JP2012240211A - Ink-jet recording head and method of manufacturing the same - Google Patents

Ink-jet recording head and method of manufacturing the same Download PDF

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JP2012240211A
JP2012240211A JP2011108975A JP2011108975A JP2012240211A JP 2012240211 A JP2012240211 A JP 2012240211A JP 2011108975 A JP2011108975 A JP 2011108975A JP 2011108975 A JP2011108975 A JP 2011108975A JP 2012240211 A JP2012240211 A JP 2012240211A
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recording
element substrate
support member
adhesive
recording element
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Tatsunori Fujii
辰徳 藤井
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Canon Inc
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Canon Inc
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Abstract

PROBLEM TO BE SOLVED: To provide an ink-jet recording head in which a part between a supporting member and a recording element substrate is sealed without a space by adhesives while maintaining high productivity, and to provide a method of manufacturing the same.SOLUTION: The ink-jet recording head has: a recording element substrate including a discharge-port array to discharge recording liquid; a supporting member to support the recording element substrate; and the adhesives to bond the recording element substrate and the supporting member to each other. The supporting member has a plurality of recording-liquid supply ports to supply the recording liquid to the discharge-port array. Protrusions are provided on a surface, in contact with the adhesives bonding the recording element substrate, of the supporting member and at longitudinal ends of the recording-liquid supply ports, located at both ends, in the plurality of recording-liquid supply ports.

Description

本発明は、インクジェット記録ヘッドおよびその製造方法に関する。   The present invention relates to an ink jet recording head and a manufacturing method thereof.

図1にインクジェット記録ヘッドの分解斜視図を示す。インクジェット記録ヘッドは、記録液を吐出するための吐出口が形成された記録素子基板101と、記録素子基板101を保持固定し、記録液を記録素子基板101に供給するための記録液流路106を有する支持部材109を備えている。   FIG. 1 is an exploded perspective view of the ink jet recording head. The ink jet recording head includes a recording element substrate 101 on which an ejection port for discharging a recording liquid is formed, and a recording liquid channel 106 for holding and fixing the recording element substrate 101 and supplying the recording liquid to the recording element substrate 101. The supporting member 109 having the above is provided.

記録素子基板101の裏面と支持部材109の接合面115とを接合する際、記録素子基板101の裏面と支持部材109の接合面115とのシール性が不十分であれば、記録素子基板101と支持部材109との間から記録液の漏れが生ずる場合がある。この問題に対処するためには、接着剤104を途切れることなく接合面115に安定塗布し、接着剤104で記録素子基板101と支持部材の接合面115との間のシールを行う必要がある。   When the back surface of the recording element substrate 101 and the bonding surface 115 of the support member 109 are bonded, if the sealing property between the back surface of the recording element substrate 101 and the bonding surface 115 of the support member 109 is insufficient, the recording element substrate 101 and There may be a case where the recording liquid leaks from the support member 109. In order to cope with this problem, it is necessary to stably apply the adhesive 104 to the joint surface 115 without interruption, and to seal the recording element substrate 101 and the joint surface 115 of the support member with the adhesive 104.

特許文献1に記載の構成では、図示しないが、記録素子基板の裏面と支持部材の接合面とが接合する際に、記録素子基板の記録液供給口を囲む領域と当接する、支持部材の接合面にV形溝が設けられている。そしてその溝で接着剤を保持し、接着剤のとぎれを防ぐことで記録素子基板と支持部材の接合面との間のシール性を向上させている。
ところで、近年、コスト、加工性等の点から支持部材109にはモールド成形品が用いられている。モールド成形品の支持部材109は、接合面115の平面度があまりよくない。そのため、以下の方法で記録素子基板の固定が行われる。
In the configuration described in Patent Document 1, although not shown, when the back surface of the recording element substrate and the bonding surface of the support member are bonded, the support member is bonded to a region surrounding the recording liquid supply port of the recording element substrate. A V-shaped groove is provided on the surface. The adhesive is held in the groove to prevent the adhesive from being disconnected, thereby improving the sealing performance between the recording element substrate and the joint surface of the support member.
Incidentally, in recent years, a molded product is used for the support member 109 from the viewpoint of cost, workability, and the like. The support member 109 of the molded product has a poor flatness of the bonding surface 115. Therefore, the recording element substrate is fixed by the following method.

