JP2012171343A - Pressure buffer, liquid injection head, and liquid injection device - Google Patents

Pressure buffer, liquid injection head, and liquid injection device Download PDF

Info

Publication number
JP2012171343A
JP2012171343A JP2011038829A JP2011038829A JP2012171343A JP 2012171343 A JP2012171343 A JP 2012171343A JP 2011038829 A JP2011038829 A JP 2011038829A JP 2011038829 A JP2011038829 A JP 2011038829A JP 2012171343 A JP2012171343 A JP 2012171343A
Authority
JP
Japan
Prior art keywords
pressure
liquid
pressure buffer
plate
recess
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2011038829A
Other languages
Japanese (ja)
Other versions
JP5731853B2 (en
Inventor
Toshiaki Watanabe
俊顕 渡邉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SII Printek Inc
Original Assignee
SII Printek Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SII Printek Inc filed Critical SII Printek Inc
Priority to JP2011038829A priority Critical patent/JP5731853B2/en
Publication of JP2012171343A publication Critical patent/JP2012171343A/en
Application granted granted Critical
Publication of JP5731853B2 publication Critical patent/JP5731853B2/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Abstract

PROBLEM TO BE SOLVED: To detect a pressure over a wide dynamic range by improving linearity of displacement with respect to pressure variation of a liquid packed inside.SOLUTION: A pressure buffer 1 includes: a base body 2 having a recess 4 open upward and a communication hole 5 in the inner surface of the recess 4 to communicate with an external region; a buffer member 3 that joins the upper end surface of the recess 4 to close the opening of the recess 4 and buffers pressure variation of a liquid filled inside; and a detecting section 10 that detects relative displacement between the buffer member 3 and the base body 2. The buffer member 3 includes a plate body 3a having a flat center part and an elastic body 3b having a ring peripheral part. The elastic body 3b is made to be bent into a U-shape in a radial direction.

Description

本発明は、流体の圧力変動を緩和させる圧力緩衝器であり、特に流体の圧力変動を電気信号に変換する機能を備えた圧力緩衝器、及びこれを用いた液体噴射ヘッド、液体噴射装置に関する。   The present invention relates to a pressure buffer that relaxes fluid pressure fluctuations, and more particularly to a pressure buffer having a function of converting fluid pressure fluctuations into an electrical signal, a liquid ejecting head using the same, and a liquid ejecting apparatus.

近年、記録紙等にインク滴を吐出して文字、図形を描画する、或いは素子基板の表面に液体材料を吐出して機能性薄膜を形成するインクジェット方式の液体噴射ヘッドが利用されている。この方式は、インクや液体材料を液体タンクから供給管を介して液体噴射ヘッドに供給し、チャンネルに充填したインクや液体材料をチャンネルに連通するノズルから吐出させる。インクの吐出の際には、液体噴射ヘッドや噴射した液体を記録する被記録媒体を移動させて、文字や図形を記録する、或いは所定形状の機能性薄膜を形成する。この種の装置では、ノズルから液滴を吐出する際の吐出量や、吐出速度を制御するために、ノズル吐出部のインク圧力を高精度で制御する必要がある。   In recent years, ink jet type liquid ejecting heads have been used in which ink droplets are ejected onto recording paper or the like to draw characters and figures, or liquid material is ejected onto the surface of an element substrate to form a functional thin film. In this method, ink or liquid material is supplied from a liquid tank to a liquid ejecting head via a supply pipe, and ink or liquid material filled in the channel is discharged from a nozzle communicating with the channel. When ink is ejected, a liquid ejecting head or a recording medium for recording the ejected liquid is moved to record characters and figures, or a functional thin film having a predetermined shape is formed. In this type of apparatus, it is necessary to control the ink pressure of the nozzle discharge section with high accuracy in order to control the discharge amount and discharge speed when discharging droplets from the nozzle.

特許文献1には、印字ヘッドが吐出する液体の圧力を調整するための機構を備えたインクジェット記録装置が記載されている。このインクジェット記録装置は、インクを貯留する基タンクと、基タンクからインクの供給を受け、インクジェットヘッドにインクを供給するサブタンクと、サブタンク内の内圧を調整するポンプと、インク供給用に設置した圧力計を備えている。このインクジェット記録装置は、使用状態に応じてサブタンク内の内圧調整によりインク内圧を制御している。例えば、高粘度インクを吐出させる場合や、予備吐出で気泡排出動作を行う場合は、インクに働く負圧をプリント時よりも小さくするように制御する。   Patent Document 1 describes an ink jet recording apparatus that includes a mechanism for adjusting the pressure of a liquid discharged from a print head. This ink jet recording apparatus includes a base tank that stores ink, a sub tank that receives ink supplied from the base tank and supplies ink to the ink jet head, a pump that adjusts the internal pressure in the sub tank, and a pressure that is installed for supplying ink. Has a meter. In this ink jet recording apparatus, the ink internal pressure is controlled by adjusting the internal pressure in the sub tank according to the use state. For example, when discharging high-viscosity ink or performing bubble discharge operation by preliminary discharge, the negative pressure acting on the ink is controlled to be smaller than that during printing.

特許文献2には、インク吐出部の圧力変動を吸収するためのダンパ構造が記載されている。図11(特許文献2の図1)に示すように、ベース101に形成される凹部101bは、インクを供給する供給溝101aと連通溝101cを介して連通する。この凹部101b、連通溝101c及び供給溝101aの上部はダイヤフラム102により塞がれている。ダイヤフラム102の中央部には同心円環状の凹凸部からなる波形部102aが形成されている。ダイヤフラム102はそれ自体が弾性を持つのでバネ部材が不要になり、部品点数と組立工数が削減され、コスト低減を図ることができる、というものである。また、特許文献3には、インクジェットヘッドに使用される圧力緩衝器が記載されている。この圧力緩衝器は、本体の表面に凹部から成るチャンバを形成し、その凹部の開口部に可撓膜を貼りつけた構造を有している。可撓膜自体が伸縮性を有することから、液体の圧力変動を吸収することができる。   Patent Document 2 describes a damper structure for absorbing pressure fluctuations in the ink discharge section. As shown in FIG. 11 (FIG. 1 of Patent Document 2), the recess 101b formed in the base 101 communicates with the supply groove 101a for supplying ink via the communication groove 101c. Upper portions of the recess 101b, the communication groove 101c, and the supply groove 101a are closed by a diaphragm 102. At the center of the diaphragm 102, a corrugated portion 102a composed of concentric annular concavo-convex portions is formed. Since the diaphragm 102 itself has elasticity, a spring member is not required, the number of parts and the number of assembly steps can be reduced, and the cost can be reduced. Patent Document 3 describes a pressure buffer used for an inkjet head. This pressure shock absorber has a structure in which a chamber formed of a recess is formed on the surface of a main body, and a flexible film is attached to the opening of the recess. Since the flexible membrane itself has elasticity, it is possible to absorb pressure fluctuations of the liquid.

特開2005−231351号公報JP 2005-231351 A 特開平7−164638号公報JP-A-7-164638 特開2008−110599号公報JP 2008-110599 A

しかしながら、特許文献1に記載のインクジェット記録装置では、液体供給路の一部から分岐した配管に圧力計が接続されている。そのため、液体供給路の内部を流通する液体が圧力計側に侵入することがある。液体噴射ヘッドは高速で往復移動する。特に、液体噴射ヘッドの移動方向が反転するときや急激に加速するときに、配管内の液体の慣性によって内部圧力が変動する。この圧力変動によって液体が圧力計の内部に侵入し、更に侵入したインクや液体が増粘し、あるいは固化して圧力計の検出精度を低下させた。その結果、インクや液体材料の圧力制御が不十分となって記録品質が低下する、などの課題があった。   However, in the ink jet recording apparatus described in Patent Document 1, a pressure gauge is connected to a pipe branched from a part of the liquid supply path. Therefore, the liquid flowing through the liquid supply path may enter the pressure gauge side. The liquid ejecting head reciprocates at high speed. In particular, when the moving direction of the liquid ejecting head is reversed or accelerated rapidly, the internal pressure fluctuates due to the inertia of the liquid in the pipe. Due to this pressure fluctuation, the liquid entered the inside of the pressure gauge, and the ink or liquid that entered further thickened or solidified to reduce the detection accuracy of the pressure gauge. As a result, there have been problems such as insufficient pressure control of ink and liquid material, resulting in a decrease in recording quality.

近年この種の装置は大型化、記録速度の高速化が進んでいる。装置の大型化に伴って、固定されているインク等の液体タンクと、移動する液体噴射ヘッドまでの配管距離が長くなってきている。通常この種の装置では、液体噴射ヘッドのノズルにおける液体のメニスカスや、ノズルから吐出する液滴の吐出速度を一定にするために、吐出領域の液体の内圧を制御している。しかし配管距離が長くなると、内部を流れる液体の流路抵抗が増加し、流路による圧力損失が増大する。更に、液体噴射ヘッドの移動距離や移動速度が増大するに伴って、液体の慣性による内圧変動も増大する。そのために、吐出領域の液体の内圧をより高精度に制御する必要があるとともに、液体の内圧変動を緩和させる緩衝機能をより強化する必要が生じてきている。   In recent years, this type of apparatus has been increased in size and recording speed. Along with the increase in size of the apparatus, the piping distance between a liquid tank of fixed ink or the like and the moving liquid jet head has become longer. Normally, in this type of apparatus, the internal pressure of the liquid in the discharge region is controlled in order to make the liquid meniscus at the nozzle of the liquid jet head and the discharge speed of the liquid droplets discharged from the nozzle constant. However, as the piping distance increases, the flow resistance of the liquid flowing inside increases, and the pressure loss due to the flow path increases. Further, as the moving distance and moving speed of the liquid ejecting head increase, the internal pressure fluctuation due to the inertia of the liquid also increases. For this reason, it is necessary to control the internal pressure of the liquid in the discharge region with higher accuracy, and it is necessary to further strengthen the buffer function for reducing fluctuations in the internal pressure of the liquid.

