JP2012152861A - Vacuum suction device - Google Patents

Vacuum suction device Download PDF

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JP2012152861A
JP2012152861A JP2011014641A JP2011014641A JP2012152861A JP 2012152861 A JP2012152861 A JP 2012152861A JP 2011014641 A JP2011014641 A JP 2011014641A JP 2011014641 A JP2011014641 A JP 2011014641A JP 2012152861 A JP2012152861 A JP 2012152861A
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workpiece
engaging member
suction pad
vacuum
diameter
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Yukiyasu Karata
行庸 唐田
Jo Nakamoto
丈 中元
Sunao Shimosada
直央 下佐田
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Mitsubishi Electric Corp
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Mitsubishi Electric Corp
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Abstract

PROBLEM TO BE SOLVED: To provide a vacuum suction device that can readily suction a large workpiece material having a large warp, and to secure a holding force endurable with machining stress.SOLUTION: The vacuum suction device includes: a first engagement member 15 configured to advance and retreat relative to a workpiece 30 and engaged with a surface of the workpiece by decompression or adhesion; and a second engagement member 17 formed in such a shape that encircles the first engagement member and engaged with an outer circumference of the part engaged by the first engagement member in the workpiece by decompression.

Description

本発明は、例えば加工テーブル上に歪みの大きい被加工物を固定する場合などに好ましく用いることができる真空吸着装置に関するものである。   The present invention relates to a vacuum suction device that can be preferably used when, for example, a workpiece having a large strain is fixed on a processing table.

例えば、変圧器用の絶縁材料等、被加工物が大型の材料で、且つ被加工物の表面に小さな凹凸がある材料を、加工装置によって切断あるいは切削加工等を行う場合、所望の加工精度を得るために、加工装置の加工テーブル部に配置した複数の真空吸着装置等により、被加工物の歪みを矯正した状態で係止し、且つ加工応力に耐え得る係止力によって、加工応力による位置ずれを防止する必要がある。特に、被加工物の表面に小さな凹凸がある材料や凹凸状の撓みを生じる材料などを係止する場合、被加工物との接触部には、弾性体である合成ゴム等が多く使用される。このときの加工応力に耐え得る係止力は、被加工物との接触部である合成ゴム等の開口孔の面積と真空圧力に依存している。
歪みの大きな材料を真空吸着装置により保持するためには、例えば特許文献1のように、構造物を用いて、被加工物を、加工装置の加工テーブルまたは吸着部に押しつけて歪みを矯正した後、真空吸着装置により保持する。あるいは、例えば特許文献2のように、所定範囲で自由に傾くことができる真空吸着装置の吸着部を上昇させることにより、確実に被加工物を吸着させた後吸着部を下降させ、被加工物を加工装置の加工テーブルに押しつけて歪みを矯正している。
For example, when a workpiece is a large material, such as an insulating material for a transformer, and the surface of the workpiece has small irregularities, the desired processing accuracy is obtained when the processing device cuts or cuts the material. For this reason, a plurality of vacuum suction devices arranged on the processing table portion of the processing device can be used to lock the workpiece in a state in which the distortion of the workpiece is corrected, and due to the locking force that can withstand the processing stress, misalignment due to processing stress. Need to prevent. In particular, when a material having small irregularities on the surface of the workpiece or a material that causes irregularities is to be locked, a synthetic rubber or the like that is an elastic body is often used at the contact portion with the workpiece. . The locking force that can withstand the processing stress at this time depends on the area of the opening hole such as a synthetic rubber that is a contact portion with the workpiece and the vacuum pressure.
In order to hold a material with a large strain by a vacuum suction device, for example, as in Patent Document 1, after using a structure to press the workpiece against the processing table or suction portion of the processing device, the strain is corrected. And held by a vacuum suction device. Alternatively, for example, as in Patent Document 2, the suction part of the vacuum suction device that can be freely tilted within a predetermined range is raised to lower the suction part after the workpiece is reliably sucked, and the workpiece Is pressed against the processing table of the processing device to correct the distortion.

特開2006−136897号公報(第1頁、図1〜図3)JP 2006-136897 A (first page, FIGS. 1 to 3) 特開平10−86086号公報(第1頁、図3)Japanese Patent Laid-Open No. 10-86086 (first page, FIG. 3)

例えば、変圧器用の絶縁材料等、歪みの大きい大型の材料を加工装置によって切断あるいは切削加工等を行う場合、特許文献1のように、構造物を用いて、被加工物を加工装置の加工テーブルまたは吸着部に押しつけて歪みを矯正し、真空吸着装置により保持する方法では、被加工物を加工する際、その構造物が被加工物上に配置したままでは加工の妨げになるため、被加工物上から退避させる必要がある。そのため、加工装置が大型になり、且つ複雑な構造になるという問題点があった。
また、特許文献2のように、所定範囲で自由に傾けることができる真空吸着装置の吸着部を上昇させることにより被加工物を吸着させた場合、加工時に発生する加工応力により吸着部が動き、所望の加工精度が得られないという問題点があった。
For example, when a large-sized material having a large strain, such as an insulating material for a transformer, is cut or cut by a processing device, a workpiece is used as a processing table of the processing device using a structure as in Patent Document 1. Alternatively, in the method of correcting the distortion by pressing against the suction part and holding it with a vacuum suction device, when the work piece is processed, if the structure remains on the work piece, the work is hindered. It is necessary to evacuate from the object. Therefore, there is a problem that the processing apparatus becomes large and has a complicated structure.
Further, as in Patent Document 2, when the work piece is adsorbed by raising the adsorbing part of the vacuum adsorbing device that can be freely tilted within a predetermined range, the adsorbing part moves due to processing stress generated during processing, There is a problem that desired processing accuracy cannot be obtained.

