CN1177681A - Oil-free scroll vacuum pump - Google Patents
Oil-free scroll vacuum pump Download PDFInfo
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- CN1177681A CN1177681A CN 97109681 CN97109681A CN1177681A CN 1177681 A CN1177681 A CN 1177681A CN 97109681 CN97109681 CN 97109681 CN 97109681 A CN97109681 A CN 97109681A CN 1177681 A CN1177681 A CN 1177681A
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Abstract
A double-lap oil-free scroll vacuum pump is disclosed, which comprises a revolving scroll 3 with revolving laps 26 and 27 provided on both sides of a disc, stationary scrolls provided on their surfaces 4b, 5b facing each surface 3d, 3e of said disc with stationary laps 6, 7 in engagement with the revolving laps 26, 27, said revolving laps 26, 27 being arranged in frictional contact with said surfaces 4b, 5b of the stationary scrolls, and a rotationary drive shaft 11 penetrating the stationary and revolving scrolls and eccentrically fitted in the disc of the revolving scroll 3, wherein the rotational drive shaft 11 drives the revolving scroll 3 to cause discharge of compressed gas from a last compression chamber. A housing 19 is mounted on the outer sides of the stationary scrolls, and accommodates a drive source of the rotational drive shaft 11. Discharge passages 4d and 5d are provided for discharging compressed gas from the sides of the surfaces 3d and 3e of the revolving scroll 3. The discharge passages 4d and 5d extend outwardly from the housing 19.
Description
The present invention relates to a kind of scroll vacuum pump that can improve compression efficiency, particularly a kind of oil-free scroll vacuum pump that improves fluid discharge efficient.
Usually, container being vacuumized is by vacuum pump being linked to each other with the exhaust port of container, realizing with the air in the vacuum pump amount discharge container or other gas.
In low-voltage vacuum pump suction system, by being installed, an oil rotary pump constitutes vacuum pump apparatus in a container, and in the high pressure vacuum pumping system, then be an oil diffusion pump is combined with an oil rotary pump and to form the wet vacuum pump device.
In these devices, utilize the heater in the boiler to evaporate oil, and the gas of consequent steam ejection with the compression diffusion.Compressed gas is further by rotary pump compression, is discharged to the outside again after making its pressure reach barometric pressure.
These devices constitute wet suction system, problem is that the oil that produces once more as being attached to the vapor form on the device inwall can evaporate and be back in the container once more, i.e. this backflow need be with cooling cover, silencing apparatus, coagulate air valve etc. cools off, and the result causes the complicated of structure.In addition, chlorine, fluorine or similar gas can react with oil and make described oily sex change, have increased rotational resistance like this, have reduced capacity and have brought the trouble of maintenance maintenance.
Therefore, people thirst for obtaining a kind of dry type suction system, again attention are concentrated on the oil-free scroll pump as the vacuum pump aspect recently, address the above problem with prestige.
Scroll vacuum pump has fixed scroll scrollwork and vortex matter revolution scrollwork, and the volume of the seal space that forms between the scrollwork by two scroll is along with vortex matter revolution is done the revolution of not rotation with respect to fixed scroll and changed.
In this running, the point of contact between two scrollworks is shifted to the central authorities of pump gradually, has formed the seal space as compression chamber between described two scrollworks.
Along with vortex matter revolution with constant revolution radius around the revolution at fixed scroll center, the gas that enters pump by suction port imports around the circumferential end of vortex matter revolution scrollwork, and flows into the seal space that two scrollworks form.
When the volume that makes seal space along with the revolution of vortex matter revolution reduces and when moved in the center portion, the gas that enters seal space was compressed gradually, when seal space moves to exhaust port communicates position, pressurized gas is discharged to the outside.
Scroll vacuum pump can adopt single scroll-type or two scroll-type structure, in single scroll-type structure, vortex matter revolution has a revolution scrollwork on the side surface that is arranged on its dish, in two scroll-type structures, vortex matter revolution has two revolution scrollworks on the both side surface that is separately positioned on its dish.This pair of scroll-type vacuum pump is disclosed among the clear 57-203801 of Japanese publication communique (prior art 1).
As shown in Figure 6, disclosed vortex mechanism has the exhaust port 207 that seal space to vortex matter revolution 201 both sides provides the suction port 206 of fluid and is used to discharge compressed fluid in the prior art 1.
In such scroll vacuum pump, the scrollwork 201b of the dish 201a both sides of vortex matter revolution 201 and 201c only have half height of scrollwork when adopting single scroll-type structure, just can handle the compressed fluid of same volume.This means that when machining forms scrollwork the grinding degree of depth from the tip of scrollwork to the mirror ultrafinish surface can reduce, and like this, can provide a kind of vortex matter revolution with satisfied processibility.
In addition, reduced the exhaust port 207 that is used for to the outside discharge of vortex mechanism compressed fluid as much as possible, so that improve the efficient of compressed fluid.
Exhaust port 207 is communicated with a seal space 200, and the fluid that is compressed in the seal space 200 can be from above-mentioned exhaust port 207 discharges.But, the compressed fluid in another seal space 210, from being formed at before exhaust port on the fixed scroll opposite side discharges, the minor diameter pilot hole 203 that forms from the central position of vortex matter revolution 201 imports above-mentioned seal space 200 earlier.Therefore, when discharging compressed fluid, because mechanical loss has reduced discharge efficient.
Increase the diameter of the pilot hole 203 on the vortex matter revolution 201 sufficiently, can reduce mechanical loss.Yet this can reduce compression efficiency.
In view of the above, wish that each side at vortex matter revolution is provided with tap hole and solves the problems referred to above.
The Japan clear 59-15690 of publication communique (prior art 2) discloses a kind of scroll fluid machine, and it is provided with a suction port in each side of vortex matter revolution, and compressed fluid is discharged by single exhaust port.
As shown in Figure 5, prior art 2 discloses a kind of seal container 101, wherein is provided with down fixed scroll 107 and last fixed scroll 108.
Vortex matter revolution 112 is arranged between fixed scroll 108 and the following fixed scroll 107, scrollwork that the opposite side on its dish forms and the engagement of the scrollwork on the fixed scroll, and at two kinds of fluid displacement compressors of its opposite side formation.
The axle 103 of motor 102 places in the seal container 101, is fixed with actuation gear 104 on the axle.
Also provide two bent axles 106, be furnished with the moment of torsion that driven gear 105 transmits actuation gear 104 on it.
