JP2009536707A - Vacuum pump - Google Patents

Vacuum pump Download PDF

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JP2009536707A
JP2009536707A JP2009508500A JP2009508500A JP2009536707A JP 2009536707 A JP2009536707 A JP 2009536707A JP 2009508500 A JP2009508500 A JP 2009508500A JP 2009508500 A JP2009508500 A JP 2009508500A JP 2009536707 A JP2009536707 A JP 2009536707A
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pump
austempered ductile
pump according
mass
stator
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JP2009536707A5 (en
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エマニュエル ウゾマ オコローフォー
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エドワーズ リミテッド
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F04C18/0207—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
    • F04C18/0215—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form where only one member is moving
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/123—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially or approximately radially from the rotor body extending tooth-like elements, co-operating with recesses in the other rotor, e.g. one tooth
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
    • F05C2201/00—Metals
    • F05C2201/04—Heavy metals
    • F05C2201/0433—Iron group; Ferrous alloys, e.g. steel
    • F05C2201/0436—Iron
    • F05C2201/0439—Cast iron
    • F05C2201/0442—Spheroidal graphite cast iron, e.g. nodular iron, ductile iron
    • F05C2201/0445—Austempered ductile iron [ADI]

Abstract

ステータ部品と、少なくとも１つのロータ部品と、を有する乾式真空ポンプ。ポンプの中を通る腐食性ガスおよび研磨粒子に対するポンプの耐性を改善するために、ステータ部品および／または前記少なくとも１つのロータ部品が、オーステンパダクタイル鋳鉄で形成される。
【選択図】図２A dry vacuum pump having a stator component and at least one rotor component. In order to improve the pump's resistance to corrosive gases and abrasive particles passing through the pump, the stator part and / or the at least one rotor part are formed of austempered ductile iron.
[Selection] Figure 2

Description

本発明は、乾式真空ポンプに関する。   The present invention relates to a dry vacuum pump.

乾式真空ポンプは、製品の製造のためにきれいなおよび／または低圧環境を提供するために、工業工程で広く用いられている。用途は、製薬、半導体、およびフラットパネル製造工業を含む。そのようなポンプは、本質的に乾式（またはオイルフリー）の排気機構を含むが、一般的には、有効的であるために、潤滑を必要とする、排気機構を駆動するための、ベアリングや伝達装置のような或る構成部品をも含む。乾式ポンプの例は、ルーツ、ノーシー（または「クロー」）、スクリューおよびスクロールポンプを含む。ルーツおよび／またはノーシーロータ部品を組み込んだ乾式ポンプは、一般に、各々、それぞれの対の噛み合いロータ部品を収容する、複数の排気チャンバを構成するステータ部品を有する多段容積型ポンプである。ロータ部品は、逆回転軸に配置され、各チャンバで同じタイプの輪郭を有してもよいし、あるいは輪郭がチャンバ毎に変化してもよい。   Dry vacuum pumps are widely used in industrial processes to provide a clean and / or low pressure environment for the manufacture of products. Applications include the pharmaceutical, semiconductor, and flat panel manufacturing industries. Such pumps include an essentially dry (or oil-free) exhaust mechanism, but in general, bearings or drive to drive the exhaust mechanism that require lubrication to be effective. Also includes certain components such as transmission devices. Examples of dry pumps include roots, no sea (or “claw”), screws and scroll pumps. Dry pumps incorporating roots and / or no-sea rotor parts are generally multistage positive displacement pumps having a stator part that forms a plurality of exhaust chambers each containing a respective pair of meshing rotor parts. The rotor parts are arranged on the counter-rotating shaft and may have the same type of contour in each chamber, or the contour may vary from chamber to chamber.

