CN117722943B - Piezoelectric driving mechanical phase shifter integrated with high-precision capacitance displacement sensor - Google Patents
Piezoelectric driving mechanical phase shifter integrated with high-precision capacitance displacement sensor Download PDFInfo
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Abstract
The invention discloses a piezoelectric driving mechanical phase shifter integrated with a high-precision capacitance displacement sensor, which comprises a fixed end plate, a movable end plate and a rear cover plate, wherein an inner annular hinge capable of flexibly deforming is integrally arranged on the inner wall of an annular side wall of the movable end plate, and an outer annular hinge capable of flexibly deforming is integrally arranged on the outer wall of the annular side wall of the fixed end plate; the bottom terminal surface of fixed end plate is embedded to be equipped with a plurality of groups around the axis evenly distributed's of through-hole piezoelectricity driver unit and capacitive sensor unit, and the bottom terminal surface internal fixation of fixed end plate is embedded to be equipped with the lead wire and changes the PCB board, and piezoelectricity driver unit and capacitive sensor unit pass through lead wire and change PCB board and be connected with outside cable electricity. The invention realizes the displacement output of the phase shifter through the piezoelectric stack drive, detects the real-time displacement of the piezoelectric stack drive by using the precise capacitance sensor unit, compensates the displacement by using the closed-loop control circuit, and realizes the long-term position stability, motion drift-free and hysteresis-free operation of the phase shifter.
Description
Technical Field
The invention relates to the technical field of phase shifters, in particular to a piezoelectric driving mechanical phase shifter integrated with a high-precision capacitance displacement sensor.
Background
The interferometer is a precise measuring instrument based on the optical interference principle, has the advantages of high precision, good stability and high resolution, and is widely applied to the fields of optical processing and detection. Because the interferometer has low interference pattern precision, low efficiency and poor stability under static state, the phase-shifting interference technology is developed. The phase shifter is the main component in the phase shifting interferometer. The ways to achieve phase-shifting interferometry include wavelength phase shifting and mechanical phase shifting. The mechanical phase shift is realized by utilizing the piezoelectric stack driver to drive the lens to continuously perform micro motion in the optical axis direction, and has the advantages of high precision and good repeatability.
Fig. 23 shows the working principle of the fei-cable interferometer. The monochromatic light beam emitted by the laser is expanded into a parallel light beam through a spectroscope and a collimating objective lens, and the parallel light beam is divided into a measuring light beam and a reference light beam at the lower surface (reference surface) of the reference mirror with a wedge shape. The two paths of light are reflected back through the reference mirror surface and the surface of the measured piece respectively, enter the ocular lens below through the spectroscope reflection, and see the interference fringes with equal thickness after proper adjustment. The piezoelectric stack in the phase shifter drives the reference mirror to generate tiny displacement of a fraction of a wavelength so as to change the phase of the reference light; the CCD camera collects the interferograms on the time sequence generated along with the phase change behind the ocular, then transmits and stores the interferograms into the computer, the computer obtains the phase values of each point of the surface to be measured according to a phase shift algorithm, and the appearance of the surface to be measured can be obtained through serial data processing.
The piezoelectric stack driver is a high-precision displacement driver with excellent performance, and can generate deformation in the length direction in milliseconds by utilizing the inverse piezoelectric effect, and the displacement is generally 0.1% -0.2% of the length of the piezoelectric stack driver. The piezoelectric stack driver has the advantages of compact structure, large driving force, high response speed, high displacement resolution (up to nanometer level), good stability, no electromagnetic interference and the like, and is widely applied to industries such as optical systems, aerospace, robots, micro-electromechanical engineering, medical machinery and the like. The piezoelectric stack has hysteresis, creep, etc. characteristics due to its complex operating mechanism. Firstly, there is a significant nonlinearity between the piezoelectric stack displacement and the drive voltage, about 5% -10%; secondly, the voltage boosting curve and the voltage reducing curve of the piezoelectric stack have larger displacement difference, and have obvious hysteresis characteristics; again, when the driving voltage of the piezoelectric stack is stable, the displacement value will change slowly with time, and the stable value can be reached within a certain time.
Based on the above characteristics of the piezoelectric stack, there are currently mainly a charge driving method, a feedforward compensation method, and a feedback control method to realize linear driving of the piezoelectric stack. The charge driving method has good linearity and resolution at high frequency, but the linearity is reduced due to factors such as electric leakage, drift and the like at low frequency; the feedforward compensation method can reduce hysteresis to a certain extent, but the model is complex, and the real-time calculation has too high requirement on hardware. Compared with the two methods, the feedback control method has stable working process and can obtain good linear displacement output, but the problems that the displacement resolution is limited by the resolution of the sensor, the dynamic performance is low, and the sensor is easy to introduce noise, so that the complexity and the cost are increased still exist.
Disclosure of Invention
In order to eliminate the defects of nonlinearity, hysteresis, creep and the like of a piezoelectric stack driver, the invention designs a piezoelectric driving mechanical phase shifter of an integrated high-precision capacitance displacement sensor, which is used for integrating a closed-loop control loop, solving the problems of low dynamic performance and easiness in influence of external environment of a sensor in feedback control and improving the resolution and precision of the phase shifter. The phase shifter is driven by the piezoelectric stack, the real-time displacement of the piezoelectric stack driver is detected by the precise capacitance displacement sensor, and the displacement is compensated by the closed-loop control circuit, so that the phase shifter can operate stably in long-term position without drift or hysteresis.
