JP2012209298A - Slide table - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a slide table whose table plate has a large rotatable angle and has sufficient load resistance.SOLUTION: The slide table has a table plate 13 supported slidably on a base 11 with a plurality of support units 21 interposed. Each of the support units 21 includes a fixed support plate 22 fixed to the base and having an opening 22a in the center, and a slide support plate 25 arranged slidably on an upper surface of the fixed support plate with a sphere holding plate 23, holding a plurality of spheres 27 and having an opening 23a in the center, interposed, and having a slide limit shaft 28 extending into the opening 22a of the fixed support plate. Then the openings 22a and 23a are both rectangular each having one long diameter, and both arranged having directions of long diameters along a tangent 13c to an arc having its center at the center point of the table plate, and means 33 of limiting a slidable range of the sphere holding plate by engaging the sphere holding plate 23 and the fixed support plate 22 respectively is provided so as to diable the spheres 27 to move into a region of the opening 22a.

Description

  The present invention relates to a sliding table suitable for use in a positioning table.

  The positioning table includes a sliding table having a table plate that can slide along the surface of the base, and a drive device that slides the table plate.

  The positioning table is used, for example, when positioning two glass substrates constituting the liquid crystal cell. Place one glass substrate of the liquid crystal cell on the table plate, place the other glass substrate over the glass substrate with a slight gap, and operate the driving device to move the table plate together with the former glass substrate By sliding (moving linearly or rotating), the latter glass substrate can be positioned.

  In FIG. 1 and FIG. 2 of Patent Document 1, a structure in which a table plate is slidably supported on a base via three support units disposed at intervals along the periphery of the table plate. A sliding table is disclosed.

  3 and 4 of the same document show a fixed support plate (inner support plate) fixed to a base (support base) via a support (attachment member), and a plurality of spheres (balls on the upper surface of the fixed support plate). ) Is fixed to a sliding support plate (outer support plate) slidably disposed via an upper sphere holding plate (holding member) held, and a connection portion extending downward from the periphery of the sliding support plate, An opening (play hole) is provided in the center disposed under contact via a lower sphere holding plate (holding member) having an opening (play hole) in the center where a plurality of spheres are held on the lower surface of the fixed support plate. A support unit including a sliding auxiliary plate (outer support plate) provided is disclosed.

  7 and 8 of the same document, a fixed support plate (inner support plate) having an opening (play hole) in the center fixed to the base, and a plurality of spheres are held on the upper surface of the fixed support plate. A sliding support plate (slidably arranged via a spherical holding plate having an opening (play hole) in the center and having a sliding restriction shaft (coupling member) extending inside the opening of the fixed support plate on the lower side of the central portion ( A support unit comprising an outer support plate) is disclosed. In the same document, there is a description that the movement stroke in the length direction is increased by making the respective openings of the fixed support plate and the spherical body holding plate have an elongated shape.

Japanese Patent Laid-Open No. 9-155666

  In recent years, along with the increase in size of positioning objects (for example, glass substrates constituting liquid crystal cells), the size of sliding tables has been increasing.

  Even when the sliding table is enlarged, when the table plate on which the positioning object is placed is linearly moved by a predetermined distance, the moving distance of the central portion or the peripheral portion of the table plate is also equal to the predetermined distance.

  However, when the table plate on which the positioning object is placed is rotated at a predetermined angle, the larger the sliding table is and the larger the table plate size is, the more the peripheral direction of the table plate in the rotation direction (circumferential direction) is. Increased travel distance. Therefore, it is necessary to support the peripheral portion of the table plate by each support unit so that it can be moved by a distance as large as possible in the rotational direction.

  An object of the present invention is to provide a sliding table in which a table plate has a large rotatable angle with respect to a distance in which the table plate can move in a linear direction and exhibits sufficient load resistance.

  The present inventor has used each of the fixed support plate and the spherical body holding plate set in an elongated shape as each support unit for supporting the table plate of the sliding table. We examined increasing the rotatable angle of the table plate by arranging it along the direction of rotational movement of the table plate.

  On the other hand, the slidable range of the sphere holding plate, that is, the rollable range of the sphere held by the sphere holding plate is limited by a sliding limit shaft passing through the opening of the sphere holding plate. However, when the openings of the fixed support plate and the spherical body holding plate are set to be elongated as described above, the area of the opening of the fixed support plate is increased, and in addition, the opening of the fixed support plate is set inside the opening of the fixed support plate. When the sphere holding plate slides (especially, rotational movement), the movable range of the sliding limit shaft of the sphere increases and the range of rolling of the sphere held by the sphere holding plate widens accordingly. Can easily move into the area of the opening of the fixed support plate, and as a result, some spheres can fall into the opening. The load resistance of the sliding table is determined by the number of spheres sandwiched between the fixed support plate of the support unit and the opposed surfaces of the slide support plate. Therefore, when the sphere moves into the area of the opening of the fixed support plate as described above, the load resistance of the sliding table decreases.

  As a result of further research, the present inventor, in addition to devising the arrangement of each support unit as described above, each of the sphere holding plate and the fixed support plate (or sliding support plate) of each support unit. By providing means for engaging each other to limit the slidable range of the sphere holding plate, the rotatable angle of the table plate can be increased, and the sphere is moved into the region of the opening of the fixed support plate. (And, as a result, it was found that the falling of the sphere into the opening of the sphere) could be prevented and reached the present invention.