鋳鉄品が、長い間、乾式真空ポンプ用ステータおよびロータ部品の製造に用いられてきている。しかしながら、半導体産業では、塩素、三塩化ホウ素、臭化水素、フッ素、および三フッ化塩素のような比較的腐食性のガスの高流量の使用の増加により、激しい腐食、従って、鋳鉄ステータおよびロータ部品の比較的短い寿命をもたらしている。そのような腐食は、ポンプあるいは腐食した部品の交換およびその結果として起こるプロセス中断時間と関連したコストに加えて、装置の故障、プロセスガスの漏出、およびプロセス汚染の可能性をもたらすことがある。   Cast iron products have long been used to manufacture stators and rotor parts for dry vacuum pumps. However, in the semiconductor industry, the increased use of higher flow rates of relatively corrosive gases such as chlorine, boron trichloride, hydrogen bromide, fluorine, and chlorine trifluoride has led to severe corrosion and hence cast iron stators and rotors. Resulting in a relatively short life of the parts. Such corrosion can lead to equipment failure, process gas leaks, and the possibility of process contamination, in addition to costs associated with replacement of pumps or corroded parts and the resulting process interruption time.

これに照らして、腐食性ガスに曝される部品表面に、フルオロポリマーまたはポリイミド材料の樹脂またはポリマーコーティングを形成することによって、これらの部品を不動態的に保護することが知られている。そのようなコーティングは、時間が経つにつれて劣化する傾向を有し、その結果、下にある鋳鉄を腐食性ガスに曝すコーティングのピーリングあるいはフレーキングを生じる。他の代替は、これらの部品を富ニッケル鋳鉄、例えば、ダクタイルニレジストあるいは優れた耐食性を有するステンレス鋼で形成することにある。しかしながら、ニレジスト鋳鉄およびステンレス鋼は、比較的高価であり、機械加工が難しいので、ロータおよびステータ部品の製造向きの費用効果のオプションを提供しない。   In light of this, it is known to passively protect these parts by forming a resin or polymer coating of fluoropolymer or polyimide material on the surface of the parts exposed to corrosive gases. Such coatings tend to degrade over time, resulting in coating peeling or flaking that exposes the underlying cast iron to corrosive gases. Another alternative consists in forming these parts from nickel-rich cast iron, such as ductile nires or stainless steel with excellent corrosion resistance. However, Ni-resist cast iron and stainless steel are relatively expensive and difficult to machine and therefore do not provide a cost-effective option for manufacturing rotor and stator components.

本発明は、ステータ部品と、少なくとも１つのロータ部品と、を有する乾式真空ポンプであって、ステータ部品および／または前記少なくとも１つのロータ部品が、オーステンパダクタイル鋳鉄で形成される、乾式真空ポンプを提供する。   The present invention provides a dry vacuum pump having a stator component and at least one rotor component, wherein the stator component and / or the at least one rotor component is formed of austempered ductile cast iron. To do.

ステータ部品は、ステータ部品内で逆回転するようになっている、第１および第２の噛み合いロータ部品を収容する。好ましい実施形態では、ロータ部品は、ルーツ輪郭を有するが、必要に応じてノーシーあるいはスクリュー輪郭を有してもよい。   The stator component houses first and second meshing rotor components that are adapted to reversely rotate within the stator component. In a preferred embodiment, the rotor part has a root profile, but may have a no-sea or screw profile as desired.

ポンプは、多段ポンプの形態であるのがよく、該ポンプでは、ステータ部品が、連続して配置され、且つ、各々、オーステンパダクタイル鋳鉄で形成されたそれぞれのロータ部品を収容する、複数の相互連結された排気チャンバを構成する。噛み合いロータ部品は、それぞれのシャフトに配置されるのがよく、ポンプは、一方のシャフトから他方のシャフトにトルクを伝達するためのギア組立体を有し、ギア組立体の少なくとも１つのギアは、好ましくは、オーステンパダクタイル鋳鉄で形成される。   The pump may be in the form of a multi-stage pump, in which the stator parts are arranged in series and each include a plurality of interconnects containing respective rotor parts formed of austempered ductile iron An exhaust chamber is formed. The meshing rotor parts may be disposed on each shaft, and the pump has a gear assembly for transmitting torque from one shaft to the other shaft, and at least one gear of the gear assembly is Preferably, it is formed of austempered ductile cast iron.

