JP2012195606A - Exposure device, device manufacturing method, and cleaning method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an exposure device capable of preventing deterioration in performance caused by contamination.SOLUTION: An exposure device exposes a substrate to exposure light through first liquid. The exposure device comprises: a first collecting hole for collecting at least part of the first liquid during exposure of the substrate; and a second collecting hole for collecting second liquid supplied so as to come into contact with a predetermined member during cleaning of the predetermined member brought into contact with the first liquid. The exposure device performs collecting operation of the second collecting hole during the cleaning while stopping collecting operation of the first collecting hole.

Description

  The present invention relates to an exposure apparatus that exposes a substrate, a device manufacturing method, and a cleaning method for the exposure apparatus.

  In an exposure apparatus used in a photolithography process, an immersion space is formed so as to fill an optical path space of exposure light with a liquid as disclosed in the following patent document, and the substrate is exposed through the liquid. An exposure apparatus is known.

International Publication No. 99/49504 JP 2004-289127 A

  In an immersion exposure apparatus, there is a possibility that a member that comes into contact with the liquid may be contaminated. If the member is left in a contaminated state, the contamination increases, the performance of the exposure apparatus deteriorates, and the substrate is improved. Exposure may not be possible.

  It is an object of the present invention to provide an exposure apparatus that can suppress performance degradation due to contamination, and a device manufacturing method that uses the exposure apparatus. Another object of the present invention is to provide a cleaning method that can satisfactorily clean the exposure apparatus.

  According to the first aspect of the present invention, there is provided an exposure apparatus that exposes a substrate with exposure light through a first liquid, and a first recovery port that recovers at least a part of the first liquid during exposure of the substrate; A second recovery port for recovering the second liquid supplied so as to come into contact with the predetermined member when cleaning the predetermined member in contact with the first liquid, and stopping the recovery operation of the first recovery port during cleaning In this state, an exposure apparatus is provided that executes the recovery operation of the second recovery port.

  According to a second aspect of the present invention, there is provided a device manufacturing method including exposing a substrate using the exposure apparatus of the above aspect and developing the exposed substrate.

  According to a third aspect of the present invention, there is provided a cleaning method for an exposure apparatus that exposes a substrate with exposure light through a first liquid, wherein at least a part of the first liquid is removed from the first recovery port during exposure of the substrate. The second liquid is supplied so as to come into contact with the predetermined member during the cleaning of the predetermined member in contact with the first liquid, and the liquid recovery operation of the first recovery port is stopped during the cleaning. A cleaning method including recovering at least a part of the second liquid from a second recovery port different from the first recovery port.

  According to the present invention, it is possible to suppress the deterioration of the performance of the exposure apparatus due to contamination and to expose the substrate satisfactorily.

It is a schematic block diagram which shows the exposure apparatus which concerns on 1st Embodiment. It is a sectional side view which shows the vicinity of a nozzle member. It is the figure which looked at the nozzle member from the lower part. It is a figure for demonstrating an example of the cleaning method which concerns on 1st Embodiment. It is a figure for demonstrating an example of the cleaning method which concerns on 2nd Embodiment. It is a figure for demonstrating an example of the cleaning method which concerns on 3rd Embodiment. It is a figure for demonstrating an example of the cleaning method which concerns on 4th Embodiment. It is a flowchart figure which shows an example of the manufacturing process of a microdevice.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings, but the present invention is not limited thereto. In the following description, an XYZ orthogonal coordinate system is set, and the positional relationship of each member will be described with reference to this XYZ orthogonal coordinate system. A predetermined direction in the horizontal plane is defined as the X-axis direction, a direction orthogonal to the X-axis direction in the horizontal plane is defined as the Y-axis direction, and a direction orthogonal to the X-axis direction and the Y-axis direction (that is, the vertical direction) is defined as the Z-axis direction. Further, the rotation (inclination) directions around the X axis, Y axis, and Z axis are the θX, θY, and θZ directions, respectively.

<First Embodiment>
A first embodiment will be described. FIG. 1 is a schematic block diagram that shows an exposure apparatus EX according to the first embodiment. In this embodiment, the exposure apparatus EX holds a substrate P as disclosed in, for example, US Pat. No. 6,897,963, European Patent Application Publication No. 1,713,113, and the like. As an example, the exposure apparatus includes a movable substrate stage 2 and a movable measurement stage 3 that is mounted with a measuring instrument that can perform predetermined measurement related to exposure without holding the substrate P. explain.

  In FIG. 1, an exposure apparatus EX includes a mask stage 1 that can move while holding a mask M, a substrate stage 2 that can move while holding a substrate P, and a predetermined measurement related to exposure without holding the substrate P. A measurement stage 3 that can move independently of the substrate stage 2, a first drive system 4 that moves the mask stage 1, and a first stage that moves the substrate stage 2 and the measurement stage 3. 2 driving system 5, interferometer system 6 including laser interferometers 6A and 6B for measuring position information of each stage, illumination system IL for illuminating mask M with exposure light EL, and mask illuminated with exposure light EL A projection optical system PL that projects an image of an M pattern onto the substrate P and a control device 7 that controls the operation of the entire exposure apparatus EX are provided.

  Here, the substrate P is an exposure substrate for manufacturing a device, and includes a substrate in which a film such as a photosensitive material (photoresist) is formed on a base material such as a semiconductor wafer such as a silicon wafer. The mask M includes a reticle on which a device pattern projected onto the substrate P is formed. In the present embodiment, a transmissive mask is used as a mask, but a reflective mask can also be used.

  The exposure apparatus EX of the present embodiment is an immersion exposure apparatus that exposes the substrate P with the exposure light EL via the exposure liquid LQ, and at least a part of the optical path space of the exposure light EL is filled with the exposure liquid LQ. As described above, the first immersion space LS1 is formed with the exposure liquid LQ. In the present embodiment, the exposure light EL between the terminal optical element 11 closest to the image plane of the projection optical system PL and the object facing the terminal optical element 11 among the plurality of optical elements of the projection optical system PL. The first immersion space LS1 is formed so that the optical path space is filled with the exposure liquid LQ. The terminal optical element 11 has a lower surface (exit surface) 11A that emits the exposure light EL toward the image plane of the projection optical system PL, and the first immersion space LS1 includes the lower surface 11A of the terminal optical element 11 and its lower surface 11A. It is formed so that the optical path space of the exposure light EL between the lower surface 11A of the last optical element 11 and the object facing it is filled with the exposure liquid LQ. The exposure apparatus EX exposes the substrate P by irradiating the substrate P with the exposure light EL through the exposure liquid LQ.

  The exposure apparatus EX of the present embodiment includes a nozzle member 8 that can form the first immersion space LS1. The nozzle member 8 is disposed in the vicinity of the last optical element 11. The nozzle member 8 has a lower surface 8A that can face an object disposed at a position facing the lower surface 11A of the last optical element 11. In the present embodiment, the first immersion liquid LQ is held by the exposure liquid LQ held between the terminal optical element 11 and the nozzle member 8 and the object disposed at a position facing the terminal optical element 11 and the nozzle member 8. A space LS1 is formed.

  The object that can face the terminal optical element 11 and the nozzle member 8 includes an object that can move within a predetermined region including a position facing the lower surface 11A of the terminal optical element 11. That is, the object that can face the terminal optical element 11 and the nozzle member 8 includes an object that can move on the exit side of the terminal optical element 11 (the image plane side of the projection optical system PL). In the present embodiment, the object movable on the exit side of the last optical element 11 includes at least one of the substrate stage 2, the substrate P held on the substrate stage 2, and the measurement stage 3.

  In the present embodiment, the second immersion liquid is cleaned with the cleaning liquid LC between the terminal optical element 11 and the nozzle member 8 and the object facing the terminal optical element 11 and the nozzle member 8 at a predetermined timing. A space LS2 is formed. By forming the second immersion space LS2 with the cleaning liquid LC, the surface of the member in contact with the cleaning liquid LC in the second immersion space LS2 can be cleaned.