本発明は、上記のような問題点を解決するためになされたものであり、簡単な構造で、歪みの大きい大型の被加工物であっても確実に係着でき、且つ切断や切削加工等の加工応力にも耐える真空吸着装置を得ることを目的としている。   The present invention has been made in order to solve the above-described problems, and can easily engage even a large workpiece having a simple structure and a large distortion, and can be used for cutting and cutting. The purpose is to obtain a vacuum adsorption device that can withstand the processing stress of the above.

本発明に係る真空吸着装置は、被加工物に対して進退可能に設けられ、減圧または粘着によって上記被加工物の表面を係着させる第1の係着部材と、この第1の係着部材の周りを囲む如く形成され、上記被加工物における上記第1の係着部材による係着部の外側周囲部分を減圧によって係着させる第2の係着部材と、を備えるようにしたものである。   A vacuum suction device according to the present invention is provided so as to be able to advance and retreat with respect to a workpiece, and engages the surface of the workpiece with reduced pressure or adhesion, and the first engagement member. And a second engaging member that engages the outer peripheral portion of the engaging portion of the work piece by the first engaging member by decompression. .

本発明においては、第1の係着部材と、この第1の係着部材の周りを囲む第2の係着部材による2重の係着手段によって被加工物を係着するようにしたので、被加工物に歪みや撓みなどがあっても確実に係着することができる。このため、被加工物に生じた凹凸などの歪みが矯正され、また切断や切削加工等の加工応力にも耐える係着力を得ることができる。   In the present invention, the workpiece is engaged by the double engagement means by the first engagement member and the second engagement member surrounding the first engagement member. Even if the workpiece has distortion or deflection, it can be securely attached. For this reason, distortions such as unevenness generated in the workpiece can be corrected, and an engaging force that can withstand machining stresses such as cutting and cutting can be obtained.

本発明の実施の形態1による真空吸着装置の要部を示す断面図であり、被加工物を係着する前の状態である。It is sectional drawing which shows the principal part of the vacuum suction apparatus by Embodiment 1 of this invention, and is the state before engaging a workpiece. 図1に示された第1の係着部材を上昇させた状態を示す断面図である。It is sectional drawing which shows the state which raised the 1st engaging member shown by FIG. 図2の状態から第1の係着部材が下降され、被加工物を第2の係着部材と共に係着した状態を示す断面図である。FIG. 3 is a cross-sectional view showing a state in which the first engaging member is lowered from the state of FIG. 2 and the workpiece is engaged together with the second engaging member. 本発明の実施の形態2による真空吸着装置の要部を示す断面図である。It is sectional drawing which shows the principal part of the vacuum suction apparatus by Embodiment 2 of this invention. 本発明の実施の形態3による真空吸着装置の要部を示す断面図である。It is sectional drawing which shows the principal part of the vacuum suction apparatus by Embodiment 3 of this invention.

実施の形態1.
図1は本発明の実施の形態1による真空吸着装置の要部を示す断面図であり、図は被加工物を吸着する前の、吸着パッドが下降した状態を示している。図において、真空吸着装置10は、複数の円形の内周面11a、11b、11c(11a<11b<11c)が断面階段状に同軸に形成され、中央部の内周面11bに排気口11dを有する円筒状の台座11と、この台座11の中心部を軸方向(図の上下方向)に移動可能に設けられ、外径が台座11の内周面11aに対して間隙を有するように形成された中空のシャフト部材12と、シャフト部材12を図の上下方向に進退させるシリンダ装置13と、シリンダ装置13の駆動軸13aとシャフト部材12の下端部を連結するように介装され、シャフト部材12の中空部を排気口11dに連通するための連通路14aを有する円柱状のブロック部材14と、台座11の内周面11bの下端部近傍の凹所に装着された、ブロック部材14の外周面と台座11の内周面11bの間を密閉するOリング14bを有する。
Embodiment 1 FIG.
FIG. 1 is a cross-sectional view showing a main part of a vacuum suction device according to Embodiment 1 of the present invention, and the drawing shows a state in which a suction pad is lowered before sucking a workpiece. In the drawing, the vacuum suction device 10 has a plurality of circular inner peripheral surfaces 11a, 11b, 11c (11a <11b <11c) formed coaxially in a stepped cross section, and an exhaust port 11d is formed in the central inner peripheral surface 11b. A cylindrical pedestal 11 having a central portion of the pedestal 11 so as to be movable in the axial direction (vertical direction in the figure) and having an outer diameter having a gap with respect to the inner peripheral surface 11a of the pedestal 11. The hollow shaft member 12, the cylinder device 13 that moves the shaft member 12 forward and backward in the figure, and the drive shaft 13 a of the cylinder device 13 and the lower end portion of the shaft member 12 are connected to each other. A cylindrical block member 14 having a communication passage 14a for communicating the hollow portion of the block 11 with the exhaust port 11d, and an outside of the block member 14 mounted in a recess near the lower end portion of the inner peripheral surface 11b of the base 11 With an O-ring 14b for sealing between the inner circumferential surface 11b of the surface and the base 11.

