JP2012192504A - Substrate conveying device and substrate processing apparatus with the same, and substrate conveyance method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a substrate conveying device that is suitable for the high speed conveyance of a substrate.SOLUTION: A substrate processing apparatus includes hands 23A, 23B for holding the substrate; hand drive mechanisms 20, 26, 27 for driving the hands 23A, 23B; and an operation auxiliary units 10A, 10B having gas nozzles for ejecting gas to assist the operation of the hands 23A, 23B. The operation auxiliary units 10A, 10B are included in the hands 23A, 23B, and assist the operation of the hands 23A, 23B using a reaction force caused by a gas ejection.

Description

  The present invention relates to a substrate transfer apparatus, a substrate processing apparatus including the same, and a substrate transfer method. Examples of substrates to be transported or processed include semiconductor wafers, liquid crystal display substrates, plasma display substrates, FED (Field Emission Display) substrates, optical disk substrates, magnetic disk substrates, magneto-optical disk substrates, Photomask substrates, ceramic substrates, solar cell substrates and the like are included.

  A substrate processing apparatus that processes a substrate typified by a semiconductor substrate or a substrate for a liquid crystal display device includes a substrate transfer apparatus that transfers a substrate to be processed. The substrate transport apparatus includes a hand that holds a substrate and a hand drive mechanism that moves the hand. The hand drive mechanism includes, for example, a multi-joint arm in which a plurality of arm portions are coupled, and a motor that applies driving force to the multi-joint arm.

JP 2007-152490 A

  In order to increase the substrate transport speed in order to increase the number of substrates processed per unit time, the hand must be moved at high speed. Therefore, when the movement is started and stopped, a large acceleration is generated in the hand and the substrate held by the hand, and a large inertia force works accordingly. Due to this large inertial force, a delay occurs at the start of movement, and the hand vibrates when stopped. In particular, when the multi-joint arm is extended, the hand is far away from the pivot point (rotation axis) of the multi-joint arm, so that a large vibration is likely to occur and the vibration is difficult to converge.

In the state where the multi-joint arm is extended, the hand hangs down due to the weight of the multi-joint arm and the hand, and the substrate cannot be held horizontally. This problem may be solved by increasing the rigidity of the components of the articulated arm, but this increases the cost and increases the weight, which makes it difficult to drive at high speed accordingly.
SUMMARY OF THE INVENTION An object of the present invention is to provide a substrate transport apparatus suitable for high-speed transport of a substrate and a substrate processing apparatus using the same. Another object of the present invention is to provide a substrate transfer method suitable for high-speed transfer of substrates.

  In order to achieve the above object, the invention according to claim 1 includes a hand (23) for holding a substrate and a hand drive mechanism (20, 26, 27, 28, 31, 32, 16, 17) for driving the hand. ) And gas nozzles (51 to 55, 91 to 93, 101 to 103) that are provided in the hand and inject gas so as to assist the operation of the hand. In addition, although the alphanumeric character in a parenthesis represents the corresponding component etc. in below-mentioned embodiment, it is not the meaning which limits a claim to embodiment. The same applies hereinafter.

  According to this configuration, by injecting gas from the gas nozzle provided in the hand, a reaction force due to the injection is applied to the hand, thereby assisting the operation of the hand. That is, the reaction force applied to the hand can accelerate the movement of the hand, decelerate the movement of the hand, or change the posture of the hand. Therefore, the inertial force acting on the hand can be canceled out by the reaction force generated by the gas injection from the gas nozzle, so acceleration and deceleration when moving the hand at high speed can be delayed without increasing the rigidity of the hand drive mechanism. It can be done smoothly by suppressing vibrations.

  The invention according to claim 2 is the invention according to claim 1, wherein the gas nozzle includes an acceleration nozzle (51 to 55, 91 to 93, 101 to 103) for injecting gas so as to accelerate the operation of the hand. A substrate transfer device. With this configuration, the hand can be quickly accelerated, so that the operating speed of the hand quickly reaches the maximum speed. Thereby, a board | substrate can be conveyed at high speed. The acceleration nozzle is preferably configured to inject gas in a direction opposite to the direction of movement of the hand. Thereby, since the reaction force by gas injection acts on the movement direction of a hand, a hand can be accelerated effectively.

  The invention according to claim 3 is the invention according to claim 1 or 2, wherein the gas nozzle includes a brake nozzle (51 to 55, 91 to 93, 101 to 103) for injecting gas so as to brake the operation of the hand. It is a board | substrate conveyance apparatus of description. According to this configuration, since the hand can be quickly decelerated, the hand can be quickly stopped, and vibration of the hand at the time of stop can be suppressed. Thereby, it can contribute to the high-speed conveyance of a board | substrate. The braking nozzle is preferably configured to inject gas in the direction of movement of the hand. Thereby, since the reaction force by gas injection acts in the direction opposite to the operation direction of a hand, a hand can be braked effectively.

  The invention according to claim 4 is any one of claims 1 to 3, wherein the gas nozzle includes horizontal nozzles (51 to 54, 91, 92, 101, 102) for injecting gas in a direction along a horizontal plane. It is a board | substrate conveyance apparatus as described in an item. With this configuration, a horizontal reaction force is generated when gas is ejected from the horizontal nozzle, and this reaction force acts on the hand. As a result, the horizontal movement (particularly acceleration or deceleration) of the hand can be efficiently assisted.

  Invention of Claim 5 is a board | substrate conveyance apparatus as described in any one of Claims 1-4 in which the said gas nozzle contains the antigravity nozzle (55,93,103) which injects gas downward. . According to this configuration, the hand can be lifted against gravity by a reaction force caused by gas injection from the anti-gravity nozzle. Accordingly, it is possible to assist the acceleration operation when the hand starts moving upward, or assist the deceleration operation when the hand moves downward and stops.

  Also, for example, when a hand is attached to the end of a long arm, the arm bends due to its own weight, the height of the hand is lowered, and the posture of the hand is inclined (as a result, for example, The held substrate may be inclined with respect to the horizontal plane). Therefore, the hand can be lifted or its posture can be corrected by injecting gas from the anti-gravity nozzle and applying an upward force to the hand. More specifically, for example, when the hand is attached to the tip of an articulated arm that bends and stretches in the horizontal direction, it is possible to suppress drooping of the hand when the articulated arm is extended. Thereby, the hand can be moved along the horizontal plane, and the posture of the hand can be maintained (as a result, for example, the substrate can be held in a horizontal posture).

The anti-gravity nozzle is preferably attached to a hand. Thereby, the posture of the hand can be corrected efficiently.
The invention described in claim 6 controls the acceleration detection means (56, 94, 104) for detecting the acceleration of the hand, and controls the injection of gas from the gas nozzle in accordance with the acceleration detected by the acceleration detection means. It is a board | substrate conveyance apparatus as described in any one of Claims 1-5 further including an injection control means (60). With this configuration, gas is ejected by the gas nozzle so as to assist the operation of the hand in accordance with the acceleration of the hand (that is, the inertia force generated by the acceleration). Therefore, the operation of the hand can be appropriately assisted. More specifically, the injection control unit may be configured (programmed) to feedback control gas injection (for example, injection amount) from the gas nozzle based on the output of the acceleration detection unit.

  According to a seventh aspect of the present invention, the hand driving mechanism includes a multi-joint arm (20) having a plurality of arm portions (21, 22) coupled to each other so as to be rotatable, and the hand includes the multi-joint arm. And an arm operation auxiliary nozzle (71, 72, 81, 82) that is provided in at least one of the plurality of arm portions and injects gas so as to assist the operation of the arm portions. It is a board | substrate conveyance apparatus as described in any one of Claims 1-6.

  According to this configuration, the operation of the arm portion constituting the multi-joint arm is assisted by the reaction force obtained by gas injection from the arm operation auxiliary nozzle. Accordingly, not only the hand but also the operation of the arm portion is assisted, so that the substrate can be transported at a higher speed, and vibration at the time of stopping or the like is further suppressed. Moreover, since high-speed conveyance is possible without increasing the rigidity of the articulated arm, the cost is not significantly increased and the weight is not significantly increased.

  The arm operation assisting nozzle is preferably provided at the tip of the arm portion. Further, the arm operation auxiliary nozzle is configured to inject gas in a direction parallel to a tangential direction (a tangential direction of the rotation path) at each position on the rotation path of the tip of the arm part. It is preferable. The arm operation auxiliary nozzle preferably includes arm acceleration nozzles (71, 72, 81, 82) for accelerating the operation of the tip of the arm portion. The arm operation auxiliary nozzle preferably includes an arm brake nozzle (71, 72, 81, 82) for braking the operation of the tip of the arm portion.