変形例では、ポンプは、ステータ部品が、端プレートと、該端プレートから延びる第１のらせんラップと、を有する固定スクロール部材を有し、前記少なくとも１つのロータ部品が、端プレートと、該端プレートから延び、第１のらせんラップと噛み合う、第２のらせんラップと、を有する環状スクロール部材を有するスクロールポンプの形態であるのがよい。スクロール部材の各々は、好ましくは、オーステンパダクタイル鋳鉄で形成される。   In a variation, the pump includes a fixed scroll member having a stator component having an end plate and a first helical wrap extending from the end plate, wherein the at least one rotor component includes the end plate and the end plate. It may be in the form of a scroll pump having an annular scroll member having a second helical wrap extending from the plate and meshing with the first helical wrap. Each of the scroll members is preferably formed of austempered ductile cast iron.

オーステンパダクタイル鋳鉄は、好ましくは少なくとも９０％の黒鉛球状化率を有する。   Austempered ductile cast iron preferably has a spheroidization rate of at least 90%.

オーステンパダクタイル鋳鉄は、好ましくは、針状フェライトおよび炭素安定化オーステナイトのマトリックスを有する。   The austempered ductile iron preferably has a matrix of acicular ferrite and carbon stabilized austenite.

オーステンパダクタイル鋳鉄は、好ましくは、以下の１つ以上を有する。量が３．４乃至３．５質量％の範囲内の炭素、量が２乃至２．３質量％の範囲内の珪素、量が０．０７５乃至０．１５質量％の範囲内のマンガン、量が３．４乃至３．５質量％の範囲内のモリブデン、量が１．２乃至１．４質量％の範囲内のニッケル、および量が０．７５乃至０．９５質量％の範囲内の銅。   The austempered ductile iron preferably has one or more of the following: Carbon in an amount of 3.4 to 3.5% by mass, silicon in an amount of 2 to 2.3% by mass, manganese in an amount of 0.075 to 0.15% by mass, amount Molybdenum in the range of 3.4 to 3.5% by weight, nickel in the amount of 1.2 to 1.4% by weight, and copper in the amount of 0.75 to 0.95% by weight .

本発明の好ましい特徴を、今、添付図面を参照して、例示としてのみ記載する。   Preferred features of the present invention will now be described, by way of example only, with reference to the accompanying drawings.

図１および２を参照すると、多段乾式真空ポンプ１０は、複数の排気チャンバ１４、１６、１８、２０、２２を構成する一連の壁を有する、好ましくはオーステンパダクタイル鋳鉄で形成されたステータ部品１２を有する。入口排気チャンバ１４に排気されるべきガスを導くための入口導管２４および排気ガスを出口排気チャンバ２２から排出するための出口導管２６も、ステータ１２に形成される。ステータ１２に形成された円周通路２８、３０、３２、および３４は、排気チャンバ１４、１６、１８、２０、２２を連続して連結する。   With reference to FIGS. 1 and 2, a multi-stage dry vacuum pump 10 includes a stator component 12, preferably formed of austempered ductile cast iron, having a series of walls defining a plurality of exhaust chambers 14, 16, 18, 20, 22. Have. An inlet conduit 24 for directing gas to be exhausted to the inlet exhaust chamber 14 and an outlet conduit 26 for exhaust gas exhaust from the outlet exhaust chamber 22 are also formed in the stator 12. Circumferential passages 28, 30, 32 and 34 formed in the stator 12 continuously connect the exhaust chambers 14, 16, 18, 20 and 22.

