotor 15 and axial region 15b are to be that 20～30% nodular cast iron integrally casting forms with nickel content (mass ratio), because main tank 1 also constitutes with same material, therefore can absorb the very strong gas of corrosivity.Even the temperature of helical rotor 15 is crossed and is risen to 150～200 ℃ during running because locking mechanism 17 is not loosening, even therefore do not use key fixedly timing gear 16,19 compare the processing of trouble, do not worry that timing gear 16,19 slides yet.
Because 1 need of locking mechanism are fastened locking member 21 and are got final product, therefore, fixing of timing gear 16,19 is very simple, and if loosening locking member 21, then can very simple loosening timing gear 16,19, therefore can be easy to adjust the error of 16,19 of timing gears.
According to above-mentioned structure, can reach following effect.
(1) because toothed region and the axial region of helical rotor is that integrally casting forms, therefore, having saved in axial region and toothed region is chimeric both man-hour under the situation of not consubstantiality, has the effect that reduces cost.In addition, for Construction integration, identical size can be made with the footpath of axial region in the footpath at the bottom of the spiral, it is big to make the average fluid pressure of once rotating of helical rotor withdraw from quantitative change simultaneously.
(2) owing to adopt nickeliferous nodular cast iron to make helical rotor and casing, even be used for the vacuum pump of hardware program semiconductor manufacturing technology, also plated resin needn't be needed, thereby the problem that the vacuum pump performance is reduced because of the plated resin disengaging can be solved.
(3) nickel by nickeliferous nodular cast iron contains ratio, comply with fixed numerical value, locking mechanism is not become flexible, thereby timing gear is not slided.
Second kind of dry vacuum pump provided by the invention:
The 1st embodiment
Fig. 4 is the longitudinal section about the helical rotor form dry vacuum pump of the 1st embodiment shown in second kind of dry vacuum pump provided by the invention, because the structure of pump is identical with known vacuum pump, shown in Fig. 7,8, therefore give prosign with known vacuum pump with regard to same part, omit its detailed description.
The shape of toothed region 15a, 15a is identical with known situation, make the lead of screw number become many, be divided into the fluid-tight chamber a plurality of by spiral, even near toothed region 15a, the 15a central part to the gap enlargement in the field of exhaust end, most spiral blockings is leaked the formation potted line and is used, external diameter at toothed region 15a, 15a, to fluid exhaust end (left side among Fig. 5), be arranged to the conical surface (L is the length of toothed region 15a, 15a) of 1/ (20L) path from the central part of toothed region 15a, 15a.
The diameter D3 of the end, suction side of toothed region 15a, 15a is for inner cylinder portion 1a in view of the above, and diameter has the gap of 0.15～0.20mm, and is relative, and the diameter D4 of toothed region 15a, 15a exhaust end end is for inner cylinder portion 1a, and diameter becomes the gap of 0.35～0.40mm.
Further, near suction side Δ L (Δ L is 10mm at present embodiment) point, be arranged to the pin face that grinds of 3/100～4/100mm path from the central authorities of toothed region 15a, 15a to the diameter of toothed region 15a, the 15a of discharge opening 7 directions.
This grinds the pin face and intersects with above-mentioned conical surface.
Constitute aforesaid vacuum pump, by running, the thermal expansion of the exhaust end of its toothed region 15a, 15a is bigger than the suction side, but owing to be arranged to the conical surface of path to the fluid exhaust end from toothed region 15a, 15a central part, gap between on-stream toothed region 15a, 15a and inner cylinder portion 1a, across the total length of toothed region 15a, 15a, all can keep the appropriate value of uniformity.
In addition, solve the problem that inner cylinder portion 1a central part often only has path by grinding bevel.
The 2nd embodiment
Fig. 5 is the helical rotor dry vacuum pump longitudinal section about the 2nd embodiment shown in the present invention the 2nd side, is to have only toothed region 15a, 15a the gap to be set to guarantee processing at inner cylinder portion 1a with the 1st embodiment's difference.
In the 2nd embodiment,,, to fluid exhaust end part, be arranged to the conical surface of 6/ (100L)～7/ (100L) path from the central part of toothed region 15a, 15a the external diameter of toothed region 15a, 15a if the length of toothed region 15a, 15a is decided to be L.