The invention according to claim 8 is provided in the base portion (15) that supports the hand drive mechanism and travels along the transport path, and is provided in the base portion so as to assist the operation of the base portion. It is a board | substrate conveyance apparatus as described in any one of Claims 1-6 further including the base part operation | movement assistance nozzle (107,108) which injects gas.
With this configuration, the operation of the base part can be assisted by the reaction force obtained by the gas injection from the base part operation auxiliary nozzle. Accordingly, since the base part can be accelerated and / or decelerated quickly, the time required to reach the maximum speed at the start of the base part operation can be shortened, and the base part can be stopped in a short time. it can. This can contribute to high-speed conveyance of the substrate. The base unit operation auxiliary nozzle is preferably configured to inject gas in a direction parallel to the traveling direction (conveyance path) of the base unit. More specifically, the base unit operation assist nozzle is a base unit acceleration nozzle that accelerates the base unit by injecting gas in a direction opposite to the traveling direction of the base unit, and / or travel of the base unit. It is preferable to include a base part braking nozzle that brakes the base part by injecting gas in the direction.

Invention of Claim 9 contains the board | substrate conveyance apparatus (7) as described in any one of Claims 1-8, and the processing unit (3) which processes the board | substrate conveyed by the said board | substrate conveyance apparatus, A substrate processing apparatus. With this configuration, since the substrate transport speed can be increased, the substrate processing speed can be increased, and as a result, the productivity of products using the substrate can be increased.
The invention according to claim 10 includes a step of driving a hand holding a substrate by a hand drive mechanism, and a gas injection step of assisting the operation of the hand by injecting gas from a gas nozzle provided in the hand. Including a substrate transfer method. By this method, the same effect as that of the invention of claim 1 can be realized.

The invention according to claim 11 is the substrate transfer method according to claim 10, wherein the gas injection step includes an acceleration step of injecting a gas from the gas nozzle so as to accelerate the operation of the hand. According to this method, the same effect as that attained by the 2nd aspect can be realized.
The invention according to claim 12 is the substrate transfer method according to claim 10 or 11, wherein the gas injection step includes a braking step of injecting gas from the gas nozzle so as to brake the operation of the hand. According to this method, the same effect as that attained by the 3rd aspect can be realized.

The invention according to claim 13 is the substrate transfer method according to any one of claims 10 to 12, wherein the gas injection step includes a horizontal injection step of injecting a gas from the gas nozzle in a direction along a horizontal plane. It is. By this method, the same effect as that attained by the 4th aspect can be realized.
The invention according to claim 14 is the substrate transfer method according to any one of claims 10 to 13, wherein the gas injection step includes an anti-gravity injection step of injecting gas downward from the gas nozzle. By this method, the same effect as that attained by the 5th aspect can be realized.

  The invention according to claim 15 further includes an acceleration detection step of detecting acceleration of the hand, wherein the gas injection step includes a step of injecting gas from the gas nozzle in accordance with the acceleration detected by the acceleration detection step. It is a board | substrate conveyance method as described in any one of Claims 10-14 containing. By this method, the same effect as that attained by the 6th aspect can be realized.

  According to a sixteenth aspect of the present invention, the hand drive mechanism includes a multi-joint arm having a plurality of arm portions that are rotatably coupled to each other, and the hand is coupled to the multi-joint arm. The arm operation assisting step of injecting a gas so as to assist the operation of the arm unit from an arm operation assisting nozzle provided in at least one of the arm units. It is a board | substrate conveyance method of description. By this method, the same effect as that attained by the 7th aspect can be realized.

  According to a seventeenth aspect of the present invention, there is provided a gas from the base part operation assist nozzle provided in the base part that supports the hand drive mechanism and travels along the transport path so as to assist the operation of the base part. The substrate transfer method according to claim 10, further comprising: a base unit operation assisting step for injecting the liquid. By this method, the same effect as that attained by the 8th aspect can be realized.

FIG. 1 is a schematic plan view for explaining the layout of a substrate processing apparatus according to an embodiment of the present invention. FIG. 2A is a schematic side view of the indexer robot, and FIG. 2B is a schematic plan view of the indexer robot 7. FIG. 3 is an enlarged view illustrating the configuration of the motion assisting unit. FIG. 4 is a diagram for explaining bending when the multi-joint arm is extended. FIG. 5 is a block diagram showing a configuration related to the operation control of the indexer robot. FIG. 6 is a control block diagram of a controller related to the control of the indexer robot. FIG. 7A is an illustrative side view for explaining an indexer robot according to a second embodiment of the present invention, and FIG. 7B is an illustrative plan view thereof. FIG. 8 is a block diagram showing a configuration related to the motion control of the indexer robot according to the second embodiment. FIG. 9 is a control block diagram of a controller related to the control of the indexer robot. FIG. 10A is an illustrative perspective view for explaining the configuration of an indexer robot according to a third embodiment of the present invention, and FIG. 10B is a perspective view seen from below the hand. FIG. 11 is a block diagram illustrating a configuration related to operation control of the indexer robot according to the third embodiment. FIG. 12 is a control block diagram of the controller related to the control of the indexer robot. FIG. 13 is a control block diagram (fourth embodiment) showing a control configuration that can be used in place of the control configuration of FIG. FIG. 14 is a control block diagram (fifth embodiment) showing a control configuration that can be used in place of the control configuration of FIG.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.
FIG. 1 is a schematic plan view for explaining the layout of a substrate processing apparatus according to an embodiment of the present invention. This substrate processing apparatus is an apparatus for processing a substrate W such as a semiconductor wafer or a glass substrate for a liquid crystal display panel. The substrate processing apparatus includes a substrate processing module 1 and an indexer module 2 coupled to the substrate processing module 1.

The substrate processing module 1 includes four processing units 3 arranged in a plane and a main transfer robot 4 disposed in the center so as to be surrounded by the four processing units 3. The main transfer robot 4 carries in an unloading / unloading operation for loading an unprocessed substrate W into the processing unit 3 and unloading the processed substrate W from the processing unit 3.
On the other hand, the indexer module 2 accesses the cassette mounting table 6 on which a cassette 5 capable of accommodating a plurality of substrates W is placed, and the cassette 5 placed on the cassette mounting table 6 to carry in / load substrates. An indexer robot 7 for carrying out and transferring the substrate to and from the main transfer robot 4 is further provided.

  The main transfer robot 4 includes a pair of hands 40 that can hold the substrate W, a turntable 41 that holds the pair of hands 40, a hand advance / retreat mechanism 42 that is housed in the turntable 41, and a turntable. And an elevating mechanism 43 that moves 41 up and down. With this configuration, the main transfer robot 4 rotates the turntable 41 around the vertical axis so that the hand 40 faces either processing unit 3 or the substrate delivery position P. Then, the hand 40 is advanced or retracted with respect to the transport destination by the function of the hand advance / retreat mechanism 42. In addition, the hand 40 is moved up and down by the action of the elevating mechanism 43, whereby the substrate W is transferred to and from the transfer destination.

  The indexer robot 7 includes a base 11, a multi-joint arm 20 held by the base 11, and a pair of hands 23 (23 </ b> A and 23 </ b> B) coupled to the multi-joint arm 20. Only one upper hand is shown. ). The articulated arm 20 includes a first arm portion 21 and a second arm portion 22. The first arm portion 21 is coupled to the base portion 11 so that the base end portion thereof can rotate about the vertical axis. The second arm portion 22 is coupled so that the base end portion thereof can rotate around the vertical axis with respect to the distal end portion of the first arm portion 21. The distal end portion of the second arm portion 22 is coupled so that a pair of hands 23 each holding one substrate W can be rotated about a vertical axis.

  The indexer robot 7 unloads one unprocessed substrate W from one of the cassettes 5 placed on the cassette mounting table 6. The indexer robot 7 delivers the unprocessed substrate W taken out from the cassette 5 to the main transfer robot 4 at the delivery position P. The main transfer robot 4 carries the unprocessed substrate W received from the indexer robot 7 into one of the plurality of processing units 3. On the other hand, the main transport robot 4 takes out the processed substrate W from the processing unit 3 and transfers the processed substrate W to the indexer robot 7 at the delivery position P. The indexer robot 7 stores the processed substrate W received from the main transfer robot 4 in any of the cassettes 5.