そこで、液体噴射ヘッドの直近に取り付けた圧力緩衝器に圧力計を設置することが考えられる。例えば、特許文献2に記載されるダンパ構造の可動部、即ちダイヤフラム102の波形部102aに位置検出部を設け、ダイヤフラムの位置検出により内部に充填された液体の圧力を検出する方法が考えられる。或いは、特許文献3に記載される圧力緩衝器の可撓膜に位置検出部を設け、可撓膜の位置検出により内部に充填される液体の圧力を検出する方法が考えられる。   Therefore, it is conceivable to install a pressure gauge in a pressure buffer attached in the immediate vicinity of the liquid jet head. For example, there can be considered a method in which a position detection unit is provided in the movable part of the damper structure described in Patent Document 2, that is, the corrugated part 102a of the diaphragm 102, and the pressure of the liquid filled therein is detected by detecting the position of the diaphragm. Alternatively, a method is conceivable in which a position detection unit is provided in the flexible film of the pressure buffer described in Patent Document 3, and the pressure of the liquid filled therein is detected by detecting the position of the flexible film.

しかし、特許文献2のダイヤフラムはポリサルフォン樹脂を使用しているので硬度が高く、内部液体の圧力変動に対するストロークが小さい。そのために圧力変動の検出範囲が狭い。また、波型部102aの中央部は、内部液体の圧力変動に対して多方向に変位する。そのために、中央部の垂線方向の変位を測定しても液体内部の圧力変化を高精度に測定したことにならない。   However, since the diaphragm of Patent Document 2 uses a polysulfone resin, it has high hardness and a small stroke with respect to pressure fluctuation of the internal liquid. Therefore, the pressure fluctuation detection range is narrow. Further, the central portion of the corrugated portion 102a is displaced in multiple directions with respect to the pressure fluctuation of the internal liquid. Therefore, even if the displacement in the perpendicular direction at the center is measured, the pressure change inside the liquid is not measured with high accuracy.

また、特許文献3に記載される可撓膜に位置検出部を設置して内部に充填された液体の圧力変動を検出する方法が考えられる。しかし、上記特許文献2と同様に、可撓性膜に設置した位置検出部は内部液体の圧力変動に対して多方向に変位し、液体内部の圧力変化を高精度に測定することができない。また、可撓膜の伸縮性を利用するために、圧力変動に対する位置変位のストロークが小さく、圧力検出のダイナミックレンジが狭い。また、可撓膜を凹部の上面に熱溶着により貼り付けるが、膜の張力を均一に貼り付けることが難しい。そのため、貼り付け後に張力のばらつき、皺や局部的な弛みが生じやすい。皺や弛みが生ずると、圧力変化に応じて皺や弛みの形状や場所が遷移する。その結果、圧力変動に対する位置変位の直線性が低下するとともにヒステリシス特性や不連続特性が現れて精度が低下した。   Further, a method for detecting the pressure fluctuation of the liquid filled inside by installing a position detector on the flexible film described in Patent Document 3 is conceivable. However, like the above-mentioned Patent Document 2, the position detection unit installed on the flexible membrane is displaced in multiple directions with respect to the pressure fluctuation of the internal liquid, and the pressure change inside the liquid cannot be measured with high accuracy. Further, in order to utilize the stretchability of the flexible membrane, the position displacement stroke with respect to pressure fluctuation is small, and the dynamic range of pressure detection is narrow. Moreover, although a flexible film | membrane is affixed on the upper surface of a recessed part by heat welding, it is difficult to affix the tension | tensile_strength of a film | membrane uniformly. For this reason, variations in tension, wrinkles and local slack are likely to occur after application. When wrinkles or slack occur, the shape or location of wrinkles or slack changes according to pressure changes. As a result, the linearity of the position displacement with respect to the pressure fluctuation is reduced, and the hysteresis characteristic and the discontinuous characteristic appear and the accuracy is lowered.

本発明は、このような課題に鑑みてなされたものであり、液体の圧力変動を高精度で検出することができる圧力緩衝器を提供するものである。   This invention is made | formed in view of such a subject, and provides the pressure buffer which can detect the pressure fluctuation of a liquid with high precision.

本発明の圧力緩衝器は、上端が開口する凹部と、前記凹部の内面に外部領域と連通する連通孔を有する本体部と、前記凹部の上端面に接合して前記凹部の開口を閉塞し、内部に充填される液体の圧力変動を緩和させる緩衝部材と、前記緩衝部材と前記本体部との間の相対的位置変化を検出する検出部と、を備え、前記緩衝部材は、中央部が板状体から成り、その周辺部が弾性体から成り、前記弾性体は、径方向に断面が撓みを有することとした。   The pressure shock absorber according to the present invention has a concave portion whose upper end is open, a main body portion having a communication hole communicating with an external region on the inner surface of the concave portion, and is bonded to the upper end surface of the concave portion to close the opening of the concave portion, A buffer member that relieves pressure fluctuation of the liquid filled therein, and a detection unit that detects a relative position change between the buffer member and the main body, and the buffer member has a plate at the center. The elastic body is made of an elastic body, and the elastic body has a bending section in the radial direction.

また、前記弾性体は前記板状体の周辺部を囲むリング状の形状を有することとした。   Further, the elastic body has a ring shape surrounding the periphery of the plate-like body.

また、前記撓みはU字形状を有することとした。   In addition, the deflection is U-shaped.

また、前記撓みは前記凹部の側に凸であることとした。   The bend is convex on the concave side.

また、前記撓みは前記凹部とは反対側に凸であることとした。   Further, the bending is convex on the opposite side to the concave portion.

また、前記撓みは、前記凹部の側に凸と前記凹部とは反対側に凸が連なることとした。   Moreover, the said bending bent the convex to the side of the said recessed part, and the convex to the opposite side to the said recessed part.

また、前記板状体と前記弾性体は同一材料から成り、前記板状体は前記弾性体よりも厚みが厚いこととした。   The plate-like body and the elastic body are made of the same material, and the plate-like body is thicker than the elastic body.

また、前記板状体は導電性材料又は磁性体材料から成ることとした。   The plate-like body is made of a conductive material or a magnetic material.

また、一端を前記板状体に、他端を前記本体部に係合するバネ部材を備えることとした。   Further, a spring member that engages one end with the plate-like body and the other end with the main body is provided.

また、前記検出部は、電磁誘導に基づく起電力を検出して前記相対的位置変化を検出することとした。   Further, the detection unit detects the relative position change by detecting an electromotive force based on electromagnetic induction.

また、前記検出部は、磁力線を生成する送信コイルと前記起電力を誘起する受信コイルを備えることとした。   In addition, the detection unit includes a transmission coil that generates lines of magnetic force and a reception coil that induces the electromotive force.

本発明の液体噴射ヘッドは、上記いずれかに記載の圧力緩衝器と、前記圧力緩衝器の連通孔に連通する配管と、前記配管から流入した液体を吐出するアクチュエータと、を備えることとした。   According to another aspect of the invention, there is provided a liquid jet head including the pressure buffer according to any one of the above, a pipe communicating with the communication hole of the pressure buffer, and an actuator that discharges the liquid flowing in from the pipe.

本発明の液体噴射装置は、上記液体噴射ヘッドと、前記液体を収容し、前記配管に液体を供給するタンクと、前記圧力緩衝器が検出した前記相対的位置変化に基づいて前記液体の圧力を制御するポンプと、を備えることとした。   The liquid ejecting apparatus according to the aspect of the invention includes the liquid ejecting head, a tank that stores the liquid and supplies the liquid to the pipe, and the pressure of the liquid based on the relative position change detected by the pressure buffer. And a pump to be controlled.

本発明の圧力緩衝器は、上端が開口する凹部と、凹部の内面に外部領域と連通する連通孔を有する本体部と、凹部の上端面に接合して開口を閉塞し、内部に充填される液体の圧力変動を緩和させる緩衝部材と、緩衝部材と本体部との間の相対的位置変化を検出する検出部と、を備えている。更に、緩衝部材は、中央部が平坦な板状体から成り、その周辺部が弾性体から成り、弾性体は径方向に断面が撓みを有している。これにより、圧力変動に対する検出位置の直線性を向上させ、検出可能なダイナミックレンジ及び検出感度を向上させることができる。   The pressure shock absorber according to the present invention has a concave portion whose upper end is open, a main body portion having a communication hole communicating with an external region on the inner surface of the concave portion, and the upper end surface of the concave portion which is closed to close the opening and is filled inside. A buffer member that alleviates the pressure fluctuation of the liquid, and a detection unit that detects a relative position change between the buffer member and the main body. Furthermore, the buffer member is made of a plate-like body having a flat central portion, and its peripheral portion is made of an elastic body, and the elastic body has a cross section that is bent in the radial direction. Thereby, the linearity of the detection position with respect to pressure fluctuation can be improved, and the detectable dynamic range and detection sensitivity can be improved.

本発明の第一実施形態に係る圧力緩衝器を説明図である。It is explanatory drawing of the pressure buffer which concerns on 1st embodiment of this invention. 本発明の圧力緩衝器の特徴を説明するためのグラフである。It is a graph for demonstrating the characteristic of the pressure buffer of this invention. 本発明の第一実施形態に係る圧力緩衝器の本体検出部の説明図である。It is explanatory drawing of the main body detection part of the pressure buffer which concerns on 1st embodiment of this invention. 本発明の第一実施形態に係る圧力緩衝器の本体検出部の回路構成図である。It is a circuit block diagram of the main-body detection part of the pressure buffer which concerns on 1st embodiment of this invention. 本発明の第二実施形態に係る圧力緩衝器の模式的な縦断面図である。It is a typical longitudinal section of a pressure buffer concerning a second embodiment of the present invention. 本発明の第三実施形態に係る圧力緩衝器の模式的な縦断面図である。It is a typical longitudinal section of a pressure buffer concerning a third embodiment of the present invention. 本発明の第四実施形態に係る圧力緩衝器の模式的な縦断面図である。It is a typical longitudinal section of a pressure buffer concerning a 4th embodiment of the present invention. 本発明の第五実施形態に係る液体噴射ヘッドの斜視図である。FIG. 10 is a perspective view of a liquid jet head according to a fifth embodiment of the invention. 本発明の第五実施形態に係る液体噴射ヘッドの圧力緩衝器の分解斜視図である。FIG. 10 is an exploded perspective view of a pressure buffer of a liquid jet head according to a fifth embodiment of the present invention. 本発明の第六実施形態に係る液体噴射装置の模式的な斜視図である。FIG. 10 is a schematic perspective view of a liquid ejecting apparatus according to a sixth embodiment of the present invention. 従来公知のダンパ構造の模式図である。It is a schematic diagram of a conventionally well-known damper structure.

