JP2012220202A - Tester supporting tool - Google Patents

Tester supporting tool Download PDF

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JP2012220202A
JP2012220202A JP2011082807A JP2011082807A JP2012220202A JP 2012220202 A JP2012220202 A JP 2012220202A JP 2011082807 A JP2011082807 A JP 2011082807A JP 2011082807 A JP2011082807 A JP 2011082807A JP 2012220202 A JP2012220202 A JP 2012220202A
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terminal
connector
measured
tester
measurement
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Teruyuki Sehata
照幸 瀬畑
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Disco Corp
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Disco Abrasive Systems Ltd
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Abstract

PROBLEM TO BE SOLVED: To enable even an unskilled engineer to surely measure a voltage or a current without making a mistake about a terminal of an electric apparatus.SOLUTION: A tester supporting tool is provided which comprises a first connector 60 connected to one terminal of a tester, a second connector 61 connected to another terminal of the tester, a first measuring terminal 63 which is conducted to the first connector 60 and connected to one terminal 51 to be measured of an electric apparatus to measure a voltage or a current, and a second measuring terminal 64 which is conducted to the second connector 61 and connected to another terminal 52 to be measured of the electric apparatus to measure the voltage or the current. The one terminal 51 to be measured and the other terminal 52 to be measured of the electric apparatus are arranged in a predetermined positional relationship and accommodated in one connector 50 in which a plurality of terminals are arranged, and the first measuring terminal 63 and the second measuring terminal 64 are arranged and accommodated in a predetermined positional relationship within another connector 62 which is paired with the one connector 50 and connected.

Description

本発明は、テスターを用いて各種電気機器に備えた端子の電圧、電流等を測定する作業を容易とするテスター補助具に関する。   The present invention relates to a tester auxiliary tool that facilitates work of measuring voltage, current, and the like of terminals provided in various electric devices using a tester.

格子状に形成された分割予定ラインによってIC、LSI等の複数のデバイスが区画されて表面に形成された半導体ウエーハは、研削装置によって裏面が研削されて所定の厚みに加工された後、ダイシング装置によって個々のデバイスに分割され、分割されたデバイスは携帯電話機、パソコン等の各種電気機器に利用されている。   A semiconductor wafer formed on the front surface by dividing a plurality of devices such as ICs and LSIs by dividing lines formed in a lattice shape, the back surface is ground by a grinding device and processed to a predetermined thickness, and then a dicing device Are divided into individual devices, and the divided devices are used in various electric devices such as mobile phones and personal computers.

例えば、研削装置やダイシング装置等の各種加工装置には、装置の各部位を制御するための制御手段を構成するCPU、配電盤等の電装品を収容する電装ボックスを備えており、電装品に接続された複数のケーブルが電装ボックスに形成された端子に接続されている(例えば特許文献1参照)。   For example, various processing equipment such as grinding equipment and dicing equipment are equipped with a control box for controlling each part of the equipment, and an electrical equipment box that houses electrical equipment such as switchboards. The plurality of cables thus connected are connected to terminals formed in the electrical box (see, for example, Patent Document 1).

そして、各種装置においては、電装ボックスの端子にテスターを接続して当該端子における電圧や電流の値をチェックすることにより、その装置が適正に作動するようにメンテナンスが行われている。   And in various apparatuses, the maintenance is performed so that the apparatus may operate | move properly by connecting the tester to the terminal of an electrical equipment box and checking the value of the voltage and electric current in the said terminal.

特開2010−177227号公報JP 2010-177227 A

しかし、電装ボックスには接続端子が複数形成されているため、特に未熟な技術者にとっては電圧又は電流を検出すべき接続端子がわからなくなり、適切なメンテナンスができなくなるという問題がある。   However, since a plurality of connection terminals are formed in the electrical box, there is a problem that an unskilled engineer cannot know a connection terminal for detecting voltage or current and cannot perform proper maintenance.