シャフト部材12の上端部には、中心部に貫通孔を有する第1の係着部材としての小口径吸着パッド15が固定されている。小口径吸着パッド15は合成ゴムからなり、上端の吸着面は周囲が上方に湾曲した皿状に形成され、中心部の貫通孔はシャフト部材12の中空部に連通する第1排気路Aを構成している。台座11の上端部に螺合するリング様の固定部材16には、上記小口径吸着パッド15よりも大径の第2の係着部材としての大口径吸着パッド17が固定されている。   A small-diameter suction pad 15 as a first engaging member having a through hole at the center is fixed to the upper end portion of the shaft member 12. The small-diameter suction pad 15 is made of synthetic rubber, the suction surface at the upper end is formed in a dish shape whose periphery is curved upward, and the through hole in the center portion forms the first exhaust passage A communicating with the hollow portion of the shaft member 12. is doing. A large-diameter suction pad 17 as a second engaging member having a larger diameter than the small-diameter suction pad 15 is fixed to a ring-like fixing member 16 that is screwed into the upper end portion of the base 11.

大口径吸着パッド17は、凡そリング状に形成された合成ゴムからなり、その内径は小口径吸着パッド15の外径よりも大きく、小口径吸着パッド15の外周部に対して所定の間隙を介して囲むように同軸に設けられ、上端の吸着面17aは周囲が上方に湾曲した皿状に形成されている。固定部材16は台座11の内周面11aと同一の内径に形成され、その内周面と小口径吸着パッド15の軸部外周面との間には第2排気路Bを構成する空隙部が形成されている。   The large-diameter suction pad 17 is made of a synthetic rubber formed in a ring shape. The inner diameter of the large-diameter suction pad 17 is larger than the outer diameter of the small-diameter suction pad 15, with a predetermined gap from the outer peripheral portion of the small-diameter suction pad 15. The suction surface 17a at the upper end is formed in a dish shape whose periphery is curved upward. The fixing member 16 is formed to have the same inner diameter as the inner peripheral surface 11a of the pedestal 11, and a gap portion constituting the second exhaust path B is formed between the inner peripheral surface and the shaft outer peripheral surface of the small-diameter suction pad 15. Is formed.

ブロック部材14の上端面から、台座11の内周面11aと内周面11bとの段部に至るシャフト部材12の外周部には、スプリング18と、リング板状のスプリングガイド19が設けられ、スプリングガイド19の上面における上記段部に対向する面には、所定時に第2排気路Bを開閉するためのOリング19aが装着されている。なお、スプリングガイド19はシャフト部材12に対して摺動可能に設けられるが、シリンダ装置13の駆動軸13aを上昇させたときの小口径吸着パッド15の最大突出量が一定でも良い場合には、シャフト部材12に固定されていても良い。また、上記台座11内面の内周面11aと内周面11bとの段部、スプリング18、スプリングガイド19、Oリング19a、シャフト部材12、ブロック部材14、及びシリンダ装置13によって第2排気路開閉手段を構成している。   A spring 18 and a ring plate-shaped spring guide 19 are provided on the outer peripheral portion of the shaft member 12 from the upper end surface of the block member 14 to the step portion of the inner peripheral surface 11a and the inner peripheral surface 11b of the base 11. An O-ring 19a for opening and closing the second exhaust passage B at a predetermined time is mounted on a surface of the upper surface of the spring guide 19 that faces the stepped portion. Although the spring guide 19 is slidably provided with respect to the shaft member 12, when the maximum protrusion amount of the small-diameter suction pad 15 when the drive shaft 13a of the cylinder device 13 is raised may be constant, It may be fixed to the shaft member 12. Further, the second exhaust path is opened and closed by the step portion of the inner peripheral surface 11 a and the inner peripheral surface 11 b of the inner surface of the base 11, the spring 18, the spring guide 19, the O-ring 19 a, the shaft member 12, the block member 14, and the cylinder device 13. Means.