まず、支持部材109の接合面115へ、ディスペンサー(不図示)による描画塗布方法によって接着剤104の塗布が行われる。そして、位置および姿勢精度を確保された記録素子基板101を、接合面115から所定の高さだけ上方、例えば80μm程度上方で接着剤104と当接させる。そして、この状態を保持しつつ接着剤104を硬化させる。その後、記録素子基板101周辺と、記録素子基板101の電気接続部を封止剤で封止し、熱硬化させることにより記録素子基板101の固定を行う。   First, the adhesive 104 is applied to the joint surface 115 of the support member 109 by a drawing application method using a dispenser (not shown). Then, the recording element substrate 101 whose position and posture accuracy are ensured is brought into contact with the adhesive 104 above the bonding surface 115 by a predetermined height, for example, about 80 μm. Then, the adhesive 104 is cured while maintaining this state. Thereafter, the recording element substrate 101 is fixed by sealing the periphery of the recording element substrate 101 and the electrical connection portion of the recording element substrate 101 with a sealant and thermosetting.

上記の方法により、支持部材109の接合面115の平面度の影響を受けずに記録素子基板101を接着固定することができる。   By the above method, the recording element substrate 101 can be bonded and fixed without being affected by the flatness of the bonding surface 115 of the support member 109.

特開2006−212902号公報JP 2006-212902 A

この方法は、記録素子基板101が接着剤104に浮かんでいる状態で固定する。そのため、塗布した接着剤104の全域において、接着剤104の上端の高さが均一ではなく、80μmの高さがない部分があると、接着剤104が記録素子基板101に当接できず、シール不良が生じる可能性がある。そのため、接着剤104を塗布する際には、接着剤104のとぎれを防ぐだけでなく、高さを安定させる必要がある。   In this method, the recording element substrate 101 is fixed in a state of floating on the adhesive 104. Therefore, if the height of the upper end of the adhesive 104 is not uniform over the entire area of the applied adhesive 104 and there is no portion having a height of 80 μm, the adhesive 104 cannot contact the recording element substrate 101 and seal Defects can occur. Therefore, when applying the adhesive 104, it is necessary not only to prevent breakage of the adhesive 104 but also to stabilize the height.

図2は、支持部材109の接合面115に接着剤104を塗布したときの接着剤104の様子を示した概略図である。   FIG. 2 is a schematic view showing the state of the adhesive 104 when the adhesive 104 is applied to the joint surface 115 of the support member 109.

図1(a)は、接着剤104が塗布されたときの支持部材109の接合面115の様子を示している。接着剤104は、支持部材109の記録液流路106の周囲と記録素子基板101の記録液供給口105の周囲との間をシールするため、隔壁108上にも塗布されている。図2(a)のa部の拡大図を図2(b)、(c)に示す。塗布した接着剤104の軌跡には円弧状の角部117が形成される。この角部117付近において、表面張力γの方向が集中する領域bが発生する。表面張力γが集中する領域bでは接着剤104の上端の高さが高くなる。逆に、図2(c)に示すようにその周囲の領域cでは領域bへの接着剤104の流れαが発生し、接着剤104の上端の高さが低くなる。これによって、接着剤104の上端の高さが不均一となり、接着剤高さが低い部分では、接着剤104と記録素子基板101の裏面とが当接しない可能性が生じる。そのため、記録素子基板101と支持部材109との間のシールが不十分となり、記録液の漏れが発生する確率が高くなる。   FIG. 1A shows a state of the joint surface 115 of the support member 109 when the adhesive 104 is applied. The adhesive 104 is also applied onto the partition wall 108 to seal between the periphery of the recording liquid channel 106 of the support member 109 and the periphery of the recording liquid supply port 105 of the recording element substrate 101. Enlarged views of part a in FIG. 2 (a) are shown in FIGS. 2 (b) and 2 (c). Arc-shaped corners 117 are formed on the locus of the applied adhesive 104. In the vicinity of the corner 117, a region b where the direction of the surface tension γ is concentrated is generated. In the region b where the surface tension γ is concentrated, the height of the upper end of the adhesive 104 is increased. On the contrary, as shown in FIG. 2C, the flow α of the adhesive 104 to the region b occurs in the surrounding region c, and the height of the upper end of the adhesive 104 is lowered. As a result, the height of the upper end of the adhesive 104 becomes uneven, and there is a possibility that the adhesive 104 and the back surface of the recording element substrate 101 do not come into contact with each other at a portion where the adhesive height is low. For this reason, the seal between the recording element substrate 101 and the support member 109 becomes insufficient, and the probability that the recording liquid leaks increases.