In order to solve the technical problems, the invention adopts a technical scheme that:
The piezoelectric driving mechanical phase shifter comprises a fixed end plate, a movable end plate connected to the top end surface of the fixed end plate and a rear cover plate fixedly connected to the bottom end surface of the fixed end plate, wherein coaxial through holes with the same diameter are formed in the centers of the fixed end plate, the movable end plate and the rear cover plate, an inner annular hinge capable of flexibly deforming is integrally arranged on the inner wall of an annular hole of the movable end plate, an outer annular hinge capable of flexibly deforming is integrally arranged on the outer wall of an inner annular side wall of the fixed end plate, and the top surface of the outer annular hinge is fixedly connected with the bottom surface of the inner annular hinge;
The bottom end face of the fixed end plate is internally embedded with three piezoelectric driver units and capacitance displacement sensor units which are uniformly distributed around the axis of the through hole, the capacitance displacement sensor units comprise capacitance sensor probes which are fixedly embedded between the inner circular annular side wall and the piezoelectric driver units and are positioned below the outer circular hinge, the bottom end face of the fixed end plate is internally fixedly embedded with a lead switching PCB, and the piezoelectric driver units and the capacitance sensor probes are electrically connected with an external cable through the lead switching PCB;
the piezoelectric driver unit comprises a piezoelectric pile positioning sleeve fixedly embedded in the end face of the bottom of the movable end plate, a piezoelectric pile movably sleeved in the top of the piezoelectric pile positioning sleeve, a piezoelectric pile jacking column movably sleeved in the piezoelectric pile positioning sleeve and propped against the bottom end of the piezoelectric pile, and an expanding sleeve movably sleeved outside the bottom end of the piezoelectric pile jacking column, wherein the expanding sleeve is embedded in the bottom end face of the fixed end plate, after the expanding bolt is screwed, the outer circumference of the expanding sleeve is expanded and deformed to be fixed in the fixed end plate, and the inner circumference of the expanding sleeve is contracted and deformed to hold the piezoelectric pile jacking column tightly, so that one end of the piezoelectric pile jacking column is fixed in the fixed end plate, and the other end of the piezoelectric pile jacking column is suspended in the piezoelectric pile positioning sleeve;
After the piezoelectric pile is excited by the power supply, the piezoelectric pile generates displacement and pushes the movable end plate to move, so that the outer annular hinge and the inner annular hinge deform simultaneously, the displacement of the outer annular hinge is detected in real time by the capacitance displacement sensor unit, and compared with the preset displacement through the closed-loop control circuit, the error between the two is compensated in real time until the movable end plate moves to a preset phase shifting position.
Further, one end of the piezoelectric pile positioning sleeve matched with the movable end plate is provided with a mounting hole matched with the piezoelectric pile, the piezoelectric pile is positioned in the mounting hole, the other end of the piezoelectric pile positioning sleeve is provided with a sleeve joint hole matched with the piezoelectric pile jacking column, and the piezoelectric pile jacking column is positioned in the sleeve joint hole.
Further, the piezoelectric pile positioning sleeve is integrally provided with a toothed guard ring which is uniformly distributed on the outer circular surface of the end where the mounting hole is located, and the piezoelectric pile positioning sleeve is provided with a wire guiding groove on the outer circular surface of the end where the sleeve joint hole is located.
Further, an embedded slot hole matched with the end part of the piezoelectric pile positioning sleeve is formed in the bottom end face of the movable end plate, and an expanding sleeve mounting hole matched with the expanding sleeve is formed in the bottom end face of the fixed end plate.
Further, the capacitive displacement sensor unit further comprises a probe and a signal conditioning circuit, wherein the cable core layer of the capacitive sensor probe is connected with the input end of the signal conditioning circuit, the output end of the signal conditioning circuit is connected with the cable inner shielding layer of the capacitive sensor probe through an interface circuit, and the signal conditioning circuit enables the cable core layer and the cable inner shielding layer of the capacitive sensor probe to have the same potential through a 1:1 operational amplifier.
Further, the capacitive sensor probe comprises a first pole piece mounting seat and a second pole piece mounting seat which are arranged in parallel relatively from top to bottom, a target pole plate is fixedly embedded in the bottom surface of the first pole piece mounting seat, a fixed pole plate is fixedly embedded in the top surface of the second pole piece mounting seat, and the target pole plate is matched with the fixed pole plate to perform displacement measurement.
Further, the outer side of the inner circular side wall of the fixed end plate is provided with a probe embedding groove positioned below the outer circular hinge, the capacitance sensor probe is embedded in the probe embedding groove, a first pole piece mounting seat positioned above is fixedly connected to the top wall of the probe embedding groove through a bolt, and a second pole piece mounting seat positioned below is fixedly connected to the bottom wall of the probe embedding groove through a bolt.
The pre-tightening tool adopted by the assembly pre-tightening process comprises a fixed chassis, three side-inserted base plates, a positioning pressing plate and a triangular force application plate, wherein the three side-inserted base plates are uniformly distributed on the top surface of the fixed chassis around the central axis of the fixed chassis and are detachably connected to the fixed chassis through screws, the bottom of the positioning pressing plate is movably inserted into the center of the top surface of the fixed chassis, the top of the positioning pressing plate is erected on the top surface of the side-inserted base plates and is respectively and movably connected with the three side-inserted base plates through second bolts, the triangular parts of the bottom surfaces of the triangular force application plates are respectively and fixedly connected with a pressing rod, and the center of the top surface of the triangular force application plate is fixedly connected with the power output end of a press;
the assembling pre-tightening process comprises the following steps:
s1, placing a phase shifter main body assembly in an assembled state on a fixed chassis in a position that a movable end plate is arranged below and a fixed end plate is arranged above;
S2, placing the piezoelectric stack into a piezoelectric stack positioning sleeve, then placing a piezoelectric stack top plunger into the piezoelectric stack positioning sleeve, sleeving a loose-state expansion sleeve on the outer side of the shaft end of the piezoelectric stack top post, respectively placing the preliminarily assembled piezoelectric driver units into a horizontally arranged phase shifter main body assembly, fixedly embedding the inner side end of the piezoelectric stack positioning sleeve into a movable end plate, compacting the expansion sleeve to enable the piezoelectric stack positioning sleeve to be completely embedded into a fixed end plate, and completing the preliminary installation and positioning of three groups of piezoelectric driver units in the phase shifter main body assembly;
S3, the outer edges of the three side plug base plates are respectively and horizontally inserted into annular gaps at the bottoms of the side walls of the movable end plates outwards, the positioning pressing plates are inserted onto the fixed chassis, the positioning pressing plates are respectively inserted into the three side plug base plates through second bolts, the radial positioning of the three side plug base plates on the fixed chassis is completed, then the side plug base plates are fastened on the fixed chassis through screws, the fixing of the three side plug base plates on the fixed chassis is completed, and the inner walls of annular holes of the movable end plates are tightly pressed on the fixed chassis by the three side plug base plates;
S4, fixedly connecting the triangular force application plate on the power output end of the press in a horizontal state, and enabling three pressing rods at the bottom of the triangular force application plate to be respectively and vertically positioned right above the three piezoelectric pile jacking columns;
s5, starting the press machine to work, driving the triangular force application plate and three pressing rods on the triangular force application plate to vertically downwards move, and respectively continuously pressing the corresponding piezoelectric pile jacking columns by the three pressing rods until the output pressure indication of the press machine is stabilized within a preset pretightening force range;
s6, cyclically screwing up the expansion bolts on each expansion sleeve to enable the expansion sleeve to generate internal contraction and external expansion deformation, and fixing the top end of the piezoelectric stack jacking column in the fixed end plate to complete pre-tightening of the piezoelectric stack;
s7, starting a power output end of the press machine to work reversely, driving the triangular force application plate and three force application rods on the triangular force application plate to move upwards, removing the second bolts and the positioning pressing plates from the fixed chassis, unscrewing and backing out the bolts on each side insert backing plate, horizontally and inwards removing each side insert backing plate from the side wall groove of the movable end plate, and fixedly mounting the rear cover plate on the fixed end plate.
