JP2012191228A - Thin-film semiconductor device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a thin-film semiconductor device capable of forming a plurality of thin-film transistors (TFT) having different gate insulation film thicknesses which are appropriate to circuit characteristics, on the same substrate, and in a polycrystal silicon film, without making processes complex, and to provide a manufacturing method of the thin-film semiconductor device.SOLUTION: When TFTs whose drive voltages differ from each other to a polycrystal silicon film formed on a glass substrate are mixed and formed, in low-voltage driven TFTs, an acceptor has more impurity of a channel region or a donor has less impurity of the channel region, and in high-voltage driven TFTs, the donor has more impurity of the channel region or the acceptor has less impurity of the channel region.

Description

The present invention provides a plurality of thin film transistors (TFTs) on an insulating substrate.
More particularly, the present invention relates to a thin film semiconductor device having a plurality of types of TFTs having gate insulating films with different film thicknesses on the same substrate and a method for manufacturing the same.

2. Description of the Related Art Flat panel image display devices such as liquid crystal display devices or organic EL display devices that are thinner and lighter than CRTs are used as monitors for notebook personal computers and televisions. These liquid crystal display devices or organic EL display devices use thin film formation technology,
A display unit having pixels arranged in a matrix on an inexpensive insulating substrate such as glass is formed, and a gate driver or a data driver, which is a semiconductor integrated circuit, is externally attached. By providing the pixel, the direction of the liquid crystal molecules and the emission intensity of the organic EL are controlled to display an image. However, in recent years, with the improvement of thin film formation technology, it has become possible to form a polycrystalline silicon thin film on a glass substrate, so that together with the pixel part, a part of the drive circuit part composed of the polycrystalline silicon TFT is formed on the same substrate. The thin film semiconductor device formed in the above has been put into practical use. This drive circuit preferably has a lower operating voltage from the viewpoint of low power consumption. However, since a certain voltage or more is required for pixel operation, a technique for mounting a plurality of types of thin film transistors having different operation voltages on the same substrate is required.

As described above, as a technique for mounting a plurality of types of transistors having different operating voltages on the substrate, it is a common method to change the gate insulating film thickness due to the problem of withstand voltage of the transistors (for example, Patent Document 1, Patent Reference 2). FIG. 16 is a cross-sectional view of a thin film semiconductor device manufactured by a conventional technique. As shown in the figure, an island-like polycrystalline silicon film 3 serving as an active layer of each of the low voltage driving TFT and the high voltage driving TFT is formed on the insulating substrate 1.
Each island-like polycrystalline silicon film 3 is provided with a channel region 3c and the channel region 3c.
A source / drain region 3n of the n-channel TFT and a source / drain region 3p of the p-channel TFT are formed across c. Each island-like polycrystalline silicon film 3 is covered with a first gate insulating film 4, and a low voltage is applied on the first gate insulating film 4 over the channel region 3 c of the island-like polycrystalline silicon film 3. Gate electrodes 5 for driving n-channel and p-channel TFTs are formed. Furthermore, a high-voltage driven n-channel and p-channel TFT gate electrode 7 is formed on the channel region 3c of the island-like polycrystalline silicon film 3 via the second gate insulating film 6. . An interlayer insulating film 8 is formed so as to cover each TFT, and the n-channel and the p channel are formed through a contact hole formed through the interlayer insulating film 8 and the second and first gate insulating films 6 and 4. Channel TFT source / drain regions 3n, 3p
The electrode 9 which contacts is formed.

The source / drain regions 3n and 3p are formed without using the self-alignment method in the case described in Patent Document 1, whereas in the case described in Patent Document 2, the low-voltage drive T
Only the FT is formed using the self-alignment method, and the high-voltage driving TFT is formed without using the self-alignment method. The channel region 3c of these TFTs is a non-doped or B-doped region, and the channel region of the high voltage driving TFT and the channel region of the low voltage driving TFT are formed in the same doping state. Further, Al or Cr (in the case of Patent Document 1) or silicon (in the case of Patent Document 2) is used as the material of the gate electrodes 5 and 7, and the gate electrode of the high voltage driving TFT and the gate of the low voltage driving TFT are used. The electrode was formed using the same material.
Regarding channel doping, in a bulk type MOS transistor, a difference may be made between a high voltage driving transistor and a low voltage driving transistor (see, for example, Patent Document 3). In Patent Document 3, for an n-channel MOS, a channel region of a high voltage transistor is doped with an n-type dopant and a p-type dopant, and a channel region of a low-voltage transistor is doped with only a p-type dopant. Describes that the channel region of the high voltage transistor is doped with an n-type dopant at a low concentration, and the channel region of the low voltage transistor is doped with an n-type dopant at a high concentration. As another example, in Patent Document 3, for an n-channel MOS, a p-type dopant has a low concentration in a channel region of a high-voltage transistor, and a p-type dopant has a high concentration in a channel region of a low-voltage transistor. As for p-channel MOS, it is described that a channel region of a high-voltage transistor is doped with an n-type dopant and a p-type dopant, and a channel region of a low-voltage transistor is doped only with an n-type dopant. .
Japanese Patent No. 2666103 JP 2004-253596 A Japanese Patent No. 2964232

However, the high-voltage drive TF manufactured by the manufacturing method disclosed in Patent Documents 1 and 2
As shown in FIG. 17, there is a problem in that the threshold voltage of the high-voltage driving n-channel TFT and the high-voltage driving p-channel TFT is higher than that of the respective channel-type low-voltage driving TFTs. is there. Note that the threshold voltage is a gate voltage when a sufficient current starts to flow between the drain and source of the transistor. In the present specification, unless otherwise specified, the level of the threshold voltage does not mean the magnitude of the absolute value. A value on the positive side is high (large) and a value on the negative side is low. (Small). Here, even if the manufacturing method disclosed in Patent Document 3 is adopted, the above problem cannot be solved. This is because, in the case of a p-channel TFT, the difference in threshold voltage between the low voltage driving TFT and the high voltage driving TFT is enlarged.

For example, since the peripheral drive circuit of the liquid crystal display device is composed of a digital circuit that handles two voltages of low level and high level, the TFT is turned off when the gate voltage is 0V, while the gate voltage is low in absolute value. It is desirable to obtain a sufficient driving current. That is, it is desirable that the threshold voltage should not be too close to 0 and not far from 0. This is because when the absolute value of the threshold voltage is extremely low, the power consumption of the circuit increases during standby, while when the absolute value of the threshold voltage is high, sufficient current drive is achieved with a predetermined gate voltage. This is because the capability cannot be obtained, causing malfunction due to signal delay. In the characteristics of the conventional example shown in FIG. 17, since the threshold voltage of a high-voltage driven p-channel TFT is as high as 0 V, the leakage current at the time of a 0-level signal is large, whereas in the high-voltage driven n-channel TFT ,
Since the threshold voltage is as high as 6V, there is a risk of insufficient driving current.

The reason why the threshold voltage of the high voltage driving TFT becomes high (moves to the positive side) is the high voltage driving T
Due to contamination in the gate insulating film of FT and crystal defects in the channel region of the high voltage driving TFT,
This is because carriers are captured by recombination centers generated in the forbidden band. The reason for this is contamination due to the remaining etching of the gate electrode of the low voltage drive TFT, plasma damage to the gate insulating film when the gate electrode of the low voltage drive TFT is overetched by dry etching, and source / drain regions. This is because crystal defects are generated on the surface of the polycrystalline silicon other than the region covered with the gate electrode of the low-voltage driving TFT by irradiation with light such as laser light or lamp light in the activation process of the implanted impurity. That is, the problem that the threshold voltage of the dual-channel type high-voltage driving TFT is higher than that of the low-voltage driving TFT is that the island-like polycrystalline silicon film 3 is provided on the insulating substrate shown in FIG. , A first gate insulating film, a gate electrode of a low voltage driving TFT, a second gate insulating film, and a high voltage driving TF
This is peculiar to a thin film semiconductor device in which T gate electrodes are sequentially formed.
An object of the present invention is to solve the above-described problems of the prior art, and the object thereof is to provide a plurality of TFTs having different gate insulating film thicknesses with appropriate threshold values without greatly increasing the number of processes. It is to be able to have a voltage.