また、図1に示すように、小口径吸着パッド15が下降した状態では、第1排気路Aと第2排気路Bは内周面11bによって形成された中間部の室で連通されている。排気口11dは真空配管20を介して図示省略している真空ポンプに接続されている。さらに、シャフト部材12の上部には小口径吸着パッド15の加熱手段であるヒータ21が設けられ、台座11の上端部には大口径吸着パッド17の加熱手段であるヒータ22が設けられている。ヒータ21、22は、何れも図示省略している温度センサと、温度制御装置によってそれぞれ所望の温度を保持できるように構成されている。   As shown in FIG. 1, when the small-diameter suction pad 15 is lowered, the first exhaust path A and the second exhaust path B are communicated with each other in an intermediate chamber formed by the inner peripheral surface 11b. The exhaust port 11d is connected to a vacuum pump (not shown) via a vacuum pipe 20. Further, a heater 21 as a heating means for the small-diameter suction pad 15 is provided on the upper portion of the shaft member 12, and a heater 22 as a heating means for the large-diameter suction pad 17 is provided at the upper end portion of the base 11. The heaters 21 and 22 are each configured to be able to maintain a desired temperature by a temperature sensor (not shown) and a temperature control device.

上記のように構成された真空吸着装置10は、被加工物30を保持する加工テーブル40の所定位置に設けられた取付穴40aの内部に設置されるように構成されている。なお、真空吸着装置10の上下方向の位置は、小口径吸着パッド15及び大口径吸着パッド17によって被加工物30を吸着し、小口径吸着パッド15が下降した状態で、被加工物30が加工テーブル40の表面40bと同一平面を形成するように加工テーブル40に対して固定される。なお、例えば固定部材16のねじ込み量によって大口径吸着パッド17の高さを微調整し得るように構成しても良い。また、加工テーブル40に設ける真空吸着装置10の数や間隔等は、被加工物30の大きさや物性等に応じて適宜決められる。   The vacuum suction device 10 configured as described above is configured to be installed inside a mounting hole 40 a provided at a predetermined position of the processing table 40 that holds the workpiece 30. The vertical suction position of the vacuum suction device 10 is such that the workpiece 30 is sucked by the small-diameter suction pad 15 and the large-diameter suction pad 17 and the workpiece 30 is processed while the small-diameter suction pad 15 is lowered. It is fixed to the processing table 40 so as to form the same plane as the surface 40b of the table 40. For example, the height of the large-diameter suction pad 17 may be finely adjusted by the screwing amount of the fixing member 16. Further, the number and interval of the vacuum suction devices 10 provided on the processing table 40 are appropriately determined according to the size and physical properties of the workpiece 30.

次に、上記のように構成された真空吸着装置の動作について、図1〜図3を参照して説明する。なお、図2は図1に示された第1の係着部材を上昇させた状態を示す断面図、図3は図2の状態から第1の係着部材が下降され、被加工物30を第2の係着部材と共に係着した状態を示す断面図である。
まず、加工テーブル40上に被加工物30、例えば電力用の大型変圧器の絶縁部などに用いられる絶縁紙、プレスボード等、例えば数メートル四方以上といった大型の被加工物30を載置する。このとき、被加工物30は、例えば撓み、捩れ、弛み、あるいは載置時の空気の進入等によって歪みが生じ、加工テーブル40の表面40bとの間に凹凸が生じる。図1の被加工物30は前記のように生じた凸部が真空吸着装置10の近傍に存在する場合を模式的に示している。
Next, operation | movement of the vacuum suction apparatus comprised as mentioned above is demonstrated with reference to FIGS. 2 is a cross-sectional view showing a state where the first engaging member shown in FIG. 1 is raised, and FIG. 3 is a state where the first engaging member is lowered from the state shown in FIG. It is sectional drawing which shows the state engaged with the 2nd engaging member.
First, a workpiece 30 such as an insulating paper used for an insulating portion of a large transformer for electric power, a press board, or the like, for example, several meters square or more is placed on the processing table 40. At this time, the workpiece 30 is distorted due to, for example, bending, twisting, loosening, or the entry of air at the time of placing, and irregularities are generated between the workpiece 30 and the surface 40 b of the processing table 40. The workpiece 30 in FIG. 1 schematically shows a case where the convex portions generated as described above are present in the vicinity of the vacuum suction device 10.

次に、シリンダ装置13の駆動軸13aを上昇させることにより、スプリング18の反力でOリング19aが加圧され、図1に示す真空経路である第2排気路Bが遮断される。これにより真空ポンプから得られた真空圧力は、第1排気路Aを通り、小口径吸着パッド15の中心部の穴を通って周囲の空気を吸引する。シリンダ装置13の駆動軸13aを更に上昇させ、被加工物30に小口径吸着パッド15が当接する程度までシャフト部材12を上昇させることで被加工物30を小口径吸着パッド15に対して図2に示すように吸着させることができる。   Next, by raising the drive shaft 13a of the cylinder device 13, the O-ring 19a is pressurized by the reaction force of the spring 18, and the second exhaust path B, which is the vacuum path shown in FIG. Thus, the vacuum pressure obtained from the vacuum pump passes through the first exhaust path A and sucks the surrounding air through the hole in the center of the small-diameter suction pad 15. The drive shaft 13a of the cylinder device 13 is further lifted, and the shaft member 12 is lifted to such an extent that the small-diameter suction pad 15 comes into contact with the workpiece 30, whereby the workpiece 30 is moved relative to the small-diameter suction pad 15 as shown in FIG. Can be adsorbed as shown in FIG.