The transfer of the substrate W at the transfer position P may be configured to transfer directly between the indexer robot 7 and the main transfer robot 4, or a substrate mounting table for mounting the substrate at the transfer position P is installed. The indexer robot 7 and the main transfer robot 4 may be configured to place the substrate W on the substrate platform and receive the substrate W placed on the substrate platform.
2A is a schematic side view of the indexer robot 7, and FIG. 2B is a schematic plan view of the indexer robot 7. A base end portion of the first arm portion 21 of the multi-joint arm 20 is coupled to a rotary shaft 25 extending in the vertical direction. The rotating shaft 25 is coupled to the base portion 11 so as to be rotatable and vertically movable. The rotary shaft 25 is configured to be rotated about the vertical axis A by the first arm rotary drive mechanism 26 and moved up and down by the lift drive mechanism 27. The proximal end portion of the second arm portion 22 is coupled to the distal end portion of the first arm portion 21 so as to be rotatable around a vertical axis B passing through the distal end portion of the first arm portion 21. The second arm portion 22 is configured to be rotated about the vertical axis B by the second arm rotation drive mechanism 28. The pair of hands 23 </ b> A and 23 </ b> B are arranged at different height positions, and their proximal end portions are common to the distal end portion of the second arm portion 22 and pass through the distal end portion of the second arm portion 22. It is coupled so as to be rotatable around the vertical axis C (however, in FIG. 2B, the hands 23A and 23B and the vertical axis C are drawn in a shifted manner for the sake of illustration). The pair of hands 23 </ b> A and 23 </ b> B are configured to be independently rotated around the vertical axis C by the first hand rotation driving mechanism 31 and the second hand rotation driving mechanism 32.

  When the first arm rotation drive mechanism 26 rotates the rotation shaft 25 around the vertical axis A, the first arm portion 21 swings around the vertical axis A in the horizontal direction around the base end. Move. Further, when the elevating drive mechanism 27 moves the rotary shaft 25 up and down, the first arm portion 21 moves up and down, whereby the articulated arm 20 and the hand 23 coupled thereto move up and down integrally. When the second arm rotation drive mechanism 28 rotates the second arm portion 22 around the vertical axis B, the second arm portion 22 swings around the vertical axis B in the horizontal direction. Further, when the first and second hand rotation drive mechanisms 31 and 32 rotate the hands 23A and 23B around the vertical axis C, the hands 23A and 23B swing in the horizontal direction around the vertical axis C, respectively. . By combining the operations of the first and second arm portions 21 and 22 and the hands 23A and 23B, the hands 23A and 23B can access the arbitrary cassette 5 and the substrate delivery position P.

  The transfer of the substrate W between the hands 23A, 23B and the cassette 5 is achieved by the elevation drive mechanism 27 moving the articulated arm 20 up and down by a minute distance while the hands 23A, 23B have entered the cassette 5. Is done. That is, the hands 23 </ b> A and 23 </ b> B can scoop the substrate W from the substrate holding shelf in the cassette 5 or place the substrate W on the substrate holding shelf in the cassette 5. Substrate delivery with the main transfer robot 4 at the substrate delivery position P can be performed in the same manner. Needless to say, the substrate W can be transferred by moving the hand 40 of the main transfer robot 4 up and down instead of moving the articulated arm 20 up and down.

  Operation auxiliary units 10A and 10B (hereinafter, collectively referred to as “operation auxiliary unit 10”) are attached to the hands 23A, 23B (hereinafter, collectively referred to as “hand 23”). The operation assisting unit 10 is configured to assist the operation of the hand 23. The motion auxiliary unit 10 is fixed to the lower surface of the hand 23, for example.

  FIG. 3 is an enlarged view illustrating the configuration of the motion assisting unit 10. The motion assisting unit 10 includes a unit main body 50, gas nozzles 51 to 55, and an acceleration sensor 56 (acceleration detecting means). The gas nozzles 51 to 55 include X-axis gas nozzles 51 and 52, Y-axis gas nozzles 53 and 54, and a Z-axis gas nozzle 55, which are fixed to the unit body 50. The X-axis gas nozzles 51, 52 are gas (for example, along the direction parallel to the X-axis direction which is one direction along a plane (ideally a horizontal plane) parallel to the main surface of the substrate W held by the hand 23. It is a horizontal nozzle that injects air. More specifically, one X-axis gas nozzle 51 injects gas in the X-axis direction, and the other X-axis gas nozzle 52 injects gas in the opposite X-axis direction opposite to the X-axis direction. It is configured as follows. The Y-axis gas nozzles 53 and 54 are other directions along a plane (ideally a horizontal plane) parallel to the main surface of the substrate W held by the hand 23, and are parallel to the Y-axis direction orthogonal to the X-axis. A horizontal nozzle that injects gas (eg, air) along the direction. More specifically, one Y-axis gas nozzle 53 injects gas in the Y-axis direction, and the other Y-axis gas nozzle 54 injects gas in the opposite Y-axis direction opposite to the Y-axis direction. It is configured as follows. The Z-axis gas nozzle 55 is configured to inject gas in parallel with the Z-axis direction that is a direction (ideally, a vertical direction) perpendicular to the main surface of the substrate W held by the hand 23. More specifically, the Z-axis gas nozzle 55 is an anti-gravity nozzle that injects a gas toward an anti-Z-axis direction that is a downward direction that is opposite to the Z-axis direction that is an upward direction.

Since the unit main body 50 is fixed to the hand 23, the directions of the X axis, the Y axis, and the Z axis change according to the posture of the hand 23. Specifically, the X axis and the Y axis are axes that can rotate around the vertical axis according to the orientation of the hand 23. Further, if the horizontal posture of the hand 23 changes, the Z-axis can be rotated so as to deviate from the vertical direction.
The acceleration sensor 56 is configured to detect an acceleration (in other words, an inertial force) acting on the hand 23. In this embodiment, the acceleration sensor 56 detects acceleration in the X-axis direction, acceleration in the Y-axis direction, and acceleration in the Z-axis direction.

  When the hand 23 starts or accelerates the movement in the X-axis direction, the acceleration sensor 56 detects the acceleration in the X-axis direction (inertial force in the anti-X-axis direction). When the hand 23 decelerates or stops the operation in the X-axis direction, the acceleration sensor 56 detects acceleration in the anti-X-axis direction (inertial force in the X-axis direction). When the hand 23 starts or accelerates the operation in the anti-X-axis direction, the acceleration sensor 56 detects the acceleration in the anti-X-axis direction (inertial force in the X-axis direction). When the hand 23 decelerates or stops the operation in the anti-X-axis direction, the acceleration sensor 56 detects the acceleration in the X-axis direction (inertial force in the anti-X-axis direction).

  Similarly, when the hand 23 starts or accelerates the movement in the Y-axis direction, the acceleration sensor 56 detects the acceleration in the Y-axis direction (inertial force in the anti-Y-axis direction). When the hand 23 decelerates or stops the operation in the Y-axis direction, the acceleration sensor 56 detects acceleration in the anti-Y-axis direction (inertial force in the Y-axis direction). When the hand 23 starts or accelerates the operation in the anti-Y-axis direction, the acceleration sensor 56 detects the acceleration in the anti-Y-axis direction (inertial force in the Y-axis direction). When the hand 23 decelerates or stops the operation in the anti-Y-axis direction, the acceleration sensor 56 detects the acceleration in the Y-axis direction (inertial force in the anti-Y-axis direction).

  The acceleration sensor 56 detects an acceleration component obtained by orthogonally projecting gravitational acceleration in the Z-axis direction. Further, when the hand 23 starts or accelerates the movement (rise) in the Z-axis direction, the acceleration sensor 56 detects acceleration in the Z-axis direction (inertial force in the anti-Z-axis direction) in addition to the gravitational acceleration. When the hand 23 decelerates or stops the movement in the Z-axis direction, the acceleration sensor 56 detects acceleration in the anti-Z-axis direction (inertial force in the Z-axis direction) in addition to gravitational acceleration. When the hand 23 starts or accelerates the movement (downward) in the anti-Z-axis direction, the acceleration sensor 56 detects acceleration in the anti-Z-axis direction (inertial force in the Z-axis direction) in addition to the gravitational acceleration. When the hand 23 decelerates or stops the operation in the anti-Z-axis direction, the acceleration sensor 56 detects acceleration in the Z-axis direction (inertial force in the anti-Z-axis direction) in addition to the gravitational acceleration.

  For example, as shown in an exaggerated manner in FIG. 4, when the articulated arm 20 is bent downward by gravity when the first and second arm portions 21 and 22 are expanded to extend the articulated arm 20, the hand 23. Is a tilted posture in which the tip side hangs down. At this time, the Z-axis direction forms an inclination angle θ with respect to the vertical direction in which the gravitational acceleration g acts. Therefore, the acceleration sensor 56 detects g · cos θ as the acceleration in the Z-axis direction. Therefore, the posture (tilt angle θ) of the hand 23 can be detected by comparing the detected value g · cos θ of the acceleration in the Z-axis direction with the gravitational acceleration g.

