JP2012144794A - Continuous processing device and method for sheet-like workpiece - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a continuous processing device for a sheet-like workpiece, in which even when the sheet-like workpiece is cut during continuous processing, the restoration thereof can be easily performed while minimizing the frequency of folding of the sheet-like workpiece.SOLUTION: In the aluminum foil continuous processing device 100, a plurality of lengthy aluminum foils F are continuously delivered in the longitudinal direction while being juxtaposed to each other with the width direction being turned to the vertical direction (Z direction). The plurality of delivered aluminum foils F are continuously passed through an etching solution L3 stored in an etching solution storage unit 35 as they are juxtaposed to each other with the width direction being turned to the vertical direction (Z direction). The aluminum foils F enter the storage unit 35 through an inlet slit 351s and leave through an outlet slit 352s.

Description

  The present invention relates to a sheet-like workpiece continuous processing apparatus and a sheet-like workpiece continuous processing method for continuously processing a sheet-like workpiece such as an aluminum foil for an aluminum electrolytic capacitor.

  As a typical apparatus for continuously processing a long sheet-like workpiece, there is a continuous etching apparatus for electrolyzing an aluminum foil or the like for an aluminum electrolytic capacitor in a treatment solution such as hydrochloric acid. In such a continuous etching apparatus, a plurality of rollers are arranged in a horizontal posture along the moving direction of the aluminum foil, and the moving path of the aluminum foil is defined by such rollers. Moreover, the aluminum foil is moved so as to be folded back and forth several times by a roller arranged in a horizontal posture at the bottom in the etching tank, and the aluminum foil is etched during that time (see Patent Document 1).

  Similarly, in a continuous conversion apparatus for producing an anode foil for an aluminum electrolytic capacitor, a plurality of rollers are arranged in a horizontal posture along the moving direction of the aluminum foil, and the moving path of the aluminum foil is defined by the rollers. Moreover, it moves so that an aluminum foil may be folded up and down many times with the roller arrange | positioned by the horizontal attitude | position in the bottom part in a chemical conversion tank, and aluminum foil is formed in the meantime.

JP 2007-59827 A (FIG. 1)

  However, in a sheet-like workpiece continuous processing apparatus configured to fold an aluminum foil up and down many times by a roller arranged in a horizontal posture as in a conventional continuous etching apparatus or continuous chemical conversion apparatus, an aluminum foil (sheet-like work) is In the case of cutting, there is a problem that it takes much time to pass the aluminum foil again through the rollers in the etching tank or the chemical conversion tank.

  Further, in the case of a configuration in which the aluminum foil is folded back and forth many times by a roller arranged in a horizontal posture as in a conventional continuous etching apparatus or continuous chemical conversion apparatus, there is a problem that the quality of the aluminum foil is deteriorated. For example, in the case of a continuous etching apparatus, in a portion turned back by a roller, an electroless etching state in which the electrodes are not opposed to each other is generated, and useless dissolution occurs, and the etching magnification is reduced. Further, in the case of a continuous chemical conversion apparatus, an excessive load is applied to the chemical film (anodized film) at a portion turned back by a roller to generate a crack, which causes a leakage current to increase.

  In view of the above problems, the problem of the present invention is that even when a sheet-like workpiece is cut during continuous processing, the recovery can be easily performed, and the number of times the sheet-like workpiece is folded is minimized. An object of the present invention is to provide a continuous processing apparatus for sheet-like workpieces.

  In order to solve the above-described problems, the sheet-like workpiece continuous processing apparatus according to the present invention continuously feeds out a plurality of long sheet-like workpieces in the longitudinal direction in a state in which the width directions are parallel to each other in the vertical direction. A workpiece supply portion, and a treatment liquid storage portion in which the plurality of sheet-like workpieces drawn from the workpiece supply portion are continuously stored in a state in which the plurality of sheet-like workpieces are parallel to each other with the width direction being directed vertically. It is characterized by having.

  In the sheet-like workpiece continuous processing method according to the present invention, the plurality of long sheet-like workpieces are continuously fed out in the longitudinal direction in a state in which the width directions are parallel to each other in the vertical direction. The sheet-like workpiece is continuously passed through the processing liquid stored in the processing liquid storage unit in a state in which the widthwise direction is parallel to each other.

  The “sheet-like workpiece” in the present invention means that the workpiece is a thin member, and the thickness is meant to include, for example, from a film-like material of several μm to a plate-like material of several hundred μm. There is no limitation on the thickness dimension. In addition, the term “continuously fed” in the present invention includes not only a configuration in which the sheet-like workpiece is fed without stopping, but also a case where the sheet-like workpiece is intermittently fed, such as when temporarily stopping.

  In the sheet-like workpiece continuous processing apparatus and the sheet-like workpiece continuous processing method according to the present invention, a plurality of long sheet-like workpieces are continuously fed out in a state where the width directions are parallel to each other in the vertical direction. It is continuously passed through the processing solution. For this reason, since the sheet-like workpiece is not folded back and forth many times by the rollers arranged in a horizontal posture, even if the sheet-like workpiece is cut, it takes a lot of trouble to pass the sheet-like workpiece again into the processing liquid. Do not need. Further, since the sheet-like workpiece is oriented in the vertical direction, it is not necessary to fold it back and forth by a roller or the like in order to enter and exit the processing liquid. Therefore, since the number of times of folding the sheet-like work can be minimized, it is possible to suppress a deterioration in quality due to the folding of the sheet-like work. Further, in the present invention, the length of the sheet-like workpiece that is simultaneously immersed in the treatment liquid is shorter than that in the case where the sheet-like workpiece is folded back and forth in the treatment liquid many times by the rollers arranged in a horizontal posture. However, since a plurality of sheet-like workpieces are processed at the same time, a significant reduction in productivity can be avoided.