  According to the present invention, a table plate is slidably supported on a base via a plurality of support units disposed at intervals along the periphery of the table plate, and the support unit includes a base plate. A fixed support plate having an opening at the center fixed to the base, a plurality of spheres held on the upper surface of the fixed support plate, and slidably disposed via a sphere holding plate having an opening at the center. A sliding table that is a support unit including a sliding support plate having a sliding limit shaft extending inside the opening of the fixed support plate on the side, the openings provided in both the fixed support plate and the sphere holding plate, Both of them have a rectangular or oval shape with a long diameter, both of which are arranged so that the direction of the long diameter is along the tangent line of the arc centered on the center point of the table plate, and the area of the opening of the fixed support plate. The sphere never moves inside Cormorants, to each of the ball holding plate and the fixed support plate or slide supporting plates, in sliding table, characterized in that is provided with means for limiting the sliding range of the ball holding plate engage with each other.

  The present invention is also arranged to be slidable via a fixed support plate having an opening at the center fixed to the base, and a sphere holding plate having an opening at the center with a plurality of spheres held on the upper surface of the fixed support plate. A sliding support plate having a sliding restriction shaft extending inside the opening of the fixed support plate at the lower side of the central portion, the opening provided in both the fixed support plate and the sphere holding plate. However, each of the spherical holding plate and the fixed supporting plate or the sliding supporting plate has a rectangular shape or an oval shape with one long diameter, and the spherical supporting plate does not move within the area of the opening of the fixed supporting plate. There is also a support unit characterized in that means for engaging each other to limit the slidable range of the spherical body holding plate is provided.

  In the sliding table and support unit of the present invention including the sliding support plate having the above-described sliding limit shaft, the range of sliding of the spherical holding plate provided on each of the spherical holding plate and the fixed supporting plate or the sliding support plate is limited. It is preferable that the means to perform is comprised from the protrusion formed in one board, and the recessed part or hole provided in the other board.

  The present invention also slidably supports the table plate on the base via a plurality of support units arranged at intervals along the periphery of the table plate, the support unit comprising: A sliding support plate slidably disposed via a fixed support plate having a support column fixed to the base on the lower side of the central portion and an upper sphere holding plate in which a plurality of spheres are held on the upper surface of the fixed support plate And fixed to a connecting portion extending downward from the periphery of the sliding support plate, and arranged in contact via a lower sphere holding plate having a plurality of spheres held on the lower surface of the fixed support plate and having an opening in the center. A sliding table that is a support unit including a sliding auxiliary plate having an opening at the center, and the openings provided in both the lower sphere holding plate and the sliding auxiliary plate are both rectangular with a long diameter. Or, it is oval and its long diameter direction is the same. The lower sphere holding plate and the fixed support plate are arranged along the arc tangent centered on the center point of the table plate so that the sphere does not move within the opening area of the sliding assist plate. Alternatively, there is also a sliding table characterized in that means for limiting the sliding range of the lower sphere holding plate is provided on each of the sliding assist plates to engage with each other.

  The present invention is also arranged to be slidable via a fixed support plate having a support column fixed to the base on the lower side of the central portion and an upper sphere holding plate in which a plurality of spheres are held on the upper surface of the fixed support plate. Via a lower sphere holding plate fixed to a sliding support plate and a connecting portion extending downward from the periphery of the sliding support plate, and having a plurality of spheres held on the lower surface of the fixed support plate and having an opening in the center. A support unit including a sliding auxiliary plate having an opening at the center disposed under contact, wherein both the lower spherical body holding plate and the sliding auxiliary plate have a long diameter on one side. It has a rectangular or oval shape and engages the lower sphere holding plate and the fixed support plate or sliding assist plate with each other so that the sphere does not move within the opening area of the sliding assist plate. To limit the slidable range of the lower sphere holding plate It is provided also on the support unit, wherein.

  In the sliding table and supporting unit of the present invention including the fixed support plate having the above-mentioned support column, the slidable range of the lower sphere holding plate provided on each of the lower sphere holding plate and the fixed supporting plate or the sliding auxiliary plate It is preferable that the means for restricting is composed of a protrusion formed on one plate and a recess or hole provided on the other plate.

  In the present specification, the above-mentioned “center point of the table plate” is 15 of the radius of a circle that is centered on a point located above the center of gravity of the table plate on the surface of the table plate and circumscribes the table plate. It means that the point is in a region inside a circle having a radius with a length within% (preferably 10%).

  The sliding table of the present invention can rotate the table plate at a large angle with respect to the movable distance of the table plate in the linear direction, and exhibits sufficient load resistance. Therefore, the sliding table of the present invention can be advantageously used for positioning a large-sized positioning object, for example, a large glass substrate constituting a large liquid crystal cell.

