JP2012208147A - Component for photoelectric conversion module, photoelectric conversion module and method for manufacturing component for photoelectric conversion module - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a component for a photoelectric conversion module that may be highly precisely aligned with a photoelectric conversion element and an insertion hole provided in a ferrule for inserting an optical fiber.SOLUTION: A component 30 for a photoelectric conversion module comprises: a resin ferrule 10 having an insertion hole 11 formed to penetrate the ferrule and have an opening on an element mounting face 12; and a photoelectric conversion element 20 mounted on the element mounting face 12 of the ferrule 10. A first alignment part 13 is provided on the element mounting face 12, a second alignment part 23 is provided on the photoelectric conversion element 20 in a position opposing the first alignment part 13, and the first alignment part 13 and the second alignment part 23 come into contact with each other for aligning the photoelectric conversion element 20 on the element mounting face 12.

Description

  The present invention relates to a photoelectric conversion module component that converts an optical signal and an electrical signal into each other, a photoelectric conversion module, and a method for manufacturing a photoelectric conversion module component.

  With the recent increase in capacity and speed of communication networks and the improvement in processing capacity of supercomputers, an increase in transmission speed has been demanded, and optical interconnection technology has attracted attention. In order to realize optical interconnection, a photoelectric conversion module as described in Patent Document 1 is known. This photoelectric conversion module has a photoelectric conversion element, an optical fiber, and an electrical wiring, and an electrical signal between devices in connection with a signal processing device such as an LSI or a connection between the signal processing device and an external interface such as a router. Is replaced with an optical signal to improve the transmission speed.

  Such a photoelectric conversion module is a light that transmits an optical signal to a photoelectric conversion element in a photoelectric conversion module component that includes a photoelectric conversion element that converts an optical signal and an electrical signal, and a ferrule to which the photoelectric conversion element is attached. Obtained by attaching fiber.

JP 2006-59867 A

  By the way, in such a photoelectric conversion module, high accuracy is required for alignment between the optical fiber and the photoelectric conversion element. When guiding an optical signal emitted from a light emitting element as a photoelectric conversion element to an optical fiber, or guiding an optical signal propagated through an optical fiber to a light receiving element as a photoelectric conversion element, the light receiving and emitting surfaces of the photoelectric conversion element and the optical fiber If the relative position with respect to the end face is shifted, an optical signal is lost between the two and the optical coupling efficiency is lowered.

  Accordingly, the present invention provides a photoelectric conversion module having a high positioning accuracy between a photoelectric conversion element and an optical fiber, a component for a photoelectric conversion module having a high positioning accuracy with respect to an insertion hole in a ferrule through which the photoelectric conversion element and the optical fiber are inserted, and manufacturing the same. It aims to provide a method.

In order to achieve the above object, the present invention provides the following.
(1) a resin ferrule having an insertion hole formed so as to open to the element mounting surface;
A photoelectric conversion element attached to the element mounting surface of the ferrule,
A first alignment portion is provided on the element mounting surface;
A second alignment portion is provided at a position facing the first alignment portion of the photoelectric conversion element;
The component for photoelectric conversion modules in which the said 1st position alignment part and the said 2nd position alignment part contact | abut, and the said photoelectric conversion element is positioned by the said element mounting surface.
(2) Metal electrodes are provided on the surfaces of the first alignment portion and the second alignment portion,
The photoelectric conversion module component according to (1), wherein the photoelectric conversion element and the element mounting surface are fixed by thermocompression bonding of the metal electrodes.
(3) The first alignment portion is formed to protrude or dent along the penetration direction of the insertion hole,
The second alignment portion is formed to be recessed or protruding along the optical axis of the photoelectric conversion element,
The component for a photoelectric conversion module according to (1) or (2), wherein the first alignment portion and the second alignment portion are coupled by fitting.
(4) The ferrule includes a side wall protruding from the element mounting surface toward the photoelectric conversion element so as to cover an outer peripheral surface adjacent to a surface of the photoelectric conversion element facing the element mounting surface. The component for a photoelectric conversion module according to any one of (1) to (3).
(5) The photoelectric conversion module component according to any one of (1) to (4);
A photoelectric conversion module comprising an optical fiber inserted through the insertion hole.