Further, in step S5, a silicone block is placed on top of the piezoelectric stack top post before starting the press operation, and in step S7, the silicone block is removed from the top of the piezoelectric stack top post before the back cover plate is fixedly mounted on the fixed end plate.
Further, in step S6, the expansion sleeve cannot be rotated during the cyclic tightening of the bolt.
Further, the pressing rod is connected to the bottom surface of the triangular force application plate in a threaded mode.
Compared with the prior art, the invention has the following beneficial effects:
1. According to the invention, the piezoelectric stack is fixed by using the expansion sleeve, and the elastic force of the flexible hinge structure deformation is used as the pretightening force of the piezoelectric stack, so that the pretightening force is controllable, the reliability of the device is higher, and the cost is lower; by arranging the piezoelectric pile positioning sleeve, the piezoelectric pile can be protected, so that the quick positioning assembly and the lead wire are convenient;
2. according to the invention, the capacitive displacement sensor is arranged and integrated in the phase shifter, and the probe is arranged in the middle of the hinge, so that the displacement of the hinge gap can be accurately detected in real time, and the working high precision of the phase shifter is ensured;
3. The invention solves the problems of low dynamic performance and easy influence of external environment of the sensor in feedback control by setting the closed-loop control loop of the phase shifter, thus leading the repeated positioning precision of the phase shifter to be higher;
4. According to the invention, the hinge structure is supported by the side-inserted base plate, and the three piezoelectric stacks are synchronously and equivalently applied by adopting the triangular force application plate and the three uniformly distributed pressure application rods, so that the piezoelectric stacks have good and stable output performance.
Drawings
FIG. 1 is a schematic perspective view of a phase shifter according to the present invention;
FIG. 2 is a schematic diagram showing a second three-dimensional structure of the phase shifter according to the present invention;
FIG. 3 is a schematic diagram of a three-dimensional exploded structure of a phase shifter according to the present invention;
FIG. 4 is a schematic cross-sectional view of a phase shifter according to the present invention;
FIG. 5 is an enlarged schematic view of the portion A in FIG. 4;
FIG. 6 is a schematic perspective view of the fixed end plate;
FIG. 7 is a second perspective view of the fixed end plate;
FIG. 8 is one of the schematic perspective views of the movable end plate;
FIG. 9 is a second perspective view of the movable end plate;
FIG. 10 is one of the schematic perspective views of the piezoelectric driver unit;
FIG. 11 is a schematic diagram showing a second perspective structure of the piezoelectric driver unit;
fig. 12 is a schematic view of a perspective exploded structure of the piezoelectric driver unit;
FIG. 13 is a schematic perspective view of the pretensioning tool;
FIG. 14 is a schematic perspective view of the side insert panel;
fig. 15 is a schematic perspective view showing a state in which a piezoelectric driver unit is assembled in a pre-tightening state in accordance with the present invention;
FIG. 16 is a schematic perspective view of the back cover plate;
FIG. 17 is a schematic diagram of the capacitive displacement sensor unit;
FIG. 18 is a schematic diagram of a perspective structure of the capacitive sensor probe;
FIG. 19 is a schematic view of a three-dimensional exploded structure of the capacitive sensor probe;
FIG. 20 is a schematic view of the mounting position of the capacitive sensor probe on a stationary endplate;
Fig. 21 is a schematic perspective view of the lead switching PCB board;
FIG. 22 is a schematic diagram of a closed-loop control circuit structure of a phase shifter according to the present invention;
Fig. 23 is a schematic diagram of the operation of the fei-cable interferometer.
In the figure: the device comprises a fixed end plate, a 101 inner circular side wall, a 102 rear cover plate sinking groove, a 103 expanding sleeve mounting hole, a 104 probe embedding groove, a 105 lead plate embedding groove, a 106 cable perforation, a 2 moving end plate, a 201 outer circular side wall, a 202 annular hole, a 203 embedding groove, a 3 rear cover plate, a 4 piezoelectric driver unit, a 41 piezoelectric stack positioning sleeve, a 411 mounting hole, a 412 sleeving hole, a 413 tooth sheet protection ring, a 414 lead groove, a 42 piezoelectric stack, a 43 piezoelectric stack jacking column, a 44 expanding sleeve, a 45 expanding bolt, a 5 inner circular hinge, a 6 pin shaft, a 7 capacitance sensor probe, a 71 first pole piece mounting seat, a 72 second pole piece mounting seat, a 73 target pole plate, a 74 fixed pole plate, a 75 contact, an 8 lead switching PCB board, a 9 outer circular hinge, a 10 cable protection sleeve, a 11 hoop wire device, a 12 fixed bottom plate, a 13 side plug base plate, a 14 positioning pressing plate, a 15 first bolt, a 16 second bolt, a 17 triangular force application plate, a 18 compression rod and a 19 silica gel block.
Detailed Description
The preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings so that the advantages and features of the present invention can be more easily understood by those skilled in the art, thereby making clear and defining the scope of the present invention.
Referring to fig. 1 to 5, a piezoelectric driven mechanical phase shifter integrated with a high-precision capacitive displacement sensor includes a fixed end plate 1, a movable end plate 2 connected to the top end surface of the fixed end plate 1, and a back cover plate 3 fixedly connected to the bottom end surface of the fixed end plate 1. The outline of the fixed end plate 1, the movable end plate 2 and the back cover plate 3 are similar, and coaxial through holes with equal diameters are formed in the centers of the fixed end plate 1, the movable end plate 2 and the back cover plate 3, so that a column structure with uniform outline can be formed after the three through holes are sequentially overlapped.