本発明は、このような問題にかんがみなされたもので、未熟な技術者であっても、測定対象となる電気機器の端子を確実に認識して確実に電圧または電流の測定を行うことができるようにすることを目的とする。   The present invention has been considered in view of such problems, and even an unskilled engineer can reliably recognize a terminal of an electric device to be measured and reliably measure voltage or current. The purpose is to do so.

本発明は、テスターによる測定を補助するテスター補助具に関するもので、テスターの一方の端子に連結する第一の連結具と、テスターの他方の端子に連結する第二の連結具と、第一の連結具に導通し電圧または電流を測定すべき電気機器の一方の被測定端子に連結する第一の測定端子と、第二の連結具に導通し電圧または電流を測定すべき電気機器の他方の被測定端子に連結する第二の測定端子とを備え、電気機器の一方の被測定端子と他方の被測定端子とは、所定の位置関係で配設されるとともに複数の端子が配設された一方のコネクタに収容されていて、第一の測定端子と第二の測定端子とは、一方のコネクタと対をなし連結する他方のコネクタに該所定の位置関係で配設され収容されている。   The present invention relates to a tester assisting tool that assists measurement by a tester, and includes a first connector that is connected to one terminal of the tester, a second connector that is connected to the other terminal of the tester, A first measuring terminal connected to one of the terminals to be measured for voltage or current to be connected to the connector, and the other of the electric apparatus to be measured for voltage or current connected to the second connector. A second measurement terminal connected to the terminal to be measured, wherein one of the terminals to be measured and the other terminal to be measured of the electrical device are arranged in a predetermined positional relationship and a plurality of terminals are arranged The first measurement terminal and the second measurement terminal are accommodated in one connector, and are arranged and accommodated in the predetermined positional relationship with the other connector that forms a pair with one connector.

本発明では、第一の被測定端子及び第二の被測定端子にテスター補助具の第一の測定端子及び第二の測定端子を嵌入させるとともに、第一の連結具及び第二の連結具をテスターの端子に連結することで、第一の被測定端子及び第二の被測定端子に対してテスターの端子を直接当てることなく、第一の被測定端子及び第二の被測定端子の電圧、電流等を測定することができ、第一の測定端子及び第二の測定端子は、第一の被測定端子及び第二の被測定端子に対応する位置関係に形成されているため、第一の測定端子及び第二の測定端子を第一の被測定端子及び第二の被測定端子に嵌入させる際に嵌入位置を間違えることがなく、未熟な技術者であっても、確実に電圧又は電流の測定を行うことができる。   In the present invention, the first measuring terminal and the second measuring terminal of the tester auxiliary tool are inserted into the first measured terminal and the second measured terminal, and the first connecting tool and the second connecting tool are provided. By connecting to the terminal of the tester, the voltage of the first measured terminal and the second measured terminal is not directly applied to the first measured terminal and the second measured terminal, Current and the like can be measured, and the first measurement terminal and the second measurement terminal are formed in a positional relationship corresponding to the first measurement terminal and the second measurement terminal. When inserting the measurement terminal and the second measurement terminal into the first measurement terminal and the second measurement terminal, there is no mistake in the insertion position. Measurements can be made.

切削装置の一例を示す斜視図である。It is a perspective view which shows an example of a cutting device. 電装ボックスの一例を示す斜視図である。It is a perspective view which shows an example of an electrical equipment box. テスター補助具の一例を示す斜視図である。It is a perspective view which shows an example of a tester auxiliary tool. テスター補助具を電装ボックスに連結する状態を示す斜視図である。It is a perspective view which shows the state which connects a tester auxiliary tool to an electrical equipment box.

図1に示す切削装置1は、半導体ウェーハ等の各種被加工物(ワーク)を切削加工する装置であり、ワークを保持する保持手段2と、保持手段2に対して切削加工を行う切削手段3とを備えている。   A cutting apparatus 1 shown in FIG. 1 is an apparatus for cutting various workpieces (workpieces) such as a semiconductor wafer, and includes a holding means 2 for holding a work and a cutting means 3 for cutting the holding means 2. And.