To achieve the above object, according to the present invention, a low voltage driving thin film transistor in which a gate electrode and a semiconductor thin film are opposed to each other with a thin first type gate insulating film interposed therebetween, and the first type gate insulating In a thin film semiconductor device, a high voltage driving thin film transistor in which a high voltage driving thin film transistor in which a gate electrode and a semiconductor thin film face each other with a second type gate insulating film thicker than the film interposed therebetween is disposed on an insulating substrate. Is characterized in that the threshold voltage is adjusted to be lower when the film thickness, material, and charge density of the gate insulating film are assumed to be the same for a low-voltage driving thin film transistor of the same polarity. A thin film semiconductor device is provided.

Preferably, the impurity doping of the channel region of the high-voltage driving thin film transistor is performed by expressing the p-type impurity concentration as a positive value and the n-type impurity concentration as a negative value. It has been adjusted to the more negative side. Alternatively, the gate electrode material of the high voltage driven thin film transistor is selected so that its work function is smaller than that of the gate electrode material of the low voltage driven thin film transistor.
Preferably, the gate electrode material of the high-voltage driving thin film transistor and the impurity doping of the channel region are formed in accordance with the gate electrode material of the low-voltage driving thin film transistor and the impurity doping of the channel region. When the material and the charge density are assumed to be the same, the threshold voltage is adjusted to decrease.

In order to achieve the above object, according to the present invention, a step of forming a semiconductor thin film on an insulating substrate, a step of forming a first gate insulating film, and a low step on the first gate insulating film are provided. A step of forming a gate electrode for the voltage-driven thin film transistor, a step of forming a source / drain region of the low-voltage driven thin film transistor, and a second gate insulating film on the low-voltage driven thin film transistor forming region and the high-voltage driven thin film transistor forming region And a step of forming a gate electrode for a high voltage drive thin film transistor on the laminated film of the first and second gate insulating films, and a method for manufacturing a thin film semiconductor device, comprising: Between the step of forming the gate electrode and the step of forming the gate electrode for the high voltage driving thin film transistor, the low voltage driving thin film transistor is provided. Method of manufacturing a thin film semiconductor device characterized by registers forming region and the high voltage drive TFT forming region introducing said semiconductor thin film n-type dopant is added, is provided.

In order to achieve the above object, according to the present invention, a step of forming a semiconductor thin film on an insulating substrate, a step of forming a first gate insulating film, and a low step on the first gate insulating film are provided. A step of forming a gate electrode for the voltage-driven thin film transistor, a step of forming a source / drain region of the low-voltage driven thin film transistor, and a second gate insulating film on the low-voltage driven thin film transistor forming region and the high-voltage driven thin film transistor forming region And a step of forming a gate electrode for a high-voltage-driven thin film transistor on the laminated film of the first and second gate insulating films, and a method of manufacturing a thin film semiconductor device having a semiconductor on an insulating substrate Between the step of forming the thin film and the step of forming the gate electrode for the low voltage driving thin film transistor, the low voltage driving thin film transistor formation region Method of manufacturing a thin film semiconductor device characterized by steps is added to introduce a p-type dopant in the semiconductor thin film through a mask having an opening, it is provided.

In order to achieve the above object, according to the present invention, a step of forming a semiconductor thin film on an insulating substrate, a step of forming a first gate insulating film, and a low step on the first gate insulating film are provided. A step of forming a gate electrode for the voltage-driven thin film transistor, a step of forming a source / drain region of the low-voltage driven thin film transistor, and a second gate insulating film on the low-voltage driven thin film transistor forming region and the high-voltage driven thin film transistor forming region And a step of forming a gate electrode for a high-voltage-driven thin film transistor on the laminated film of the first and second gate insulating films, and a method of manufacturing a thin film semiconductor device having a semiconductor on an insulating substrate Between the step of forming a thin film and the step of forming a gate electrode for a low voltage driving thin film transistor, a high voltage driving thin film transistor formation region Method of manufacturing a thin film semiconductor device characterized by steps is added to introduce an n-type dopant in the semiconductor thin film through a mask having an opening, it is provided.

In order to achieve the above object, according to the present invention, a step of forming a semiconductor thin film on an insulating substrate, a step of forming a first gate insulating film, and a low step on the first gate insulating film are provided. A step of forming a gate electrode for the voltage-driven thin film transistor, a step of forming a source / drain region of the low-voltage driven thin film transistor, and a second gate insulating film on the low-voltage driven thin film transistor forming region and the high-voltage driven thin film transistor forming region And a step of forming a gate electrode for a high voltage driving thin film transistor on the laminated film of the first and second gate insulating films, in the method of manufacturing a thin film semiconductor device, for the low voltage driving thin film transistor The work function of the gate electrode material is larger than the work function of the gate electrode material for the high voltage driving thin film transistor. Method of manufacturing a thin film semiconductor device which, is provided.

When the high voltage drive and low voltage drive TFTs are formed by the conventional method, the threshold voltage of the high voltage drive TFT is higher than that of the low voltage drive TFT in both the n-channel type and the p-channel type. The problem has been found for the first time by the present inventors. In order to solve this problem, in the thin film semiconductor device according to the present invention, the high voltage driving TFT has a threshold voltage under the condition that it has the same gate insulating film as the low voltage driving TFT of the same polarity. Adjusted to lower. That is, the threshold voltage is adjusted to move to the negative side. Several methods are conceivable as means for moving the threshold voltage. As practical means, there are two methods of adjusting the doping of the channel region and selecting the gate electrode material. Here, the principle that the threshold voltage can be adjusted by these methods will be described.

As a first method, threshold voltage control by ion implantation into the channel region will be described. The threshold voltage Vth of the TFT is approximated by the following equation (1).
Vth = Φm−Φs ± 2φb ± (4EoEsqNφb) ^1/2 / Cox ± qnα / Cox (1)
Where Φm: work function of the gate electrode, Φs: work function of the active layer (channel region), φb = k
T / qln (N / Ni), N = nα / ts, q: electron charge, Cox = EoEox / tox, ts:
Semiconductor thin film thickness, tox: gate insulating film thickness, Eo: vacuum dielectric constant, Es: silicon relative dielectric constant, Eox: SiO ₂ relative dielectric constant, n: channel actual dose (unit area concentration), α : Activation rate of dopant, Ni: Impurity concentration of intrinsic Si. In the equation (1), the sign of ± is positive when the channel dose impurity is an acceptor and negative when it is a donor.
Based on the equation (1), the amount of change in threshold voltage, ΔVth, derived from the actual impurity implantation amount into the semiconductor region constituting the channel as a variable n, is shown as a graph in FIG. FIG.
As shown in FIG. 4, in the case of an acceptor using B as an example, the threshold voltage is adjusted in the positive direction as the injection amount increases. This is mainly due to the contribution of + qnα / Cox, which is the fifth term of Equation (1). This principle is that negatively ionized acceptor ions generate a positive charge + qnα in the channel region and a negative charge −q on the gate electrode side through the gate insulating film capacitance Cox.
As a result of the occurrence of nα, in order to cancel these charges, it is necessary to apply a voltage of + qnα / Cox to the gate electrode. As shown in FIG. 1B, in the case of a donor using phosphorus (P) as an example, the threshold voltage moves in the negative direction as the injection amount increases. In the case of the donor, contrary to the case of the acceptor, the positively ionized donor ion generates a negative charge −qnα in the channel region and also generates a positive charge + qnα on the gate electrode side through the gate insulating film capacitance Cox. by. Further, in both FIGS. 1A and 1B, it can be seen that as the gate insulating film becomes thicker, the change in the threshold voltage becomes larger with respect to a certain impurity implantation amount. For example, when the gate insulating film thickness is 150 nm, a donor (P) injection amount of 6.0 × 10 ¹¹ cm ⁻² is required to adjust the threshold voltage to −3V.