(6) a resin-made ferrule creating step of injection-molding a ferrule having a first alignment portion on the element mounting surface;
A photoelectric conversion element creating step of creating a photoelectric conversion element having a second alignment portion on a mounting surface provided with a light receiving and emitting surface;
The ferrule obtained in the ferrule creation step and the photoelectric conversion element creation step and the photoelectric conversion element are brought into contact with the first alignment portion and the second alignment portion so that the photoelectric conversion element is mounted on the element. A method for manufacturing a photoelectric conversion module component to be positioned on a surface.
(7) In the ferrule creation step, the ferrule is insert-molded so as to provide a metal electrode on the surface of the first alignment portion. The method for manufacturing a photoelectric conversion module component according to (6),
(8) In the said photoelectric conversion element preparation process, the said photoelectric conversion element forms the said 2nd alignment part by an etching, The manufacturing method of the components for photoelectric conversion modules as described in (6) or (7) characterized by the above-mentioned. .
(9) A metal electrode is provided on the surface of the first alignment portion of the ferrule and the surface of the second alignment portion of the photoelectric conversion element,
The process for producing a component for a photoelectric conversion module according to any one of (6) to (8), wherein the metal electrode of the photoelectric conversion element and the metal electrode on the element mounting surface are fixed by thermocompression bonding. Method.

  According to the photoelectric conversion module component of the present invention, the first alignment portion can be easily and accurately formed at the time of injection molding of the resin ferrule, and the second position can be formed by a semiconductor thin film forming technique such as etching at the time of creating the photoelectric conversion element. The mating portion can be formed with high accuracy. Therefore, it is possible to provide a photoelectric conversion module component in which the photoelectric conversion element is positioned with high accuracy on the element mounting surface by bringing the first alignment portion and the second alignment portion formed with high accuracy into contact with each other. it can.

  In addition, since the optical fiber is inserted into the insertion hole of the photoelectric conversion module component in which the photoelectric conversion element is accurately positioned on the element mounting surface in this way, the photoelectric conversion element and the optical fiber are aligned with high accuracy. can do. Therefore, a photoelectric conversion module having excellent optical coupling efficiency can be provided.

  Furthermore, according to the method for manufacturing a photoelectric conversion module according to the present invention, the light receiving / emitting surface of the photoelectric conversion element can be made into an optical fiber simply by bringing the first alignment portion and the second alignment portion into contact with each other. It is possible to align with high accuracy.

It is a sectional side view of the photoelectric conversion module which concerns on embodiment of this invention. It is explanatory drawing which shows the manufacturing method of the photoelectric conversion module which concerns on embodiment of this invention. It is a sectional side view of the photoelectric conversion module which concerns on the 1st modification of this invention. It is a sectional side view of the photoelectric conversion module which concerns on the 2nd modification of this invention.

  Hereinafter, a photoelectric conversion module component according to an embodiment of the present invention and a photoelectric conversion module using the same will be described with reference to the drawings.

  FIG. 1 is a side sectional view showing a photoelectric conversion module according to an embodiment of the present invention. As shown in FIG. 1, the photoelectric conversion module 1 includes a photoelectric conversion module component 30 according to the present invention. The photoelectric conversion module component 30 includes a resin ferrule 10 and a photoelectric conversion element 20 attached to the ferrule 10, and includes an optical fiber 40 attached to the photoelectric conversion module component 30.

  The ferrule 10 is a substantially rectangular parallelepiped member made of resin and formed by injection molding. One surface (the left side surface in FIG. 1) of the ferrule 10 is an element mounting surface 12 to which the photoelectric conversion element 20 is attached. An insertion hole 11 that opens to the element mounting surface 12 is formed through the ferrule 10. An optical fiber 40 is inserted and fixed in the insertion hole 11, and an optical signal can be transmitted / received to / from an external device via the optical fiber 40. The optical axis of the optical fiber 40 and the central axis of the insertion hole 11 are matched.

  The periphery of the opening of the insertion hole 11 in the element mounting surface 12 is a recess (first alignment portion) 13 that is recessed from the surface of the element mounting surface 12 toward the insertion hole 11. In other words, the opening on the element mounting surface 12 side of the insertion hole 11 has a tapered shape due to the concave portion 13 whose diameter increases toward the element mounting surface 12. The tapered recess 13 may be conical or pyramidal.

  As shown in FIG. 1, a conductive ferrule side electrode 14 is provided on the element mounting surface 12 including the recess 13 of the ferrule 10. One end of the ferrule side electrode 14 extends to the upper surface of the ferrule 10 (one of the surfaces parallel to the penetration direction of the insertion hole 11), and an external terminal 15 electrically connected to an external device is formed. Yes. Further, it is preferable that the other end of the ferrule side electrode 14 is continuously formed extending to the surface of the recess (first alignment portion) 13.