  In the present embodiment, an immersion space is formed so that a partial region (local region) of the surface of the object is covered with the liquid, and between the surface of the object and the lower surface 8A of the nozzle member 8. A liquid interface (meniscus, edge) is formed. During the exposure of the substrate P, the first immersion space LS1 is formed so that a part of the region on the substrate P including the projection region AR of the projection optical system PL is covered with the exposure liquid LQ. That is, the liquid immersion exposure apparatus EX of the present embodiment employs a local liquid immersion method.

  Note that the optical path space of the exposure light EL described above is a space including an optical path through which the exposure light EL passes. The immersion space is a space filled with liquid. In the following description, the exposure liquid LQ is appropriately referred to as a first liquid LQ, and the cleaning liquid LC is appropriately referred to as a second liquid LC.

The illumination system IL illuminates a predetermined illumination area on the mask M with exposure light EL having a uniform illuminance distribution. As the exposure light EL emitted from the illumination system IL, for example, far ultraviolet light (DUV light) such as a bright line (g line, h line, i line) and KrF excimer laser light (wavelength 248 nm) emitted from a mercury lamp, Vacuum ultraviolet light (VUV light) such as ArF excimer laser light (wavelength 193 nm) and F ₂ laser light (wavelength 157 nm) is used. In the present embodiment, ArF excimer laser light is used as the exposure light EL.

  The mask stage 1 is movable in the three directions of the X axis, the Y axis, and the θZ direction by the first drive system 4 while holding the mask M. The first drive system 4 includes an actuator such as a linear motor, for example. The position information of the mask stage 1 (mask M) is measured by the laser interferometer 6A of the interferometer system 6. The laser interferometer 6 </ b> A uses the measurement mirror 1 </ b> F provided on the mask stage 1 to measure position information regarding the X axis, Y axis, and θZ direction of the mask stage 1. The control device 7 controls the position of the mask stage 1 (mask M) using the first drive system 4 based on the measurement result of the interferometer system 6.

  The projection optical system PL projects an image of the pattern of the mask M onto the substrate P at a predetermined projection magnification. The optical elements of the projection optical system PL are held by a lens barrel PK. The projection optical system PL of the present embodiment is a reduction system whose projection magnification is, for example, 1/4, 1/5, 1/8 or the like. Note that the projection optical system PL may be either an equal magnification system or an enlargement system. In the present embodiment, the optical axis AX of the projection optical system PL is parallel to the Z-axis direction. The projection optical system PL may be any of a refractive system that does not include a reflective optical element, a reflective system that does not include a refractive optical element, and a catadioptric system that includes a reflective optical element and a refractive optical element. Further, the projection optical system PL may form either an inverted image or an erect image.

  The substrate stage 2 includes a stage main body 21 and a substrate table 22 mounted on the stage main body 21. The substrate table 22 includes a holding unit 23 that detachably holds the substrate P. The holding unit 23 holds the substrate P so that the surface of the substrate P and the XY plane are substantially parallel. The substrate table 22 has a first recess 22R, and the holding unit 23 is disposed in the first recess 22R. An upper surface 24 of the substrate table 22 is disposed around the first recess 22R. The upper surface 24 of the substrate table 22 is disposed around the surface of the substrate P held by the holding unit 23. The upper surface 24 is substantially flat and is disposed in substantially the same plane (in the XY plane) as the surface of the substrate P held by the holding unit 23. That is, the upper surface 24 of the substrate table 22 and the surface of the substrate P held by the holding unit 23 are substantially flush. The surface of the substrate P held by the holding unit 23 and the upper surface 24 of the substrate table 22 can face the lower surface 11A of the last optical element 11 and the lower surface 8A of the nozzle member 8.

  The measurement stage 3 includes a stage main body 31 and a measurement table 32 mounted on the stage main body 31. At least a part of the measuring instrument is mounted on the measurement table 32. The measuring instrument includes a reference member on which a reference mark is formed and various photoelectric sensors. The upper surface 34 of the measurement table 32 is substantially flat and substantially parallel to the XY plane. The upper surface 34 of the measurement table 32 can be opposed to the lower surface 11A of the last optical element 11 and the lower surface 8A of the nozzle member 8.

  The second drive system 5 can move each of the substrate stage 2 and the measurement stage 3. The second drive system 5 includes a coarse movement system 13 that moves the stage main bodies 21 and 31 on the base member BP, and a fine movement system 14 that moves the tables 22 and 32 on the stage main bodies 21 and 31. Yes.

  The coarse motion system 13 includes an actuator such as a linear motor, and can move the stage bodies 21 and 31 on the base member BP in the X-axis, Y-axis, and θZ directions. As the stage main bodies 21 and 31 are moved in the X-axis, Y-axis, and θZ directions by the coarse movement system 13, the tables 22 and 32 mounted on the stage main bodies 21 and 31 are also moved to the stage main bodies. It moves in the X axis, Y axis, and θZ directions together with 21 and 31.

  The fine movement system 14 includes an actuator 14V such as a voice coil motor, which is interposed between the stage bodies 21 and 31 and the tables 22 and 32, and a measurement device (not shown) that measures the drive amount of each actuator 14V. The tables 22 and 32 on the stage main bodies 21 and 31 are movable in at least the Z-axis, θX, and θY directions. The fine movement system 14 can move (finely move) the tables 22 and 32 on the stage main bodies 21 and 31 in the X-axis, Y-axis, and θZ directions.

  By the second drive system 5 including the coarse movement system 13 and the fine movement system 14, the substrate table 22 holds the substrate P in the holding portion 23, and the X axis, Y axis, Z axis, θX, θY, and θZ directions. It is possible to move in six directions. Similarly, the measurement table 32 can be moved in the six directions of the X axis, the Y axis, the Z axis, the θX, the θY, and the θZ directions by the second drive system 5 in a state where the measuring instrument is mounted.

  The position information of the substrate table 22 (substrate P) and the position information of the measurement table 32 are measured by the laser interferometer 6B of the interferometer system 6. The laser interferometer 6B measures position information regarding the X-axis, Y-axis, and θZ directions of the tables 22 and 32 using the measurement mirrors 22F and 32F of the tables 22 and 32, respectively. Further, the surface position information (position information regarding the Z axis, θX, and θY directions) of the surface of the substrate P held by the holding unit 23 of the substrate table 22 and the surface position information of a predetermined area on the upper surface of the measurement table 32 are , Detected by a focus leveling detection system (not shown). The control device 7 uses the second drive system 5 to control the position of the substrate table 22 (substrate P) based on the measurement result of the laser interferometer 6B of the interferometer system 6 and the detection result of the focus / leveling detection system. In addition, the position of the measurement table 32 is controlled.

  FIG. 2 is a side sectional view showing the vicinity of the substrate table 22 and the nozzle member 8, and FIG. 3 is a view of the nozzle member 8 as viewed from the lower side (−Z side). 2 and 3, the nozzle member 8 is disposed in the vicinity of the terminal optical element 11. The nozzle member 8 is an annular member and is disposed around the terminal optical element 11 (the optical path space of the exposure light EL). For example, when the first immersion space LS1 is formed on the substrate P, the first liquid LQ is held between the lower surface 11A of the last optical element 11 and the lower surface 8A of the nozzle member 8 and the surface of the substrate P.

  The nozzle member 8 has a supply port 81 capable of supplying the first liquid LQ and a first recovery port 82 capable of recovering the first liquid LQ. The first recovery port 82 is disposed on a part of the lower surface 8 </ b> A of the nozzle member 8. A plate-like porous member (mesh member) 82M is disposed in the first recovery port 82. The lower surface 8A of the nozzle member 8 includes the lower surface of the porous member 82M. Note that the porous member 82M disposed in the first section of the different-type port 82 is not limited to a plate-shaped mesh member, and a sintered metal, a foamed metal, or the like in which a plurality of pores are formed can also be used. The first recovery port 82 is disposed around the optical path space of the exposure light EL. An opening 8K is formed in a part of the nozzle member 8 that faces the lower surface 11A of the last optical element 11. The exposure light EL emitted from the lower surface 11A of the last optical element 11 passes through the opening 8K and is irradiated onto the substrate P.