It is a partially notched top view which shows the structural example of the sliding table (thing provided with the sliding support plate which has a sliding restriction | limiting shaft) of this invention. However, FIG. 1 shows the driving devices 60a, 60b, and 60c of the table plate 13. It is an expanded sectional view of the sliding table 10 cut | disconnected along the cutting line II-II line entered in FIG. It is a disassembled perspective view of the support unit 21 shown in FIG. It is an enlarged view which shows the support unit 21 arrange | positioned in the lower left of the base 11 in FIG. 1 in the state which the spherical body holding | maintenance board 23 moved to the right direction. It is an enlarged view which shows the support unit 21 arrange | positioned in the lower left of the base 11 in FIG. 1 in the state which the spherical body holding | maintenance board 23 moved to the upper direction. It is an enlarged view which shows the support unit 21 arrange | positioned in the lower left of the base 11 in FIG. 1 in the state which the spherical body holding | maintenance board 23 moved to the left diagonal upper direction. It is an enlarged view which shows the support unit 21 arrange | positioned in the lower left of the base 11 in FIG. 1 in the state which the spherical body holding | maintenance board 23 rotated. It is a figure which shows the support unit 121 which is not equipped with the means to restrict | limit the slidable range of a spherical body holding | maintenance board in the state which the spherical body holding | maintenance board 23 rotated. 8, the sliding limit shaft 28 moves to the corners of the openings 22a and 23a of the fixed support plate 22 and the sphere holding plate 23, and the sphere holding plate 23 is centered on the sliding limit shaft 28. It is a figure shown in the state rotated. It is an enlarged view of the site | part of the vicinity of the drive device 60a shown in FIG. It is the figure which looked at the site | part of the vicinity of the drive device 60a of FIG. 10 from the lower side of the figure. It is sectional drawing which shows another structural example of the sliding table (thing provided with the sliding support plate which has a sliding restriction | limiting shaft) of this invention. It is sectional drawing which shows the structural example of the sliding table (thing provided with the fixed support plate which has a support | pillar) of this invention. It is a disassembled perspective view of the support unit 41 shown in FIG.

  The sliding table of the present invention will be described with reference to the accompanying drawings. FIG. 1 is a partially cut-away plan view showing a configuration example of a sliding table (including a sliding support plate 25 having a sliding restriction shaft 28) according to the present invention. FIG. 2 is an enlarged cross-sectional view of the sliding table 10 cut along the cutting line II-II entered in FIG. FIG. 3 is an exploded perspective view of the support unit 21 shown in FIG.

  The sliding table 10 of FIG. 1 is shown with a part of the table plate 13 cut away. The table plate 13 is connected to driving devices 60a, 60b, and 60c. The sliding table 10 and the driving devices 60a, 60b, 60c constitute a positioning table.

  As the four support units 21 in total included in the sliding table 10 of FIG. 1, for example, those having the same configuration are used. However, the support unit 21 arranged at the lower left corner of the base 11 in FIG. 1 is in a state where the sliding support plate is removed, and the support unit 21 arranged at the lower right corner of the base 11 is a sliding support. It is written with the plate and the sphere holding plate removed.

  The sliding table 10 of the present invention shown in FIGS. 1 to 3 includes a plurality of (for example, a total of four) table plates 13 arranged on a base 11 at intervals from each other along the periphery of the table plate 13. The support unit 21 is slidably supported via a support unit 21, and the support unit 21 includes a fixed support plate 22 having an opening 22 a in the center fixed to the base 11, and a fixed support plate 22. The upper and lower surfaces of the fixed support plate 22 are slidably disposed via a sphere holding plate 23 having a plurality of spheres 27 held at the center and provided with an opening 23a at the center. And a sliding support plate 25 having a shaft 28.

  In the sliding table 10, the openings 22a and 23a provided in both the fixed support plate 22 and the spherical body holding plate 23 of the support unit 21 are both rectangular with one long diameter, and the direction of the long diameter is the same. Are arranged along the tangent line 13c of the arc 13b centered on the center point 13a of the table plate 13, and the spherical body 27 is not moved into the region of the opening 22a of the fixed support plate 22 described above. The main feature is that each of the sphere holding plate 23 and the fixed support plate 22 is provided with means 33 for engaging each other to limit the slidable range of the sphere holding plate.

  As described above, the openings 22a and 23a provided in both the fixed support plate 22 and the spherical body holding plate 23 of each support unit 21 form a rectangle (or oval) having one long diameter, and the direction of the long diameter. Are arranged along the tangent line 13c of the arc 13b with the center point 13a of the table plate 13 as the center, the sliding support plate 25 of each support unit 21 together with the sliding limit shaft 28 opens the fixed support plate 22. It can move at a long distance along the length direction of 22a (generally the rotation direction of the table plate). Therefore, the sliding table 10 of the present invention has a larger rotation angle of the table plate 13 with respect to the movable distance of the table plate 13 in the linear direction as compared with the conventional sliding table.

  In the present specification, “rectangular” or “oval” refers to the rotational distance of the table plate 13 with respect to the movable distance of the sliding support plate 25 in the linear direction passing through the center point 13a of the table plate 13. If the movable distance can be increased, it does not need to be an exact (geometric) rectangle or oval. For example, the “rectangular shape” referred to in this specification includes a shape in which the corners of the rectangle are formed by arcs, a shape in which the corners of the rectangle are chamfered, and a shape in which each side of the rectangle is curved. Further, for example, “rectangle” or “oval” in this specification includes a shape obtained by curving a rectangle or an ellipse along an arc 13 b centering on the center point 13 a of the table plate 13.

  Further, the opening 22a of the fixed support plate 22 and the opening 23a of the spherical body holding plate 23 are both formed into a rectangular (or oval) shape having a long diameter, and the area of these openings 22a and 23a is increased. Even if it exists, the spherical body holding plate 23 and fixed support are provided via the means 33 which restrict | limits the slidable range of the spherical body holding plate provided in each of the spherical body holding plate 23 and the fixed support plate 22 (or sliding support plate 25). Since the plate 22 (or the sliding support plate 25) is engaged with each other, the slidable range of the sphere holding plate 23 is limited to a range in which the sphere 27 does not move into the region of the opening 22a of the fixed support plate 22. The Therefore, the sliding table 10 of the present invention exhibits sufficient load resistance (particularly, load resistance against a load applied downward to the table plate 13).