Bent axle 106 is supported on two fixed scroll 108 and 107 on the formed bearing, and their central eccentric shaft portion 106a inserts respectively in the corresponding bearing that forms on the dish of bilateral vortex matter revolution 112.
Last fixed scroll 108 has last tap hole 111, and fixed scroll 107 has following exhaust port 110 down.Along with the rotation of live axle 103,112 revolution of bilateral vortex matter revolution are introduced the discharge tube 115 that is arranged on the seal container 101 from exhaust port 110 and 111 compressed fluids of discharging.
Said structure according to prior art 2, driving force passes to two bent axles 106,106 that differ 180 ° of phase places each other by actuation gear 104 and driven gear 105 from the live axle 103 of drive motor 102, therefore, must consider the mistake that prevention causes because of running clearance.
In addition, driving force passes to vortex matter revolution 112 from the eccentric shaft portion 106a of two bent axles 106,106, and like this, the high-caliber technology of needs prevents the interference between the eccentric shaft portion 106a.
Simultaneously, for satisfying required condition of high vacuum degree recently, hope can be used to obtain the operating time of ideal vacuum degree.
In the low compression ratio vacuum pump, vacuumize and will change for a long time, therefore, the requirement of this respect is satisfied in expectation with the vacuum pump of high compression ratio.
The number of turns that increases spiral wrap can improve compression ratio.But, increase along with the described number of turns, also increased the size of scroll, like this, because the bending of axle under high speed rotating can produce the problem of revolution vibration, and, because the inhomogeneous contact between vortex matter revolution and the fixed scroll also can produce noise, heat, this has just shortened the durability of scroll.
For addressing these problems, the someone advises that at this moment, the size of scroll can not increase with two vacuum pumps, and the number of turns is also few, drives these pumps by the suction side of second level pump is linked to each other with the discharge tube of first order pump.
But, in the pumps in series drive system that the compressed fluid in this first order further compresses, flow into the deterioration that the oil that exists the partial fluid can cause the vacuum pump durability from the first order in the second level.
From this point of view, prior art 2 as shown in Figure 5, the compressed fluid filling of discharging from upper and lower exhaust port 111 and 110 is in the lower space of support 118, and motor 102 just is installed in this space, when the pressure in this space was higher than external pressure, compressed fluid was discharged to the outside.
Therefore, oiling agent or the analog on the axle 13 can pollute motor 102 and supporting element herein or other part.
The flat 6-66271 of Japan's publication communique discloses a kind of scroll compressor that has diffuser.
As shown in Figure 7, this scroll compressor has diffuser 312, this diffuser 312 formed compressed fluid exhaust port 373 on the part of fixed scroll 348 extends, and described exhaust port 373 is corresponding to the final compression chamber 300 that is formed by fixed scroll scrollwork 346 and vortex matter revolution scrollwork 342.Compressed fluid imported diffuser 312 earlier before discharging from opening 375, improve the efficient of compressor thus.
Above-mentioned correlation technique can pressurized gas and pressurized gas is discharged.But as vacuum pump the time, the different purposes according to the container that is vacuumized can produce harmful gas, for example, are applied to make in the semi-conductive process, can produce harmful gas.This gas can not manufacture innocuous gas.
In sum, an object of the present invention is to provide a kind of oil-free scroll vacuum pump, it has the dry type vortex mechanism of the two scrollwork vortex matter revolutions of band, can not reduce the discharge efficient of pressurized gas.
Another object of the present invention provides a kind of oil-free scroll vacuum pump, it can avoid because of be installed in two on the vortex matter revolution between the fixed scroll scrollwork tilt stand and follow the partial load that interference brought between each assembly of vortex matter revolution.
A further object of the present invention provides a kind of oil-free scroll vacuum pump, and it has high cooling effectiveness and compact structure.
According to a first aspect of the present invention, a kind of pair of scrollwork oil-free vacuum pump is provided, comprise: one has the vortex matter revolution and the fixed scroll of the revolution scrollwork that is arranged on dish both sides, each fixed scroll has the fixed scroll that forms on the surface on each surface of relative fixed scroll dish, described fixed scroll meshes with each revolution scrollwork respectively, fixed scroll supports vortex matter revolution with rubbing contact, each fixed scroll has a dish, has the discharge route that is used to discharge compressed fluid that is arranged on each side of vortex matter revolution on each dish.
As shown in Figures 1 and 2, two scrollwork oil-free scroll vacuum pumps comprise: have be arranged on a dish on the both sides revolution scrollwork 26 and 27 vortex matter revolution 3, and fixed scroll (housing) 4 and 5, each fixed scroll has the fixed scroll 6,7 that forms on surperficial 4b, the 5b of the dish each surperficial 3d, the 3e that face vortex matter revolution 3, fixed scroll 6 and 7 meshes with each revolution scrollwork 26 and 27 respectively, and fixed scroll supports vortex matter revolution with rubbing contact thus.
Each fixed scroll has a dish respectively, and each dish has discharge route 4d, the 5d that compressed fluid is discharged that is arranged on each side of vortex matter revolution respectively.
Like this, pressurized gas is discharged from discharge route 4d, the 5d that is located at vortex matter revolution 3 each side separately, has improved the discharge efficient of pressurized gas thus.
According to a second aspect of the present invention, a kind of oil-free scroll vacuum pump is provided, is used for compressing the interior gas of the pump housing and by diffuser pressurized gas is discharged to pump housing outside, this pump comprises injection apparatus, by compulsion the pressurized gas that sprays is imported diffuser, thereby pressurized gas is discharged from the pump housing.
Efficient apparatus according to second aspect present invention is furnished with diffuser, and this diffuser is arranged between fixed scroll and determined final compression chamber of vortex matter revolution and the discharge route.
As shown in Figure 2, the diffuser 3b and the guide channel 5g that link to each other with exhaust port 4c communicate, guide channel 5g links to each other with spray containers, by guide channel the pressurized gas in the spray containers is imported diffuser 3b thus, thereby the pressurized gas that will compress is discharged to the outside in the pump housing.
The final compression chamber that fixed scroll and vortex matter revolution are determined communicates with diffuser 3b by opening 3g, 3h.
As shown in Figure 3, for pressurized gas is discharged to the outside in the pump housing, link to each other with guide channel 35 with the diffuser 34 that exhaust port 34b communicates, guide channel 35 couples together with spray containers, by guide channel the pressurized gas in the spray containers is led.
The final compression chamber that fixed scroll and vortex matter revolution are determined communicates with diffuser 34 by discharge aperture 45.
In this structure, when expanding, can cause that the pressure of diffuser reduces when the pressurized gas inflow diffuser that sprays by injection apparatus and in the outlet port of diffuser.
