JP2012517023A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2012517023A5 JP2012517023A5 JP2011546799A JP2011546799A JP2012517023A5 JP 2012517023 A5 JP2012517023 A5 JP 2012517023A5 JP 2011546799 A JP2011546799 A JP 2011546799A JP 2011546799 A JP2011546799 A JP 2011546799A JP 2012517023 A5 JP2012517023 A5 JP 2012517023A5
- Authority
- JP
- Japan
- Prior art keywords
- polymer
- optical waveguide
- core layer
- cladding
- refractive index
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005253 cladding Methods 0.000 claims description 29
- 229920000642 polymer Polymers 0.000 claims description 27
- 239000000463 material Substances 0.000 claims 20
- 239000012792 core layer Substances 0.000 claims 18
- 230000003287 optical effect Effects 0.000 claims 18
- 239000010410 layer Substances 0.000 claims 14
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 6
- -1 pentabromophenyl Chemical group 0.000 claims 4
- 125000003118 aryl group Chemical group 0.000 claims 3
- 230000014509 gene expression Effects 0.000 claims 3
- 238000000034 method Methods 0.000 claims 3
- 239000000377 silicon dioxide Substances 0.000 claims 3
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims 2
- CERQOIWHTDAKMF-UHFFFAOYSA-M Methacrylate Chemical compound CC(=C)C([O-])=O CERQOIWHTDAKMF-UHFFFAOYSA-M 0.000 claims 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims 2
- 238000005229 chemical vapour deposition Methods 0.000 claims 2
- 230000003247 decreasing effect Effects 0.000 claims 2
- 229910052731 fluorine Inorganic materials 0.000 claims 2
- 239000011737 fluorine Substances 0.000 claims 2
- 229920000058 polyacrylate Polymers 0.000 claims 2
- 229920000193 polymethacrylate Polymers 0.000 claims 2
- YJCVRMIJBXTMNR-UHFFFAOYSA-N 1,3-dichloro-2-ethenylbenzene Chemical compound ClC1=CC=CC(Cl)=C1C=C YJCVRMIJBXTMNR-UHFFFAOYSA-N 0.000 claims 1
- ISRGONDNXBCDBM-UHFFFAOYSA-N 2-chlorostyrene Chemical compound ClC1=CC=CC=C1C=C ISRGONDNXBCDBM-UHFFFAOYSA-N 0.000 claims 1
- PTRVLELMDKQITQ-UHFFFAOYSA-N 2-methyl-n-naphthalen-1-ylprop-2-enamide Chemical compound C1=CC=C2C(NC(=O)C(=C)C)=CC=CC2=C1 PTRVLELMDKQITQ-UHFFFAOYSA-N 0.000 claims 1
- PZNHAQALPSHGRA-UHFFFAOYSA-N 2-n-ethenylbenzene-1,2-dicarboxamide Chemical compound NC(=O)C1=CC=CC=C1C(=O)NC=C PZNHAQALPSHGRA-UHFFFAOYSA-N 0.000 claims 1
- ORNUPNRNNSVZTC-UHFFFAOYSA-N 2-vinylthiophene Chemical compound C=CC1=CC=CS1 ORNUPNRNNSVZTC-UHFFFAOYSA-N 0.000 claims 1
- 239000004593 Epoxy Substances 0.000 claims 1
- 239000004642 Polyimide Substances 0.000 claims 1
- 229910052581 Si3N4 Inorganic materials 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 claims 1
- MCMNRKCIXSYSNV-UHFFFAOYSA-N ZrO2 Inorganic materials O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims 1
- 230000008878 coupling Effects 0.000 claims 1
- 238000010168 coupling process Methods 0.000 claims 1
- 238000005859 coupling reaction Methods 0.000 claims 1
- 239000005383 fluoride glass Substances 0.000 claims 1
- 239000006260 foam Substances 0.000 claims 1
- 239000011521 glass Substances 0.000 claims 1
- 230000010354 integration Effects 0.000 claims 1
- 229910052751 metal Inorganic materials 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 239000000178 monomer Substances 0.000 claims 1
- ZKATWMILCYLAPD-UHFFFAOYSA-N niobium pentoxide Inorganic materials O=[Nb](=O)O[Nb](=O)=O ZKATWMILCYLAPD-UHFFFAOYSA-N 0.000 claims 1