小口径吸着パッド15が被加工物30を吸着した後、真空ポンプによる排気を続けた状態でシリンダ装置13を下降させると、シリンダ装置13の下降端直前に、被加工物30が大口径吸着パッド17に押し付けられる。このタイミングとほぼ同時に、Oリング19aがスプリング18の反力から開放され、遮断されていた第2排気路Bが開成される。この動作が行われる直前までは、スプリングガイド19部まで真空状態にあるため、被加工物30を図3に示すように大口径吸着パッド17に対して瞬時に真空吸着させることができる。   After the small-diameter suction pad 15 adsorbs the workpiece 30, when the cylinder device 13 is lowered in a state where the exhaust by the vacuum pump is continued, the workpiece 30 is brought into the large-diameter suction pad immediately before the lower end of the cylinder device 13. 17 is pressed. Almost simultaneously with this timing, the O-ring 19a is released from the reaction force of the spring 18, and the blocked second exhaust passage B is opened. Until this operation is performed, since the spring guide 19 is in a vacuum state, the workpiece 30 can be instantaneously vacuum-sucked to the large-diameter suction pad 17 as shown in FIG.

上記の第2排気路開閉手段は、シリンダ装置13の上下駆動と、スプリング18、Oリング19aの動作により、第1排気路Aと第2排気路Bの2つの真空経路を切り替える電磁弁の役割を果たしている。また、図3の状態にあるときの小口径吸着パッド15の吸着面の高さは、加工テーブル40の上面40b及び、大口径吸着パッド17が被加工物30を真空吸着した状態での吸着面との高さと同一高さになるように配置されていることで、被加工物30の歪みを矯正することができる。   The second exhaust path opening / closing means functions as an electromagnetic valve that switches between two vacuum paths of the first exhaust path A and the second exhaust path B by the vertical drive of the cylinder device 13 and the operation of the spring 18 and the O-ring 19a. Plays. Further, the height of the suction surface of the small-diameter suction pad 15 in the state of FIG. 3 is the suction surface when the workpiece 30 is vacuum-sucked by the upper surface 40b of the processing table 40 and the large-diameter suction pad 17. The distortion of the workpiece 30 can be corrected by being arranged so as to be the same height as the height.

尚、台座11に取り付けられた温調機能付きのヒータ22及びシャフト部材12に取り付けられた温調機能付きのヒータ21によって、大口径吸着パッド17及び小口径吸着パッド15は、それぞれがある一定の温度以上に保たれる。これは、気温等の温度環境変化の影響によって、吸着パッドの素材である合成ゴムの硬化、つまり弾性特性が低下することを防ぐためであり、吸着部の温度を一定に保つことにより、吸着パッドの素材である合成ゴムの弾性特性が安定する。その結果、安定した吸着状態が得られる。   Note that the large-diameter suction pad 17 and the small-diameter suction pad 15 are respectively fixed by the heater 22 with a temperature control function attached to the base 11 and the heater 21 with a temperature control function attached to the shaft member 12. Keep above temperature. This is to prevent the synthetic rubber that is the material of the suction pad from being cured, that is, to reduce the elastic properties due to the influence of changes in the temperature environment such as the temperature. By keeping the temperature of the suction part constant, the suction pad The elastic properties of synthetic rubber, which is the material of, are stabilized. As a result, a stable adsorption state can be obtained.

上記のように、実施の形態1によれば、被加工物30に対して進退可能に設けられ、減圧によって被加工物30の表面を係着させる第1の係着部材である小口径吸着パッド15を中心部に配設し、被加工物30における小口径吸着パッド15による係着部の外側周囲部分を減圧によって係着させる第2の係着部材である大口径吸着パッド17をこの小口径吸着パッド15の周りを囲む如く、外周部に一体的に配設したので、被加工物30の歪みが大きい部分を容易に吸着する役割を小口径吸着パッド15が担い、加工時に発生する加工応力に耐え得る保持力を確保する役割を大口径吸着パッド17が担うことで、役割が効果的に分担され、被加工物30に歪みや撓みなどがあっても確実に係着することができる。このため、大型で且つ歪みの大きい被加工物30を、歪みを矯正した状態で確実に吸着し、また切断や切削加工等の加工応力にも耐える係着力を得ることができる。   As described above, according to the first embodiment, the small-diameter suction pad is a first engaging member that is provided so as to be capable of advancing and retreating with respect to the workpiece 30 and that engages the surface of the workpiece 30 by decompression. The large-diameter suction pad 17, which is a second engaging member for disposing the outer peripheral portion of the engaging portion by the small-diameter suction pad 15 in the workpiece 30 by decompression, is disposed in the center portion. Since the suction pad 15 is integrally disposed around the outer periphery so as to surround the suction pad 15, the small-diameter suction pad 15 plays a role of easily sucking a portion with a large distortion of the workpiece 30, and processing stress generated during processing. Since the large-diameter suction pad 17 plays a role of securing a holding force that can withstand the load, the role is effectively shared, and even if the workpiece 30 is distorted or bent, it can be securely engaged. For this reason, it is possible to surely adsorb the workpiece 30 which is large and has a large distortion in a state in which the distortion is corrected, and to obtain an engaging force which can withstand a processing stress such as cutting and cutting.