Next, the principle that the threshold voltage of the high voltage driving TFT can be lowered by making the work function of the gate electrode of the high voltage driving TFT lower than the work function of the gate electrode of the low voltage driving TFT will be described. . 2 to 4 are energy band diagrams of a MOS structure for explaining this principle. 2 to 4, (a) shows the case where Al (work function Φm = 4.1 eV) is used as a material having a low work function for the gate electrode, and (b) shows a material having a high work function for the gate electrode. The case where Cr (work function Φm = 4.6 eV) is used is shown. 2 shows a gate voltage non-application state (junction state), FIG. 3 shows a flat band state, and FIG. 4 shows a threshold voltage application state. P-type Si (work function Φs =
4.9 eV) In the n-channel transistor in which no voltage is applied to the gate electrode, the Fermi level of the channel region and the Fermi level of the gate electrode coincide with each other. When the magnitude relationship with the work function of Φm <Φs, the energy band of the channel region Si bends downward according to the work function difference between each gate electrode and the channel region in FIG. A weak inversion layer is formed in the vicinity. At this time, the larger the work function difference between the active layer and the gate electrode, in other words, the smaller the work function of the gate electrode, the greater the bending of the energy band and the higher the electron concentration near the surface of the channel region.

In order to drive electrons to the semiconductor side from the state where the inversion layer by minority carriers (electrons) shown in FIG. 2 is formed, it is necessary to make the energy band of the channel region flat. As shown in FIG. 3, at this time, the negative voltage applied to the gate electrode matches the work function difference. That is, the gate voltage required at this time is the flat band voltage: Vfb (=
(Φm−Φs). The threshold voltage application state (FIG. 2 and the state where the inversion layer appears strongly) (
As can be seen from FIG. 4, the flat band voltage Vf increases as the work function of the gate electrode increases.
b and the threshold voltage Vth are increased (moved to the positive side).
2 to 4 are diagrams for explaining the case of the n-channel type, but the case of the p-channel can also be explained in the same manner. In the case of the p-channel, the flatter the work function of the gate electrode is. The band voltage Vfb and the threshold voltage Vth are increased (moved to the positive side).
Furthermore, the graph of FIG. 5 shows the quantitative relationship between the work function Φm of the gate electrode and the amount of change in threshold voltage: ΔVth. In the figure, ΔVth indicates the amount of change from n ⁺ Si as a reference. From the figure, it can be seen that ΔVth increases in the positive direction as the work function of the gate electrode increases, so that the threshold voltage can be controlled by the material of the gate electrode.

According to the present invention, the threshold voltage of the high-voltage driving TFT is low under the condition that the gate insulating film is the same by adjusting the channel doping or selecting the gate electrode material.
It is adjusted to be lower than the threshold voltage of FT. As a result, the threshold voltage of the p-channel type high-voltage driving TFT formed at a value close to 0 can be formed to a lower value, in other words, a value farther from 0, and a value that is too high. The threshold voltage of the n-channel type high-voltage driving TFT formed in (1) can be made lower, in other words, closer to 0. That is, the threshold voltage of both the p-channel and n-channel high voltage driving TFTs, which is a problem in the conventional thin film semiconductor device, is formed higher than the threshold voltage of the low voltage driving TFT. Inconvenience can be eliminated. Therefore, according to the present invention, it is possible to solve the problem that the threshold voltage of the high voltage driving TFT is too close to 0 or too far from 0 to prevent an increase in standby current consumption and to reduce the drive current. It becomes possible to suppress signal delay due to shortage.
In addition, the method of the present invention does not add any special change to the conventional manufacturing method, but only changes the channel doping and the selection of the gate electrode material. Therefore, according to the present invention, the manufacturing cost is significantly increased. Low voltage drive / high voltage drive mixed T having a desired threshold voltage without any
An FT structure can be realized.

The figure which shows the relationship between the amount of ion implantation to the active layer calculated | required from numerical formula, and the variation | change_quantity of threshold voltage. Energy band diagram of MOS structure (part 1). MOS structure energy band diagram (Part 2). MOS structure energy band diagram (Part 3). The figure which shows the relationship between the work function of gate electrode material, and the variation | change_quantity of threshold voltage. Sectional drawing which shows the 1st Embodiment of this invention, and explanatory drawing of impurity concentration. Sectional drawing explaining the manufacturing process of Example 1 of this invention (the 1). Sectional drawing explaining the manufacturing process of Example 1 of this invention (the 2). Sectional drawing explaining the manufacturing process of Example 1 of this invention (the 3). The Id-Vg characteristic figure which shows the effect of this invention. Sectional drawing explaining the manufacturing process of Example 2 of this invention (the 1) Sectional drawing explaining the manufacturing process of Example 2 of this invention (the 2) Sectional drawing which shows the 2nd Embodiment of this invention. Sectional drawing which shows the structure of Example 5 of this invention. Sectional drawing of the order of a process which shows an example of the manufacturing method of the thin film semiconductor device which has the high voltage drive TFT of the LDD structure of this invention (the 1). Sectional drawing of the order of a process which shows an example of the manufacturing method of the thin film semiconductor device which has the high voltage drive TFT of the LDD structure of this invention (the 2). Sectional drawing which shows the example of a change of the 1st Embodiment of this invention. The top view of the active matrix substrate which mixedly mounted the low voltage drive TFT and high voltage drive TFT of this invention. Sectional drawing of a prior art example. The Id-Vg characteristic figure of a prior art example.

