JP2012167930A - Three-dimensional image acquisition device and three-dimensional image acquisition method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a three-dimensional image acquisition device able to guide reflected light to an optical detector not through a micro-lens without providing a beam splitter between the micro-lens and a pin hole.SOLUTION: In a three-dimensional image acquisition device 10 using a confocal optical system, a micro-lens plate 13 is formed by two dimensionally disposing micro-lenses that condense illumination light. An illumination-side aperture plate 14 has an illumination-side aperture part provided in the condensing positions of the micro-lenses, and illumination light condensed by the micro-lens through the illumination-side aperture part is passed through toward a measured body 17. A polarization beam splitter 15 transmits illumination light passed through the illumination-side aperture plate 14, and reflects the reflection light from the measured body 17 to an optical path different from the optical path of the illumination light. A detection-side aperture plate 21 has a detection-side aperture part provided in a position optically conjugate with the illumination-side aperture part, and passes reflection light, reflected by the polarization beam splitter 15, toward an optical detector through the detection-side aperture part.

Description

  The present invention relates to a three-dimensional image acquisition apparatus and a three-dimensional image acquisition method for acquiring a three-dimensional image of an object using a confocal optical system.

  Conventionally, as a technique for acquiring a three-dimensional image of an object using this type of confocal optical system, there is a technique disclosed in JP-A-9-26545 (Patent Document 1).

  The confocal optical scanner disclosed in Patent Document 1 includes a disk in which a plurality of microlenses are arranged in an array, a disk in which minute openings (pinholes) are provided in the same pattern as the microlens, and these two disks A beam splitter inserted between the two.

  The light emitted from the light source is incident on the object to be measured through a microlens, a beam splitter, and a pinhole. For this reason, compared with the case where a microlens is not used, the light emitted from the light source is focused on the microlens and efficiently guided to the pinhole.

  On the other hand, in general, when the reflected light passing through the pinhole passes through the microlens, the spot of the light defined by the pinhole spreads to the lens pitch, and also due to the influence of variations in the shape and focal length of each microlens. Image formation will deteriorate. In that respect, according to the confocal scanner described in Patent Document 1, the reflected light from the object to be measured is directed to the photodetector via the pinhole and the beam splitter, and does not pass through the microlens. For this reason, compared with the case where the reflected light that has passed through the pinhole passes through the microlens, it is possible to prevent the deterioration of image formation by the microlens.

JP-A-9-26545

  By the way, the microlens is formed so that the curvature decreases as the distance to the pinhole increases. On the other hand, as the curvature of the microlens decreases, it becomes difficult to manufacture the microlens. For this reason, in a confocal optical system that requires tens of thousands to millions of microlenses, the curvature of the microlens may be increased (the radius of curvature is decreased) in order to stably produce a large number of microlenses. It is desirable to make the distance between the microlens and the pinhole as close as possible.

  However, in the conventional technique, it is necessary to insert a beam splitter between two disks. For this reason, the two disks cannot be closer than the distance for inserting the beam splitter. Therefore, with the conventional technology, it is difficult to increase the curvature of the microlens, and it is extremely difficult to stably manufacture a large number of microlenses.

  The present invention has been made in consideration of the above-described circumstances, and is capable of guiding reflected light to a photodetector without using a microlens without providing a beam splitter between the microlens and the pinhole. An object is to provide an original image acquisition device and a three-dimensional image acquisition method.

  A three-dimensional image acquisition apparatus according to an embodiment of the present invention is a three-dimensional image acquisition apparatus that uses a confocal optical system to solve the above-described problem, and includes a microlens plate, an illumination-side aperture plate, and a beam. A splitter and a detection-side aperture plate are provided. In the microlens plate, a plurality of microlenses that collect the illumination light emitted from the light source are two-dimensionally arranged. The illumination side aperture plate has a plurality of illumination side openings provided at the respective condensing positions of the plurality of microlenses, and the illumination light collected by the microlens by each of the plurality of illumination side openings is measured. Pass it towards the body. The beam splitter transmits the illumination light that has passed through the illumination side aperture plate toward the object to be measured, and reflects the reflected light from the object to be measured to an optical path different from the optical path of the illumination light. The detection side aperture plate has a plurality of detection side apertures provided at positions optically conjugate with each of the plurality of illumination side apertures, and is reflected by the beam splitter by each of the plurality of detection side apertures. The reflected light is passed toward the photodetector.