ところで、近年、コストダウンのために、記録素子基板101のシュリンクが進められている。それに合わせて、支持部材109に形成された記録液流路間も狭くする必要があるが、幅が狭くなると入り込んだ泡がトラップされてしまい、記録液の流れを阻害するため一定以上の狭幅化が出来ない。また隔壁108を薄くし、記録液流路106を広くすることで泡のトラップを防止することが考えられる。しかし、樹脂からなる隔壁108の形状を精度良く作るためには、成形性の観点から一定以上の幅が必要である。これらの点から、記録素子基板101のシュリンクが進むと、図2に示すように記録液供給口105のピッチ111より記録液流路106のピッチ112が大きくなり、記録素子基板101の外周部長手方向は記録液の漏れが発生する確率が高くなる。   Incidentally, in recent years, shrinking of the recording element substrate 101 has been promoted for cost reduction. Accordingly, it is necessary to narrow the gap between the recording liquid channels formed on the support member 109. However, if the width is narrowed, trapped bubbles are trapped, and the recording liquid flow is hindered. Cannot be converted. Further, it is conceivable to prevent the trapping of bubbles by making the partition wall 108 thinner and widening the recording liquid channel 106. However, in order to accurately form the shape of the partition wall 108 made of resin, a certain width or more is necessary from the viewpoint of moldability. From these points, when the shrinkage of the recording element substrate 101 proceeds, the pitch 112 of the recording liquid flow path 106 becomes larger than the pitch 111 of the recording liquid supply port 105 as shown in FIG. The direction increases the probability of recording liquid leakage.

以上より、特に記録素子基板101の外周部長手方向かつ、表面張力が集中する領域近傍では塗布時の接着剤の上端の高さに対するマージンが低下し、結果的に生産性を低下させる原因となっていた。   As described above, particularly in the longitudinal direction of the outer peripheral portion of the recording element substrate 101 and in the vicinity of the region where the surface tension is concentrated, the margin for the height of the upper end of the adhesive at the time of application decreases, resulting in a decrease in productivity. It was.

本発明の目的は、高い生産性を維持しつつ、支持部材と記録素子基板との間を隙間なく接着剤でシールした、インクジェット記録ヘッドおよびその製造方法を提供することである。   An object of the present invention is to provide an ink jet recording head in which high productivity is maintained and a support member and a recording element substrate are sealed with an adhesive without a gap, and a manufacturing method thereof.

上述のような課題を解決するための本発明のインクジェットプリンタは、記録液を吐出するための吐出口列を備えた記録素子基板と、前記記録素子基板を支持するための支持部材と、前記記録素子基板と前記支持部材を接合するための接着剤とを有し、前記支持部材は吐出口列に記録液を供給する複数の記録液供給口を有したインクジェット記録ヘッドにおいて、前記支持部材の、前記記録素子基板を接着する接着剤と接する面上であり、前記記録液供給口群の両端に位置する記録液供給口の長手端部に凸部を有する。   In order to solve the above-described problems, an ink jet printer according to the present invention includes a recording element substrate having an ejection port array for ejecting a recording liquid, a support member for supporting the recording element substrate, and the recording In an ink jet recording head having a plurality of recording liquid supply ports for supplying a recording liquid to an ejection port array, the support member includes an element substrate and an adhesive for bonding the support member. On the surface in contact with the adhesive for adhering the recording element substrate, there are convex portions at the longitudinal ends of the recording liquid supply ports located at both ends of the recording liquid supply port group.

本発明によると、支持部材の記録素子基板との接合面に接着剤を塗布する際に、接着剤の上端の高さが安定する。そのため、支持部材と記録素子基板との間を隙間なく接着剤でシールすることができる。   According to the present invention, when the adhesive is applied to the joint surface of the support member with the recording element substrate, the height of the upper end of the adhesive is stabilized. Therefore, the support member and the recording element substrate can be sealed with an adhesive without a gap.

