JP2012141348A5 - - Google Patents

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Publication number
JP2012141348A5
JP2012141348A5 JP2010292056A JP2010292056A JP2012141348A5 JP 2012141348 A5 JP2012141348 A5 JP 2012141348A5 JP 2010292056 A JP2010292056 A JP 2010292056A JP 2010292056 A JP2010292056 A JP 2010292056A JP 2012141348 A5 JP2012141348 A5 JP 2012141348A5
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JP
Japan
Prior art keywords
electrode
reflective film
interference filter
substrate
wavelength
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2010292056A
Other languages
English (en)
Japanese (ja)
Other versions
JP5617621B2 (ja
JP2012141348A (ja
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Publication date
Application filed filed Critical
Priority to JP2010292056A priority Critical patent/JP5617621B2/ja
Priority claimed from JP2010292056A external-priority patent/JP5617621B2/ja
Publication of JP2012141348A publication Critical patent/JP2012141348A/ja
Publication of JP2012141348A5 publication Critical patent/JP2012141348A5/ja
Application granted granted Critical
Publication of JP5617621B2 publication Critical patent/JP5617621B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2010292056A 2010-12-28 2010-12-28 波長可変干渉フィルター、光モジュール、及び光分析装置 Expired - Fee Related JP5617621B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2010292056A JP5617621B2 (ja) 2010-12-28 2010-12-28 波長可変干渉フィルター、光モジュール、及び光分析装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010292056A JP5617621B2 (ja) 2010-12-28 2010-12-28 波長可変干渉フィルター、光モジュール、及び光分析装置

Publications (3)

Publication Number Publication Date
JP2012141348A JP2012141348A (ja) 2012-07-26
JP2012141348A5 true JP2012141348A5 (https=) 2013-12-26
JP5617621B2 JP5617621B2 (ja) 2014-11-05

Family

ID=46677731

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010292056A Expired - Fee Related JP5617621B2 (ja) 2010-12-28 2010-12-28 波長可変干渉フィルター、光モジュール、及び光分析装置

Country Status (1)

Country Link
JP (1) JP5617621B2 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6098197B2 (ja) 2013-02-05 2017-03-22 セイコーエプソン株式会社 光学フィルターデバイス、光学モジュール、及び電子機器
JP6669509B2 (ja) * 2016-01-28 2020-03-18 パイオニア株式会社 駆動装置及び光フィルタ
JP2020101820A (ja) * 2020-02-27 2020-07-02 パイオニア株式会社 駆動装置及び光フィルタ

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4852835B2 (ja) * 2004-09-02 2012-01-11 ソニー株式会社 回折格子−光変調装置集合体
US7734131B2 (en) * 2006-04-18 2010-06-08 Xerox Corporation Fabry-Perot tunable filter using a bonded pair of transparent substrates
US7623278B2 (en) * 2006-09-26 2009-11-24 Xerox Corporation MEMS Fabry-Perot inline color scanner for printing applications using stationary membranes
JP5798709B2 (ja) * 2009-03-04 2015-10-21 セイコーエプソン株式会社 光フィルター及びそれを備えた光モジュール
JP5316483B2 (ja) * 2010-06-18 2013-10-16 セイコーエプソン株式会社 光学デバイス、光学デバイスの製造方法、波長可変フィルタ、波長可変フィルタモジュール、および光スペクトラムアナライザ
JP2012141347A (ja) * 2010-12-28 2012-07-26 Seiko Epson Corp 波長可変干渉フィルター、光モジュール、及び光分析装置

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