Next, embodiments of the present invention will be described in detail with reference to the drawings.
FIG. 6A is a cross-sectional view showing the first embodiment of the present invention. As shown in the figure, the thin film semiconductor device according to the present invention has both channel type low voltage driving Ts on an insulating substrate 1.
An FT and a high voltage driving TFT are formed. That is, on the insulating substrate 1,
An island-like polycrystalline silicon film 3 serving as an active region of each transistor is provided in isolation, and a low-voltage driving TF is provided on each island-like polycrystalline silicon film 3 via a first gate insulating film 4.
A gate electrode 5 for T is formed, and a gate electrode 7 for a high voltage driving TFT is formed through first and second gate insulating films 4 and 6.
A source / drain region 3n doped with an n-type impurity at a high concentration is formed in the island-like polycrystalline silicon film 3 of the low-voltage drive and high-voltage drive n-channel TFT, and the low-voltage drive and high-voltage drive p A source / drain region 3p doped with a high concentration of p-type impurities is formed in the island-shaped polycrystalline silicon film 3 of the channel TFT. The channel region sandwiched between the source / drain regions is an acceptor enhancement region 3a that can contain a relatively large number of acceptors in the case of a low voltage driving TFT, and in the case of a high voltage driving TFT. The donor enhancement region 3b can contain a relatively large amount of donor. Here, the meanings of the acceptor enhancement region 3a and the donor enhancement region 3b are relative and do not mean that they actually contain many acceptors and donors. This will be described with reference to FIG. FIG. 6B is a coordinate axis in which the non-doped state is set to 0, the n-type dopant concentration is a negative value, and the p-type dopant concentration is a positive value. The impurity doping state of a certain region can be indicated by one point on this coordinate axis. For a region containing both an n-type dopant and a p-type dopant, a value obtained by subtracting the n-type dopant concentration from the p-type dopant concentration is represented on the coordinate axis.
In this coordinate axis, the impurity doping state of the acceptor enhancement region 3a is located on the right side (positive side) of that of the donor enhancement region 3b. That is, the region 3a
3b may be a region including only acceptor or donor, or a region including both, and it is only necessary to have a difference on the coordinate axis of FIG. 6B.
The doping states of the channel regions of the low-voltage driving n-channel TFT and the p-channel TFT do not necessarily match, and the high-voltage driving n-channel TFT and the p-channel T
The doping state of the channel region with the FT does not necessarily match. In short, the doping state of the channel region of the high voltage drive n-channel TFT is low voltage drive n channel TFT
6B, the channel region of the high voltage drive p-channel TFT is present on the left side in the same coordinate axis as that of the channel region of the low voltage drive p-channel TFT. It only has to be done.

The polycrystalline silicon film for forming the island-like polycrystalline silicon film 3 can be directly formed on the insulating substrate. However, in order to form a high-quality polycrystalline silicon film on a substrate having poor heat resistance, it is preferable to first form an amorphous silicon film on an insulating substrate and anneal it to polycrystallize it. When forming a doped amorphous silicon film, it is deposited while doping an impurity, for example, B, and a p-conductivity type amorphous silicon film is directly formed on the insulating substrate 1 as shown in FIG. 3A can be formed. Alternatively, as shown in FIG. 6D1, first, a non-doped amorphous silicon film 3A ′ is formed on the insulating substrate 1, and then, as shown in FIG. The p-type amorphous silicon film 3A may be formed by doping. Any known means can be used as the polycrystallization method, but laser annealing can be advantageously employed.

As a method for forming the source / drain regions, the self-alignment method can be adopted for both the low-voltage drive TFT and the high-voltage drive TFT, but the self-alignment method can be adopted only for the low-voltage drive TFT. In this case, when forming the source / drain region 3n of the low-voltage drive n-channel TFT, the source / drain region of the high-voltage drive n-channel TFT is simultaneously formed through the resist mask, and the source / drain region of the low-voltage drive p-channel TFT. When forming the drain region 3p, it is desirable to simultaneously form the source / drain regions of the high-voltage drive p-channel TFT through a resist mask. Further, when the source / drain regions of both the low voltage driving TFT and the high voltage driving TFT are formed by the self-alignment method, after forming the gate electrode 5, the source / drain regions of the low voltage driving TFT are formed using this as a mask. Then, after the gate electrode 7 is formed, the source / drain region of the high voltage driving TFT may be formed using this as a mask. Alternatively, after the gate electrode 5 and the gate electrode 7 are formed, the source / drain regions of the low voltage driving TFT and the high voltage driving TFT can be simultaneously formed using both the gate electrodes as a mask. Further, when the source / drain regions of both the low voltage drive and the high voltage drive TFT are formed without using the self-alignment method, the low voltage drive TFT is formed through a resist mask before or after the first gate insulating film 4 is formed. A source / drain region 3n of the high voltage driving TFT and a source / drain region 3p of the low / high voltage driving TFT are formed.

The activation treatment after impurity doping for forming the source / drain regions is as follows:
It is preferable to use a light irradiation method using laser light or lamp light. From high temperature heat treatment,
For the purpose of protecting the gate electrode of the TFT, depending on the material used for the gate electrode of the low voltage drive TFT, a method such as a thermal activation method using an electric furnace or a short time thermal activation method using high-temperature nitrogen blowing is selected. May be. If the gate electrode is exposed during the activation process, the activation process may be performed by covering the gate with a SiO ₂ gate cover film.

Impurity doping for the channel region includes doping for the entire polycrystalline silicon film and selective doping for the channel region of the high voltage drive (or low voltage drive) TFT. When doping is performed on the entire polycrystalline silicon film, doping can be performed at the time of film formation. If doping is performed after film formation, the film is formed after the silicon film is formed and before the gate electrode material is formed. It can be performed by a method such as ion implantation at an appropriate time. Further, if the channel region of either the high voltage driving TFT or the low voltage driving TFT is non-doped, doping for the entire polycrystalline silicon film is omitted.
In the case where an impurity (in this case, an acceptor is used) is selectively doped into the island-like polycrystalline silicon film 3 for the low-voltage driving TFT, the electrode material of the gate electrode 5 is formed after the silicon film is formed. At an appropriate time before the film, ion doping is performed by a method such as ion implantation in a state where the island-like polycrystalline silicon film for the high voltage driving TFT is covered with a resist mask. Further, in the case where an impurity (in this case, a donor is used) is selectively doped into the island-like polycrystalline silicon film 3 for the high voltage driving TFT, the electrode material of the gate electrode 7 after the silicon film is formed At an appropriate time before the film formation, ion doping can be performed by a method such as ion implantation. In this case, if the gate electrode 5 is not formed, impurity doping is performed in a state where the island-like polycrystalline silicon film for the low-voltage driving TFT is covered with a resist mask, and the gate electrode 5
After forming, impurity doping can be performed using this as a mask (in other words, maskless).

7A (a) to 7C (i) are cross-sectional views in the order of steps showing the manufacturing process of the thin film semiconductor device of Example 1 of the present invention. First, as shown in FIG. 7A (a), an oxide film to be the undercoat layer 2 was formed on the insulating substrate 1 to a thickness of 100 nm by plasma CVD (PCVD). The undercoat layer 2 has an effect of preventing impurities such as sodium from diffusing from the glass substrate 1 to the polycrystalline silicon film. An amorphous silicon (a-Si) film 3A serving as a precursor of the polycrystalline silicon film was formed to a thickness of 40 nm using the PCVD method. a-Si
In order to remove hydrogen contained in the a-Si film during the PCVD film formation after the film 3A is formed, 450 ° C.
Heat treatment was performed for 30 minutes. Next, channel doping of B was performed on the entire region of the a-Si film 3A using an ion implantation method under the conditions of a dose amount: 1.0 × 10 ¹² cm ⁻² and an acceleration voltage: 10 keV. Here, although the dose of B is 1.0 × 10 ¹² cm ⁻² , referring to the relationship of FIG.
It is good to set in the range of 0 × 10 ^{11 to} 2.0 × 10 ¹² cm ⁻² .

After that, as shown in FIG. 7A (b), the channel-doped a-Si film 3A is crystallized by annealing (ELA) using excimer laser light, and a polycrystalline silicon film (poly-Si film). 3B was formed. Immediately after the ELA irradiation, the thin film silicon is melted to be in a liquid phase, so that the dopant diffuses in an extremely short time and is uniformly distributed in the film thickness direction. In this ELA irradiation, the line beam was scanned in a uniaxial direction. Irradiation intensity is 35
0 mJ / cm ² and the beam overlap rate is 95%.
Next, as shown in FIG. 7A (c), by etching the poly-Si film 3B into an island shape, a low voltage drive n-channel TFT, a low voltage drive p channel TFT, a high voltage drive n channel TFT, a high voltage Four types of island-shaped polycrystalline silicon films 3 of driving p-channel TFTs were formed.
Next, as shown in FIG. 7B (d), a first gate insulating film 4 to be a gate insulating film of the low voltage driving TFT was formed by depositing a SiO ₂ film with a film thickness of 50 nm by the PCVD method. If the gate drive voltage is 3.3 to 10 V, the thickness of the first gate insulating film 4 is 20 to 100 n.
m is preferred. Subsequently, an n ⁺ type polycrystalline silicon film having a thickness of 2 is formed by PCVD.
After depositing to 50 nm, the gate electrode 5 of the low voltage driving TFT was formed by selective etching. Since the required value of the drain breakdown voltage of the low voltage driving TFT is as low as 3.3 to 10 V, the channel length is shortened to 4.0 μm.