切削装置1の前面側には、被加工物を収容するカセット40が載置されている。また、カセット40の後方には、カセット40からのワークの搬出及びカセット40へのワークの搬入を行う搬出入手段41が配設されている。カセット40と搬出入手段41との間には仮置き領域42が設けられており、搬出入手段41によるカセット40からのワークの搬出及びカセット40へのワークの搬入は、仮置き領域42を介して行われる。   On the front side of the cutting apparatus 1, a cassette 40 that houses a workpiece is placed. In addition, a loading / unloading means 41 for unloading the workpiece from the cassette 40 and loading the workpiece into the cassette 40 is disposed behind the cassette 40. A temporary placement area 42 is provided between the cassette 40 and the carry-in / out means 41, and workpieces are unloaded from the cassette 40 and carried into the cassette 40 by the carry-in / out means 41 via the temporary placement area 42. Done.

仮置き領域42の近傍には、仮置き領域42と保持手段2との間でワークを搬送する第一の搬送手段43aが配設されている。   In the vicinity of the temporary placement area 42, first transport means 43a for transporting the workpiece between the temporary placement area 42 and the holding means 2 is disposed.

保持手段2は、第一の搬送手段43aによるワークの着脱が行われる領域である着脱領域Aと、切削手段3によるワークの切削が行われる領域である切削領域Bとの間を水平方向に移動可能となっている。以下では、保持手段2の移動方向をX軸方向とする。   The holding means 2 moves in a horizontal direction between an attachment / detachment area A where the workpiece is attached / detached by the first conveying means 43a and a cutting area B where the workpiece is cut by the cutting means 3. It is possible. Hereinafter, the moving direction of the holding means 2 is assumed to be the X-axis direction.

保持手段2の移動経路の上方には、ワークの切削すべき位置を撮像して検出するための撮像手段44が配設されている。   Above the movement path of the holding means 2, an imaging means 44 for imaging and detecting the position where the workpiece is to be cut is disposed.

切削手段3は、切削領域Bに配設されており、X軸方向に対して水平方向に直交するY軸方向の軸心を有するスピンドル30の先端部に装着された回転可能な切削ブレード31を備えている。   The cutting means 3 is disposed in the cutting region B, and includes a rotatable cutting blade 31 attached to the tip of a spindle 30 having a Y-axis direction center perpendicular to the horizontal direction with respect to the X-axis direction. I have.

着脱領域Aの後方側には、切削後のワークを洗浄する洗浄手段45が配設されている。また、洗浄手段45の上方には、保持手段2から洗浄手段45へワークを搬送する第二の搬送手段43bが配設されている。第二の搬送手段43bの水平移動の方向は、Y軸方向である。また、X軸方向及びY軸方向に対して直交する方向をZ方向とする。   On the rear side of the attachment / detachment region A, cleaning means 45 for cleaning the workpiece after cutting is disposed. Above the cleaning means 45, a second transport means 43b for transporting the workpiece from the holding means 2 to the cleaning means 45 is disposed. The direction of horizontal movement of the second transport means 43b is the Y-axis direction. A direction orthogonal to the X-axis direction and the Y-axis direction is taken as a Z direction.

図1に示すように、切削対象のワークWは、テープTに貼着されてリング状のフレームFに支持された状態で保持手段2に保持される。そして、保持手段2がX軸方向に移動し、撮像手段44によって被加工物の表面が撮像されて切削すべき位置が検出され、その位置と切削ブレード31とのY軸方向の位置合わせがなされる。   As shown in FIG. 1, the workpiece W to be cut is held by the holding means 2 in a state where it is adhered to the tape T and supported by the ring-shaped frame F. Then, the holding means 2 moves in the X-axis direction, the surface of the workpiece is imaged by the imaging means 44, the position to be cut is detected, and the position and the cutting blade 31 are aligned in the Y-axis direction. The

次に、保持手段2がさらにX軸方向に移動するとともに、切削ブレード31を高速回転させながら切削手段3をZ軸方向に降下させることにより、検出された位置が切削される。また、切削手段3を所定間隔ずつY軸方向に割り出し送りしながら同様の切削を行う。さらに、保持手段2を90度回転させた後、同様の切削を行うと、被加工物Wが個々のチップに分割される。   Next, the holding means 2 further moves in the X-axis direction, and the detected position is cut by lowering the cutting means 3 in the Z-axis direction while rotating the cutting blade 31 at a high speed. Further, the same cutting is performed while indexing and feeding the cutting means 3 in the Y-axis direction at predetermined intervals. Further, when the same cutting is performed after the holding means 2 is rotated 90 degrees, the workpiece W is divided into individual chips.