  In the configuration shown in FIGS. 1 and 3, the means 33 for limiting the slidable range of the sphere holding plate provided on each of the sphere holding plate 23 and the fixed support plate 22 is provided on one plate (fixed support plate) 22. The projection 35 is formed and a hole 36 provided in the other plate (sphere holding plate) 23.

  The means for limiting the slidable range of the sphere holding plate can also be constituted by a protrusion formed on the sphere holding plate and a hole provided in the fixed support plate. Moreover, it can replace with the said hole part and can also use a recessed part (For example, the non-through-hole or notch which engages with the said protrusion).

  In the configuration shown in FIGS. 2 and 3, the support unit 21 is connected to the lower end portion of the sliding limit shaft 28 at the upper side of the center portion, and a plurality of spheres 27 are held on the lower surface of the fixed support plate 22. It is preferable to further include a sliding assist plate 26 disposed in contact through a spherical body holding plate 24 having an opening 24a.

  By adjusting the distance between the sliding assist plate 26 and the sliding support plate 25 (for example, shortening the length of the sliding limit shaft 28), the sliding support plate 25 is fixed to the fixed support plate 22 via the plurality of spheres 27. Closely supported on top of. For this reason, the sliding support plate 25 can be slid with high accuracy in the horizontal direction.

  The opening 24 a provided in the sphere holding plate 24 is also a rectangle (or oval) having one long diameter, and the direction of the long diameter is an arc 13 b centering on the center point 13 a of the table plate 13. The sphere holding plate 24 and the sliding auxiliary plate 26 (or the fixed support plate 22) are arranged along the tangent line 13c so that the sphere 27 does not move into the region of the opening 22a of the fixed support plate 22 described above. Are preferably provided with means 34 for engaging with each other to limit the slidable range of the spherical holding plate.

  In the configuration shown in FIG. 3, the means 34 for limiting the slidable range of the sphere holding plate provided on each of the sphere holding plate 24 and the sliding assist plate 26 is formed on one plate (sliding assist plate) 26. The projection 35 and a recess (notch) 37 provided on the other plate (sphere holding plate) 24 are configured.

  Next, the slidable range of the spherical body holding plate of the support unit of the present invention will be described using the support unit 21 as a representative example. In FIGS. 4 to 7 below, the sliding support plate 25 of the support unit 21, the sliding limit shaft 28, and the parts on the back side (lower side in FIG. 2) of the fixed support plate 22 are not shown.

  FIG. 4 is an enlarged view showing the support unit 21 arranged at the lower left of the base 11 in FIG. 1 in a state in which the spherical body holding plate 23 is moved in the right direction.

  As shown in FIG. 4, when the sphere holding plate 23 moves in the right direction (X-axis direction), the hole 36 of the sphere holding plate 23 and the protrusion 35 of the fixed support plate 22 come into contact with each other and engage with each other. Therefore, the spherical body holding plate 23 does not move further in the right direction. Therefore, the sphere 27 held by the sphere holding plate 23 does not move into the region of the opening 22a of the fixed support plate 22, and does not fall into the opening 22a.

  FIG. 5 is an enlarged view showing the support unit 21 arranged at the lower left of the base 11 in FIG. 1 in a state where the spherical body holding plate 23 is moved in the upper direction.

  As shown in FIG. 5, when the sphere holding plate 23 moves in the upper direction (Y-axis direction), the hole 36 of the sphere holding plate 23 and the protrusion 35 of the fixed support plate 22 come into contact with each other. Therefore, the spherical body holding plate 23 does not move further upward. Therefore, the sphere 27 held by the sphere holding plate 23 does not move into the region of the opening 22a of the fixed support plate 22, and does not fall into the opening 22a.

  FIG. 6 is an enlarged view showing the support unit 21 arranged at the lower left of the base 11 in FIG. 1 in a state in which the spherical body holding plate 23 is moved in the diagonally upper left direction.

  As shown in FIG. 6, when the sphere holding plate 23 is moved in the diagonally upper left direction, the hole portion 36 of the sphere holding plate 23 and the protrusion 35 of the fixed support plate 22 come into contact with each other and engage with each other. The spherical body holding plate 23 does not move further in the diagonally upper left direction. Therefore, the sphere 27 held by the sphere holding plate 23 does not move into the region of the opening 22a of the fixed support plate 22, and does not fall into the opening 22a.

  FIG. 7 is an enlarged view showing the support unit 21 arranged at the lower left of the base 11 in FIG. 1 in a state where the spherical body holding plate 23 is rotated.

  As shown in FIG. 7, when the sphere holding plate 23 is rotationally moved (sliding), the hole portion 36 of the sphere holding plate 23 and the protrusion 35 of the fixed support plate 22 are brought into contact with each other, so that The spherical body holding plate 23 does not further rotate. Therefore, the sphere 27 held by the sphere holding plate 23 does not move into the region of the opening 22a of the fixed support plate 22, and does not fall into the opening 22a.

  As described above, in the support unit 21, even when the opening 22 a of the fixed support plate 22 and the opening 23 a of the sphere holding plate 23 are each set to have an elongated shape (rectangular or oval), the sphere holding plate 23 is used. The sphere 27 held in the inner wall of the fixed support plate 22 is prevented from moving into the region of the opening 22a.