  In this invention, the said process liquid storage part is the downstream of the movement direction of the said sheet-like workpiece | work with the entrance side wall part provided with the entrance slit which the said sheet-like workpiece | work passes in the upstream of the movement direction of the said sheet-like workpiece | work. An exit side wall portion provided with an exit side slit through which the sheet-like workpiece passes, a side wall portion facing on both sides in the thickness direction of the sheet-like workpiece, and a bottom wall portion positioned below the sheet-like workpiece. It is preferable. When processing while moving the sheet-shaped workpiece with the width direction facing up and down, leakage of the processing liquid from the location where the sheet-shaped workpiece enters the processing liquid reservoir and the location where the sheet-shaped workpiece exits from the processing liquid reservoir Although it occurs, if the portion where the sheet-like workpiece enters the treatment liquid storage portion and the portion where the sheet-like workpiece emerges from the treatment liquid storage portion are formed in a slit shape, the leakage of the treatment liquid can be reduced.

  In the present invention, a processing liquid supply device that supplies the processing liquid to the processing liquid storage unit and a processing liquid recovery device that recovers the processing liquid leaking from the processing liquid storage unit may be provided. preferable. According to such a configuration, the amount of leakage of the processing liquid from the inlet side slit and the outlet side slit can be replenished from the processing liquid supply device, so that it can be maintained at a predetermined position on the liquid surface of the processing liquid. Further, since the processing liquid recovery device is provided, wasteful consumption of the processing liquid can be prevented.

  In the present invention, it is preferable that a treatment liquid recirculation path for recirculating the treatment liquid recovered by the treatment liquid recovery apparatus to the treatment liquid storage unit is configured. According to such a configuration, the processing liquid leaked from the processing liquid storage section can be returned to the processing liquid storage section, so that it is easy to maintain the liquid level of the processing liquid at a predetermined position.

  In the present invention, the workpiece feeding portion includes a plurality of vertical feeding rolls for feeding the sheet-like workpiece while rotating around a central axis extending in the vertical direction, and is provided downstream of the movement path of the sheet-like workpiece. It is preferable that a work winding unit including a plurality of vertical winding rolls for winding the sheet-like work while rotating around a central axis extending in the vertical direction is provided. According to such a configuration, even when processing is performed while moving the sheet-like workpiece with the width direction directed in the vertical direction, the sheet-like workpiece can be fed out and the sheet-like workpiece can be wound up efficiently.

  In the present invention, the treatment liquid storage unit is provided with three or more electrodes facing each other in a direction intersecting the moving direction of the sheet-like workpiece, and the sheet-like workpiece is, among the three or more electrodes, It is possible to adopt a configuration in which electrolytic treatment is performed by passing between electrodes facing each other one by one. According to such a configuration, electrolytic treatment can be performed on the sheet-like workpiece.

  In this case, it is preferable to perform alternating current electrolysis on both surfaces of each of the plurality of sheet-like works by applying an alternating current between the electrodes arranged at both ends of the three or more electrodes. According to such a configuration, wiring and the like for the electrodes can be performed simply.

  In the present invention, among the three or more electrodes, a configuration in which an alternating current is applied to two electrodes facing each other with the sheet-shaped workpiece interposed therebetween to perform AC electrolysis on both surfaces of each of the plurality of sheet-shaped workpieces. May be adopted.

  In this invention, you may employ | adopt the structure which applies a direct current between the said electrode and the said sheet-like workpiece | work, and performs direct current electrolysis on each both surfaces of the said several sheet-like workpiece | work.

  In the present invention, a plurality of the treatment liquid reservoirs are provided along a movement path of the sheet workpiece, and each of the plurality of sheet workpieces in a part of the treatment liquid reservoirs among the plurality of treatment liquid reservoirs. It is preferable that alternating current electrolysis is performed, and direct current electrolysis is performed on each of the plurality of sheet-like workpieces in another part of the processing liquid storage unit. According to such a configuration, AC electrolysis and DC electrolysis can be continuously performed on the sheet-like workpiece by a single sheet-like workpiece continuous processing apparatus.

  The present invention is particularly effective when applied when the sheet-like workpiece is an aluminum foil for an aluminum electrolytic capacitor. In this case, for example, an etching process or a chemical conversion process is performed as electrolysis for the sheet-like workpiece. According to this configuration, it is possible to prevent an electroless etching state that occurs at the folded portion of the roller during continuous etching, so that the etching magnification can be increased. Moreover, it is possible to prevent the occurrence of cracks in the chemical film (anodized film) at the folded portion by the roller during continuous chemical conversion.

  In the sheet-like workpiece continuous processing apparatus and the sheet-like workpiece continuous processing method according to the present invention, a plurality of long sheet-like workpieces are continuously fed out in a state in which the width directions are parallel to each other in the vertical direction. It is continuously passed through the processing solution. For this reason, even when the sheet-like workpiece is cut, it does not require much labor to pass the sheet-like workpiece again into the processing liquid. Further, since the sheet-like workpiece is oriented in the vertical direction, it is not necessary to fold it back and forth by a roller or the like in order to enter and exit the processing liquid. Therefore, since the number of times of folding the sheet-like work can be minimized, it is possible to suppress a deterioration in quality due to the folding of the sheet-like work. Moreover, in this invention, since several sheet-like workpiece | work is processed simultaneously, even if it is the structure to which a sheet-like workpiece | work moves the width direction facing an up-down direction, it is excellent in productivity.