  Further, the nozzle member 8 has a second recovery port 182 different from the first recovery port 82. The second recovery port 182 is disposed on a part of the lower surface 8 </ b> A of the nozzle member 8. The second recovery port 182 is disposed outside the first recovery port 82 with respect to the optical path space of the exposure light EL. The second recovery port 182 is disposed around the optical path space of the exposure light EL.

  In the present embodiment, the lower surface 8A of the nozzle member 8 includes a flat surface 8R disposed around the opening 8K, and the first recovery port 82 is disposed around the flat surface 8R. The second recovery port 182 is disposed around the first recovery port 82. In the present embodiment, the outer shape of the flat surface 8R in the XY plane is a rectangular shape. The opening 8K has a rectangular shape (slit shape) that is long in the X-axis direction.

  As shown in FIG. 2, the exposure apparatus EX includes a first liquid supply device 86 that generates a first liquid LQ, a second liquid supply device 96 that generates a second liquid LC, and a first liquid that can recover the liquid. A recovery device 89 and a second liquid recovery device 189 that can recover the liquid are provided. The first liquid supply device 86, the second liquid supply device 96, the first liquid recovery device 89, and the second liquid recovery device 189 are controlled by the control device 7.

  The first liquid supply device 86 and the supply port 81 are connected to each other via a supply flow path 84 and a supply pipe 85 formed inside the nozzle member 8. The second liquid supply device 96 is connected to the supply pipe 85 via the flow path switching mechanism 160. The flow path switching mechanism 160 is controlled by the control device 7. The first liquid recovery device 89 and the first recovery port 82 are connected to each other via a recovery flow path 87 and a recovery pipe 88 formed inside the nozzle member 8. The second liquid recovery device 189 and the second recovery port 182 are connected via a recovery flow path 187 formed in the nozzle member 8 and a recovery pipe 188.

  As described above, the first liquid LQ is an exposure liquid. The first liquid supply device 86 can deliver the clean and temperature-adjusted first liquid LQ toward the supply port 81. The second liquid LC is a cleaning liquid. The second liquid supply device 96 can send the second liquid LC toward the supply port 81. Each of the first liquid recovery device 89 and the second liquid recovery device 189 includes a vacuum system and can recover the first liquid LQ and the second liquid LC.

  In the present embodiment, the control device 7 controls the flow path switching mechanism 160, the first liquid supply device 86, and the second liquid supply device 96 so that the first liquid LQ delivered from the first liquid supply device 86 is When supplied to the supply port 81, the supply of the second liquid LC from the second liquid supply device 96 to the supply port 81 can be stopped. Further, the control device 7 supplies the first liquid LQ from the first liquid supply device 86 to the supply port 81 when the second liquid LC delivered from the second liquid supply device 96 is supplied to the supply port 81. Can be stopped.

  For example, in order to form the first immersion space LS1 with the first liquid LQ, the control device 7 stops the supply of the second liquid LC from the second liquid supply device 96 to the supply port 81, and the first liquid supply The first liquid LQ is delivered from the device 86. The first liquid LQ delivered from the first liquid supply device 86 is supplied to the supply port 81 after flowing through the supply pipe 85 and the supply flow path 84 of the nozzle member 8. The supply port 81 supplies the first liquid LQ from the first liquid supply device 86 in order to form the first immersion space LS1 with the first liquid LQ.

  Further, in order to form the second immersion space LS2 with the second liquid LC, the control device 7 stops the supply of the first liquid LQ from the first liquid supply device 86 to the supply port 81, and the second liquid supply The second liquid LC is delivered from the device 96. The second liquid LC delivered from the second liquid supply device 96 flows through the supply pipe 85 and the supply flow path 84 of the nozzle member 8 and then is supplied to the supply port 81. The supply port 81 supplies the second liquid LC from the second liquid supply device 96 in order to form the second immersion space LS2 with the second liquid LC.

  Thus, in this embodiment, the supply port 81 can supply each of the first liquid LQ and the second liquid LC.

  In the present embodiment, the first recovery port 82 recovers at least a part of the first liquid LQ when the substrate P is exposed. The first liquid LQ recovered from the first recovery port 82 by the operation of the first liquid recovery device 89 flows through the recovery flow path 87 of the nozzle member 8, and then passes through the recovery pipe 88 to the first liquid recovery device 89. To be recovered.

  The control device 7 executes the recovery operation of the first liquid LQ using the first recovery port 82 in parallel with the supply operation of the first liquid LQ using the supply port 81, so that the terminal optical element 11 and the nozzle member 8 are processed. And the first liquid immersion space LS1 can be formed with the first liquid LQ between the substrate stage 2 and the measurement stage 3. The nozzle member 8 forms the first immersion space LS1 with the first liquid LQ so that the optical path space of the exposure light EL on the exit side of the last optical element 11 is filled with the first liquid LQ at least during exposure of the substrate P. To do. By forming the first immersion space LS1, at least one of the last optical element 11, the nozzle member 8, the substrate stage 2, and the measurement stage 3 is in contact with the first liquid LQ.

  In the present embodiment, the second recovery port 182 can recover the first liquid LQ when the substrate P is exposed. The second recovery port 182 recovers, for example, the first liquid LQ that could not be recovered by the first recovery port 82 when the substrate P was exposed. The first liquid LQ recovered from the second recovery port 182 by the operation of the second liquid recovery device 189 flows through the recovery flow path 187 of the nozzle member 8 and then passes through the recovery pipe 188 to the second liquid recovery device 189. To be recovered. Thereby, it is possible to prevent the first liquid LQ from leaking out from the first immersion space LS1 or the first liquid LQ from remaining on the substrate P.

  In the present embodiment, the second recovery port 182 recovers the second liquid LC supplied so as to come into contact with the object when the object in contact with the first liquid LQ is cleaned. The second liquid LC recovered from the second recovery port 182 by the operation of the second liquid recovery device 189 flows through the recovery flow path 187 of the nozzle member 8 and then passes through the recovery pipe 188 to the second liquid recovery device 189. To be recovered.

  The control device 7 executes the recovery operation of the second liquid LC using the second recovery port 182 in parallel with the supply operation of the second liquid LC using the supply port 81, whereby the nozzle member 8 and the terminal optical element 11 are processed. The second immersion space LS2 can be formed with the second liquid LC between the substrate stage 2 and at least one of the measurement stage 3. The nozzle member 8 forms the second immersion space LS2 with the second liquid LC at least when cleaning an object that has come into contact with the first liquid LQ. By forming the second immersion space LS2, at least one of the last optical element 11, the nozzle member 8, the substrate stage 2, and the measurement stage 3 is in contact with the second liquid LC.

  In the present embodiment, water (pure water) is used as the first liquid LQ.

  In the present embodiment, a different liquid from the first liquid LQ is used as the second liquid LC. In the present embodiment, hydrogen water (hydrogen-dissolved water) in which hydrogen gas is dissolved in water is used as the second liquid LC.

  As the second liquid LC, ozone water in which ozone gas is dissolved in water (ozone-dissolved water), nitrogen water in which nitrogen gas is dissolved in water (nitrogen-dissolved water), and argon water in which argon gas is dissolved in water ( Argon dissolved water), carbon dioxide water in which carbon dioxide gas is dissolved in water (carbon dioxide dissolved water), or the like, may be used dissolved gas control water in which a predetermined gas is dissolved in water. Moreover, the gas supersaturated water which dissolved gas more than the solubility under atmospheric pressure may be sufficient. In addition, as the second liquid LC, hydrogen peroxide solution in which hydrogen peroxide is added to water, chlorine-added water in which hydrochloric acid (hypochlorous acid) is added to water, ammonia water in which ammonia is added to water, and choline are dissolved. Chemical solution-added water obtained by adding a predetermined chemical solution to water, such as choline water and sulfuric acid-added water obtained by adding sulfuric acid to water, may be used. Further, as the second liquid LC, alcohols such as ethanol and methanol, ethers, gamma butyrolactone, thinners, surfactants, and fluorine-based solvents such as HFE may be used.