このように構成される切削装置1には、上記各手段を駆動制御するための制御手段を構成するCPU等が収容された電気機器である電装ボックス5を備えている。   The cutting apparatus 1 configured as described above includes an electrical box 5 that is an electrical device in which a CPU and the like that constitute control means for driving and controlling the above-described means are accommodated.

図2に示すように、電装ボックス5は、各手段を動作させるための端子が複数形成されたコネクタ50を備えている。コネクタ50を構成する各端子は、例えばメス型に形成されており、これら複数の端子の中には、切削装置1の各部位を適正に作動させるための端子、例えば、少なくとも第一の端子51と第二の端子52とを有している。第一の端子51と第二の端子52とは所定の位置関係を有して配設されている。換言すれば、どの端子が被測定端子となるかによって所定の位置関係が定まる。   As shown in FIG. 2, the electrical box 5 includes a connector 50 in which a plurality of terminals for operating each means are formed. Each terminal constituting the connector 50 is formed, for example, in a female shape, and among these terminals, a terminal for properly operating each part of the cutting device 1, for example, at least the first terminal 51. And a second terminal 52. The first terminal 51 and the second terminal 52 are disposed with a predetermined positional relationship. In other words, a predetermined positional relationship is determined depending on which terminal is the terminal to be measured.

図3に示すテスター補助具6は、図2に示した端子群5の各端子の電圧や電流の値をチェックするために、チェック対象の端子とテスターとの間に介在させるもので、テスターの一方の端子に連結する第一の連結具60と、テスターの他方の端子に連結する第二の連結具61とを備えている。第一の連結具60及び第二の連結具61は、コネクタ62の第一面620から延出された導電線60a、61aの先端にそれぞれ連結されている。第一の連結具60及び第二の連結具61としては、例えばワニグチクリップのように、テスターの端子に固定できるものが使用される。   The tester auxiliary tool 6 shown in FIG. 3 is interposed between the terminal to be checked and the tester in order to check the voltage and current values of each terminal of the terminal group 5 shown in FIG. A first connector 60 connected to one terminal and a second connector 61 connected to the other terminal of the tester are provided. The first connector 60 and the second connector 61 are respectively connected to the tips of the conductive wires 60 a and 61 a extending from the first surface 620 of the connector 62. As the 1st connection tool 60 and the 2nd connection tool 61, what can be fixed to the terminal of a tester like a crocodile clip, for example is used.

コネクタ62の第一面620の裏側の面である第二面621からは、オス型の第一の測定端子63と第二の測定端子64とがそれぞれ突出形成されている。第一の測定端子63は、導電線60a及びコネクタ62の内部を介して第一の連結具60に導通しており、第二の測定端子64は、導電線61a及びコネクタ62の内部を介して第二の連結具61に導通している。なお、コネクタ50に形成された第一の端子51及び第二の端子52がオス型の端子である場合は、第一の測定端子63及び第二の測定端子64はメス型に形成される。   A male first measurement terminal 63 and a second measurement terminal 64 project from the second surface 621 which is the back surface of the first surface 620 of the connector 62. The first measurement terminal 63 is electrically connected to the first connector 60 through the inside of the conductive wire 60 a and the connector 62, and the second measurement terminal 64 is connected through the inside of the conductive wire 61 a and the connector 62. The second connector 61 is electrically connected. When the first terminal 51 and the second terminal 52 formed on the connector 50 are male terminals, the first measurement terminal 63 and the second measurement terminal 64 are formed in a female shape.