As shown in fig. 6 and 7, the bottom of the fixed end plate 1 is an annular flat plate structure, and the inner side edge of the top surface of the annular flat plate structure is integrally provided with an inner circular annular side wall 101. As shown in fig. 8 and 9, the top of the movable end plate 2 is an annular flat plate structure, an outer annular side wall 201 is integrally arranged at the outer edge of the bottom surface of the annular flat plate structure, and the movable end plate 2 is integrally in a shell-shaped structure. The step surface with the same width as the wall thickness of the outer annular side wall 201 is formed on the edge of the top surface of the annular flat plate structure of the fixed end plate 1, so that the outer annular side wall 201 can be movably fastened on the step surface, the movable end plate 2 is fastened and connected on the fixed end plate 1, the movable end plate 2 can axially move relative to the fixed end plate 1 within a certain displacement range, a reference mirror support of the phase shifter is connected with the movable end plate 2, and the reference mirror is arranged in the reference mirror support (neither the reference mirror support nor the reference mirror is shown in the figure), and follows the synchronous movement of the movable end plate 2 through the reference mirror, so that the phase shifting function of the phase shifter is realized. As shown in fig. 16, the back cover plate 3 is a sheet punched member. The bottom surface of the annular flat plate structure of the fixed end plate 1 is provided with a rear cover plate sinking groove 102 matched with the outline of the rear cover plate 3, and the rear cover plate 3 can be completely embedded in the rear cover plate sinking groove 102 and is fixedly connected with the groove top surface of the rear cover plate sinking groove 102 through bolts.
The outer wall of the inner circular side wall 101 of the fixed end plate 1 is integrally provided with a flexibly deformable outer circular hinge 9, the outer circular hinge 9 is coaxially positioned at the outer side of the inner circular side wall 101, and the inner radius size of the outer circular hinge 9 is equivalent to the aperture size of the annular hole 202 of the annular flat plate structure of the movable end plate 2. The inner wall of the annular hole 202 of the movable end plate 2 is integrally provided with a flexibly deformable inner annular hinge 5, the inner annular hinge 5 is coaxially positioned at the inner side of the annular hole 202 (the radial direction of the central axis from the central axis to the periphery is defined as the direction from inside to outside), the inner annular hinge 5 and the inner annular side wall 101 are butted to form a hollow cylinder structure with equal diameter and equal wall thickness, and an annular groove gap is reserved between the end part of the inner annular hinge 5 and the inner end surface of the through hole of the movable end plate 2. When the movable end plate 2 is buckled on the fixed end plate 1, the bottom surface of the inner annular hinge 5 is propped against the top surface of the annular side wall of the fixed end plate 1, and is inserted and positioned through the pin shaft 6 positioned between the bottom surface of the movable end plate 2 and the top surface of the annular side wall of the fixed end plate 1, and is fixedly connected through bolts which are arranged in the bottom surface of the fixed end plate 1 and penetrate through the inner annular side wall 101; meanwhile, the top surface of the outer annular hinge 9 abuts against the bottom surface of the movable end plate 2, which is located outside the annular hole 202, and is fixedly connected through bolts arranged in the top surface of the movable end plate 2 and penetrating through the side wall of the annular hole 202. In this way, in the initial assembled state of the movable end plate 2 and the fixed end plate 1, the inner annular hinge 5, the inner annular side wall 101, the outer annular hinge 9, and the annular hole 202 side wall may form an annular quadrangular hinge structure having a hollow structure of quadrangular cross section, as shown in fig. 5. When the movable end plate 2 is slightly moved vertically upwards by the external force, the inner wall of the annular hole 202 drives the outer annular hinge 9 to slightly move upwards synchronously (the part of the bottom of the outer annular hinge 9 connected with the inner annular side wall 101 is obliquely deformed), and the inner annular hinge 5 moves downwards relative to the inner wall of the annular hole 202 under the fixing action of the inner annular side wall 101 (the part of the top of the inner annular hinge 5 connected with the annular hole 202 is obliquely deformed).
The bottom end face of the fixed end plate 1 is embedded with a plurality of (3 in this embodiment) groups of piezoelectric driver units 4 uniformly distributed around the axis of the through hole according to the shell shape structure setting of the phase shifter, and the outer side of the inner circular side wall 101 of the fixed end plate 1 is fixedly embedded with a capacitance sensor probe 7 which is positioned below the outer circular hinge 9 and positioned at the inner side of the piezoelectric driver units 4, as shown in fig. 5.
Specifically, as shown in fig. 10 to 12, the piezoelectric driver unit 4 includes a piezoelectric stack positioning sleeve 41 fixedly embedded in the bottom end face of the movable end plate 2, a piezoelectric stack 42 movably sleeved in the top of the piezoelectric stack positioning sleeve 41, a piezoelectric stack top column 43 movably sleeved in the piezoelectric stack positioning sleeve 41 and propped against the bottom end of the piezoelectric stack 42, and an expansion sleeve 44 movably sleeved outside the bottom end of the piezoelectric stack top column 43, wherein the expansion sleeve 44 is embedded in the bottom end face of the fixed end plate 1, and after the expansion bolts 45 are screwed, the outer circumference of the expansion sleeve 44 expands and deforms to be fixed in the fixed end plate 1 (as shown in fig. 4). The mounting hole 411 matched with the piezoelectric pile 42 is formed at one end of the piezoelectric pile positioning sleeve 41 matched with the movable end plate 2, the piezoelectric pile 42 is positioned in the mounting hole 411, the sleeving hole 412 matched with the piezoelectric pile jack-up column 43 is formed at the other end of the piezoelectric pile positioning sleeve 41, and the piezoelectric pile jack-up column 43 is positioned in the sleeving hole 412, so that the axes of the piezoelectric pile jack-up column 43 and the piezoelectric pile 42 after being assembled in the piezoelectric pile positioning sleeve 41 are coincident or parallel, the rapid automatic alignment of the piezoelectric pile jack-up column 43 and the piezoelectric pile 42 in the piezoelectric pile positioning sleeve 41 can be realized, and the fact that the acting force of the piezoelectric pile jack-up column 43 on the piezoelectric pile 42 is perpendicular to the end face of the piezoelectric pile 42 and the contact acting force is uniformly distributed when the piezoelectric pile jack-up column 43 is pressed and pre-tightly pressed subsequently can be ensured; the piezoelectric pile 42 is applied with a certain axial force through the piezoelectric pile top column 43, and the shaft end of the piezoelectric pile top column 43 is fixed through the shrinkage deformation of the inner circumference of the expansion sleeve 44, so that the positioning and pre-tightening fixation of the piezoelectric pile 42 can be realized, the pre-tightening force is controllable, the universality is good, and the overall production cost of the phase shifter is reduced; by providing a pre-tightening force to the piezoelectric stack 42, the piezoelectric stack 42 can only bear forward pressure and cannot be damaged by forces or moments in other directions during use.