  FIG. 5 is a block diagram showing a configuration related to the operation control of the indexer robot 7. The elevating drive mechanism 27, the first arm rotation drive mechanism 26, the second arm rotation drive mechanism 28, the first hand rotation drive mechanism 31 and the second hand rotation drive mechanism 32 are controlled by the controller 60. Furthermore, the controller 60 is configured (programmed) so as to control the operation of the operation auxiliary unit 10 (10A, 10B). More specifically, the output signal of the acceleration sensor 56 is input to the controller 60. Moreover, the controller 60 has a function as an injection control means for controlling gas injection by the gas nozzles 51 to 55. A gas pressurized from a gas supply source 63 (for example, air, nitrogen or other inert gas) is supplied to the gas nozzles 51 to 55 via a gas supply path 64. The controller 60 is configured (programmed) to control one or two or more injection control amounts selected from the injection amount of gas injected from the gas nozzles 51 to 55, the injection time, the injection flow rate, and the injection pressure. May be.

  FIG. 6 is a control block diagram of the controller 60 related to the control of the indexer robot 7. The controller 60 obtains a deviation between the target position of the hand 23 and the current position, and determines the control amount (posture control amount) of each drive source (for example, servo motor) of the drive mechanisms 26 to 28, 31, 32 in accordance with the deviation. The driving source is controlled according to the control amount. As a result, when the drive source is driven, the behavior of the indexer robot 7 changes. On the other hand, the controller 60 determines the feedforward control amount according to the deviation between the target position of the hand 23 and the current position. Furthermore, the behavior (acceleration) of the indexer robot 7 is detected by the acceleration sensor 56, and the controller 60 obtains a feedback control amount based on the detected value. Furthermore, the controller 60 calculates | requires the injection control amount (for example, injection amount) of each gas nozzle 51-55 based on the feedforward control amount and the feedback control amount. Each gas nozzle 51-55 is controlled based on this calculated injection control amount, and gas is injected. When the reaction force generated by the gas injection is applied to the hand 23, this causes a change in the behavior of the indexer robot 7. This change is further detected by the acceleration sensor 56.

The feedforward control amount is an injection control amount for canceling the inertia force that is predicted to act on the hand 23 in the process in which the hand 23 is moved from the current position to the target position. By performing the feedforward control, the response delay in the feedback control can be compensated, and the control responsiveness can be enhanced.
The feedback control amount is an injection control amount for canceling the inertial force actually detected by the acceleration sensor 56. By performing feedback control, an injection control amount corresponding to the actual behavior of the hand 23 can be set.

  The current position and target position of the hand may be represented by the vertical position of the rotation shaft 25, the rotation position of the first arm unit 21, the rotation position of the second arm unit 22, and the rotation position of the hand 23. Each position is controlled by an electric motor as a drive source of the lifting drive mechanism 27, the first arm rotation drive mechanism 26, the second arm rotation drive mechanism 28, the first hand rotation drive mechanism 31 and the second hand rotation drive mechanism 32. It may be represented by a position (for example, the number of control steps).

  A specific control content will be described. When the hand 23 starts or accelerates, acceleration occurs in the direction of motion, and an inertial force in a direction opposite to the direction of motion is generated accordingly. Therefore, the gas nozzles 51 to 55 inject the gas so that a reaction force in the operation direction is generated. That is, the gas nozzles 51 to 55 function as acceleration nozzles that inject gas so as to accelerate the operation of the hand 23. Further, when the hand 23 decelerates or stops operating, acceleration in the direction opposite to the operation direction is generated, and accordingly, inertial force in the operation direction is generated. Therefore, the gas nozzles 51 to 55 inject the gas so that a reaction force in the direction opposite to the operation direction is generated. That is, the gas nozzles 51 to 55 function as a braking nozzle that injects gas so as to brake the operation of the hand 23.

  For example, when the hand 23 starts or accelerates in the X-axis direction, gas is injected from the X-axis gas nozzle 52 in the anti-X-axis direction. Thereby, since the reaction force by the injection of the gas acts in the X axis direction, the operation of the hand 23 in the X axis direction is assisted. When the hand 23 starts or accelerates in the anti-X-axis direction, gas is injected from the X-axis gas nozzle 51 in the X-axis direction. Thereby, since the reaction force by the injection of the gas acts in the anti-X-axis direction, the operation of the hand 23 in the anti-X-axis direction is assisted. On the other hand, when decelerating or stopping the operation of the hand 23 in the X-axis direction, gas is injected from the X-axis gas nozzle 51 in the X-axis direction. As a result, the reaction force caused by the gas injection acts in the anti-X-axis direction, so that the operation of the hand 23 in the X-axis direction is braked. Similarly, when the operation of the hand 23 in the anti-X-axis direction is decelerated or stopped, gas is injected from the X-axis gas nozzle 52 in the anti-X-axis direction. Thereby, since the reaction force by the injection of the gas acts in the X-axis direction, the operation of the hand 23 in the anti-X-axis direction is braked.

  The same applies to the Y-axis. When the hand 23 starts or accelerates in the Y-axis direction, gas is injected from the Y-axis gas nozzle 54 in the anti-Y-axis direction. Thereby, since the reaction force by the injection of the gas acts in the Y-axis direction, the operation of the hand 23 in the Y-axis direction is assisted. When the hand 23 starts or accelerates in the anti-Y-axis direction, gas is injected from the Y-axis gas nozzle 53 in the Y-axis direction. Thereby, since the reaction force by the injection of the gas acts in the anti-Y-axis direction, the operation of the hand 23 in the anti-Y-axis direction is assisted. On the other hand, when the operation of the hand 23 in the Y-axis direction is decelerated or stopped, gas is injected from the Y-axis gas nozzle 53 in the Y-axis direction. As a result, the reaction force caused by the gas injection acts in the anti-Y-axis direction, so that the operation of the hand 23 in the Y-axis direction is braked. Similarly, when the operation of the hand 23 in the anti-Y-axis direction is decelerated or stopped, gas is injected from the Y-axis gas nozzle 54 in the anti-Y-axis direction. Thereby, since the reaction force by the injection of the gas acts in the Y-axis direction, the operation of the hand 23 in the anti-Y-axis direction is braked.

  When the hand 23 starts or accelerates in a direction not parallel to either the X axis or the Y axis, or decelerates or stops operating, the X axis gas nozzles 51 and 52 and the Y axis gas are in a ratio according to the direction. What is necessary is just to set the injection control amount with the nozzles 53 and 54, respectively. Thereby, acceleration in the operation direction of the hand 23 can be assisted, and the operation in the operation direction can be braked.

  The Z-axis gas nozzle 55 may be controlled so as to assist the upward movement of the articulated arm 20 and the hand 23 by injecting gas when the articulated arm 20 is raised (function as an acceleration nozzle). Further, the Z-axis gas nozzle 55 may be controlled to brake the downward movement of the articulated arm 20 and the hand 23 by injecting gas when the articulated arm 20 is lowered and stopped (braking nozzle). As working). Further, the Z-axis gas nozzle 55 may be controlled to inject gas so as to suppress the posture change of the hand 23 caused by the bending of the articulated arm 20 when the articulated arm 20 is extended. .

  As described above, according to this embodiment, by injecting gas from the gas nozzles 51 to 55 provided in the hand 23, the reaction force due to the injection is applied to the hand 23, whereby the operation of the hand 23 is performed. Assisted. That is, the reaction force applied to the hand 23 can accelerate the movement of the hand 23, decelerate the movement of the hand 23, or change the posture of the hand 23. Therefore, since the inertial force and the like acting on the hand 23 can be canceled by the reaction force generated by the gas injection from the gas nozzles 51 to 55, the hand 23 can be operated at high speed without increasing the rigidity of the components of the articulated arm 20 Acceleration and deceleration when moving can be smoothly performed while suppressing delay and vibration.

  Moreover, since the hand 23 can be accelerated by gas injection, the hand 23 can be accelerated quickly, and the operating speed of the hand 23 reaches the maximum speed promptly. Thereby, the board | substrate W can be conveyed at high speed. In addition, since the hand 23 can be quickly decelerated by gas injection, the hand 23 can be quickly stopped, and vibration of the hand 23 at the time of stop can be suppressed. Thereby, it can contribute to the high-speed conveyance of a board | substrate.