The pressurized gas of vacuum pump is by by negative pressure-pumping that above-mentioned pressure drop produced and be discharged in the diffuser, and outlet is discharged to the outside of vacuum pump body through diffuser with the pressurized gas that sprays from injection apparatus again.
Because the pressurized gas from the spray containers of injection apparatus injection and importing diffuser is nitrogen (N
2), even therefore concentrated any harmful gas that is contained in the container in the compression process that vacuumizes, they also can be watered down by nitrogen.
According to a third aspect of the present invention, a kind of pair of scrollwork oil-free scroll vacuum pump is provided, comprising: one has the vortex matter revolution of the revolution scrollwork that is arranged on dish both sides; Fixed scroll, each fixed scroll have the fixed scroll that forms on the surface on each surface of relative fixed scroll dish, described fixed scroll meshes with each revolution scrollwork respectively, and fixed scroll supports vortex matter revolution with rubbing contact; One eccentric shaft portion, it is contained on the dish of vortex matter revolution in eccentric relatively mode, and the both sides of eccentric shaft portion are supported on the side bearing of fixed scroll rotationally.
Above-mentioned efficient apparatus according to third aspect present invention is furnished with fan, and this fan is contained in described bearing outside, is driven by the driving source identical with eccentric shaft portion and rotates, with the cooling fixed scroll.
Above-mentioned efficient apparatus according to a third aspect of the invention we is furnished with discharge route, is used for discharging the pressurized gas between the outer surface of each fan and each fixed scroll.
As shown in Figure 1, eccentric shaft portion 11a is arranged in the dish of vortex matter revolution 3 in eccentric relatively mode, and this both sides are supported on the bearing 52 and 53 of fixed scroll 4,5 sides rotationally.
Cooling fan 12 and 13 is installed in the outside of bearing 52 and 53, is driven by the driving source identical with eccentric shaft portion 11a and rotates, with cooling fixed scroll 4 and 5.The discharge route 4d and the 5d that are used for discharging pressurized gas are separately positioned between each fan 12,13 and each the fixed scroll outer surface.
According to this structure, eccentric shaft portion relative fixed scroll is stable, and pump has been avoided the problems such as durability reduction bringing revolution vibration, noise, heating or bring the inhomogeneous contact between fixed scroll and the vortex matter revolution to cause because of bending shaft or other reason because of the bending at the high speed rotating axis.
Utilization is installed in the fan 12 and 13 on live axle 11 parts of bearing outside, can be to the outer side surface cooling of two fixed scroll, these two fans 12,13 can drive with the driving source identical with eccentric shaft portion 11a, promptly the driving source with independent driving vortex matter revolution drives, and need not to join in addition the additional power source.Therefore simplify the structure as much as possible and a kind of vortex mechanism of compactness is provided.
As indicated above, the end that is assemblied in the eccentric shaft portion on the vortex matter revolution dish is supported on the side bearing of fixed scroll rotationally, cooling fan is installed in the outside of described bearing, and use the driving source identical with eccentric shaft portion to drive and rotate, each discharge route that is used for discharging pressurized gas is separately positioned between each fan and each the fixed scroll outer surface.
According to this structure, bearing and discharge route can be arranged in the space between fan and the fixed scroll outer surface, like this, a kind of compact structure can be provided and can avoid discharging the vortex mechanism that efficient reduces.
In addition, extend from the periphery of each bearing in the space between fan and the fixed scroll outer surface, and except such as the installation elements such as support and housing, this space is externally opened wide 360 ° of scopes.Like this, leave very big design freedom for the layout of exhaust port.
According to a fourth aspect of the present invention, a kind of pair of scrollwork oil-free scroll mechanism is provided, this pair scrollwork oil-free scroll mechanism comprises: one has the vortex matter revolution of the revolution scrollwork that is arranged on dish both sides, one relatively is installed in the eccentric shaft portion on the dish of vortex matter revolution prejudicially, be used to drive vortex matter revolution, the both sides of this eccentric shaft portion are supported on the side bearing of fixed scroll rotationally, and fan is contained in the outside of described bearing, drive and rotate by the same driving source that is used for eccentric shaft, with the cooling fixed scroll, can constitute a kind of oil-free scroll vacuum pump like this, between the fan and fixed scroll outer surface of this oil-free scroll vacuum pump, be provided with above-mentioned injection guide channel.
In this two spiral-wound vortex mechanisms, because being contained in the both sides of the eccentric shaft portion in the vortex matter revolution dish relatively prejudicially is supported on the side bearing of fixed scroll rotationally, eccentric shaft portion relative fixed scroll is stable, therefore, described pump has been avoided the problems such as durability reduction because of the bending at the high speed rotating axis brings revolution vibration, noise, heating or the fixed scroll brought because of bending shaft or other reason and the inhomogeneous contact between the vortex matter revolution cause.
Because fan is installed in the bearing outside, and is driven to rotate by the same driving source that is used for eccentric shaft portion and cool off fixed scroll, the driving source of promptly available single driving vortex matter revolution cools off the outer surface of two fixed scroll.Therefore, do not need to come drive fan with driving source in addition, but simplified structure and a kind of vortex mechanism of compactness is provided.
Because the ejection passage is arranged between the outer surface of fan and fixed scroll, thereby a kind of vortex mechanism of compactness can be provided.
According to a fifth aspect of the present invention, a kind of oil-free scroll vacuum pump is provided, comprise one group of vacuum pump body that is connected in series by control valve unit, wherein, each vacuum pump body comprises: one has the vortex matter revolution of the revolution scrollwork that is arranged on dish both sides; Fixed scroll, each fixed scroll have the fixed scroll that forms on the surface on each surface of relative fixed scroll dish, described fixed scroll meshes with each revolution scrollwork respectively, and fixed scroll supports vortex matter revolution with rubbing contact; Pass fixed scroll and vortex matter revolution and be contained in device for revolving and driving in the vortex matter revolution dish prejudicially; Be installed in the outer surface of fixed scroll and hold the housing of device for revolving and driving; Pressurized gas is discharged to discharge route on each fixed scroll dish from each side of vortex matter revolution; And control valve unit, this control valve unit is used for controlling selectively discharge route and the space between the one-level vacuum pump intake of back and the outside effect that is communicated with and the effect of being connected in series of previous stage vacuum pump and back one-level vacuum pump of previous stage vacuum pump.