It is a top view which shows typically the whole structure of the aluminum foil continuous processing apparatus which concerns on this invention. It is explanatory drawing which shows the structure of the etching process part etc. of the aluminum foil continuous processing apparatus which concerns on this invention. It is a perspective view which expands and shows typically a part of cleaning fluid storage part provided in the cleaning processing part of the aluminum foil continuous processing device concerning the present invention. It is explanatory drawing which shows the structure of the chemical conversion treatment part etc. of the aluminum foil continuous processing apparatus which concerns on this invention.

  A sheet-like workpiece continuous processing apparatus and a sheet-like workpiece continuous processing method to which the present invention is applied will be described with reference to the drawings. In addition, in the following description, the case where various processes are performed to the aluminum foil for aluminum electrolytic capacitors is illustrated as a sheet-like workpiece | work. In the drawings referred to below, among the three directions (X direction, Y direction, and Z direction) intersecting each other, the width direction (vertical direction) of the aluminum foil is defined as the Z direction, and the aluminum foil is fed out from the feeding portion. The X direction is assumed to be the X direction, and the width direction of the aluminum foil when the aluminum foil is fed from the feeding portion is assumed to be the Y direction. The direction of movement of the aluminum foil is indicated by an arrow D.

(overall structure)
FIG. 1 is a plan view schematically showing the overall configuration of an aluminum foil continuous processing apparatus according to the present invention. An aluminum foil continuous processing apparatus 100 shown in FIG. 1 is a sheet-like workpiece continuous processing apparatus that continuously performs an etching process, a cleaning process, and a chemical conversion process on an aluminum foil F for an aluminum electrolytic capacitor. The aluminum foil continuous processing apparatus 100 includes a feeding unit 20 (work feeding unit), an etching processing unit 30, a cleaning processing unit 40, and a chemical conversion processing unit from the upstream side to the downstream side along the conveyance path of the aluminum foil F. 50, the drying part 60, and the winding part 70 (work winding part) are provided in this order. Between the etching process part 30 and the washing | cleaning process part 40, the guide roller 95 which bends the conveyance direction of the aluminum foil F at right angle is arrange | positioned. Between the cleaning processing unit 40 and the chemical conversion processing unit 50, a feeding roller 69 for bending the conveyance direction of the aluminum foil F at a right angle and feeding power to the aluminum foil F is disposed.

  In the aluminum foil continuous processing apparatus 100 of this embodiment, the aluminum foil F is continuously processed in a long shape (band shape). Moreover, in this embodiment, in the aluminum foil continuous processing apparatus 100, a plurality of aluminum foils F are processed simultaneously. In the following description, an example in which three aluminum foils F1, F2, and F3 are simultaneously processed as a plurality of aluminum foils F will be described.

(Configuration of the aluminum foil feeding portion 20)
FIG. 2 is an explanatory diagram showing the configuration of the etching processing unit 30 and the like of the aluminum foil continuous processing apparatus 100 according to the present invention. FIGS. 2 (a) and 2 (b) show the arrangement of electrodes and the like in the etching processing unit 30. FIG. 2 is a plan view schematically showing, and a perspective view schematically showing a part of an etching solution reservoir provided in the etching processing unit 30. FIG.

  1 and 2, in the aluminum foil continuous processing apparatus 100 of the present embodiment, the feeding unit 20 feeds out the aluminum foil F while rotating around the central axis La extending in the vertical direction, as indicated by an arrow Ra 3. Two feeding rolls R (feeding rolls R1, R2, and R3) are arranged in a vertical posture. Each of the feeding rolls R1, R2, and R3 continuously feeds the aluminum foil F (aluminum foils F1, F2, and F3) in the longitudinal direction in a state where the width direction is parallel to each other in the vertical direction (Z direction). Note that the aluminum foil F is fed from the feeding roll R, for example, a driving device such as a driving roller 11 provided at the rear stage of the feeding unit 20 or a driving roller (not shown) provided at the rear stage from the driving roller 11. From the force applied to the aluminum foil F.

(Configuration of etching processing unit 30)
The etching processing unit 30 includes a first etching processing unit 311, an etchant cleaning processing unit 312, and a second etching processing unit 313 in this order from the upstream side to the downstream side along the conveyance path of the aluminum foil F. It has been. The first etching processing unit 311 and the etching solution cleaning processing unit 312 have substantially the same configuration, and the etching solution cleaning processing unit 312 has substantially the same configuration as the cleaning processing unit 40 described later. .

  The etching processing unit 30 is an area where AC etching is performed on the unetched aluminum foil F in an etching solution L3 containing hydrochloric acid and other additives. For this reason, in both the first etching processing unit 311 and the second etching processing unit 313, etching in which a plurality of aluminum foils F continuously pass in a state in which the aluminum foils F are parallel to each other in the vertical direction (Z direction). A liquid storage part 35 is provided, and the etching liquid L3 is stored in the etching liquid storage part 35.