FIG. 7A is an illustrative side view for explaining an indexer robot according to a second embodiment of the present invention, and FIG. 7B is an illustrative plan view thereof. 7A and 7B, parts corresponding to the parts shown in FIGS. 2A and 2B are denoted by the same reference numerals.
This indexer robot can be used as the indexer robot 7 in the substrate processing apparatus shown in FIGS. 2A and 2B in the substrate processing apparatus shown in FIG. In the indexer robot 7 of this embodiment, the hands 23A and 23B, the articulated arm 20, the first arm rotation drive mechanism 26, the lift drive mechanism 27, and the second arm rotation drive mechanism 28 are the same as in the first embodiment. The first hand rotation drive mechanism 31 and the second hand rotation drive mechanism 32 are included. In the indexer robot 7 of this embodiment, gas nozzles 71 and 72 (arm operation auxiliary nozzles) and an acceleration sensor 73 are arranged at the tip of the first arm portion 21. In addition, gas nozzles 81 and 82 (arm operation auxiliary nozzles) and an acceleration sensor 83 are disposed at the tip of the second arm portion 22. Further, gas nozzles 91, 92, 93 and an acceleration sensor 94 are arranged at the tip ends of the hands 23 </ b> A, 23 </ b> B.

  The gas nozzles 71, 72 are tangential to the path (arc-shaped path) when the distal end of the first arm portion 21 rotates about the vertical axis A in plan view (of the distal end of the first arm portion 21). (The tangential direction at the position) is fixed to the distal end portion of the first arm portion 21 so as to inject the gas in a substantially horizontal direction. The gas nozzles 71 and 72 are configured to inject gas in opposite directions. More specifically, the gas nozzle 71 injects gas in the counterclockwise direction in plan view. Therefore, the reaction force when the gas nozzle 71 ejects gas acts on the first arm portion 21 in the clockwise direction. Accordingly, it is possible to accelerate the clockwise operation of the first arm portion 21 (function as an arm accelerating nozzle) or brake the counterclockwise operation of the first arm portion 21 (arm braking). Working as a nozzle). On the other hand, the gas nozzle 72 injects gas in the clockwise direction in plan view. Therefore, the reaction force when the gas nozzle 72 ejects the gas acts counterclockwise on the first arm portion 21. Thereby, the counterclockwise operation of the first arm portion 21 can be accelerated (function as an arm acceleration nozzle), or the clockwise operation of the first arm portion 21 can be braked (arm braking). Working as a nozzle).

  The acceleration sensor 73 has a tangential direction (at the position of the tip portion of the first arm portion 21) in a path (arc-shaped route) when the tip portion of the first arm portion 21 rotates about the vertical axis A in plan view. It is fixed to the tip of the first arm portion 21 so as to detect acceleration (inertial force) along a substantially horizontal detection direction set along (tangential direction). Thereby, the acceleration sensor 73 is configured to detect acceleration in the clockwise direction and the counterclockwise direction in plan view.

  In the plan view, the gas nozzles 81 and 82 are tangential to the path (arc-shaped path) when the tip of the second arm 22 rotates about the vertical axis B (the tip of the second arm 22 has It is fixed to the distal end portion of the second arm portion 22 so as to inject gas in a substantially horizontal direction along the tangential direction at the position. The gas nozzles 81 and 82 are configured to inject gas in opposite directions. More specifically, the gas nozzle 81 injects gas in the counterclockwise direction in plan view. Therefore, the reaction force when the gas nozzle 81 injects gas acts on the second arm portion 22 in the clockwise direction. Thereby, it is possible to accelerate the clockwise operation of the second arm portion 22 (function as an arm acceleration nozzle) or to brake the counterclockwise operation of the second arm portion 22 (arm braking). Working as a nozzle). On the other hand, the gas nozzle 82 injects gas in the clockwise direction in a plan view. Therefore, the reaction force when the gas nozzle 82 injects gas acts on the second arm portion 22 in the counterclockwise direction. Thereby, the counterclockwise operation of the second arm portion 22 can be accelerated (function as an arm acceleration nozzle), or the clockwise operation of the second arm portion 22 can be braked (arm braking). Working as a nozzle).

  The acceleration sensor 83 has a tangential direction (at the position of the distal end portion of the second arm portion 22) of the path (arc-shaped path) when the distal end portion of the second arm portion 22 rotates about the vertical axis B in plan view. It is fixed to the distal end portion of the second arm portion 22 so as to detect acceleration (inertial force) along a substantially horizontal detection direction set along the tangential direction. Thereby, the acceleration sensor 83 is configured to detect acceleration in the clockwise direction and the counterclockwise direction in plan view.

  The gas nozzles 91 and 92 are horizontal nozzles, and in a plan view, the tangential direction (hand) of the path (arc-shaped path) when the tip of the hand 23 (23A, 23B) rotates about the vertical axis C Is fixed to the distal end portion of the hand 23 so as to inject the gas in a substantially horizontal direction along the tangential direction at the position of the distal end portion 23. The gas nozzles 91 and 92 are configured to inject gas in opposite directions. More specifically, the gas nozzle 91 injects gas in the counterclockwise direction in plan view. Therefore, the reaction force when the gas nozzle 91 injects gas acts on the hand 23 in the clockwise direction. Thereby, the operation | movement of the clockwise direction of the hand 23 can be accelerated (working as an acceleration nozzle), and the operation | movement of the counterclockwise direction of the hand 23 can be braked (working as a braking nozzle). On the other hand, the gas nozzle 92 injects gas in the clockwise direction in plan view. Therefore, the reaction force when the gas nozzle 92 ejects the gas acts counterclockwise on the hand 23. Thereby, the counterclockwise movement of the hand 23 can be accelerated (function as an acceleration nozzle), or the clockwise movement of the hand 23 can be braked (function as a brake nozzle).

  The gas nozzle 93 is an antigravity nozzle fixed to the tip of the hand 23 so as to inject gas along the Z axis perpendicular to the main surface of the substrate W held by the hand 23. The gas nozzle 93 has a function similar to that of the Z-axis gas nozzle 55 in the first embodiment. That is, when gas is injected from the gas nozzle 93, the reaction force generated thereby lifts the tip of the hand 23 against gravity. Accordingly, even when the articulated arm 20 is extended, even if the hand 23 hangs down, the posture of the hand 23 can be maintained and the substrate W can be held in a horizontal posture. Further, if gas is ejected from the gas nozzle 93 when the articulated arm 20 is lifted, the downward inertia force acting on the hand 23 can be reduced or canceled, so that the hand 23 can be quickly started to operate or accelerated. (Acting as an accelerating nozzle). Further, if the gas nozzle 93 injects gas when the articulated arm 20 descends and stops, the downward inertia force acting on the hand 23 can be relaxed or canceled, so that the hand 23 can be vibrated quickly. The operation can be stopped while suppressing (function as a braking nozzle).

  The acceleration sensor 94 is along a tangential direction (tangential direction at the position of the distal end portion of the hand 23) when the distal end portion of the hand 23 rotates about the vertical axis C in a plan view. It is fixed to the tip of the hand 23 so as to detect acceleration (inertial force) along the set substantially horizontal detection direction. Thereby, the acceleration sensor 94 is configured to detect acceleration in the clockwise direction and the counterclockwise direction in plan view. The acceleration sensor 94 is further configured to detect acceleration acting in parallel with the Z axis. The acceleration sensor 94 detects the Z-axis component (orthographic projection onto the Z-axis) of the gravitational acceleration g when the hand 23 is stationary. Further, when the hand 23 moves up and down, a combined acceleration of the gravitational acceleration g and the acceleration corresponding to the inertial force is detected. Therefore, the acceleration sensor 94 has the same function as the acceleration sensor 56 in the first embodiment.

  Similarly to the operation assisting unit 10 of the first embodiment, the gas nozzles 71 and 72 and the acceleration sensor 73 may be integrally held by the first unit main body to constitute the first arm operation assisting unit 70. . Similarly, the gas nozzles 91 and 92 and the acceleration sensor 83 may be integrally held by the second unit main body to constitute the second arm operation auxiliary unit 80. Further, the gas nozzles 91, 92, 93 and the acceleration sensor 94 are integrally held in the third unit main body to constitute the hand operation auxiliary unit 90 (units 90A, 90B corresponding to the hands 23A, 23B, respectively). Also good. Of course, such unitization is not necessary. Further, for example, the acceleration sensor may be a separate unit while the plurality of nozzles are unitized.