ステータ１２は、第１のシャフト３６と、それから間隔を隔てられ、且つそれと平行な、第２のシャフト３８を収容する。シャフト３６、３８を支持するためのベアリング４０が、ステータ１２の端プレート４２、４４に設けられる。シャフトの１つ３６は、駆動モータ４６に連結され、シャフトは、タイミングギア４７によって互いに連結されるので、使用中、シャフト３６、３８は、図２で矢印４８および５０によって示すように、同じ速度で反対方向に回転する。ポンプ１０の側部に取付けられたギアボックス５２は、タイミングギア４７を潤滑するためのオイル５４を収容する。タイミングギア４７は、オーステンパダクタイル鋳鉄で形成されるのがよい。   The stator 12 houses a first shaft 36 and a second shaft 38 spaced therefrom and parallel thereto. Bearings 40 for supporting the shafts 36 and 38 are provided on the end plates 42 and 44 of the stator 12. One of the shafts 36 is connected to a drive motor 46 and the shafts are connected to each other by a timing gear 47 so that in use, the shafts 36, 38 are at the same speed as indicated by arrows 48 and 50 in FIG. To rotate in the opposite direction. A gear box 52 attached to the side of the pump 10 contains oil 54 for lubricating the timing gear 47. The timing gear 47 is preferably formed of austempered ductile cast iron.

各排気チャンバ内で、シャフト３６、３８は、それぞれのロータ部品５６、５８を支持し、ロータ部品もオーステンパダクタイル鋳鉄で作られるのがよい。本実施形態では、ロータ５６、５８は、各排気チャンバ内でルーツタイプの輪郭を有するが、ルーツタイプとノーシータイプの輪郭の混合をポンプ１０内に設けてもよい。ロータ５６、５８は、ロータ５６、５８が既知の噛み合い方法で作用することができるように、各排気チャンバ内にステータ１２の内面に対して配置される。   Within each exhaust chamber, shafts 36, 38 support respective rotor components 56, 58, which may also be made of austempered ductile cast iron. In the present embodiment, the rotors 56 and 58 have root-type contours in each exhaust chamber, but a mixture of root-type and nose-type contours may be provided in the pump 10. The rotors 56, 58 are disposed in each exhaust chamber relative to the inner surface of the stator 12 so that the rotors 56, 58 can operate in a known meshing manner.

使用中、ガスが入口導管２４を通してポンプ１０の中に押し入れられ、入口排気チャンバ１４に流入する。ガスは、入口排気チャンバ１４内に配置されたロータ５６、５８によって圧縮され、通路２８によって次の排気チャンバ１６に送り込まれる。排気チャンバ１６の中に送られたガスは、同様に、その中のロータ５６、５８によって圧縮され、通路３０によって次の排気チャンバ１８に送られる。同様のガス圧縮が、排気チャンバ１８、２０、および２２の中で起こり、排気されたガスは、最後にポンプ１０から出口導管２６を通して排出される。   In use, gas is forced into the pump 10 through the inlet conduit 24 and enters the inlet exhaust chamber 14. The gas is compressed by the rotors 56, 58 disposed in the inlet exhaust chamber 14 and fed into the next exhaust chamber 16 by the passage 28. The gas sent into the exhaust chamber 16 is similarly compressed by the rotors 56, 58 therein and sent to the next exhaust chamber 18 by the passage 30. Similar gas compression occurs in the exhaust chambers 18, 20 and 22, and the exhausted gas is finally exhausted from the pump 10 through the outlet conduit 26.