(第一実施形態)
図1は、本発明の第一実施形態に係る圧力緩衝器の説明図であり、図1(a)は圧力緩衝器1の模式的な縦断面図であり、(b)は緩衝部材3の模式的な斜視図である。図1に示すように、圧力緩衝器1は、上端が開口する凹部4が形成された本体部2と、凹部4の上端面に接合し上記開口を閉塞する緩衝部材3と、緩衝部材3と本体部との間の相対的位置変化を検出する検出部10を備えている。本体部2は、凹部4の内面に外部領域と連通する連通孔5a、5bを備えている。緩衝部材3の上部には緩衝部材3を覆うようにカバー17が凹部4の上面に固定されている。緩衝部材3は、中央部が板状体3aから成り、周辺部がリング状の形状を有する弾性体3bから成る。板状体3aは表面が平坦である。弾性体3bは、径方向に断面がU字形状の撓みを有している。(U字形状の撓みとは、弾性体3bの径方向の断面が、概略半円の弧を描いて室内6方向又はカバー17方向に凸となる形状をいう。以下において同じ。)U字形状の撓みは凹部4の液体側に凸の下方を向いている。検出部10は本体検出部10aと被検出部10bを備え、本体検出部10aがカバー17の緩衝部材3側の内面に、被検出部10bが板状体3aのカバー17側の表面に設置されている。
(First embodiment)
FIG. 1 is an explanatory view of a pressure shock absorber according to a first embodiment of the present invention, FIG. 1 (a) is a schematic longitudinal sectional view of the pressure shock absorber 1, and FIG. 1 (b) is a shock absorber 3. It is a typical perspective view. As shown in FIG. 1, the pressure shock absorber 1 includes a main body 2 having a recess 4 with an upper end opened, a buffer member 3 that is bonded to the upper end surface of the recess 4 and closes the opening, and a buffer member 3. The detection part 10 which detects the relative position change between main body parts is provided. The main body 2 includes communication holes 5 a and 5 b that communicate with an external region on the inner surface of the recess 4. A cover 17 is fixed to the upper surface of the recess 4 so as to cover the buffer member 3 at the top of the buffer member 3. The buffer member 3 includes a plate-shaped body 3a at the center and an elastic body 3b having a ring-shaped periphery. The plate-like body 3a has a flat surface. The elastic body 3b has a U-shaped cross section in the radial direction. (The U-shaped deflection means a shape in which the cross section in the radial direction of the elastic body 3b is substantially semicircular and protrudes in the direction of the interior 6 or the direction of the cover 17. The same applies hereinafter.) Is directed downward on the liquid side of the recess 4. The detection unit 10 includes a main body detection unit 10a and a detected portion 10b. The main body detection portion 10a is installed on the inner surface of the cover 17 on the buffer member 3 side, and the detected portion 10b is installed on the surface of the plate-like body 3a on the cover 17 side. ing.

凹部4は、インク等の液体を流入する連通孔5aと、圧力変動が緩和された液体を流出する連通孔5bを備えている。凹部4と検出部10により囲まれる室内6に液体が充填される。この状態で、連通孔5aを介して圧力変動が伝達されると、緩衝部材3の弾性体3bが変形し、板状体3aが上下に変位する。この板状体3aの変位により室内6の液体の圧力変動が緩和され、連通孔5bから流出する液体には圧力変動が伝達されない。検出部10は、板状体3aの変位とともに変位する被検出部10bとの間の距離を検出する。検出部10は、この検出した距離の変位から液体の圧力変化を検出する。   The recess 4 includes a communication hole 5a through which a liquid such as ink flows, and a communication hole 5b through which the liquid with reduced pressure fluctuations flows out. The room 6 surrounded by the recess 4 and the detection unit 10 is filled with liquid. In this state, when pressure fluctuation is transmitted through the communication hole 5a, the elastic body 3b of the buffer member 3 is deformed, and the plate-like body 3a is displaced up and down. Due to the displacement of the plate-like body 3a, the pressure fluctuation of the liquid in the chamber 6 is alleviated, and the pressure fluctuation is not transmitted to the liquid flowing out from the communication hole 5b. The detection unit 10 detects a distance from the detected unit 10b that is displaced along with the displacement of the plate-like body 3a. The detection unit 10 detects a pressure change of the liquid from the detected displacement of the distance.

即ち、液体の圧力変動に対して板状体3aは傾斜したり横方向に変位することなく矢印で示す上下方向に変位する。更に、弾性体3bは予めU字形状に成形されているので、凹部4上面に例えば熱溶着したときに皺や弛みが生じ難い。そのため、圧力変化に対する位置変化の直線性が向上し、ヒステリシスも低減する。また、弾性体3bは膜の伸縮に伴う弾性を利用せず膜の曲げ弾性を利用するので、被検出部10bの変位量が大きくなり、検出圧力のダイナミックレンジを大きくとることができる。また、弾性体3bの膜厚を従来の可撓膜よりも厚く形成することができる。そのため、酸素等の物質の膜透過性を抑制し、内部液体の変質を防ぎ信頼性を向上させることができる。   That is, the plate-like body 3a is displaced in the vertical direction indicated by the arrow without being inclined or displaced in the lateral direction with respect to the pressure fluctuation of the liquid. Furthermore, since the elastic body 3b is previously formed into a U shape, wrinkles and slack are less likely to occur when, for example, heat welding is performed on the upper surface of the recess 4. Therefore, the linearity of the position change with respect to the pressure change is improved, and the hysteresis is also reduced. Further, since the elastic body 3b does not use the elasticity accompanying the expansion and contraction of the film but uses the bending elasticity of the film, the amount of displacement of the detected portion 10b increases, and the dynamic range of the detected pressure can be increased. Further, the elastic body 3b can be formed thicker than the conventional flexible film. Therefore, it is possible to suppress the membrane permeability of a substance such as oxygen, to prevent deterioration of the internal liquid, and to improve the reliability.

本体部2と緩衝部材3として高分子材料を使用することができる。例えば、ポリエチレン材料使用することができる。この場合に、本体部2や板状体3aとして高密度ポリエチレン材料(以下、HDPEと言う。)を使用し、弾性体3bとして低密度ポリエチレン材料(以下、LDPEと言う。)を使用することができる。同じポリエチレン材料なので緩衝部材3を凹部4の上端面に熱溶着すれば高気密性を維持することができる。板状体3aは、HDPEを使用し、リング状の弾性体3bと熱溶着により接合しても良いし、板状体3aと同じLDPEを使用し、その厚さを周囲の弾性体3bより厚く形成して変形し難くしてもよい。弾性体3bとして、厚さ100μm〜150μmのLDPEを使用することができる。   A polymer material can be used as the main body 2 and the buffer member 3. For example, a polyethylene material can be used. In this case, a high density polyethylene material (hereinafter referred to as HDPE) is used as the main body 2 or the plate-like body 3a, and a low density polyethylene material (hereinafter referred to as LDPE) is used as the elastic body 3b. it can. Since it is the same polyethylene material, if the buffer member 3 is heat-welded to the upper end surface of the recessed part 4, high airtightness can be maintained. The plate-like body 3a may be joined to the ring-shaped elastic body 3b by heat welding using HDPE, or the same LDPE as the plate-like body 3a is used, and the thickness thereof is thicker than the surrounding elastic body 3b. It may be difficult to form and deform. As the elastic body 3b, LDPE having a thickness of 100 μm to 150 μm can be used.

図2を用いて本発明に係る圧力緩衝器の特徴を説明する。図2は、横軸が室内6に充填される液体の圧力(p)を表し、縦軸が本体検出部10aを基準とする被検出部10bの変位量(D)を表す。変位量は、+Dが室内6側であり、−Dが本体検出部10a側である。実線のグラフG1が本発明の圧力緩衝器の特性であり、破線のグラフG2が緩衝部材3として伸縮性の可撓性膜を使用した従来の圧力緩衝器の特性である。本発明の圧力緩衝器は、従来の圧力緩衝器と比較して液体の圧力変化に対し、(1)ダイヤフラム(図1において板状体3a)の可動範囲が広く、(2)直線性が良好であり、(3)ヒステリシスが少ない、という特徴を有している。なお、グラフ中の矢印は圧力と変位量の遷移方向を表す。   The features of the pressure buffer according to the present invention will be described with reference to FIG. In FIG. 2, the horizontal axis represents the pressure (p) of the liquid filled in the chamber 6, and the vertical axis represents the displacement amount (D) of the detected part 10b with respect to the main body detecting part 10a. As for the amount of displacement, + D is the room 6 side, and -D is the main body detection unit 10a side. A solid line graph G1 is a characteristic of the pressure buffer of the present invention, and a broken line graph G2 is a characteristic of a conventional pressure buffer using a stretchable flexible film as the buffer member 3. The pressure buffer according to the present invention has (1) a wide movable range of the diaphragm (the plate-like body 3a in FIG. 1) and (2) good linearity with respect to the pressure change of the liquid as compared with the conventional pressure buffer. (3) It has a feature of low hysteresis. In addition, the arrow in a graph represents the transition direction of a pressure and a displacement amount.