従来例における模式図である。It is a schematic diagram in a prior art example. 従来例における平面模式図である。It is a plane schematic diagram in a conventional example. 従来例における断面模式図である。It is a cross-sectional schematic diagram in a conventional example. インクジェット記録ヘッドの製造過程の模式図である。It is a schematic diagram of the manufacturing process of an inkjet recording head. 記録素子基板の概略図である。1 is a schematic diagram of a recording element substrate. 本発明の実施例における模式図である。It is a schematic diagram in the Example of this invention. 本発明の製造方法の一例を示す模式図である。It is a schematic diagram which shows an example of the manufacturing method of this invention. 本発明の実施例における平面模式図である。It is a plane schematic diagram in the Example of this invention.

以下に、添付の図面に基づき、本発明の実施の形態を説明する。なお、同一の機能を有する構成には添付図面中、同一の番号を付与し、その説明を省略する場合もある。   Embodiments of the present invention will be described below with reference to the accompanying drawings. In addition, the same number is attached | subjected to the structure which has the same function in an accompanying drawing, and the description may be abbreviate | omitted.

図4はインクジェット記録ヘッドの分解斜視図である。インクジェット記録ヘッドは、記録液収納室内に、イエロー(Y)、マゼンタ(M)、シアン(C)の3色の記録液(不図示)が収容されている。さらに、記録液収納室内には、各記録液を保持するための吸収体(不図示)が収容されている。モールド成形により成形された支持部材9の底部の接合面15には、記録液吐出用の記録素子基板1が取り付けられている。なお、以下で説明する実施形態においては、支持部材9は形状的剛性を向上させるためにガラスフィラーを35%混入した樹脂材料で成形している。   FIG. 4 is an exploded perspective view of the ink jet recording head. In the inkjet recording head, recording liquids (not shown) of three colors of yellow (Y), magenta (M), and cyan (C) are stored in a recording liquid storage chamber. Further, an absorber (not shown) for holding each recording liquid is stored in the recording liquid storage chamber. A recording element substrate 1 for recording liquid discharge is attached to the joint surface 15 at the bottom of the support member 9 formed by molding. In the embodiment described below, the support member 9 is formed of a resin material mixed with 35% glass filler in order to improve the shape rigidity.

図5は、記録素子基板1の概略図であり、図5(a)は被記録媒体側(表面)を、(b)は支持部材9側(裏面)を示した図である。記録素子基板1には、記録液を吐出するための発熱素子(不図示)、流路(不図示)、吐出口3、および記録液供給口5が予め形成されている。記録素子基板1は、電気配線基板2と接合されている。また、図4に示すように、電気配線基板2には、記録素子基板1を組み込むためのデバイスホール20と、記録素子基板1の電極7に対応する電極端子21とが形成されている。さらに、記録装置本体からの駆動制御信号を受け取るための外部信号入力端子22を有し、この外部入力端子22と電極端子21とは銅箔の配線でつながっている。   5A and 5B are schematic views of the recording element substrate 1. FIG. 5A shows the recording medium side (front surface), and FIG. 5B shows the support member 9 side (back surface). A heat generating element (not shown), a flow path (not shown), a discharge port 3 and a recording liquid supply port 5 for discharging a recording liquid are formed in the recording element substrate 1 in advance. The recording element substrate 1 is bonded to the electric wiring substrate 2. As shown in FIG. 4, device holes 20 for incorporating the recording element substrate 1 and electrode terminals 21 corresponding to the electrodes 7 of the recording element substrate 1 are formed in the electrical wiring board 2. Furthermore, an external signal input terminal 22 for receiving a drive control signal from the recording apparatus main body is provided, and the external input terminal 22 and the electrode terminal 21 are connected by a copper foil wiring.

(実施形態)
本発明に係る実施形態について説明する。図6は、本発明に係る記録装置の一実施形態の概略構成図である。図6に示す支持部材9および接合面15は、モールド成形により形成されている。この支持部材9は、記録液を供給するための記録液供給路6を有し、各記録液が混色しないように、隔壁8が形成されている。
(Embodiment)
Embodiments according to the present invention will be described. FIG. 6 is a schematic configuration diagram of an embodiment of a recording apparatus according to the present invention. The support member 9 and the joining surface 15 shown in FIG. 6 are formed by molding. The support member 9 has a recording liquid supply path 6 for supplying the recording liquid, and a partition wall 8 is formed so that the recording liquids are not mixed.