Next, as shown in FIG. 7B (e), after covering the entire region of the p-channel TFT and the channel region of the high-voltage drive n-channel TFT with a resist pattern 10a, P ions are implanted to form the n-channel TFT. Source / drain regions 3n are formed. The dose of P is 1.0x1
The acceleration voltage was 20 keV with 0 ¹⁵ cm ⁻² . The region of the island-like polycrystalline silicon film sandwiched between the formed source / drain regions 3n becomes the B-doped channel region 3d of the low-voltage drive n-channel TFT. Subsequently, as shown in FIG. 7B (f), all n-channel TFTs
The resist pattern 10b is formed on the formation region of the TFT and the channel region of the high-voltage drive p-channel TFT
Then, using this resist pattern and the gate electrode 5 of the low-voltage drive p-channel TFT as a mask, B ions are implanted to form the source / drain region 3p of the p-channel TFT. At this time, the injection amount of B is set to 1.0 × 10 ¹⁵ cm ⁻² and the acceleration voltage is set to 40 k.
eV. The region of the island-like polycrystalline silicon film 3 sandwiched between the formed source / drain regions 3p becomes the B-doped channel region 3d of the low voltage drive p-channel TFT. In the step of forming the source / drain regions, the doping order for forming the source / drain regions for the n-channel TFT and the p-channel TFT may be reversed.

Subsequently, as shown in FIG. 7C (g), the low-voltage drive TFT without using photolithography.
The high drive voltage n-channel TFT and the high drive voltage p-channel T
The FT channel region is doped with P at a low concentration, and the high drive voltage TFT B & B
A P-doped channel region 3e was formed. Here, the implantation amount of P is set to 8.0 × 10 ¹¹ cm.
^-2 . Subsequently, the implanted dopant was activated by light irradiation with excimer laser light. Thereafter, hydrogenation treatment was performed to improve the reliability of the device.

Next, as shown in FIG. 7C (h), an SiO ₂ film to be the second gate insulating film 6 is deposited to a film thickness of 100 nm by using the PCVD method, and then an n ⁺ type polysilicon film of 250 nm is deposited. The gate electrode 7 of the high-voltage driving TFT was formed by depositing it thick and patterning it using a photolithography method and a dry etching method. Since the required value of the drain withstand voltage of the high voltage driving TFT is as high as 40 V, the channel length is increased to 20 μm. In order to ensure the reliability of the gate insulating film with respect to 40 V, the gate insulating film of the high voltage driving TFT was made as thick as 150 nm.
Subsequently, as shown in FIG. 7C (i), the SiO ₂ film to be the interlayer insulating film 8 is formed by PCVD so that the total thickness of the SiO ₂ on the island-like polycrystalline silicon film 3 becomes 500 nm. Thickness 3
A film was formed at 00 nm. Next, contact holes were formed on the source / drain regions, and Si-containing Al was deposited to a film thickness of 400 nm by a sputtering method, followed by patterning to form an electrode 9. Aluminum containing a small amount of silicon has an effect of reducing contact resistance with polycrystalline silicon.
Thereafter, an interlayer film, wiring, electrodes, and the like are further formed as necessary. Also, TF on the substrate
When T is integrated at a high density, a multilayer wiring structure is preferable.

FIG. 8 shows the Id-Vg characteristics of the low-voltage driving TFT and the high-voltage driving TFT manufactured as described above. As shown in the figure, the threshold voltage is about n-channel TFT.
The low voltage driving TFT was + 1V and the high voltage driving TFT was + 3V. Also, p-channel TFT
As for, the low voltage driving TFT was -1V and the high voltage driving TFT was -3V. Id-V with symmetrical n-channel TFT and p-channel TFT with the same gate insulating film thickness
g characteristics were obtained.

FIG. 9A (a) to FIG. 9B (f) are cross-sectional views in order of steps showing the manufacturing process of the thin film semiconductor device of Example 2 of the present invention. 9A and 9B, the same reference numerals are given to the portions common to the portions of FIGS. 7A to 7C of the first embodiment, and description thereof will be omitted as appropriate.
As shown in FIG. 9A (a), an undercoat layer 2 was formed on an insulating substrate 1 by the same method as in Example 1, and an a-Si film 3A having a thickness of 40 nm was formed thereon. Next, FIG.
As shown in A (b), on the a-Si film 3A, a resist pattern 10c having an opening on the low voltage driving TFT formation region is formed, and B is a dose amount: 1.0 × 10 ¹² cm ⁻² , Ions were implanted under the condition of acceleration voltage: 10 keV to form the B-doped region 11 in the non-doped a-Si film 3A.

After crystallizing the a-Si film 3A by laser annealing, the polycrystalline silicon film was etched to form an island-shaped polycrystalline silicon film 3 as shown in FIG. 9A (c).
A first gate insulating film 4 made of SiO ₂ and having a thickness of 50 nm is formed, and a gate electrode 5 made of n ⁺ -type polycrystalline silicon film and having a thickness of 250 nm are formed thereon, and then FIG. 9B (d) As shown in FIG. 5, the entire region of the p-channel TFT and the channel region of the high-voltage driving n-channel TFT are covered with a resist pattern 10a, and P is implanted using this as a mask with the gate electrode 5 as a mask. A drain region 3n was formed. The polycrystalline silicon film sandwiched between the source / drain regions 3n forms the B-doped channel region 3 of the low-voltage drive n-channel TFT.
d and the non-doped channel region 3f of the high-voltage driven n-channel TFT. Next, FIG. 9B
As shown in (e), all the n-channel TFT formation regions and the high-voltage drive p-channel TF
The T channel region is covered with a resist pattern 10b. Using this resist pattern and the gate electrode 5 as a mask, B ions are implanted to form a source / drain region 3 of the p channel TFT.
p was formed. The polycrystalline silicon film sandwiched between the formed source / drain regions 3p becomes the B-doped channel region 3d of the low-voltage drive p-channel TFT and the non-doped channel region 3f of the high-voltage drive p-channel TFT.
Thereafter, as shown in FIG. 9B (f), a second gate insulating film 6 having a thickness of 100 nm is formed, and a gate of a high-voltage driving TFT having a thickness of 250 nm made of an n ⁺ type polycrystalline silicon film is formed thereon. After forming the electrode 7 and further forming the interlayer insulating film 8 thereon, a contact hole was opened to form an electrode 9.