The bottom end face of the movable end plate 2 is provided with embedded slots 203 (as shown in fig. 9) matched with the end parts of the piezoelectric stack positioning sleeves 41, the bottom end face of the fixed end plate 1 is provided with expansion sleeve mounting holes 103 (as shown in fig. 6 and 7) matched with the expansion sleeves 44, the number of the embedded slots 203 and the expansion sleeve mounting holes 103 is 3, and the embedded slots and the expansion sleeve mounting holes 103 are uniformly distributed around the axis circumference of the through hole in pairs. Preferably, the outer circumferential surface of the end of the mounting hole 411 of the piezoelectric stack positioning sleeve 41 is integrally provided with the uniformly distributed toothed guard rings 413, so that after the toothed guard rings 413 are assembled with the embedded slot 203, the outer side of the end of the piezoelectric stack positioning sleeve 41 has certain flexible shrinkage performance, and the piezoelectric stack positioning sleeve 41 is prevented from being rigidly connected with the embedded slot 203 in the radial direction, thereby protecting the piezoelectric stack 42 positioned in the piezoelectric stack positioning sleeve; meanwhile, through the matching of the toothed sheet protection ring 413 and the embedded groove hole 203, the assembly of the piezoelectric pile positioning sleeve 41 in the movable end plate 2 is facilitated, the rotation resistance after the assembly can be improved, and the relative movement between the piezoelectric pile positioning sleeve 41 and the movable end plate 2 is avoided. It is further preferable that the piezoelectric stack positioning sleeve 41 is provided with a wire groove 414 on an outer circumferential surface of the end where the socket hole 412 is located for restraining the wire of the piezoelectric stack 42.
As shown in fig. 17, the capacitive sensor unit includes a capacitive sensor probe 7, a target board, and a signal conditioning circuit, where a cable core layer of the capacitive sensor probe 7 is connected to an input end of the signal conditioning circuit, an output end of the signal conditioning circuit is connected to an cable inner shielding layer of the capacitive sensor probe 7 through an interface circuit, and the signal conditioning circuit uses a full drive cable technology to make the cable core layer and the cable inner shielding layer of the capacitive sensor probe 7 have the same potential through a 1:1 operational amplifier, and capacitive current between them is eliminated, and after the cable outer shielding layer is grounded, capacitance between the inner shielding layer and the outer shielding layer is shielded, so that only sensor capacitance exists between the cable core layer and the ground of the probe. The full driving scheme can effectively eliminate the influence of the parallel capacitance on measurement and improve the measurement accuracy of the capacitance sensor.
As shown in fig. 18 and 19, the capacitance sensor probe 7 includes a first pole piece mounting seat 71 and a second pole piece mounting seat 72 which are arranged in parallel and opposite to each other up and down, the first pole piece mounting seat 71 and the second pole piece mounting seat 72 are made of aluminum alloy materials, a target pole plate 73 is fixedly embedded in the bottom surface of the first pole piece mounting seat 71, a fixed pole plate 74 is fixedly embedded in the top surface of the second pole piece mounting seat 72, and the target pole plate 73 is matched with the fixed pole plate 74 to perform capacitance measurement. A plurality of (e.g. 3) contacts 75 are uniformly arranged on the top surface of the first pole piece mounting seat 71 and the bottom surface of the second pole piece mounting seat 72, and the surfaces of the electric shock 75 on the same mounting seat are positioned in the same plane.
As shown in fig. 5 and 20, the outer side of the inner circular side wall 101 of the fixed end plate 1 is provided with a probe embedding groove 104 located below the outer circular hinge 9, the capacitance sensor probe 7 is embedded in the groove and is close to the piezoelectric stack 42, the first pole piece mounting seat 71 located above is fixedly connected to the top wall of the probe embedding groove 104 through bolts, 3 contacts 75 on the first pole piece mounting seat are tightly attached to the top wall of the probe embedding groove 104, the second pole piece mounting seat 72 located below is fixedly connected to the bottom wall of the probe embedding groove 104 through bolts, 3 contacts 75 on the second pole piece mounting seat are tightly attached to the bottom wall of the probe embedding groove 104, and the gap between the two target pole plates 73 and the fixed pole plates 74 is measured in real time by utilizing negative feedback, so that the displacement of the circular hinge can be accurately obtained.
Because the fixed polar plate 74 and the target polar plate 73 are connected through the mounting seat and the probe embedding groove 104 to enable the electric potential to be the same, the ground potential between the target polar plate 73 and the outside can be isolated, the leakage of charges is prevented, the electric field is uniform, and the edge effect is eliminated. The mounting seat can be used for shielding external noise interference. The target plate is made of a conductive metal sheet, and a metal layer can be plated on a glass substrate or a ceramic substrate with low expansion coefficient and high strength for better flatness.
The bottom end surface of the fixed end plate 1 is internally and fixedly embedded with a lead wire switching PCB 8, and the piezoelectric driver unit 4 and the capacitance sensor unit 7 are electrically connected with an external cable through the lead wire switching PCB 8. As shown in fig. 21, the lead switching PCB 8 is an annular plate structure, and a lead board caulking groove 105 (as shown in fig. 7) matching with the shape of the lead switching PCB 8 is formed on the bottom surface of the fixed end plate 1, so that the lead switching PCB 8 can be completely embedded in the lead board caulking groove 105 and placed on the inner side of the rear cover plate 3. The edge of the lead switching PCB 8 is fixedly provided with a plurality of connecting flanges, the inner side and the outer side of the lead plate caulking groove 105 are respectively provided with screw holes corresponding to the connecting flanges, and the lead switching PCB 8 is fixed in the lead plate caulking groove 105 through the cooperation of the connecting flanges and screws positioned in the screw holes.
As shown in fig. 6 and 7, a cable through hole 106 is formed in the side wall of the fixed end plate 1, and a wire-binding groove 107 is formed between the cable through hole 106 and the wire-guiding plate groove 105. The wire hooping device 11 is fixedly embedded in the wire hooping device embedding groove 107 through a screw and is used for fixing a cable; a cable protective sleeve 10 is disposed within the cable perforation 106 for cable protection and assisted positioning.
As shown in fig. 22, three capacitance position sensor probes 7 are integrated in the hinge of the phase shifter, and sensor voltage is collected by an AD chip to a singlechip system and can be converted into real-time output displacement of the phase shifter through calculation; the target displacement can be given by an upper computer and updated to a singlechip system through serial communication; the target displacement and the three paths of measured displacement are calculated by a digital PID algorithm in the singlechip to obtain the control voltage of each path of piezoelectric stack, the three paths of DA chips are used for outputting analog voltage and amplifying and outputting the analog voltage through the power amplification board to drive the piezoelectric stack 42, and the stroke closed-loop control of the hinge output plane of the phase shifter is realized.