  The photoelectric conversion element 20 is a semiconductor element such as a light emitting element (surface emitting laser (VCSEL)) that emits an optical signal in response to an electric signal or a light receiving element (photodiode) that emits an electric signal in response to an optical signal. The photoelectric conversion element 20 is attached to the element mounting surface 12 such that a light receiving / emitting surface 21 that receives and emits an optical signal faces the opening of the insertion hole 11.

  A light emitting / receiving surface 21 is formed on the mounting surface 22 of the photoelectric conversion element 20. In the mounting surface 22, a tapered convex portion 23 (second alignment portion) is formed around the light receiving / emitting surface 21, and a region including the light receiving / emitting surface 21 is formed on the ferrule 10 side. The tapered convex portion 23 may be a conical shape or a pyramid shape.

  The convex portion 23 is formed at a position corresponding to the concave portion 13 of the ferrule 10 so that the light receiving / emitting surface 21 of the photoelectric conversion element 20 faces the end surface 41 of the optical fiber 40 when the photoelectric conversion element 20 is attached to the ferrule 10. ing. Further, the shape of the convex portion 23 is formed so as to abut on the shape of the concave portion 13. For example, when the concave portion 13 has a conical shape, the convex portion 23 also has a conical shape. When the concave portion 13 has a pyramid shape, the convex portion 23 preferably has a pyramid shape. In addition, the height of the concave portion 13 and the convex portion 23 can be formed to about 100 μm when an optical fiber having a strand diameter of 125 μm is used. This is because if the height of the concave portion 13 and the convex portion 23 is too small with respect to the optical fiber 40, it is difficult to improve the positioning accuracy of the photoelectric conversion element 20 with respect to the ferrule 10.

  Since the ferrule 10 is made of resin, the concave portion 13 can be accurately formed when the ferrule 10 is injection molded. Moreover, since the photoelectric conversion element 20 is a semiconductor element, the convex part 23 can be accurately produced using a semiconductor thin film processing technique when the light emitting / receiving surface 21 is produced. Therefore, when attaching the photoelectric conversion element 20 to the ferrule 10, the concave and convex portions 13 and the convex portions 23 that are formed with high accuracy are brought into contact with each other, so that the light emitting and receiving surface 21 of the photoelectric conversion element 20 is inserted into the insertion hole 11 and the light. Positioning can be easily performed with high accuracy so as to face the end face 41 of the fiber 40.

  As shown in FIG. 1, a conductive element side electrode 24 may be provided on the surface of the mounting surface 22 including the convex portion 23 of the photoelectric conversion element 20. When the photoelectric conversion element 20 is attached to the element mounting surface 12, the element side electrode 24 comes into contact with the ferrule side electrode 14 provided on the element mounting surface 12 of the ferrule 10 and is electrically connected. In this way, the element side electrode 24 extends to the light receiving / emitting surface 21, and an electric signal is input from the external terminal 15 to the light emitting surface 21 via the element side electrode 24, or the element side electrode 24 from the light receiving surface 21. An electric signal can be taken out from the external terminal 15 via

  Here, when the element side electrode 24 and the ferrule side electrode 14 are heated while being pressed against each other and are thermocompression-bonded (also referred to as diffusion bonding), the element mounting surface 12, the concave portion (first alignment portion) 13, and the mounting surface 22 and the photoelectric conversion element 20 can be attached to the element mounting surface 12 between the metal surfaces of the metal electrodes (ferrule side electrode 14 and element side electrode 24) provided on the surface of the convex portion (second alignment portion) 23. Therefore, it is preferable. Compared to the case where the element side electrode 24 and the ferrule side electrode 14 are bump-bonded, solder-connected, or using an adhesive, it is not affected by variations in the size of the bumps when thermocompression-bonded, or solder or adhesive This is because the positioning accuracy between the photoelectric conversion element 20 and the ferrule 10 is further improved.

  In addition, the element mounting surface 12 and the concave portion (first alignment portion) 13 of the concave portion 13 and the convex portion 23 and the metal electrode (ferrule side electrode) provided on the surface of the mounting surface 22 and the concave portion (second alignment portion) 23. 14 and the element side electrode 24) do not have to be brought into contact with each other. If a predetermined holding force capable of fixing the photoelectric conversion element 20 to the element mounting surface 12 is obtained, only a part of the ferrule side electrode 14 and the element side electrode 24 may be thermocompression bonded to each other.

