JP2012128039A - Exposure apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an exposure apparatus in which an installation floor space of the exposure apparatus can be made smaller.SOLUTION: The exposure apparatus comprises: an optical engine 31; a first Y table 20R that is freely movable on a first X table 5R in Y direction by a linear guiding device 9R including a track 9Rb and a bearing 9Ra; a first XY table R, in which the bearing 9Ra supports less than 1/2 of the length of the first Y table 20R in Y direction; and a second XY table L which is arranged on the left side in Y direction of the optical engine 31 and whose configuration is symmetrical to the first XY table R with respect to a symmetrical surface P perpendicular to Y direction of the optical engine. A substantial support end (end surface 9Ra1f), which supports the first Y table 20R or the second Y table 20 L when the first Y table 20R or the second Y table 20 L is positioned at an exposure position, is arranged at 10 mm or less from the symmetrical surface P.

Description

  The present invention uses a spatial light modulator (Digital Micromirror Device; hereinafter referred to as “DMD”) or the like in place of a pattern mask, and the like, such as a printed circuit board having a photosensitive dry film or a liquid resist coated thereon. The present invention relates to a maskless exposure apparatus (hereinafter referred to as “exposure apparatus”) that exposes (draws) an electric circuit or the like on an exposure object (hereinafter referred to as “work”) with light such as ultraviolet light.

  The exposure apparatus includes an imaging device such as a CCD camera in addition to an optical engine (exposure head) which is an exposure means (drawing means). And the alignment mark previously arranged on the surface of the workpiece is read by an imaging device (alignment work), and exposure is performed based on the position of the read alignment mark (exposure work), thereby improving the drawing position accuracy. Since the optical engine as the exposure means is expensive, it is necessary to increase the usage rate of the optical engine in order to reduce the running cost.

  Therefore, first and second imaging regions each having an imaging device are provided on both sides of the processing region facing one optical engine, and the first XY table includes the first imaging region and the processing region in the first region. The XY table 2 is configured to be movable in the second imaging area and the machining area, and either the work on the first XY table or the second XY table on which the alignment work has been completed is optically detected. The technique of the exposure apparatus which exposes with an engine is disclosed (patent document 1). According to the technique of Patent Document 1, since the alignment work and the exposure work can be performed in parallel, the usage rate of the optical engine can be improved and the running cost can be reduced.

  By the way, since the focal depth of the optical engine is about 30 μm, it is necessary to keep the distance between the optical engine and the workpiece constant in order to perform exposure with high accuracy. In the case of the exposure apparatus disclosed in Patent Document 1, the first XY table can be placed in any position on the track by arranging bearings on both sides in the Y direction of the first Y table constituting the first XY table. It does not move in the Z direction perpendicular to the direction. Similarly, the second XY table does not move in the Z direction. Therefore, the distance between the optical engine and the workpiece is always constant, and high-precision drawing (exposure) can be performed.

JP 2009-223447 A

  In the case of the exposure apparatus of Patent Document 1, if the exposure width in the Y direction of the optical engine 4 is made equal to the maximum width of the workpiece, the width of Y in FIG. 3 of Patent Document 1 can be made about three times the width of the workpiece. . However, since the length in the X direction of the Y table (1al, 1ar) moving in the Y direction is almost the same as the length of the base 8 in the X direction, the table moving in the Y direction becomes heavy. Further, the number of workpiece carry-out devices can be one. However, while one of the XYθ tables exposes and carries the workpiece, the other cannot carry the workpiece. Therefore, in order to increase the operating rate, it is necessary to provide a loading device for each of the XYθ tables.

  SUMMARY OF THE INVENTION An object of the present invention is to provide an exposure apparatus that can reduce the installation floor area of the exposure apparatus and can provide a single work load / unload apparatus as a set or a single load / unload apparatus.