- URLJKFSTXLNXLG-UHFFFAOYSA-N niobium(5+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Nb+5].[Nb+5] URLJKFSTXLNXLG-UHFFFAOYSA-N 0.000 claims 1
- 229920000620 organic polymer Polymers 0.000 claims 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims 1
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 claims 1
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 claims 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 claims 1
- 239000002245 particle Substances 0.000 claims 1
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 claims 1
- 229920001721 polyimide Polymers 0.000 claims 1
- 230000005855 radiation Effects 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 229910001936 tantalum oxide Inorganic materials 0.000 claims 1
- 239000004408 titanium dioxide Substances 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP09151982.7 | 2009-02-03 | ||
| EP09151982A EP2214049B1 (en) | 2009-02-03 | 2009-02-03 | Integrated optical waveguide interferometric sensor |
| PCT/EP2010/050743 WO2010089209A1 (en) | 2009-02-03 | 2010-01-22 | Integrated optical waveguide interferometric sensor |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2012517023A JP2012517023A (ja) | 2012-07-26 |
| JP2012517023A5 true JP2012517023A5 (https=) | 2015-01-22 |
| JP5737722B2 JP5737722B2 (ja) | 2015-06-17 |
Family
ID=40801771
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011546799A Expired - Fee Related JP5737722B2 (ja) | 2009-02-03 | 2010-01-22 | 積分光学導波路型干渉計 |
Country Status (10)
| Country | Link |
|---|---|
| US (1) | US9151968B2 (https=) |
| EP (1) | EP2214049B1 (https=) |
| JP (1) | JP5737722B2 (https=) |
| CN (1) | CN102292665B (https=) |
| AT (1) | ATE536565T1 (https=) |
| DK (1) | DK2214049T3 (https=) |
| ES (1) | ES2373848T3 (https=) |
| PL (1) | PL2214049T3 (https=) |
| SG (1) | SG173446A1 (https=) |
| WO (1) | WO2010089209A1 (https=) |
Families Citing this family (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| BRPI1008861A2 (pt) * | 2009-02-04 | 2016-03-15 | Ostendum Holding B V | sistema para análise de um fluido |
| SG10201502164TA (en) * | 2011-09-21 | 2015-05-28 | Agency Science Tech & Res | Optical Circuit For Sensing A Biological Entity In A Fluid And Method Of Configuring The Same |
| GB201117649D0 (en) * | 2011-10-12 | 2011-11-23 | Univ Gent | Resonant biosensor |
| KR101369926B1 (ko) * | 2012-03-07 | 2014-03-06 | 한국광기술원 | 광대역 광스플리터 및 이를 이용한 다파장 대역의 이미지 확보가 가능한 광학 단층 영상기기 |
| WO2014110468A1 (en) * | 2013-01-11 | 2014-07-17 | Lumense, Inc. | System and method for sensing ammonia in a fluid |
| US20150077756A1 (en) * | 2013-06-13 | 2015-03-19 | Lumense, Inc. | System and method for continuous real-time monitoring of water at contaminated sites |
| JP5951589B2 (ja) * | 2013-11-28 | 2016-07-13 | 日本碍子株式会社 | 光導波路素子 |
| US9453791B2 (en) * | 2014-07-01 | 2016-09-27 | Octrolix Bv | Flow cytometry system and method |
| GR1009480B (el) | 2017-02-17 | 2019-03-19 | Amo Gmbh | Μεθοδος κατασκευης ολοκληρωμενου πλασμο-φωτονικου βιοαισθητηρα και συσκευη για το σκοπο αυτο |
| CN111164417B (zh) * | 2017-09-01 | 2023-06-23 | 迈普有限公司 | 基于光子干涉仪的传感 |
| US11509275B2 (en) * | 2018-04-20 | 2022-11-22 | Neophotonics Corporation | Method and apparatus for bias control with a large dynamic range for Mach-Zehnder modulators |