  The means 33 for limiting the slidable range of the sphere holding plate will be described in detail. The state in which the sphere 27 is in contact with each of the opposing surfaces of the fixed support plate 22 and the slide support plate (FIG. 2:25) is maintained. Thus, the spherical holding plate 23 has a function of limiting the slidable range. That is, as shown in FIGS. 4 to 7, when the slidable range of the sphere holding plate 23 is limited, the sphere 27 does not move to the outer peripheral side from the outer peripheral edge of the fixed support plate 22, and the sliding support is performed. The outer periphery of the plate (FIG. 2:25) is prevented from moving to the outer peripheral side.

  The formation position and shape of the protrusion 35 of the fixed support plate 22 constituting the means 33 for limiting the slidable range of the sphere holding plate and the formation position and shape of the hole 36 of the sphere holding plate 23 are, for example, a computer-aided design system. It can be easily set by sliding the sphere holding plate on (CAD: computer-aided design) and confirming its slidable range.

  On the other hand, in the support unit 21, the slidable range of the sphere holding plate 23, that is, the rollable range of the sphere 27 is limited within a certain range by the sliding limit shaft 28 passing through the opening 23a of the sphere holding plate 23 as described above. However, if the means 33 for limiting the slidable range of the sphere holding plate is not provided, the sphere 27 held by the sphere holding plate 23 moves into the region of the opening 22 a of the fixed support plate 22. It cannot be prevented.

  In the following, referring to FIG. 8 and FIG. 9, the support unit that does not include means for limiting the slidable range of the sphere holding plate as described above, that is, the slidable sphere holding plate of the support unit not included in the present invention. The range will be described. 8 and 9, the sliding support plate of the support unit 121 and the parts on the back side of the fixed support plate 22 are not shown.

  FIG. 8 is a view showing a support unit 121 that is not provided with means for limiting the slidable range of the sphere holding plate, that is, is not included in the present invention in a state in which the sphere holding plate 23 is rotated.

  As shown in FIG. 8, due to the rotational movement of the sphere holding plate 23, a total of four spheres 27 out of the plurality of spheres held by the sphere holding plate 23 are within the region of the opening 22 a of the fixed support plate 22. Move to.

  FIG. 9 shows the support unit 121 of FIG. 8 in which the sliding limit shaft 28 moves to the corners of the openings 22a and 23a of the fixed support plate 22 and the sphere holding plate 23, and the sphere holding plate 23 moves to the sliding limit shaft. It is a figure shown in the state rotated about 28.

  As shown in FIG. 9, a larger number of the spheres 27 of the plurality of spheres held by the sphere holding plate 23 are fixed by the movement of the sliding limit shaft 28 and the rotational movement of the sphere holding plate 23. It moves into the region of the opening 22 a of the support plate 22, or moves to the outer peripheral side from the outer peripheral edge of the fixed support plate 22.

  Thus, in the support unit 121 that does not include means for limiting the slidable range of the sphere holding plate, that is, not included in the present invention, for example, the rotation of the sphere holding plate 23 as shown in FIGS. Due to the movement (sliding), the number of spheres sandwiched between the opposing surfaces of the fixed support plate 22 and the slide support plate (not shown) is reduced. Therefore, if the slide table is configured by supporting the table plate by a plurality of such support units 121, for example, when the spherical body holding plate 23 is rotated as shown in FIGS. Loadability decreases.

  The driving method of the table plate of the sliding table of the present invention is the same as that of a known sliding table, for example, the sliding table of Patent Document 1. In the following, the method for driving the table plate 13 of the sliding table 10 of FIG. 1 will be described using the driving devices 60a to 60c shown in FIGS. 1, 10, and 11 as representative examples.

  FIG. 10 is an enlarged view of a portion in the vicinity of the driving device 60a shown in FIG. 1, and FIG. 11 is a view of the portion in the vicinity of the driving device 60a in FIG.

  For example, a total of three drive devices 60a, 60b, and 60c are connected to the table plate 13. The configurations of the driving devices 60a, 60b, 60c are the same.

  The driving device 60 a is installed on the auxiliary table 12 fixed to the side surface of the base 11 of the sliding table 10.

  The drive device 60a is fitted around the screw shaft 63a with a rotation drive device (typical example, a stepping motor) 61, a screw shaft 63a connected to the rotation shaft 61a of the rotation drive device 61 via a coupling 62, and the screw shaft 63a. A feed screw 63 including a nut 63b is provided.

  The screw shaft 63a of the feed screw 63 is rotatably supported by rotary bearings 64a and 64b installed on the auxiliary base 12. On the other hand, two rods 65 are connected to the nut 63 b of the feed screw 63. Each rod 65 is supported by a linear motion bearing 66 installed on the auxiliary base 12 so as to be slidable in the length direction.

  A shaft body 68 is rotatably supported at the tips of the two rods 65 via a pair of rotary bearings 67. A linear guide 69 including a rail 69a and a slider 69b is supported on the shaft body 68 so as to be swingable. The rail 69 a of the linear guide 69 is fixed to the table plate 13 via the connection member 71.

  The rotation shaft 61a of the rotation drive device 61 is rotated together with the screw shaft 63a of the feed screw 63, and the nut 63b fitted to the screw shaft 63a is moved in the X-axis direction (right direction in the drawing), thereby causing the nut 63b to move. The connecting member 71 connected via the rod 65 can be moved in the X-axis direction. On the other hand, by rotating the rotation shaft 61a of the rotation driving device 61 in the direction opposite to the rotation direction, the connection member 71 is moved in the direction opposite to the X-axis direction (the left side in the drawing). Can be moved.