In order to solve the above-described problems, the present invention provides an exposure apparatus that exposes the work by relatively moving an optical engine that irradiates light and a work placed on a table. An optical engine having the same width as the workpiece in the Y direction, a first X table disposed in one of the Y directions of the optical engine and movable in the X direction perpendicular to the Y direction, a track and a bearing The first Y table is movable in the Y direction on the first X table by a linear guide device comprising: the bearing is less than half the length of the first Y table in the Y direction And a second XY that is arranged on the other side in the Y direction of the optical engine and is symmetrical with the first XY table with respect to a symmetry plane perpendicular to the Y direction of the optical engine. Table and the Therefore, when the first Y table and the second Y table are positioned at the exposure position, they are determined by the bearings or the auxiliary support means that support the first Y table and the second Y table. The substantial support end is arranged so that the distance from the symmetry plane is positioned at +10 mm or less.
As described above, in the present invention, the cantilever structure is substantially adopted in order to make the apparatus compact. However, the problem of the deflection caused by the structure is solved by adopting the above-described configuration.

  In this case, an end surface close to the symmetry plane of the bearing on the side close to the symmetry plane that supports the first Y table or the second Y table is used as the substantial support end, and the substantial support end. It is preferable to arrange such that the support end is positioned at a distance of +1 to +10 mm from the symmetry plane.

  The auxiliary support means has a symmetry plane perpendicular to the Y direction of the optical engine as a center plane, and the length in the X direction is equal to or greater than the movement range in the X direction of the first Y table and the second Y table. It can be set as the static pressure air bearing provided.

  The installation floor area of the exposure apparatus can be reduced, and one set of work loading / unloading apparatus or a single loading / unloading apparatus can be provided.

FIG. 1 is a partial sectional plan view of an exposure apparatus according to the present invention. FIG. 2 is a front view of the exposure apparatus according to the present invention. 3 is a cross-sectional view taken along the line AA in FIG. FIG. 4 is an operation explanatory diagram showing the positions of the Y table 20L and the Y table 20R in time series. FIG. 5 is a view corresponding to FIG. 3 of another exposure apparatus according to the present invention. FIG. 6 is a view corresponding to FIG. 3 of still another exposure apparatus according to the present invention. 7 is a cross-sectional view taken along line BB in FIG.

  The present invention will be described below with reference to the drawings.

1 is a partial cross-sectional plan view of an exposure apparatus 100 according to the present invention, FIG. 2 is a front view, and FIG. 3 is a cross-sectional view taken along line AA of FIG. Note that the length of the workpiece 22 in the Y direction (hereinafter simply referred to as “length”) is S, and the length in the X direction (hereinafter referred to as “width”) is T.
As shown in FIG. 1, the exposure apparatus 100 has a symmetry plane P perpendicular to the Y direction at least with respect to the optical engine 31 and the transport system, and the scale holder 2 is arranged so that the symmetry plane P becomes the center plane. . Linear scales 3 </ b> L and 3 </ b> R are arranged on the left and right side surfaces of the scale holder 2.
Two pairs of tracks 4b of the linear guide device 4 including the bearing 4a and the track 4b are arranged in the X direction on the bed 1 so as to be symmetrical with respect to the symmetry plane P.
The control device 40 controls the operation of each unit. Further, a loading device 50 for loading the workpiece 22 onto the Y table and a carrying-out device 51 for loading the workpiece 22 from the Y table in the vicinity of the base 1 are arranged so that the symmetry planes P are the respective center planes.

As shown in FIG. 2, bearings 4a that engage with the tracks 4b are fixed to the lower surfaces of the X tables 5R and 5L, respectively.
The stator 6Rk of the linear motor 6R composed of the mover 6Rm and the stator 6Rk is disposed on the upper surface of the bed 1, and the mover 6Rm is disposed on the lower surface of the X table 5R. The linear motor 6R drives the X table 5R. The stator 6Lk of the linear motor 6L composed of the mover 6Lm and the stator 6Lk is disposed on the upper surface of the bed 1, and the mover 6Lm is disposed on the lower surface of the X table 5L. The linear motor 6L drives the X table 5L. A dog 7R is disposed at a position facing the linear scale 3R of the X table 5R. The linear scale 3R detects the position of the dog 7R, that is, the X table 5R. A dog 7L is arranged at a position facing the linear scale 3L of the X table 5L. The linear scale 3L detects the position of the dog 7L, that is, the X table 5L. With the above configuration, the X tables 5L and 5R can be positioned on the bed 1 in the X direction.