(1)本発明の圧力緩衝器はダイヤフラムの可動範囲が広い。即ち、従来技術では可動範囲が可撓性膜を構成する材料の伸縮性によって確保された。しかし、その伸縮量は膜に塑性変形を生じない程度の限られた範囲でなければならなかった。このため、利用可能な膜面の可動範囲はごく限られた範囲に制限されていた。これに対して、本発明の圧力緩衝器では、予めU字に形成した弾性体の弾性変形を利用することでより大きな自由可動範囲を与えることが可能となった。
(2)本発明の圧力緩衝器は直線性が良好である。即ち、従来技術では圧力が大きくなるにつれて可撓性膜が緊張し、膜の変化量が減少する。このため、圧力変化に対する変位量は直線的に比例した動きとはならず、圧力の正負両端に変位の飽和領域を含んだカーブを描く特性となる。これに対して本発明の圧力緩衝器では、弾性体のU字部分の弾性変形、即ち弾性体を構成する薄板材料の曲げ弾性を利用することでダイヤフラムが直線的に変位する圧力範囲をより広く確保することが可能となる。例えば、目的とする圧力の検出範囲を+5kPa〜−5kPaとすれば、その間を直線的な変位特性で網羅することは容易である。
(3)本発明の圧力緩衝器はヒステリシスが少ない。即ち、従来技術では、可撓性膜を本体部に溶着する際に生じる膜の緩みによって圧力が加圧方向へ遷移した場合と減圧方向へ遷移した場合とで変位の軌跡が一致しない領域が生じる。また、高分子材料の可撓性膜は伸張・復元する際の時間的応答が遅く、圧力変動に対して膜面の変位が遅れる。このため、変位量に大きなヒステリシスが生じる。これに対して本発明の圧力緩衝器は、成形された弾性体によって板状体を予め所定の基準位置に支持し、U字部分の弾性変形によって板状体が水平を保ちながら上下方向へ円滑に変位する。従って、従来技術にあるような膜の緩みによる圧力遷移中の不連続な変位特性は存在しない。また、応答の遅い膜の伸張・復元を利用しないため、良好な変位応答性が得られる。
(1) The pressure buffer of the present invention has a wide movable range of the diaphragm. That is, in the prior art, the movable range is ensured by the stretchability of the material constituting the flexible film. However, the amount of expansion / contraction has to be within a limited range that does not cause plastic deformation in the film. For this reason, the movable range of the usable film surface has been limited to a very limited range. On the other hand, in the pressure buffer of the present invention, it is possible to give a larger free movable range by utilizing the elastic deformation of the elastic body formed in a U shape in advance.
(2) The pressure buffer of the present invention has good linearity. That is, in the prior art, as the pressure increases, the flexible membrane becomes tense and the amount of change in the membrane decreases. For this reason, the displacement amount with respect to the pressure change does not move linearly proportionally, but has a characteristic of drawing a curve including a saturation region of displacement at both positive and negative pressure ends. On the other hand, in the pressure buffer of the present invention, the pressure range in which the diaphragm is linearly displaced can be broadened by utilizing the elastic deformation of the U-shaped portion of the elastic body, that is, the bending elasticity of the thin plate material constituting the elastic body. It can be secured. For example, if the target pressure detection range is set to +5 kPa to -5 kPa, it is easy to cover the range with linear displacement characteristics.
(3) The pressure buffer of the present invention has little hysteresis. That is, in the prior art, there is a region where the locus of displacement does not match between when the pressure transitions in the pressurizing direction and when the pressure transitions in the depressurizing direction due to the looseness of the film that occurs when the flexible film is welded to the main body. . In addition, the flexible film made of a polymer material has a slow temporal response when stretched and restored, and the displacement of the film surface is delayed with respect to pressure fluctuation. For this reason, a large hysteresis occurs in the displacement amount. In contrast, the pressure shock absorber of the present invention supports the plate-like body in advance at a predetermined reference position by a molded elastic body, and smoothly smoothes the plate-like body in the vertical direction while keeping the plate-like body horizontal by elastic deformation of the U-shaped portion. It is displaced to. Therefore, there is no discontinuous displacement characteristic during pressure transition due to membrane loosening as in the prior art. In addition, since the slow response film stretching / restoration is not used, good displacement responsiveness can be obtained.

なお、弾性体3bとして径方向に下方に凸の撓みが1個形成されている場合について説明したが、下方に凸の撓みを複数個形成しても本発明の効果を奏することができる。また、図1(a)に示すように、弾性体3bの下側に凸の凸部側面と凹部4の側面との間には気泡が取り込まれない程度の間隙を形成するのが好ましい。この間隙に取り込まれた気泡が後に吐出部に侵入し、吐出不良を発生させる原因となるからである。また、緩衝部材3として高分子材料の他に金属材料を使用することができる。   In addition, although the case where one convex downward bending was formed in the radial direction as the elastic body 3b was demonstrated, even if it forms a plurality of downward convex bending, the effect of this invention can be show | played. Further, as shown in FIG. 1A, it is preferable that a gap is formed between the convex side surface of the convex portion and the side surface of the concave portion 4 on the lower side of the elastic body 3b so that bubbles are not taken in. This is because the air bubbles taken into the gap later enter the discharge part and cause a discharge failure. In addition to the polymer material, a metal material can be used as the buffer member 3.

図3は、上記本体検出部10aを説明する説明図である。図3(a)は本体検出部10aの模式的な縦断面図であり、(b)は本体検出部10aの模式的な分解斜視図である。図3に示すように、本体検出部10aは、磁力線を生成する送信コイル11と起電力を誘起する受信コイル12とこれらを収納するケース16を備えている。より具体的に、絶縁基板18cは、その裏面側に回路素子27を備え、その上面側に、電極(又は配線パターン)41b、絶縁基板(又は絶縁層)18b、渦状の平面型の送信コイル11、絶縁膜29b、電極(又は配線パターン)41a、絶縁基板(又は絶縁層)18a、渦状の平面型の受信コイル12、絶縁膜29aからなる積層構造を有している。また、ケース16を貫通するリード28を設置して外部制御部に接続している。このように積層構造としたことにより、本体検出部10aを薄く形成することができる。   FIG. 3 is an explanatory diagram illustrating the main body detection unit 10a. FIG. 3A is a schematic longitudinal sectional view of the main body detection unit 10a, and FIG. 3B is a schematic exploded perspective view of the main body detection unit 10a. As shown in FIG. 3, the main body detection unit 10 a includes a transmission coil 11 that generates magnetic field lines, a reception coil 12 that induces electromotive force, and a case 16 that houses them. More specifically, the insulating substrate 18c includes the circuit element 27 on the back surface side, and the electrode (or wiring pattern) 41b, the insulating substrate (or insulating layer) 18b, and the spiral planar transmission coil 11 on the upper surface side. , An insulating film 29b, an electrode (or wiring pattern) 41a, an insulating substrate (or insulating layer) 18a, a spiral planar receiving coil 12, and an insulating film 29a. A lead 28 that penetrates the case 16 is installed and connected to the external control unit. By adopting such a laminated structure, the main body detection unit 10a can be formed thin.

また、上記の変形例として、本体検出部10aは、受信コイル12を搭載した絶縁基板18aと、送信コイル11を搭載した絶縁基板18bと、回路素子27を搭載した絶縁基板18cと、これらを収納するケース16を備えるようにすることができる。絶縁基板18aの上面に渦状の平面型の受信コイル12を形成し、その上面に保護用の絶縁膜29aを積層し、絶縁基板18aの裏面に絶縁基板18aを貫通し受信コイル12に接続する配線電極41aを形成する。同様に、絶縁基板18bの上面に渦状の平面型の送信コイル11を形成し、その上面に保護用の絶縁膜29bを積層し、絶縁基板18bの裏面に絶縁基板18bを貫通し送信コイル11に接続する配線電極41bを形成する。絶縁基板18cの裏面には、送信回路や受信回路を構成する回路素子27を設置し、絶縁基板18cを貫通する配線を介して送信コイル11や受信コイル12と電気的に接続する。これにより、簡便に積層構造を構成することができる。   In addition, as a modification example, the main body detection unit 10a stores the insulating substrate 18a on which the receiving coil 12 is mounted, the insulating substrate 18b on which the transmitting coil 11 is mounted, the insulating substrate 18c on which the circuit element 27 is mounted, and these. The case 16 can be provided. A spiral planar receiving coil 12 is formed on the upper surface of the insulating substrate 18a, a protective insulating film 29a is laminated on the upper surface, and a wiring that penetrates the insulating substrate 18a on the back surface of the insulating substrate 18a and connects to the receiving coil 12 The electrode 41a is formed. Similarly, a spiral planar transmission coil 11 is formed on the upper surface of the insulating substrate 18b, a protective insulating film 29b is laminated on the upper surface, and the insulating substrate 18b penetrates the back surface of the insulating substrate 18b to form the transmission coil 11. A wiring electrode 41b to be connected is formed. A circuit element 27 constituting a transmission circuit and a reception circuit is installed on the back surface of the insulating substrate 18c, and is electrically connected to the transmission coil 11 and the reception coil 12 through a wiring penetrating the insulating substrate 18c. Thereby, a laminated structure can be comprised simply.

上記のように、受信コイル12と送信コイル11の中心が平面視一致するように積層配置したので、本体検出部10aの外形を小型化することができる。また、受信コイル12や送信コイル11を平板型コイルとしたので、本体検出部10aの厚さを薄く構成することができる。また、ケース16として高透磁率の磁性体材料を使用することができる。高透磁率の磁性体材料を使用すれば磁力線が外部に漏れないので、カバー17として金属等の導電性材料を使用したときに検出感度が低下することを防止することができる。   As described above, the receiving coil 12 and the transmitting coil 11 are stacked and arranged so that the centers coincide with each other in plan view, so that the outer shape of the main body detection unit 10a can be reduced in size. Moreover, since the receiving coil 12 and the transmitting coil 11 are flat-plate coils, the thickness of the main body detection unit 10a can be reduced. Further, a magnetic material having a high magnetic permeability can be used as the case 16. If a magnetic material with high permeability is used, the lines of magnetic force do not leak to the outside, so that it is possible to prevent the detection sensitivity from being lowered when a conductive material such as metal is used as the cover 17.