  According to the three-dimensional image acquisition apparatus and the three-dimensional image acquisition method of the present invention, the reflected light is guided to the photodetector without using a microlens without providing a beam splitter between the microlens and the pinhole. Can do.

1 is a schematic overall configuration diagram showing an example of a three-dimensional image acquisition apparatus according to an embodiment of the present invention. The side view which shows the example of 1 structure of a micro lens plate and the illumination side aperture plate. Explanatory drawing which shows an example of the relationship between a micro lens plate, an illumination side aperture plate, a polarization beam splitter, and a detection side aperture plate. The figure for demonstrating an example of position alignment with a photodetector and an illumination side opening part.

  Embodiments of a 3D image acquisition apparatus and a 3D image acquisition method according to the present invention will be described with reference to the accompanying drawings.

  A three-dimensional image acquisition apparatus according to an embodiment of the present invention measures a shape of a measurement object using a confocal optical system having a two-dimensional array type aperture array, generates a shape image, and displays the shape image It is displayed on the device. For measurement objects, for example, through holes such as bumps on printed wiring boards and laser vias on multilayer printed wiring boards, and when near infrared light with high silicon transmittance is used as the light source, silicon wafer laminate bonding Including the vicinity and the inside of silicon.

  FIG. 1 is a schematic overall configuration diagram showing an example of a three-dimensional image acquisition apparatus 10 according to an embodiment of the present invention. In the following description, an example in which the optical axis direction of the objective lens is the Z axis and the directions perpendicular to the optical axis direction are the X axis and the Y axis will be described. In the following description, an example in which the optical axis of the objective lens and the incident optical axis of the illumination light (illumination optical axis) are parallel will be described.

  As shown in FIG. 1, the three-dimensional image acquisition apparatus 10 mounts a light source 11, a collimating lens 12, a microlens plate 13, an illumination side aperture plate 14, a polarization beam splitter 15, an objective lens 16, and a measured object 17. Mounting table 18, detection side aperture plate 21, imaging optical system 22, photodetector group 23 having a plurality of photodetectors that receive reflected light from the measurement object 17, and mounting table 18 in each of XYZ directions. It has the mounting base drive part 30 for moving, the mounting base 18, the support base 31 which supports the mounting base drive part 30, and the information processing apparatus 32. The mounting table drive unit 30 includes a Z-axis displacement unit 33 for displacing the mounting table 18 in the Z-axis direction, and an XY-axis displacement unit 34 for displacing the mounting table 18 in the XY direction.

  The light source 11 is configured using a halogen lamp, various white light sources, a laser, or the like. Illumination light emitted from the light source 11 is guided to the light guide 11a and enters the collimating lens 12, and the collimating lens 12 illuminates the microlens plate 13 as planar parallel light.

  FIG. 2 is a side view showing a configuration example of the microlens plate 13 and the illumination side aperture plate 14.

As shown in FIG. 2, the microlens plate 13 includes a substrate 36 made of a transparent member such as glass, and a plurality of microlenses arranged two-dimensionally on the surface of the substrate 36 that faces the illumination side opening plate 14. 37. The microlens 37 is installed on a two-dimensional lattice point with an interval of 25 μm, for example. The illumination light incident on the microlens plate 13 is condensed toward the illumination side aperture plate 14 by each of the plurality of microlenses 37. The illumination side aperture plate 14 is collected at the respective condensing positions of the plurality of microlenses 37. A plurality of illumination side openings 38 are provided. Each of the plurality of illumination side openings 38 allows the illumination light collected by the microlens 37 to pass toward the measurement target 17. For example, when the microlens 37 is installed on a two-dimensional lattice point with an interval of 25 μm, the illumination side opening 38 is also installed on a two-dimensional lattice point with an interval of 25 μm so as to correspond to each of the microlenses 37.

  The polarization beam splitter 15 transmits the illumination light that has passed through the illumination side opening 38 of the illumination side aperture plate 14 toward the measurement target 17. Further, the polarization beam splitter 15 reflects the reflected light from the measurement object 17 with an optical path different from the optical path of the illumination light (the optical path parallel to the illumination optical axis of FIG. 1 (the optical axis of the objective lens)). It is guided to the photodetector group 23 by being reflected on an optical path parallel to the axis.

  The objective lens 16 includes a plurality of lenses 39, a diaphragm 40, and a quarter wavelength plate 41, and constitutes a both-side telecentric optical system. The illumination light transmitted through the polarization beam splitter 15 is condensed by the objective lens 16 and projected onto the measurement object 17. Further, the reflected light of the measurement object 17 passes through the same optical path as the illumination light, and is collected by the objective lens 16 and guided to the polarization beam splitter 15.