  On the upper surface of the X table 5R, a C-axis table 8R that is rotatable in the XY plane is disposed. On the upper surface of the X table 5L, a C-axis table 8L that is rotatable in the XY plane is disposed. The center of rotation of the C-axis table 8L is (projection) symmetric with respect to the center of rotation of the C-axis table 8R with respect to the symmetry plane P. The C-axis tables 8R and 8L are positioned and controlled in the rotational direction with a precision of 0.0005 degrees by drive motors (not shown).

  Four bearings 9Ra of a linear guide device 9R including a bearing 9Ra and a track 9Rb are fixed on the upper surface of the C-axis table 8R. The four bearings 9Ra are rectangular in the X and Y directions so that when the C-axis table 8R is at the reference position (rotation angle is 0 degree), the engaging track 9Rb is in the Y direction perpendicular to the X direction. It is positioned at the apex position. The position of the bearing 9Ra in the Y direction will be described later.

  Two tracks 9Rb that engage with the bearings 9Ra are disposed on the lower surface of the Y table 20R. The Y table 20R has a length S in the Y direction and a width T in the X direction, which is the same as the size of the workpiece 22. The length of the track 9Rb in the Y direction is S. Two tracks 9Lb that engage with the bearings 9La are arranged on the lower surface of the Y table 20L. The Y table 20L has a length S in the Y direction and a width T in the X direction, which is the same as the size of the workpiece 22. The length of the track 9Lb in the Y direction is S. With the above configuration, the Y tables 20R and 20L are movable in the Y direction on the C-axis tables 8R and 8L at the reference position. The X table 5R, the C axis table 8R, and the Y table 20R form a first XY table R, and the X table 5L, the C axis table 8L, and the Y table 20L form a second XY table L, Each is composed. The standby position and exposure position of the Y tables 20R and 20L will be described later.

  Tables 21 are fixed to the upper surfaces of the Y tables 20R and 20L, respectively. A number of suction holes (not shown) are provided on the surface of the table 21. A work 22 as an object to be exposed is fixed to the surface of the table 21 by suction.

  The portal column 30 is fixed to the side surface of the bed 1. An optical engine 31 having a plurality of light sources arranged in the X and Y directions (the X direction may be a single row) is arranged at the center in the XY direction of the column 30. The optical engine 31 is positioned so that the light source array has a symmetry plane P perpendicular to the Y direction. The drive system 32 moves the optical engine 31 in the Z direction perpendicular to the XY plane. The moving range of the optical engine 31 is about 20 mm.

One or a plurality of imaging devices 34 (two in the figure) for reading alignment marks formed on the workpiece 22 are arranged on the support member 33 arranged on the side surface of the optical engine 31.
The drive system 35 moves the imaging device 34 in the Z direction. Note that the origin of movement is adjusted so that the focal position of the imaging device 34 is the same as the focal position of the optical engine 31.