図4は、上記本体検出部10aが内蔵する検出回路30のブロック図である。検出回路30は送信回路31と受信回路32を備えている。送信回路31は、発信機33と発信機33から入力する交番電流により磁界を発生する送信コイル11を備えている。受信回路32は、磁界により誘導起電力を誘起する受信コイル12と、誘導起電力を検波する検波回路34と、検波された受信信号のオフセットを設定するオフセット回路35と、受信信号を増幅する増幅回路36と、増幅された受信信号からノイズ成分を除去するフィルター回路37と、オフセット値及び増幅率を調整する調整回路38と、オフセット値及び増幅率を設定するための設定値を記憶する記憶部39を備えている。   FIG. 4 is a block diagram of the detection circuit 30 built in the main body detection unit 10a. The detection circuit 30 includes a transmission circuit 31 and a reception circuit 32. The transmitter circuit 31 includes a transmitter 33 and a transmitter coil 11 that generates a magnetic field by an alternating current input from the transmitter 33. The reception circuit 32 includes a reception coil 12 that induces an induced electromotive force by a magnetic field, a detection circuit 34 that detects the induced electromotive force, an offset circuit 35 that sets an offset of the detected reception signal, and an amplification that amplifies the reception signal. A circuit 36; a filter circuit 37 that removes a noise component from the amplified received signal; an adjustment circuit 38 that adjusts the offset value and the amplification factor; and a storage unit that stores setting values for setting the offset value and the amplification factor. 39 is provided.

送信回路31はあらかじめ定められた強度の磁界を生成する。受信回路32は、送信コイル11が生成した磁界から誘導起電力を生成し、この誘導起電力の変化に基づいて被検出部10bの位置変化を検出する。即ち、被検出部10bが導電性材料であれば被検出部10bを横切る磁力線によって渦電流が発生し損失を受け、被検出部10bが磁性体材料であれば被検出部10bを横切る磁力線の経路が変更される。磁力線の損失や経路変更はコイルと被検出部10bの間の距離に依存するから、予め誘導起電力と距離の間の関係を求めておくことにより、誘導起電力の大きさから被検出部10bの位置を検出することができる。同様に、予め被検出部10bの位置と室内6の液体の内圧との関係を求めておくことにより、誘導起電力の大きさから液体の圧力を検出することができる。検出回路30は被検出部10bの位置変位の検出結果を検出信号としてフィルター回路37から出力する。   The transmission circuit 31 generates a magnetic field having a predetermined strength. The receiving circuit 32 generates an induced electromotive force from the magnetic field generated by the transmission coil 11, and detects a change in the position of the detected portion 10b based on the change in the induced electromotive force. That is, if the detected portion 10b is a conductive material, eddy currents are generated and lost due to magnetic lines that cross the detected portion 10b. If the detected portion 10b is a magnetic material, the path of the magnetic lines that cross the detected portion 10b. Is changed. Since the loss of magnetic field lines and the path change depend on the distance between the coil and the detected portion 10b, the relationship between the induced electromotive force and the distance is obtained in advance, so that the detected portion 10b is determined from the magnitude of the induced electromotive force. Can be detected. Similarly, the liquid pressure can be detected from the magnitude of the induced electromotive force by obtaining the relationship between the position of the detected portion 10b and the internal pressure of the liquid in the chamber 6 in advance. The detection circuit 30 outputs the detection result of the position displacement of the detected portion 10b from the filter circuit 37 as a detection signal.

ここで、調整回路38は、外部制御部から入力する設定データに基づいて、オフセット回路35のオフセット値や増幅回路36の増幅率を設定することができる。即ち、調整回路38は、外部から設定データを入力すると、設定データに対応する設定値を記憶部39から読み出し、オフセット回路35及び増幅回路36のオフセット値及び増幅率を設定する。これにより、検出特性を自由に設定できる。また、圧力緩衝器1を構成する部品の形状や材質にばらつきがある場合でも、個体毎に調整を行うことで、検出特性のバラつきを所定の範囲内に収めることができる。   Here, the adjustment circuit 38 can set the offset value of the offset circuit 35 and the amplification factor of the amplification circuit 36 based on the setting data input from the external control unit. That is, when setting data is input from the outside, the adjustment circuit 38 reads a setting value corresponding to the setting data from the storage unit 39, and sets the offset value and the amplification factor of the offset circuit 35 and the amplification circuit 36. Thereby, a detection characteristic can be set freely. Further, even when there are variations in the shapes and materials of the parts constituting the pressure buffer 1, the variation in detection characteristics can be kept within a predetermined range by adjusting each individual.

なお、被検出部10bを板状体3aの上に設置することに代えて、板状体3aとして磁性体材料や導電体材料を用いて被検出部10bを兼用してもよい。また、検出部10として、電磁誘導に基づく起電力の変化を検出して本体部2と緩衝部材3との間の位置変化を検出することに代えて、電磁誘導に基づくインピーダンスの変化を検出して本体部2と緩衝部材3との間の位置変化を検出することができる。また、検出部10として、電磁誘導に基づいて距離を検出することに代えて、光学的に或いは静電容量の変化に基づいて距離を測定しても良い。また、上記実施形態では被検出部10bを板状体3aのカバー17側に設置したが、これを凹部4側に設置しても良い。また、上記実施形態では本体検出部10aをカバー17の緩衝部材3側に設置したが本発明はこれに限定されず、本体検出部10aを凹部4の底面や側面に設置してもよい。要は、被検出部10bが板状体3aに直接的又は間接的に係合して板状体3aとともに変位し、本体検出部10aが本体部2と直接的又は間接的に係合し、板状体3aに対して固定されるものであればよい。   Instead of installing the detected portion 10b on the plate-like body 3a, the detected portion 10b may also be used by using a magnetic material or a conductor material as the plate-like body 3a. Further, instead of detecting a change in electromotive force based on electromagnetic induction and detecting a change in position between the main body 2 and the buffer member 3, the detection unit 10 detects a change in impedance based on the electromagnetic induction. Thus, a change in position between the main body 2 and the buffer member 3 can be detected. Further, as the detection unit 10, instead of detecting the distance based on electromagnetic induction, the distance may be measured optically or based on a change in capacitance. Moreover, in the said embodiment, although the to-be-detected part 10b was installed in the cover 17 side of the plate-shaped body 3a, you may install this in the recessed part 4 side. Moreover, in the said embodiment, although the main body detection part 10a was installed in the buffer member 3 side of the cover 17, this invention is not limited to this, You may install the main body detection part 10a in the bottom face or side surface of the recessed part 4. FIG. In short, the detected portion 10b is directly or indirectly engaged with the plate-like body 3a and displaced together with the plate-like body 3a, and the main body detecting portion 10a is directly or indirectly engaged with the main body portion 2. What is necessary is just to be fixed with respect to the plate-shaped body 3a.

(第二実施形態)
図5は、本発明の第二実施形態に係る圧力緩衝器1の模式的な縦断面図である。第一実施形態と異なる点は、緩衝部材3を構成する弾性体3bが凹部4とは反対側の上方に凸のU字形状の撓みを有する点である。カバー17は弾性体3bと接触しないように凹部4の上面近傍を垂直な側面とする。その他の構成は第一実施形態と同様なので、説明を省略する。同一の部分または同一の機能を有する部分には同一の符号を付している。
(Second embodiment)
FIG. 5 is a schematic longitudinal sectional view of the pressure shock absorber 1 according to the second embodiment of the present invention. The difference from the first embodiment is that the elastic body 3b constituting the buffer member 3 has a convex U-shaped deflection on the upper side opposite to the concave portion 4. The cover 17 has a vertical side surface in the vicinity of the upper surface of the recess 4 so as not to contact the elastic body 3b. Since other configurations are the same as those of the first embodiment, description thereof is omitted. The same portions or portions having the same function are denoted by the same reference numerals.

本実施形態では弾性体3bの撓み部に液体が充填されるので、第一実施形態の場合よりも凹部4の深さを浅く形成することができる。また、弾性体3bの凸部の側面と凹部4の側面との間に狭い間隙が形成されない。従って、気泡の滞留による吐出不良の問題も発生しない。なお、上記実施形態では、弾性体3bとして上方に凸の撓みが1個形成されている場合について説明したが、上方に凸の撓みを複数個有するものであっても本発明の効果を奏することができる。同様に、弾性体3bとして、上方に凸の撓みの他に下方に凸の撓みを有するものであっても良い。   In the present embodiment, since the liquid is filled in the bent portion of the elastic body 3b, the depth of the recess 4 can be formed shallower than in the case of the first embodiment. Further, a narrow gap is not formed between the side surface of the convex portion of the elastic body 3 b and the side surface of the concave portion 4. Therefore, the problem of ejection failure due to the retention of bubbles does not occur. In the above-described embodiment, a case has been described in which a single upwardly projecting flexure is formed as the elastic body 3b. However, the effect of the present invention can be achieved even if a plurality of upwardly projecting flexures are provided. Can do. Similarly, the elastic body 3b may have a downward convex deflection in addition to the upward convex deflection.

(第三実施形態)
図6は、本発明の第三実施形態に係る圧力緩衝器1の模式的な縦断面図である。第一又は第二実施形態と異なる点は、緩衝部材3を構成する弾性体3bが径方向に下方に凸と上方に凸のU字形状の撓みが連なる点であり、その他の点は第一及び第二実施形態と同様である。同一の部分または同一の機能を有する部分には同一の符号を付している。
(Third embodiment)
FIG. 6 is a schematic longitudinal sectional view of the pressure shock absorber 1 according to the third embodiment of the present invention. The difference from the first or second embodiment is that the elastic body 3b constituting the buffer member 3 has a downwardly convex and upwardly convex U-shaped flexure in the radial direction, and the other points are the first And it is the same as that of 2nd embodiment. The same portions or portions having the same function are denoted by the same reference numerals.