According to a fifth aspect of the invention, as shown in Figure 4, one group of oil-free vacuum pump is connected in series, and be provided with control valve unit 21,22, be used for controlling selectively the spatial communication effect between the suction port 8 of the discharge route of one-level vacuum pump body 1A and two-stage vacuum pump body 1D, and the effect of being connected in series mutually of controlling one-level vacuum pump body 1A and two-stage vacuum pump body 1D selectively.
When the container that vacuumizes was connected on the suction port 8 of elementary pump housing 1A, in the operation of initial period, the pressure in the container sucked gas and be brought to the zone of high pressure in the compression process of elementary pump housing 1A near barometric pressure.
But the pressurized gas under the high pressure is not fed among the one-level vacuum pump body 1D of back, but is discharged to the outside by control valve unit 21,22.
When the pressure of the pressurized gas that comes from elementary pump housing 1A becomes when being lower than predetermined pressure, control valve unit 21 and 22 cuts out, and the pressurized gas that ejects from pump housing 1A enters further compression among the pump housing 1D.
Like this, under pressure is higher than atmospheric pressure, there is not pressurized gas to suck among the second-stage pump body 1D.Then do not produce overcompression and overheated among the second-stage pump body 1D, thereby the durability that can cause second-stage pump body 1D because of the heat or the high pressure of generation does not reduce or causes the burning of damage.
In addition, owing to drive one group of vacuum pump with independent driving source, firsts and seconds vacuum pump for example, and can provide optimum rotation according to the compression ratio of one-level pump and two stage pump corresponding to the pressurized gas load.
In the starting stage that container vacuumizes, when the compression pressure of one-level pump surpasses barometric pressure, only drive the one-level pump, in low viscosity flow range corresponding to the rough vacuum scope in the container, by control valve unit pressurized gas is discharged to the outside, when the compression pressure in the one-level pump was lower than barometric pressure, two stage pump drove with economized form.
Owing on each fixed scroll dish, all be furnished with the discharge route that is used to discharge the dry system pressurized gas, so these discharge routes may extend into the outside that is installed on the fixed scroll outer surface.Like this, oiling agent or analog can not imported to the pressurized gas from the vortex matter revolution driving source, and can realize high compression ratio by the one-level pump is connected with two stage pump.
Fig. 1 is the basic embodiment's of an oil-free scroll vacuum pump of the present invention cross-section profile;
Fig. 2 is oil-free scroll vacuum pump second an embodiment's of the present invention schematic representation;
Fig. 3 is oil-free scroll vacuum pump the 3rd an embodiment's of the present invention schematic representation;
Fig. 4 oil-free scroll vacuum pump the 4th embodiment's that to be the present invention be made of two stage pump schematic representation;
Fig. 5 is the schematic representation of the prior art 1 relevant with two scrollwork vortex mechanisms;
Fig. 6 is the schematic representation of the prior art 2 relevant with two scrollwork vortex mechanisms;
Fig. 7 is the relevant schematic representation that has the vortex mechanism of diffuser in the prior art.
Hereinafter will be described in detail embodiments of the invention.Except that special instruction was arranged, the size of described element, shape or relevant position etc. all only were the cited examples of the present invention in an embodiment, do not constitute limiting the scope of the invention.
Fig. 1 is the side view of oil-free scroll vacuum pump basic structure of the present invention.
As shown in Figure 1, vacuum pump body 1A has axle 11, and the live axle coupling of axle 11 right-hand member and motor 2 joins and by its rotation of torque drive.
The central eccentric part 11a of axle 11 has thick slightly diameter.The opposed end of eccentric shaft portion 11a is supporting rotationally by the liner 15,16 in bearing 52,53 and the housing 4,5.
Housing 4,5 is formed fixed scroll and is done cup-shaped, and its periphery wall forms seal space as shell and with the Sealing sealing.
Housing 4 has perpendicular to the scrollwork slidingsurface 4b of its axis and a hole that sets on the middle body of this slidingsurface 4b, and usually, the uninfluenced shaft portion outside the axle 11 eccentric shaft portion 11a is assemblied in the described hole rotationally.
Housing 4 has its inner and is positioned at hole spiral wrap 7 nearby.Scrollwork 7 has inverted draw cut, and the selflubricating top Sealing 14 that fluororesin or analog form is housed in this inverted draw cut, seals thereby provide fully during with relative scrollwork slip surface contact at scrollwork.
Exhaust port 4c is opened in the position near the top of scrollwork 7 of scrollwork slidingsurface 4b.Cross discharge route 4d discharge from the pressurized gas that exhaust port 4c discharges, and be discharged to the outside through the exhaust port 9B that is arranged on the housing 4 outer surface 4a.
Three revolution mechanisms 17 are to be arranged on the circumference of housing 4 along circle spacing 120 ° mode.
Revolution mechanism 17 with after the vortex matter revolution coupling connection chatted.
The peripheral wall 4a of housing 4 has suction port 8, and this suction port 8 is connected with the container (not shown) that vacuumizes successively, and by opening 8a gas is sucked.
Housing 5 has the scrollwork slidingsurface 5b and the hole that is arranged on the middle body of this slidingsurface 5b perpendicular to its axis, and usually, the uninfluenced shaft portion except that eccentric shaft portion 11a of axle 11 is assemblied in the described hole rotationally.
Housing 5 has its inner and is positioned at hole spiral wrap 6 nearby.Scrollwork 6 has inverted draw cut, and top Sealing 14 is housed in this inverted draw cut, provides sealing fully during with the contact of relative scrollwork slip surface at scrollwork.
Exhaust port 5c is opened in the position near scrollwork 6 tops of scrollwork slidingsurface 5b.Discharge by discharge route 5d from the pressurized gas that exhaust port 5c discharges, be discharged to the outside through the exhaust port 9A that is arranged on the housing 5 outer surface 5a again.
Vortex matter revolution 3 is contained in rotationally by in housing 4 and 5 spaces of determining.
Vortex matter revolution 3 has a dish, is formed with the scrollwork 26 and 27 with the engagement of fixed scroll scrollwork on opposite flank 3d, the 3e of dish.
Vortex matter revolution 3 has center hole 3a, and the eccentric shaft portion of axle 11 is rotationally by passing this center hole 3a.Center hole 3a is centered on by scrollwork 26a and 27a on the length of whole eccentric shaft portion 11a.
The fan 12,13 that is used for coolant pump is contained in axle 11 parts in housing 5,4 outsides.Lid 18,19 with one group of vent is installed on the housing 4,5 and covers described fan.