  The illumination side opening 38 of the illumination side aperture plate 14 functions as a point light source. The light that has passed through each of the illumination side openings 38 is condensed by the objective lens 16 onto a point conjugate with the point light source (hereinafter referred to as a measured object side conjugate point) while being projected onto the measured object 17. The objective lens 16 condenses the measured object side conjugate points corresponding to the respective openings 38 on a surface perpendicular to the illumination optical axis direction at a predetermined position in the Z axis direction (hereinafter referred to as the measured object side conjugate surface). To do.

  The objective lens 16 preferably has a predetermined optical magnification greater than 1 (for example, 5 times, 7.5 times, 15 times, etc.). This is because when the distance between the measured object side conjugate points is fixed, the larger the optical magnification of the objective lens 16 is, the larger the installation interval of the illumination side apertures 38 of the illumination side aperture plate 14 is. This is because it becomes easy to manufacture. For example, when the object-side conjugate point is on a two-dimensional lattice point with an interval of 5 μm and the optical magnification of the objective lens 16 is five times, the illumination side opening 38 is installed on a two-dimensional lattice point with an interval of 25 μm. Good.

  FIG. 3 is an explanatory diagram showing an example of the relationship among the microlens plate 13, the illumination side aperture plate 14, the polarization beam splitter 15, and the detection side aperture plate 21.

  As shown in FIG. 3, the detection-side aperture plate 21 has a plurality of detection-side apertures 42 provided at the condensing position of the reflected light condensed by the objective lens 16. That is, each of the detection side opening 42 and each of the illumination side opening 38 are conjugated with each other by the polarization beam splitter 15 and the objective lens 16. Each of the plurality of detection-side openings 42 allows the reflected light collected by the objective lens 16 to pass toward the photodetector group 23.

  The imaging optical system 22 is preferably constituted by, for example, a plurality of lenses 43 and a diaphragm 44 to form a double-sided telecentric optical system. The reflected light that has passed through the detection-side opening 42 is condensed on the photodetectors of the photodetector group 23 via the imaging optical system 22. That is, each of the detection side openings 42 and the photodetectors disposed at positions corresponding to the detection side openings 42 are conjugated with each other by the imaging optical system 22.

  The photodetectors constituting the photodetector group 23 are constituted by a CCD (Charge Coupled Device) image sensor or a CMOS (Complementary Metal Oxide Semiconductor) image sensor, and a signal corresponding to the intensity of irradiated light is transmitted to the information processing device 32. Output to. The light detection group 23 is controlled by the information processing device 32 in light detection timing.

  The photodetector is disposed at a position where the intensity change of the light collected at the detection-side opening 42 can be detected. The number of photodetectors corresponding to one detection-side opening 42 may be one or more.

  The Z-axis displacement unit 33 of the mounting table driving unit 30 is configured by a general driving device such as a piezo motor or a servo motor, and displaces the mounting table 18 in the illumination optical axis direction. The amount, direction, and timing of this displacement are controlled by the information processing device 32 via the Z-axis driver 51. The Z-axis displacement unit 33 displaces the mounting table 18 in the direction of the illumination optical axis, so that the relative position in the Z-axis direction (illumination optical axis direction) between the position of the measured object side conjugate point and the position of the measured object 17 is obtained. The positional relationship (hereinafter referred to as Z positional relationship) is changed.

  The XY axis displacement unit 34 of the mounting table driving unit 30 is configured by a general driving device such as a piezo motor or a servo motor, and displaces the mounting table 18 in a direction perpendicular to the illumination optical axis direction. The XY axis displacement unit 34 includes an X axis displacement mechanism 52 and a Y axis displacement mechanism 53 that perform positioning of the mounting table 18 in the X axis direction and the Y axis direction, respectively.

  The X-axis displacement mechanism 52 and the Y-axis displacement mechanism 53 are configured by, for example, servo motors, and the amount, direction, and timing of displacement are controlled by the information processing device 32 via the XY axis driver 54. When the mounting table 18 is displaced in the direction perpendicular to the illumination optical axis direction, the relative positional relationship between the position of the measurement object side conjugate point and the position of the measurement object 17 in the direction perpendicular to the illumination optical axis direction (hereinafter, referred to as the measurement object side conjugate point). , XY positional relationship) is changed.

