JP2012133093A5 - - Google Patents

Download PDF

Info

Publication number
JP2012133093A5
JP2012133093A5 JP2010284574A JP2010284574A JP2012133093A5 JP 2012133093 A5 JP2012133093 A5 JP 2012133093A5 JP 2010284574 A JP2010284574 A JP 2010284574A JP 2010284574 A JP2010284574 A JP 2010284574A JP 2012133093 A5 JP2012133093 A5 JP 2012133093A5
Authority
JP
Japan
Prior art keywords
substrate
electrode
partial
actuators
interference filter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2010284574A
Other languages
English (en)
Japanese (ja)
Other versions
JP2012133093A (ja
JP5673075B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2010284574A priority Critical patent/JP5673075B2/ja
Priority claimed from JP2010284574A external-priority patent/JP5673075B2/ja
Priority to US13/331,568 priority patent/US20120154915A1/en
Priority to CN201110433595.6A priority patent/CN102540312B/zh
Publication of JP2012133093A publication Critical patent/JP2012133093A/ja
Publication of JP2012133093A5 publication Critical patent/JP2012133093A5/ja
Application granted granted Critical
Publication of JP5673075B2 publication Critical patent/JP5673075B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2010284574A 2010-12-21 2010-12-21 波長可変干渉フィルター、光モジュール、および光分析装置 Expired - Fee Related JP5673075B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2010284574A JP5673075B2 (ja) 2010-12-21 2010-12-21 波長可変干渉フィルター、光モジュール、および光分析装置
US13/331,568 US20120154915A1 (en) 2010-12-21 2011-12-20 Variable wavelength interference filter, optical filter device, optical module, and electronic apparatus
CN201110433595.6A CN102540312B (zh) 2010-12-21 2011-12-21 波长可变干涉滤波器、光学组件以及电子设备

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010284574A JP5673075B2 (ja) 2010-12-21 2010-12-21 波長可変干渉フィルター、光モジュール、および光分析装置

Publications (3)

Publication Number Publication Date
JP2012133093A JP2012133093A (ja) 2012-07-12
JP2012133093A5 true JP2012133093A5 (enrdf_load_stackoverflow) 2014-02-13
JP5673075B2 JP5673075B2 (ja) 2015-02-18

Family

ID=46648777

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010284574A Expired - Fee Related JP5673075B2 (ja) 2010-12-21 2010-12-21 波長可変干渉フィルター、光モジュール、および光分析装置

Country Status (1)

Country Link
JP (1) JP5673075B2 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5884393B2 (ja) * 2011-10-13 2016-03-15 セイコーエプソン株式会社 波長可変干渉フィルター、光学フィルターデバイス、光学モジュール、及び電子機器
JP2012150353A (ja) * 2011-01-20 2012-08-09 Seiko Epson Corp 波長可変干渉フィルター、光モジュール、および光分析装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2768812B1 (fr) * 1997-09-19 1999-10-22 Commissariat Energie Atomique Interferometre fabry-perot accordable integre
JP4561728B2 (ja) * 2006-11-02 2010-10-13 セイコーエプソン株式会社 光学デバイス、光学デバイスの製造方法、波長可変フィルタ、波長可変フィルタモジュール、および光スペクトラムアナライザ
JP2010230867A (ja) * 2009-03-26 2010-10-14 Olympus Corp 可変形状鏡システム
JP5724557B2 (ja) * 2011-04-07 2015-05-27 セイコーエプソン株式会社 波長可変干渉フィルター、光モジュール、および光分析装置

Similar Documents

Publication Publication Date Title
US9881977B2 (en) Flexible screen and bend identifying method thereof, flexible display apparatus
JP6128441B2 (ja) 動作検出装置
WO2021147454A1 (zh) 柔性电容触觉传感器及其制备方法和触觉传感系统
JP2012220656A5 (enrdf_load_stackoverflow)
JP2013238755A5 (enrdf_load_stackoverflow)
CN107111172B (zh) 液晶元件、偏转元件、液晶模块以及电子设备
US10707639B2 (en) Laser beam steering device and system including the same
US9482857B2 (en) Tunable interference filter, optical module, and photometric analyzer
KR20180053772A (ko) 단극 터치 센서 및 그 제조 방법
JP2014179062A5 (enrdf_load_stackoverflow)
KR101991721B1 (ko) 동일 평면 상의 수평 배치형 전극을 포함하는 압력 센서 및 그 제조 방법과 상기 압력 센서를 이용한 다축 촉각 센서
US9255782B2 (en) MEMS device including a mobile element and a resistive sensor, and method for generating a signal indicating the position of the mobile element
JP2012150353A5 (enrdf_load_stackoverflow)
US20120188552A1 (en) Variable wavelength interference filter, optical module, spectroscopic analyzer, and analyzer
JP5895414B2 (ja) 分光測定装置、及び分光測定方法
JP2013092474A5 (enrdf_load_stackoverflow)
JP2013072930A5 (enrdf_load_stackoverflow)
TW201234012A (en) Acceleration sensor
CN102866497B (zh) 平行度可调的微机电系统法布里珀罗腔波长可调谐滤波器
JP2012133093A5 (enrdf_load_stackoverflow)
JP2013029457A (ja) 電歪センサ
JP2015219153A (ja) スペクトルセンサ
JP2011209574A5 (enrdf_load_stackoverflow)
JP2008224262A5 (enrdf_load_stackoverflow)
US10429406B2 (en) Microelectromechanical structure with frames