  For example, when the ferrule side electrode 14 is continuously formed on the surface of the element mounting surface 12 and the first alignment portion 13 and the element side electrode 24 is continuously formed on the surfaces of the mounting surface 22 and the second alignment portion 23. In this case, only the metal electrodes formed on the surfaces of the first alignment portion 13 and the second alignment portion 23 may be thermocompression bonded. The ferrule 10 and the photoelectric conversion element 20 are electrically joined and can be fixed with a predetermined holding force.

<Method for producing photoelectric conversion module>
FIG. 2 is a process diagram showing a method for manufacturing the photoelectric conversion module 1 described above. First, as shown in FIG. 2A, a recess (first alignment portion) 13 is formed on the element mounting surface 12 of the ferrule 10. For example, resin is injected into a predetermined mold, and the ferrule 10 in which the tapered concave portion 13 is formed together with the ferrule side electrode 14 is created by insert molding which is a kind of injection molding. Thus, it is preferable to insert-mold so that a metal electrode is provided on the surface of the recess (first alignment portion) 13.

  Next, the photoelectric conversion element 20 provided with the convex portion (second alignment portion) 23 on the mounting surface 22 provided with the light emitting / receiving surface is created. By applying a known semiconductor thin film processing technique such as etching, the photoelectric conversion element 20 in which the tapered convex portion 23 is formed in advance is created. For example, the convex portion 23 can be formed by etching the periphery of the region including the light emitting / receiving surface 21 so as to leave a convex shape.

  Since both insert molding and semiconductor thin film processing techniques are already established techniques that can obtain dimensional accuracy on the order of microns, the light receiving / emitting surface 21 of the photoelectric conversion element 20 is an optical fiber when the recess 13 and the protrusion 23 are fitted together. The concave portion 13 and the convex portion 23 can be accurately formed at predetermined positions so as to face the end face 41 of the forty.

  Next, the concave portion (first alignment portion) 13 and the convex portion (second alignment portion) 23 are brought into contact with each other to position the photoelectric conversion element 20 on the element mounting surface 12 to obtain the photoelectric conversion module component 30. . As shown in FIG. 2B, the photoelectric conversion element 20 is aligned with the element mounting surface 12 of the ferrule 10 so that the convex part 23 of the photoelectric conversion element 20 contacts the concave part 13 of the ferrule 10, and both are fixed. Thus, the photoelectric conversion module component 30 is obtained. As shown in FIG. 2, when metal electrodes are provided on the surface of the first alignment portion 13 of the ferrule 10 and the surface of the second alignment portion 23 of the photoelectric conversion element 20, the photoelectric conversion element 20 is connected to the ferrule 10. It is preferable that the element side electrode 24 is heated while being pressed against the ferrule side electrode 14 and is thermocompression-bonded (also referred to as diffusion bonding).

  Thereafter, the optical fiber 40 is inserted and fixed to a predetermined position of the insertion hole 11 of the ferrule 10 to obtain the photoelectric conversion module 1. Thus, according to the photoelectric conversion module 1 according to the present embodiment, the optical fiber 40 is inserted into the insertion hole 11 of the photoelectric conversion module component 30 in which the photoelectric conversion element 20 is positioned with high accuracy on the element mounting surface 12. Therefore, the photoelectric conversion element 20 and the optical fiber 40 can be aligned with high accuracy. Therefore, the photoelectric conversion module 1 with excellent optical coupling efficiency can be provided.

  Therefore, while measuring the illuminance of the light emitted from the end of the optical fiber 40 opposite to the light emitting element 20 while causing the light emitting element (photoelectric conversion element) 20 to emit light, Compared to the case where the photoelectric conversion module 20 is attached to the element mounting surface 12, or the case where the photoelectric conversion element 20 is attached while referring to the mark as a reference point attached to the element mounting surface 12, the photoelectric conversion module according to the present embodiment. According to the manufacturing method, the photoelectric conversion element 20 can be attached to the element mounting surface 12 with high accuracy. Moreover, according to the manufacturing method of the photoelectric conversion module 1 which concerns on this embodiment, special assembly equipment, such as a camera which observes an illumination intensity measuring apparatus and a mark, is unnecessary, and can reduce manufacturing cost.