  The etching solution reservoir 35 includes an entrance wall portion 351 having an entrance slit 351s through which the aluminum foil F passes on the upstream side in the movement direction of the aluminum foil F, and the aluminum foil F on the downstream side in the movement direction of the aluminum foil F. An exit side wall portion 352 provided with an exit side slit 352s, a pair of side wall portions 353 facing each other in the thickness direction (Y direction) of the aluminum foil F, and a bottom wall portion 355 positioned below the aluminum foil F I have. In this embodiment, the side wall part 353 and the bottom wall part 355 are made of a corrosion-resistant plate material made of FRP or the like.

  The entrance wall portion 351 is covered with a corrosion-resistant plate material 351p made of FRP or the like other than the portion constituting the entrance slit 351s. Similarly to the entrance wall portion 351, the exit wall portion 352 is also covered with a corrosion-resistant plate material 352p made of FRP or the like except for the portion constituting the exit slit 352s.

  In the etching solution reservoir 35 having such a configuration, it is difficult to completely prevent the etching solution L3 from leaking. Therefore, in the present embodiment, the etching solution supply device 36 that supplies the etching solution L3 to the etching solution storage unit 35, the etching solution collection device 37 that collects the etching solution L3 leaking from the etching solution storage unit 35, and the etching solution collection An etching liquid recirculation path 39 (processing liquid recirculation path) is constituted in which the etching liquid L3 collected by the apparatus 37 is recirculated to the etching liquid reservoir 35 by the pump 391. The etchant supply device 36 includes a tank 361 for storing the prepared etchant L3 and a pump 362. The etchant reflux path 39 may be configured as a path for adjusting the etchant L3 recovered by the etchant recovery device 37 and then returning it to the etchant reservoir 35 via the etchant supply device 36. .

  In both the first etching processing unit 311 and the second etching processing unit 313, a plurality of electrodes facing the etching solution storage unit 35 in the direction (Y direction) intersecting the moving direction (X direction) of the aluminum foil F 33 (electrode for etching) is arranged, and the aluminum foil F passes between the electrodes 33 facing each other among the plurality of electrodes 33 one by one. In the present embodiment, the plurality of electrodes 33 includes four electrodes 331, 332, 333, and 334, and the electrodes 331 and 334 on both sides are held by the pair of side wall portions 353 of the etching solution storage unit 35. Therefore, of the three aluminum foils F, the aluminum foil F1 passes between the electrodes 331 and 332, the aluminum foil F2 passes between the electrodes 332 and 333, and the aluminum foil F3 passes between the electrodes 333 and 334. Yes.

  The electrode 33 (electrodes 331, 332, 333, 334) is made of a material that is not electrolytically etched during etching, such as carbon. Further, in this embodiment, of the four electrodes 33, alternating current is applied to the electrodes 331 and 334 on the both sides, no power is supplied to the other electrodes 332 and 333 inside, and the electrodes 332 and 333 are electrically floating. Is in a state. In such a configuration, an alternating current whose waveform is positive or negative is applied to the electrodes 331 and 334. As a result, both of the three aluminum foils F are subjected to AC electrolysis (AC etching) on both sides, and the substantial area is expanded. According to such a configuration, it is not necessary to supply power to the electrodes 332 and 333 other than the electrodes 331 and 334 disposed on both sides of the four electrodes 33 and the aluminum foil F. For this reason, an apparatus structure can be simplified. In addition, since it is only necessary to connect the wiring to only some of the electrodes 33, a great deal of labor is not required during maintenance such as replacement of the electrodes 33. Furthermore, since it is only necessary to connect the wiring to only some of the electrodes 33, a situation where the balance of the wiring resistance to each electrode 33 is not lost does not occur. Therefore, the etching current density for the aluminum foil F is stable.

(Configuration of the cleaning unit 40)
FIG. 3 is a perspective view schematically showing a part of the cleaning liquid reservoir provided in the cleaning processing unit 40 of the aluminum foil continuous processing apparatus 100 according to the present invention. 1 and 3, the aluminum foil F (etched foil Fe) etched by the etching processing unit 30 is supplied to the cleaning processing unit 40 after being cleaned by the shower 91. The cleaning processing unit 40 includes a plurality of cleaning processing units 411 to 417, a preliminary drying unit 42, and a heat treatment unit 43. Among the plurality of cleaning processing units 411 to 417, the cleaning processing units 411 and 417 are pure water cleaning processing units that pass the aluminum foil F in pure water, and the cleaning processing units 413 and 415 are in a chemical cleaning liquid such as acid or alkali. These are chemical cleaning processing units that pass the aluminum foil F through, and the cleaning processing units 412 and 416 are pure water cleaning processing units using a shower.

  The cleaning units 411, 413, 415, and 417 have the same basic structure, and as shown in FIG. 3, a plurality of aluminum foils F are arranged in parallel with each other with the width direction directed in the vertical direction (Z direction). A cleaning liquid reservoir 45 that passes continuously is provided. The cleaning liquid L4 is stored in the cleaning liquid storage unit 45.

  The cleaning liquid reservoir 45 includes an entrance wall portion 451 having an entrance slit 451s through which the aluminum foil F passes on the upstream side in the movement direction of the aluminum foil F, and an exit through which the aluminum foil F passes on the downstream side in the movement direction of the aluminum foil F. An exit side wall portion 452 provided with side slits 452s, a pair of side wall portions 453 facing each other in the thickness direction (Y direction) of the aluminum foil F, and a bottom wall portion 455 positioned below the aluminum foil F are provided. ing. In this embodiment, the side wall portion 453 and the bottom wall portion 455 are made of a corrosion-resistant plate material made of FRP or the like.