The diameter D3 of the end, suction side of toothed region 15a, 15a has the gap of 0.15～0.20mm for inner cylinder portion 1a in view of the above; Relative, the diameter D5 of the exhaust end end of toothed region 15a, 15a has the gap of 0.30～0.35mm for inner cylinder portion 1a.
Further, from the central authorities of inner cylinder portion 1a position,, the expansion inside diameter D 6 that enlarged-diameter is 3/100～4/100mm is set at inner cylinder portion 1a to the exhaust end direction near suction side Δ L (Δ L is 10mm at present embodiment).
This enlarges effect, the effect of inside diameter D 6, with the diameter D4 of the exhaust end end of toothed region 15a, 15a among the 1st embodiment and to grind bevel identical.
After adopting second kind of described structure of dry vacuum pump provided by the invention, can reach following effect.
When absorbing high temperature and acrid gas with dry vacuum pump, the helical rotor and the casing of contact gas, preferably the Ni-hard by good corrosion resistance is constituted, but, Ni-hard has cutting property of difficulty, and, can produce the sintering problem to helical rotor and casing because the thermal expansion in when running has the very big inequality of being heated.Yet, the present invention is according to the processing of implementing institute's sizing precision at the external diameter of helical rotor, or the processing of the inner cylinder portion institute sizing precision of external diameter by implementing helical rotor and casing, make the absorbability of dry vacuum pump be unlikely to variation, the sintering problem in the time of also can solving simultaneously the problem of cutting property of casing difficulty and running.
The third dry vacuum pump provided by the invention:
Figure 11 is the part sectional plain-view drawing of expression vacuum pump A1 of the present invention, and discharge opening 7 is provided with the through hole 35 to the confined chamber outside opening near casing 1, and other is provided with N
2Supplying pipe 37 is arranged on outside N to continue
2 Supply source 36 and through hole 35 are at N
2Supplying pipe 37 is provided with voltage stabilizer 38, flowmeter 39 midway.
A plurality of by the lead of screw number of the toothed region 15a of helical rotor 15 is made, even supply with N near confined chamber at discharge opening 7
2(nitrogen) gas, N
2Gas can adverse current yet to suction port 6, the processing gas mixing N in the confined chamber
2Gas increases thermal capacity, delivers to the pipeline 40 that spues via discharge opening 7.The pipeline 40 that spues, the one end is connected with discharge opening 7, and the other end then connects gas washer 32 (or trap), and for not establishing the straight tube of baffler, the outside is then identical with known vacuum pump midway, and volume is with insulation material 34.So-called straight tube, its meaning be inner face across total length and there is not concavo-convex pipe fully, be not have crooked place in the pipe arrangement fully.But the gas washer 32 of discharge pipe 40 ends also dual-purpose is a baffler.
Effect at the dry vacuum pump of the above structure is illustrated, and from the processing gas that suction port 6 is absorbed, accommodates into formed confined chamber by helical rotor 15, when near discharge opening 7, mixes from N
2The N that supplying pipe 37 is supplied with
2Gas increases thermal capacity.
Because helical rotor has a plurality of helical pitches, blocked and being communicated with of suction port 6 at confined chamber near discharge opening 7, make the mixed gas of boost pressure be not interposing at adverse current to suction port 6.
Send to the mixed gas of the pipeline 40 that spues from discharge opening 7, with processing gas specific heat capacity increase mutually, pipeline 40 inner faces are not have concavo-convex straight tube owing to spue, heat transfer area reduces than known situation, mixed gas seldom reduces temperature in the pipeline 40 that spues, the temperature that maintenance is also higher than the sublimation temperature of resultant in the processing gas is discharged by gas washer 32.
Even thereby do not use heater, solidifying, piling up of the resultant in the pipeline 40 that spues can be prevented, and the motor in the running does not have self-braking major accident, simultaneously yet unnecessary troublesome work of continually pipeline that spues being decomposed cleaning.
After adopting the above structure, can reach following effect.
(1) at the known dry vacuum pump that uses hard processing, the on-stream problem that self-braking major accident can take place, still, the present invention does not use heater, passes through N
2The supply of gas can prevent the solidifying, pile up of resultant in the pipeline that spues, and solves known problem.Owing to do not use heater,, and can save the energy for fire accident aspect both safety.
