JP2012127805A - 形状測定装置 - Google Patents

形状測定装置 Download PDF

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Publication number
JP2012127805A
JP2012127805A JP2010279590A JP2010279590A JP2012127805A JP 2012127805 A JP2012127805 A JP 2012127805A JP 2010279590 A JP2010279590 A JP 2010279590A JP 2010279590 A JP2010279590 A JP 2010279590A JP 2012127805 A JP2012127805 A JP 2012127805A
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JP
Japan
Prior art keywords
light
unit
measurement
measurable range
measured
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Pending
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JP2010279590A
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English (en)
Japanese (ja)
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JP2012127805A5 (enrdf_load_stackoverflow
Inventor
Makoto Takagi
誠 高木
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Nikon Corp
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Nikon Corp
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Priority to JP2010279590A priority Critical patent/JP2012127805A/ja
Publication of JP2012127805A publication Critical patent/JP2012127805A/ja
Publication of JP2012127805A5 publication Critical patent/JP2012127805A5/ja
Pending legal-status Critical Current

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  • Length Measuring Devices By Optical Means (AREA)
JP2010279590A 2010-12-15 2010-12-15 形状測定装置 Pending JP2012127805A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2010279590A JP2012127805A (ja) 2010-12-15 2010-12-15 形状測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010279590A JP2012127805A (ja) 2010-12-15 2010-12-15 形状測定装置

Publications (2)

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JP2012127805A true JP2012127805A (ja) 2012-07-05
JP2012127805A5 JP2012127805A5 (enrdf_load_stackoverflow) 2014-01-23

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JP2010279590A Pending JP2012127805A (ja) 2010-12-15 2010-12-15 形状測定装置

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JP (1) JP2012127805A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102014218642A1 (de) 2013-09-18 2015-03-19 Mitutoyo Corp. Koordinatenmessvorrichtung
JP2018044962A (ja) * 2017-12-26 2018-03-22 株式会社ミツトヨ 三次元測定装置
JP2019090753A (ja) * 2017-11-16 2019-06-13 株式会社ミツトヨ 三次元測定装置

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09196632A (ja) * 1995-11-17 1997-07-31 Minolta Co Ltd ３次元計測のための分光装置
JP2000131034A (ja) * 1998-10-23 2000-05-12 Minolta Co Ltd ３次元入力装置
JP2004163346A (ja) * 2002-11-15 2004-06-10 Kanto Auto Works Ltd 非接触式三次元形状計測装置
JP2008107260A (ja) * 2006-10-27 2008-05-08 Yamatake Corp 照明装置
JP2008304215A (ja) * 2007-06-05 2008-12-18 Anritsu Corp センサヘッド及び変位測定器

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09196632A (ja) * 1995-11-17 1997-07-31 Minolta Co Ltd ３次元計測のための分光装置
JP2000131034A (ja) * 1998-10-23 2000-05-12 Minolta Co Ltd ３次元入力装置
JP2004163346A (ja) * 2002-11-15 2004-06-10 Kanto Auto Works Ltd 非接触式三次元形状計測装置
JP2008107260A (ja) * 2006-10-27 2008-05-08 Yamatake Corp 照明装置
JP2008304215A (ja) * 2007-06-05 2008-12-18 Anritsu Corp センサヘッド及び変位測定器

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102014218642A1 (de) 2013-09-18 2015-03-19 Mitutoyo Corp. Koordinatenmessvorrichtung
CN104457609A (zh) * 2013-09-18 2015-03-25 株式会社三丰 坐标测量设备
JP2015059825A (ja) * 2013-09-18 2015-03-30 株式会社ミツトヨ 三次元測定装置
US9354041B2 (en) 2013-09-18 2016-05-31 Mitutoyo Corporation Coordinate measuring apparatus
DE102014218642B4 (de) 2013-09-18 2019-03-14 Mitutoyo Corp. Verfahren zum Betreiben einer Koordinatenmessvorrichtung
CN104457609B (zh) * 2013-09-18 2021-03-09 株式会社三丰 坐标测量设备
JP2019090753A (ja) * 2017-11-16 2019-06-13 株式会社ミツトヨ 三次元測定装置
US10636273B2 (en) 2017-11-16 2020-04-28 Mitutoyo Corporation Coordinate measuring device
JP2018044962A (ja) * 2017-12-26 2018-03-22 株式会社ミツトヨ 三次元測定装置

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