  Next, a method for acquiring the shape image of the measurement object 17 based on the output of the photodetector group 23 will be briefly described.

  The information processing apparatus 32 can be configured by, for example, a desktop type or notebook type personal computer. The information processing apparatus 32 includes an input unit 61, a display unit 62, a storage unit 63, and a main control unit.

  The input unit 61 includes a general input device such as a keyboard, a touch panel, and a numeric keypad, and outputs an operation input signal corresponding to a user operation to the main control unit. The display unit 62 is configured by a general display output device such as a liquid crystal display or an OLED (Organic Light Emitting Diode) display, and displays various types of information according to the control of the main control unit. The storage unit 63 is a storage medium that can be read and written by the CPU, and stores in advance the XY positional relationship and the XY coordinates of the measured object side conjugate point.

  The main control unit is configured by a storage medium such as a CPU, a RAM, and a ROM. The CPU of the main control unit functions as at least a height determination unit 64, a shape information acquisition unit 65, and an image generation unit 66 according to a program stored in a storage medium such as a ROM, and based on the output of the photodetector group 23. The process of acquiring the shape image of the measurement object 17 is executed. Each of the units 64 to 66 uses a required work area of the RAM as a temporary storage location for data. Each of the units 64 to 66 may be configured by hardware logic such as a circuit without using a CPU.

  The storage medium including the ROM and the storage unit 63 have a configuration including a recording medium that can be read by the CPU, such as a magnetic or optical recording medium or a semiconductor memory, and programs and data stored in the storage medium Part or all may be configured to be downloaded via an electronic network. Here, an electronic network means an information communication network using telecommunications technology in general, in addition to a wireless / wired LAN (Local Area Network) and the Internet network, a telephone communication line network, an optical fiber communication network, a cable communication network, Includes satellite communications networks.

  The height determination unit 64 controls the Z-axis displacement unit 33 and the photodetector group 23 to thereby adjust the Z positional relationship (relative in the illumination optical axis direction between the position of the measured object-side conjugate point and the position of the measured object 17). A plurality of optical detector signals are obtained discretely while changing the general positional relationship). The height determination unit 64 then determines the Z-axis coordinate (in the direction of the illumination optical axis) of the measurement object 17 that maximizes the signal intensity based on the intensity of a plurality of discretely acquired signals for each measurement object-side conjugate point. Is calculated). The height determination unit 64 determines the calculated Z-axis coordinates as the Z-axis coordinates of the measurement target 17 at the plurality of measurement target side conjugate points corresponding to the plurality of illumination side openings 38.

  The height determination unit 64 may acquire the signal of the photodetector while continuously changing the Z positional relationship, or after stopping the Z positional relationship at a predetermined positional relationship, You may repeat acquiring. In the latter case, the possibility of the moire phenomenon occurring can be reduced as compared with the former case.

  Note that the Z-axis coordinate of the measurement target 17 that maximizes the signal intensity is calculated based on the intensity of a plurality of signals obtained discretely from the output of the photodetector in the shape measurement technique using the confocal optical system. Various methods are conventionally known, and any of them can be used (for example, paragraph [1] of Japanese Patent Application Laid-Open No. 9-12639, which is a patent document by the same applicant as the present application). 0014]-[0017] etc.).

  The shape information acquisition unit 65 controls the XY axis displacement unit 34 and the height determination unit 64 so that each of the initial position of the mounting table 18 and the movement position where the mounting table 18 is moved from the initial position in the XY direction. The height determination unit 64 determines the Z-axis coordinates of the measurement target 17 at each of the plurality of measurement target side conjugate points corresponding to the plurality of illumination side openings 38. As a result, the shape information acquisition unit 65 obtains the three-dimensional shape information of the measured object 17 including information on the Z-axis coordinates of the measured object 17 at a plurality of measured object side conjugate points at the initial position and the moving position. Can be acquired.

  As the moving distance of the mounting table 18 by the XY axis displacement unit 34, for example, a value set according to an instruction from the user via the input unit 61 may be used, or an initially set value may be used. .

  The image generation unit 66 generates a shape image of the measurement target 17 using the three-dimensional shape information acquired by the shape information acquisition unit 65 and causes the display unit 62 to display the shape image.

  The three-dimensional image acquisition apparatus 10 according to the present embodiment condenses illumination light on each illumination side opening 38 by the micro lens 37. For this reason, the light quantity of illumination light can be utilized without waste.