(2) owing to removed the baffler that is positioned at the pipeline that spues, replace baffler and wait with gas washer, not only solved in the pipeline that spues resultant solidify, pile up prevent and decompose the cleaning problem, also reach the effect that allows all costs of dry vacuum pump reduce simultaneously.
Claims (6)
1. dry vacuum pump, it includes: casing has the inner cylinder portion that is communicated with suction port and discharge opening; A plurality of helical rotors, it is integrally formed with a right angle section configuration by twin-screw curve, camber line, the formed helical toothed region of class Archimedian curve being supported on this casing axial region, and this toothed region is housed in the above-mentioned inner cylinder portion under the state of being meshing with each other; Timing gear, the axle that is installed in these a plurality of helical rotors is respectively gone up and is meshing with each other; And locking mechanism, be used for this timing gear is fixed on above-mentioned axle, it is characterized in that: the material of above-mentioned helical rotor for containing the nodular cast iron material that mass ratio is 20%～30% nickel, and has approximately identical thermal expansion coefficient with the above-mentioned locking mechanism of low carbon steel manufacturing.
2. dry vacuum pump according to claim 1, it is characterized in that: above-mentioned locking mechanism is the latch members that presses protruding point that is connected above-mentioned timing gear by the embedding part of the end outer circumferential face with chimeric above-mentioned axial region with front end, and is used for that this is pressed the tie member that projection and above-mentioned timing gear compress and constitutes.
3. dry vacuum pump, its helical rotor is made of by axial region that casing supported and the toothed region that is formed at except the outer surface these axial region two end part two end part, and the axle right-angle cross-section shape of this toothed region is by the twin-screw curve, camber line, reach the asymmetric spiral that the Archimedian curve is constituted, and the toothed region of a pair of helical rotor is meshing with each other, and in the inner cylinder portion of above-mentioned casing, rotate, fluid in the casing is delivered to discharge opening from suction port, it is characterized in that: when the toothed region length of above-mentioned helical rotor is decided to be L, make the toothed region external diameter be provided with from the central part of toothed region and be the conical surface of the path of 1/ (20L) to the fluid exhaust end, what the diameter that forms above-mentioned toothed region towards this conical surface from the position of the above-mentioned toothed region mediad about 10mm in suction side was 3/100～4/100mm path simultaneously grinds the pin working surface.
4. dry vacuum pump, its helical rotor is made of by axial region that casing supported and the toothed region that is formed at except the outer surface these axial region two end part two end part, and the axle right-angle cross-section shape of this toothed region is by the twin-screw curve, the asymmetric spiral that camber line and Archimedian curve are constituted, and the toothed region of a pair of helical rotor is meshing with each other, and in the inner cylinder portion of above-mentioned casing, rotate, fluid in the casing is delivered to discharge opening from suction port, it is characterized in that: when the toothed region length of above-mentioned helical rotor is decided to be L, be provided with the conical surface that is the path of 6/ (100L)～7/ (100L) from the central part of toothed region to the fluid exhaust end at the toothed region external diameter, simultaneously from above-mentioned toothed region mediad suction side by the position of about 10mm towards exhaust end, above-mentioned inner cylinder portion internal diameter is expanded into 3/100～4/100mm.
5. dry vacuum pump, belong to spiral rotor-type, axle right-angle cross-section shape is to be formed and the paired helical rotor engagement of left and right spiral and being contained in the casing by twin-screw curve, circular arc and similar Archimedian curve, and the processing gas that will be sucked by the casing suction port is by the discharge opening discharge of casing; It is characterized in that: the helical pitch number of this helical rotor is made majority, and the discharge opening position is communicated with N near casing
2Supplying pipe with linking the pipeline that spues of above-mentioned discharge opening and gas washer or trap, is used as the straight tube of removing baffler.