  The upper surface 24 of the substrate table 22 has liquid repellency with respect to the first liquid LQ and the second liquid LC. The contact angle of the upper surface 24 of the substrate table 22 with respect to the first liquid LQ and the second liquid LC is 90 degrees or more. In the present embodiment, the upper surface 24 of the substrate table 22 is formed of a film of a material having liquid repellency such as a fluorine resin (PTFE, PFA, etc.).

  Similarly, the upper surface 34 of the measurement table 32 has liquid repellency with respect to the first liquid LQ and the second liquid LC. The contact angle of the upper surface 34 of the measurement table 32 with respect to the first liquid LQ and the second liquid LC is 90 degrees or more. In the present embodiment, the upper surface 34 of the measurement table 32 is formed of a film of a material having liquid repellency, such as a fluorine resin (PTFE, PFA, etc.). The liquid-repellent films used in the substrate table 22 and the measurement table 32 may be made of the same material (substance) or may be made of different materials (substances).

  Next, a method for exposing the substrate P using the exposure apparatus EX having the above-described configuration will be described.

  For example, the control device 7 uses the second drive system 5 to arrange the measurement table 32 at a position facing the terminal optical element 11 and the nozzle member 8, and the terminal optical element 11, the nozzle member 8, and the measurement table 32. In the meantime, the first immersion space LS1 is formed with the first liquid LQ. And the control apparatus 7 performs the measurement by the various measuring devices arrange | positioned at the measurement table 32 via the 1st liquid LQ of the 1st immersion space LS1. Then, based on the measurement result of the measuring instrument, the control device 7 adjusts the exposure conditions for exposing the substrate P, such as the imaging characteristics of the projection optical system PL, and starts the exposure operation of the substrate P. When exposing the substrate P, the control device 7 uses the second drive system 5 to place the substrate stage 2 holding the substrate P at a position facing the terminal optical element 11 and the nozzle member 8, and the terminal optical element. 11, a first immersion space LS1 is formed between the nozzle member 8 and the substrate table 22 (substrate P).

  In this embodiment, as disclosed in, for example, European Patent Application Publication No. 1,713,113, US Patent Publication No. 2006/0023186, etc., the control device 7 includes the substrate table 22 and the measurement table 32. The upper surface 24 of the substrate table 22 and the upper surface 34 of the measurement table 32 are brought close to or in contact with each other so that at least one of them continues to form a space capable of holding the first liquid LQ1 between the terminal optical element 11 and the nozzle member 8. In this state, at least one of the upper surface 24 of the substrate table 22 and the upper surface 34 of the measurement table 32 is opposed to the lower surface 11A of the terminal optical element 11 and the lower surface 8A of the nozzle member 8, and the terminal optical element 11 and the nozzle member 8 are opposed to each other. In contrast, the substrate table 22 and the measurement table 32 are synchronously moved in the XY directions. Thus, the control device 7 can move the first immersion space LS1 of the first liquid LQ between the upper surface 24 of the substrate table 22 and the upper surface 34 of the measurement table 32 while suppressing leakage of the first liquid LQ. It is. When the first immersion space LS1 of the first liquid LQ1 is moved between the upper surface 24 of the substrate table 22 and the upper surface 34 of the measurement table 32, the upper surface 24 of the substrate table 22 and the upper surface 34 of the measurement table 32 are Are adjusted to be approximately the same height (level).

  Then, the control device 7 irradiates the substrate P with the exposure light EL from the mask M via the first liquid LQ in the first immersion space LS1. Thereby, the pattern image of the mask M is projected onto the substrate P, and the substrate P is exposed.

  After the exposure of the substrate P is completed, the control device 7 moves the first immersion space LS1 onto the measurement table 32. Then, the control device 7 moves the substrate table 22 holding the exposed substrate P to a predetermined substrate exchange position, unloads the substrate P after the exposure, and carries out the exposure. The substrate P to be loaded is loaded (loaded) onto the substrate table 22. Further, during the substrate replacement at the substrate replacement position, the control device 7 performs a measurement operation using the measurement table 32 through the first liquid LQ in the first immersion space LS1 as necessary. After the loading of the substrate P into the substrate table 22 is completed, the control device 7 moves the first immersion space LS1 onto the substrate table 22 (substrate P) as described above, and the first liquid in the first immersion space LS1. The substrate P is exposed through the LQ. And the control apparatus 7 repeats the above-mentioned operation | movement, and exposes the several board | substrate P sequentially.

  When exposing the substrate P, the first liquid LQ in the first immersion space LS1 contacts the surface of the substrate P, the lower surface 11A of the last optical element 11, and the lower surface 8A of the nozzle member 8. Further, the first liquid LQ in the first immersion space LS1 also contacts the upper surface 24 of the substrate table 22 and the upper surface 34 of the measurement table 32, respectively.

  For example, a part of the substrate P (for example, a part of the photosensitive material) may be eluted (mixed) into the first liquid LQ in contact with the substrate P. When the liquid LQ comes into contact with the lower surface 11A of the last optical element 11, the lower surface 8A of the nozzle member 8, the upper surface 24 of the substrate table 22, the upper surface 34 of the measurement table 32, etc., the lower surfaces 11A, 8A The upper surfaces 24, 34 and the like may be contaminated. In addition, the lower surface 11A, 8A, the upper surface 24, 34, etc. may be contaminated not only by the substance eluted from the substrate P but also by, for example, a substance (foreign matter) floating in the space where the exposure apparatus EX is placed. There is.

  Therefore, in the present embodiment, at least one of the last optical element 11, the nozzle member 8, the substrate table 22, and the measurement table 32 is cleaned using the second liquid LC. In the present embodiment, the second immersion space LS2 is formed with the second liquid LC between the terminal optical element 11 and the nozzle member 8, and at least one of the substrate table 22 and the measurement table 32, and the formed first At least one of the last optical element 11, the nozzle member 8, the substrate table 22, and the measurement table 32 is cleaned by the second liquid LC in the two immersion space LS2.

  Next, an example of an operation for cleaning at least a part of the exposure apparatus EX using the second immersion space LS2 of the second liquid LC will be described. In the following description, the case where the terminal optical element 11, the nozzle member 8, and the substrate table 22 in contact with the first liquid LQ are cleaned using the second liquid LC will be described as an example.

  As shown in FIG. 4, the substrate table 22 is disposed at a position facing the terminal optical element 11 and the nozzle member 8. The control device 7 supplies the second liquid LC from the supply port 81 in a state where the supply of the first liquid LQ is stopped. The last optical element 11 and the nozzle member 8 form a second immersion space LS2 with the second liquid LC between the last optical element 11 and the nozzle member 8. The second liquid LC is supplied so as to come into contact with each of the last optical element 11, the nozzle member 8, and the substrate table 22.

  The second liquid LC is supplied so as to be in contact with a surface that has contacted the first liquid LQ or a surface that may have been in contact (for example, the lower surface 11A, the lower surface 8A, and the upper surface 24). As a result, the surface in contact with the first liquid LQ or the surface that may have been in contact with the first liquid LQ is cleaned by the second liquid LC.

  In the present embodiment, the second recovery port 182 recovers the second liquid LC during cleaning. The control device 7 executes the recovery operation of the second recovery port 182 while the recovery operation of the first recovery port 82 is stopped at the time of cleaning. That is, in the present embodiment, when cleaning the last optical element 11, the nozzle member 8, and the substrate table 22, the control device 7 uses the supply port 81 in a state where the recovery operation of the first recovery port 82 is stopped. In parallel with the supply operation of the two liquid LC, the recovery operation of the second liquid LC using the second recovery port 182 is executed. In FIG. 4, the illustration of the first liquid supply device 86, the first liquid recovery device 89, etc., whose operation is stopped at the time of cleaning, is omitted.

  As shown in FIG. 4, in the present embodiment, the dummy substrate DP is held by the holding unit 23 of the substrate table 22 in the cleaning operation using the second liquid LC. The dummy substrate DP is a (clean) member having a high degree of cleanliness that is difficult to release foreign matter, different from the exposure substrate P. The dummy substrate DP has substantially the same outer shape as the exposure substrate P, and can be held by the holding unit 23. In the present embodiment, the holding unit 23 has a pin chuck mechanism, and holds the substrate P and the dummy substrate DP in a detachable manner. The surface of the dummy substrate DP has liquid repellency with respect to the second liquid LC. Note that the cleaning operation using the cleaning liquid LC can be performed in a state where the holding unit 23 is exposed without holding the dummy substrate DP by the holding unit 23.