End as above-mentioned revolution mechanism 17 is supported on the housing 4, and the other end is supported on the periphery of vortex matter revolution 3, makes vortex matter revolution center on the revolution rotational of the eccentric configuration of relative fixed scroll.
The operation of embodiment with said structure is hereinafter described.
With reference to Fig. 1, when driving vortex matter revolution 3 rotations when axle 11 rotations, extracting gases from the container (not shown).
By 26,27 effects of vortex matter revolution scrollwork, suction gas from fixed scroll scrollwork 6,7 outer ends is brought in the seal space of being determined by fixed scroll scrollwork and vortex matter revolution scrollwork, and in these seal spacies, compress, compressed gas is discharged by exhaust port 4c, 5c.
In this embodiment, the pressurized gas physical efficiency is discharged by each discharge route 5d, 4d on each side (being each fixed scroll scrollwork 6,7) that is arranged on vortex matter revolution 3.Thus, reduce mechanical loss as much as possible, improved the discharge efficient of pressurized gas.
Because it is last and stretch out from housing 18,19 that discharge route 5d, 4d are arranged on outside 5e, the 4e of fixed scroll, thereby one group of vacuum pump also can obtained in the formula serviceability when continuous.
Because eccentric shaft portion 11a passes the dish of vortex matter revolution 3 prejudicially, the two ends of axle are supported on the side bearing 52,53 of fixed scroll rotationally, so eccentric shaft portion relative fixed scroll is stable.
Vacuum pump has further been avoided the problem that reduces because of the noise that bending and vibration at the high speed rotating axis bring, heating or durability, has also avoided fixed scroll that the bending because of axle causes and the problems such as inhomogeneous contact between the vortex matter revolution.
Drive rotation owing to be installed in fan 12 driving source identical with eccentric shaft portion 11a that bearing 52,53 outsides are used to cool off scroll with 13 usefulness.So outside 4e, the 5e of two fixed scroll can use the driving source 2 identical with driving vortex matter revolution 3 to cool off.
Like this, need not to come drive fan, simplify the structure, and a kind of vortex mechanism of compactness can be provided with extra driving source.
Because being used to discharge discharge route 4d, the 5d of pressurized gas is arranged between fan 12,13 and the fixed scroll outside, bearing and discharge route 4d, 5d can be arranged in the space between said fans 12,13 and fixed scroll outside 4e, the 5e, like this, the vortex mechanism that a kind of compact structure is provided under the prerequisite that efficient reduces can avoided discharging.
In this embodiment, the space between fan 12,13 and fixed scroll outside 4e, the 5e is from the periphery extension of bearing 15,16 and except externally opening wide on the external 360 ° scope of the parts of installation as support or housing.Like this, discharge route 4d, 5d can be arranged in 360 ° of scopes shown in Fig. 1 side view substantially, guarantee to leave very big leeway for the setting of exhaust port 9Aa and 9Ba.
Fig. 2 is the sectional schematic diagram according to second embodiment of oil-free scroll vacuum pump of the present invention.
Except that diffuser 3b with final seal space is communicated with, this embodiment is identical with embodiment shown in Figure 1, described seal space is determined by vortex matter revolution and fixed scroll and is communicated with exhaust port 4d, and, replace another exhaust port 5d, a passage 5g who is connected with injection apparatus is connected on the diffuser 3b.
The other parts of this example structure are with embodiment illustrated in fig. 1 identical, and identical parts are with same sequence number or symbolic representation.
As indicated above, vortex matter revolution 3 has center hole 3a, and the eccentric part 11a of aforementioned axis 11 passes this hole 3a rotationally, and hole 3a is surrounded by scrollwork 26a, 27a on the length of the eccentric part 11a of whole axle 11.
Diffuser 3b is installed in and closes on 3a place, hole.
Diffuser 3b has towards the trumpet-shaped major diameter of scrollwork 26 outer ends and partly reaches horn-like small diameter portion towards core, is partly with nozzle of small diameter 3f in the central.
Diffuser 3b also has the horn-like part that enlarges towards scrollwork 27 outer ends.
Hole 3g and 3h communicate with the final seal space that fixed scroll and revolution scrollwork are determined, and to diffuser 3b opening.
The peripheral wall 5a of housing 5 has suction port 28, and suction port 28 links to each other with the spray containers that accommodates compressed nitrogen (end shows), through this suction port 28 pressurized gas in the spray containers is imported through suction port 28a.
Hole 5f forms opening on the part near the scrollwork slip surface 5b of scrollwork 26 ends, be provided with guide channel 5d the suction port 28 on the 5 peripheral wall 5a from hole 5f to housing.
Hole 5f and exhaust port 4c can be communicated with diffuser 3b all the time.In other words, along with the revolution of vortex matter revolution 3, when final Seal cage arrived maximum volume, they can be communicated with diffuser in moment simultaneously.
Replace forming the central nozzle of small diameter 3f of diffuser 3b, also the scrollwork end that faces hole 5f can be arranged to the major diameter part, the part of assigning to exhaust port 4c extension from this large-diameter portion continues to reduce at diameter, and the discharge route 4d that extends from exhaust port 4c has than major diameter.
Description has second embodiment's of said structure operating process.
With reference to Fig. 2, along with the rotation of axle 11, vortex matter revolution 3 revolution, extracting gases from the container (not shown).
Suck gas and suck the seal space of determining by vortex matter revolution scrollwork 26,27 from fixed scroll 6,7 outer ends, and in the sealing space, compress.
Pressurized gas in the spray containers enters diffuser 3b by the injection apparatus guiding and through via hole 5f.
After the gas that enters the seal space of being determined by fixed scroll scrollwork and vortex matter revolution scrollwork is compressed, and when final seal space and opening 3g, 3h connection, pressurized gas enters diffuser 3b.
At this moment, the pressurized gas of pressurized gas in the spray containers that is sprayed by injection apparatus discharged through exhaust port 4c.
As shown in the figure, in a second embodiment, utilize the nitrogen (N of ejection
2) enter diffuser as the pressurized gas in the spray containers by the injection apparatus injection, like this, even the harmful gas from vacuum-pumping container is evacuated and concentrates in the compression process that vacuumizes, these harmful gases also can be watered down by nitrogen.
Among second embodiment, form two scrollwork vortex mechanisms by on the bi-side of the dish of vortex matter revolution 3, forming revolution scrollwork 26,27 once more, and eccentric shaft portion 22a passes described dish with eccentric manner, and its axial end portion is supported on the bearing 52,53 of fixed scroll side rotationally.