  When the illumination light is directly applied to the illumination side opening 38 without using the microlens 37, a part of the illumination light is blocked by the portion of the illumination side opening plate 14 excluding the illumination side opening 38. On the other hand, according to the three-dimensional image acquisition apparatus 10 according to the present embodiment, the illumination light can be condensed on each illumination side opening 38 by the micro lens 37. For this reason, a very large amount of light can be used as compared with the case where the microlens 37 is not used.

  Further, in the three-dimensional image acquisition apparatus 10 according to the present embodiment, the polarization beam splitter 15 for branching the optical path of the illumination light and the reflected light is disposed on the measured object 17 side of the illumination side aperture plate 14. There is no need to provide the polarizing beam splitter 15 between the microlens plate 13 and the illumination side aperture plate 14.

  Accordingly, the distance between the microlens 37 and the illumination side opening 38 can be made shorter than in the case where the polarization beam splitter 15 is provided between the microlens plate 13 and the illumination side opening plate 14. For this reason, the curvature of the microlens 37 can be increased, and the microlens 37 can be manufactured stably. Producing the microlens 37 stably is particularly important in a confocal optical system that requires tens of thousands to millions of microlenses. In addition, as shown in FIG. 2, by disposing the microlens 37 on the surface of the substrate 36 facing the illumination side opening plate 14, the distance between the microlens 37 and the illumination side opening 38 can be further reduced. In FIG. 3, the microlens 37 and the illumination side opening 38 are provided on a two-dimensional lattice point with an interval of 0.025 mm (25 μm), and the distance between the microlens plate 13 and the illumination side aperture plate 14 is 0. An example is shown in which the diameter is 11 mm, the radius of curvature of the microlens 37 is 0.057 mm, and the protrusion height is 0.0014 mm.

  Further, in the three-dimensional image acquisition apparatus 10 according to the present embodiment, the polarization beam splitter 15 for branching the optical paths of the illumination light and the reflected light is disposed on the measured object 17 side of the illumination side aperture plate 14. The reflected light of the measurement object 17 passes through the detector-side opening 42 without passing through the microlens 37 and is guided to the photodetector group 23.

  For example, when reflected light that has passed through the detection-side opening 42 passes through the microlens, the spot of light defined by the detection-side opening 42 not only spreads to the lens pitch, but also the shape and focal length of each microlens. The image formation deteriorates due to the influence of the variation of the image quality. In that respect, according to the three-dimensional image acquisition apparatus 10 according to the present embodiment, it is possible to prevent this image degradation.

  FIG. 4 is a diagram for explaining an example of alignment between the photodetector and the illumination side opening 38. In the following description, an example in which the microlens 37 and the detection-side opening 42 (not shown in FIG. 4) are provided at positions corresponding to the illumination-side opening 38 will be described. In this case, the same number of microlenses 37 and detection side openings 42 as the illumination side openings 38 are provided. FIG. 4 shows an example in which the illumination side opening 38 is provided on a 15 × 15 two-dimensional square lattice point and the photodetector is provided on a 10 × 10 two-dimensional square lattice point. .

  As shown in FIG. 4, the number of the illumination side openings 38 and the detection side openings 42 is made larger than the number of photodetectors, so that the mutual alignment becomes very easy.

  For example, among the plurality of illumination side openings 38, those provided at the lattice points corresponding to the lattice points where the photodetectors are provided (lattice points belonging to the central region) are defined as the first illumination side opening group 71, Consider a case where the second illumination-side opening group 72 is provided at lattice points belonging to the peripheral region surrounding the central region. At this time, the detection-side opening 42 is also divided into a first group and a second group corresponding to the first illumination-side opening group 71 and the second illumination-side opening group 72. Similarly, the microlens 37 is divided into a first group and a second group.

  In this case, after the first illumination-side opening group 71 and the photodetector are aligned, when the alignment is shifted as shown in FIG. Even if the aperture group 71 and the photodetector are not completely matched again, the reflected light can be easily projected onto the photodetector by partially using the second illumination side aperture group 72.

  Further, in the alignment between the microlens 37 and the illumination side opening 38 and the alignment between the illumination side opening 38 and the detection side opening 42, the positions corresponding to the first illumination side opening group 71 are also different. Since they need only coincide with each other and can be positioned in a plurality of positional relationships, alignment can be performed very easily.