  As described above, according to the present embodiment, it is possible to satisfactorily clean the members that are in contact with the first liquid LQ, such as the terminal optical element 11, the nozzle member 8, and the substrate table 22. Therefore, it is possible to suppress deterioration in the performance of the exposure apparatus EX due to contamination of the terminal optical element 11, the nozzle member 8, the substrate table 22, and the like.

  In the present embodiment, the liquid at the time of cleaning is recovered at the second recovery port 182 different from the first recovery port 82 mainly used at the time of exposure. Thereby, the 1st collection port 82 (for example, the lower surface of porous member 82M) can be cleaned favorably. For example, the second liquid LC may be contaminated by cleaning the terminal optical element 11, the nozzle member 8, and the substrate table 22 with the second liquid LC. For example, the foreign matter adhering to the last optical element 11, the nozzle member 8, the substrate table 22 and the like may be removed by cleaning, and may be mixed into the second liquid LC. When the second liquid LC is recovered from the first recovery port 82, the first recovery port 82 may be contaminated. If the substrate P is subjected to immersion exposure in a state where the first recovery port 82 is contaminated, for example, foreign matter may be mixed into the first liquid LQ, and exposure defects such as pattern defects may occur.

  In this embodiment, since the recovery operation of the first recovery port 82 is stopped during cleaning, contamination of the first recovery port 82 can be suppressed. Therefore, the substrate P can be exposed satisfactorily.

  In the present embodiment, the second recovery port 182 is disposed outside the first recovery port 82 with respect to the optical path space of the exposure light EL, and the control device 7 performs the recovery operation of the first recovery port 82. In the state where the operation is stopped, the recovery operation of the second liquid LC using the second recovery port 182 is executed in parallel with the supply operation of the second liquid LC using the supply port 81. Thereby, as shown in FIG. 4, the second liquid LC can be brought into contact with substantially the entire lower surface 8 </ b> A of the nozzle member 8. Therefore, almost the entire area of the lower surface 8A of the nozzle member 8 can be cleaned with the second liquid LC.

Second Embodiment
Next, a second embodiment will be described. In the following description, the same or equivalent components as those of the above-described embodiment are denoted by the same reference numerals, and the description thereof is simplified or omitted.

  FIG. 5 is a diagram illustrating the second embodiment. A characteristic part of this embodiment is that liquid (including at least one of the first liquid LQ and the second liquid LC) is sent out from the first recovery port 82 during cleaning.

  In FIG. 5, a third liquid supply device 162 is connected to the recovery pipe 88 via a flow path switching mechanism 161. In the present embodiment, the control device 7 controls the flow path switching mechanism 161 and the third liquid supply device 162 at the time of cleaning, so that the liquid from the first recovery port 82 is opposed to the object ( For example, it is sent out onto a dummy substrate DP). Contamination of the first recovery port 82 can be further suppressed by the flow of the liquid from the third liquid supply device 162.

<Third Embodiment>
Next, a third embodiment will be described. In the following description, the same or equivalent components as those of the above-described embodiment are denoted by the same reference numerals, and the description thereof is simplified or omitted.

  FIG. 6 is a diagram illustrating a third embodiment. A characteristic part of this embodiment is that vibration is given to the second liquid LC during cleaning.

  As shown in FIG. 6, the exposure apparatus EX of the present embodiment includes a vibration member 150 mounted on the substrate table 22 and a vibration generator 10 that vibrates the vibration member 150. The vibration generator 10 vibrates the liquid in the immersion space formed on the vibration member 150 by vibrating the vibration member 150.

  The vibration generator 10 is connected to the vibration member 150. In the present embodiment, the vibration generator 10 is connected to the lower surface 152 of the vibration member 150. The vibration generator 10 is disposed inside a second recess 150R formed in the substrate table 22, and is connected to the lower surface 152 of the vibration member 150 inside the second recess 150R.

  The vibration generator 10 includes an ultrasonic generator and applies ultrasonic waves to the vibration member 150. In the present embodiment, the vibration generator 10 includes a piezoelectric element. The vibration generator 10 is controlled by the control device 7. The control device 7 vibrates the vibration member 150 using the vibration generator 10. In the following description, the vibration generator 10 is appropriately referred to as an ultrasonic generator 10.

  At the time of cleaning, the control device 7 vibrates the vibration member 150 with the ultrasonic generator 10 in a state where the second immersion space LS2 is formed with the second liquid LC. The ultrasonic generator 10 vibrates the vibration member 150 to apply ultrasonic waves (vibration) to the second liquid LC2 in the second immersion space LS2 formed on the vibration member 150. In the present embodiment, the ultrasonic generator 10 can apply vibrations of 20 kHz to 5000 kHz to the vibration member 150. The ultrasonic generator 10 applies ultrasonic waves (vibration) to the second liquid LC in the second immersion space LS <b> 2 formed between the terminal optical element 11 and the nozzle member 8 and the vibration member 150 and the substrate table 22. Thus, the foreign matter (contaminant) adhering to the terminal optical element 11, the nozzle member 8, the substrate table 22, etc. is peeled off, and at least one of the terminal optical element 11, the nozzle member 8, and the substrate table 22 is cleaned.

  In the present embodiment, since the ultrasonic generator 10 that applies ultrasonic waves to the second liquid LC in the second immersion space LS2 is provided, the cleaning effect can be enhanced. In the present embodiment, each of the last optical element 11, the nozzle member 8, and the substrate table 22 can be satisfactorily cleaned by the synergistic effect of the second liquid LC (hydrogen water) suitable for cleaning and ultrasonic waves. .

  In the present embodiment, in order to apply ultrasonic waves to the second liquid LC in the second immersion space LS2, a small vibration member 150 that can be mounted on the substrate table 22 is vibrated. Accordingly, the vibration member 150 can be smoothly vibrated at a high frequency (frequency), and high frequency ultrasonic waves can be smoothly applied to the second liquid LC in the second immersion space LS2. When a higher cleaning frequency is obtained when the frequency of the ultrasonic wave applied to the second liquid LC in the second immersion space LS2 is higher, the vibration member 150 mounted on the substrate table 22 is set to a higher frequency, for example, 1 MHz or higher. It is effective to vibrate at a frequency (frequency). Note that the vibration applied to the second liquid LC may not be an ultrasonic wave, and the second liquid LC may be vibrated at a frequency of less than 20 kHz.

  In the present embodiment, the upper surface 151 of the vibration member 150 and the upper surface 24 of the substrate table 22 are substantially flush with each other, so that the second immersion space LS2 can be formed satisfactorily.

  Further, since the vibration member 150 and the substrate table 22 are disposed with a predetermined gap G, the vibration member 150 can vibrate smoothly. Further, since the vibration member 150 and the substrate table 22 are disposed with a predetermined gap G, the vibration of the vibration member 150 does not adversely affect the substrate table 22. The gap G between the vibrating member 150 (upper surface 151) and the substrate table 22 (upper surface 24) is very small (about 0.1 mm), and the upper surface 151 of the vibrating member 150 and the upper surface 24 of the substrate table 22 are Since it has liquid repellency with respect to the first liquid LQ and the second liquid LC, the first liquid LQ and the second liquid LC remain on the upper surfaces 151 and 24, and the vibration member 150 (the upper surface 151) and The liquid can be prevented from entering the inside of the substrate table 22 from the gap G with respect to the (upper surface 24) of the substrate table 22.

  A seal member that suppresses liquid from entering the inside of the substrate table 22 can be disposed between the vibration member 150 and the substrate table 22. For example, by arranging an elastic (flexible) sealing member such as an O-ring, it is possible to suppress the intrusion of the liquid into the substrate table 22 without disturbing the vibration of the vibration member 150.