  The entrance wall portion 451 is closed by a corrosion-resistant plate material 451p made of FRP or the like other than the portion constituting the entrance slit 451s. Similarly to the entrance wall portion 451, the exit wall portion 452 is also covered with a corrosion-resistant plate material 452p made of FRP or the like except for the portion constituting the exit slit 452s.

  In the cleaning liquid reservoir 45 having such a configuration, it is difficult to completely prevent the cleaning liquid L4 from leaking. Therefore, in this embodiment, the cleaning liquid supply device 46 that supplies the cleaning liquid L4 to the cleaning liquid storage unit 45, the cleaning liquid recovery device 47 that recovers the cleaning liquid L4 leaking from the cleaning liquid storage unit 45, and the cleaning liquid recovered by the cleaning liquid recovery device 47. A cleaning liquid recirculation path 49 (treatment liquid recirculation path) is configured to recirculate L4 to the cleaning liquid storage section 45 by the pump 491. The cleaning liquid supply device 46 includes a tank 461 for storing the cleaning liquid L4 and a pump 462. I have. The cleaning liquid reflux path 49 may be configured as a path for returning the cleaning liquid L4 recovered by the cleaning liquid recovery apparatus 47 to the cleaning liquid storage section 45 via the cleaning liquid supply apparatus 46.

(Configuration of the chemical conversion processing unit 50)
4A and 4B are explanatory views showing the configuration of the chemical conversion treatment unit 50 and the like of the aluminum foil continuous processing apparatus 100 according to the present invention. FIGS. 4A and 4B show the arrangement of electrodes and the like in the chemical conversion treatment unit 50. FIG. FIG. 2 is a plan view schematically showing, and a perspective view schematically showing a part of a chemical conversion liquid storage section provided in the chemical conversion treatment section 50. FIG.

  1 and 4, the chemical conversion treatment unit 50 is provided with four chemical conversion treatment units 511, 512, 513, and 514 from the upstream side to the downstream side along the conveyance path of the aluminum foil F. A drying unit 60 is provided on the downstream side of the chemical conversion processing unit 514. In the chemical conversion treatment unit 50, a pure water cleaning processing unit 521, an in-liquid depolarization unit 522, and a pure water cleaning processing unit 523 are provided in this order between the chemical conversion processing units 511 and 512, and the chemical conversion processing units 512 and 513. Between them, a pure water cleaning processing unit 524, a submerged depolarization unit 525, and a pure water cleaning processing unit 526 are provided in this order. Further, a pure water cleaning processing unit 527 and a heat treatment unit 54 are provided in this order between the chemical conversion processing units 513 and 514, and pure water cleaning processing units 528 and 529 are provided between the chemical conversion processing unit 514 and the drying unit 60. Are provided in this order.

  In the chemical conversion treatment unit 50, the configurations of the pure water cleaning processing units 521, 523, 524, 526, 528, and 529 and the in-liquid depolarization units 522 and 525 are similar to the cleaning processing unit 40, with reference to FIG. It has the structure described. The four chemical conversion treatment units 511, 512, 513, and 514 have substantially the same configuration.

  The chemical conversion treatment unit 50 (chemical conversion treatment units 511, 512, 513, 514) is an ammonium adipate aqueous solution, an ammonium phosphate aqueous solution, an ammonium borate with respect to the aluminum foil F (etched foil Fe) etched by the etching treatment unit 30. This is an area where chemical conversion (DC electrolysis / anodic oxidation) is performed in chemical conversion liquid L5 such as an aqueous solution. The chemical conversion treatment part 50 is provided with a chemical conversion liquid storage part 55 through which a plurality of aluminum foils F pass continuously in a state where the aluminum foils F are parallel to each other in the vertical direction (Z direction). The part 55 stores a chemical conversion liquid L5.

  In the chemical liquid storage section 55, an entrance wall portion 551 having an entrance slit 551s through which the aluminum foil F passes on the upstream side in the movement direction of the aluminum foil F, and the aluminum foil F passes on the downstream side in the movement direction of the aluminum foil F. An exit side wall portion 552 provided with an exit side slit 552s, a pair of side wall portions 553 facing each other in the thickness direction (Y direction) of the aluminum foil F, and a bottom wall portion 555 positioned below the aluminum foil F. I have. In this embodiment, the side wall portion 553 and the bottom wall portion 555 are made of a corrosion-resistant plate material such as stainless steel.

  The entrance wall portion 551 is covered with a corrosion-resistant plate material 551p made of FRP, stainless steel, or the like, except for the portion constituting the entrance slit 551s. Similarly to the entrance wall portion 551, the exit wall portion 552 is also covered with a corrosion-resistant plate material 552p made of FRP, stainless steel, or the like except for the portion constituting the exit slit 552s.

  In the chemical liquid reservoir 55 having such a configuration, it is difficult to completely prevent the chemical liquid L5 from leaking. Therefore, in this embodiment, the chemical liquid supply device 56 that supplies the chemical liquid L5 to the chemical liquid reservoir 55, the chemical liquid recovery device 57 that recovers the chemical liquid L5 leaking from the chemical liquid reservoir 55, and the chemical liquid recovery A chemical conversion liquid recirculation path 59 (treatment liquid recirculation path) is configured to recirculate the chemical conversion liquid L5 collected by the apparatus 57 to the chemical conversion liquid storage section 55 by the pump 591. The chemical conversion liquid supply apparatus 56 A tank 561 for storing the liquid L5 and a pump 562 are provided. The chemical liquid reflux path 59 may be configured as a path for refluxing the chemical liquid L5 recovered by the chemical liquid recovery device 57 to the chemical liquid reservoir 55 via the chemical liquid supply device 56.