ポンプ１０のステータ部品１２および／またはロータ部品５６、５８を製造するために、オーステンパダクタイル鋳鉄の使用により、ポンプ１０が、特に、塩素、三塩化ホウ素、臭化水素、フッ素、および三フッ化塩素のような腐食性ガスを排気するのに適する。現在、オーステンパダクタイル鋳鉄よりも約４乃至５倍高価である、より高価なニレジスト材料と比較すると、オーステンパダクタイル鋳鉄は、優れた硬度、より高い比強度比、および同等のＦ2腐食感受性を有する。これにより、ステータおよびロータ部品、およびタイミングギアは、部品の重量およびコストを減少させるとともに、同等のあるいは改善された性能のための比較的高い耐摩耗性および耐食性を有することができる。 The use of austempered ductile cast iron to produce the stator part 12 and / or rotor parts 56, 58 of the pump 10 makes the pump 10 more particularly chlorine, boron trichloride, hydrogen bromide, fluorine, and chlorine trifluoride. Suitable for exhausting corrosive gases such as Austempered ductile cast iron has superior hardness, higher specific strength ratio, and equivalent F 2 corrosion susceptibility when compared to the more expensive Ni-resist material, which is currently about 4-5 times more expensive than austempered ductile cast iron. This allows the stator and rotor parts and timing gear to have a relatively high wear and corrosion resistance for comparable or improved performance while reducing the weight and cost of the parts.

実施例として、ステータ部品１２および／またはロータ部品５６、５８および／またはタイミングギア４７を製造するのに用いられるオーステンパダクタイル鋳鉄（オーステンパダクタイル鋳鉄）は、以下を（質量百分率で）含むのがよい。

Figure 2009536707
As an example, austempered ductile cast iron (austempered ductile cast iron) used to manufacture stator component 12 and / or rotor components 56, 58 and / or timing gear 47 may include (in percentage by mass):
Figure 2009536707

オーステンパダクタイル鋳鉄は、好ましくは、少なくとも９０％の黒鉛球状化率を有し、好ましくは１５０乃至３００個／ｍｍ2の範囲内の球状数を有する。オーステンパダクタイル鋳鉄は、好ましくは、炭化物、包有物、あるいは多孔性を実質的に有しない、針状フェライトおよび炭素安定化オーステナイトの主マトリックスを有する。オーステンパダクタイル鋳鉄のこれらの特徴により、材料は、半導体加工設備のための性能要件、特に、高温での十分な摩擦および機械的特性、および耐食性を満たすことができる。 The austempered ductile cast iron preferably has a graphite spheroidization rate of at least 90%, and preferably has a sphere number in the range of 150 to 300 pieces / mm 2 . The austempered ductile iron preferably has a main matrix of acicular ferrite and carbon stabilized austenite that is substantially free of carbides, inclusions, or porosity. These features of austempered ductile iron allow the material to meet performance requirements for semiconductor processing equipment, particularly sufficient friction and mechanical properties at high temperatures, and corrosion resistance.

多段乾式真空ポンプの断面図である。It is sectional drawing of a multistage dry type vacuum pump. 図１のＡ−Ａ線に沿った図である。It is the figure along the AA line of FIG.

Claims (14)