  Further, a recovery port for recovering the liquid between the vibration member 150 and the substrate table 22 can be provided. For example, by providing a recovery port inside the second recess 150R so as to surround the vibration member 150, the liquid that has entered between the vibration member 150 and the substrate table 22 can be recovered well.

  In the present embodiment, the case where only one vibration member 150 is mounted on the substrate table 22 has been described as an example, but the vibration member 150 may be mounted at each of a plurality of positions of the substrate table 22.

<Fourth embodiment>
Next, a fourth embodiment will be described. In the following description, the same or equivalent components as those of the above-described embodiment are denoted by the same reference numerals, and the description thereof is simplified or omitted.

  FIG. 7 is a diagram showing a fourth embodiment. A characteristic part of the fourth embodiment different from the third embodiment is that vibration is applied to the second liquid LC by using the second drive system 5 (fine movement system 14).

  In FIG. 7, the control device 7 includes the second drive system 5 (fine movement system) in a state where the second immersion space LS <b> 2 is formed by the second liquid LC between the terminal optical element 11 and the nozzle member 8 and the substrate table 22. 14) is used to vibrate the substrate table 22. The control device 7 vibrates the substrate table 22 using the second drive system 5, thereby applying vibration (ultrasonic waves) to the second liquid LC in the second immersion space LS <b> 2 formed on the substrate table 22. be able to.

  In the third and fourth embodiments described above, the nozzle member 8 may be vibrated to apply ultrasonic waves (vibration) to the liquid in the second immersion space LS2.

  In the third and fourth embodiments described above, vibration (ultrasonic waves) of 20 kHz or more is applied to the liquid in order to promote the cleaning of the last optical element 11 and the nozzle member 8. You may make it give the vibration below 20 kHz.

  In the first to fourth embodiments described above, the case where the second immersion space LS2 is formed with the second liquid LC between the terminal optical element 11 and the nozzle member 8 and the substrate table 22 will be described as an example. However, the second immersion space LS <b> 2 can be formed with the second liquid LC between the terminal optical element 11 and the nozzle member 8 and the measurement table 32. Thereby, the last optical element 11, the nozzle member 8, and the measurement table 32 can be cleaned using the second liquid LC in the second immersion space LS2.

  In addition, the vibration generator (ultrasonic generator) and the vibration member as described in the third embodiment are mounted on the measurement table 32, and the final optical element 11 and the nozzle member 8 are used by using the vibration member. Vibration (ultrasonic waves) can be applied to the second liquid LC in the second immersion space LS2 formed between the measurement table 32 and the second liquid immersion space LS2. Further, the second liquid in the second immersion space LS <b> 2 formed between the terminal optical element 11 and the nozzle member 8 and the measurement table 32 using the fine movement system 14 (second drive system 5) that moves the measurement table 32. Vibration (ultrasonic wave) can be applied to the LC.

  In the first to fourth embodiments described above, the case where the supply port 81 formed in the nozzle member 8 can supply both the second liquid LC and the first liquid LQ has been described as an example. Both the supply port for supplying the second liquid LC and the supply port for supplying the first liquid LQ may be formed in the nozzle member 8.

  In the first to fourth embodiments described above, the second immersion space may be formed with the first liquid LQ to clean the last optical element 11, the nozzle member 8, the substrate table 22, and the measurement table 32. . For example, when the first liquid LQ to be used has a cleaning capability (for example, a fluorinated liquid) or the generated contamination can be satisfactorily removed (cleanable) by the first liquid LQ, Good cleaning with one liquid LQ.

  In each of the above-described embodiments, the first liquid LQ is different from the first liquid LQ in order to form the second immersion space LS2 between the nozzle member 8 and the substrate table 22 (or the measurement table 32). The second liquid LC may be used in time series. For example, when the first liquid LQ is water (pure water) and the second liquid LC is dissolved gas control water (hydrogen water, nitrogen water, etc.) obtained by dissolving a predetermined gas in water, the second liquid LC After the cleaning operation using, a cleaning operation using the first liquid LQ can be executed. After the cleaning operation is completed, the time for the replacement with the first liquid LQ can be shortened.

  In each of the above-described embodiments, the cleaning operation for the last optical element 11 and the nozzle member 8 can be executed, for example, every time a predetermined number of substrates P are exposed, every lot, or every predetermined time interval. .

  Further, a detection device capable of detecting the contamination state of at least one of the terminal optical element 11 and the nozzle member 8 is provided, and at least one of the terminal optical element 11 and the nozzle member 8 is contaminated based on the detection result of the detection device. When it is determined that the cleaning operation is performed, the cleaning operation may be executed. For example, a light amount detector is arranged on the measurement table 32, the light amount of the exposure light EL emitted from the lower surface 11A of the last optical element 11 is detected by the light amount detector arranged on the measurement table 32, and the detection result Based on this, it can be determined whether or not to perform the cleaning operation. There is a high possibility that the light amount of the exposure light EL applied to the light amount detector changes between the state where the lower surface 11A of the last optical element 11 is contaminated and the state where it is not contaminated. Therefore, the contamination state of the lower surface 11A of the last optical element 11 can be obtained based on the detection result of the light quantity detector.

  Further, an imaging device (camera) capable of acquiring image (optical image) information such as the lower surface 11A of the terminal optical element 11 and the lower surface 8A of the nozzle member 8 is provided, and the terminal optical element 11 is based on the imaging result of the imaging device. It may be determined whether the lower surface 11 </ b> A of the nozzle member 8, the lower surface 8 </ b> A of the nozzle member 8, etc. are contaminated, and based on the determination result, it is determined whether or not the cleaning operation is to be executed.

  Similarly, a detection device capable of detecting the contamination state of the substrate table 22 and the measurement table 32 may be provided, and based on the detection result, it may be determined whether or not to perform the cleaning operation. For example, the contamination state of the upper surface 24 of the substrate table 22 and the upper surface 34 of the measurement table 32 using an imaging device (camera) that can acquire images (optical images) of the upper surface 24 of the substrate table 22 and the upper surface 34 of the measurement table 32. Can be detected.

  Further, after exposing the substrate P with the exposure light EL through the mask M and the projection optical system PL and performing development processing, the shape of the pattern formed on the substrate P is measured with a predetermined measuring device, Whether or not the cleaning operation is to be executed may be determined based on the measurement result. For example, when it is determined that the pattern defect is not within the allowable range based on the measurement result of the pattern shape, for example, it is determined that the contamination state of the lower surface 11A of the last optical element 11 is not within the allowable range, and the cleaning operation is executed.

  Needless to say, the cleaning operation and the cleaning mechanism described in the above embodiments can be used in appropriate combination.

The exposure liquid LQ in each of the above embodiments is water, but may be a liquid other than water. For example, when the light source of the exposure light EL is an F ₂ laser, the F ₂ laser light is water. For example, the liquid LQ may be a fluorine-based fluid such as perfluorinated polyether (PFPE) or fluorine-based oil that can transmit the F ₂ laser beam. In addition, as the liquid LQ, the liquid LQ is transmissive to the exposure light EL, has a refractive index as high as possible, and is stable with respect to the photoresist applied to the projection optical system PL and the surface of the substrate P (for example, Cedar). Oil) can also be used. Moreover, as the liquid LQ, a liquid having a refractive index of about 1.6 to 1.8 may be used. Further, an optical element (such as the final optical element FL) of the projection optical system PL that is in contact with the liquid LQ may be formed of a material having a refractive index higher than that of quartz and fluorite (for example, 1.6 or more). As the liquid LQ, various fluids such as a supercritical fluid can be used.

  In each of the above-described embodiments, the optical path space on the exit side (image plane side) of the terminal optical element of the projection optical system is filled with liquid, but as disclosed in International Publication No. 2004/019128. In addition, it is possible to employ a projection optical system in which the optical path space on the light incident side (object plane side) of the last optical element is filled with liquid.

  In each of the above-described embodiments, an exposure apparatus that locally fills the liquid between the projection optical system PL and the substrate P is employed. However, this is disclosed in US Pat. No. 5,825,043 and the like. It is possible to employ an immersion exposure apparatus that performs exposure while the entire surface of the substrate to be exposed is immersed in the liquid.

  As the substrate P in each of the above embodiments, not only a semiconductor wafer for manufacturing a semiconductor device, but also a glass substrate for a display device, a ceramic wafer for a thin film magnetic head, or an original mask or reticle used in an exposure apparatus. (Synthetic quartz, silicon wafer) or the like is applied.

  As the exposure apparatus EX, in addition to the step-and-scan type scanning exposure apparatus (scanning stepper) that scans and exposes the pattern of the mask M by moving the mask M and the substrate P synchronously, the mask M and the substrate P It is possible to employ a step-and-repeat type projection exposure apparatus (stepper) that collectively exposes the pattern of the mask M in a stationary state and moves the substrate P in steps.

  Further, as exposure apparatus EX, in a step-and-repeat exposure, a reduced image of the first pattern was transferred onto substrate P using the projection optical system while the first pattern and substrate P were substantially stationary. After that, with the second pattern and the substrate P being substantially stationary, a batch-type exposure of the stitch method in which a reduced image of the second pattern is partially overlapped with the first pattern using the projection optical system and is collectively exposed on the substrate P. An apparatus may be employed. Further, as the stitch type exposure apparatus, a step-and-stitch type exposure apparatus in which at least two patterns are partially transferred onto the substrate P and transferred, and the substrate P is sequentially moved can be adopted.

  Further, as an exposure apparatus EX, for example, as disclosed in US Pat. No. 6,611,316, two mask patterns are synthesized on a substrate via a projection optical system, and a single scanning exposure is performed. An exposure apparatus that double exposes one shot area on the substrate almost simultaneously can be employed. Further, as the exposure apparatus EX, a proximity type exposure apparatus, a mirror projection aligner, or the like can be adopted.

  Further, as the exposure apparatus EX, US Pat. No. 6,341,007, US Pat. No. 6,400,441, US Pat. No. 6,549,269, US Pat. No. 6,590,634, US Pat. No. 6,208, It is also possible to employ a twin stage type exposure apparatus having a plurality of substrate stages as disclosed in No. 407, US Pat. No. 6,262,796, and the like. An exposure apparatus including a plurality of substrate stages and measurement stages can be employed.

  The type of the exposure apparatus EX is not limited to an exposure apparatus for manufacturing a semiconductor element that exposes a semiconductor element pattern on the substrate P. An exposure apparatus for manufacturing a liquid crystal display element or a display, a thin film magnetic head, an image sensor (CCD) The present invention can be widely applied to an exposure apparatus for manufacturing a micromachine, MEMS, DNA chip, reticle, mask, or the like.

  In each of the above-described embodiments, the position information of the mask stage, the substrate stage, and the measurement stage is measured using an interferometer system including a laser interferometer. You may use the encoder system which detects the scale (diffraction grating) provided in this. In this case, it is preferable that a hybrid system including both the interferometer system and the encoder system is used, and the measurement result of the encoder system is calibrated using the measurement result of the interferometer system. Further, the position of the stage may be controlled by switching between the interferometer system and the encoder system or using both.

  In each of the above-described embodiments, an ArF excimer laser may be used as a light source device that generates ArF excimer laser light as exposure light EL. For example, as disclosed in US Pat. No. 7,023,610. In addition, a harmonic generation apparatus that includes a solid-state laser light source such as a DFB semiconductor laser or a fiber laser, an optical amplification unit having a fiber amplifier, a wavelength conversion unit, and the like and outputs pulsed light with a wavelength of 193 nm may be used. Furthermore, in the above-described embodiment, each illumination area and the projection area described above are rectangular, but other shapes such as an arc shape may be used.

  In the above-described embodiment, a light-transmitting mask in which a predetermined light-shielding pattern (or phase pattern / dimming pattern) is formed on a light-transmitting substrate is used. As disclosed in US Pat. No. 6,778,257, a variable shaping mask (an electronic mask, an active mask, or an image) that forms a transmission pattern, a reflection pattern, or a light emission pattern based on electronic data of a pattern to be exposed. (Also called a generator) may be used. The variable shaping mask includes, for example, a DMD (Digital Micro-mirror Device) which is a kind of non-light emitting image display element (spatial light modulator). The variable shaping mask is not limited to DMD, and a non-light emitting image display element described below may be used instead of DMD. Here, the non-light-emitting image display element is an element that spatially modulates the amplitude (intensity), phase, or polarization state of light traveling in a predetermined direction, and a transmissive liquid crystal modulator is a transmissive liquid crystal modulator. An electrochromic display (ECD) etc. are mentioned as an example other than a display element (LCD: Liquid Crystal Display). In addition to the DMD described above, the reflective spatial light modulator includes a reflective mirror array, a reflective liquid crystal display element, an electrophoretic display (EPD), electronic paper (or electronic ink), and a light diffraction type. An example is a light valve (Grating Light Valve).

  Further, a pattern forming apparatus including a self-luminous image display element may be provided instead of the variable molding mask including the non-luminous image display element. In this case, no illumination optical system is required. Here, as a self-luminous image display element, for example, CRT (Cathode Ray Tube), inorganic EL display, organic EL display (OLED: Organic Light Emitting Diode), LED display, LD display, field emission display (FED: Field Emission) Display), plasma display (PDP: Plasma Display Panel), and the like. In addition, as a self-luminous image display element included in the pattern forming apparatus, a solid light source chip having a plurality of light emitting points, a solid light source chip array in which a plurality of chips are arranged in an array, or a plurality of light emitting points on a single substrate A built-in type or the like may be used to form a pattern by electrically controlling the solid-state light source chip. The solid light source element may be inorganic or organic.

  In each of the above embodiments, the exposure apparatus provided with the projection optical system PL has been described as an example. However, the exposure apparatus and the exposure method that do not use the projection optical system PL can be employed. Even when the projection optical system PL is not used in this way, the exposure light is irradiated onto the substrate via an optical member such as a lens, and an immersion space is formed in a predetermined space between the optical member and the substrate. It is formed.

  Further, as the exposure apparatus EX, for example, as disclosed in International Publication No. 2001/035168 pamphlet, an exposure pattern for exposing a line and space pattern on the substrate P is formed by forming interference fringes on the substrate P. An apparatus (lithography system) can be employed.

  The exposure apparatus EX of the present embodiment is manufactured by assembling various subsystems including the respective constituent elements recited in the claims of the present application so as to maintain predetermined mechanical accuracy, electrical accuracy, and optical accuracy. The In order to ensure these various accuracies, before and after assembly, various optical systems are adjusted to achieve optical accuracy, various mechanical systems are adjusted to achieve mechanical accuracy, and various electrical systems are Adjustments are made to achieve electrical accuracy. The assembly process from the various subsystems to the exposure apparatus includes mechanical connection, electrical circuit wiring connection, pneumatic circuit piping connection and the like between the various subsystems. Needless to say, there is an assembly process for each subsystem before the assembly process from the various subsystems to the exposure apparatus. When the assembly process of the various subsystems to the exposure apparatus is completed, comprehensive adjustment is performed to ensure various accuracies as the entire exposure apparatus. The exposure apparatus is preferably manufactured in a clean room where the temperature, cleanliness, etc. are controlled.

  As shown in FIG. 8, a microdevice such as a semiconductor device includes a step 201 for designing a function / performance of the microdevice, a step 202 for manufacturing a mask (reticle) based on the design step, and a substrate which is a base material of the device. Manufacturing step 203, substrate processing step 204 including exposing the substrate with exposure light from a mask and developing the exposed substrate according to the above-described embodiment, device assembly step (dicing process, bonding process, package) (Including processing processes such as processes) 205, inspection step 206, and the like. The cleaning method in the exposure apparatus EX described in the above embodiments is included in the substrate processing step 204, and the substrate P is exposed using the exposure apparatus EX cleaned by the cleaning method.

  Although the embodiments of the present invention have been described as described above, the present invention can be used by appropriately combining all the above-described constituent elements, and some constituent elements may not be used.

  It should be noted that the disclosure of all published publications and US patents related to the exposure apparatus and the like cited in each of the above embodiments and modifications is incorporated herein by reference.