  In any of the chemical conversion treatment units 511, 512, 513, and 514, the plurality of electrodes 53 facing the chemical conversion liquid storage unit 55 in the direction (Y direction) intersecting the movement direction (X direction) of the aluminum foil F. The aluminum foil F passes between the electrodes 53 facing each other among the plurality of electrodes 53 one by one. In this embodiment, the plurality of electrodes 53 includes four electrodes 531, 532, 533, and 534, and the electrodes 531, 534 on both sides are held by the pair of side wall portions 553 of the chemical liquid storage portion 55. Therefore, among the three aluminum foils F, the aluminum foil F1 passes between the electrodes 531 and 532, the aluminum foil F2 passes between the electrodes 532 and 533, and the aluminum foil F3 passes between the electrodes 533 and 534. Yes.

  Here, the aluminum foil F is at a higher potential than the electrode 53 (electrodes 531, 532, 533, 534). More specifically, a configuration in which a ground voltage is applied to the aluminum foil F by the power supply roller 69 and a negative potential is applied to the electrodes 53 (electrodes 531, 532, 533, and 534) is employed. Alternatively, a configuration in which a positive voltage is applied to the aluminum foil F by the power supply roller 69 and a ground potential is applied to the electrodes 53 (electrodes 531, 532, 533, and 534) is employed. Accordingly, all of the three aluminum foils F are subjected to direct current electrolysis (anodic oxidation) to form a chemical conversion foil Ff, and a dielectric layer (aluminium oxide) is formed on both surfaces of the chemical conversion foil Ff.

(Configuration of winding unit 70)
In FIG. 1 and FIG. 4B, in the aluminum foil continuous processing apparatus 100 of the present embodiment, the winding unit 70 rotates around the central axis Lb extending in the vertical direction as indicated by the arrow Qa. Three winding rolls Q (winding rolls Q1, Q2, Q3) are disposed. The winding rolls Q1, Q2, and Q3 and the feeding rolls R1, R2, and R3 have a one-to-one relationship, and the winding rolls Q1, Q2, and Q3 each have a width direction in the vertical direction (Z direction). Each of the aluminum foils F (aluminum foils F1, F2, F3) moving in a parallel state is wound up. More specifically, the winding roll Q1 winds up the aluminum foil F1 fed from the feeding roll R1, the winding roll Q2 winds up the aluminum foil F2 fed from the feeding roll R2, and the winding roll Q3 is the feeding roll R3. The aluminum foil F3 drawn out from is rolled up.

(Processing operation in this embodiment)
In the aluminum foil continuous processing apparatus 100 of the present embodiment, a plurality of long aluminum foils F (unetched foils) are extended from the feeding portion 20 in a state in which the width directions are parallel to each other in the vertical direction (Z direction). It pays out continuously in the direction. Further, the plurality of aluminum foils F that have been fed are continuously passed through the etching solution L3, the cleaning solution L4, and the chemical conversion solution L5 while maintaining the width direction in the vertical direction (Z direction). Etching, cleaning, and chemical conversion are performed. As a result, in the winding part 70, the three aluminum foils F are each wound up as the conversion foil Ff with the width direction directed in the vertical direction (Z direction).

(Main effects of this form)
As described above, in the aluminum foil continuous processing apparatus 100 of this embodiment, a plurality of long aluminum foils F are continuously arranged in the longitudinal direction in a state where the width directions are parallel to each other in the vertical direction (Z direction). To pay out. Further, the plurality of aluminum foils F that have been fed are continuously passed through the etching solution L3, the cleaning solution L4, and the chemical conversion solution L5 while maintaining the width direction in the vertical direction (Z direction). Etching, cleaning, and chemical conversion are performed. For this reason, since the aluminum foil F is not folded back and forth many times by the roller arranged in a horizontal posture, even if the aluminum foil F is cut, it takes a lot of trouble to pass the aluminum foil F again into the processing liquid. Do not need.

  In addition, since the aluminum foil F is oriented in the vertical direction in the width direction, it is not necessary to fold it up and down with a roller or the like when entering or leaving the processing liquid, and the number of times the aluminum foil F is folded back can be minimized. it can. Therefore, it is possible to suppress the quality deterioration caused by the folding of the aluminum foil F. For example, when performing continuous etching in the etching processing unit 30, an electroless etching state generated at a folded portion by a roller can be prevented, so that the etching magnification can be increased. Moreover, when performing continuous chemical conversion in the chemical conversion treatment part 50, it can prevent that a crack arises in chemical conversion film formation (anodized film) in the folding | turning part by a roller. Further, since the number of times of folding the aluminum foil F is small, even when the aluminum foil F having a thickness of 150 μm to 200 μm is used, an excessive force is not applied to the aluminum foil F. Therefore, even in the case of a thick aluminum foil F of about 150 μm to 200 μm, the foil breakage does not occur.