ステータ部品と、少なくとも１つのロータ部品と、を有する乾式真空ポンプであって、
ステータ部品および／または前記少なくとも１つのロータ部品は、オーステンパダクタイル鋳鉄で形成される、
ことを特徴とする乾式真空ポンプ。 A dry vacuum pump having a stator component and at least one rotor component,
The stator component and / or the at least one rotor component is formed of austempered ductile cast iron,
A dry vacuum pump characterized by that. 前記少なくとも１つのロータ部品は、スクリュー、ルーツまたはノーシー輪郭のうちの１つを有する、請求項１に記載のポンプ。   The pump of claim 1, wherein the at least one rotor component has one of a screw, a root, or a nose profile. ステータ部品内で逆回転するようになっている、第１および第２の噛み合いロータ部品を有する、請求項２に記載のポンプ。   3. A pump according to claim 2, comprising first and second meshing rotor parts adapted for reverse rotation in the stator part. ステータ部品が、連続して配置され、且つ、各々、オーステンパダクタイル鋳鉄で形成されたロータ部品のそれぞれの対を収容する、複数の相互連結された排気チャンバを構成する、多段乾式真空ポンプの形態である、請求項３に記載のポンプ。   In the form of a multi-stage dry vacuum pump, in which the stator parts are arranged in series and each constitute a plurality of interconnected exhaust chambers each housing a respective pair of rotor parts formed of austempered ductile cast iron The pump according to claim 3. 噛み合いロータ部品が、それぞれのシャフトに配置され、ポンプは、一方のシャフトから他方のシャフトにトルクを伝達するためのギア組立体を有し、ギア組立体の少なくとも１つのギアは、オーステンパダクタイル鋳鉄で形成される、請求項３または４に記載のポンプ。   An intermeshing rotor component is disposed on each shaft, and the pump has a gear assembly for transmitting torque from one shaft to the other, and at least one gear of the gear assembly is austempered ductile iron. The pump according to claim 3 or 4, which is formed. ステータ部品が、端プレートと、該端プレートから延びる第１のらせんラップと、を有する固定スクロール部材を有し、前記少なくとも１つのロータ部品が、端プレートと、該端プレートから延びる、第１のらせんラップと噛み合う第２のらせんラップと、を有する環状スクロール部材を有する、スクロールポンプの形態である、請求項１に記載のポンプ。   A stator component having a fixed scroll member having an end plate and a first helical wrap extending from the end plate, wherein the at least one rotor component extends from the end plate and the end plate; The pump of claim 1 in the form of a scroll pump having an annular scroll member having a second helical wrap that meshes with the helical wrap. オーステンパダクタイル鋳鉄は、少なくとも９０％の黒鉛粒状化率を有する、請求項１乃至６のいずれか１項に記載のポンプ。   The pump according to any one of claims 1 to 6, wherein the austempered ductile cast iron has a graphite granulation rate of at least 90%. オーステンパダクタイル鋳鉄は、針状フェライトおよび炭素安定化オーステナイトのマトリックスを有する、請求項１乃至７のいずれか１項に記載のポンプ。   The pump according to any one of claims 1 to 7, wherein the austempered ductile iron has a matrix of acicular ferrite and carbon-stabilized austenite. オーステンパダクタイル鋳鉄は、量が３．４乃至３．５質量％の範囲内の炭素を有する、請求項１乃至８のいずれか１項に記載のポンプ。   The pump according to any one of claims 1 to 8, wherein the austempered ductile iron has carbon in an amount of 3.4 to 3.5 mass%. オーステンパダクタイル鋳鉄は、量が２乃至２．３質量％の範囲内の珪素を有する、請求項１乃至９のいずれか１項に記載のポンプ。   The pump according to any one of claims 1 to 9, wherein the austempered ductile iron has silicon in an amount of 2 to 2.3 mass%. オーステンパダクタイル鋳鉄は、量が０．０７５乃至０．１５質量％の範囲内のマンガンを有する、請求項１乃至１０のいずれか１項に記載のポンプ。   The pump according to any one of claims 1 to 10, wherein the austempered ductile iron has manganese in an amount in the range of 0.075 to 0.15% by mass. オーステンパダクタイル鋳鉄は、量が３．４乃至３．５質量％の範囲内のモリブデンを有する、請求項１乃至１１のいずれか１項に記載のポンプ。   The pump according to any one of claims 1 to 11, wherein the austempered ductile iron has molybdenum in an amount in the range of 3.4 to 3.5 mass%. オーステンパダクタイル鋳鉄は、量が１．２乃至１．４質量％の範囲内のニッケルを有する、請求項１乃至１２のいずれか１項に記載のポンプ。   The pump according to any one of claims 1 to 12, wherein the austempered ductile cast iron has nickel in an amount in the range of 1.2 to 1.4 mass%. オーステンパダクタイル鋳鉄は、量が０．７５乃至０．９５質量％の範囲内の銅を有する、請求項１乃至１３のいずれか１項に記載のポンプ。   The pump according to any one of claims 1 to 13, wherein the austempered ductile iron has copper in an amount in the range of 0.75 to 0.95 mass%.
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