また、上記の効果が得られる結果、作業性が格段に改善される。このため、作業時間の短縮、エネルギー消費の節減なども期待することができる。さらに、小口径吸着パッド15、及び大口径吸着パッド17を必要に応じて所定温度に加熱することができるヒータ21、22を設けるようにしたので、吸着パッドが気温等の温度環境変化の影響で、弾性特性が低下する現象を防ぎ、気温等の温度環境の変化に影響されることなく被加工物表面の凹凸形状に対して常に安定した吸着状態を維持することができる。   Further, as a result of obtaining the above effect, workability is remarkably improved. For this reason, shortening of working time and saving of energy consumption can be expected. Furthermore, since the heaters 21 and 22 that can heat the small-diameter suction pad 15 and the large-diameter suction pad 17 to a predetermined temperature as necessary are provided, the suction pad is affected by the temperature environment change such as the air temperature. In addition, it is possible to prevent a phenomenon in which the elastic characteristics are deteriorated and always maintain a stable adsorption state with respect to the uneven shape on the surface of the workpiece without being affected by changes in the temperature environment such as the air temperature.

実施の形態2.
図4は本発明の実施の形態2による真空吸着装置の要部を示す断面図である。なお、この実施の形態2は、被加工物を係着する第1の係着部材として、実施の形態1における減圧を利用した小口径吸着パッド15に代えて、粘着力を利用したシリコーンゲルからなる粘着ブロックを用いるようにしたものである。図において、シャフト部材12Aは中実の丸棒状に形成され、その先端部には被加工物30の表面を係着させるための粘着ブロック15Aが固定されている。粘着ブロック15Aは、金属材料の表面上にシリコーンゲルの焼付け処理が施されたものである。
Embodiment 2. FIG.
FIG. 4 is a cross-sectional view showing the main part of the vacuum suction device according to Embodiment 2 of the present invention. In addition, this Embodiment 2 is replaced with the silicone gel using adhesive force instead of the small-diameter suction pad 15 using reduced pressure in Embodiment 1 as the first engaging member for engaging the workpiece. An adhesive block is used. In the drawing, the shaft member 12A is formed in a solid round bar shape, and an adhesive block 15A for fixing the surface of the workpiece 30 is fixed to the tip of the shaft member 12A. The adhesive block 15A is obtained by baking a silicone gel on the surface of a metal material.

なお、実施の形態1の図1におけるスプリング18、スプリングガイド19、Oリング19aなどは省かれ、従って第2排気路開閉手段も省かれている。また、ブロック部材14Aは、図1に示す連通路14aが省かれている。さらにヒータ21も省かれている。また、シリンダ装置13の駆動軸13aを下端部まで下降させたときの粘着ブロック15Aの上端の位置は、実施の形態1と同様に加工テーブル40の表面40bと同一のレベルとなるように構成されている。その他の構成は実施の形態1と同様であるので説明を省略する。   Note that the spring 18, the spring guide 19, the O-ring 19a and the like in FIG. 1 of the first embodiment are omitted, and thus the second exhaust path opening / closing means is also omitted. Further, the communication member 14a shown in FIG. 1 is omitted from the block member 14A. Furthermore, the heater 21 is also omitted. Further, the position of the upper end of the adhesive block 15A when the drive shaft 13a of the cylinder device 13 is lowered to the lower end is configured to be at the same level as the surface 40b of the processing table 40 as in the first embodiment. ing. Since other configurations are the same as those of the first embodiment, description thereof is omitted.

上記のように構成された実施の形態2においては、シリンダ装置13の駆動軸13aを上昇させることにより、シャフト部材12Aの先端に取り付けられた粘着ブロック15Aが上昇し、粘着ブロック15Aにおける粘着性のあるシリコーンゲル表面が被加工物30の表面(裏面)に当接されて係着する。その後、シリンダ装置13の駆動軸13aを下降させることで、被加工物30が大口径吸着パッド17に真空吸着される。シリコーンゲルは繰り返し粘着性を維持するものであり、汚れの付着等により粘着性が低下した場合は、水やエタノール等により洗浄することで、その粘着性が回復する。なお、同様の粘着性を有するものであれば、シリコーンゲル以外の材料を用いても差し支えない。この実施の形態2で必要な真空経路は、実施の形態1における第2排気路Bに相当する1経路のみである。   In the second embodiment configured as described above, by raising the drive shaft 13a of the cylinder device 13, the adhesive block 15A attached to the tip of the shaft member 12A rises, and the adhesive block 15A has an adhesive property. A certain silicone gel surface is brought into contact with and engaged with the surface (back surface) of the workpiece 30. Thereafter, the workpiece 30 is vacuum-sucked by the large-diameter suction pad 17 by lowering the drive shaft 13 a of the cylinder device 13. Silicone gels are those that maintain repeated adhesiveness, and when the adhesiveness is reduced due to adhesion of dirt or the like, the adhesiveness is recovered by washing with water or ethanol. In addition, as long as it has the same adhesiveness, materials other than silicone gel may be used. The vacuum path required in the second embodiment is only one path corresponding to the second exhaust path B in the first embodiment.