  In this embodiment, the aluminum foil F is simultaneously immersed in the processing liquid (etching liquid L3, cleaning liquid L4, chemical conversion liquid L5) as compared with the case where the aluminum foil F is folded back and forth many times by a roller arranged in a horizontal posture. Although the length of the aluminum foil F is shortened, since a plurality of aluminum foils F are processed at the same time, a significant reduction in productivity can be avoided.

  Further, in the processing liquid storage part (etching liquid storage part 35, cleaning liquid storage part 45, chemical conversion liquid storage part 55), the aluminum foil F enters from the entrance slit (entrance slits 351s, 451s, 551s) and exit slit ( Exit from the exit slits 352s, 452s, 552s). For this reason, when processing while moving the aluminum foil F with the width direction directed in the vertical direction, the treatment liquid is removed from the place where the aluminum foil F enters the treatment liquid reservoir and the place where the aluminum foil F comes out from the treatment liquid reservoir. Although leakage occurs, in this embodiment, the place where the aluminum foil F enters the treatment liquid storage part and the part where the aluminum foil F exits from the treatment liquid storage part are slit-like, so that the leakage of the treatment liquid can be reduced. it can.

  Further, in this embodiment, the processing liquid supply device (etching liquid supply device 36, cleaning liquid supply device 46, and the like) that supplies the processing liquid to the processing liquid reservoir (etching liquid reservoir 35, cleaning liquid reservoir 45, chemical liquid reservoir 55). Since the chemical liquid supply device 56) is provided, the processing liquid can be replenished to the processing liquid supply device as much as the processing liquid leaks from the processing liquid reservoir. Therefore, it can be maintained at a predetermined position on the liquid surface of the processing liquid. In addition, since the processing liquid recovery device (the etching liquid recovery device 37, the cleaning liquid recovery device 47, and the chemical conversion liquid recovery device 57) is provided, the loss of the processing liquid can be prevented. Further, since the processing liquid reflux path (etching liquid reflux path 39, cleaning liquid reflux path 49, chemical conversion liquid reflux path 59) for refluxing the processing liquid recovered by the processing liquid recovery apparatus to the processing liquid reservoir is configured. The processing liquid leaked from the liquid storage part can be returned to the processing liquid storage part. Therefore, consumption of the processing liquid when maintaining the liquid level of the processing liquid at a predetermined position can be suppressed.

  Further, the feeding unit 20 includes a plurality of vertical feeding rolls R that feed out the aluminum foil F while rotating around the central axis extending in the vertical direction, and the winding unit 70 is arranged around the central axis extending in the vertical direction. A plurality of vertical winding rolls Q for winding the aluminum foil F while rotating are provided. For this reason, even when processing the aluminum foil F while moving the width direction in the vertical direction, the aluminum foil F can be fed out and the aluminum foil F can be efficiently wound up.

  Furthermore, in the aluminum foil continuous processing apparatus 100 of the present embodiment, a plurality of processing liquid storage units are provided along the movement path of the aluminum foil F, and some of the processing liquid storage units ( AC etching is performed on each of the plurality of aluminum foils F in the etching solution storage unit 35), and DC electrolysis is performed on each of the plurality of aluminum foils F in another part of the processing solution storage unit (chemical conversion solution storage unit 55). Is called. For this reason, AC electrolysis and DC electrolysis with respect to the aluminum foil F can be performed by one aluminum foil continuous processing apparatus 100.

[Other embodiments]
In the aluminum foil continuous processing apparatus 100 according to the above-described embodiment, the etching process, the cleaning process, and the chemical conversion process are all performed by one unit, but the configuration in which the etching process and the cleaning process are performed by one unit (continuous etching apparatus). Alternatively, the present invention may be applied to an aluminum foil continuous treatment apparatus (continuous chemical conversion apparatus) configured to perform chemical conversion treatment and cleaning treatment.

  In the aluminum foil continuous processing apparatus 100 according to the above embodiment, AC etching was performed as AC electrolysis and chemical conversion (anodic oxidation) was performed as DC electrolysis, but AC etching was performed as AC electrolysis and DC etching was performed as DC electrolysis. You may apply this invention to the aluminum foil continuous processing apparatus (continuous etching apparatus) to perform.

  In the aluminum foil continuous processing apparatus 100 according to the above embodiment, alternating current is applied only to the electrodes 331 and 334 on both sides of the electrode 33 (electrodes 331, 332, 333, and 334) when performing alternating current etching. While supplying an alternating current to the electrodes 331, 332, 333, and 334, the aluminum foil F may be set to the ground potential. Alternatively, an alternating current may be applied between the electrode 33 (electrodes 331, 332, 333, 334) and the aluminum foil F.

  In the aluminum foil continuous processing apparatus 100 according to the above embodiment, there were no bent portions due to the rollers in the middle of the etching processing unit 30 and the chemical conversion processing unit 50, but to the extent that no significant deterioration occurs in the quality of the aluminum foil F. If so, a bent portion by a roller may be provided in the middle of the etching processing unit 30 and the chemical conversion processing unit 50. More specifically, if the number of bent portions by the roller is 3 or less, the quality deterioration of the aluminum foil F can be suppressed to a small level.

  In the aluminum foil continuous processing apparatus 100 according to the above embodiment, the present invention is applied to the continuous processing apparatus for the aluminum foil F. However, as a sheet-like workpiece, for aluminum foil or other metal foils, plastic sheets, or the like. You may apply this invention to the continuous processing apparatus etc. which perform the process other than electrolysis or electrolysis.