図6に示すように弾性体3bの径方向の断面をU字形状の撓みが連なる構造として、板状体3aを上下方向に変位させるための曲げ応力を小さくした。その結果、板状体3aの上下方向のストロークが大きくなり、検出圧力のダイナミックレンジが増加する。また、第一又は第二実施形態の場合よりも弾性体3bの厚さを厚く形成することができる。そのため、凹部4の上面に溶着する際に皺や弛みが生じ難くなり、圧力変動に対する位置変動の直線性が向上し、ヒステリシス特性を低減させることができる。   As shown in FIG. 6, the radial cross section of the elastic body 3b has a structure in which U-shaped bending continues, and the bending stress for displacing the plate-like body 3a in the vertical direction is reduced. As a result, the vertical stroke of the plate-like body 3a increases, and the dynamic range of the detected pressure increases. In addition, the elastic body 3b can be formed thicker than in the first or second embodiment. For this reason, wrinkles and slack are less likely to occur when welding to the upper surface of the recess 4, the linearity of the position variation with respect to the pressure variation is improved, and the hysteresis characteristic can be reduced.

(第四実施形態)
図7は、本発明の第四実施形態に係る圧力緩衝器1の模式的な縦断面図である。第一実施形態と異なる点は、緩衝部材3と本体部2との間にバネ部材7を設置した点であり、その他の構成は第一実施形態と同様である。同一の部分または同一の機能を有する部分には同一の符号を付している。
(Fourth embodiment)
FIG. 7 is a schematic longitudinal sectional view of the pressure shock absorber 1 according to the fourth embodiment of the present invention. The difference from the first embodiment is that a spring member 7 is installed between the buffer member 3 and the main body 2, and other configurations are the same as those of the first embodiment. The same portions or portions having the same function are denoted by the same reference numerals.

図7に示すように、緩衝部材3の板状体3aと本体部2の凹部4の底面との間にコイルバネから成るバネ部材7を設置した。弾性体3bとして柔らかい材料や板状体3aを上下動させるための応力の小さい構造を採用した場合に、被検出部10bの初期位置が定まらない場合がある。このような場合にバネ部材7を設置すれば、被検出部10bと本体部2の初期距離を一定に固定することができ、個別に行う初期調整を簡略化することができる。なお、バネ部材7はコイルバネの他に板バネ等を使用することができる。   As shown in FIG. 7, a spring member 7 made of a coil spring was installed between the plate-like body 3 a of the buffer member 3 and the bottom surface of the recess 4 of the main body 2. When a soft material or a structure with small stress for moving the plate-like body 3a up and down is employed as the elastic body 3b, the initial position of the detected part 10b may not be determined. If the spring member 7 is installed in such a case, the initial distance between the detected portion 10b and the main body portion 2 can be fixed and the initial adjustment performed individually can be simplified. The spring member 7 can be a plate spring or the like in addition to the coil spring.

また、板バネを導電性材料又は磁性体材料で構成することによって、上述した被検出部10bを省略することができる。つまり、板バネを被検出部10bとして用いることができる。
具体的に、本実施形態における板バネは、板状体3aと完全に固定された形態ではないが、伸縮方向に所定量だけ縮められて本体部2の内部に封入されている。そのため、緩衝部材3が本体部2側とカバー17側のどちらに変位したとしても、常に板状体3aと接触している状態に構成されている。
これによって、緩衝部材3の変位に従い、板バネが板状体3aと同じ挙動を示すので、本体検出部10aが板バネの挙動を板状体3aの挙動として検出し、圧力変動を検出することができる。
なお、板バネの形態は図示しないが、弾性部と板部によって形成され、弾性部の一端を本体部2に係合し、弾性部の他端を板部に係合し、板部は板状体3aの凹部4側の表面と対向するように構成されている。
In addition, by configuring the leaf spring with a conductive material or a magnetic material, the above-described detected portion 10b can be omitted. That is, a leaf spring can be used as the detected portion 10b.
Specifically, the leaf spring in the present embodiment is not completely fixed to the plate-like body 3 a, but is contracted by a predetermined amount in the expansion / contraction direction and enclosed in the main body 2. Therefore, the buffer member 3 is always in contact with the plate-like body 3a regardless of whether the buffer member 3 is displaced to the main body 2 side or the cover 17 side.
Accordingly, the leaf spring exhibits the same behavior as the plate-like body 3a in accordance with the displacement of the buffer member 3, so that the main body detection unit 10a detects the behavior of the plate spring as the behavior of the plate-like body 3a, and detects pressure fluctuation. Can do.
Although the form of the leaf spring is not shown, it is formed by an elastic portion and a plate portion, one end of the elastic portion is engaged with the main body portion 2, the other end of the elastic portion is engaged with the plate portion, and the plate portion is a plate. It is configured to face the surface on the concave portion 4 side of the body 3a.

(第五実施形態)
図8及び図9は本発明の第五実施形態に係る液体噴射ヘッド20を説明するための図であり、図8が液体噴射ヘッド20の斜視図であり、図9が液体噴射ヘッド20に使用する圧力緩衝器1の分解斜視図である。同一の部分または同一の機能を有する部分には同一の符号を付している。
(Fifth embodiment)
8 and 9 are diagrams for explaining the liquid jet head 20 according to the fifth embodiment of the present invention. FIG. 8 is a perspective view of the liquid jet head 20, and FIG. 9 is used for the liquid jet head 20. It is a disassembled perspective view of the pressure buffer 1 which does. The same portions or portions having the same function are denoted by the same reference numerals.

図8に示すように、液体噴射ヘッド20は、ベース24と、図示しない被記録媒体に液滴を吐出する噴射部22と、噴射部22に液体を供給する圧力緩衝器1と、噴射部22を制御し、圧力緩衝器1から受信した検出信号を処理する制御回路を搭載した制御回路基板25を備えている。噴射部22は、駆動信号に応じて液滴を吐出するアクチュエータ26と、アクチュエータ26に液体を供給する流路部材23と、アクチュエータ26と制御回路基板25の間を電気的に接続する図示しないフレキシブル回路基板を備えている。ベース24は、衝立の形状を有し、底部にアクチュエータ26を搭載し、側面に制御回路基板25と圧力緩衝器1を固定している。圧力緩衝器1は、カバー17を外側に、本体部2をベース24側に向けてベース24に固定されている。   As shown in FIG. 8, the liquid ejecting head 20 includes a base 24, an ejecting unit 22 that ejects droplets to a recording medium (not shown), a pressure buffer 1 that supplies liquid to the ejecting unit 22, and an ejecting unit 22. And a control circuit board 25 on which a control circuit for processing a detection signal received from the pressure buffer 1 is mounted. The ejection unit 22 is an unillustrated flexible actuator that electrically connects the actuator 26 and the control circuit board 25 with an actuator 26 that ejects droplets in response to a drive signal, a flow path member 23 that supplies liquid to the actuator 26, and the actuator 26. A circuit board is provided. The base 24 has a partition shape, an actuator 26 is mounted on the bottom, and the control circuit board 25 and the pressure buffer 1 are fixed to the side surfaces. The pressure shock absorber 1 is fixed to the base 24 with the cover 17 facing outward and the main body 2 facing the base 24 side.

液体は、供給管40から接続部21aを介して本体部2に流入し、接続部21bを介して流路部材23に、更にアクチュエータ26に流入する。アクチュエータ26は、制御回路からの駆動信号に応じて下部の図示しない被記録媒体に液滴を吐出する。ここで、圧力緩衝器1として、第一から第四実施形態の圧力緩衝器1を使用することができる。   The liquid flows from the supply pipe 40 into the main body portion 2 through the connection portion 21a, flows into the flow path member 23 through the connection portion 21b, and further flows into the actuator 26. The actuator 26 discharges droplets onto a recording medium (not shown) in the lower part in response to a drive signal from the control circuit. Here, as the pressure buffer 1, the pressure buffer 1 of the first to fourth embodiments can be used.

圧力緩衝器1は、流入した液体の圧力変動を緩和させるとともに、その圧力を検出して制御回路に送信する。また、圧力緩衝器1を液体噴射ヘッド20のアクチュエータ26近傍に設置したので、圧力変動が緩和された液体をアクチュエータ26に供給することができるとともに、ノズル近傍の実際の圧力変動を検出することができるので、液滴を吐出する際の液体圧力を高精度で制御することができる。   The pressure buffer 1 reduces the pressure fluctuation of the liquid that has flowed in, detects the pressure, and transmits it to the control circuit. Further, since the pressure buffer 1 is installed in the vicinity of the actuator 26 of the liquid ejecting head 20, it is possible to supply the liquid with the reduced pressure fluctuation to the actuator 26 and to detect the actual pressure fluctuation in the vicinity of the nozzle. As a result, the liquid pressure when ejecting the droplets can be controlled with high accuracy.

図9に示すように、圧力緩衝器1は、凹部4と液体流入用の接続部21aと液体流出用の接続部21bを有する本体部2と、凹部4の上面に設置して凹部4の上端の開口を閉塞する緩衝部材3と、内面に本体検出部10aを設置したカバー17を備えている。緩衝部材3は、中央部が平坦な板状体3aからなり、周辺部がリング状の弾性体3bからなる。被検出部10bは、板状体3aのカバー17側の表面に設置した。緩衝部材3は、板状体3aが上下方向にほぼ自由端として変位するので液体圧力の急激な変化に対して圧力緩和機能を発揮できる。本体検出部10aは、板状体3aの上に設置した被検出部10bとの間の相対的位置変化を検出して液体の圧力変動を検出する。   As shown in FIG. 9, the pressure buffer 1 is installed on the upper surface of the recess 4, the main body 2 having the recess 4, the connection portion 21 a for liquid inflow and the connection portion 21 b for liquid outflow, and the upper end of the recess 4. And a cover 17 having a main body detection unit 10a installed on the inner surface thereof. The buffer member 3 is composed of a flat plate-like body 3a at the center and a ring-shaped elastic body 3b at the periphery. The detected part 10b was installed on the surface of the plate-like body 3a on the cover 17 side. The buffer member 3 can exhibit a pressure relaxation function against a sudden change in liquid pressure because the plate-like body 3a is displaced as a substantially free end in the vertical direction. The main body detection unit 10a detects a change in the pressure of the liquid by detecting a relative position change with the detected unit 10b installed on the plate-like body 3a.