  Furthermore, according to the method for manufacturing the photoelectric conversion module component 30 according to this embodiment, the photoelectric conversion element 20 is fixed to the ferrule 10 by thermocompression bonding between the ferrule side electrode 14 and the element side electrode 24. Therefore, compared with the case where the ferrule side electrode 14 and the element side electrode 24 are fixed by bump connection, solder connection, or adhesive, according to the manufacturing method of the photoelectric conversion module 1 according to the present embodiment, the size of the bump is increased. Therefore, the light receiving / emitting surface 21 of the photoelectric conversion element 20 can be made to face the end surface 41 of the optical fiber 40 with higher accuracy. it can.

  In the above-described embodiment, the example in which the optical fiber 40 is inserted into the insertion hole 11 of the ferrule 10 after the photoelectric conversion element 20 is mounted on the element mounting surface 12 has been described, but the optical fiber 40 is inserted into the insertion hole 11 of the ferrule 10. It goes without saying that the photoelectric conversion element 20 may be mounted on the element mounting surface 12 after being inserted into the element mounting surface 12.

  In the above-described example, the example in which the photoelectric conversion element 20 is fixed to the ferrule 10 by thermocompression bonding after the concave portion 13 and the convex portion 23 are fitted is described. If the concave portion 13 and the convex portion 23 come into contact with each other so that positioning can be performed between them, it is not necessary to fix the photoelectric conversion element 20 to the ferrule 10 with the concave portion 13 and the convex portion 23. For example, after positioning the photoelectric conversion element 20 with respect to the ferrule 10 by the concave portion 13 and the convex portion 23, an adhesive or the like is applied to a portion other than the concave portion 13 and the convex portion 23 to fix the photoelectric conversion element 20 to the ferrule 10. May be.

<Modification>
3 and 4 are side views of a photoelectric conversion module according to a modification of the present invention. The photoelectric conversion module 1a according to this modification includes the components 30a and 30b for the photoelectric conversion module of the present invention, and has the same configuration as that of the above embodiment except that the shape of the concave portion 13 and the convex portion 23 is different from that of the above embodiment. is there. In FIG. 3, the same components as those in the above embodiment are denoted by the same reference numerals as those in the above embodiment, and detailed description thereof is omitted.

  On the element mounting surface 12 of the photoelectric conversion module component 30a shown in FIG. 3, a tapered convex portion (first alignment portion) 13a is formed so that the vicinity of the opening of the insertion hole 11 protrudes toward the photoelectric conversion element 20 side. Has been. Further, a tapered recess (second alignment portion) 23a is formed on the mounting surface 22 of the photoelectric conversion element 20 so that a region including the light receiving / emitting surface 21 is recessed so as to correspond to the convex shape of the convex portion 13a. ing.

  The concave portions 13a and 23a having such shapes can be easily and accurately formed by insert molding and semiconductor thin film processing technology. Therefore, similarly to the above-described embodiment, according to the present modification, the photoelectric conversion element 20 can be positioned on the ferrule 10 with high accuracy when the concave portions 13a and 23a formed with high accuracy are brought into contact with each other.

  Further, the shapes of the first alignment portions 13 and 13 a and the second alignment portions 23 and 23 a are not limited to the cone shape as long as the photoelectric conversion element 20 can be positioned on the ferrule 10. For example, the first alignment portions 13 and 13a and the second alignment portions 23 and 23a may be formed by a protruding convex portion 23b and a concave portion 13b fitted therewith as shown in FIG. Of course. 4, the photoelectric conversion element 20 can be accurately positioned on the element mounting surface 12 only by bringing the first alignment portion 13a and the second alignment portion 23a into contact with each other as described above. it can.

  As shown in FIG. 4, in the photoelectric conversion module component 30 b according to the modification of the present invention, the first alignment portion 13 b is formed to be recessed along the penetration direction of the insertion hole 11, and the second alignment portion 23b protrudes along the optical axis of the photoelectric conversion element 20, and the first alignment portion 13b and the second alignment portion 23b are coupled by fitting. According to the photoelectric conversion module 1b including such a photoelectric conversion module component 30b, the second positioning portion 23b is fitted to the first positioning portion 13b and the photoelectric conversion element 20 is mounted on the element mounting surface 12 of the ferrule 10. In some cases, the photoelectric conversion element 20 and the ferrule 10 move relative to each other in the optical axis direction, so that the optical axes of the photoelectric conversion element 20 and the ferrule 10 can be matched with each other without tilting, thereby further improving the light coupling efficiency. Needless to say, the first alignment portion 13b may protrude and the second alignment portion 23b may be recessed.