Next, the standby position and exposure position of the Y table 20R and the position of the bearing 9Ra will be described.
Here, the configuration of the second XY table L is symmetric with respect to the first XY table R and the symmetry plane P. Accordingly, the first XY table R will be described.
As shown in FIG. 3A, the pair of bearings 9Ra1 is fixed to the C-axis table 8R so that the end surface 9Ra1f on the side close to the symmetry plane P is at a position separated from the symmetry plane P by the distance g. Yes. The pair of bearings 9Ra2 is fixed on the C-axis table 8R so that the end surface 9Ra2b on the side away from the symmetry plane P is at a position away from the symmetry plane P by a distance S / 2.
As shown in FIG. 3A, the standby position of the Y table 20R is such that when the C-axis table 8R is at the reference position, the left end of the Y table 20R is the right position from the symmetry plane P by the distance g, that is, the end face 9Ra1f. It is a position that has the same Y coordinate. Further, as shown in FIG. 3B, the exposure (drawing) position of the Y table 20R is such that when the C-axis table 8R is at the reference position, the left end of the Y table 20R is S / 2 left from the symmetry plane P. Is the position. When the Y table 20R is positioned at the exposure position, the Y coordinate of the right end of the track 9Rb matches the Y coordinate of the end surface 9Ra2b of the bearing 9Ra2. As indicated by the dotted line in the figure, the bearing 9La1 in the second XY table L corresponds to the bearing 9Ra1, the bearing 9La2 corresponds to the bearing 9Ra2, and the track 9Lb corresponds to the track 9Rb.

Next, the value of the distance g will be described.
In the present invention, the distance g can be set to 0 <g <S / 2. For example, when g = 0, when the Y table 20R positioned at the standby position and the Y table 20L positioned at the standby position are opposed to each other (when the X coordinate is set to the same value), the tips of the Y table 20R and the Y table 20L ( The sides close to the symmetry plane P) are in contact with each other on the symmetry plane P. In this case, both will interfere and it is not practical. As will be described later, when the value of g approaches S / 2, the displacement in the Z direction of the tip (left end) of the Y table 20R at the exposure position increases. Therefore, in practice, it is preferable to set the distance g = 1 to 10 mm.

The stator 10Rk of the linear motor 10R including the mover 10Rm and the stator 10Rk is arranged on the upper surface of the C-axis table 8R so as to be parallel to the track 9Rb. The mover 10Rm is disposed on the lower surface of the Y table 20R. The linear motor 10R drives the Y table 20R.
Although not shown, the stator 10Lk of the linear motor 10L including the mover 10Lm and the stator 10Lk is arranged on the upper surface of the C-axis table 8L so as to be parallel to the track 9Lb. The mover 10Lm is disposed on the lower surface of the Y table 20L. The linear motor 10L drives the Y table 20L.

  1, the distance in the X direction from the lower end of the base 1 (on the carry-in device 50 side) to the center of the imaging device 34, the distance in the X direction from the center of the imaging device 34 to the center of the optical engine 31, and the optical engine The distances in the X direction from the lower end in FIG. 1, the area from the lower end of the base 1 to the center of the imaging device 34 in FIG. 1 is the carry-in area D, the region from the center of the imaging apparatus 34 to the lower end of the optical engine 31 is the exposure area E, and the lower end of the optical engine 31. An area up to the upper end of the base 1 is referred to as an unloading area F.