第一の測定端子63は、電圧または電流を測定すべき電気機器の一方の被測定端子、例えば図2に示した電装ボックス5の第一の端子51に嵌入して連結される。また、第二の測定端子64は、電圧または電流を測定すべき電気機器の一方の被測定端子、例えば図2に示した電装ボックス5の第二の端子52に嵌入して連結される。   The first measurement terminal 63 is fitted and connected to one of the terminals to be measured of the electrical equipment whose voltage or current is to be measured, for example, the first terminal 51 of the electrical box 5 shown in FIG. Further, the second measurement terminal 64 is fitted and connected to one of the terminals to be measured of the electrical equipment whose voltage or current is to be measured, for example, the second terminal 52 of the electrical equipment box 5 shown in FIG.

テスター補助具6を構成するコネクタ62は、電装ボックス5のコネクタ50と対をなすもので、第一の測定端子63及び第二の測定端子64は、図2に示した第一の端子51と第二の端子52との所定の位置関係に対応しており、第一の測定端子63を第一の端子51に嵌入できるとともに第二の測定端子64を第二の端子52に嵌入できる所定の位置関係で配設され、コネクタ62に収容されている。   The connector 62 constituting the tester auxiliary tool 6 is paired with the connector 50 of the electrical equipment box 5, and the first measurement terminal 63 and the second measurement terminal 64 are the same as the first terminal 51 shown in FIG. It corresponds to a predetermined positional relationship with the second terminal 52, and the first measurement terminal 63 can be inserted into the first terminal 51 and the second measurement terminal 64 can be inserted into the second terminal 52. It is disposed in a positional relationship and is accommodated in the connector 62.

電装ボックス5の第一の端子51と第二の端子52から電流又は電圧の値をチェックする際には、図4に示すように、第一の端子51に第一の測定端子63を嵌入させるとともに、第二の端子52に第二の測定端子64を嵌入させる。また、第一の測定端子63に導通する第一の連結具60はテスターの一方の端子に連結し、第二の測定端子64に導通する第二の連結具61はテスターの一方の端子に連結する。このようにして接続を行うことにより、第一の端子51及び第二の端子52から測定を行うことができる。   When the current or voltage value is checked from the first terminal 51 and the second terminal 52 of the electrical box 5, the first measurement terminal 63 is inserted into the first terminal 51 as shown in FIG. 4. At the same time, the second measurement terminal 64 is inserted into the second terminal 52. In addition, the first connector 60 connected to the first measurement terminal 63 is connected to one terminal of the tester, and the second connector 61 connected to the second measurement terminal 64 is connected to one terminal of the tester. To do. By making the connection in this way, measurement can be performed from the first terminal 51 and the second terminal 52.

このように、第一の端子51及び第二の端子52にテスター補助具6の第一の測定端子63及び第二の測定端子64をそれぞれ嵌入させるとともに、第一の連結具60及び第二の連結具61をテスターの端子に連結することで、コネクタ50の第一の端子51及び第二の端子52に対してテスターの端子を直接当てることなく、第一の端子51及び第二の端子52から電圧又は電流の値を測定することができる。しかも、第一の測定端子63及び第二の測定端子64は、第一の端子51及び第二の端子52に対応する位置関係に形成されているため、第一の測定端子63及び第二の測定端子64を第一の端子51及び第二の端子52に嵌入させる際に嵌入位置を間違えることがない。したがって、未熟な技術者であっても、容易かつ確実に電圧又は電流の測定を行うことができる。   In this manner, the first measurement terminal 63 and the second measurement terminal 64 of the tester auxiliary tool 6 are fitted into the first terminal 51 and the second terminal 52, respectively, and the first connector 60 and the second terminal 52 are inserted. By connecting the connector 61 to the terminals of the tester, the first terminals 51 and the second terminals 52 are not directly applied to the first terminals 51 and the second terminals 52 of the connector 50. The voltage or current value can be measured from Moreover, since the first measurement terminal 63 and the second measurement terminal 64 are formed in a positional relationship corresponding to the first terminal 51 and the second terminal 52, the first measurement terminal 63 and the second measurement terminal 63 When inserting the measurement terminal 64 into the first terminal 51 and the second terminal 52, the insertion position is not mistaken. Therefore, even an unskilled engineer can easily and reliably measure voltage or current.

