JP2012154783A - Small electrode system for electrochemical measurement with optical microscopic observation function - Google Patents

Small electrode system for electrochemical measurement with optical microscopic observation function Download PDF

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JP2012154783A
JP2012154783A JP2011013875A JP2011013875A JP2012154783A JP 2012154783 A JP2012154783 A JP 2012154783A JP 2011013875 A JP2011013875 A JP 2011013875A JP 2011013875 A JP2011013875 A JP 2011013875A JP 2012154783 A JP2012154783 A JP 2012154783A
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Aya Chiba
亜耶 千葉
Izumi Muto
泉 武藤
Nobuyoshi Hara
信義 原
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Tohoku University NUC
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Abstract

PROBLEM TO BE SOLVED: To provide a small electrode system for electrochemical measurement with an optical microscopic observation function with a simple structure, capable of performing electrochemical measurement of any small targeted area of a material surface and performing simultaneous observation of the small targeted area during the electrochemical measurement of an electrode surface.SOLUTION: In a measurement method that performs electrochemical measurement and optical microscopic observation at the same time, a small electrode system has a liquid reservoir that has an electrode area of 0.0008 cmor smaller and in which a water-dipped objective lens is arranged, a coating on the periphery of an electrode surface is composed of a combination of two or more kinds of insulators, and the maximum thickness of the coating is 100 μm or less. As for the coating, pieces of a coating adhesive tape, composed of an adhesive tape and a hardening resin, are placed opposite to each other 200 μm or less apart. It is preferable that the space between the pieces is filled with the hardening resin or that the brightness L* with the adhesive tape placed on the electrode material surface is 60 or less.

Description

本発明は、耐食材料の微小な腐食起点、めっき反応の開始点や微小な不具合箇所の形成過程などを電気化学計測すると同時に、電極表面をその場観察可能な光学顕微鏡観察機能を備えた電気化学計測用微小電極システムに関する。   The present invention provides an electrochemical measurement function capable of observing an electrode surface in situ while electrochemically measuring a minute corrosion starting point of a corrosion resistant material, a starting point of a plating reaction, a formation process of a minute defect portion, and the like. The present invention relates to a measurement microelectrode system.

実用材料の表面は不均一であり、腐食やめっき反応など電気化学反応を制御するためには、材料表面の微小な領域を抜き出して、それら個々の電気化学反応を解析する必要がある。例えば、金属材料の局部腐食は、大きさ数μm程の非金属介在物を起点とする電気化学反応であり、その部位のみの電気化学計測と同時に、顕微鏡による腐食過程のその場観察の実施が現象解明にとって重要である。   The surface of a practical material is uneven, and in order to control electrochemical reactions such as corrosion and plating reactions, it is necessary to extract a minute region of the material surface and analyze the individual electrochemical reactions. For example, local corrosion of metallic materials is an electrochemical reaction starting from non-metallic inclusions with a size of several μm. In-situ observation of the corrosion process with a microscope can be performed simultaneously with electrochemical measurement of only that part. It is important for phenomenon elucidation.

特開2004−239781号公報JP 2004-239781 A

T. Suter、T. Peter、and H. Bohni、Mater. Sci. Forum、192-194巻、25号、1995年発行T. Suter, T. Peter, and H. Bohni, Mater. Sci. Forum, 192-194, 25, 1995

このような材料表面の任意の特定の微小領域で起こる電気化学反応を解析できるシステムとして、内部に対極と照合電極を備え、電解液を満たした内径10〜100μm程のガラスキャピラリーの先端を、介在物を含む領域に押しつけ、電気化学計測を実施する方法が考案され、その具体的方法が開示されている(例えば、非特許文献1参照)。これによれば、ガラスキャピラリーは光学顕微鏡の対物レンズ用レボルバーに装着されている。電気化学計測を行う部位を光学顕微鏡で特定した後、レボルバーを回転させることで、顕微鏡観察時の視野中央部にマイクロキャピラリーを押し当てることが可能となっており、計測位置決定に関してはマイクロビッカース硬度計と同じ原理である。しかし、細長いガラスキャピラリーを用いているため、電気化学計測と同時に電極表面を観察することは事実上不可能である。   As a system that can analyze the electrochemical reaction that occurs in any specific minute region of the material surface, it is equipped with a counter electrode and a reference electrode inside, and the tip of a glass capillary with an inner diameter of 10-100 μm filled with electrolyte is interposed A method of performing electrochemical measurement by pressing against an area including an object has been devised, and a specific method thereof has been disclosed (for example, see Non-Patent Document 1). According to this, the glass capillary is attached to the objective lens revolver of the optical microscope. After identifying the part to be subjected to electrochemical measurement with an optical microscope, it is possible to press the microcapillary against the center of the field of view at the time of microscopic observation by rotating the revolver. It is the same principle as the total. However, since an elongated glass capillary is used, it is practically impossible to observe the electrode surface simultaneously with electrochemical measurement.

一方、特許文献1には、マイクロ流路を有する微小チップに対して、化学反応が起こる微小領域を熱レンズ顕微鏡で観察すると同時に、電気化学計測する技術が開示されている。しかし、この場合は、材料表面の任意の位置ではなく、化学反応が起こる微小領域は、マイクロチップ作製時に位置が固定(特定)されている。   On the other hand, Patent Document 1 discloses a technique for performing electrochemical measurement on a microchip having a microchannel while simultaneously observing a microregion where a chemical reaction occurs with a thermal lens microscope. However, in this case, not the arbitrary position on the surface of the material but the position of the minute region where the chemical reaction occurs is fixed (specified) when the microchip is manufactured.

すなわち、光学顕微鏡などで金属材料表面を観察し、その結果から電気化学計測を行いたい微小領域の位置を決定し、その部分の電気化学計測を行うと共に、顕微鏡にて電極表面をその場観察できる微小電極システムを提供する方法は知られていない。   That is, by observing the surface of a metal material with an optical microscope or the like, the position of a minute region to be subjected to electrochemical measurement is determined from the result, and the surface of the electrode can be observed in-situ with the microscope while performing electrochemical measurement of that portion. There is no known method for providing a microelectrode system.

本発明は上記事情に鑑みなされたもので、その目的とするところは、簡便な構造で、材料表面の任意の狙った微小領域の電気化学計測と、電極表面を電気化学計測時にその場観察可能な光学顕微鏡観察機能を備えた電気化学計測用微小電極システムの提供にある。   The present invention has been made in view of the above circumstances, and the purpose of the present invention is to have a simple structure and to perform electrochemical measurement of a desired minute area on the surface of the material and in situ observation of the electrode surface during electrochemical measurement. The present invention is to provide a microelectrode system for electrochemical measurement having an optical microscope observation function.

本発明者は、このような従来技術の短所を補い、未解決の課題を解決するため種々の試験研究を行い、本発明を完成させた。本発明の主旨は、以下の通りである。   The present inventor completed various aspects of the present invention by making various test studies to compensate for the disadvantages of the prior art and to solve unsolved problems. The gist of the present invention is as follows.

(1)電気化学計測と光学顕微鏡観察を同時に行う計測方法において、電極面積が0.0008cm2以下であり、水浸型の対物レンズを配置する液溜部を有し、電極面外周部の被覆が2種類以上の絶縁物の組み合わせで構成されていて、それらの最大厚さが100μm以下であることを特徴とする光学顕微鏡観察機能を備えた電気化学計測用微小電極システム。 (1) In a measurement method in which electrochemical measurement and optical microscope observation are performed at the same time, the electrode area is 0.0008 cm 2 or less, the liquid reservoir has a water immersion type objective lens, and the outer periphery of the electrode surface is covered. A microelectrode system for electrochemical measurement having an optical microscope observation function, characterized by being composed of a combination of two or more kinds of insulators and having a maximum thickness of 100 μm or less.

(2)上記(1)の電極システムにおいて、電極面外周部の被覆が粘着テープと硬化性樹脂で構成されていることを特徴とする光学顕微鏡観察機能を備えた電気化学計測用微小電極システム。   (2) In the electrode system of (1) above, a microelectrode system for electrochemical measurement having an optical microscope observation function, characterized in that the coating on the outer peripheral portion of the electrode surface is composed of an adhesive tape and a curable resin.

(3)上記(1)あるいは(2)の電極システムにおいて、電極面外周部の被覆用粘着テープが、幅200μm以下の間隔で対向しており、その間隙に硬化性樹脂が充填されていることを特徴とする光学顕微鏡観察機能を備えた電気化学計測用微小電極システム。   (3) In the electrode system of (1) or (2) above, the covering adhesive tape on the outer periphery of the electrode surface is opposed to each other with a width of 200 μm or less, and the gap is filled with a curable resin. A microelectrode system for electrochemical measurements with an optical microscope observation feature.

(4)上記(1)〜(3)のいずれかの電極システムにおいて、電極材料表面に粘着テープ貼り付け後の明度L*が60以下であることを特徴とする光学顕微鏡観察機能を備えた電気化学計測用微小電極システム。   (4) In the electrode system according to any one of (1) to (3), the lightness L * after adhering the adhesive tape to the electrode material surface is 60 or less. Microelectrode system for chemical measurement.

本発明は、簡便な構造で、材料表面の任意の狙った微小領域の電気化学計測と、電極表面を電気化学計測時にその場観察可能な光学顕微鏡観察機能を備えた電気化学計測用微小電極システムの提供にある。本発明によれば、実体顕微鏡や通常の光学顕微鏡を使用し、その視野内で、観察位置を特定し、その微小部位のみが露出した電極面を容易に作製可能である。さらに、水浸型の対物レンズを使用することで、観察倍率1000倍程度の画像を記録しつつ、その観察領域の電位と電流との関係を計測することが可能である。   The present invention provides an electrochemical measurement microelectrode system having a simple structure and having an electrochemical measurement of an arbitrary targeted micro area on a material surface and an optical microscope observation function capable of observing the electrode surface in situ during electrochemical measurement. Is in the provision of. According to the present invention, it is possible to easily produce an electrode surface in which only a minute part is exposed by specifying an observation position within a visual field using a stereomicroscope or a normal optical microscope. Furthermore, by using a water immersion type objective lens, it is possible to measure the relationship between the potential and current in the observation region while recording an image with an observation magnification of about 1000 times.

本発明にかかわる光学顕微鏡観察機能を備えた電気化学計測用微小電極システムの断面図および水浸型対物レンズ、照合電極と対極および電気化学計測回路の模式図。1 is a cross-sectional view of an electrochemical measurement microelectrode system having an optical microscope observation function according to the present invention, and a schematic diagram of a water immersion objective lens, a reference electrode and a counter electrode, and an electrochemical measurement circuit. 本発明にかかわる光学顕微鏡観察機能を備えた電気化学計測用微小電極システムの電極面と絶縁被覆を上方から見た図。The figure which looked at the electrode surface and insulation coating of the microelectrode system for electrochemical measurements provided with the optical microscope observation function concerning this invention from the upper direction. 本発明にかかわる光学顕微鏡観察機能を備えた電気化学計測用微小電極システムの上方から見た図。The figure seen from the upper part of the microelectrode system for electrochemical measurements provided with the optical microscope observation function concerning this invention. 電極面をポリイミドテープとエポキシ樹脂でSUS304鋼表面上のMnS系介在物を含む微小領域を被覆した際の写真。A photograph of the electrode surface coated with a small area containing MnS inclusions on a SUS304 steel surface with polyimide tape and epoxy resin. ポリイミドテープとエポキシ樹脂で被覆された電極面を用いてSUS304鋼表面上のMnS系介在物を含む微小領域に対して、0.1M NaCl中で計測したアノード分極曲線。An anodic polarization curve measured in 0.1M NaCl for a small region containing MnS inclusions on a SUS304 steel surface using an electrode surface coated with polyimide tape and epoxy resin. アノード分極の過程で電解液中において撮影したMnS系介在物を含む電極面中央部の拡大写真。An enlarged photograph of the central part of the electrode surface containing MnS inclusions taken in the electrolyte during the anodic polarization process. 電気化学計測後の電極面および絶縁物の写真。Photo of electrode surface and insulator after electrochemical measurement. 電極面の被覆をポリイミドテープのみで実施したい場合の電気化学計測時の電極面中央部の拡大写真。An enlarged photograph of the center of the electrode surface during electrochemical measurement when the electrode surface is to be covered only with polyimide tape. 電極面の被覆を厚さ300μmのシリコーンのみで実施したい場合の電気化学計測時の電極面中央部の拡大写真。An enlarged photograph of the central part of the electrode surface during electrochemical measurement when the electrode surface is to be coated only with 300 μm thick silicone.

以下に、本発明を実施するための最良の形態について述べる。   The best mode for carrying out the present invention will be described below.

図1〜3に本発明の実施形態にかかる電気化学計測用微小電極システムの概略構成図を示す。本発明は、電気化学計測と光学顕微鏡観察を同時に行う計測方法において、電極面積が0.0008cm2以下であり、水浸型の対物レンズを配置する液溜部3を有し、電極面外周部の絶縁被覆が表面張力の異なる二種類以上の絶縁物(1、2)で構成されていて、それらの最大厚さが100μm以下であることを特徴とする光学顕微鏡観察機能を備えた電気化学計測用微小電極システム。これらの図では、電極面外周部の絶縁被覆が表面張力の異なる二種類以上の絶縁物として、粘着テープ1と硬化樹脂2を用いた例を示している。 1-3 shows a schematic configuration diagram of a microelectrode system for electrochemical measurement according to an embodiment of the present invention. In the measurement method in which electrochemical measurement and optical microscope observation are performed at the same time, the present invention has an electrode area of 0.0008 cm 2 or less, a liquid reservoir portion 3 in which a water immersion type objective lens is disposed, and an electrode surface outer peripheral portion. For electrochemical measurement with optical microscope observation function, characterized in that the insulation coating is composed of two or more types of insulators (1, 2) with different surface tensions, and their maximum thickness is 100 μm or less Microelectrode system. In these drawings, an example in which the adhesive tape 1 and the cured resin 2 are used as two or more kinds of insulators having different surface tensions on the outer periphery of the electrode surface is shown.

微小領域の電気化学計測と電極面の顕微鏡観察を同時に行う場合、顕微鏡で観察できる視野と、電極面の大きさが概ね一致している必要がある。顕微鏡での観察倍率を小さくすれば、観察領域は大きくなるが、画像の解像度は低下する。金属材料表面の形態が電気化学反応に伴って変化する状況を観察するためには、対物レンズの倍率が50倍以上、好ましくは100倍である必要がある。このためは、電極面積が0.0008cm2以下である必要がある。これよりも面積が大きいと、顕微鏡での観察領域と電極面の大きさに著しい不一致が生じてしまい、電気化学的なパラメータと顕微鏡観察結果を一対一で対比させることが困難になる。 When performing electrochemical measurement of a minute region and microscopic observation of the electrode surface at the same time, it is necessary that the field of view that can be observed with a microscope and the size of the electrode surface are substantially the same. If the observation magnification with a microscope is reduced, the observation area increases, but the resolution of the image decreases. In order to observe the situation where the form of the surface of the metal material changes with the electrochemical reaction, the magnification of the objective lens needs to be 50 times or more, preferably 100 times. For this purpose, the electrode area needs to be 0.0008 cm 2 or less. If the area is larger than this, there will be a significant discrepancy between the observation area in the microscope and the size of the electrode surface, making it difficult to compare the electrochemical parameters with the microscope observation results on a one-to-one basis.

次に、電極面周囲の絶縁被覆であるが、一般的な電気化学計測においては、電極面の絶縁被覆は粘着テープや硬化樹脂など一種類の絶縁物で実施されている。しかし、電極面が微小になり電極面積が0.0008cm2以下となった場合には、一種類の絶縁物のみで被覆を行うと、電極面と絶縁物の境界領域に微細気泡(空気)が残存し、電気化学計測および顕微鏡観察に不具合を生じさせる。例えば、粘着テープを4枚用い、井げた状に貼ることで中央部に四角形の電極面を構成しようとした場合、4隅に形成される粘着テープの重なり部に空気が残存してしまう。さらに、電極面に相当する部分を切除した1枚の粘着テープを用いたとしても、気泡の残存を軽減あるいは無くすことは困難である。気泡が過度に残存すると、顕微鏡の光源からの光が乱反射・散乱され、顕微鏡観察が困難になる。 Next, the insulating coating around the electrode surface, but in general electrochemical measurement, the insulating coating on the electrode surface is implemented with one type of insulator such as an adhesive tape or a cured resin. However, if the electrode surface becomes small and the electrode area becomes 0.0008 cm 2 or less, if only one type of insulator is used, fine bubbles (air) remain in the boundary area between the electrode surface and the insulator. This causes problems in electrochemical measurement and microscopic observation. For example, when four sheets of adhesive tape are used and a square electrode surface is formed at the center by sticking in the shape of a well, air remains in the overlapping portions of the adhesive tapes formed at the four corners. Furthermore, even if a single adhesive tape with a portion corresponding to the electrode surface cut is used, it is difficult to reduce or eliminate the remaining bubbles. If the bubbles remain excessively, light from the light source of the microscope is irregularly reflected and scattered, making observation with a microscope difficult.

これに対して、電極面外周部の被覆を2種類以上の絶縁物の組み合わせで構成した場合、個々の絶縁物の表面張力の違いにより微細気泡が一種類の絶縁物の周囲に集まり、凝集・粗大化が起こり、気泡の除去が容易になる。このため、電気化学計測と光学顕微鏡観察を同時に行う計測方法において、電極面積が0.0008cm2以下の場合においては、電極面外周部の絶縁被覆が2種類以上の絶縁物で構成されている必要がある。 On the other hand, when the coating on the outer periphery of the electrode surface is composed of a combination of two or more types of insulators, fine bubbles gather around one type of insulator due to the difference in surface tension between the individual insulators. Coarsening occurs and bubbles can be easily removed. For this reason, in the measurement method in which the electrochemical measurement and the optical microscope observation are performed simultaneously, when the electrode area is 0.0008 cm 2 or less, the insulating coating on the outer periphery of the electrode surface needs to be composed of two or more types of insulators. is there.

ところで、2種類以上の絶縁物としては、被覆作業の容易性の観点から、粘着テープと硬化性樹脂の組み合わせが好ましい。さらに、試験片の狙った位置に容易に微小な電極面を構成するという点においては、絶縁被覆用の粘着テープが、幅200μm未満の間隔で対向しており、その間隙に硬化性樹脂が充填されていることが望ましい。すなわち、顕微鏡の観察下において、計測位置を決定し、その位置に粘着テープを貼り、硬化樹脂を流し込むことで簡便かつ容易、しかも短時間に電極面を作製することができる。さらに、粘着テープを幅200μm未満の間隔で対向させることで、樹脂の流し込みが極めて容易になり、結果として微小な電極面の形成が容易になる。本発明においては、使用する粘着テープと硬化樹脂の組成は限定しないが、粘着テープとしてはポリイミドのように水滴や気泡との接触角が大きい物質、硬化樹脂としてはエポキシ系樹脂のように水滴や気泡との接触角が小さい物質の組み合わせが望ましい。さらに、本発明においては、硬化樹脂の粘性は特に限定しないが、作業性の観点からは、4〜10Pa・sは好ましく、特に7.5〜8.5Pa・sが最も望ましい。また、硬化樹脂としては、常温硬化型のもの方が、作業性が良好であるという利点を有している。   By the way, as the two or more kinds of insulators, a combination of an adhesive tape and a curable resin is preferable from the viewpoint of easy covering operation. Furthermore, in terms of easily forming a minute electrode surface at the target position of the test piece, the adhesive coating adhesive tape faces each other with a width of less than 200 μm, and the gap is filled with a curable resin. It is desirable that That is, by observing a microscope, a measurement position is determined, an adhesive tape is attached to the position, and a cured resin is poured into the electrode surface, so that an electrode surface can be produced easily and easily in a short time. Furthermore, by making the adhesive tapes face each other at an interval of less than 200 μm in width, the resin can be poured very easily, and as a result, formation of a minute electrode surface is facilitated. In the present invention, the composition of the pressure-sensitive adhesive tape and the cured resin to be used is not limited. However, the pressure-sensitive adhesive tape is a substance having a large contact angle with water droplets or bubbles, such as polyimide, and the cured resin is a water droplet or an epoxy resin. A combination of substances having a small contact angle with the bubbles is desirable. Further, in the present invention, the viscosity of the cured resin is not particularly limited, but 4 to 10 Pa · s is preferable, and 7.5 to 8.5 Pa · s is most desirable from the viewpoint of workability. Further, as the cured resin, a room temperature curing type has an advantage of good workability.

電極面を観察するためには、対物レンズが必要であるが、電気化学計測においては、電極面が電解液中に存在するため、解像度の高い像を得るために水浸型の対物レンズを使用する必要がある。このため、本発明においては、水浸型の対物レンズを配置する液溜部を有する必要があることとした。液溜部の材質は特に規定しないが、アクリルやガラスなどの電解液と反応しないものである必要がある。また、液溜部の上部は必要に応じて、液の揮発を防止する蓋を設置することが好ましい。   In order to observe the electrode surface, an objective lens is required. However, in electrochemical measurements, the electrode surface is present in the electrolyte, so a water immersion type objective lens is used to obtain a high-resolution image. There is a need to. For this reason, in the present invention, it is necessary to have a liquid reservoir in which a water immersion type objective lens is arranged. The material of the liquid reservoir is not particularly defined, but it needs to be a material that does not react with an electrolyte such as acrylic or glass. Moreover, it is preferable to install the lid | cover which prevents volatilization of a liquid as needed at the upper part of a liquid reservoir part.

ところで、顕微鏡観察において、明瞭な像を得るためには、電極面外周部に構成する絶縁被覆の厚さを100μm以下にする必要がある。これを超えて絶縁被覆の厚さを大きくした場合、画像が不鮮明になる。これは、絶縁被覆を構成している物質の光の屈折、回折、散乱や乱反射などに起因するものではないかと考えられるが、その詳細は不明である。   By the way, in order to obtain a clear image in microscopic observation, it is necessary to make the thickness of the insulating coating formed on the outer peripheral portion of the electrode surface 100 μm or less. If the thickness of the insulating coating is increased beyond this, the image becomes unclear. This is considered to be caused by light refraction, diffraction, scattering, diffuse reflection, etc. of the material constituting the insulating coating, but the details are unknown.

さらに、顕微鏡観察において、明瞭な像を得るためには、電極面以外からの反射光や迷光が極力少ないことが望ましい。このため、特に明瞭な画像観察を行う際には、電極材料表面に粘着テープ貼り付け後の明度L*が60以下である必要がある。明度L*が60を超えて高いと、迷光や反射光が多くなり観察画像のコントラストが低下してしまう。この場合の明度L*は、光源Cを用いた際の値である。   Furthermore, in order to obtain a clear image in microscopic observation, it is desirable that reflected light and stray light from other than the electrode surface be as small as possible. For this reason, when performing clear image observation, it is necessary that the lightness L * after applying the adhesive tape to the electrode material surface is 60 or less. When the lightness L * exceeds 60, stray light and reflected light increase, and the contrast of the observation image decreases. The lightness L * in this case is a value when the light source C is used.

以下、実施例に基づき本発明を詳細に説明するが、本発明は実施例の記載に限定されるものではない。   EXAMPLES Hereinafter, although this invention is demonstrated in detail based on an Example, this invention is not limited to description of an Example.

図4に示すように、表面研磨したSUS304ステンレス鋼の表面に露出したMnS系介在物を狙って、ポリイミドテープ(厚さ69μm、粘着剤:シリコーン)と、エポキシ樹脂(常温硬化、硬化剤:ポリアミドアミン)を用いて電極面を構成した。絶縁物の最大厚さは75μm、ポリイミドテープの間隔は160μmで、電極面積は0.00056cm2とした。また、電極材料表面にポリイミドテープを貼り付けた後のテープ表面の明度L*は55とした。図4において、図の上下がポリイミドテープで、左右がエポキシ樹脂である。これを電極面として、アクリル製の液溜部を作製し、倍率100倍の水浸型対物レンズを用いて、0.1M NaCl水溶液(非脱気)で計測したアノード分極曲線を図5に示す。電位は、-0.3V(内部液を0.1M NaClとするAg/AgCl電極基準)からアノード分極方向へ、23mV/minで動電位で走査した。カソード電流およびアノード電流、MnS系介在物のアノード溶解電流による電流増加、さらには介在物を起点とする微小ピット形成に伴う電流振動が計測できている。このように、本発明の電極システムにより、微小電極面であっても電気化学計測が可能であることが分かる。図6は、アノード分極の過程で電解液中において撮影した電極面中央部の拡大写真である。この電極中心部のMnS系介在物の拡大写真からは、硫化物の溶解に伴う形態変化が明瞭に観察できることが分かる。尚、図7は、電気化学計測後の電極面および絶縁物の写真である。これより、本発明においては、今までの微小電極システムでしばしば問題とされた電極外周部の絶縁被覆と金属試験片の間に発生するすき間腐食が全く発生していないことが分かる。 As shown in FIG. 4, polyimide tape (thickness 69 μm, adhesive: silicone) and epoxy resin (room temperature curing, curing agent: polyamide) aiming at MnS inclusions exposed on the surface of SUS304 stainless steel whose surface was polished Amine) was used to form the electrode surface. The maximum thickness of the insulator was 75 μm, the interval between the polyimide tapes was 160 μm, and the electrode area was 0.00056 cm 2 . The lightness L * of the tape surface after the polyimide tape was applied to the electrode material surface was 55. In FIG. 4, the upper and lower sides of the figure are polyimide tapes, and the left and right sides are epoxy resins. FIG. 5 shows an anodic polarization curve measured with a 0.1 M NaCl aqueous solution (non-deaerated) using a water immersion objective lens with a magnification of 100 times by preparing an acrylic liquid reservoir using this as the electrode surface. The potential was scanned with a dynamic potential at 23 mV / min from −0.3 V (Ag / AgCl electrode standard with 0.1 M NaCl as the internal solution) in the anodic polarization direction. Cathode current and anode current, current increase due to anodic dissolution current of MnS inclusions, and current oscillation accompanying micropit formation starting from inclusions can be measured. Thus, it can be seen that the electrode system of the present invention enables electrochemical measurement even on a microelectrode surface. FIG. 6 is an enlarged photograph of the central portion of the electrode surface taken in the electrolytic solution in the process of anodic polarization. From the enlarged photograph of the MnS inclusions in the center of the electrode, it can be seen that the morphological change accompanying the dissolution of the sulfide can be clearly observed. FIG. 7 is a photograph of the electrode surface and insulator after electrochemical measurement. From this, it can be seen that in the present invention, there is no crevice corrosion generated between the insulating coating on the outer periphery of the electrode and the metal test piece, which is often a problem in the conventional microelectrode system.

図8は、本発明の比較例として、電極面の被覆をポリイミドテープ(厚さ69μm、粘着剤:シリコーン)のみで実施したい場合の電気化学計測時の電極面中央部の拡大写真である。絶縁物の厚さは69μmとした。本発明の実施例である図7と比較して、画像が不鮮明であることが分かる。これはポリイミドテープと電極面との境界に残存した微細気泡による光散乱・乱反射によるものである。同じく、図9は、本発明の比較例として、シリコーン樹脂のみとし、その厚さを300μmとした場合の電気化学計測時の画像の例である。画像が極めて不鮮明であることが分かる。これは微細気泡による光散乱・乱反射に加え、絶縁物の厚さが100μmを超えて厚いためである。   FIG. 8 is an enlarged photograph of the center portion of the electrode surface at the time of electrochemical measurement when it is desired to cover the electrode surface only with a polyimide tape (thickness: 69 μm, adhesive: silicone) as a comparative example of the present invention. The thickness of the insulator was 69 μm. It can be seen that the image is unclear compared to FIG. 7 which is an example of the present invention. This is due to light scattering and irregular reflection caused by fine bubbles remaining at the boundary between the polyimide tape and the electrode surface. Similarly, FIG. 9 is an example of an image at the time of electrochemical measurement in the case where only a silicone resin is used and the thickness is 300 μm as a comparative example of the present invention. It can be seen that the image is very blurred. This is because the thickness of the insulator exceeds 100 μm, in addition to light scattering and irregular reflection by fine bubbles.

本発明の活用例としては、ステンレス鋼の非金属介在物などの微小な腐食起点、めっき反応の開始点や微小な不具合箇所の形成過程などを電気化学計測すると同時に、電極表面をその場観察可能な光学顕微鏡観察機能を備えた電気化学計測用微小電極システムとして利用可能である。   As an application example of the present invention, it is possible to observe the electrode surface in-situ at the same time as electrochemical measurement of minute corrosion starting points such as non-metallic inclusions of stainless steel, starting point of plating reaction and formation process of minute defects It can be used as a microelectrode system for electrochemical measurement having an optical microscope observation function.

1・・・粘着テープ
2・・・硬化樹脂
3・・・液溜部
DESCRIPTION OF SYMBOLS 1 ... Adhesive tape 2 ... Cured resin 3 ... Liquid reservoir part

Claims (4)

電気化学計測と光学顕微鏡観察を同時に行う計測方法において、電極面積が0.0008cm2以下であり、水浸型の対物レンズを配置する液溜部を有し、電極面外周部の被覆が2種類以上の絶縁物の組み合わせで構成されていて、それらの最大厚さが100μm以下であることを特徴とする光学顕微鏡観察機能を備えた電気化学計測用微小電極システム。 In the measurement method that performs electrochemical measurement and optical microscope observation at the same time, the electrode area is 0.0008 cm 2 or less, it has a liquid reservoir where a water immersion type objective lens is placed, and there are two or more types of coating on the outer periphery of the electrode surface A microelectrode system for electrochemical measurement having an optical microscope observation function, characterized in that the maximum thickness is 100 μm or less. 請求項1記載の電極システムにおいて、電極面外周部の被覆が粘着テープと硬化性樹脂で構成されていることを特徴とする光学顕微鏡観察機能を備えた電気化学計測用微小電極システム。 The electrode system according to claim 1, wherein the coating on the outer peripheral portion of the electrode surface is made of an adhesive tape and a curable resin, and is equipped with an optical microscope observation function. 請求項1あるいは2記載の電極システムにおいて、電極面外周部の被覆用粘着テープが、幅200μm以下の間隔で対向しており、その間隙に硬化性樹脂が充填されていることを特徴とする光学顕微鏡観察機能を備えた電気化学計測用微小電極システム。 3. The electrode system according to claim 1, wherein the covering adhesive tape on the outer peripheral portion of the electrode faces each other with a width of 200 μm or less, and a curable resin is filled in the gap. Microelectrode system for electrochemical measurement with microscope observation function. 請求項1〜3記載のいずれかの電極システムにおいて、電極材料表面に粘着テープ貼り付け後の明度L*が60以下であることを特徴とする光学顕微鏡観察機能を備えた電気化学計測用微小電極システム。 The electrode system according to any one of claims 1 to 3, wherein the lightness L * after adhering the adhesive tape to the surface of the electrode material is 60 or less, the microelectrode for electrochemical measurement having an optical microscope observation function system.
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