Next, the operation of this embodiment will be described.
FIG. 4 is an operation explanatory diagram showing the positions of the Y table 20R and the Y table 20L in time series.
Prior to the start of processing, the Y table 20L positioned at the exposure position is positioned in the carry-in area D, and the Y table 20R positioned at the standby position is positioned in the carry-out area F.
Procedure 1. The workpiece 22 is placed on the Y table 20L. The Y table 20R is put on standby. (Fig. A)
Procedure 2. The Y table 20L is moved to the exposure area E, and the position of the alignment mark on the workpiece 22 is read. The Y table 20R is put on standby. (Fig. B)
When the position of the alignment mark is read, if the imaging device 34 is moved in the z direction for focusing, the optical engine 31 also moves in the z direction in accordance with the amount of movement. It is set to an optimal value.
Procedure 3. The Y table 20L is positioned at the standby position. The Y table 20R is put on standby. (Fig. C)
Procedure 4. The Y table 20L is put on standby. In this state, the Y table 20R is moved to the carry-in area D (d in the figure).
Procedure 5. The Y table 20L is positioned at the exposure position. The Y table 20R is positioned at the exposure position. (Fig. E)
Procedure 6. Based on the read alignment mark position, the C-axis table 8L is rotated to correct the tilt of the workpiece 22. Thereafter, the workpiece 22 is exposed while moving the Y table 20L in the direction of the carry-out area F. When the exposure is completed, the work 22 on the Y table 20L is carried out by the carry-out device 51. Further, after placing the work 22 on the Y table 20R, the Y table 20R is moved to the exposure area E, and the position of the alignment mark on the work 22 is read. (Fig. F)
In step 6, the position of the Y table 20R in the X direction is controlled so that the Y table 20R does not collide with the Y table 20L.
Step 7. The Y table 20L is positioned at the standby position, and the C-axis table 8L is positioned at the reference position. Further, the Y table 20R is positioned at the standby position. (Fig.g)
Procedure 8. The Y table 20L is moved to the carry-in area D. The Y table 20R is put on standby. (Fig. H)
Procedure 9. The Y table 20L is positioned at the exposure position, and the work 22 is placed on the Y table 20L. Thereafter, the Y table 20L is moved to the exposure area E, and the position of the alignment mark on the workpiece 22 is read. Further, the Y table 20R is positioned at the exposure position, and the C-axis table 8R is rotated based on the read position of the alignment mark to correct the tilt of the workpiece 22. Thereafter, the workpiece 22 is exposed while moving the Y table 20R in the direction of the carry-out area F. When the exposure is completed, the work 22 on the Y table 20R is unloaded by the unloading device 51, and the Y table 20R is positioned at the standby position and the C-axis table 8R is positioned at the reference position.
In step 9, the position of the Y table 20L in the X direction is controlled so that the Y table 20L does not collide with the Y table 20R.
When step 9 is completed, the Y table 20L and the Y table 20R return to the state shown in FIG. Thereafter, the operations in steps 3 to 9 are repeated until there is no unprocessed workpiece 22.

  In this embodiment, the right end of the Y table R at the standby position can be set to a distance of (S + g) from the symmetry plane P. Therefore, the distance from the symmetry plane P of the base 1 to both ends in the Y direction can also be (S + g). That is, since the width of the exposure apparatus 100 can be about twice the width of the workpiece 22, the exposure apparatus 100 can be reduced in size.

Further, since the Y table 20R and the Y table 20L can be positioned independently of each other with respect to the carry-in device and the carry-out device of the workpiece 22, the carry-in device and the carry-out device can be set as one set or as a single carry-in / out device.
In the following, a supplementary description will be given of a case where a single loading / unloading device is employed instead of a single loading / unloading device.
For example, when one loading / unloading device is arranged at the position of the loading device 50 in FIG. 1, the unloading area F is used as a standby area, and the workpiece 22 on the Y table 20L in the procedure 6 is not unloaded, After carrying out the workpiece 22 that has been exposed in the procedure 9, the workpiece 22 is placed on the Y table 20L.
Similarly, in the case of the Y table 20R, the work 22 that has been exposed in step 9 is not carried out, and the work 22 that has been exposed in the second and subsequent steps 6 is carried out, and then the work 22 is placed on the Y table 20L. Put.