| WO2020039436A1 (en) * | 2018-08-20 | 2020-02-27 | Technion Research & Development Foundation Limited | Polymer-coated high-index waveguide for acoustic sensing |
| US11226506B2 (en) | 2020-03-17 | 2022-01-18 | Taiwan Semiconductor Manufacturing Company, Ltd. | Heater structure with a gas-filled isolation structure to improve thermal efficiency in a modulator device |
| CN111609873A (zh) * | 2020-04-24 | 2020-09-01 | 中国地质大学（武汉） | 一种波导干涉仪传感器 |
| DE102020212112A1 (de) * | 2020-09-25 | 2022-03-31 | Karlsruher Institut für Technologie | Optisches Wellenleiterbauelement und Verfahren zu dessen Herstellung |
| US11500151B2 (en) * | 2021-02-22 | 2022-11-15 | Taiwan Semiconductor Manufacturing Company Limited | Semiconductor arrangement and method of making |
| CN115128735B (zh) * | 2021-10-27 | 2024-05-07 | 赛丽科技(苏州)有限公司 | 光学传感器芯片和光学传感系统 |
| EP4466530A1 (en) * | 2022-01-21 | 2024-11-27 | Bialoom Ltd | Optical interferometric sensor |
Family Cites Families (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4940328A (en) * | 1988-11-04 | 1990-07-10 | Georgia Tech Research Corporation | Optical sensing apparatus and method |
| KR100238713B1 (ko) * | 1993-07-07 | 2000-01-15 | 도낀 가부시끼가이샤 | 광전계 센서 |
| US5644125A (en) * | 1994-11-23 | 1997-07-01 | Research Foundation Of State University Ny | Spectrometer employing a Mach Zehnder interferometer created by etching a waveguide on a substrate |
| FR2774887B1 (fr) * | 1998-02-13 | 2000-04-14 | Centre Nat Rech Scient | Capteur optique sur substrat de silicium et application a la mesure in situ d'un marqueur fluorescent dans les petites bronches |
| US6429023B1 (en) * | 1998-07-20 | 2002-08-06 | Shayda Technologies, Inc. | Biosensors with polymeric optical waveguides |
| US6240226B1 (en) * | 1998-08-13 | 2001-05-29 | Lucent Technologies Inc. | Polymer material and method for optical switching and modulation |
| US6385383B1 (en) * | 1998-10-05 | 2002-05-07 | Lucent Technologies Inc. | Optical attenuator structure and method using polymer material |
| US6987603B2 (en) * | 2003-01-31 | 2006-01-17 | E Ink Corporation | Construction of electrophoretic displays |
| JP4249996B2 (ja) * | 2003-02-10 | 2009-04-08 | 日東電工株式会社 | ポリカルボジイミド共重合体からなるレンズ材料 |
| JP2005009944A (ja) * | 2003-06-18 | 2005-01-13 | Hitachi Ltd | 化学物質検出装置 |
| GB0415882D0 (en) * | 2004-07-15 | 2004-08-18 | Univ Southampton | Optical sensors |
| JP2006208518A (ja) * | 2005-01-26 | 2006-08-10 | Seikoh Giken Co Ltd | 熱光学効果型光導波路素子およびその製造方法 |
| US7228022B1 (en) * | 2005-08-16 | 2007-06-05 | The United States Of America As Represented By The Secretary Of The Navy | Polymer integrated optical transceiver |
| JP4695989B2 (ja) * | 2006-01-27 | 2011-06-08 | 富士通株式会社 | 差動ｍ位相偏移変調信号の復調用干渉計 |
| US20080101744A1 (en) * | 2006-10-31 | 2008-05-01 | Honeywell International Inc. | Optical Waveguide Sensor Devices and Methods For Making and Using Them |
| WO2008082664A2 (en) * | 2006-12-29 | 2008-07-10 | Massachusetts Institute Of Technology | Fabrication-tolerant waveguides and resonators |
| WO2008096296A1 (en) * | 2007-02-08 | 2008-08-14 | Koninklijke Philips Electronics N.V. | Biosensor with evanescent waveguide and integrated sensor |
| PL2017602T3 (pl) * | 2007-07-19 | 2014-09-30 | Consejo Superior Investigacion | Interferometr i czujnik oparty na światłowodzie bimodalnym oraz sposób wykrywania |