(第六実施形態)
図10は、本発明の第六実施形態に係る液体噴射装置50の模式的な斜視図である。本液体噴射装置50は、上記第五実施形態で説明した液体噴射ヘッド20を使用している。液体噴射装置50は、液体噴射ヘッド20、20’を往復移動させる移動機構63と、液体噴射ヘッド20、20’に液体を供給する液体供給管53、53’と、液体供給管53、53’に液体を供給する液体タンク51、51’を備えている。各液体噴射ヘッド20、20’は、液体を吐出させるアクチュエータ26と、このアクチュエータ26に液体を供給する流路部材23と、流路部材23に液体を供給する圧力緩衝器1を備えている。
(Sixth embodiment)
FIG. 10 is a schematic perspective view of a liquid ejecting apparatus 50 according to the sixth embodiment of the present invention. The liquid ejecting apparatus 50 uses the liquid ejecting head 20 described in the fifth embodiment. The liquid ejecting apparatus 50 includes a moving mechanism 63 that reciprocates the liquid ejecting heads 20 and 20 ′, liquid supply pipes 53 and 53 ′ that supply liquid to the liquid ejecting heads 20 and 20 ′, and liquid supply pipes 53 and 53 ′. Liquid tanks 51 and 51 'for supplying the liquid to the tank. Each of the liquid jet heads 20 and 20 ′ includes an actuator 26 that discharges the liquid, a flow path member 23 that supplies the liquid to the actuator 26, and a pressure buffer 1 that supplies the liquid to the flow path member 23.

ここで、圧力緩衝器1は、流路部材23及びその先のアクチュエータ26に供給する液体の圧力変動を抑制するとともに、液体の圧力変動を検出して検出信号を生成し、液体噴射装置50の図示しない制御部に送信する。制御部は、この検出信号に基づいて、アクチュエータ26に供給する液体の圧力を調整する。   Here, the pressure buffer 1 suppresses fluctuations in the pressure of the liquid supplied to the flow path member 23 and the actuator 26 ahead, and detects a fluctuation in the pressure of the liquid to generate a detection signal. It transmits to the control part which is not illustrated. The control unit adjusts the pressure of the liquid supplied to the actuator 26 based on this detection signal.

具体的に説明する。液体噴射装置50は、紙等の被記録媒体54を主走査方向に搬送する一対の搬送手段61、62と、被記録媒体54に液体を吐出する液体噴射ヘッド20、20’と、液体タンク51、51’に貯留した液体を液体供給管53、53’に押圧して供給するポンプ52、52’と、液体噴射ヘッド20、20’を主走査方向と直交する副走査方向に走査する移動機構63等を備えている。   This will be specifically described. The liquid ejecting apparatus 50 includes a pair of conveying units 61 and 62 that convey a recording medium 54 such as paper in the main scanning direction, liquid ejecting heads 20 and 20 ′ that eject liquid to the recording medium 54, and a liquid tank 51. , 51 ′ presses and supplies liquid stored in the liquid supply pipes 53, 53 ′ to the liquid supply pipes 53, 53 ′, and a moving mechanism that scans the liquid jet heads 20, 20 ′ in the sub-scanning direction orthogonal to the main scanning direction. 63 etc.

一対の搬送手段61、62は副走査方向に延び、ローラ面を接触しながら回転するグリッドローラとピンチローラを備えている。図示しないモータによりグリッドローラとピンチローラを軸周りに移転させてローラ間に挟み込んだ被記録媒体54を主走査方向に搬送する。移動機構63は、副走査方向に延びた一対のガイドレール56、57と、一対のガイドレール56、57に沿って摺動可能なキャリッジユニット58と、キャリッジユニット58を連結し副走査方向に移動させる無端ベルト59と、この無端ベルト59を図示しないプーリを介して周回させるモータ60を備えている。   The pair of conveying means 61 and 62 includes a grid roller and a pinch roller that extend in the sub-scanning direction and rotate while contacting the roller surface. A grid roller and a pinch roller are moved around an axis by a motor (not shown), and the recording medium 54 sandwiched between the rollers is conveyed in the main scanning direction. The moving mechanism 63 connects a pair of guide rails 56, 57 extending in the sub-scanning direction, a carriage unit 58 that can slide along the pair of guide rails 56, 57, and the carriage unit 58 to move in the sub-scanning direction. An endless belt 59 is provided, and a motor 60 that rotates the endless belt 59 via a pulley (not shown) is provided.

キャリッジユニット58は、複数の液体噴射ヘッド20、20’を載置し、例えばイエロー、マゼンタ、シアン、ブラックの4種類の液滴を吐出する。液体タンク51、51’は対応する色の液体を貯留し、ポンプ52、52’、液体供給管53、53’を介して液体噴射ヘッド20、20’に供給する。   The carriage unit 58 mounts a plurality of liquid jet heads 20 and 20 ′, and discharges four types of liquid droplets, for example, yellow, magenta, cyan, and black. The liquid tanks 51 and 51 'store liquids of corresponding colors and supply them to the liquid jet heads 20 and 20' via the pumps 52 and 52 'and the liquid supply pipes 53 and 53'.

液体噴射装置50の制御部は、各液体噴射ヘッド20、20’に駆動信号を与えて各色の液滴を吐出させる。制御部は、液体噴射ヘッド20、20’から液体を吐出させるタイミング、キャリッジユニット58を駆動するモータ60の回転及び被記録媒体54の搬送速度を制御して、被記録媒体54上に任意のパターンを記録する。更に、制御部は、圧力緩衝器1の検出信号に基づいて、ポンプ52、52’を制御し、アクチュエータ26に供給する液体の圧力を調節する。例えば、制御部が、圧力緩衝器1の検出信号から液体の圧力が基準値よりも大きいと判定したときは、ポンプ52、52’を制御して液体の供給圧力を低減させる。また、制御部が、圧力緩衝器1の検出信号から液体の圧力が基準値よりも小さいと判定したときは、ポンプ52、52’を制御して液体の供給圧力を増加させる。これにより、アクチュエータ26内の液体圧力を所定値に設定することができ、ノズルから吐出させる液滴の吐出速度やノズルの液体のメニスカスを一定にすることができる。   The control unit of the liquid ejecting apparatus 50 gives drive signals to the liquid ejecting heads 20 and 20 ′ to eject liquid droplets of the respective colors. The control unit controls the timing at which liquid is ejected from the liquid ejecting heads 20 and 20 ′, the rotation of the motor 60 that drives the carriage unit 58, and the conveyance speed of the recording medium 54, so that an arbitrary pattern is formed on the recording medium 54. Record. Further, the control unit controls the pumps 52 and 52 ′ based on the detection signal of the pressure buffer 1 to adjust the pressure of the liquid supplied to the actuator 26. For example, when the control unit determines from the detection signal of the pressure buffer 1 that the liquid pressure is larger than the reference value, the control unit controls the pumps 52 and 52 ′ to reduce the liquid supply pressure. Further, when the control unit determines from the detection signal of the pressure buffer 1 that the liquid pressure is smaller than the reference value, the control unit controls the pumps 52 and 52 'to increase the liquid supply pressure. Thereby, the liquid pressure in the actuator 26 can be set to a predetermined value, and the discharge speed of the liquid droplets discharged from the nozzle and the meniscus of the liquid in the nozzle can be made constant.

本実施形態ではアクチュエータ26の直近に圧力緩衝器1を設置したので、装置が大型化、高速化して配管53が長くなる場合でも、アクチュエータ26内の液体圧力の変動を有効に緩和させるとともに、液体の圧力変動をアクチュエータ26近傍で検出してポンプ52にフィードバック制御するので、アクチュエータ26内の液体圧力を高精度で制御することができる。   In the present embodiment, since the pressure buffer 1 is installed in the immediate vicinity of the actuator 26, even when the apparatus is increased in size and speeded up and the piping 53 becomes longer, the fluctuation of the liquid pressure in the actuator 26 is effectively reduced and the liquid is increased. The pressure fluctuation in the vicinity of the actuator 26 is detected and feedback controlled to the pump 52, so that the liquid pressure in the actuator 26 can be controlled with high accuracy.

1 圧力緩衝器
2 本体部
3 緩衝部材、3a 板状体、3b 弾性体
4 凹部
5 連通孔
6 室内
7 バネ部材
10 検出部、10a 本体検出部、10b 被検出部
11 送信コイル
12 受信コイル
16 ケース
17 カバー
20 液体噴射ヘッド
50 液体噴射装置
DESCRIPTION OF SYMBOLS 1 Pressure buffer 2 Main body part 3 Buffer member, 3a Plate body, 3b Elastic body 4 Recessed part 5 Communication hole 6 Indoor 7 Spring member 10 Detection part, 10a Main body detection part, 10b Detected part 11 Transmitting coil 12 Reception coil 16 Case 17 Cover 20 Liquid ejecting head 50 Liquid ejecting apparatus

Claims (13)