And fan 12,13 is installed in bearing 52,53 outsides, and drive with a driving source with eccentric shaft portion 11a and to rotate, be used for cooling off fixed scroll.Injection channel 5g is arranged between the outside of fan and fixed scroll.
In this two spiral-wound vortex mechanisms, the two end portions of eccentric shaft portion 11a of relatively passing the dish of vortex matter revolution 3 prejudicially is supported on the bearing 52,53 of fixed scroll side rotationally, and eccentric shaft portion 11a relative fixed scroll is stable.Described vacuum pump has been avoided the problem that reduces because of noise, heating or the durability of bringing in the crooked of high speed rotating axis or vibration, has also avoided fixed scroll that the bending because of axle brings and the problems such as inhomogeneous contact between the vortex matter revolution.
Because fan 12 and 13 is installed in bearing 52,53 outsides, and drive rotation with eccentric shaft portion 11a with same driving source and cool off fixed scroll, so, the driving source of available single driving vortex matter revolution 3 cools off the outside of fixed scroll, and does not need to come drive fan with driving source in addition.But therefore simplified structure provides a kind of vortex mechanism of compactness.
Because injection channel 5g is arranged between the outside 5e of fan 12 and fixed scroll 5, thus bearing 53 and injection channel 5f can be arranged in the space between the outside of said fans and fixed scroll, thereby a kind of vortex mechanism of compactness is provided.
Fig. 3 is oil-free scroll vacuum pump the 3rd an embodiment's of the present invention sectional view.
Shown oil-free scroll vacuum pump 1C is single scroll type, comprising: fixed scroll 30, vortex matter revolution 46 and support the support 40 that described scroll makes its revolution in the precalculated position.
On peripheral wall 37, be provided with suction port 44, have a conduit 29 to link to each other with suction port 44.Gas imports conduit 29 along direction shown in the arrow 50 from the container (not shown).
Cooling fan 33 and 49 dorsal parts in scroll 30 and 46 form, and the inboard of cooling off these scroll with cooling air.
Each scrollwork 39,51 has at its inverted draw cut and one that forms in the face of the top of another scroll and is installed in selflubricating top Sealing 31 in this inverted draw cut.Like this, this mechanism can utilize no oil drag to drive to drive.
Fixed scroll 30 has the mirror ultrafinish surface, and it faces the mirror ultrafinish surface on the dish of corresponding vortex matter revolution 46, and forms circular groove in the mirror ultrafinish surface that is being adjacent on these vortex matter revolution 46 dishes.Annular selflubricating dust seal 32 is contained in the circular groove, keeps the inner sealing space and outside hermetic seal determined by the scrollwork 51 of the scrollwork 39 of fixed scroll 30 and vortex matter revolution 46, and prevents that air or dust are inhaled into from the outside.
Fixed scroll 30 has suction port 36, this suction port 36 link to each other with the spray containers (not shown) of holding nitrogen and with nitrogen from this mouthful suction.Suction port 36 communicates with diffuser 34 by passage 35.
Description has the 3rd embodiment's of said structure operating process.
With reference to Fig. 3, the rotation of belt pulley 42 causes vortex matter revolution 46 revolution, thus gas is sucked from the container (not shown), and enter the seal space that limits by vortex matter revolution scrollwork 51 and fixed scroll scrollwork 39, in the sealing space, compress by the outer end of fixed scroll scrollwork 39.
Simultaneously, the pressurized gas in the spray containers imports diffuser 34 by passage 35 from injection apparatus.
After entering the gas compression of seal space, when final Seal cage was communicated with exhaust port 45, pressurized gas was discharged in the diffuser 34.
The pressurized gas of pressurized gas in spray containers of discharging discharged by the exhaust port 34b of diffuser.
As described in the 3rd embodiment, discharge by injection apparatus for the pressurized gas in the container that will vacuumize, pressurized gas is imported diffuser, the pressurized gas of pressurized gas in spray containers discharged like this.
When the pressurized gas of deriving from the injection apparatus of the first order of introducing diffuser expands in the second level, rely on the pressure drop that the diffuser first order produced and be drawn onto this first order by the gas of vacuum pump compression, then with discharging from the second level of diffuser from pressurized gas in the injection apparatus.
Like this, as second embodiment, with nitrogen (N
2) as infeeding diffuser, coming from the harmful gas of vacuum-pumping container from the pressurized gas in the injection apparatus, even in the compression process that vacuumizes, be compressed, also can water down by nitrogen.
Fig. 4 is the cut-away view according to secondary oil-free scroll vacuum pump of the present invention, and this pump is connected by vacuum pump 1A and 1D and constituted.
With reference to Fig. 4, vacuum pump 1A is the one-level vacuum pump and has exhaust port 9A that this exhaust port 9A is connected with the suction port 8 of two-stage vacuum pump 1D by conduit 23.One-level vacuum pump 1A also has exhaust port 9B, and this exhaust port 9B is communicated with conduit 23 by solenoid valve 21 and conduit 24, and leads to the outside by solenoid valve 22.
When the pressure of one-level pressurized gas is higher than 1000 to 100Pa, solenoid valve 21 and solenoid valve 22 " are opened ", pressurized gas the one-level pump 1A under initial conditions when beginning to start is discharged to the outside by solenoid valve 22 under high pressure conditions, in order to avoid be inhaled among the two stage pump 1D.
When the pressure of above-mentioned pressurized gas is lower than 1000 to 100Pa cun, solenoid valve 21 and solenoid valve 22 are closed.
The pressure of pressurized gas can be determined by the pressure of measuring in the vacuum-pumping container (not shown).In other words, can be according to coming control electromagnetic valve 21 and solenoid valve 22 based on the discharge performance plot of volume of a container and the operating characteristics of one-level pump 1A, described discharge performance plot is stored in the controller 10.
Controller 10 has output terminal, and it is connected the control of control valve 21 and 22 and brings in the switching of controlling these two valves, controls the driving source that is connected with the driving source of one-level pump 1A and two stage pump 1D thus.
In above-mentioned embodiment with structure as shown in Figure 4, in the initial period that drives, controller 10 makes solenoid valve 21 and solenoid valve 22 stay open state and drives one-level pump 1A.Like this, gas sucks the one-level pump 1A and compression from the vacuum-pumping container (not shown) by suction port 8, is discharged by exhaust port 9A and 9B by the pressurized gas of one-level pump 1A compression.
The pressurized gas of discharging from exhaust port 9A also and from the pressurized gas that comes from exhaust port 9B is discharged to the outside through solenoid valve 22 together by solenoid valve 21 guiding.
