JP2012202799A5

JP2012202799A5 -

Info

Publication number: JP2012202799A5
Application number: JP2011067201A
Authority: JP
Filing date: 2011-03-25
Publication date: 2014-03-13

Description

請求項３に記載の発明は、請求項１又は２に記載の振動型ジャイロにおいて、前記検出質量体の突起部に対向配置され、気体のダンピング力及び前記検出質量体の共振周波数を調整するための調整用電極をさらに有する、振動型ジャイロを提供する。 According to a third aspect of the present invention, there is provided the vibratory gyroscope according to the first or second aspect, wherein the gyroscope is arranged opposite to the protrusion of the detection mass body and adjusts a gas damping force and a resonance frequency of the detection mass body. A vibrating gyroscope further comprising the adjustment electrode is provided.

請求項４に記載の発明は、第２の支持梁により支持基板に固定され、角速度により発生するコリオリ力よって平面内の一方向に回転励振されるように構成された１つの回転検出質量体と、前記平面内の一方向に駆動振動できるように、前記回転検出質量体の内部に第１の支持梁によって懸垂支持された左右の駆動質量体と、前記回転検出質量体の突起部に対向配置され、気体のダンピング力及び前記回転検出質量体の共振周波数を調整するための調整用電極と、を備え、前記左右の駆動質量体は、互いに逆相で振動する逆相振動モードを有するように、前記駆動振動の方向に弾性を有する第１の連結ばねによって互いに連結される、
振動型ジャイロを提供する。 According to a fourth aspect of the present invention, there is provided one rotation detection mass body fixed to a support substrate by a second support beam and configured to be rotationally excited in one direction in a plane by a Coriolis force generated by an angular velocity. The left and right driving mass bodies suspended and supported by a first support beam inside the rotation detection mass body and the protrusions of the rotation detection mass body are arranged so as to be able to drive and vibrate in one direction in the plane. An adjustment electrode for adjusting a gas damping force and a resonance frequency of the rotation detection mass body, and the left and right drive mass bodies have a reverse phase vibration mode in which they vibrate in opposite phases to each other. Are coupled to each other by a first coupling spring having elasticity in the direction of the drive vibration,
Providing a vibrating gyroscope.

Claims

Left and right detection mass bodies fixed to a support substrate by a second support beam and configured to be excited in one direction in a plane by a Coriolis force generated by an angular velocity;
A first support is provided in each of the left and right detection mass bodies so that driving vibration can be performed in a direction in a plane perpendicular to the direction in which the left and right detection mass bodies are excited by applying an angular velocity having a vector orthogonal to the plane. Left and right drive mass bodies suspended by beams, and
The left and right driving mass bodies are connected to each other by an elastic first connecting spring so as to have anti-phase vibration modes that vibrate in mutually opposite phases,
The first coupling spring is orthogonal to the driving vibration direction so that a spring region having elasticity in the driving vibration direction of the left and right driving mass bodies and a mode in which the left and right detection mass bodies are excited in opposite phases are provided. It has a spring region having elasticity also in the detection direction, and is formed so as to constitute substantially the same plane as the drive mass body and the detection mass body.
Vibration type gyro.

2. The vibrating gyroscope according to claim 1, wherein the left and right detection mass bodies are coupled to each other by a second coupling spring having elasticity in a detection vibration direction so as to have a reverse phase vibration mode that vibrates in opposite phases.

The vibrating gyroscope according to claim 1, further comprising an adjustment electrode that is disposed to face the protrusion of the detection mass body and adjusts a gas damping force and a resonance frequency of the detection mass body.

One rotation detection mass body fixed to a support substrate by a second support beam and configured to be rotationally excited in one direction in a plane by a Coriolis force generated by an angular velocity;
Left and right drive mass bodies suspended and supported by first support beams inside the rotation detection mass body so as to be able to drive and vibrate in one direction in the plane;
An adjustment electrode that is disposed opposite to the protrusion of the rotation detection mass body and adjusts the gas damping force and the resonance frequency of the rotation detection mass body,
The left and right drive mass bodies are connected to each other by a first connection spring having elasticity in the direction of the drive vibration so as to have a reverse phase vibration mode that vibrates in opposite phases.
Vibration type gyro.

The vibrating gyroscope according to claim 1, wherein the detection mass body or the rotation detection mass body has a honeycomb structure including a plurality of through holes extending in a thickness direction of the support substrate.