JP2012141348A5 - - Google Patents
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- JP2012141348A5 JP2012141348A5 JP2010292056A JP2010292056A JP2012141348A5 JP 2012141348 A5 JP2012141348 A5 JP 2012141348A5 JP 2010292056 A JP2010292056 A JP 2010292056A JP 2010292056 A JP2010292056 A JP 2010292056A JP 2012141348 A5 JP2012141348 A5 JP 2012141348A5
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- Prior art keywords
- electrode
- reflective film
- interference filter
- substrate
- wavelength
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Claims (8)
前記第１基板と対向して位置する第２基板と、
前記第１基板の前記第２基板に対向する面に設けられた第１反射膜と、
前記第２基板の前記第１基板に対向する面に設けられ、前記第１反射膜と所定の隙間をもって位置する第２反射膜と、
前記第１基板に前記第１反射膜から離れて設けられた第１電極と、
前記第２基板に前記第２反射膜から離れて設けられた第２電極と、を備え、
前記第１反射膜に対して垂直方向で、前記第１電極と前記第２電極との距離は部分的に異なる距離に設定され、前記第１電極の第１の部分と前記第２電極との距離は前記所定の隙間よりも大きく、前記第１電極の第２の部分と前記第２電極との距離は前記所定の隙間よりも小さい
ことを特徴とする波長可変干渉フィルター。 A first substrate;
A second substrate positioned opposite the first substrate;
A first reflective film provided on a surface of the first substrate facing the second substrate;
A second reflective film provided on a surface of the second substrate facing the first substrate and positioned with a predetermined gap from the first reflective film;
A first electrode provided on the first substrate apart from the first reflective film;
A second electrode provided apart from the second reflective film on the second substrate,
The distance between the first electrode and the second electrode is set to a partially different distance in a direction perpendicular to the first reflective film, and the first portion of the first electrode and the second electrode the distance is greater than said predetermined gap, said distance between the second portion and the second electrode of the first electrode is variable wavelength interference filter, characterized in that less than said predetermined clearance.
前記第２反射膜と前記第２電極は、前記第２基板の同一平面に設けられ、
前記第１電極の前記第１の部分は、前記第１反射膜の垂直方向に、前記第１反射膜の表面とオーバーラップして前記第２電極に近づく位置にある
ことを特徴とする波長可変干渉フィルター。 The tunable interference filter according to claim 1,
The second reflective film and the second electrode are provided on the same plane of the second substrate,
The wavelength tunable according to claim 1, wherein the first portion of the first electrode is in a position perpendicular to the first reflective film and overlapping the surface of the first reflective film and approaching the second electrode. Interference filter.
前記第１電極は前記第１反射膜の外側に環状に位置し、
前記第２電極は前記第２反射膜の外側に環状に位置している
ことを特徴とする波長可変干渉フィルター。 The tunable interference filter according to claim 1 or 2,
The first electrode is annularly positioned outside the first reflective film,
The wavelength tunable interference filter, wherein the second electrode is annularly positioned outside the second reflective film.
前記第１電極の前記第２の部分は、前記第１電極の前記第１の部分よりも前記第１反射膜から遠くに位置する
ことを特徴とする波長可変干渉フィルター。 In the wavelength tunable interference filter according to any one of claims 1 to 3,
The wavelength tunable interference filter, wherein the second portion of the first electrode is located farther from the first reflective film than the first portion of the first electrode.
前記第１電極の前記第２の部分は、前記第１電極の前記第１の部分よりも前記第１反射膜の近くに位置する
ことを特徴とする波長可変干渉フィルター。 In the wavelength tunable interference filter according to any one of claims 1 to 3,
The variable wavelength interference filter according to claim 1, wherein the second portion of the first electrode is positioned closer to the first reflective film than the first portion of the first electrode.
前記第２反射膜は前記第１反射膜よりも大きく設定され、前記第２反射膜と前記第１電極の前記第２の部分とが当接する状態において、前記第１反射膜と前記第２反射膜とは離隔している
ことを特徴とする波長可変干渉フィルター。 The tunable interference filter according to claim 5,
The second reflective film is set to be larger than the first reflective film, and the first reflective film and the second reflective film are in a state where the second reflective film and the second portion of the first electrode are in contact with each other. A tunable interference filter characterized by being separated from the film.
前記波長可変干渉フィルターを透過した検査対象光を受光する受光手段と、を備える
ことを特徴とする光モジュール。 The wavelength variable interference filter according to any one of claims 1 to 6,
An optical module comprising: a light receiving unit configured to receive inspection target light transmitted through the wavelength variable interference filter.
前記光モジュールの前記受光手段により受光された光に基づいて、前記検査対象光の光特性を分析する分析処理部と、を備える
ことを特徴とする光分析装置。 An optical module according to claim 7,
An optical processing apparatus comprising: an analysis processing unit that analyzes optical characteristics of the inspection target light based on light received by the light receiving unit of the optical module.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010292056A JP5617621B2 (en) | 2010-12-28 | 2010-12-28 | Wavelength variable interference filter, optical module, and optical analyzer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010292056A JP5617621B2 (en) | 2010-12-28 | 2010-12-28 | Wavelength variable interference filter, optical module, and optical analyzer |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2012141348A JP2012141348A (en) | 2012-07-26 |
| JP2012141348A5 true JP2012141348A5 (en) | 2013-12-26 |
| JP5617621B2 JP5617621B2 (en) | 2014-11-05 |
Family
ID=46677731
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010292056A Expired - Fee Related JP5617621B2 (en) | 2010-12-28 | 2010-12-28 | Wavelength variable interference filter, optical module, and optical analyzer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5617621B2 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6098197B2 (en) | 2013-02-05 | 2017-03-22 | セイコーエプソン株式会社 | Optical filter device, optical module, and electronic apparatus |
| JP6669509B2 (en) * | 2016-01-28 | 2020-03-18 | パイオニア株式会社 | Driving device and optical filter |
| JP2020101820A (en) * | 2020-02-27 | 2020-07-02 | パイオニア株式会社 | Driving device and optical filter |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4852835B2 (en) * | 2004-09-02 | 2012-01-11 | ソニー株式会社 | Grating-light modulator assembly |
| US7734131B2 (en) * | 2006-04-18 | 2010-06-08 | Xerox Corporation | Fabry-Perot tunable filter using a bonded pair of transparent substrates |
| US7623278B2 (en) * | 2006-09-26 | 2009-11-24 | Xerox Corporation | MEMS Fabry-Perot inline color scanner for printing applications using stationary membranes |
| JP5798709B2 (en) * | 2009-03-04 | 2015-10-21 | セイコーエプソン株式会社 | Optical filter and optical module having the same |
| JP5316483B2 (en) * | 2010-06-18 | 2013-10-16 | セイコーエプソン株式会社 | Optical device, optical device manufacturing method, tunable filter, tunable filter module, and optical spectrum analyzer |
| JP2012141347A (en) * | 2010-12-28 | 2012-07-26 | Seiko Epson Corp | Wavelength variable interference filter, optical module, and optical analyzer |
-
2010
- 2010-12-28 JP JP2010292056A patent/JP5617621B2/en not_active Expired - Fee Related
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