JP2012227626A5 - - Google Patents
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- JP2012227626A5 JP2012227626A5 JP2011091543A JP2011091543A JP2012227626A5 JP 2012227626 A5 JP2012227626 A5 JP 2012227626A5 JP 2011091543 A JP2011091543 A JP 2011091543A JP 2011091543 A JP2011091543 A JP 2011091543A JP 2012227626 A5 JP2012227626 A5 JP 2012227626A5
- Authority
- JP
- Japan
- Prior art keywords
- acoustic wave
- surface acoustic
- wave element
- idt electrode
- dielectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000010897 surface acoustic wave method Methods 0.000 description 4
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Description
また、電極に誘電体膜を被覆した弾性表面波素子が提案されている。例えば、特許文献１は、図１３に示す弾性表面波素子９４０を開示している。図１３は、弾性表面波素子９４０を透過的に描いた上面図およびそのＡ−Ａ´線に沿った断面図である。弾性表面波素子９４０は、圧電基板９４１に第１の誘電体膜９４４を被覆し、第１の誘電体膜９４４上に、２対のＩＤＴ電極９４２を配置し、さらに、第１の誘電体膜９４４およびＩＤＴ電極９４２を、耐湿性を有する第２の誘電体膜９４５で被覆して形成される。これにより、ＩＤＴ電極９４２の湿気による腐食を防止している。 A surface acoustic wave element in which an electrode is coated with a dielectric film has been proposed. For example, Patent Document 1 discloses a surface acoustic wave element 940 shown in FIG. FIG. 13 is a top view transparently depicting the surface acoustic wave element 940 and a sectional view taken along the line AA ′. The surface acoustic wave element 940, the first dielectric layer 944 is coated on the piezoelectric substrate 941, on the first dielectric film 94 4, arranged IDT electrode 942 of the two pairs, further, a first dielectric The film 944 and the IDT electrode 942 are formed by covering with a second dielectric film 945 having moisture resistance. This prevents corrosion of the IDT electrode 942 due to moisture.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011091543A JP2012227626A (en) | 2011-04-15 | 2011-04-15 | Surface acoustic wave element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011091543A JP2012227626A (en) | 2011-04-15 | 2011-04-15 | Surface acoustic wave element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2012227626A JP2012227626A (en) | 2012-11-15 |
| JP2012227626A5 true JP2012227626A5 (en) | 2014-01-09 |
Family
ID=47277370
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011091543A Withdrawn JP2012227626A (en) | 2011-04-15 | 2011-04-15 | Surface acoustic wave element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2012227626A (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3068049B1 (en) * | 2015-03-12 | 2018-06-13 | Skyworks Filter Solutions Japan Co., Ltd. | Accoustic wave elements, antenna duplexers and electronic devices |
| WO2017187724A1 (en) * | 2016-04-27 | 2017-11-02 | 株式会社村田製作所 | Elastic wave device |
| JP7178881B2 (en) * | 2018-11-16 | 2022-11-28 | ＮＤＫ ＳＡＷ ｄｅｖｉｃｅｓ株式会社 | surface acoustic wave element |
-
2011
- 2011-04-15 JP JP2011091543A patent/JP2012227626A/en not_active Withdrawn
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