In this embodiment, the dose of B ions is set to 1.0 × 10 ¹² cm ⁻² , but the threshold voltage to be set and the gate insulating film thickness are referred to by referring to the relationship of FIG. .0x10
It can set suitably in the range of 11-2.0 * ¹⁰ < ¹² > cm ^<-2 >.
Further, in Example 2, the channel region of the high voltage driving TFT is non-doped, but 1.0 × 10 ^{11 which} is equal to or less than the dose amount in the low voltage driving TFT according to the requirement of the threshold voltage of the circuit.
B ions may be implanted within a range of ˜2.0 × 10 ¹² cm ⁻² . This ion implantation can be performed by covering the low voltage driving TFT formation region with a mask, but can also be performed without a mask.
Furthermore, in accordance with the demand of the threshold voltage value of the circuit, the threshold voltage is made negative by injecting P into the channel regions of both the p-channel type low voltage driving TFT and the high voltage driving TFT. You may adjust. For example, a resist pattern having openings in the channel regions of the low-voltage drive p-channel TFT and the high-voltage drive p-channel TFT may be formed, and P ions may be implanted using the resist pattern as a mask. Although the dose of P introduced by the ion implantation method varies depending on the threshold voltage to be set, an example is 1.0 × 10 ¹² cm ⁻² and acceleration voltage: 70 keV.

As shown in FIG. 9A (a) of Example 2, after forming the a-Si film 3A, as shown in FIG. 9A (b), a resist pattern 10c provided with an opening on the low voltage driving TFT formation region is formed. Then, B was ion-implanted under the conditions of a dose amount: 1.0 × 10 ¹² cm ⁻² and an acceleration voltage: 10 keV to form a B-doped region in the low-voltage driving TFT formation region. Subsequently, high voltage drive T
A resist pattern (not shown, resist film having a pattern opposite to that shown in FIG. 9A (b)) is formed on the FT formation region, and P is a dose amount: 1.0 × 10 ¹¹ cm ⁻² , an acceleration voltage: 80
Ions were implanted under the condition of keV to form a P-doped region in the high voltage drive TFT formation region.
Thereafter, aluminum was used as the gate electrode material of the low voltage driving TFT and the high voltage driving TFT, and a thin film semiconductor device was manufactured through the same process as in Example 2.
According to the present embodiment, since channel doping of the high voltage driving TFT can be minimized, scattering of carriers between the source and the drain can be suppressed.

As shown in FIG. 9A (a) of Example 2, after forming the a-Si film 3A, B is not subjected to a mask, and the dose is 1.0 × 10 ¹² cm ⁻² and the acceleration voltage is 10 keV. Then, the entire a-Si film 3A was made a B-doped region. Thereafter, the respective steps of crystallization, patterning in the island region, formation of the first gate insulating film (film thickness 50 nm), and formation of the gate electrode (Al) of the low voltage driving TFT are shown in FIG. 7B (d). In the state,
P was ion-implanted under the conditions of a dose amount of 2.0 × 10 ¹² cm ⁻² and an acceleration voltage of 80 keV, and the island-like polycrystalline silicon film in the high voltage driving TFT formation region was used as a B & P doped region. Thereafter, the source / drain regions of the p-channel TFT and the source / drain region of the n-channel TFT
A drain region is formed using photolithography and ion implantation, followed by a second
The gate insulating film (thickness 150 nm) and the high voltage driving TFT gate electrode (Al) were formed.
In this embodiment, the film thickness of the gate insulating film of the high voltage driving TFT is 200 (50 + 150) n.
However, the threshold voltage of both the p-channel type and n-channel type high-voltage driving TFTs can be kept low by channel doping P ions with a high dose.

FIG. 10 is a cross-sectional view showing a second embodiment of the present invention. In this embodiment,
Unlike the case of the first embodiment, the channel doping of the low voltage driving TFT and the high voltage driving TFT is equal, and instead, the work function is different between the low voltage driving TFT and the high voltage driving TFT. A gate electrode is formed using a material. As shown in FIG. 10, island-like polycrystalline silicon films 3 serving as active regions of the respective transistors are provided on the insulating substrate 1 so as to be isolated from each other, and on the island-like polycrystalline silicon films 3. The high work function material gate electrode 5a for the low voltage driving TFT is formed through the first gate insulating film 4, and the high voltage driving TFT is formed through the first and second gate insulating films 4 and 6. Low work function material gate electrode 7a
Is formed.
A source / drain region 3n doped with an n-type impurity at a high concentration is formed in the island-like polycrystalline silicon film 3 of the low-voltage drive and high-voltage drive n-channel TFT, and the low-voltage drive and high-voltage drive p A source / drain region 3p doped with a high concentration of p-type impurities is formed in the island-shaped polycrystalline silicon film 3 of the channel TFT. In this embodiment, the channel region 3c sandwiched between the source / drain regions is in the same impurity doping state for all the transistors.
In the present embodiment, as the material of the high work function material gate electrode 5a, for example, a material having a relatively high work function is selected from the materials shown in FIG. 5, and the low work function material gate electrode 7a is selected.
For example, a material having a relatively low work function is selected from the materials shown in FIG. The selection of these materials is determined by the value of the threshold voltage of the low voltage driving TFT and the high voltage driving TFT.
In the present embodiment, the impurity concentration of the channel region 3c is all the same.
Each may be selected at a different suitable concentration. Further, the second embodiment and the first embodiment may be implemented in combination.
In the present invention, the gate electrode can be composed of a multilayer film made of a plurality of conductive materials. In that case, only the work function of the material of the lowermost layer (the layer closest to the channel region) needs to be considered. For example, since the work function of silicon in which a donor such as P is highly doped is as low as 3.9 eV, it is necessary to adjust the threshold voltage relatively low.
It is suitable for the T gate electrode 7 (7a) material. On the other hand, silicon doped with acceptors such as B at a high concentration has a high work function of 5.1 eV, so the threshold voltage is adjusted to be relatively high. It is suitable for the material of the gate electrode 5 (5a) of the low drive voltage TFT that needs to be used, but when these are used and the gate wiring is to have a low resistance, aluminum or copper is laminated on the doped silicon. Therefore, it is preferable to use a low resistance wiring and a multilayer gate electrode structure.

FIG. 11 is a sectional view showing Example 5 of the present invention. The manufacturing method of this example is the same as that of Examples 1 and 2 except that the channel region of all TFTs is non-doped and the material of the gate electrode is a metal material. 7A-C and FIG. 9A,
Since the same reference numerals are given to the same parts as those of the first and second embodiments shown in B, the detailed description of the fifth embodiment is omitted, and mainly the low voltage driving TFT and the high voltage driving TFT are omitted. Each gate electrode will be described.
The gate electrode 5 of the low voltage drive TFT is formed of chromium (Cr) having a relatively high work function, while the gate electrode 7 of the high voltage drive TFT is formed of a material made of titanium (Ti) having a relatively low work function. did. As a result, a thin film semiconductor device having the same characteristics as those obtained in Example 1 shown in FIG. 8 was obtained.
In this embodiment, Cr is used for the gate electrode 5 of the low voltage driving TFT and Ti is used for the gate electrode 7 of the high voltage driving TFT. However, other materials may be appropriately replaced depending on the required threshold voltage. For example, since the work function of silicon in which P as a donor is introduced at a high concentration is as low as 3.9 eV, it is suitable for the gate electrode 7 material of a high drive voltage TFT that requires a relatively low threshold voltage. Yes. On the other hand, silicon in which B, which is an acceptor, is introduced at a high concentration has a high work function of 4.9 eV.
Suitable for FT gate electrode 5 material. In this embodiment, the channel region is non-doped, but may be doped with acceptor or donor at a low concentration.

In the embodiment and examples described above, the source / drain region is a single drain (S
D) Although the source and drain regions of the low and high voltage driving TFTs are formed by the high impurity concentration source / drain regions and the low impurity concentration source / drain regions (so-called LDD regions), respectively, the transistor is formed. LDD (Lightly Doped D
rain) structure. In this case, both the high impurity concentration source / drain region and the low impurity concentration source / drain region can be formed using the resist pattern as a mask, but the low impurity concentration source / drain region is formed using the gate electrode as a mask. You may make it do. In this way, all the transistors can have an LDD structure, but only the high voltage driving TFT or only the high voltage driving n-channel TFT is LDD.
It can also be a structure.

FIG. 12 is a cross-sectional view in order of steps showing an example of a manufacturing method of a thin film semiconductor device when only the high-voltage drive n-channel TFT has an LDD structure. As shown in FIG. 12A, an island-shaped polycrystalline silicon film in which a TFT formation region on the insulating substrate 1 is doped with a p-type impurity (a region not further doped with an impurity becomes an acceptor enhancement region 3a) 3 After the first gate insulating film 4 and the gate electrode 5 of the low voltage driving TFT are formed thereon, the source / drain regions (including the LDD region) of the high voltage driving n-channel TFT are to be formed. A resist pattern 10d having an opening is formed. Then, for example, P is ion-implanted with a low dose as an n-type impurity to form the LDD region 3g. Next, as shown in FIG. 12B, after covering the entire region of the p-channel TFT, the channel region of the high-voltage drive n-channel TFT, and the region to be left as the LDD region with a resist pattern 10d, for example, P Are implanted at a high dose to form source / drain regions 3n having a high impurity concentration of the n-channel TFT. Thereafter, as shown in FIG. 12 (c), source / drain regions 3p of the high-voltage drive and low-voltage drive p-channel TFTs are formed, and n-type impurities are implanted without masking into the channel region of the high-voltage drive TFT. After channel doping to form the donor enhancement region 3b, the second gate insulating film 6 and the gate electrode 7 of the high voltage driving TFT are formed.
In the above process, the step of forming the LDD region 3g, the source of high impurity concentration
The order of the step of forming the drain region 3n or 3p and the step of forming the donor enhancement region 3b can be appropriately changed.

FIG. 13 is a cross-sectional view in order of steps showing another method of manufacturing a thin film semiconductor device when only the high-voltage drive n-channel TFT has an LDD structure. As shown in FIG. 13A, an island-like polycrystalline silicon film in which a TFT formation region on the insulating substrate 1 is doped with a p-type impurity (a region not further doped with an impurity becomes an acceptor enhancement region 3a) 3 And the first gate insulating film 4 and the gate electrode 5 of the low voltage driving TFT are formed thereon, and then the high impurity concentration source of the low voltage driving n channel TFT and the high voltage driving n channel TFT are formed. After the surface is covered with a resist pattern 10e having an opening on the drain region formation region, for example, P is ion-implanted with a high dose amount, and a high impurity concentration source / drain region 3n of the n-channel TFT is formed.
Form. Next, as shown in FIG. 13B, the source / drain regions 3p of the low-voltage drive and high-voltage drive p-channel TFTs are formed, and n-type impurities are implanted without mask to enhance the donor of the high-voltage drive TFT. After forming the region 3b, the second gate insulating film 6 and the high voltage drive TF
A T gate electrode 7 is formed. Subsequently, as shown in FIG. 13C, a resist pattern 10f having an opening in the high voltage drive n-channel TFT formation region is formed, and the resist pattern 1
Using the gate electrode 7 of 0f and the high-voltage drive n-channel TFT as a mask, for example, P, which becomes an n-type impurity, is ion-implanted with a low dose to form the LDD region 3g. Then, the resist pattern 10f is removed.
In the present embodiment shown in FIG. 13 as well, the source / drain region 3 having a high impurity concentration is used.
The order of the step of forming n or 3p and the step of forming the donor enhancement region 3b can be changed as appropriate.

In the above embodiments and examples, both the n-channel TFT and the p-channel TFT have the high and low voltage driving TFTs, but only one of them has the high and low voltage driving TFTs. It may be. Or n-channel TFT, p-channel TFT
It may be a thin film semiconductor device having only one of the above. In the case where the n-channel TFT alone is used, a high-speed thin film semiconductor device can be realized. P channel T
In the case of using only FT, a thin film semiconductor device with high withstand voltage can be realized.
FIG. 14 is a cross-sectional view showing an example of a thin film semiconductor device in which only the p-channel type is a low voltage drive and high voltage drive TFT. FIG. 14A shows an example in which only a low voltage driving TFT is formed for the n-channel type, and low voltage driving and high voltage driving TFTs are formed for the p channel type. FIG. 14B shows an example in which only the high voltage driving TFT is formed for the n-channel type and low voltage driving and high voltage driving TFTs are formed for the p channel type. FIG. 14C shows an example in which a thin film semiconductor device is formed only by p-channel type low voltage drive and high voltage drive TFTs. Next, an embodiment of the thin film semiconductor device shown in FIG.

First, an oxide film serving as an undercoat layer is formed on the insulating substrate 1 by the PCVD method.
The film was formed with a thickness of nm. An a-Si film having a thickness of 40 nm is formed thereon using the PCVD method, B is ion-implanted under the conditions of a dose amount: 1.0 × 10 ¹² cm ⁻² and an acceleration voltage: 10 keV, and then laser annealing. A plurality of island-like polycrystalline silicon films 3 were formed by polycrystallization and further patterning.
Next, after depositing a 50 nm-thickness SiO ₂ film by PCVD method to form the first gate insulating film 4, n ⁺ -type polycrystalline silicon is deposited to a thickness of 250 nm by PCVD method. Etching was performed to form the gate electrode 5 of the low voltage driving TFT. Subsequently, high voltage drive p
After the channel region of the channel TFT is covered with a resist pattern, B is used as a dose amount with the resist pattern and the gate electrode 5 of the low-voltage drive p-channel TFT as a mask.
Ion implantation was performed under the conditions of 0 × 10 ¹⁵ cm ⁻² and acceleration voltage: 40 keV to form the source / drain regions 3p of the low voltage driving and high voltage driving TFTs. Then, in the maskless state, 8
. P was ion-implanted at a dose of 0 × 10 ¹¹ cm ⁻² , and a donor was doped only in the channel region of the high drive voltage TFT. Next, after depositing a SiO ₂ film to be the second gate insulating film 6 to a film thickness of 100 nm by PCVD, n ⁺ type polysilicon is deposited to a film thickness of 250 nm, and this is patterned to obtain a high A gate electrode 7 of the voltage driving TFT was formed.
Thereafter, an interlayer insulating film was deposited, contact holes were opened, and necessary electrodes and wirings were formed. When the characteristics were measured, the threshold voltage of the low voltage driving TFT was -1V, and the threshold voltage of the high voltage driving TFT was -3V.

The thin film semiconductor device according to the present invention can be applied to all devices in which a high-voltage driving TFT and a low-voltage driving TFT are formed on the same substrate, but can be suitably used particularly for an image display device.
FIG. 15 is a plan view of an active matrix substrate of a liquid crystal display device manufactured using the TFT according to the present invention. In the active matrix substrate 20, a lead-out portion 22 is provided along one side of the glass substrate 21, an image display portion 25 is provided in the center of the substrate, and a data driver 23 and a gate driver 24 are arranged along the periphery of the image display portion 25. Is. Each of the data driver 23 and the gate driver 24 is formed with a low voltage driving TFT and a high voltage driving TFT each having a polycrystalline silicon film as an active layer. These transistors are adjusted in threshold voltage according to the present invention. It has been broken. In the image display portion 25, TFTs using an amorphous silicon film or a polycrystalline silicon film are arranged in a matrix.
In the example shown in FIG. 15, the image display unit 25 and the drivers 23 and 24 are formed on the same substrate. However, the data driver 23 and the gate driver 24 are formed on a different substrate from the image display unit 25, and the driver The substrate on which the image is formed may be mounted on the substrate on which the image display unit is formed (so-called glass on glass configuration).