The process of implementing the phase shift function of the phase shifter by the piezoelectric stack 42 is: after the piezoelectric pile 42 is excited by the power supply, the piezoelectric pile 42 generates displacement and pushes the movable end plate 2 to move, so that the inner annular hinge 5 deforms under the action of tensile force, the outer annular hinge 9 also synchronously deforms, and the hinge structure is kept to have a parallelogram cross section with a parallelogram hollow shape; the capacitance sensor unit detects the displacement of the outer annular hinge 9 in real time, compares the displacement with a preset displacement through the closed-loop control circuit, and compensates the error between the displacement and the preset displacement in real time until the movable end plate 2 moves to a preset phase-shifting position.
The assembly pre-tightening process adopted in the pre-tightening operation process of the piezoelectric driving unit on the phase shifter main body requires the use of a special pre-tightening tool. As shown in fig. 13, in the present invention, the pre-tightening tool used in the assembly pre-tightening process includes a fixed chassis 12, three side-inserted base plates 13, a positioning pressing plate 14 and a triangular force application plate 17. The disc structure of the fixed chassis 12 is provided with a cylindrical boss at the center of the top surface. As shown in fig. 14, the side-inserted pad 13 is a fan-shaped disc structure, the top surface of the circular arc edge of the side-inserted pad is provided with a step surface, the inner diameter of the step surface is matched with the inner diameter of the inner annular hinge 5, the outer diameter of the step surface is slightly smaller than the inner diameter of the annular gap at the top of the inner annular hinge 5, and the thickness of the step surface is matched with the height of the annular gap, so that the side-inserted pad 13 can horizontally and outwards move from the center position of the movable end plate 2 along the radius direction to enable the step surface to be inserted into the annular gap, thereby supporting the bottom of the inner annular hinge 5 (the movable end plate 2 is in the assembled state of being lower than the fixed end plate 1), and avoiding that the inner annular hinge 5 and the outer annular hinge 9 cannot be deformed under force to provide pretightening force in the pretightening process of the piezoelectric driving unit; meanwhile, the inner side surface of the step surface is in sliding abutment with the inner wall of the inner annular hinge 5, so that the radial positioning of the side insert pad 13 in the assembled state is realized. In order to realize the horizontal movement in the process of inserting and separating the three side insert backing plates 13 from the gaps of the annular grooves, a sufficient movement gap is reserved between the side surfaces of the three side insert backing plates 12.
The three side-inserted base plates 13 are uniformly distributed on the top surface of the fixed base plate 12 around the central axis of the fixed base plate 12 and are detachably connected to the fixed base plate 12 through first bolts 15, the positioning pressing plate 14 is positioned above the center of the top surface of the fixed base plate 12, and the edge parts of the bottom surface of the positioning pressing plate 14 are erected on the top surface of the side-inserted base plates 13 and are respectively in threaded connection with the three side-inserted base plates 13 through second bolts 16. Specifically, the positioning pressing plate 14 has a disc structure, and the diameter of the positioning pressing plate is larger than the diameter of the inner wall formed by surrounding the three side-inserted backing plates 13, so that the positioning pressing plate 14 can be lapped on the inner side part of the top surface of the side-inserted backing plates 13; three first bolt holes uniformly distributed around the axis are formed in the top surface of the side insert backing plate 13, first threaded connection holes corresponding to the first bolt holes are formed in the inner side of the top surface of the side insert backing plate, the first bolt holes and the first threaded connection holes are coaxially arranged through the second bolts 16, and circumferential relative positioning of the side insert backing plate 13 on the fixed bottom plate 12 can be achieved. A plurality of second bolt holes are formed in the top surface of the side-inserted base plate 13, second threaded connection holes matched with the second bolt holes are formed in the top surface of a cylindrical boss of the fixed chassis 12, the positioning pressing plate 14 and the three side-inserted base plates 13 are integrally rotated to enable each second bolt hole to be aligned with each second threaded connection hole respectively, the side-inserted base plate 13 is fastened on the fixed chassis 12 through the first bolts 15, and therefore the movable end plate 2 is suspended through the side-inserted base plates 13, the whole phase shifter is in a floating state, and assembly and pre-tightening operation of a piezoelectric driving unit are facilitated to follow-up.
The bottom triangle of the triangle force application plate 17 is fixedly connected with a pressing rod 18 respectively, and the top center of the triangle force application plate 17 is fixedly connected with the power output end of the press. The triangular force application plate 17 is a circular plate or a regular triangular plate, and three force application rods 18 are uniformly distributed on the bottom surface of the triangular force application plate 7 around the axial line of the triangular force application plate 17 in the circumferential direction, namely, the central axes of the three force application rods 18 are respectively positioned at three corner points of the regular triangle, so that when the press machine applies pressure vertically downwards to the triangular force application plate 17, the three force application rods 18 can uniformly downwards transfer force. Preferably, the pressing rod 18 is screw-coupled to the bottom surface of the triangular force application plate 17 so as to facilitate installation, replacement, and axial position adjustment of the pressing rod 18; the diameter of the inscribed circle surrounded by the axes of the three pressing rods 18 is the same as the diameter of the inscribed circle surrounded by the axes of the three piezoelectric stack pillars 43.
An assembly pre-tightening process of a piezoelectric driving unit, the assembly pre-tightening process comprising the steps of:
S1, the assembled phase shifter main body assembly is placed on the fixed chassis 12 in a position in which the movable end plate 2 is in the lower and the fixed end plate 1 is in the upper, as shown in fig. 15. At this time, the bottom surface of the movable end plate 2 is lapped on the outer edge of the top surface of the fixed chassis 2, and the inner annular hinge 5 is coaxially sleeved outside the cylindrical boss of the fixed chassis 2.
S2, placing the piezoelectric stack 42 into the piezoelectric stack positioning sleeve 41, then plugging the piezoelectric stack jacking column 43 into the piezoelectric stack positioning sleeve 41, sleeving the loose-state expansion sleeve 44 on the outer side of the shaft end of the piezoelectric stack jacking column 43, and completing the primary assembly of the piezoelectric driving unit; then, the three piezoelectric driver units which are assembled preliminarily are respectively arranged in the flat-placed phase shifter main body assembly, the inner side end (the toothed sheet-shaped protection ring 413) of the piezoelectric stack positioning sleeve 41 is fixedly embedded into the movable end plate 2 (the embedded slot 203), the compaction expansion sleeve 44 is fully embedded into the fixed end plate 1 (the expansion sleeve mounting hole 103), and the preliminary mounting and positioning of the three groups of piezoelectric driver units in the phase shifter main body assembly are completed; it is obvious that the preliminary mounting positioning of the piezoelectric driver unit in the phase shifter body assembly may also be done before the phase shifter body assembly is placed in the stationary chassis 12.