この記録液供給路の中で外周部に位置する記録液供給路の長手端部に円柱形状の凸部16が形成されている。凸部16の形状は、成形材料特性、接着剤物性値等を考慮して決定される。   A cylindrical convex portion 16 is formed at the longitudinal end of the recording liquid supply path located at the outer peripheral portion in the recording liquid supply path. The shape of the convex portion 16 is determined in consideration of molding material characteristics, adhesive property values, and the like.

図7に、本発明の製造方法における実施例の模式図を示す。まず図7(a)に示されるように、ディスペンサー31による描画塗布方法にて矢印の方向に移動しながら接合面15上に接着剤4が塗布される。なお、この接着剤4の塗布に関しては、転写方法にて行うことも可能である。   In FIG. 7, the schematic diagram of the Example in the manufacturing method of this invention is shown. First, as shown in FIG. 7A, the adhesive 4 is applied onto the joint surface 15 while moving in the direction of the arrow by a drawing application method using the dispenser 31. Note that the adhesive 4 can be applied by a transfer method.

図8に接着剤4が塗布されたときの接合面15の様子を示す。図8(a)に示すように、接着剤4は、凸部16を含む接合面15上に塗布される。接着剤4は、ディスペンサー31の塗布ニードルにより、接合面15に塗布されるが、図8(b)に示すように凸部16により外周部分の接着剤4の流れがせき止められ、外周部分の接着剤4の上端の高さが均一となる。なお、この凸部16の形状は円柱形状に限らず、例えば角柱形状であれば、接着剤4の流れを凸部16側面に垂直に当てることが可能となり、より接着剤の流れを阻害することが出来る。   FIG. 8 shows a state of the bonding surface 15 when the adhesive 4 is applied. As shown in FIG. 8A, the adhesive 4 is applied on the joint surface 15 including the convex portions 16. The adhesive 4 is applied to the joint surface 15 by the application needle of the dispenser 31. However, as shown in FIG. 8B, the flow of the adhesive 4 at the outer peripheral portion is blocked by the convex portion 16, and the adhesive at the outer peripheral portion is bonded. The height of the upper end of the agent 4 becomes uniform. In addition, if the shape of this convex part 16 is not restricted to a cylindrical shape, for example, if it is a prismatic shape, it will become possible to apply the flow of the adhesive agent 4 perpendicularly to the convex part 16 side surface, and will inhibit the flow of an adhesive agent more. I can do it.

次に、図7(b)に示すように記録素子基板1を凸部16に当接するようにして、支持部材9に接着固定を行う。これによって、支持部材9と記録素子基板1との間を隙間なくシールすることができる。さらにこのとき、凸部16があることによって、記録素子基板1と支持部材9の間は必ず凸部16の高さ以上の距離を作ることが出来る。こうすることによって、記録素子基板1の接着時に接着剤4が必要以上に押し潰されず、横に接着剤4がはみ出ることによる記録液流路6への入り込みを防ぐことが可能となる。   Next, as shown in FIG. 7B, the recording element substrate 1 is brought into contact with the convex portion 16, and is fixed to the support member 9 by adhesion. As a result, the gap between the support member 9 and the recording element substrate 1 can be sealed without a gap. Further, at this time, the presence of the convex portion 16 makes it possible to always make a distance greater than the height of the convex portion 16 between the recording element substrate 1 and the support member 9. By doing so, it is possible to prevent the adhesive 4 from being crushed more than necessary when the recording element substrate 1 is bonded, and to prevent the adhesive 4 from protruding laterally from entering the recording liquid flow path 6.

1:記録素子基板
2:電気配線基板
3:吐出口
4:接着剤
5:記録液供給口
6:記録液流路
7:電極
8:隔壁
9:支持部材
10:蓋
15:接合面
16:凸部
20:デバイスホール
21:電極端子
22:外部入力端子
31:ディスペンサー
1: Recording element substrate 2: Electrical wiring substrate 3: Discharge port 4: Adhesive 5: Recording liquid supply port 6: Recording liquid flow path 7: Electrode 8: Partition wall 9: Support member 10: Lid 15: Bonding surface 16: Convex Part 20: Device hole 21: Electrode terminal 22: External input terminal 31: Dispenser

Claims (7)