  FIG. 8 is a block diagram showing a configuration related to the operation control of the indexer robot 7 according to the second embodiment. 8, portions corresponding to the respective portions shown in FIG. 5 are given the same reference numerals as those in FIG. The elevating drive mechanism 27, the first arm rotation drive mechanism 26, the second arm rotation drive mechanism 28, the first hand rotation drive mechanism 31 and the second hand rotation drive mechanism 32 are controlled by the controller 60. Furthermore, the controller 60 is configured (programmed) to control the operations of the first arm operation assisting unit 70, the second arm operation assisting unit 80, and the hand operation assisting unit 90 (90A, 90B). More specifically, output signals from the acceleration sensors 73, 83 and 94 are input to the controller 60. Moreover, the controller 60 controls gas injection by the gas nozzles 71, 72, 81, 82, 91 to 93. The gas nozzles 71, 72, 81, 82, 91 to 93 are supplied with a pressurized gas (for example, air, nitrogen or other inert gas) from the gas supply source 63 via the gas supply path 64. . The controller 60 controls one or two or more injection control amounts selected from the injection amount of gas injected from the gas nozzles 71, 72, 81, 82, 91 to 93, the injection time, the injection flow rate, and the injection pressure. It may be configured (program) as described above.

  FIG. 9 is a control block diagram of the controller 60 relating to the control of the indexer robot 7. The controller 60 obtains a deviation between the target position of the hand 23 and the current position, and determines the control amount (posture control amount) of each drive source (for example, servo motor) of the drive mechanisms 26 to 28, 31, 32 in accordance with the deviation. The driving source is controlled according to the control amount. Then, the drive result of the drive source is reflected in the behavior of the indexer robot 7 (the first arm unit 21, the second arm unit 22, and the hand 23). On the other hand, the controller 60 obtains feedforward control amounts corresponding to the first arm unit 21, the second arm unit 22, and the hand 23 according to the deviation between the target position of the hand 23 and the current position. Further, the behavior (acceleration) of the indexer robot 7 is detected by the acceleration sensors 73, 83, and 94, and the controller 60 corresponds to the first arm unit 21, the second arm unit 22, and the hand 23 based on the detected values. The obtained feedback control amount is obtained. Furthermore, the controller 60 calculates | requires the injection control amount (for example, injection amount) of each gas nozzle 71,72,81,82,91-93 based on a feedforward control amount and a feedback control amount. Based on the determined injection amount, the gas nozzles 71, 72, 81, 82, 91 to 93 are controlled to inject gas. When the reaction force generated by the gas injection acts on any of the first arm portion 21, the second arm portion 22, and the hand 23, the indexer robot 7 (the first arm portion 21, the second arm portion 22, and the hand 23) 23) changes in behavior. This change is further detected by the acceleration sensors 73, 83, and 94. The behavior of the first arm portion 21 affects the behavior of the second arm portion 22, and the behavior of the second arm portion 22 further affects the behavior of the hand 23.

The feedforward control amount is an injection control amount for canceling the inertia force that is predicted to act on the first and second arm portions 21 and 22 and the hand 23 in the process in which the hand 23 is moved from the current position to the target position. is there. By performing the feedforward control, the response delay in the feedback control can be compensated, and the control responsiveness can be enhanced.
The feedback control amount is an injection control amount for canceling the inertial force actually detected by the acceleration sensors 73, 83, and 94. By performing the feedback control, it is possible to set the injection control amount corresponding to the actual behavior of the first and second arm portions 21 and 22 and the hand 23.

  A specific control will be described. When the first arm unit 21 starts or accelerates, acceleration occurs in the operation direction, and an inertial force in a direction opposite to the operation direction is generated accordingly. The same applies to the second arm portion 22 and the hand 23. Therefore, the gas nozzles 71, 72, 81, 82, 91 to 93 inject the gas so that a reaction force in the operation direction is generated. In this case, the gas nozzles 71, 72, 81, 82, 91 to 93 function as acceleration nozzles that inject gas so as to accelerate the operation of the arm units 21, 22 or the hand 23. Further, when the first arm portion 21 decelerates or stops operating, acceleration in the direction opposite to the operation direction is generated, and accordingly, inertia force in the operation direction is generated. The same applies to the second arm portion 22 and the hand 23. Therefore, the gas nozzles 71, 72, 81, 82, 91 to 93 inject gas so that a reaction force in a direction opposite to the operation direction is generated. That is, the gas nozzles 71, 72, 81, 82, 91 to 93 function as a braking nozzle that injects gas so as to brake the operation of the hand 23.

  For example, when the first arm portion 21 starts to rotate or accelerates in the clockwise direction in plan view, gas is jetted from the gas nozzle 71 in the counterclockwise direction. Thereby, since the reaction force by the injection of the gas acts in the clockwise direction, the rotation of the first arm portion 21 in the clockwise direction is assisted (accelerated). When the first arm portion 21 starts to rotate or accelerates counterclockwise, gas is jetted from the gas nozzle 72 in the clockwise direction. Thereby, since the reaction force by the injection of the gas acts in the counterclockwise direction, the rotation of the first arm portion 21 in the counterclockwise direction is assisted (accelerated). On the other hand, when the rotation of the first arm portion 21 in the counterclockwise direction is decelerated or stopped, gas is injected from the gas nozzle 71 in the counterclockwise direction. Thereby, since the reaction force by the injection of the gas acts in the clockwise direction, the rotation of the first arm portion 21 in the counterclockwise direction is braked. Similarly, when the rotation of the first arm portion 21 in the clockwise direction is decelerated or stopped, gas is jetted from the gas nozzle 72 in the clockwise direction. Thereby, since the reaction force by the injection of the gas acts in the counterclockwise direction, the rotation of the first arm portion 21 in the clockwise direction is braked.

  The same applies to the second arm portion 22. That is, when the second arm portion 22 starts to rotate or accelerates in the clockwise direction in plan view, gas is injected from the gas nozzle 81 in the counterclockwise direction. Thereby, since the reaction force by the injection of the gas acts in the clockwise direction, the rotation of the second arm portion 22 in the clockwise direction is assisted (accelerated). When the second arm portion 22 starts to rotate or accelerates in the counterclockwise direction, gas is jetted from the gas nozzle 82 in the clockwise direction. Thereby, since the reaction force by the injection of the gas acts in the counterclockwise direction, the rotation of the second arm portion 22 in the counterclockwise direction is assisted (accelerated). On the other hand, when the rotation of the second arm portion 22 in the counterclockwise direction is decelerated or stopped, gas is injected from the gas nozzle 81 in the counterclockwise direction. Thereby, since the reaction force by the injection of the gas acts in the clockwise direction, the rotation of the second arm portion 22 in the counterclockwise direction is braked. Similarly, when the rotation of the second arm portion 22 in the clockwise direction is decelerated or stopped, gas is injected from the gas nozzle 82 in the clockwise direction. As a result, the reaction force caused by the gas injection acts in the counterclockwise direction, so that the rotation of the second arm portion 22 in the clockwise direction is braked.

  The same applies to the rotation of the hand 23. That is, when the hand 23 starts to rotate or accelerates in the clockwise direction in plan view, the gas is jetted from the gas nozzle 91 in the counterclockwise direction. Thereby, the reaction force due to the injection of the gas acts in the clockwise direction, so that the rotation of the hand 23 in the clockwise direction is assisted (accelerated). When the hand 23 starts to rotate or accelerates counterclockwise, gas is jetted from the gas nozzle 92 in the clockwise direction. As a result, the reaction force caused by the gas injection acts in the counterclockwise direction, so that the rotation of the hand 23 in the counterclockwise direction is assisted (accelerated). On the other hand, when the rotation of the hand 23 in the counterclockwise direction is decelerated or stopped, gas is jetted from the gas nozzle 91 in the counterclockwise direction. Thereby, since the reaction force by the injection of the gas acts in the clockwise direction, the rotation of the hand 23 in the counterclockwise direction is braked. Similarly, when the rotation of the hand 23 in the clockwise direction is decelerated or stopped, the gas is jetted from the gas nozzle 92 in the clockwise direction. As a result, the reaction force caused by the gas injection acts in the counterclockwise direction, so that the rotation of the hand 23 in the clockwise direction is braked.

  Another gas nozzle 93 fixed to the hand 23 is controlled to assist (accelerate) the upward movement of the articulated arm 20 and the hand 23 by injecting gas when the articulated arm 20 is raised. Also good. The gas nozzle 93 may be controlled so as to brake the downward movement of the articulated arm 20 and the hand 23 by injecting gas when the articulated arm 20 is lowered and stopped. Furthermore, the gas nozzle 93 may be controlled to inject gas so as to suppress the posture change of the hand 23 caused by the bending of the articulated arm 20 when the articulated arm 20 is extended.