DESCRIPTION OF SYMBOLS 2 ... Substrate stage, 3 ... Measurement stage, 5 ... 2nd drive system, 8 ... Nozzle member, 8A ... Lower surface, 11 ... End optical element, 11A ... Lower surface, 22 ... Substrate table, 24 ... Upper surface, 32 ... Measurement table, 34 ... upper surface, 81 ... supply port, 82 ... first recovery port, 150 ... vibrating member, 182 ... second recovery port, EL ... exposure light, EX ... exposure apparatus, LC ... second liquid, LQ ... first liquid, LS1 ... first immersion space, LS2 ... second immersion space, P ... substrate

Claims (40)

An exposure apparatus that exposes a substrate with exposure light through a first liquid,
A first recovery port for recovering at least a part of the first liquid during exposure of the substrate;
A second recovery port for recovering the second liquid supplied so as to come into contact with the predetermined member during cleaning of the predetermined member in contact with the first liquid;
An exposure apparatus that performs the recovery operation of the second recovery port in a state where the recovery operation of the first recovery port is stopped during the cleaning.   The exposure apparatus according to claim 1, further comprising a supply port that supplies the second liquid.   The exposure apparatus according to claim 2, wherein the supply port also supplies the first liquid.   4. The exposure apparatus according to claim 1, wherein the second recovery port is disposed outside the first recovery port with respect to the optical path of the exposure light.   The exposure apparatus according to claim 4, wherein the second recovery port is disposed around an optical path of the exposure light.   The exposure apparatus according to claim 1, wherein the second recovery port is capable of recovering the first liquid during exposure of the substrate.   The exposure apparatus according to claim 1, wherein a liquid is discharged from the first recovery port during the cleaning. An optical element having an exit surface for emitting the exposure light;
A movable member movable within a predetermined region including a position facing the emission surface of the optical element;
An immersion member capable of forming an immersion space so that an optical path on the emission side of the optical element is filled with the first liquid when the substrate is exposed;
The exposure apparatus according to claim 1, wherein the predetermined member includes at least one of the optical element, the movable member, and the liquid immersion member.   The movable member includes at least one of a substrate stage that can move while holding the substrate, and a measurement stage that can move by mounting a measuring instrument that can perform measurement related to exposure without holding the substrate. Item 9. The exposure apparatus according to Item 8.   The exposure apparatus according to claim 8, further comprising a vibration generator that applies vibration to the second liquid during the cleaning.   The exposure apparatus according to claim 10, wherein the vibration generator includes a drive mechanism for the movable member.   The exposure apparatus according to claim 10, wherein the vibration generating device is mounted on the movable member.   The exposure apparatus according to claim 8, wherein the liquid immersion member is capable of forming an immersion space with the second liquid.   The exposure apparatus according to claim 1, wherein the second liquid includes a cleaning liquid different from the first liquid.   The exposure apparatus according to claim 1, wherein the second liquid includes the first liquid. Exposing the substrate using the exposure apparatus according to claim 1;
Developing the exposed substrate; and a device manufacturing method. An exposure apparatus cleaning method for exposing a substrate with exposure light through a first liquid, comprising:
Recovering at least a portion of the first liquid from the first recovery port during exposure of the substrate;
Supplying a second liquid so as to come into contact with the predetermined member when cleaning the predetermined member in contact with the first liquid;
A cleaning method including: at the time of the cleaning, recovering at least a part of the second liquid from a second recovery port different from the first recovery port in a state where the liquid recovery operation of the first recovery port is stopped. . An exposure apparatus that exposes a substrate with exposure light through a first liquid,
A supply port capable of supplying the first liquid and the second liquid for cleaning;
An exposure apparatus comprising: a first recovery port capable of recovering at least a part of the first liquid and supplying a third liquid for cleaning.   The exposure apparatus according to claim 18, wherein the second liquid is supplied through the supply port so as to come into contact with a predetermined member in contact with the first liquid.   20. The exposure apparatus according to claim 18, wherein the third liquid is supplied through the first recovery port so as to come into contact with a predetermined member in contact with the first liquid.   The exposure apparatus according to claim 18, wherein the third liquid includes at least one of the first liquid and the second liquid. A second recovery port different from the first recovery port;
The said 2nd liquid supplied from the said supply port or the said 3rd liquid supplied from the said 1st collection port is collect | recovered via the said 2nd collection port. Exposure equipment.   23. The exposure apparatus according to claim 22, wherein the second recovery port is disposed outside the first recovery port with respect to the optical path of the exposure light. An optical element having an exit surface for emitting the exposure light;
A movable member movable within a predetermined region including a position facing the emission surface of the optical element;
An immersion member capable of forming an immersion space so that an optical path on the emission side of the optical element is filled with the first liquid;
The exposure apparatus according to 19 or 20, wherein the predetermined member includes at least one of the optical element, the movable member, and the liquid immersion member.   The movable member includes at least one of a substrate stage that can move while holding the substrate, and a measurement stage that can move by mounting a measuring instrument that can perform measurement related to exposure without holding the substrate. The exposure apparatus according to 24.   The exposure apparatus according to any one of claims 18 to 25, further comprising a vibration generating device that vibrates the second liquid.   27. The exposure apparatus according to claim 26, wherein the vibration generator is mounted on a movable member that is movable under an optical element having an emission surface that emits the exposure light.   26. The exposure apparatus according to claim 24, wherein the liquid immersion member includes the supply port and the first recovery port. A first liquid supply device for supplying the first liquid to the supply port;
A second liquid supply device for supplying the second liquid to the supply port;
The exposure apparatus according to any one of claims 18 to 28, further comprising a third liquid supply device that supplies the third liquid to the first recovery port.   The second liquid is ozone-dissolved water, nitrogen-dissolved water, argon-dissolved water, carbon dioxide-dissolved water, hydrogen peroxide water, chlorinated water, ammonia water, choline water, sulfuric acid-added water, ethanol, methanol, ethers, gamma. 30. The exposure apparatus according to any one of claims 18 to 29, comprising at least one of butyrolactone, thinners, a surfactant, and a fluorinated solvent. Cleaning used for an exposure apparatus that supplies the first liquid through the supply port, collects the first liquid through the first recovery port, and exposes the substrate with exposure light through the supplied first liquid. A method,
Supplying a second liquid for cleaning from the supply port;
Supplying a third liquid for cleaning from the first recovery port.   32. The cleaning method according to claim 31, wherein the second liquid is supplied through the supply port so as to come into contact with a predetermined member in contact with the first liquid.   33. The cleaning method according to claim 31 or 32, wherein the third liquid is supplied through the first recovery port so as to come into contact with a predetermined member in contact with the first liquid.   The cleaning method according to any one of claims 31 to 33, wherein the third liquid includes at least one of the first liquid and the second liquid.   35. The third liquid supplied from the supply port or the third liquid supplied from the first recovery port is recovered via a second recovery port different from the first recovery port. The cleaning method as described in any one of these.   36. The cleaning method according to claim 35, wherein the second recovery port is disposed outside the first recovery port with respect to the optical path of the exposure light.   The predetermined member includes an optical element having an emission surface for emitting the exposure light, a movable member movable within a predetermined region including a position facing the emission surface of the optical element, and an optical path on the emission side of the optical element. 34. The cleaning method according to 32 or 33, comprising at least one immersion member capable of forming an immersion space so as to be filled with the first liquid.   The movable member includes at least one of a substrate stage that can move while holding the substrate, and a measurement stage that can move by mounting a measuring instrument that can perform measurement related to exposure without holding the substrate. 37. The cleaning method according to 37.   The cleaning method according to any one of claims 31 to 38, further comprising applying vibration to the second liquid.   The second liquid is ozone-dissolved water, nitrogen-dissolved water, argon-dissolved water, carbon dioxide-dissolved water, hydrogen peroxide water, chlorinated water, ammonia water, choline water, sulfuric acid-added water, ethanol, methanol, ethers, gamma. The cleaning method as described in any one of Claims 31-39 containing at least 1 of butyrolactone, thinner, surfactant, and a fluorine-type solvent.

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