Next, another embodiment of the present invention will be described.
FIGS. 5A and 5B are diagrams for explaining another embodiment of the present invention. FIG. 5A shows a case where the Y table 20R is positioned at the standby position, and FIG. 5B shows a case where the Y table 20R is positioned at the exposure position. , Respectively. That is, FIG. 5 is a diagram corresponding to FIG. 3 of the first embodiment.
In the first embodiment, the bearings 9Ra and 9La are arranged on the C-axis tables 8R and 8L, respectively, and the tracks 9Rb and 9Lb are arranged on the lower surfaces of the Y tables 20R and 20L, respectively, but in this embodiment, the bearings 9Ra and 9L are arranged on the C-axis tables 8R and 8L. The tracks 9Rb and 9Lb are arranged, and the bearings 9Ra and 9La are arranged on the lower surfaces of the Y tables 20R and 20L. That is, taking the first XY table R as an example, as shown in FIG. 5A, the left end surface is a plane of symmetry P on the C-axis table 8R in which the track 9Rb having the length S is positioned at the reference position. To be a distance g. Further, the end surface 9Ra1f of the bearing 9Ra1 is arranged at a position (S / 2 + g) from the symmetry plane P of the lower surface of the Y table 20R positioned at the standby position, and the end face 9Ra2b of the bearing 9Ra2 is arranged at a position (S + g) from the symmetry plane P. To do.
In this manner, as shown in FIG. 5B, when the Y table 20R is positioned at the exposure position, the positions of the bearing 9Ra1 and the bearing 9Ra2 in the Y direction are the same positions as the bearing 9Ra1 and the bearing 9Ra2 in the first embodiment. become. That is, also in this embodiment, since the right end of the Y table R at the standby position is a distance of (S + g) from the symmetry plane P, the width of the exposure apparatus 100 can be approximately twice the width of the workpiece 22. . In addition, since the Y table 20R and the Y table 20L can be positioned independently of each other on the carry-in device and the carry-out device for the workpiece 22, the carry-in device and the carry-out device can be combined into a single set or a single loading / unloading device. Since the operation is the same as that of the first embodiment, a duplicate description is omitted.

  By the way, in the first embodiment, the tracks 9Rb and 9Lb can be strength members of the Y tables 20R and 20L, respectively, whereas in the second embodiment, the tracks 9Rb and 9Lb are arranged on the C-axis tables 8R and 8L, respectively. Is done. Therefore, when the structures of the Y tables 20R and 20L are the same, the displacement in the Z direction at the exposure position of the tips of the Y tables 20R and 20L in the second embodiment may be larger than that in the first embodiment.

Next, still another embodiment of the present invention will be described.
FIG. 6 is a diagram for explaining still another embodiment of the present invention and corresponds to FIG. 3 of the first embodiment. FIG. 7 is a sectional view taken along line BB in FIG. Note that a plan view and a front view of the exposure apparatus 100 can be easily understood from FIGS. Moreover, the same thing as Example 1 or the thing of the same function attaches | subjects the same code | symbol, and abbreviate | omits the overlapping description.
In this embodiment, a static pressure air bearing 61 in place of the scale holder 2 in the first embodiment is arranged so as to center on a symmetry plane P perpendicular to the Y direction of the bed 1. The length of the static pressure air bearing 61 in the X direction is longer than the movement range of the Y tables 20R and 20L in the X direction.

  As shown in FIG. 6, the static pressure air bearing 61 is formed of a holding body 61a made of an airtight material such as metal and a porous material 61b (here, porous ceramics). The hollow portion 61c of the holding body 61a is connected to a compressed air source (not shown). The compressed air supplied to the hollow portion 61c passes through the porous material 61b and is ejected upward in the figure. The holding body 61 a is fixed to the upper surface of the base 1. The width (the length in the Y direction) of the porous material 61b is Hmm. Linear scales 3 </ b> L and 3 </ b> R are disposed on the left and right side surfaces of the static pressure air bearing 61.

Next, the relationship between the static pressure air bearing 61 and the Y tables 20R and 20L will be described. Also in this embodiment, the XY table L is symmetrical with respect to the first XY table R and the plane of symmetry P. Therefore, the relationship between the static pressure air bearing 61 and the Y table 20R will be described.
When the C-axis table 8R is at the reference position, the C-axis table 8R is disposed at a position where the left end is a distance k from the symmetry plane P. Note that the distance k is determined to be a value at which the end portion in the X direction of the Y table 20R does not interfere with the right side surface of the holding body 61a when the C-axis table 8R rotates by an angle θ.

  The pair of bearings 9Ra1 is fixed to the C-axis table 8R so that the end face 9Ra1f on the side close to the symmetry plane P is located at a distance k from the symmetry plane P. The pair of bearings 9Ra2 is fixed on the C-axis table 8R so that the end surface 9Ra2b on the side away from the symmetry plane P is at a position away from the symmetry plane P by a distance S / 2.