上端が開口する凹部と、前記凹部の内面に外部領域と連通する連通孔を有する本体部と、
前記凹部の上端面に接合して前記凹部の開口を閉塞し、内部に充填される液体の圧力変動を緩和させる緩衝部材と、
前記緩衝部材と前記本体部との間の相対的位置変化を検出する検出部と、を備え、
前記緩衝部材は、中央部が板状体から成り、その周辺部が弾性体から成り、
前記弾性体は、径方向に断面が撓みを有する圧力緩衝器。
A recess having an upper end opened, and a main body having a communication hole communicating with an external region on the inner surface of the recess,
A buffer member that is bonded to the upper end surface of the recess to close the opening of the recess and relaxes the pressure fluctuation of the liquid filled therein;
A detection unit that detects a relative position change between the buffer member and the main body,
The buffer member has a central portion made of a plate-like body and a peripheral portion made of an elastic body,
The elastic body is a pressure buffer whose cross section is bent in the radial direction.
前記弾性体は前記板状体の周辺部を囲むリング状の形状を有する請求項1に記載の圧力緩衝器。   The pressure buffer according to claim 1, wherein the elastic body has a ring shape surrounding a peripheral portion of the plate-like body. 前記撓みはU字形状を有する請求項1又は2に記載の圧力緩衝器。   The pressure buffer according to claim 1, wherein the deflection has a U shape. 前記撓みは前記凹部の側に凸である請求項1〜3のいずれか一項に記載の圧力緩衝器。   The pressure buffer according to any one of claims 1 to 3, wherein the deflection is convex toward the concave portion. 前記撓みは前記凹部とは反対側に凸である請求項1〜4のいずれか一項に記載の圧力緩衝器。   The pressure buffer according to any one of claims 1 to 4, wherein the deflection is convex on the side opposite to the concave portion. 前記撓みは、前記凹部の側に凸と前記凹部とは反対側に凸が連なる請求項1〜5のいずれか一項に記載の圧力緩衝器。   The pressure buffer according to any one of claims 1 to 5, wherein the bending is such that a convex is continuous on the concave side and a convex is continuous on the opposite side of the concave. 前記板状体と前記弾性体は同一材料から成り、前記板状体は前記弾性体よりも厚みが厚い請求項1〜6のいずれか一項に記載の圧力緩衝器。   The pressure damper according to any one of claims 1 to 6, wherein the plate-like body and the elastic body are made of the same material, and the plate-like body is thicker than the elastic body. 前記板状体は導電性材料又は磁性体材料から成る請求項1〜7のいずれか一項に記載の圧力緩衝器。   The pressure buffer according to claim 1, wherein the plate-like body is made of a conductive material or a magnetic material. 一端を前記板状体に、他端を前記本体部に係合するバネ部材を備える請求項1〜8のいずれか一項に記載の圧力緩衝器。   The pressure shock absorber according to any one of claims 1 to 8, further comprising a spring member having one end engaged with the plate-like body and the other end engaged with the main body. 前記検出部は、電磁誘導に基づく起電力を検出して前記相対的位置変化を検出する請求項1〜9のいずれか一項に記載の圧力緩衝器。   The pressure buffer according to any one of claims 1 to 9, wherein the detection unit detects the relative position change by detecting an electromotive force based on electromagnetic induction. 前記検出部は、磁力線を生成する送信コイルと前記起電力を誘起する受信コイルを備える請求項10に記載の圧力緩衝器。   The pressure buffer according to claim 10, wherein the detection unit includes a transmission coil that generates magnetic field lines and a reception coil that induces the electromotive force. 請求項1〜11のいずれか1項に記載の圧力緩衝器と、
前記圧力緩衝器の連通孔に連通する配管と、
前記配管から流入した液体を吐出するアクチュエータと、を備える液体噴射ヘッド。
The pressure buffer according to any one of claims 1 to 11,
A pipe communicating with the communication hole of the pressure buffer;
A liquid ejecting head comprising: an actuator that discharges the liquid flowing in from the pipe.
請求項12に記載の液体噴射ヘッドと、
前記液体を収容し、前記配管に液体を供給するタンクと、
前記圧力緩衝器が検出した前記相対的位置変化に基づいて前記液体の圧力を制御するポンプと、を備える液体噴射装置。
A liquid jet head according to claim 12,
A tank for containing the liquid and supplying the liquid to the pipe;
And a pump that controls the pressure of the liquid based on the relative position change detected by the pressure buffer.
JP2011038829A 2011-02-24 2011-02-24 Pressure buffer, liquid ejecting head, and liquid ejecting apparatus Expired - Fee Related JP5731853B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011038829A JP5731853B2 (en) 2011-02-24 2011-02-24 Pressure buffer, liquid ejecting head, and liquid ejecting apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011038829A JP5731853B2 (en) 2011-02-24 2011-02-24 Pressure buffer, liquid ejecting head, and liquid ejecting apparatus

Publications (2)

Publication Number Publication Date
JP2012171343A true JP2012171343A (en) 2012-09-10
JP5731853B2 JP5731853B2 (en) 2015-06-10

Family

ID=46974662

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011038829A Expired - Fee Related JP5731853B2 (en) 2011-02-24 2011-02-24 Pressure buffer, liquid ejecting head, and liquid ejecting apparatus

Country Status (1)

Country Link
JP (1) JP5731853B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018012204A (en) * 2016-07-19 2018-01-25 武藤工業株式会社 Ink jet recording device, and damper mechanism in the same
US10155391B2 (en) 2015-09-29 2018-12-18 Seiko Epson Corporation Flow path member and liquid ejecting apparatus
CN112208214A (en) * 2019-07-11 2021-01-12 海德堡印刷机械股份公司 Device for supplying liquid ink to an ink printing head of an ink printer

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59104946A (en) * 1982-12-08 1984-06-18 Konishiroku Photo Ind Co Ltd Ink jet recording apparatus
JPH1044469A (en) * 1996-04-17 1998-02-17 Hewlett Packard Co <Hp> Ink level detection mechanism for ink supply container, ink level detector, and ink supply cartridge
JPH10337879A (en) * 1997-06-04 1998-12-22 Hewlett Packard Co <Hp> Ink level sensing system
JP2006021383A (en) * 2004-07-07 2006-01-26 Konica Minolta Medical & Graphic Inc Inkjet printer
JP2007245561A (en) * 2006-03-16 2007-09-27 Seiko Epson Corp Liquid feeder and liquid jet device
JP2008143081A (en) * 2006-12-12 2008-06-26 Sii Printek Inc Pressure buffer and inkjet head
JP2008173846A (en) * 2007-01-18 2008-07-31 Konica Minolta Medical & Graphic Inc Inkjet recording apparatus
JP2009178865A (en) * 2008-01-29 2009-08-13 Canon Inc Liquid container and ink tank
JP2010012707A (en) * 2008-07-04 2010-01-21 Konica Minolta Holdings Inc Back pressure holding device and inkjet recording apparatus
JP2011173397A (en) * 2010-02-25 2011-09-08 Sii Printek Inc Pressure damper, liquid jetting head, and liquid jetting apparatus

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59104946A (en) * 1982-12-08 1984-06-18 Konishiroku Photo Ind Co Ltd Ink jet recording apparatus
JPH1044469A (en) * 1996-04-17 1998-02-17 Hewlett Packard Co <Hp> Ink level detection mechanism for ink supply container, ink level detector, and ink supply cartridge
JPH10337879A (en) * 1997-06-04 1998-12-22 Hewlett Packard Co <Hp> Ink level sensing system
JP2006021383A (en) * 2004-07-07 2006-01-26 Konica Minolta Medical & Graphic Inc Inkjet printer
JP2007245561A (en) * 2006-03-16 2007-09-27 Seiko Epson Corp Liquid feeder and liquid jet device
JP2008143081A (en) * 2006-12-12 2008-06-26 Sii Printek Inc Pressure buffer and inkjet head
JP2008173846A (en) * 2007-01-18 2008-07-31 Konica Minolta Medical & Graphic Inc Inkjet recording apparatus
JP2009178865A (en) * 2008-01-29 2009-08-13 Canon Inc Liquid container and ink tank
JP2010012707A (en) * 2008-07-04 2010-01-21 Konica Minolta Holdings Inc Back pressure holding device and inkjet recording apparatus
JP2011173397A (en) * 2010-02-25 2011-09-08 Sii Printek Inc Pressure damper, liquid jetting head, and liquid jetting apparatus

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10155391B2 (en) 2015-09-29 2018-12-18 Seiko Epson Corporation Flow path member and liquid ejecting apparatus
JP2018012204A (en) * 2016-07-19 2018-01-25 武藤工業株式会社 Ink jet recording device, and damper mechanism in the same
CN112208214A (en) * 2019-07-11 2021-01-12 海德堡印刷机械股份公司 Device for supplying liquid ink to an ink printing head of an ink printer

Also Published As

Publication number Publication date
JP5731853B2 (en) 2015-06-10

Similar Documents

Publication Publication Date Title
JP5506452B2 (en) Pressure buffer, liquid ejecting head, and liquid ejecting apparatus
JP6041732B2 (en) Damper device
JP5438096B2 (en) Pressure buffer, liquid jet head, liquid jet recording apparatus, and pressure buffering method
JP5373588B2 (en) Liquid ejecting head and liquid ejecting apparatus
JP5731853B2 (en) Pressure buffer, liquid ejecting head, and liquid ejecting apparatus
US8366227B2 (en) Pressure damper, liquid jet head, liquid jet apparatus, and pressure damping method
GB2511190A (en) Liquid jet head and liquid jet apparatus
JP6009322B2 (en) Damper device
JP2019123115A (en) Liquid discharge head, liquid discharge unit, device for discharging liquid
JP2016022704A (en) Liquid injection device and manufacturing method of the same
US8651628B2 (en) Liquid droplet ejecting head and image forming apparatus
JP2012061684A (en) Pressure damper, liquid ejection head, liquid jet recorder, manufacturing tool for pressure damper, and method of manufacturing pressure damper
JPS59104947A (en) Ink jet recording apparatus
JP2014193557A (en) Liquid jetting head and liquid jetting device
JP2011126254A (en) Liquid injection head and liquid injection device
JP2017165054A (en) Liquid jet head
JP2017089743A (en) Pressure control device and liquid injection device
JP6470104B2 (en) Pressure buffer, liquid jet head, and liquid jet recording apparatus
JPS59115859A (en) Ink jet recording apparatus
JP2013022810A (en) Fluid introduction unit, fluid ejection head unit, and fluid ejection apparatus
JP2023175141A (en) damper device
JP2017074800A (en) Liquid jet head and liquid jet device
JP2014233877A (en) Liquid jet head and liquid jet device
JP2015139994A (en) Ink jet printer
JP2003334945A (en) Liquid drop ejection head, ink cartridge, inkjet recorder, and micro pump

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20131210

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20140604

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20140610

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20140805

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20141209

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20150225

A911 Transfer of reconsideration by examiner before appeal (zenchi)

Free format text: JAPANESE INTERMEDIATE CODE: A911

Effective date: 20150304

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20150324

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20150410

R150 Certificate of patent or registration of utility model

Ref document number: 5731853

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees