JP2012183457A5 - - Google Patents

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JP2012183457A5
JP2012183457A5 JP2011046718A JP2011046718A JP2012183457A5 JP 2012183457 A5 JP2012183457 A5 JP 2012183457A5 JP 2011046718 A JP2011046718 A JP 2011046718A JP 2011046718 A JP2011046718 A JP 2011046718A JP 2012183457 A5 JP2012183457 A5 JP 2012183457A5
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liquid
separation method
separation
solid
mixed acid
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JP2011046718A
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JP2012183457A (en
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Priority to JP2011046718A priority Critical patent/JP2012183457A/en
Priority claimed from JP2011046718A external-priority patent/JP2012183457A/en
Priority to TW101106790A priority patent/TWI465280B/en
Priority to CN201210054230.7A priority patent/CN102674254B/en
Publication of JP2012183457A publication Critical patent/JP2012183457A/en
Publication of JP2012183457A5 publication Critical patent/JP2012183457A5/ja
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Description

［適用例３］
本発明の分離方法では、前記第２の液体から、前記フッ化水素アンモニウムおよび前記珪素を含む固体を晶析させ、
前記第２の液体から前記固体を分離した第４の液体を、前記混酸とともに再び前記第１の蒸留工程により処理することが好ましい。
これにより、混酸からより多くのフッ酸を分離・回収することができる。 [Application Example 3]
In the separation method of the present invention, the solid containing the ammonium hydrogen fluoride and the silicon is crystallized from the second liquid,
The fourth liquid obtained by separating the solid from the second liquid is preferably treated again with the mixed acid by the first distillation step .
Thereby, more hydrofluoric acid can be separated and recovered from the mixed acid.

Claims (9)

少なくともフッ酸、フッ化水素アンモニウム、珪素および水を含む混酸から、前記フッ酸を分離する分離方法であって、
前記混酸を蒸留することによって、前記フッ酸および水を含む第１の液体を留出液として回収するとともに、前記フッ化水素アンモニウムおよび前記珪素を含む第２の液体を缶出液として回収する第１の蒸留工程と、
前記第１の液体を蒸留することによって、前記第１の液体から前記水を主に分離し、前記第１の液体よりも前記フッ酸の濃度の高い第３の液体を缶出液として回収する第２の蒸留工程とを有することを特徴とする分離方法。 A separation method for separating the hydrofluoric acid from a mixed acid containing at least hydrofluoric acid, ammonium hydrogen fluoride, silicon and water,
A first liquid containing the hydrofluoric acid and water is recovered as a distillate by distilling the mixed acid, and a second liquid containing the ammonium hydrogen fluoride and the silicon is recovered as a bottom liquid. 1 distillation step;
By distilling the first liquid, the water is mainly separated from the first liquid, and the third liquid having a higher concentration of hydrofluoric acid than the first liquid is recovered as a bottom liquid. And a second distillation step. 前記第２の蒸留工程における前記第１の液体の加熱温度は、前記第１の蒸留工程における前記混酸の加熱温度よりも低い設定温度とする請求項１に記載の分離方法。   The separation method according to claim 1, wherein the heating temperature of the first liquid in the second distillation step is a set temperature lower than the heating temperature of the mixed acid in the first distillation step. 前記第２の液体から、前記フッ化水素アンモニウムおよび前記珪素を含む固体を晶析させ、
前記第２の液体から前記固体を分離した第４の液体を、前記混酸とともに再び前記第１の蒸留工程により処理する請求項１または２に記載の分離方法。 Crystallizing the ammonium hydrogen fluoride and the solid containing silicon from the second liquid,
The separation method according to claim 1 or 2, wherein the fourth liquid obtained by separating the solid from the second liquid is again treated by the first distillation step together with the mixed acid. 前記第１の蒸留工程は、前記混酸を攪拌しながら行う請求項１ないし３のいずれかに記載の分離方法。   The separation method according to claim 1, wherein the first distillation step is performed while stirring the mixed acid. 前記固体から前記フッ化水素アンモニウムを分離する分離工程を有する請求項１ないし４のいずれかに記載の分離方法。   The separation method according to claim 1, further comprising a separation step of separating the ammonium hydrogen fluoride from the solid. 前記分離工程では、晶析法によって、前記固体から前記フッ化水素アンモニウムを分離する請求項５に記載の分離方法。   The separation method according to claim 5, wherein in the separation step, the ammonium hydrogen fluoride is separated from the solid by a crystallization method. 前記分離工程では、前記固体を溶解させた溶液を用意し、前記溶液を所定温度に冷却して行う第１の晶析工程と、前記第１の晶析の温度よりも低い温度で行う第２の晶析工程とを有している請求項５に記載の分離方法。   In the separation step, a solution in which the solid is dissolved is prepared, a first crystallization step is performed by cooling the solution to a predetermined temperature, and a second crystallization step is performed at a temperature lower than the temperature of the first crystallization. The separation method according to claim 5, further comprising: 前記混酸は、珪素を含む材料をエッチング処理することにより発生するエッチング廃液である請求項１ないし６のいずれかに記載の分離方法。   The separation method according to claim 1, wherein the mixed acid is an etching waste liquid generated by etching a material containing silicon. 請求項１ないし８のいずれかに記載の分離方法を有することを特徴とする分離装置。   A separation apparatus comprising the separation method according to claim 1.
JP2011046718A 2011-03-03 2011-03-03 Separation method and separation device Withdrawn JP2012183457A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2011046718A JP2012183457A (en) 2011-03-03 2011-03-03 Separation method and separation device
TW101106790A TWI465280B (en) 2011-03-03 2012-03-01 Separation method and separation device
CN201210054230.7A CN102674254B (en) 2011-03-03 2012-03-02 Separation method and separation device