S3, the outer edges (step surfaces) of the three side insert base plates 13 (which are completely placed in the top surface of the cylindrical boss in the initial state in a free moving state) are respectively inserted into the bottom parts (annular gaps) of the side walls of the movable end plate 2 horizontally and outwards, the positioning pressing plates 14 are placed on the three side insert base plates 13, the positioning pressing plates 14 are respectively connected with the three side insert base plates 13 through the second bolts 16, the radial positioning of the three side insert base plates 13 on the fixed chassis 12 is completed, then the side insert base plates 13 are fastened on the fixed chassis 12 through the first bolts 15, and the fixing of the three side insert base plates 13 on the fixed chassis 12 is completed, so that the movable end plate 2 is suspended and hung by the three side insert base plates 13. At this time, the bottom surface of the inner annular hinge 5 is erected on the top surface of the stepped surface, the inner wall of the inner annular hinge 5 is attached to the inner arc-shaped side wall of the stepped surface, and the stepped surface plays a role in positioning and supporting the inner annular hinge 5.
S4, fixedly connecting the triangular force application plate 17 on the power output end of the press in a horizontal state, adjusting the horizontal position of the triangular force application plate 17, enabling the three pressing rods 18 at the bottom of the triangular force application plate 17 to be vertically positioned right above the three piezoelectric stack jacking columns 43 respectively, and then keeping the position of the triangular force application plate 17 fixed so as to ensure that the pressing rods 18 can vertically transmit pressure to the piezoelectric stack jacking columns 43 and enable the top surfaces of the piezoelectric stack jacking columns 43 to be stressed uniformly. Obviously, the mounting and fixing of the triangle force application plate 17 on the press may also be done before the phase shifter body assembly is placed on the fixed chassis 12.
S5, starting the press to work, driving the triangular force application plate 17 and the three pressing rods 18 on the triangular force application plate to vertically downwards, and continuously pressing the corresponding piezoelectric pile jacking columns 43 by the three pressing rods 18 until the output pressure indication of the press is stabilized within a preset pretightening force (such as 1000N, the specific pretightening force value is set according to parameters such as the actual cross section area of the piezoelectric pile and the output force). In order to avoid damage to the piezo-stack pillars 43 due to rigid contact between the piezo-stack pillars 43 and the piezo-stack pillars 18, it is preferable to place a silicone block 19 on top of the piezo-stack pillars 43 before starting the press operation, and to buffer and transfer the impact force of the piezo-stack pillars 18 by the silicone block 19.
S6, cyclically screwing up the expansion bolts 45 on each expansion sleeve 44 to enable the expansion sleeves 44 to generate internal contraction and external expansion deformation, fixing the top ends of the piezoelectric stack jacking columns 43 in the fixed end plate 1 (the expansion sleeve mounting holes 103), and abutting the other ends against the end faces of the piezoelectric stacks 42 to complete pre-tightening of the piezoelectric stacks 42. Preferably, during the cyclic tightening of the bolt, the expansion sleeve 44 cannot be rotated, so as to avoid a large error in the final pretension value caused by a change in the fitting position of the expansion sleeve 44 in the expansion sleeve mounting hole 103.
S7, starting a power output end of the press to work reversely, driving the triangular force application plate 17 and three pressing rods 18 on the triangular force application plate to move upwards, removing the second bolts 16 and the positioning pressing plates 14 from the side insert backing plates 13, unscrewing and withdrawing the first bolts 15 on each side insert backing plate 13, horizontally and inwards removing each side insert backing plate 13 from the side wall of the movable end plate 2, taking out the silica gel block 19, and fixedly mounting the rear cover plate 3 on the fixed end plate 1 to complete the assembly of the phase shifter main body.
After the assembly is completed, the phase shifter main body is removed from the pre-tightening tool and is transferred to a detection position, and the output capacity of the phase shifter is detected by using a laser displacement sensor. The output capability requirement of the phase shifter of the invention is: using step wave driving, the maximum output capability of the phase shifter is above 10um, the sensor initial voltage is below 4V and the noise value is below 25 uV.
The foregoing description is only illustrative of the present invention and is not intended to limit the scope of the invention, and all equivalent structures or equivalent processes or direct or indirect application in other related technical fields are included in the scope of the present invention.
Claims (7)
1. The utility model provides an integrated high accuracy electric capacity displacement sensor's piezoelectrically driven mechanical phase shifter, includes fixed end plate (1), connects movable end plate (2) on fixed end plate (1) top terminal surface, fixed connection back shroud (3) on fixed end plate (1) bottom terminal surface, coaxial and equidiameter's through-hole has all been seted up in the center department of fixed end plate (1), movable end plate (2) and back shroud (3), its characterized in that: an inner annular hinge (5) capable of flexibly deforming is integrally arranged on the inner wall of an annular hole (202) of the movable end plate (2), an outer annular hinge (9) capable of flexibly deforming is integrally arranged on the outer wall of an inner annular side wall (101) of the fixed end plate (1), and the top surface of the outer annular hinge (9) is fixedly connected with the bottom surface of the inner annular hinge (5);
The piezoelectric transducer comprises a fixed end plate (1), wherein a plurality of groups of piezoelectric driver units (4) and capacitance displacement sensor units which are uniformly distributed around the axis of a through hole are embedded in the bottom end surface of the fixed end plate (1), the capacitance displacement sensor units comprise capacitance sensor probes (7) which are fixedly embedded between an inner circular side wall (101) and the piezoelectric driver units (4) and are positioned below an outer circular hinge (9), lead switching PCB (8) is fixedly embedded in the bottom end surface of the fixed end plate (1), and the piezoelectric driver units (4) and the capacitance sensor probes (7) are electrically connected with an external cable through the lead switching PCB (8);
The piezoelectric driver unit (4) comprises a piezoelectric pile positioning sleeve (41) fixedly embedded in the end face of the bottom of the movable end plate (2), a piezoelectric pile (42) movably sleeved in the top of the piezoelectric pile positioning sleeve (41), a piezoelectric pile jacking column (43) movably sleeved in the piezoelectric pile positioning sleeve (41) and propped against the bottom end of the piezoelectric pile (42) and an expansion sleeve (44) movably sleeved outside the bottom end of the piezoelectric pile jacking column (43), wherein the expansion sleeve (44) is embedded in the end face of the bottom of the fixed end plate (1), and after the expansion bolt (45) is screwed, the outer circumference of the expansion sleeve (44) expands and deforms to be fixed in the fixed end plate (1);
After the piezoelectric pile (42) is excited by a power supply, the piezoelectric pile (42) generates displacement and pushes the movable end plate (2) to move, so that the outer annular hinge (9) and the inner annular hinge (5) deform simultaneously, the capacitance displacement sensor unit detects the displacement of the outer annular hinge (9) in real time, compares the displacement with a preset displacement through a closed-loop control circuit, and compensates the error between the displacement and the displacement in real time until the movable end plate (2) moves to a preset phase-shifting position.