  As described above, according to this embodiment, the operation of the arm portions 21 and 22 constituting the multi-joint arm 20 is assisted by the reaction force obtained by the gas injection from the gas nozzles 71, 72, 81, and 82. . Therefore, since not only the hand 23 but also the operations of the arm portions 21 and 22 are assisted, the substrate can be transported at a higher speed, and vibration at the time of stopping or the like is further suppressed. Moreover, since high-speed conveyance is possible without increasing the rigidity of the articulated arm 20, the cost is not significantly increased and the weight is not significantly increased. In addition, the same effects as those of the first embodiment can be obtained.

FIG. 10A is an illustrative perspective view for explaining the configuration of the indexer robot 7 according to the third embodiment of the present invention, and FIG. 10B is a perspective view seen from below the hand 23. The indexer robot 7 includes a base unit 15, a lateral movement mechanism 16, a hand drive mechanism 17, and a pair of hands 23A and 23B.
The base unit 15 is configured to be able to travel on a rail 19 laid along the lateral movement direction 18 along a conveyance path parallel to the lateral movement direction 18. In the substrate processing apparatus shown in FIG. 1, the lateral movement direction 18 is set parallel to the arrangement direction of the cassette mounting table 6 (cassette arrangement direction). The lateral movement mechanism 16 includes a ball screw mechanism and the like, and reciprocates (laterally moves) the base portion 15 on the rail 19 along the lateral movement direction 18. The hand drive mechanism 17 includes a rotation drive mechanism 35 that rotates the pair of hands 23A and 23B around the vertical axis D with respect to the base portion 15, and a lift drive that moves the hands 23A and 23B up and down relative to the base portion 15. A mechanism 36 and an advance / retreat drive mechanism 37 for moving the hands 23A, 23B independently in the horizontal direction are included. The advancing / retreating direction 38 of the hands 23A, 23B is a horizontal direction approaching / separating from the base unit 15 in a plan view, and is the front-rear direction of each hand 23A, 23B. The forward / backward direction 38 is a direction that follows the direction of the hands 23A and 23B, and thus is a direction that can rotate around the vertical axis D together with the hands 23A and 23B.

  By moving the base portion 15 on the rail 19 by the lateral movement mechanism 16, the hand 23 faces the cassette 5 or the board transfer position P (see FIG. 1) directly (that is, orthogonal to the rail 19 in plan view). It can move to the position which opposes along the direction to do. Further, by rotating the hand 23 around the vertical axis D by the rotation drive mechanism 35, the advancing / retreating direction 38 of the hand 23 can be directed to the directly facing cassette 5 or substrate delivery position P. Further, by moving the hand 23 up and down by the lift drive mechanism 36, the hand 23 can be arranged at the substrate transfer height with the cassette 5 or the main transport robot 4, and the substrate W can be transferred between them.

  The hand 23 is provided with hand gas nozzles 101, 102, 103. Two of the hand gas nozzles 101 and 102 are horizontal nozzles fixed to the hand 23 so as to inject gas in a horizontal direction parallel to the advancing / retreating direction 38 of the hand 23. These hand gas nozzles 101 and 102 are configured to inject gas in the opposite directions along the forward / backward direction 38. That is, one hand gas nozzle 101 injects gas toward the back of the hand 23, and the other hand gas nozzle 102 injects gas toward the front of the hand 23. Further, another hand gas nozzle 103 is an anti-gravity nozzle fixed to the hand 23 so as to inject gas downward. More specifically, the hand gas nozzle 103 injects gas downward along the Z-axis direction orthogonal to the main surface of the substrate W held by the hand 23.

An acceleration sensor 104 is further attached to the hand 23. The acceleration sensor 104 is configured to detect acceleration in a direction along the advance / retreat direction 38 of the hand 23 and acceleration along the Z-axis direction.
On the other hand, the base part 15 is provided with two base part gas nozzles 107 and 108 (base part operation auxiliary nozzles) for injecting gas in a direction parallel to the lateral movement direction 18. Furthermore, the base unit 15 is provided with an acceleration sensor 109 that detects acceleration along a horizontal direction parallel to the lateral movement direction 18.

  FIG. 11 is a block diagram showing a configuration related to operation control of the indexer robot 7 according to the third embodiment. In FIG. 11, parts corresponding to those shown in FIG. 5 are given the same reference numerals as in FIG. The lateral movement mechanism 16 and the hand drive mechanism 17 (the rotation drive mechanism 35, the lift drive mechanism 36, and the advance / retreat drive mechanism 37) are controlled by the controller 60. Furthermore, output signals from the acceleration sensors 104 and 109 are input to the controller 60. Further, the controller 60 controls gas injection by the gas nozzles 101 to 103, 107 and 108. The gas nozzles 101 to 103, 107, and 108 are supplied with a pressurized gas (for example, air, nitrogen, or other inert gas) from the gas supply source 63 via the gas supply path 64. The controller 60 is configured to control one or two or more injection control amounts selected from the injection amount of gas injected from the gas nozzles 101 to 103, 107, and 108, the injection time, the injection flow rate, and the injection pressure ( Program).

  FIG. 12 is a control block diagram of the controller 60 related to the control of the indexer robot 7. The controller 60 obtains a deviation between the target position of the hand 23 and the current position, obtains a control amount (posture control amount) of each drive source (for example, servo motor) of the drive mechanisms 16 and 17 according to the deviation, and controls the control. The drive source is controlled according to the amount. This control is reflected in the behavior of the indexer robot 7 (base unit 15 and hand 23). On the other hand, the controller 60 obtains a deviation between the target position of the hand 23 and the current position, and obtains a feedforward control amount for lateral movement of the base unit 15 and advance / retreat of the hand 23 according to the deviation. Furthermore, the behavior (acceleration) of the hand 23 and the base unit 15 is detected by the acceleration sensors 104 and 109, and the controller 60 performs the advance / retreat of the hand 23 and the lateral movement of the base unit 15 based on the detected values. Find the feedback control amount. Furthermore, the controller 60 controls the injection control amount (for example, injection) of each of the gas nozzles 101 to 103, 108 based on the feedforward control amount and the feedback control amount for the advance and retreat of the hand 23 and the lateral movement of the base unit 15. (Quantity). Based on the calculated injection amount, the gas nozzles 101 to 103, 107, and 108 are controlled to inject gas. When the reaction force generated by the gas injection acts on either the base portion 15 or the hand 23, this causes a change in the behavior of the indexer robot 7. This change is further detected by the acceleration sensors 104 and 109. The behavior of the base portion 15 affects the behavior of the hand 23.

The feedforward control amount is an injection control amount for canceling the inertia force that is predicted to act on the base 15 and the hand 23 in the process in which the hand 23 is moved from the current position to the target position. By performing the feedforward control, the response delay in the feedback control can be compensated, and the control responsiveness can be enhanced.
The feedback control amount is an injection control amount for canceling the inertial force actually detected by the acceleration sensors 104 and 109. By performing the feedback control, it is possible to set the injection control amount corresponding to the actual behavior of the base unit 15 and the hand 23.

A specific control will be described. When the base unit 15 starts or accelerates, acceleration occurs in the operation direction, and accordingly, an inertial force in a direction opposite to the operation direction is generated. The same applies to the hand 23. Therefore, 101 to 103, 107, and 108 inject a gas so that a reaction force in the operation direction is generated.
For example, when the base unit 15 starts to move or accelerates in a first direction 181 parallel to the lateral movement direction 18, a second direction 182 (first direction) parallel to the lateral movement direction 18 is received from the base unit gas nozzle 107. Gas is jetted in the direction opposite to 181). Thereby, since the reaction force by the injection of the gas acts in the first direction 181, the movement of the base part 15 in the first direction 181 is assisted (accelerated) (function as a base part acceleration nozzle). When the base portion 15 starts to move or accelerates in the second direction 182, gas is jetted from the base portion gas nozzle 108 toward the first direction 181. Thereby, since the reaction force by the injection of the gas acts in the second direction 182, the movement of the base part 15 in the second direction 182 is assisted (accelerated) (function as a base part acceleration nozzle). On the other hand, when the movement of the base part 15 in the first direction 181 is decelerated or stopped, gas is injected from the base part gas nozzle 108 in the first direction 181. As a result, the reaction force due to the gas injection acts in the second direction 182, so that the movement of the base portion 15 in the first direction 181 is braked (function as a base portion braking nozzle). Similarly, when the movement of the base part 15 in the second direction 182 is decelerated or stopped, gas is injected from the base part gas nozzle 107 in the second direction 182. As a result, the reaction force due to the gas injection acts in the first direction 181, so that the movement of the base portion 15 in the second direction 182 is braked (function as a base portion braking nozzle).