上記のように、実施の形態2によれば、実施の形態1と略同様に大型で且つ歪みの大きい被加工物を、歪みを矯正した状態で確実に係着し、且つ切断及び切削加工等の加工応力にも耐える保持力をも維持することができる。また、構成が簡素となるので安価に提供することも可能となる。また、気温の変化に対しても実施の形態1と同様の作用効果が得られることは勿論である。なお、所望により実施の形態1と同様のヒータ22を付加することも差し支えない。   As described above, according to the second embodiment, a large-sized workpiece having a large distortion is securely engaged in a state in which the distortion is corrected, as in the first embodiment, and cutting and cutting are performed. It is also possible to maintain a holding force that can withstand the machining stress. Further, since the configuration is simple, it can be provided at a low cost. Needless to say, the same effects as those of the first embodiment can be obtained with respect to changes in temperature. If desired, a heater 22 similar to that of the first embodiment may be added.

実施の形態3.
図5は、本発明の実施の形態3による真空吸着装置の要部を示す断面図である。図において、台座11の上端部には大口径吸着パッド17を振動させるための振動手段である振動モータ23が設けられている。なお、この例では図1に示すヒータ22は設置されていない。その他の構成は実施の形態1と同様であるので説明を省略する。
Embodiment 3 FIG.
FIG. 5 is a cross-sectional view showing the main part of the vacuum suction device according to Embodiment 3 of the present invention. In the figure, a vibration motor 23 which is a vibration means for vibrating the large-diameter suction pad 17 is provided at the upper end of the base 11. In this example, the heater 22 shown in FIG. 1 is not installed. Since other configurations are the same as those of the first embodiment, description thereof is omitted.

上記のように構成された実施の形態3においては、図示されていない被加工物30を大口径吸着パッド17に真空吸着させる際に、振動モータ23によって大口径吸着パッド17を振動させるように動作させる。このように、大口径吸着パッド17を振動させながら被加工物30に係着させると、単に被加工物30の表面に押付けるだけの場合に比べて被加工物30表面の凹凸状態によらず、大口径吸着パッド17の吸着部が馴染み易くなる。また、20℃から30℃程度の温度環境の低下による吸着部の硬化であれば、温度調節機能付きのヒータ22の効果と同等の効果が得られる。なお、低温環境に備えるために所望により実施の形態1と同様のヒータ22を付加しても良い。   In the third embodiment configured as described above, when the workpiece 30 (not shown) is vacuum-sucked to the large-diameter suction pad 17, the vibration motor 23 operates to vibrate the large-diameter suction pad 17. Let As described above, when the large-diameter suction pad 17 is engaged with the workpiece 30 while being vibrated, the surface of the workpiece 30 is not dependent on the uneven state as compared with a case where the pad is simply pressed against the surface of the workpiece 30. The suction part of the large-diameter suction pad 17 becomes easy to become familiar with. Further, if the adsorption portion is cured due to a decrease in temperature environment of about 20 ° C. to 30 ° C., an effect equivalent to the effect of the heater 22 with a temperature adjusting function can be obtained. In order to prepare for a low temperature environment, a heater 22 similar to that of the first embodiment may be added if desired.

なお、上記実施の形態1〜3で例示した、例えば小口径吸着パッド15、粘着ブロック15A、及び大口径吸着パッド17の形状や固定構造、第1排気路A及び第2排気路Bの形成方法や構造、第2排気路開閉手段の構成、台座11の構成、ヒータ21、22の設置位置などは、何れもこの発明を実施するための一形態に過ぎず、この発明の範囲内で種々の変形や変更が可能であることは言うまでもない。また、加工テーブル40の形状や構成、被加工物30の種類や大きさ、用途、あるいは上下関係などについても本書で例示したものに限定されないことは当然である。   In addition, for example, the shape and fixing structure of the small-diameter suction pad 15, the adhesive block 15A, and the large-diameter suction pad 17 exemplified in the first to third embodiments, and the formation method of the first exhaust passage A and the second exhaust passage B. The structure, the structure of the second exhaust passage opening / closing means, the structure of the pedestal 11, the installation position of the heaters 21 and 22, etc. are merely one form for carrying out the present invention, and various modifications are possible within the scope of the present invention. Needless to say, modifications and changes are possible. Moreover, it is natural that the shape and configuration of the processing table 40, the type and size of the workpiece 30, the purpose, and the vertical relationship are not limited to those exemplified in this document.

10 真空吸着装置、 11 台座、 11a、11b、11c 内周面、 11d 排気口、 12、12A シャフト部材、 13 シリンダ装置、 13a 駆動軸、 14 ブロック部材、 14a 連通路、 14b Oリング、 15 小口径吸着パッド(第1の係着部材)、 15A 粘着ブロック(第1の係着部材)、 16 固定部材、 17 大口径吸着パッド(第2の係着部材)、 17a 吸着面、 18 スプリング、 19 スプリングガイド、 19a Oリング、 20 真空配管、 21、22 ヒータ、 23 振動モータ(振動手段)、 30 被加工物、 40 加工テーブル、 40a 取付穴、 40b 表面、 A 第1排気路、 B 第2排気路。   DESCRIPTION OF SYMBOLS 10 Vacuum adsorption device, 11 base, 11a, 11b, 11c Inner peripheral surface, 11d Exhaust port, 12, 12A Shaft member, 13 Cylinder device, 13a Drive shaft, 14 Block member, 14a Communication path, 14b O-ring, 15 Small bore Suction pad (first engaging member), 15A adhesive block (first engaging member), 16 fixing member, 17 large-diameter suction pad (second engaging member), 17a suction surface, 18 spring, 19 spring Guide, 19a O-ring, 20 Vacuum piping, 21, 22 Heater, 23 Vibration motor (vibration means), 30 Workpiece, 40 Processing table, 40a Mounting hole, 40b Surface, A 1st exhaust path, B 2nd exhaust path .

Claims (6)

被加工物に対して進退可能に設けられ、減圧または粘着によって上記被加工物の表面を係着させる第1の係着部材と、この第1の係着部材の周りを囲む如く形成され、上記被加工物における上記第1の係着部材による係着部の外側周囲部分を減圧によって係着させる第2の係着部材と、を備えたことを特徴とする真空吸着装置。   A first engaging member which is provided so as to be capable of advancing and retreating with respect to the workpiece, and which engages the surface of the workpiece with reduced pressure or adhesion, and is formed so as to surround the first engaging member; And a second engaging member for engaging the outer peripheral portion of the engaging portion of the workpiece with the first engaging member by decompression. 上記第1の係着部材は、シリンダによって上記進退方向に駆動され、第1排気路を構成する中空のシャフト部材の先端部に固定され、中心部に貫通孔を有する小口径吸着パッドからなり、上記第2の係着部材は、上記シャフト部材の外周面に対して、第2排気路を構成する間隙を介して設けられた大口径吸着パッドからなることを特徴とする請求項1記載の真空吸着装置。   The first engaging member is driven by a cylinder in the advancing / retreating direction, is fixed to a distal end portion of a hollow shaft member constituting the first exhaust passage, and includes a small-diameter suction pad having a through hole in the center portion, 2. The vacuum according to claim 1, wherein the second engaging member includes a large-diameter suction pad provided through a gap constituting the second exhaust path with respect to the outer peripheral surface of the shaft member. Adsorption device. 上記シリンダの進退に連動して上記第2排気路を開閉する第2排気路開閉手段を備え、上記シリンダを上記被加工物に対して進出させたときに上記第2排気路開閉手段が閉成されて上記小口径吸着パッドに上記被加工物の表面を係着させ、上記シリンダを後退させたときに上記第2排気路開閉手段が開成されて上記被加工物の表面を、上記小口径吸着パッドによる係着と協働して上記大口径吸着パッドによって係着させるようにしたことを特徴とする請求項2記載の真空吸着装置。   Second exhaust path opening / closing means for opening and closing the second exhaust path in conjunction with the advance and retreat of the cylinder is provided, and the second exhaust path opening / closing means is closed when the cylinder is advanced relative to the workpiece. The surface of the workpiece is engaged with the small-diameter suction pad, and when the cylinder is retracted, the second exhaust passage opening / closing means is opened so that the surface of the workpiece is attracted to the small-diameter suction pad. 3. The vacuum suction device according to claim 2, wherein the large-diameter suction pad is used for engaging with the pad. 上記第1の係着部材は、シリンダによって上記進退方向に駆動されるシャフト部材の先端部に固定された粘着ブロックからなることを特徴とする請求項1記載の真空吸着装置。   2. The vacuum suction device according to claim 1, wherein the first engaging member is composed of an adhesive block fixed to a tip portion of a shaft member driven in a forward / backward direction by a cylinder. 上記第1の係着部材及び上記第2の係着部材を所定温度に加熱するための加熱手段を備えていることを特徴とする請求項1から請求項4の何れかに記載の真空吸着装置。   The vacuum suction device according to any one of claims 1 to 4, further comprising heating means for heating the first engaging member and the second engaging member to a predetermined temperature. . 上記第2の係着部材を振動させる振動手段を備えていることを特徴とする請求項1から請求項5の何れかに記載の真空吸着装置。   The vacuum suction device according to any one of claims 1 to 5, further comprising vibration means for vibrating the second engaging member.
JP2011014641A 2011-01-27 2011-01-27 Vacuum suction device Pending JP2012152861A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016101614A (en) * 2014-11-27 2016-06-02 パナソニックIpマネジメント株式会社 Adsorption heating head
KR20220115893A (en) * 2019-07-11 2022-08-19 미래에이티 주식회사 An Absorption Apparatus for Flexible Printed Circuit Board Process

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016101614A (en) * 2014-11-27 2016-06-02 パナソニックIpマネジメント株式会社 Adsorption heating head
KR20220115893A (en) * 2019-07-11 2022-08-19 미래에이티 주식회사 An Absorption Apparatus for Flexible Printed Circuit Board Process
KR102586436B1 (en) * 2019-07-11 2023-10-12 미래에이티 주식회사 An Absorption Apparatus for Flexible Printed Circuit Board Process

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