  Then, the table plate 13 can be slid in the X-axis direction by moving the connecting members 71 of the driving devices 60a and 60b shown in FIG. 1 by the same distance in the X-axis direction. At this time, the rail 69a of the linear guide 69 fixed to the connecting member 71 of the driving device 60c slides in the X-axis direction while being supported by the slider 69b. For this reason, the drive device 60c does not hinder the movement of the table plate 13 in the X-axis direction.

  Further, the table plate 13 can be slid in the Y-axis direction by moving the connecting member 71 of the driving device 60c in the Y-axis direction. At this time, the rail 69a of the linear guide 69 fixed to each connecting member 71 of the driving devices 60a and 60b slides in the Y-axis direction while being supported by the slider 69b. For this reason, the drive devices 60a and 60b do not hinder the movement of the table plate 13 in the Y-axis direction.

  Further, the table plate 13 is drawn in the drawing by moving the connecting member 71 of the driving device 60a in the direction opposite to the X-axis direction and the connecting member 71 of the driving device 60b in the X-axis direction at an equal distance. Can be rotated (slid) in the θ direction. At this time, the linear guide 69 fixed to each connecting member 71 of the driving devices 60a, 60b, and 60c is provided between the linear guide 69 and the rod 65 in accordance with the rotational movement angle of the table plate 13. It tilts and moves around the shaft body (FIG. 11: 68).

  In the sliding table 10, the sliding support plate 25 of each support unit 21 moves along the length direction of the opening 22 a of the fixed support plate 22 (generally the rotation direction of the table plate 13) along with the sliding limit shaft 28 at a long distance. Therefore, the rotatable angle of the table plate 13 with respect to the movable distance of the table plate 13 in the linear direction is large. Therefore, even when the size of the table plate 13 is large, the table plate 13 can be rotated at a large angle.

  In the sliding table of the present invention (having a sliding support plate having a sliding limit shaft), the number of support units is preferably in the range of 2 to 8, more preferably 3 or 4. It is particularly preferable that the number is individual.

  When the number of support units is four, as shown in FIGS. 1 and 3, the shape of the fixed support plate 22 of the support unit 21 is rectangular (for example, a square), and the fixed support plate 22. The rectangular (or oval) opening 22 a is preferably arranged such that the direction of the long diameter (length direction) is along the diagonal line of the fixed support plate 22.

  Accordingly, if the size of the fixed support plate 22 (that is, the size of the support unit 21) is the same, the length of the opening 22a can be increased, so that the sliding support plate 25 is moved along the opening 22a together with the sliding limit shaft 28. Can be moved over long distances.

  In the sliding table of the present invention, the lower side of the center point of the table plate can be further supported by a support unit different from the above support unit.

  As the support unit that supports the lower side of the center point of the table plate, for example, a support unit having the same configuration as the support unit 21 can be used, or a support unit having a configuration different from the support unit 21 ( For example, a fixed support plate opening or a spherical holding plate opening having a circular shape) may be used.

  In addition, as shown in FIG. 3, two means 33 for limiting the slidable range of the sphere holding plate by engaging each other with the sphere holding plate 23 and the fixed support plate 22 (or the sliding support plate 25). (Or three or more) are preferably provided. Thereby, it becomes easy to limit the range of sliding (particularly rotational movement) of the spherical body holding plate 23.

  More preferably, the means 33 for limiting the slidable range of the two sphere holding plates is provided at both outer positions in the width direction of the opening 23 a of the sphere holding plate 23. Thereby, the length of opening 22a, 23a with which both the fixed support plate 22 and the spherical body holding | maintenance board 23 were equipped can be lengthened.

  Similarly, each of the spherical body holding plate 24 and the sliding auxiliary plate 26 (or the fixed support plate 22) has two (or three or more) means 34 that engage with each other to limit the slidable range of the spherical holding plate. Preferably, the means 34 for limiting the slidable range of the two sphere holding plates is provided at both outer positions in the width direction of the opening 24a of the sphere holding plate 24, respectively. Further preferred.

  FIG. 12 is a cross-sectional view showing another configuration example of the sliding table (including the sliding support plate 25 having the sliding restriction shaft 28) according to the present invention.

  The sliding table 20 of FIG. 12 is configured such that the fixed support plate 22 of the support unit 31 and the base 11a are fixed via the spacer 38 so that the sliding auxiliary plate 26 does not contact the base 11a. The configuration is the same as that of the sliding table 10 shown in FIG.

  When using the support unit 31, it is not necessary to form the opening which accommodates the sliding assistance board 26 in the base 11a.

  FIG. 13 is a cross-sectional view showing a configuration example of the sliding table (including the fixed support plate 42 having the support column 48) of the present invention, and FIG. 14 is an exploded perspective view of the support unit 41 shown in FIG. . The configuration of the sliding table 30 in FIG. 13 is the same as the configuration of the sliding table 20 in FIG. 12 except that the configuration of the support unit 41 is different.

  The support unit 41 provided in the sliding table 30 includes a fixed support plate 42 having a support column 48 fixed to the base 11a on the lower side of the central portion, and an upper sphere having a plurality of spheres 27 held on the upper surface of the fixed support plate 42. The sliding support plate 45 is slidably disposed via the holding plate 43 and is fixed to a connection portion 47 extending downward from the peripheral edge of the sliding support plate 45. A sliding auxiliary plate 46 having an opening 46a at the center disposed under contact via a lower sphere holding plate 44 having an opening 44a at the held center.

