JP2012242210A5

JP2012242210A5 -

Info

Publication number: JP2012242210A5
Application number: JP2011111403A
Authority: JP
Filing date: 2011-05-18
Publication date: 2014-05-22
Anticipated expiration: 2031-05-18

Description

図１において、複合センサ１におけるセンサ部１０は、対向して配設される２つの圧電素子（第１圧電素子１１、第２圧電素子１２）と、第１圧電素子１１及び第２圧電素子１２に狭持され、外力に対して可塑性又は弾性を有し、密度が略均一である誘電体２とを備える。誘電体２として、例えば、弾性を有するゴム、ウレタン、また液体等を用いることができる。第１圧電素子１１及び第２圧電素子１２は、対向して配設される１対の平板電極（第１圧電素子１１の平板電極を第１平板電極１１ａ、第２平板電極１１ｂとし、第２圧電素子１２の平板電極を第３平板電極１２ａ、第４平板電極１２ｂとする）と、第１平板電極及び第２平板電極並びに第３平板電極及び第４平板電極で狭持される圧電体（第１圧電体１１ｃ、第２圧電体１２ｃ）とを備える。
In FIG. 1, the sensor unit 10 in the composite sensor 1 includes two piezoelectric elements (a first piezoelectric element 11 and a second piezoelectric element 12) that are disposed to face each other, and a first piezoelectric element 11 and a second piezoelectric element 12. And a dielectric 2 having plasticity or elasticity against external force and having a substantially uniform density. As a dielectric 2, for example, it can be used a rubber having elasticity, urethane, also a liquid or the like. The first piezoelectric element 11 and the second piezoelectric element 12 are a pair of flat plate electrodes disposed opposite to each other (the flat plate electrodes of the first piezoelectric element 11 are the first flat plate electrode 11a and the second flat plate electrode 11b, and the second The plate electrodes of the piezoelectric element 12 are referred to as a third plate electrode 12a and a fourth plate electrode 12b), and a piezoelectric body sandwiched between the first plate electrode, the second plate electrode, and the third plate electrode and the fourth plate electrode ( A first piezoelectric body 11c and a second piezoelectric body 12c).

Claims

A first piezoelectric element comprising a plate electrode and a piezoelectric body;
A second piezoelectric element disposed opposite to the first piezoelectric element and comprising a plate electrode and a piezoelectric body;
A dielectric sandwiched between the first piezoelectric element and the second piezoelectric element, elastic to external force, and having a substantially uniform density;
Signal applying means for applying a signal of a predetermined frequency to the first piezoelectric element ;
Pre Symbol oscillation signal in the direction of the first of said piezoelectric element the second piezoelectric element, and the second signal detecting means for detecting and converting into an electric signal by the second piezoelectric element,
A composite sensor comprising: a capacitance detecting means for detecting a capacitance between the plate electrode of the first piezoelectric element and the plate electrode of the second piezoelectric element.

The composite sensor according to claim 1,
A reflection signal of a signal oscillated from the first piezoelectric element in the direction of the measurement object approaching the first piezoelectric element is converted into an electric signal by the first piezoelectric element and detected. A composite sensor comprising the signal detection means .

The composite sensor according to claim 2,
The first piezoelectric element is formed by sandwiching the piezoelectric body with a pair of the flat plate electrodes disposed opposite to each other, and the one flat plate electrode is disposed in contact with the dielectric, and the other The flat plate electrode is arranged so that the object to be measured approaches and comes into contact;
When the object to be measured is close to the first piezoelectric element, of the pair of flat plate electrodes in the first piezoelectric element, the flat plate electrode disposed on the dielectric side is connected to the ground. The capacitance detecting means detects a capacitance between a flat plate electrode disposed on a measurement object side of the first piezoelectric element and a flat plate electrode of the second piezoelectric element; The first signal detection means receives and detects a reflected signal of a signal oscillated from the first piezoelectric element to the measurement object side,
When the measurement object is in contact with the first piezoelectric element, of the pair of flat plate electrodes in the first piezoelectric element, the flat electrode disposed on the measurement object side is grounded. Connected, and the capacitance detection means detects a capacitance between a plate electrode disposed on the dielectric side of the first piezoelectric element and a plate electrode of the second piezoelectric element, and A composite sensor , wherein the second signal detecting means detects a signal oscillated from the first piezoelectric element toward the second piezoelectric element .

The composite sensor according to claim 3,
Contact detection means for detecting whether the measurement object has contacted the first piezoelectric element;
A composite sensor comprising connection switching means for switching a connection between a plate electrode and a ground in the first piezoelectric element in response to detection of the first piezoelectric element .

The composite sensor according to claim 4 ,
The contact detection means detects the vibration of the measurement object detected by the first signal detection means, the propagation time of the signal from the first piezoelectric element to the second piezoelectric element, and / or the measurement object. A composite sensor , wherein contact of the measurement object is detected based on a voltage change due to temperature .

The composite sensor according to any one of claims 1 to 4,
When the measurement object is in contact with the first piezoelectric element, if the pressing force from the measurement object to the first piezoelectric element is not more than a predetermined reference value, the second signal detection is performed. Based on the signal detected by the means, the pressing force is calculated, and if the pressing force from the object to be measured to the first piezoelectric element exceeds a predetermined reference value, the capacitance detecting means detects it. A composite sensor that calculates the pressing force based on capacitance .

A first piezoelectric element comprising a plate electrode and a piezoelectric body, and the object to be measured approaches and contacts;
An opposing portion disposed opposite to the first piezoelectric element and having at least a plate electrode;
A dielectric sandwiched between the first piezoelectric element and the facing portion, elastic to external force, and having a substantially uniform density;
Signal applying means for applying a signal of a predetermined frequency to the first piezoelectric element;
First signal detection means for detecting a reflection signal of a signal oscillated from the first piezoelectric element to the facing portion by converting the reflection signal into an electric signal by the first piezoelectric element;
A composite sensor comprising: a capacitance detecting means for detecting a capacitance between the flat plate electrode of the first piezoelectric element and the flat plate electrode of the facing portion .

The composite sensor according to claim 7 ,
Wherein the pre-Symbol first signal detecting means converts the reflected signal direction to the oscillation signal of the measurement object approaching from the first piezoelectric element into an electric signal by the first piezoelectric element A composite sensor.

The composite sensor according to any one of claims 2 to 8,
The composite sensor , wherein the first signal detection means detects heat from the measurement object received by the first piezoelectric element as a signal .

The composite sensor according to any one of claims 2 to 9,
A light emitting element that emits light to the direction of the measurement object;
The composite sensor, wherein the first signal detecting means detects heat and / or vibration caused by the measurement object absorbing light irradiated by the light emitting element .

The composite sensor according to any one of claims 1 to 10,
A light receiving element that receives light emitted from the direction of the measurement object;
A composite sensor, wherein the presence or absence of the measurement object is detected based on information on light received by the light receiving element.

The composite sensor according to any one of claims 1 to 11,
A light emitting element that emits light to the direction of the measurement object;
A light receiving element that receives light irradiated from the direction of the measurement object,
The composite sensor, wherein the light receiving element detects the presence or absence of the measurement object based on information obtained by receiving reflected light from the measurement object of the light emitted from the light emitting element. .