  Further, when the number of illumination side openings 38 and detection side openings 42 is larger than the number of photodetectors, the contrast condition between the photodetectors located near the outermost periphery and the photodetectors located near the center is almost the same. Since they can be the same, there is an effect of suppressing the occurrence of unevenness. This is because the reflected light corresponding to the illumination light that has passed through the second illumination-side opening group 72 is projected around the photodetector located near the outermost periphery. Note that even if the number of microlenses 37 is the same as the number of photodetectors, light detection is performed in which reflected light derived from illumination light transmitted through the substrate 36 at a position corresponding to the second illumination-side opening group 72 is located in the vicinity of the outermost periphery. The same effect can be obtained because it is projected around the vessel.

  In addition, although some embodiment of this invention was described, these embodiment is shown as an example and is not intending limiting the range of invention. These novel embodiments can be implemented in various other forms, and various omissions, replacements, and changes can be made without departing from the scope of the invention. These embodiments and modifications thereof are included in the scope and gist of the invention, and are included in the invention described in the claims and the equivalents thereof.

DESCRIPTION OF SYMBOLS 10 3D image acquisition apparatus 11 Light source 13 Micro lens board 14 Illumination side aperture plate 15 Polarization beam splitter 16 Objective lens 17 Measurement object 21 Detection side aperture plate 23 Photodetector group 32 Information processing device 36 Substrate 37 Micro lens 38 Illumination side Aperture 41 1/4 wavelength plate 42 Detection side aperture 71 First illumination side aperture group 72 Second illumination side aperture group

Claims (5)

A three-dimensional image acquisition device using a confocal optical system,
A microlens plate in which a plurality of microlenses for condensing illumination light emitted from a light source are two-dimensionally arranged;
A plurality of illumination side openings provided at the respective condensing positions of the plurality of microlenses, and the illumination light collected by the microlens by each of the plurality of illumination side openings is to be measured; An illumination-side aperture plate that passes through,
A beam splitter that transmits the illumination light that has passed through the illumination side aperture plate toward the object to be measured, and reflects reflected light from the object to be measured in an optical path different from the optical path of the illumination light;
The reflected light which has a plurality of detection side openings provided at positions optically conjugate with each of the plurality of illumination side openings, and is reflected by the beam splitter by each of the plurality of detection side openings. A detection-side aperture plate that passes the light toward the photodetector,
A three-dimensional image acquisition apparatus comprising: The microlens plate has a substrate made of a transparent member,
The plurality of microlenses are:
Disposed on the surface of the substrate facing the illumination side aperture plate,
The three-dimensional image acquisition apparatus according to claim 1. A group of photodetectors having the plurality of photodetectors arranged at positions where the intensity change of the reflected light that has passed through at least a part of the plurality of detection-side openings can be detected;
Further comprising
The plurality of illumination side openings are
Each of the two illumination points is provided on a two-dimensional lattice point, the first illumination-side opening group provided in the lattice point belonging to the central region of the two-dimensional lattice points, and the lattice point belonging to the peripheral region surrounding the central region A second illumination side opening group provided in the
The plurality of detection side openings are
Provided at a position corresponding to each of the illumination side openings constituting the first illumination side opening group and the second illumination side opening group;
The plurality of photodetectors are:
Provided at a position corresponding to each of the first illumination side opening group,
The three-dimensional image acquisition apparatus according to claim 1 or 2. An objective lens that condenses and projects the illumination light transmitted through the beam splitter onto the measurement object, and guides the reflected light to the beam splitter while condensing the reflected light;
Further comprising
The optical magnification of the objective lens is greater than 1, and the installation interval of the plurality of illumination side aperture groups is greater than the focal point interval of the illumination light on the measurement object.
The three-dimensional image acquisition apparatus of any one of Claim 1 thru | or 3. A three-dimensional image acquisition method for acquiring a three-dimensional image of a sample to be measured using a confocal optical system,
A plurality of microlenses arranged two-dimensionally condensing the illumination light emitted from the light source;
The illumination light condensed by the plurality of microlenses is provided on the illumination side aperture plate and each of the plurality of illumination side openings provided at the respective condensing positions of the plurality of microlenses is measured. Step through to,
The illumination light having passed through the plurality of illumination side openings passes through a beam splitter toward the object to be measured; and
Reflected light from the object to be measured is reflected by the beam splitter and guided to an optical path different from the optical path of the illumination light;
The reflected light reflected by the beam splitter is provided on a detection-side aperture plate, and detects a plurality of detection-side apertures provided at positions optically conjugate with each of the plurality of illumination-side apertures. Step towards the vessel,
A three-dimensional image acquisition method comprising:

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