  As shown in FIGS. 3 and 4, the side wall 16 protruding toward the photoelectric conversion element 20 is extended to the outer periphery of the element mounting surface 12 to cover the outer peripheral surface adjacent to the mounting surface 22 of the photoelectric conversion element 20. Also good. Thus, when the side wall 16 covers the outer periphery of the photoelectric conversion element 20, it is possible to prevent external force from acting on the photoelectric conversion element 20, and to reliably prevent the photoelectric conversion element 20 from falling off the ferrule 10. In addition, dust does not easily enter between the light emitting / receiving surface 21 and the optical fiber 40. Of course, such a side wall 16 can also be applied to the above-described embodiment of FIG.

  Moreover, it is preferable that the outer peripheral surface of the ferrule side electrode 14 is covered with the ferrule 10 except the area | region corresponded to 1st positioning part 13a, 13b. Further, since an electric signal is transmitted to the photoelectric conversion element 20 through the ferrule side electrode 14, it is preferable that the ferrule side electrode 14 is as short as possible in consideration of high frequency characteristics. Therefore, as shown in FIGS. 3 and 4, a portion other than the region corresponding to the first positioning portions 13 a and 13 b of the ferrule-side electrode 14 is formed in a flat plate shape, and its end portion is exposed from the ferrule 10 to be external terminals 15. It is preferable that

  1: photoelectric conversion module, 10: ferrule, 11: insertion hole, 12: element mounting surface, 13, 13b: concave portion (first alignment portion), 13a: convex portion (first alignment portion), 14: ferrule side Electrode, 15: External terminal, 16: Side wall, 20: Photoelectric conversion element, 21: Light emitting / receiving surface, 22: Mounting surface, 23, 23b: Convex part (second alignment part), 23a: Concave part (second alignment) Part), 24: element side electrode, 30: parts for photoelectric conversion module, 40: optical fiber, 41: end face

Claims (9)

A resin ferrule having an insertion hole formed so as to open to the element mounting surface;
A photoelectric conversion element attached to the element mounting surface of the ferrule,
A first alignment portion is provided on the element mounting surface;
A second alignment portion is provided at a position facing the first alignment portion of the photoelectric conversion element;
The component for photoelectric conversion modules in which the said 1st position alignment part and the said 2nd position alignment part contact | abut, and the said photoelectric conversion element is positioned by the said element mounting surface. Metal electrodes are provided on the surfaces of the first alignment portion and the second alignment portion,
The photoelectric conversion module component according to claim 1, wherein the photoelectric conversion element and the element mounting surface are fixed by thermocompression bonding of the metal electrodes. The first alignment portion is formed to protrude or dent along the penetration direction of the insertion hole,
The second alignment portion is formed to be recessed or protruding along the optical axis of the photoelectric conversion element,
The photoelectric conversion module component according to claim 1, wherein the first alignment portion and the second alignment portion are coupled by fitting.   The said ferrule is provided with the side wall which protrudes from the said element mounting surface to the said photoelectric conversion element side so that the outer peripheral surface adjacent to the surface facing the said element mounting surface of the said photoelectric conversion element may be covered. Item for a photoelectric conversion module according to any one of Items 1 to 3. The photoelectric conversion module component according to any one of claims 1 to 4,
A photoelectric conversion module comprising an optical fiber inserted through the insertion hole. A resin-made ferrule creating step of injection-molding a ferrule having a first alignment portion on the element mounting surface;
A photoelectric conversion element creating step of creating a photoelectric conversion element having a second alignment portion on a mounting surface provided with a light receiving and emitting surface;
The ferrule obtained in the ferrule creation step and the photoelectric conversion element creation step and the photoelectric conversion element are brought into contact with the first alignment portion and the second alignment portion so that the photoelectric conversion element is mounted on the element. A method for manufacturing a photoelectric conversion module component to be positioned on a surface.   The method for manufacturing a component for a photoelectric conversion module according to claim 6, wherein in the ferrule creating step, the ferrule is insert-molded so that a metal electrode is provided on a surface of the first alignment portion.   In the said photoelectric conversion element preparation process, the said photoelectric conversion element forms the said 2nd alignment part by an etching, The manufacturing method of the components for photoelectric conversion modules of Claim 6 or 7 characterized by the above-mentioned. A metal electrode is provided on the surface of the first alignment portion of the ferrule and the surface of the second alignment portion of the photoelectric conversion element,
The method for manufacturing a component for a photoelectric conversion module according to any one of claims 6 to 8, wherein the metal electrode of the photoelectric conversion element and the metal electrode on the element mounting surface are fixed by thermocompression bonding.

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