記録液を吐出するための吐出口列を備えた記録素子基板と、前記記録素子基板を支持するための支持部材と、前記記録素子基板と前記支持部材を接合するための接着剤とを有し、前記支持部材は吐出口列に記録液を供給する複数の記録液供給口を有したインクジェット記録ヘッドにおいて、前記支持部材の、前記記録素子基板を接着する接着剤と接する面上であり、前記複数の記録液供給口の中で両端に位置する記録液供給口の長手端部に凸部を有することを特徴とするインクジェット記録ヘッド。 A recording element substrate having an ejection port array for discharging a recording liquid; a support member for supporting the recording element substrate; and an adhesive for joining the recording element substrate and the support member. In the inkjet recording head having a plurality of recording liquid supply ports for supplying the recording liquid to the ejection port array, the support member is on a surface of the support member that is in contact with an adhesive that bonds the recording element substrate, An ink jet recording head, comprising: a plurality of recording liquid supply ports having convex portions at longitudinal ends of the recording liquid supply ports located at both ends. 前記凸部の形状が円柱形状である、請求項1に記載のインクジェット記録ヘッド。 The inkjet recording head according to claim 1, wherein a shape of the convex portion is a cylindrical shape. 前記凸部の形状が角柱形状である、請求項1に記載のインクジェット記録ヘッド。 The inkjet recording head according to claim 1, wherein a shape of the convex portion is a prismatic shape. 記録液を吐出するための吐出口列を備えた記録素子基板と、前記記録素子基板を支持するための支持部材と、前記記録素子基板と前記支持部材を接合するための接着剤とを有し、前記支持部材は吐出口列に記録液を供給する複数の記録液供給口を有したインクジェット記録ヘッドの製造方法であり、前記支持部材の、前記複数の記録液供給口の中で両端に位置する記録液供給口の長手端部に凸部を形成し、前記凸部が形成された面に接着剤を塗布し、前記凸部を前記記録素子基板に当接させて、前記接着剤により前記支持部材を前記記録素子基板に接合することを特徴とする、インクジェット記録ヘッドの製造方法。 A recording element substrate having an ejection port array for discharging a recording liquid; a support member for supporting the recording element substrate; and an adhesive for joining the recording element substrate and the support member. The support member is a method of manufacturing an ink jet recording head having a plurality of recording liquid supply ports for supplying a recording liquid to an ejection port array, and the support member is positioned at both ends of the plurality of recording liquid supply ports. A convex portion is formed at the longitudinal end of the recording liquid supply port, an adhesive is applied to the surface on which the convex portion is formed, the convex portion is brought into contact with the recording element substrate, and the adhesive is used to A method of manufacturing an ink jet recording head, comprising bonding a support member to the recording element substrate. 前記接着剤は描画塗布方法によって、前記支持部材の、前記記録素子基板に接合される面上に塗布される、請求項4に記載のインクジェット記録ヘッドの製造方法。 5. The method of manufacturing an ink jet recording head according to claim 4, wherein the adhesive is applied onto a surface of the support member to be bonded to the recording element substrate by a drawing application method. 前記接着剤は転写方法によって、前記支持部材の、前記記録素子基板に接合される面上に塗布される、請求項4に記載のインクジェット記録ヘッドの製造方法。 5. The method of manufacturing an ink jet recording head according to claim 4, wherein the adhesive is applied onto a surface of the support member to be bonded to the recording element substrate by a transfer method. 前記支持部材をモールド成形で成形する、請求項4乃至請求項6のいずれか1項に記載のインクジェット記録ヘッドの製造方法。
The method for manufacturing an ink jet recording head according to claim 4, wherein the support member is formed by molding.
JP2011108975A 2011-05-16 2011-05-16 Ink-jet recording head and method of manufacturing the same Withdrawn JP2012240211A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014208426A (en) * 2013-03-27 2014-11-06 セイコーエプソン株式会社 Liquid jet head and liquid jet device
JP2017071163A (en) * 2015-10-08 2017-04-13 株式会社リコー Liquid discharge head, liquid discharge unit and liquid discharge device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014208426A (en) * 2013-03-27 2014-11-06 セイコーエプソン株式会社 Liquid jet head and liquid jet device
JP2017071163A (en) * 2015-10-08 2017-04-13 株式会社リコー Liquid discharge head, liquid discharge unit and liquid discharge device

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