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JP2011046718A JP2012183457A (en) 2011-03-03 2011-03-03 Separation method and separation device

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JP2012183457A5 true JP2012183457A5 (en) 2014-04-10

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CN103818992B (en) * 2012-11-15 2017-06-20 Og株式会社 The method of silicon, method and its device from siliceous hydrofluoric acid system mixed acid waste liquor recovery hydrofluoric acid are removed from siliceous hydrofluoric acid system waste liquid
JP2014151269A (en) * 2013-02-08 2014-08-25 Seiko Epson Corp Method for regenerating an etchant and etchant regenerating apparatus
CN103566606B (en) * 2013-11-04 2015-03-04 中国地质大学（武汉） Multifunctional purification device and method for purifying ammonium bifluoride by using same
CN110104864A (en) * 2019-06-06 2019-08-09 盛隆资源再生（无锡）有限公司 A kind of processing method of the fluorine-containing ammonia-containing water of acid phosphorus acid type
CN110272159A (en) * 2019-06-17 2019-09-24 苏州乔发环保科技股份有限公司 The recycling processing method and device of inorganic salts in a kind of industrial wastewater
CN113045089B (en) * 2021-03-15 2023-04-18 盛隆资源再生（无锡）有限公司 Method for refining and purifying etching waste liquid
CN113358436B (en) * 2021-06-11 2022-12-30 中国科学技术大学 Device and method for purifying ammonium bifluoride
CN113880048B (en) * 2021-09-30 2023-06-27 中化蓝天霍尼韦尔新材料有限公司 High-efficiency hydrofluoric acid recycling system and method

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JPH03267189A (en) * 1990-03-16 1991-11-28 Konica Corp Evaporation concentrating device for waste photographic processing liquid
JP3378892B2 (en) * 1991-10-03 2003-02-17 ステラケミファ株式会社 Method for recovering calcium fluoride from fluorine-based etchant
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JP4581618B2 (en) * 2004-10-14 2010-11-17 三菱化学エンジニアリング株式会社 Method for recovering hydrofluoric acid
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JP5143440B2 (en) * 2007-02-01 2013-02-13 森田化学工業株式会社 Method and apparatus for separating and recovering acid components from waste liquid containing hydrofluoric acid, hydrochloric acid and silicohydrofluoric acid
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