JP2012147347A5 - - Google Patents

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Publication number
JP2012147347A5
JP2012147347A5 JP2011005562A JP2011005562A JP2012147347A5 JP 2012147347 A5 JP2012147347 A5 JP 2012147347A5 JP 2011005562 A JP2011005562 A JP 2011005562A JP 2011005562 A JP2011005562 A JP 2011005562A JP 2012147347 A5 JP2012147347 A5 JP 2012147347A5
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JP
Japan
Prior art keywords
electrode
resonator element
arm
width
vibrating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2011005562A
Other languages
English (en)
Japanese (ja)
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JP2012147347A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2011005562A priority Critical patent/JP2012147347A/ja
Priority claimed from JP2011005562A external-priority patent/JP2012147347A/ja
Publication of JP2012147347A publication Critical patent/JP2012147347A/ja
Publication of JP2012147347A5 publication Critical patent/JP2012147347A5/ja
Pending legal-status Critical Current

Links

JP2011005562A 2011-01-14 2011-01-14 振動片、振動子、発振器及び電子機器 Pending JP2012147347A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011005562A JP2012147347A (ja) 2011-01-14 2011-01-14 振動片、振動子、発振器及び電子機器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011005562A JP2012147347A (ja) 2011-01-14 2011-01-14 振動片、振動子、発振器及び電子機器

Publications (2)

Publication Number Publication Date
JP2012147347A JP2012147347A (ja) 2012-08-02
JP2012147347A5 true JP2012147347A5 (cg-RX-API-DMAC10.html) 2014-03-06

Family

ID=46790434

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011005562A Pending JP2012147347A (ja) 2011-01-14 2011-01-14 振動片、振動子、発振器及び電子機器

Country Status (1)

Country Link
JP (1) JP2012147347A (cg-RX-API-DMAC10.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6435596B2 (ja) * 2013-08-09 2018-12-12 セイコーエプソン株式会社 振動素子、振動デバイス、電子機器、および移動体

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3972790B2 (ja) * 2001-11-27 2007-09-05 松下電器産業株式会社 薄膜微小機械式共振子および薄膜微小機械式共振子ジャイロ
JP4715652B2 (ja) * 2006-06-30 2011-07-06 セイコーエプソン株式会社 圧電振動片
JP5168002B2 (ja) * 2008-07-22 2013-03-21 セイコーエプソン株式会社 振動子及び発振器

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