  The length of the Y table 20R is S. The standby position is a position where the left end of the Y table 20R is at a distance g from the symmetry plane P when the C-axis table 8R is at the reference position, as in the first embodiment. Further, the exposure position of the Y table 20R is a position where the left end of the Y table 20R is S / 2 left from the symmetry plane P when the C-axis table 8R is at the reference position. A track 9Rb having a pair of lengths S is fixed to the lower surface of the Y table 20R. When the Y table 20R is in the standby position, the track 9Rb has the left end at the position from the symmetry plane P to g and the right end at the position from the symmetry plane P to S + g. Therefore, when the Y table 20R is positioned at the exposure position, the Y coordinate of the right end of the track 9Rb matches the Y coordinate of the right end 9Ra2b of the bearing 9Ra2.

  A support 23R having a square cross section is fixed to the lower surface of the Y table 20R. The left end of the support 23R is arranged on the same plane as the left end of the Y table 20R, and the total length in the Y direction is (S / 2 + H / 2) mm or more. In addition, as shown in FIG. 7, the support 23R is disposed so as to be equidistant from the two pairs of bearings 9Ra1 and 9Ra2. The lower surface of the support 23R (surface facing the porous material 61b) is finished to be a mirror surface. The support 23R is fixed to the Y table 20R so that the distance from the lower surface to the upper surface of the porous material 61b is 2 μm. As shown in the figure, the lower surface of the track 9Rb is arranged to be higher than the lower surface of the support 23R.

The stator 10Rk of the linear motor 10R including the mover 10Rm and the stator 10Rk is arranged on the upper surface of the C-axis table 8R so as to be parallel to the track 9Rb. The mover 10Rm is arranged at a position facing the stator 10Rk on the bottom surface of the Y table 20R. The linear motor 10R drives the Y table 20R. In this embodiment, the lengths of the Y tables 20R and 20L in the X direction are slightly longer than T.
Because of the above configuration, when the C-axis tables 8R and 8L are at the reference position, the Y-coordinates of the Y tables 20R and 20L positioned at the standby position are the same as each other, as in the first and second embodiments. The distance between the two is 2 g. And like the case of Example 1, 2, it is preferable that the distance g shall be 1-10 mm.

  In this embodiment, when the pressure and flow rate of the compressed air supplied to the hollow portion 61c are adjusted so that the portions overhanging the bearings 9Ra1 and 9La1 of the Y table 20R and the Y table 20L are supported by the static pressure air bearing 61, the exposure position The substantial overhang length of the Y tables 20R and 20L at (S / 2−H / 2). Therefore, in the present embodiment, the displacement in the Z direction on the free end side of the Y tables 20R and 20L at the time of exposure can be made smaller than in the first and second embodiments. Also in this embodiment, since the right end of the Y table R at the standby position is a distance (S + g) from the symmetry plane P, the width of the exposure apparatus 100 can be about twice the width of the workpiece 22. . Further, since the Y table 20R and the Y table 20R can be positioned independently of each other with respect to the loading device and the unloading device for the workpiece 22, the loading device and the unloading device can be set as one set or as a loading and unloading device. Since the operation is the same as that of the first embodiment, a duplicate description is omitted.

Next, in the present invention, since the Y table 20R is basically in a cantilever state, displacement (deflection) in the Z direction may occur.
Assuming that the cross-sectional shape in the XZ plane of the Y table 20R is constant in the Y direction, the own weight of the Y table 20R and the weight of the work 22 are applied to the Y table 20R as equally distributed loads in the Y direction. Assuming that “deflection due to the weight of the cantilever beam”, assuming that the length of the beam is Q and the displacement (maximum deflection) in the Z direction of the left end of the beam is δ, the following equation 1 is obtained.
δ = (3ρQ ⁴ ) / (2h ² E) (Equation 1)
Here, the density of the beam is ρ, the Young's modulus is E, and the height (thickness) in the Z direction is h.
In the case of iron-based stainless steel, density ρ = 8000 kg / m ³ and Young's modulus E = 200 GPa.