DESCRIPTION OF SYMBOLS 1 Insulating substrate 2 Undercoat layer 3 Island-like polycrystalline silicon film 3A Amorphous silicon film (a-Si film)
3B Polycrystalline silicon film (poly-Si film)
3a Acceptor enhancement region 3b Donor enhancement region 3c Channel region 3d B doped channel region 3e B & P doped channel region 3f Non-doped channel region 3g LDD region 4 First gate insulating film 5, 7 Gate electrode 5a High work function material gate electrode 6 Second Gate insulating film 7a Low work function material gate electrode 8 Interlayer insulating film 9 Electrode 10a, 10b, 10c, 10d, 10e, 10f Resist pattern 11 B doped region 20 Active matrix substrate 21 Glass substrate 22 Lead-out portion 23 Data driver 24 Gate driver 25 Image display

Claims (20)

A low voltage driving thin film transistor in which a gate electrode and a semiconductor thin film face each other with a thin first type gate insulating film interposed therebetween, and a second type gate insulating film thicker than the first type gate insulating film In the thin film semiconductor device in which the high voltage driving thin film transistor in which the gate electrode and the semiconductor thin film are opposed to each other is disposed on the insulating substrate, the high voltage driving thin film transistor has a gate with respect to the low voltage driving thin film transistor having the same polarity. A thin film semiconductor device, wherein the threshold voltage is adjusted to decrease when the insulating films are assumed to be the same. When the p-type impurity concentration is expressed as a positive value and the n-type impurity concentration is expressed as a negative value, the impurity doping of the channel region of the high voltage driving thin film transistor is adjusted to be more negative than the impurity doping of the channel region of the low voltage driving thin film transistor. 2. The thin film semiconductor device according to claim 1, wherein 3. The thin film semiconductor according to claim 1, wherein a gate electrode material of the high voltage driving thin film transistor is selected so that a work function thereof is smaller than that of the gate electrode material of the low voltage driving thin film transistor. apparatus. The gate electrode material of the high voltage driving thin film transistor and the impurity doping of the channel region are performed when the gate insulating film is assumed to be the same as the gate electrode material of the low voltage driving thin film transistor and the impurity doping of the channel region. 2. The thin film semiconductor device according to claim 1, wherein the threshold voltage is adjusted so as to decrease. 5. The thin film semiconductor device according to claim 1, wherein both the low voltage driving thin film transistor and the high voltage driving thin film transistor include a p-channel transistor. The first type gate insulating film is formed of a first gate insulating film, and the second type gate insulating film is formed of the first gate insulating film and a second gate insulating film stacked thereon. The thin film semiconductor device according to claim 1, wherein the thin film semiconductor device is formed. 7. The thin film semiconductor device according to claim 1, wherein the semiconductor thin film is composed of a polycrystalline silicon thin film. The concentration of the p-type dopant (acceptor) contained in the channel region of the high-voltage driven thin film transistor is lower than that of the p-type dopant contained in the channel region of the low-voltage driven thin film transistor. The thin film semiconductor device according to any one of the above. 8. The n-type dopant (donor) concentration contained in the channel region of the high-voltage driven thin film transistor is higher than that of the n-type dopant contained in the channel region of the low-voltage driven thin film transistor. The thin film semiconductor device according to any one of the above. The channel region of the low voltage driving thin film transistor includes a p-type dopant, and the channel region of the high voltage driving thin film transistor includes both a p-type dopant and an n-type dopant. Item 8. The thin film semiconductor device according to any one of Items 1 to 7. The source / drain regions of the n-type high voltage driving thin film transistor are formed by LDD (Lightly Doping).
11. The thin film semiconductor device according to claim 1, wherein the thin film semiconductor device is formed in a ped drain structure. 12. The thin film semiconductor according to claim 1, wherein the low voltage driving thin film transistor and the high voltage driving thin film transistor are included in a gate driver circuit and a data driver circuit of an active matrix substrate in an image display device. apparatus. Forming a semiconductor thin film on an insulating substrate; forming a first gate insulating film; forming a gate electrode for a low voltage driving thin film transistor on the first gate insulating film; A step of forming source / drain regions of the thin film transistor, a step of forming a second gate insulating film on the low voltage driving thin film transistor forming region and the high voltage driving thin film transistor forming region, and a step of forming the first and second gate insulating films Forming a gate electrode for a high-voltage driven thin film transistor on the laminated film, and a method for manufacturing a thin film semiconductor device,
Between the step of forming the gate electrode for the low voltage driving thin film transistor and the step of forming the gate electrode for the high voltage driving thin film transistor, the semiconductor thin film in the low voltage driving thin film transistor forming region and the high voltage driving thin film transistor forming region is n-type A method of manufacturing a thin film semiconductor device, wherein a step of introducing a dopant is added. Forming a semiconductor thin film on an insulating substrate; forming a first gate insulating film; forming a gate electrode for a low voltage driving thin film transistor on the first gate insulating film; Forming a source / drain region of the thin film transistor; forming a second gate insulating film on the first gate insulating film; and over the stacked film of the first and second gate insulating films. A step of forming a gate electrode for a high voltage driving thin film transistor, and a step of forming a semiconductor thin film on an insulating substrate and a step of forming a gate electrode for a low voltage driving thin film transistor. And a step of introducing a p-type dopant into the semiconductor thin film through a mask having an opening in the low voltage driving thin film transistor formation region. Method of manufacturing a thin film semiconductor device that. Forming a semiconductor thin film on an insulating substrate; forming a first gate insulating film; forming a gate electrode for a low voltage driving thin film transistor on the first gate insulating film; Forming a source / drain region of the thin film transistor; forming a second gate insulating film on the first gate insulating film; and over the stacked film of the first and second gate insulating films. A step of forming a gate electrode for a high voltage driving thin film transistor, and a step of forming a semiconductor thin film on an insulating substrate and a step of forming a gate electrode for a low voltage driving thin film transistor. And a step of introducing an n-type dopant into the semiconductor thin film through a mask having an opening in the high voltage driving thin film transistor formation region. Method of manufacturing a thin film semiconductor device that. Forming a semiconductor thin film on an insulating substrate; forming a first gate insulating film; forming a gate electrode for a low voltage driving thin film transistor on the first gate insulating film; Forming a source / drain region of the thin film transistor; forming a second gate insulating film on the first gate insulating film; and over the stacked film of the first and second gate insulating films. Forming a gate electrode for a high voltage driving thin film transistor, wherein a work function of the gate electrode material for the low voltage driving thin film transistor is a work function of the gate electrode material for the high voltage driving thin film transistor. A method of manufacturing a thin film semiconductor device, wherein the method is larger than a function. 17. The method for manufacturing a thin film semiconductor device according to claim 13, wherein the low voltage driving thin film transistor and the high voltage driving thin film transistor are p-channel thin film transistors. The step of forming the semiconductor thin film includes a step of forming an amorphous silicon film and a step of polycrystallizing the amorphous silicon film, and the gate electrodes of the low voltage driving and high voltage driving thin film transistors are respectively polycrystalline. The method of manufacturing a thin film semiconductor device according to claim 13, wherein the method is formed on a silicon thin film. The method of manufacturing a thin film semiconductor device according to claim 18, wherein the polycrystallizing step is performed by laser beam irradiation. A step of doping the semiconductor thin film in the low voltage driving thin film transistor forming region and the high voltage driving thin film transistor forming region with a p type dopant is added before or after the step of doping the p type or n type dopant through the mask. 20. The method for manufacturing a thin film semiconductor device according to claim 14, 15 or 17 to 19.

Images