| US7906839B2 (en) * | 2008-07-02 | 2011-03-15 | Stats Chippac, Ltd. | Semiconductor device and method of shunt test measurement for passive circuits |
-
2009
- 2009-02-03 EP EP09151982A patent/EP2214049B1/en active Active
- 2009-02-03 AT AT09151982T patent/ATE536565T1/de active
- 2009-02-03 PL PL09151982T patent/PL2214049T3/pl unknown
- 2009-02-03 DK DK09151982.7T patent/DK2214049T3/da active
- 2009-02-03 ES ES09151982T patent/ES2373848T3/es active Active
-
2010
- 2010-01-22 SG SG2011053105A patent/SG173446A1/en unknown
- 2010-01-22 JP JP2011546799A patent/JP5737722B2/ja not_active Expired - Fee Related
- 2010-01-22 CN CN201080004588.8A patent/CN102292665B/zh not_active Expired - Fee Related
- 2010-01-22 WO PCT/EP2010/050743 patent/WO2010089209A1/en not_active Ceased
- 2010-01-22 US US13/143,411 patent/US9151968B2/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2012517023A5 (https=) | ||
| JP5737722B2 (ja) | 積分光学導波路型干渉計 | |
| Donnelly et al. | Ultra-large nonlinear parameter in graphene-silicon waveguide structures | |
| Cetin et al. | Thermal tuning of surface plasmon polaritons using liquid crystals | |
| Gruhler et al. | High-quality Si3N4 circuits as a platform for graphene-based nanophotonic devices | |
| Chang | Silicon rich silicon carbide for integrated photonic applications | |
| Ibrahim et al. | Athermal silicon waveguides with bridged subwavelength gratings for TE and TM polarizations | |
| Shibuya et al. | Silicon waveguide optical modulator driven by metal–insulator transition of vanadium dioxide cladding layer | |
| Reshef et al. | Polycrystalline anatase titanium dioxide microring resonators with negative thermo-optic coefficient | |
| Lian et al. | Embossing of chalcogenide glasses: monomode rib optical waveguides in evaporated thin films | |
| Liang et al. | Bimodal waveguide interferometer RI sensor fabricated on low-cost polymer platform | |
| Yu et al. | Compact thermo-optic modulator based on a titanium dioxide micro-ring resonator | |
| Chen et al. | Highly efficient thermal tuning interferometer in lithium niobate thin film using air bridge | |
| Bai et al. | Wavelength tunable second harmonic generation from photonic crystal vertical cavities | |
| Vicente et al. | Fabrication of low-cost thermo-optic variable wave plate based on waveguides patterned on di-ureasil hybrids | |
| CN102436035B (zh) | 环形谐振腔温度漂移补偿方法及系统 | |
| Qiu et al. | Plate-slot polymer waveguide modulator on silicon-on-insulator | |
| Kang et al. | High quality chalcogenide-silica hybrid wedge resonator | |
| Zhang et al. | Rib and strip chalcogenide waveguides based on Ge–Sb–Se radio-frequency sputtered films | |
| Goncharenko et al. | Optimizing the structure of optical temperature sensors on the base of slot and double-slot ring waveguides with liquid crystal filling | |
| CN110927871A (zh) | 宽带温度不敏感及低色散的光波导结构及其设计方法 | |
| Feng et al. | Athermal characteristics of tio 2-clad silicon waveguides at 1.3 μm | |
| Liu et al. | Electrically tunable plasmonic meta-grating on thin film lithium niobate | |
| Hunziker et al. | Fabrication and phase modulation in organic single-crystalline configurationally locked, phenolic polyene OH1 waveguides | |
| CN111090146A (zh) | 一种宽带温度不敏感和低色散的铌酸锂光波导结构及其应用 |