なお、上記例ではコネクタ50の被測定端子を2つとしたが、3つ以上であってもよい。その場合は、テスター補助具の測定端子も、コネクタ50の被測定端子と同数かつ対応した位置関係を有する。また、電装ボックスが収容される装置は切削装置には限られず、さらに、測定対象となる電気機器は、電装ボックスには限られない。   In the above example, the number of measured terminals of the connector 50 is two, but may be three or more. In that case, the measurement terminals of the tester auxiliary tool also have the same number and corresponding positional relationship as the measured terminals of the connector 50. Moreover, the device in which the electrical box is accommodated is not limited to the cutting device, and the electrical device to be measured is not limited to the electrical box.

1:切削装置
2:保持手段
3:切削手段
30:スピンドル 31:切削ブレード
40:カセット 41:搬出入手段 42:仮置き領域
43a:第一の搬送手段 43b:第二の搬送手段
44:撮像手段
45:洗浄手段
5:電装ボックス
50:コネクタ 51:第一の端子 52:第二の端子
6:テスター補助具 60:第一の連結具 61:第二の連結具
62:コネクタ 63:第一の測定端子 64:第二の測定端子
1: Cutting device 2: Holding means 3: Cutting means 30: Spindle 31: Cutting blade 40: Cassette 41: Loading / unloading means 42: Temporary placement area 43a: First conveying means 43b: Second conveying means 44: Imaging means 45: Cleaning means 5: Electrical box 50: Connector 51: First terminal 52: Second terminal 6: Tester auxiliary tool 60: First connector 61: Second connector 62: Connector 63: First Measurement terminal 64: second measurement terminal

Claims (1)

テスター補助具であって、
テスターの一方の端子に連結する第一の連結具と、該テスターの他方の端子に連結する第二の連結具と、該第一の連結具に導通し電圧または電流を測定すべき電気機器の一方の被測定端子に連結する第一の測定端子と、該第二の連結具に導通し電圧または電流を測定すべき電気機器の他方の被測定端子に連結する第二の測定端子とを備え、
該電気機器の一方の被測定端子と他方の被測定端子とは、所定の位置関係で配設されるとともに複数の端子が配設された一方のコネクタに収容されていて、
該第一の測定端子と該第二の測定端子とは、該一方のコネクタと対をなし連結する他方のコネクタに該所定の位置関係で配設され収容されている
テスター補助具。
A tester aid,
A first connector connected to one terminal of the tester, a second connector connected to the other terminal of the tester, and an electrical device to be connected to the first connector and to measure voltage or current. A first measurement terminal connected to one measured terminal, and a second measurement terminal connected to the other measured terminal of an electrical device to be connected to the second connector to measure voltage or current. ,
One of the terminals to be measured and the other terminal to be measured of the electrical equipment are accommodated in one connector in which a plurality of terminals are disposed with a predetermined positional relationship,
The tester auxiliary tool, wherein the first measurement terminal and the second measurement terminal are disposed and accommodated in the predetermined positional relationship with the other connector paired with the one connector.
JP2011082807A 2011-04-04 2011-04-04 Tester supporting tool Pending JP2012220202A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016049170A (en) * 2014-08-29 2016-04-11 日本電信電話株式会社 Biological signal monitoring system

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0245464U (en) * 1988-09-21 1990-03-28
JPH10197585A (en) * 1997-01-09 1998-07-31 Hitachi Building Syst Co Ltd Test device for elevator control circuit board

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0245464U (en) * 1988-09-21 1990-03-28
JPH10197585A (en) * 1997-01-09 1998-07-31 Hitachi Building Syst Co Ltd Test device for elevator control circuit board

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016049170A (en) * 2014-08-29 2016-04-11 日本電信電話株式会社 Biological signal monitoring system

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