When the pressure of pressurized gas is lower than 1000 to 100Pa, solenoid valve 21 and 22 cuts out.
Because of solenoid valve 21 cuts out, compress and the discharge gas by 26 compressions of fixed scroll 6 and vortex matter revolution that comes from the discharge gas of exhaust port 9B and come from exhaust port 5c imports two stage pump 1D by exhaust port 9A and conduit 23 together by fixed scroll 7 and vortex matter revolution 27 (Fig. 1).
When operation at quarter above-mentioned solenoid valve 21 and 22 cuts out it at a time, might close independent solenoid valve 22.In this occasion, the pressurized gas of discharging from exhaust port 9B by solenoid valve 21 introduction channels 23 and and the pressurized gas of discharging from exhaust port 9A enter two stage pump 1D together.
Meanwhile, drive two stage pump, begin to compress the pressurized gas that imports by the one-level pump.
At this moment, the pressurized gas in the one-level pump is not in rough vacuum viscosity scope, like this, can not produce heating problem by Yin Gaowen in two stage pump.
Because pressurized gas is compression once again in two stage pump 1D, thereby may realize high compression ratio.
Extend towards the outside of housing owing to be used for discharging the discharge route of the pressurized gas of dry system, therefore, can oiling agent or analog not imported driving source, the one-level pump can be connected with two stage pump like this by vortex matter revolution, thus the realization high compression ratio.
Owing to be that one group of oil-free scroll vacuum pump is connected in series, and will be arranged on the control valve unit of external communications in the discharge route, and the seal container that will vacuumize is connected on the one-level pump intake, therefore, in the operation of starting stage, gas pressure in the seal container is near barometric pressure, and the gas that sucks has been compressed into high pressure conditions in the compression process of one-level pump.Like this, pressurized gas is discharged to the outside from the one-level pump by control valve unit under the high pressure effect, and does not supply with two stage pump.
When the compression pressure from the one-level pump is lower than predetermined pressure, shut-off valve assembly, thus will in two stage pump, further compress from the pressurized gas of one-level pump.
Like this, be higher than no pressurized gas suction two stage pump under the atmospheric condition, just can not produce heating problem because of the overcompression in the two stage pump at pressure.Produce owing under high pressure there is heat, therefore, neither can damage the durability of vacuum pump, also can the generating pump not interior burning and the damage of pump.
Owing to be connected with one group of vacuum pump, the one-level pump and two and pump can drive with different driving sources, therefore might basis successively corresponding to the rotation of the load optimized driving source of pressurized gas of the compression ratio of one-level pump and two stage pump.
At the initial stage that container vacuumizes, compression pressure in the one-level pump is higher than barometric pressure, promptly, degree of vacuum viscosity scope is low in the container, at this moment can drive the one-level pump independently, pressurized gas is discharged to the outside by control valve unit, the compression pressure in the one-level pump becomes when being lower than barometric pressure, drive two stage pump again, realize economical running thus.
In sum, can provide a kind of oil-free scroll vacuum pump according to the present invention, it can not reduce the discharge efficient of pressurized gas.
In addition, discharge owing to being fed in the diffuser by the pressurized gas that will come from injection apparatus from the pressurized gas in the vacuum pump, thereby can form and a kind ofly improve the vacuum pump of compression efficiency and a kind of oil-free vacuum pump is provided, also it can be desalinated even in the compression process that vacuumizes, concentrate this pump from the harmful gas in the container.
Claims (8)
1, a kind of pair of scrollwork oil-free scroll vacuum pump comprises:
One has the vortex matter revolution of the revolution scrollwork that is arranged on dish both sides; And
Fixed scroll, each fixed scroll has the fixed scroll that forms on the surface on each surface of described relatively fixed scroll dish, and described fixed scroll meshes with each revolution scrollwork respectively;
Described fixed scroll supports described vortex matter revolution in the rubbing contact mode;
Each described fixed scroll has a dish, has the discharge route that is used to discharge compressed fluid that is arranged on described each side of vortex matter revolution on each dish.
2, a kind of oil-free scroll vacuum pump is used for compressing the gas of the pump housing and by a diffuser pressurized gas is discharged to the outside of the described pump housing, and comprises:
Injection apparatus, this injection apparatus import diffuser with the pressurized gas that sprays by compulsion, thereby pressurized gas is discharged from the pump housing.
3, oil-free scroll vacuum pump according to claim 2 is characterized in that, described diffuser is arranged between the final compression chamber of being determined by fixed scroll and vortex matter revolution and described discharge route.
4, a kind of pair of scrollwork oil-free scroll vacuum pump comprises:
One has the vortex matter revolution of the revolution scrollwork that is arranged on dish both sides; And
Fixed scroll, each fixed scroll has the fixed scroll that forms on the surface on each surface of described relatively fixed scroll dish, and described fixed scroll meshes with each revolution scrollwork respectively;
Described fixed scroll supports described vortex matter revolution in the rubbing contact mode;
One relatively is installed in the eccentric shaft portion on the dish of described vortex matter revolution prejudicially, and the both sides of this eccentric shaft portion are supported on the side bearing of fixed scroll rotationally.
5, oil-free scroll vacuum pump according to claim 4 is characterized in that, in described bearing outside fan is housed, and described fan is driven by the same driving source that is used for eccentric shaft and makes its rotation, with the cooling fixed scroll.
6, oil-free scroll vacuum pump according to claim 5 is characterized in that, the discharge route that is used for discharging pressurized gas is arranged between each fan and each the fixed scroll outer surface.
7, a kind of oil-free scroll vacuum pump comprises two sliding oil-free scroll mechanisms of rolling up, and this mechanism comprises: one has the vortex matter revolution of the revolution scrollwork that is arranged on dish both sides; One relatively is installed in the eccentric shaft portion that is used to drive vortex matter revolution on the dish of described vortex matter revolution prejudicially, and the both sides of this eccentric shaft portion are supported on the side bearing of fixed scroll rotationally, it is characterized in that:
Fan is equipped with in outside at described bearing, and described fan is driven by the same driving source that is used for eccentric shaft portion and it rotated cool off described fixed scroll; And
Between the outer surface of described fan and described fixed scroll, be provided with injection channel.