  When the hand 23 starts to operate or accelerates in the forward direction 381, gas is jetted from the hand gas nozzle 101 toward the backward direction 382. As a result, the reaction force due to the gas injection acts in the forward direction 381, so that the operation of the hand 23 in the forward direction 381 is assisted (accelerated) (function as an acceleration nozzle). When the hand 23 starts or accelerates in the backward direction 382, gas is ejected from the hand gas nozzle 102 in the forward direction 381. As a result, the reaction force caused by the gas injection acts in the backward direction 382, so that the operation of the hand 23 in the backward direction 382 is assisted (accelerated) (function as an acceleration nozzle). On the other hand, when the operation of the hand 23 in the forward direction 381 is decelerated or stopped, gas is injected from the hand gas nozzle 102 in the forward direction 381. As a result, the reaction force caused by the gas injection acts in the backward direction 382, so that the operation of the hand 23 in the forward direction 381 is braked (function as a braking nozzle). Similarly, when the operation of the hand 23 in the backward direction 382 is decelerated or stopped, gas is injected from the hand gas nozzle 101 in the backward direction 382. As a result, the reaction force due to the gas injection acts in the forward direction 381, so that the operation of the hand 23 in the backward direction 382 is braked (function as a braking nozzle).

  Another hand gas nozzle 103 fixed to the hand 23 may be controlled to assist the upward movement of the hand 23 by injecting gas when the hand 23 is raised. Further, the gas nozzle 103 may be controlled so as to brake the downward movement of the hand 23 by injecting gas when the hand 23 is lowered and stopped. Further, the gas nozzle 103 may be controlled to inject gas so as to suppress the posture change of the hand 23 caused by the weight of the hand 23 and the substrate W when the hand 23 is advanced.

  As described above, according to this embodiment, the operation of the base portion 15 can be assisted by the reaction force obtained by the gas injection from the base portion gas nozzles 107 and 108. Accordingly, since the base unit 15 can be accelerated and / or decelerated quickly, the time required to reach the maximum speed at the start of the operation of the base unit 15 can be shortened, and the base unit 15 can be stopped in a short time. Can be made. This can contribute to high-speed conveyance of the substrate W.

FIG. 13 is a control block diagram (fourth embodiment) showing a control configuration that can be used in place of the control configuration of FIG. In the control configuration of FIG. 6, feedforward control and feedback control are used together, whereas in the control configuration of FIG. 13, feedback control is omitted. When this control configuration is adopted, the acceleration sensor can be omitted.
FIG. 14 is a control block diagram (fifth embodiment) showing a control configuration that can be used in place of the control configuration of FIG. In the control configuration of FIG. 6, feedforward control and feedback control are used together, whereas in the control configuration of FIG. 14, feedforward control is omitted.

  As mentioned above, although 5 embodiment of this invention has been described, this invention can also be implemented with another form. For example, in the above-described embodiment, both the acceleration at the start and acceleration of movement of the hand etc. and the braking at the time of deceleration and stop of the hand etc. are assisted by gas injection. You may make it assist by gas injection. Moreover, although the example provided with the antigravity nozzle was shown in the above-mentioned embodiment, you may omit an antigravity nozzle. Furthermore, in the first and second embodiments described above, the articulated arm 20 having the first arm portion 21 and the second arm portion 22 is exemplified, but an articulated arm in which three or more arm portions are connected is used. May be. In addition, various design changes can be made within the scope of matters described in the claims.

DESCRIPTION OF SYMBOLS 1 Substrate processing module 2 Indexer module 3 Processing unit 4 Main transfer robot 5 Cassette 6 Cassette mounting base 7 Indexer robot 10A, 10B Operation auxiliary unit 11 Base part 15 Base part 16 Lateral movement mechanism 17 Hand drive mechanism 18 Lateral movement direction 181 First direction 182 Second direction 19 Rail 20 Articulated arm 21 First arm part 22 Second arm part 23, 23A, 23B Hand 25 Rotating shaft 26 First arm rotational drive mechanism 27 Lift drive mechanism 28 Second arm rotational drive mechanism 31 First Hand Rotation Drive Mechanism 32 Second Hand Rotation Drive Mechanism 35 Rotation Drive Mechanism 36 Elevation Drive Mechanism 37 Advance / Retreat Drive Mechanism 38 Advance / Retreat Direction 381 Advance Direction 382 Retreat Direction 40 Hand 41 Turntable 42 Hand Advance / Retract Mechanism 43 Elevator Mechanism 50 Unit Body 51 X Gas nozzle 52 X-axis gas nozzle 53 Y-axis gas nozzle 54 Y-axis gas nozzle 55 Z-axis gas nozzle 56 Acceleration sensor 60 Controller 63 Gas supply source 64 Gas supply path 70 First arm operation auxiliary unit 71, 72 Gas nozzle 73 Acceleration sensor 80 Second arm operation auxiliary unit 81, 82 Gas nozzle 83 Acceleration sensor 90A, 90B Hand operation auxiliary unit 91-93 Gas nozzle 94 Acceleration sensor 101-103 Hand gas nozzle 104 Acceleration sensor 107, 108 Base part gas nozzle 109 Acceleration sensor 101, 102, 103 Hand gas nozzle A Vertical axis B Vertical axis C Vertical axis D Vertical axis P Substrate delivery position W Substrate θ Tilt angle

Claims (17)

A hand for holding a substrate;
A hand drive mechanism for driving the hand;
A substrate transfer apparatus, comprising: a gas nozzle that is provided in the hand and injects gas so as to assist the operation of the hand.   The substrate transfer apparatus according to claim 1, wherein the gas nozzle includes an acceleration nozzle that injects gas so as to accelerate the operation of the hand.   The substrate transfer apparatus according to claim 1, wherein the gas nozzle includes a brake nozzle that injects gas so as to brake the operation of the hand.   The substrate transfer apparatus according to claim 1, wherein the gas nozzle includes a horizontal nozzle that injects gas in a direction along a horizontal plane.   The board | substrate conveyance apparatus as described in any one of Claims 1-4 in which the said gas nozzle contains the antigravity nozzle which injects gas downward. Acceleration detecting means for detecting the acceleration of the hand;
The substrate transfer apparatus according to claim 1, further comprising: an injection control unit that controls injection of gas from the gas nozzle according to the acceleration detected by the acceleration detection unit. The hand drive mechanism includes an articulated arm having a plurality of arm portions that are rotatably coupled to each other;
The hand is coupled to the articulated arm;
The substrate transfer according to any one of claims 1 to 6, further comprising an arm operation auxiliary nozzle that is provided in at least one of the plurality of arm portions and injects a gas so as to assist the operation of the arm portion. apparatus. A base unit that supports the hand drive mechanism and travels along the transport path;
The board | substrate conveyance apparatus as described in any one of Claims 1-6 further equipped with the said base part and the base part operation | movement assistance nozzle which injects gas so that the operation | movement of the said base part may be assisted. . The substrate transfer device according to any one of claims 1 to 8,
A substrate processing apparatus, comprising: a processing unit that processes a substrate transported by the substrate transport apparatus. Driving a hand holding a substrate by a hand drive mechanism;
And a gas injection step of assisting the operation of the hand by injecting gas from a gas nozzle provided in the hand.   The substrate transfer method according to claim 10, wherein the gas injection step includes an acceleration step of injecting a gas from the gas nozzle so as to accelerate the operation of the hand.   The substrate transfer method according to claim 10 or 11, wherein the gas injection step includes a braking step of injecting a gas from the gas nozzle so as to brake the operation of the hand.   The substrate transfer method according to any one of claims 10 to 12, wherein the gas injection step includes a horizontal injection step of injecting a gas from the gas nozzle in a direction along a horizontal plane.   The substrate transport method according to claim 10, wherein the gas injection step includes an anti-gravity injection step of injecting gas downward from the gas nozzle. An acceleration detecting step of detecting an acceleration of the hand;
The substrate transfer method according to claim 10, wherein the gas injection step includes a step of injecting gas from the gas nozzle in accordance with the acceleration detected by the acceleration detection step. The hand drive mechanism includes an articulated arm having a plurality of arm portions that are rotatably coupled to each other;
The hand is coupled to the articulated arm;
The arm operation assisting step of injecting a gas from an arm operation assisting nozzle provided in at least one of the plurality of arm portions so as to assist the operation of the arm portion. The board | substrate conveyance method as described in a term.   A base unit operation assist that jets gas so as to assist the operation of the base unit from a base unit operation auxiliary nozzle provided in the base unit that supports the hand drive mechanism and travels along the transport path. The substrate transfer method according to claim 10, further comprising a step.

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