20 Feeding part (work feeding part)
30 etching process part 33 electrode (electrode for etching)
35 Etching solution reservoir (treatment solution reservoir)
36 Etching solution supply device (treatment solution supply device)
37 Etching solution recovery device (Treatment solution recovery device)
39 Etch solution reflux path (Treatment solution reflux path)
40 Cleaning processing section 45 Cleaning liquid storage section (processing liquid storage section)
46 Cleaning liquid supply device (processing liquid supply device)
47 Cleaning liquid recovery device (treatment liquid recovery device)
49 Cleaning liquid reflux path (Treatment liquid reflux path)
50 Chemical conversion treatment part 53 Electrode (electrode for chemical conversion)
55 Chemical conversion liquid storage part 56 Chemical conversion liquid supply apparatus (process liquid supply apparatus)
57 Chemical conversion liquid recovery equipment (treatment liquid recovery equipment)
59 Conversion liquid reflux path (Treatment liquid reflux path)
70 Winding part (sheet-like work winding part)
100 Aluminum foil continuous processing equipment (sheet-like workpiece continuous processing equipment)
351 s, 451 s, 551 s Entrance slit 351, 451, 551 Entrance side wall part 352 s, 452 s, 552 s Exit side slit 352, 452, 552 Exit side wall part F Aluminum foil (sheet-like workpiece)
Q Winding roll R Feeding roll L3 Etching solution (processing solution)
L4 cleaning solution (treatment solution)
L5 chemical conversion liquid (treatment liquid)

Claims (12)

A workpiece feeding unit that continuously feeds out a plurality of long sheet-like workpieces in the longitudinal direction in a state in which the widthwise direction is parallel to each other;
A treatment liquid storage part in which the treatment liquid continuously passing in a state in which the plurality of sheet-like works drawn out from the work supply part are parallel to each other in the width direction in the vertical direction;
A sheet-like workpiece continuous processing apparatus comprising:   The treatment liquid storage section includes an entrance wall portion having an entrance slit through which the sheet-like workpiece passes on the upstream side in the moving direction of the sheet-like workpiece, and the sheet-like workpiece on the downstream side in the moving direction of the sheet-like workpiece. An exit side wall portion provided with an exit side slit through which the sheet-like workpiece passes, a side wall portion opposed on both sides in the thickness direction of the sheet-like workpiece, and a bottom wall portion positioned below the sheet-like workpiece. The sheet-like workpiece continuous processing apparatus according to claim 1, wherein A treatment liquid supply device for supplying the treatment liquid to the treatment liquid reservoir;
A treatment liquid recovery apparatus for recovering the treatment liquid leaking from the treatment liquid storage unit;
The sheet-like workpiece continuous processing apparatus according to claim 1, wherein the sheet-like workpiece continuous processing apparatus is provided.   4. The sheet-like workpiece continuous processing apparatus according to claim 3, wherein a processing liquid reflux path is configured to return the processing liquid recovered by the processing liquid recovery apparatus to the processing liquid storage unit. The work payout portion includes a plurality of vertical payout rolls for paying out the sheet-like work while rotating around a central axis extending in the vertical direction.
On the downstream side of the movement path of the sheet-like workpiece, a workpiece winding unit provided with a plurality of vertical winding rolls for winding the sheet-like workpiece while rotating around a central axis extending in the vertical direction is provided. The sheet-like workpiece continuous processing apparatus according to any one of claims 1 to 4, wherein In the treatment liquid storage unit, three or more electrodes facing each other in a direction intersecting the moving direction of the sheet-like workpiece are arranged,
6. The sheet-like workpiece is subjected to electrolytic treatment by passing through one of the three or more electrodes facing each other one by one. The sheet-like workpiece continuous processing apparatus described in 1.   The sheet according to claim 6, wherein an alternating current is applied between electrodes arranged at both ends of the three or more electrodes to perform alternating current electrolysis on both surfaces of each of the plurality of sheet-like works. -Like workpiece continuous processing equipment.   Of the three or more electrodes, an alternating current is applied to two electrodes facing each other with the sheet-like workpiece interposed therebetween, and AC electrolysis is performed on both surfaces of each of the plurality of sheet-like workpieces. The sheet-like workpiece continuous processing apparatus according to claim 6.   7. The sheet-like workpiece continuous processing apparatus according to claim 6, wherein a DC current is applied between the electrode and the sheet-like workpiece to perform DC electrolysis on both surfaces of each of the plurality of sheet-like workpieces. A plurality of the treatment liquid reservoirs are provided along the movement path of the sheet-like workpiece,
Among the plurality of processing liquid storage units, AC electrolysis is performed on each of the plurality of sheet-like workpieces in some of the processing liquid storage units, and in the other part of the processing liquid storage units, 10. The sheet-like workpiece continuous processing apparatus according to any one of claims 6 to 9, wherein each is subjected to direct current electrolysis.   The sheet-like workpiece continuous processing apparatus according to any one of claims 6 to 10, wherein the sheet-like workpiece is an aluminum foil for an aluminum electrolytic capacitor.   A plurality of long sheet-like workpieces are continuously fed out in the longitudinal direction in a state where the width directions are parallel to each other in the up-down direction, and the plurality of sheet-like workpieces fed out are turned in the width direction in the up-down direction. A sheet-like workpiece continuous processing method, wherein the sheet-like workpiece is continuously passed through the processing liquid stored in the processing liquid storage section in a state of being parallel to each other.