8, a kind of oil-free scroll vacuum pump comprises one group of vacuum pump body that is connected in series by control valve unit, it is characterized in that:
Described each vacuum pump body comprises:
One has the vortex matter revolution of the revolution scrollwork that is arranged on dish both sides;
Fixed scroll, each fixed scroll has the fixed scroll that forms on the surface on each surface of relative fixed scroll dish, described fixed scroll meshes with each revolution scrollwork respectively, and described fixed scroll supports described vortex matter revolution in the rubbing contact mode;
Pass described fixed scroll and described vortex matter revolution and be contained in device for revolving and driving in the described vortex matter revolution dish prejudicially;
One is installed in the outer surface of described fixed scroll and holds the housing of described device for revolving and driving;
One is discharged to discharge route on each described fixed scroll dish with pressurized gas from each side of described vortex matter revolution; And
Described control valve unit is used for controlling selectively:
Space and the outside effect that is communicated with between the discharge route of previous stage vacuum pump and the back one-level vacuum pump intake; And
The effect of being connected in series of previous stage vacuum pump and back one-level vacuum pump.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 97109681 CN1177681A (en) | 1996-03-29 | 1997-03-28 | Oil-free scroll vacuum pump |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP103431/96 | 1996-03-29 | ||
| JP104192/96 | 1996-03-29 | ||
| CN 97109681 CN1177681A (en) | 1996-03-29 | 1997-03-28 | Oil-free scroll vacuum pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1177681A true CN1177681A (en) | 1998-04-01 |
Family
ID=5171194
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 97109681 Pending CN1177681A (en) | 1996-03-29 | 1997-03-28 | Oil-free scroll vacuum pump |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1177681A (en) |
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| CN100346073C (en) * | 2000-08-15 | 2007-10-31 | 爱默生气候技术公司 | Positive displacement device with working unit with inlet and outlet |
| CN101438061B (en) * | 2006-05-11 | 2013-07-24 | 爱德华兹有限公司 | Vacuum pump |
| CN103573627A (en) * | 2012-08-07 | 2014-02-12 | 思科涡旋科技(杭州)有限公司 | Multilevel floating vortex vacuum pumps and usage method thereof |
| CN105593524A (en) * | 2013-10-08 | 2016-05-18 | 丹佛斯商用压缩机公司 | A scroll compressor |
| CN109931259A (en) * | 2017-12-15 | 2019-06-25 | 艾默生环境优化技术有限公司 | Variable volume compares compressor |
| CN110159528A (en) * | 2019-05-23 | 2019-08-23 | 浙江大学 | A kind of parallel oil-free scroll air compressor machine of bilateral double flute |
| US10753352B2 (en) | 2017-02-07 | 2020-08-25 | Emerson Climate Technologies, Inc. | Compressor discharge valve assembly |
| US10801495B2 (en) | 2016-09-08 | 2020-10-13 | Emerson Climate Technologies, Inc. | Oil flow through the bearings of a scroll compressor |
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| US10907633B2 (en) | 2012-11-15 | 2021-02-02 | Emerson Climate Technologies, Inc. | Scroll compressor having hub plate |
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| US11022119B2 (en) | 2017-10-03 | 2021-06-01 | Emerson Climate Technologies, Inc. | Variable volume ratio compressor |
| CN115622325A (en) * | 2022-12-16 | 2023-01-17 | 华驰动能(北京)科技有限公司 | Energy storage flywheel capable of automatically vacuumizing and energy storage equipment with energy storage flywheel |
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| CN100346073C (en) * | 2000-08-15 | 2007-10-31 | 爱默生气候技术公司 | Positive displacement device with working unit with inlet and outlet |
| CN101438061B (en) * | 2006-05-11 | 2013-07-24 | 爱德华兹有限公司 | Vacuum pump |
| US11635078B2 (en) | 2009-04-07 | 2023-04-25 | Emerson Climate Technologies, Inc. | Compressor having capacity modulation assembly |
| US10954940B2 (en) | 2009-04-07 | 2021-03-23 | Emerson Climate Technologies, Inc. | Compressor having capacity modulation assembly |
| CN103573627A (en) * | 2012-08-07 | 2014-02-12 | 思科涡旋科技(杭州)有限公司 | Multilevel floating vortex vacuum pumps and usage method thereof |
| US10907633B2 (en) | 2012-11-15 | 2021-02-02 | Emerson Climate Technologies, Inc. | Scroll compressor having hub plate |
| US11434910B2 (en) | 2012-11-15 | 2022-09-06 | Emerson Climate Technologies, Inc. | Scroll compressor having hub plate |
| CN105593524A (en) * | 2013-10-08 | 2016-05-18 | 丹佛斯商用压缩机公司 | A scroll compressor |
| US10801495B2 (en) | 2016-09-08 | 2020-10-13 | Emerson Climate Technologies, Inc. | Oil flow through the bearings of a scroll compressor |
| US10890186B2 (en) | 2016-09-08 | 2021-01-12 | Emerson Climate Technologies, Inc. | Compressor |
| US10753352B2 (en) | 2017-02-07 | 2020-08-25 | Emerson Climate Technologies, Inc. | Compressor discharge valve assembly |
| US11022119B2 (en) | 2017-10-03 | 2021-06-01 | Emerson Climate Technologies, Inc. | Variable volume ratio compressor |
| CN109931259A (en) * | 2017-12-15 | 2019-06-25 | 艾默生环境优化技术有限公司 | Variable volume compares compressor |
| US10962008B2 (en) | 2017-12-15 | 2021-03-30 | Emerson Climate Technologies, Inc. | Variable volume ratio compressor |
| US10995753B2 (en) | 2018-05-17 | 2021-05-04 | Emerson Climate Technologies, Inc. | Compressor having capacity modulation assembly |
| US11754072B2 (en) | 2018-05-17 | 2023-09-12 | Copeland Lp | Compressor having capacity modulation assembly |
| CN110159528A (en) * | 2019-05-23 | 2019-08-23 | 浙江大学 | A kind of parallel oil-free scroll air compressor machine of bilateral double flute |
| US11655813B2 (en) | 2021-07-29 | 2023-05-23 | Emerson Climate Technologies, Inc. | Compressor modulation system with multi-way valve |
| US11879460B2 (en) | 2021-07-29 | 2024-01-23 | Copeland Lp | Compressor modulation system with multi-way valve |
| US11846287B1 (en) | 2022-08-11 | 2023-12-19 | Copeland Lp | Scroll compressor with center hub |
| CN115622325B (en) * | 2022-12-16 | 2023-03-28 | 华驰动能(北京)科技有限公司 | Energy storage flywheel capable of automatically vacuumizing and energy storage equipment with energy storage flywheel |
| CN115622325A (en) * | 2022-12-16 | 2023-01-17 | 华驰动能(北京)科技有限公司 | Energy storage flywheel capable of automatically vacuumizing and energy storage equipment with energy storage flywheel |
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