6. dry vacuum pump according to claim 5 is characterized in that: above-mentioned dry vacuum pump is a kind ofly to use in the rigid processing that absorbs processing gas such as semiconductor-fabricating device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 01123498 CN1399074A (en) | 2001-07-27 | 2001-07-27 | Dry vacuum pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 01123498 CN1399074A (en) | 2001-07-27 | 2001-07-27 | Dry vacuum pump |
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| Publication Number | Publication Date |
|---|---|
| CN1399074A true CN1399074A (en) | 2003-02-26 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 01123498 Pending CN1399074A (en) | 2001-07-27 | 2001-07-27 | Dry vacuum pump |
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| CN (1) | CN1399074A (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN101326369B (en) * | 2005-12-07 | 2010-10-06 | 丰田自动车株式会社 | Roots pump and fuel cell system |
| CN102414449A (en) * | 2009-04-29 | 2012-04-11 | 爱德华兹有限公司 | Vacuum pump |
| CN101321954B (en) * | 2005-12-08 | 2012-06-13 | Ghh-兰德旋转式压缩机有限责任公司 | Multi-step helical screw compressor unit |
| CN103486023A (en) * | 2013-07-10 | 2014-01-01 | 重庆德衡科技有限公司 | Screw pump and screw |
| CN104141606A (en) * | 2014-07-07 | 2014-11-12 | 扬州大学 | Conical double-screw compression pump |
| CN105545747A (en) * | 2014-10-27 | 2016-05-04 | 株式会社日立产机系统 | Compressor, oil-free screw compressor, and method of manufacturing casing used therefor |
| CN105840498A (en) * | 2015-02-02 | 2016-08-10 | 莱斯特里兹泵有限责任公司 | Fuel pump |
| CN105952645A (en) * | 2016-04-08 | 2016-09-21 | 山东伯仲真空设备股份有限公司 | Arc molded line screw rotor for screw vacuum pump |
| CN105971877A (en) * | 2016-07-11 | 2016-09-28 | 中国石油大学(华东) | Conical screw rotor and double-screw vacuum pump thereof |
| CN109690088A (en) * | 2016-08-30 | 2019-04-26 | 莱宝有限公司 | Vacuum pump rotor |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN101326369B (en) * | 2005-12-07 | 2010-10-06 | 丰田自动车株式会社 | Roots pump and fuel cell system |
| CN101321954B (en) * | 2005-12-08 | 2012-06-13 | Ghh-兰德旋转式压缩机有限责任公司 | Multi-step helical screw compressor unit |
| CN102414449A (en) * | 2009-04-29 | 2012-04-11 | 爱德华兹有限公司 | Vacuum pump |
| CN102414449B (en) * | 2009-04-29 | 2015-12-16 | 爱德华兹有限公司 | Vacuum pump |
| CN103486023A (en) * | 2013-07-10 | 2014-01-01 | 重庆德衡科技有限公司 | Screw pump and screw |
| CN103486023B (en) * | 2013-07-10 | 2015-10-28 | 重庆德衡科技有限公司 | Screw pump and screw rod |
| CN104141606A (en) * | 2014-07-07 | 2014-11-12 | 扬州大学 | Conical double-screw compression pump |
| CN105545747B (en) * | 2014-10-27 | 2019-05-21 | 株式会社日立产机系统 | The manufacturing method of compressor and oil free screw compressor and its shell |
| CN105545747A (en) * | 2014-10-27 | 2016-05-04 | 株式会社日立产机系统 | Compressor, oil-free screw compressor, and method of manufacturing casing used therefor |
| US10316841B2 (en) | 2014-10-27 | 2019-06-11 | Hitachi Industrial Equipment Systems Co., Ltd. | Compressor, oil-free screw compressor, and method of manufacturing casing used therefor |
| CN105840498A (en) * | 2015-02-02 | 2016-08-10 | 莱斯特里兹泵有限责任公司 | Fuel pump |
| CN105840498B (en) * | 2015-02-02 | 2018-12-14 | 莱斯特里兹泵有限责任公司 | Petrolift |
| CN105952645A (en) * | 2016-04-08 | 2016-09-21 | 山东伯仲真空设备股份有限公司 | Arc molded line screw rotor for screw vacuum pump |
| CN105971877B (en) * | 2016-07-11 | 2017-11-14 | 中国石油大学(华东) | A kind of conical screw rotor and its Twin-screw vacuum pump |
| CN105971877A (en) * | 2016-07-11 | 2016-09-28 | 中国石油大学(华东) | Conical screw rotor and double-screw vacuum pump thereof |
| CN109690088A (en) * | 2016-08-30 | 2019-04-26 | 莱宝有限公司 | Vacuum pump rotor |
| CN113209737A (en) * | 2021-04-29 | 2021-08-06 | 王常秀 | Microbial feed additive fermentation air multistage filtration bacteria removing device |
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