  In the sliding table 30, the openings 44a and 46a provided in both the lower sphere holding plate 44 and the sliding auxiliary plate 46 of the support unit 41 have a long rectangular shape. Are arranged along the tangent line of the arc centering on the center point of the table plate 13, and the lower side of the sphere is prevented from moving into the region of the opening 46a of the sliding assist plate 46. The main feature is that each of the spherical body holding plate 44 and the sliding auxiliary plate 46 is provided with means 54 for engaging each other to limit the slidable range of the lower spherical body holding plate.

  As described above, the openings 44a and 46a provided in both the lower sphere holding plate 44 and the sliding auxiliary plate 46 of each support unit 41 are both rectangular (or oval) having a long diameter, and the long diameter thereof. Are arranged so as to be along the tangent line of the arc centering on the center point of the table plate 13, the sliding support plate 45 of each support unit 41 along with the sliding auxiliary plate 46 in the length direction of the opening 46 a ( It can move at a long distance (almost along the rotation direction of the table plate). Therefore, the sliding table 30 of the present invention also has a larger rotatable angle of the table plate 13 with respect to the movable distance of the table plate 13 in the linear direction as compared with the conventional sliding table.

  Further, the opening 44a of the lower sphere holding plate 44 and the opening 46a of the sliding assist plate 46 are both rectangular (or oval) having a long diameter, and the area of these openings 44a and 46a is increased. Even in such a case, the lower sphere holding plate 44 and the sliding auxiliary plate 46 (or the fixed support plate 42) are provided with means 54 for limiting the slidable range of the lower sphere holding plate. Since the side sphere holding plate 44 and the sliding assist plate 46 (or the fixed support plate 42) are engaged with each other, the slidable range of the lower sphere holding plate 44 is within the region of the opening 46a of the sliding assist plate 46. It is limited to the range that does not move to. Therefore, the sliding table 30 exhibits sufficient load resistance (in particular, load resistance against a load applied upward to the table plate 13).

  As shown in FIG. 14, the means 54 for limiting the slidable range of the lower sphere holding plate provided on each of the lower sphere holding plate 44 and the sliding auxiliary plate 46 is one plate (sliding auxiliary plate) 46. And a recess (notch) 37 provided on the other plate (lower sphere holding plate) 44.

  The means for limiting the slidable range of the lower sphere holding plate can also be constituted by a protrusion formed on the lower sphere holding plate and a recess provided on the sliding assist plate.

  The upper sphere holding plate 43 and the fixed support plate are maintained so that the sphere 27 held by the upper sphere holding plate 43 of the support unit 41 is kept in contact with each of the opposing surfaces of the fixed support plate 42 and the sliding support plate 45. 42 (or sliding support plate 45) is preferably provided with means 53 that engage with each other to limit the slidable range of the upper sphere holding plate.

  As shown in FIG. 14, the means 53 for limiting the slidable range of the sphere holding plate provided on each of the upper sphere holding plate 43 and the fixed support plate 42 is formed on one plate (fixed support plate) 42. And the hole 36 provided in the other plate (upper sphere holding plate) 43.

  In the support unit 41, for example, the peripheral edges of the sliding support plate 45 and the sliding auxiliary plate 46 are connected without a gap through the connecting portion 47, so that the fixed supporting plate 42 and the sliding support plate 45 or the sliding auxiliary plate 46 are connected. It is possible to suppress dust and dust from entering between.

  Also in the sliding table of the present invention (having a fixed support plate having a support column), the number of support units is preferably in the range of 2 to 8, more preferably 3 or 4. It is particularly preferable that the number is 4.

  When the number of support units is four, as shown in FIG. 14, the shape of the sliding auxiliary plate 46 of the supporting unit 41 is rectangular (for example, square), and the rectangular ( Alternatively, the oval openings 46 a are preferably arranged such that the direction of the long diameter (length direction) is along the diagonal line of the sliding assist plate 46.

  Thus, if the size of the sliding auxiliary plate 46 (that is, the size of the support unit 41) is the same, the length of the opening 46a can be increased, so that the sliding support plate 45 is moved along the opening 46a together with the sliding auxiliary plate 46. Can be moved over long distances.

  Further, as shown in FIG. 14, the lower sphere holding plate 44 and the sliding auxiliary plate 46 (or the fixed support plate 42) engage with each other to limit the slidable range of the lower sphere holding plate. It is preferable that 54 (or 3 or more) 54 are provided. This facilitates limiting the range of sliding (particularly rotational movement) of the lower sphere holding plate 44.

  It is more preferable that the means 54 for limiting the slidable range of the two lower sphere holding plates is provided at both outer positions in the width direction of the opening 44 a of the lower sphere holding plate 44. Accordingly, the lengths of the openings 44a and 46a provided in both the lower sphere holding plate 44 and the sliding assist plate 46 can be increased.

  Similarly, two (or three) means 53 for engaging the upper sphere holding plate 43 and the fixed support plate 42 (or sliding support plate 45) with each other to limit the slidable range of the upper sphere holding plate. It is preferable that the above is provided.