2. A piezoelectric driven mechanical phase shifter integrated with a high precision capacitive displacement sensor as claimed in claim 1, wherein: one end of the piezoelectric pile positioning sleeve (41) matched with the movable end plate (2) is provided with a mounting hole (411) matched with the piezoelectric pile (42), the piezoelectric pile (42) is positioned in the mounting hole (411), the other end of the piezoelectric pile positioning sleeve (41) is provided with a sleeving hole (412) matched with the piezoelectric pile jacking column (43), and the piezoelectric pile jacking column (43) is positioned in the sleeving hole (412).
3. A piezoelectric driven mechanical phase shifter integrated with a high precision capacitive displacement sensor as claimed in claim 2, wherein: the piezoelectric pile positioning sleeve (41) is integrally provided with a toothed guard ring (413) which is uniformly distributed on the outer circular surface of the end where the mounting hole (411) is located, and the piezoelectric pile positioning sleeve (41) is provided with a wire guide groove (414) on the outer circular surface of the end where the sleeve joint hole (412) is located.
4. A piezoelectric driven mechanical phase shifter integrated with a high precision capacitive displacement sensor as claimed in claim 1, wherein: the bottom end face of the movable end plate (2) is provided with an embedded slot (203) matched with the end part of the piezoelectric pile positioning sleeve (41), and the bottom end face of the fixed end plate (1) is provided with an expanding sleeve mounting hole (103) matched with the expanding sleeve (44).
5. A piezoelectric driven mechanical phase shifter integrated with a high precision capacitive displacement sensor as claimed in claim 1, wherein: the capacitive displacement sensor unit further comprises a probe and a signal conditioning circuit, wherein the cable core layer of the capacitive sensor probe is connected with the input end of the signal conditioning circuit, the output end of the signal conditioning circuit is connected with the cable inner shielding layer of the capacitive sensor probe through an interface circuit, and the signal conditioning circuit enables the cable core layer and the cable inner shielding layer of the capacitive sensor probe to have the same potential through a 1:1 operational amplifier.
6. A piezoelectric driven mechanical phase shifter integrated with a high precision capacitive displacement sensor as claimed in claim 5 wherein: the capacitive sensor probe (7) comprises a first pole piece mounting seat (71) and a second pole piece mounting seat (72) which are arranged in parallel relatively up and down, a target pole plate (73) is fixedly embedded in the bottom surface of the first pole piece mounting seat (71), a fixed pole plate (74) is fixedly embedded in the top surface of the second pole piece mounting seat (72), and the target pole plate (73) is matched with the fixed pole plate (74) to perform displacement measurement.
7. A piezoelectric driven mechanical phase shifter integrated with a high precision capacitive displacement sensor as claimed in claim 6 wherein: the outside of the interior circular side wall (101) of the fixed end plate (1) is provided with a probe embedding groove (104) positioned below the outer circular hinge (9), the capacitance sensor probe (7) is embedded in the probe embedding groove (104), and a first pole piece mounting seat (71) positioned above is fixedly connected to the top wall of the probe embedding groove (104) through a bolt, and a second pole piece mounting seat (72) positioned below is fixedly connected to the bottom wall of the probe embedding groove (104) through a bolt.
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Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10299702A (en) * | 1997-04-21 | 1998-11-10 | Mitsutoyo Corp | Minute displacement generation mechanism |
| US6538747B1 (en) * | 2000-06-28 | 2003-03-25 | Diffraction International, Ltd. | Flexure hinge phase shift adapter for fizeau interferometer |
| WO2006035447A2 (en) * | 2004-09-29 | 2006-04-06 | Nanomotion Ltd. | Platform transport systems |
| JP2012242210A (en) * | 2011-05-18 | 2012-12-10 | Saga Univ | Composite sensor |
| WO2017006848A1 (en) * | 2015-07-03 | 2017-01-12 | 並木精密宝石株式会社 | Optical measurement device, correction method for optical measurement device, and optical measurement method |
| CN217005684U (en) * | 2021-12-30 | 2022-07-19 | 南京泽尼克激光技术有限公司 | High-precision phase-shifting device of laser interferometer |
| CN117419659A (en) * | 2023-10-19 | 2024-01-19 | 北京理工大学 | High-precision mechanical phase shifting method for air-bearing heavy-load reference mirror |
-
2024
- 2024-02-05 CN CN202410162812.XA patent/CN117722943B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10299702A (en) * | 1997-04-21 | 1998-11-10 | Mitsutoyo Corp | Minute displacement generation mechanism |
| US6538747B1 (en) * | 2000-06-28 | 2003-03-25 | Diffraction International, Ltd. | Flexure hinge phase shift adapter for fizeau interferometer |
| WO2006035447A2 (en) * | 2004-09-29 | 2006-04-06 | Nanomotion Ltd. | Platform transport systems |
| JP2012242210A (en) * | 2011-05-18 | 2012-12-10 | Saga Univ | Composite sensor |
| WO2017006848A1 (en) * | 2015-07-03 | 2017-01-12 | 並木精密宝石株式会社 | Optical measurement device, correction method for optical measurement device, and optical measurement method |
| CN217005684U (en) * | 2021-12-30 | 2022-07-19 | 南京泽尼克激光技术有限公司 | High-precision phase-shifting device of laser interferometer |
| CN117419659A (en) * | 2023-10-19 | 2024-01-19 | 北京理工大学 | High-precision mechanical phase shifting method for air-bearing heavy-load reference mirror |
Non-Patent Citations (1)
| Title |
|---|
| 自适应压电式移相器的研究;陈道炯;单世宝;韦光辉;高春雨;;光学学报;20060817(07);全文 * |
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