The maximum deflection δ is examined using the above-mentioned “deflection due to the weight of the cantilever beam” model, where the length S × width T of the Y table 20R is 600 mm × 500 mm and the material is iron-based stainless steel.
First, in the case of Example 1 or 2, the end surface 9Ra1f on the side close to the symmetry plane P of the bearing 9Ra1 is considered to be a substantial support end (fixed end), and the distance G = g from the symmetry plane P of the substantial support end. become. Therefore, since the length of the overhang portion is Q = S / 2 + G = S / 2 + g ≦ 300 + 10 = 310 mm, if the thickness is 14 mm or more, δ <28 μm, which is smaller than the depth of focus of the optical engine 31 of 30 μm. Can be. Therefore, even when the left end of the Y table 20R is a free end during exposure, high-precision exposure can be performed by using iron-based stainless steel and having a thickness of 14 mm or more. Here, it is not practical to set g to a value exceeding 10 mm because the table thickness must be further increased in order to suppress the maximum deflection within the focal depth.

  Next, the case of Example 3 will be examined. In this case, the substantial support end is considered to be the left end of the hydrostatic air bearing, and the distance G from the symmetry plane P of the substantial support end is G = −H / 2. Accordingly, if the width H of the static pressure air bearing 61 is 100 mm, the length of the overhang portion is Q = S / 2 + G = S / 2−H / 2 = 300−50 = 250 mm, so the thickness is 9 mm or more. Then, δ <29 μm. Therefore, in this case, high precision exposure can be performed by using iron-based stainless steel for the Y table 20R and setting the thickness to 9 mm or more.

  In the present invention, the Y table 20R and the Y table 20L have the same height in the Z direction and are also separated in the horizontal direction, so that dust generated from one drive system or the like of the Y table is the other Y table. Can be prevented from adhering to the surface.

  In each of the above embodiments, the C-axis table is provided between the X table and the Y table, but the C-axis table may not be provided.

  In general, the exposure apparatus takes the longest time for exposure, so that the machining efficiency can be improved by making the longer one of the workpieces 22 in the Y direction as in the above three embodiments.

5L 2nd X table 5R 1st X table 9R, 9L Linear guide device 9Ra, 9La Bearing 9Rb, 9Lb Orbit 9Ra1f, 9La1f End face 9Ra2b, 9La2b End face 20R First Y table 22 Work 31 Optical engine P Symmetric plane P 2 XY tables R 1st XY table

Claims (3)

In an exposure apparatus that exposes the work by relatively moving an optical engine that irradiates light and a work placed on a table,
An optical engine in which the irradiation width of the light in the Y direction is the same as the width of the workpiece in the Y direction;
The first X table is arranged on one side in the Y direction of the optical engine and can be moved in the X direction perpendicular to the Y direction, and a linear guide device comprising a track and a bearing on the first X table. A first Y table that is movable in a direction, and the bearing supports less than half of the length of the first Y table in the Y direction;
A second XY table arranged on the other side in the Y direction of the optical engine and symmetric with respect to the first XY table with respect to a plane of symmetry perpendicular to the Y direction of the optical engine;
Provided,
Substantially determined by the bearing or auxiliary support means for supporting the first Y table or the second Y table when the first Y table or the second Y table is positioned at the exposure position. An exposure apparatus, wherein the support end is positioned such that the distance from the symmetry plane is +10 mm or less. An end surface close to the symmetry plane of the bearing on the side close to the symmetry plane that supports the first Y table or the second Y table is defined as the substantial support end, and the substantial support end. The exposure apparatus according to claim 1, wherein the exposure apparatus is arranged so as to be positioned at a distance of +1 to +10 mm from the symmetry plane. The auxiliary support means has a symmetry plane perpendicular to the Y direction of the optical engine as a center plane, and the length in the X direction is greater than or equal to the movement range in the X direction of the first Y table and the second Y table. The static pressure air bearing provided as
The exposure apparatus according to claim 1, wherein:

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