10, 20, 30 Sliding table 11, 11a Base 12 Auxiliary base 13 Table plate 13a Table plate center point 13b Arc 13c Tangent 21, 31 Support unit 22 Fixed support plate 22a Open 23, 24 Spherical holding plate 23a, 24a Open 25 Sliding support plate 26 Sliding auxiliary plate 27 Sphere 28 Sliding limit shaft 33 Means for limiting the slidable range of the sphere holding plate 34 Means for limiting the slidable range of the sphere holding plate 35 Projection 36 Hole portion 37 Recessed portion 38 Spacer 41 Support unit 42 Fixed support plate 43 Upper sphere holding plate 44 Lower sphere holding plate 44a Opening 45 Sliding support plate 46 Sliding auxiliary plate 46a Opening 47 Connection portion 48 Support column 53 Means for limiting the slidable range of the upper sphere holding plate 54 Lower sphere holding plate 60a, 60b, 60c for limiting the slidable range of the motor 61 Rotation Drive Unit 61a Rotating Shaft 62 Coupling 63 Feed Screw 63a Screw Shaft 63b Nut 64a, 64b Rotary Bearing 65 Rod 66 Linear Motion Bearing 67 Rotary Bearing 68 Shaft Body 69 Linear Guide 69a Rail 69b Slider 71 Connecting Member 121 Support Unit

Claims (8)

A table plate is slidably supported on a base through a plurality of support units arranged at intervals along the periphery of the table plate, and the support unit is fixed to the base. A fixed support plate having an opening at the center and a plurality of spheres held on the upper surface of the fixed support plate are slidably arranged via a sphere holding plate having an opening at the center, and fixed to the lower side of the center portion. A sliding table which is a support unit including a sliding support plate having a sliding limit shaft extending into an opening of the support plate,
The openings provided in both the fixed support plate and the sphere holding plate are both rectangular or oval with one long diameter, and the direction of the long diameter is tangent to the arc centering on the center point of the table plate. And the sphere holding plate and the fixed support plate or the sliding support plate are engaged with each other so that the sphere does not move in the area of the opening of the fixed support plate. Means for limiting the slidable range of the spherical body holding plate is provided.   Means for limiting the slidable range of the sphere holding plate provided on each of the sphere holding plate and the fixed support plate or the sliding support plate includes a protrusion formed on one plate and a recess or hole provided on the other plate. The sliding table according to claim 1, comprising a portion. A fixed support plate having an opening at the center fixed to the base, a plurality of spheres held on the upper surface of the fixed support plate, and slidably disposed via a sphere holding plate having an opening at the center. A support unit including a sliding support plate having a sliding restriction shaft extending inside the opening of the fixed support plate on the lower side,
The openings provided in both the fixed support plate and the sphere holding plate have a rectangular shape or an oval shape with one long diameter, and the sphere does not move within the opening area of the fixed support plate. As described above, the support unit is characterized in that each of the sphere holding plate and the fixed support plate or the sliding support plate is provided with means for engaging each other to limit the slidable range of the sphere holding plate.   Means for limiting the slidable range of the sphere holding plate provided on each of the sphere holding plate and the fixed support plate or the sliding support plate includes a protrusion formed on one plate and a recess or hole provided on the other plate. The support unit according to claim 3, comprising a portion. A table plate is slidably supported on a base through a plurality of support units arranged at intervals along the periphery of the table plate, and the support unit is fixed to the base. A fixed support plate having a central column below the central portion, a sliding support plate slidably disposed via an upper sphere holding plate having a plurality of spheres held on the upper surface of the fixed support plate, and the sliding It is fixed to a connecting portion that extends downward from the periphery of the support plate, and is arranged in contact via a lower sphere holding plate that has an opening in the center, with a plurality of spheres held on the lower surface of the fixed support plate A sliding table which is a support unit including a sliding auxiliary plate having an opening in the center,
The openings provided in both the lower sphere holding plate and the sliding assist plate are both rectangular or oval with one long diameter, and the long diameters are both arcs centered on the center point of the table plate. The lower sphere holding plate and the fixed support plate or the sliding auxiliary plate are mutually connected so that the sphere does not move in the region of the opening of the sliding auxiliary plate. A sliding table characterized in that a means for engaging and limiting a slidable range of the lower sphere holding plate is provided.   Means for limiting the slidable range of the lower sphere holding plate provided on each of the lower sphere holding plate and the fixed support plate or the sliding auxiliary plate is provided on the protrusion formed on one plate and the other plate. The sliding table according to claim 5, comprising a concave portion or a hole portion. A fixed support plate having a support column fixed to the base on the lower side of the central portion, and a sliding support disposed so as to be slidable via an upper sphere holding plate in which a plurality of spheres are held on the upper surface of the fixed support plate Fixed to a plate and a connecting portion extending downward from the periphery of the sliding support plate, and a plurality of spheres are held on the lower surface of the fixed support plate via a lower sphere holding plate having a center opening. A support unit including a sliding auxiliary plate having an opening at the center disposed in the center,
The openings provided in both the lower sphere holding plate and the sliding assist plate are rectangular or oval with one long diameter, and the sphere moves within the opening area of the sliding assist plate. The lower sphere holding plate and the fixed support plate or the sliding auxiliary plate are provided with means for engaging each other to limit the slidable range of the lower sphere holding plate. Support unit.   Means for limiting the slidable range of the lower sphere holding plate provided on each of the lower sphere holding plate and the fixed support plate or the sliding auxiliary plate is provided on the protrusion formed on one plate and the other plate. The support unit according to claim 7, comprising a concave portion or a hole portion.

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