JP2012122790A5 - - Google Patents

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Publication number
JP2012122790A5
JP2012122790A5 JP2010272281A JP2010272281A JP2012122790A5 JP 2012122790 A5 JP2012122790 A5 JP 2012122790A5 JP 2010272281 A JP2010272281 A JP 2010272281A JP 2010272281 A JP2010272281 A JP 2010272281A JP 2012122790 A5 JP2012122790 A5 JP 2012122790A5
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JP
Japan
Prior art keywords
transducer element
sheet
substrate
sensor device
point
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2010272281A
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English (en)
Japanese (ja)
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JP2012122790A (ja
JP5633349B2 (ja
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Application filed filed Critical
Priority to JP2010272281A priority Critical patent/JP5633349B2/ja
Priority claimed from JP2010272281A external-priority patent/JP5633349B2/ja
Publication of JP2012122790A publication Critical patent/JP2012122790A/ja
Publication of JP2012122790A5 publication Critical patent/JP2012122790A5/ja
Application granted granted Critical
Publication of JP5633349B2 publication Critical patent/JP5633349B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2010272281A 2010-12-07 2010-12-07 センサー装置及びセンサー装置アレイ Expired - Fee Related JP5633349B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2010272281A JP5633349B2 (ja) 2010-12-07 2010-12-07 センサー装置及びセンサー装置アレイ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010272281A JP5633349B2 (ja) 2010-12-07 2010-12-07 センサー装置及びセンサー装置アレイ

Publications (3)

Publication Number Publication Date
JP2012122790A JP2012122790A (ja) 2012-06-28
JP2012122790A5 true JP2012122790A5 (enrdf_load_stackoverflow) 2014-01-23
JP5633349B2 JP5633349B2 (ja) 2014-12-03

Family

ID=46504382

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010272281A Expired - Fee Related JP5633349B2 (ja) 2010-12-07 2010-12-07 センサー装置及びセンサー装置アレイ

Country Status (1)

Country Link
JP (1) JP5633349B2 (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3708987A1 (en) * 2019-03-14 2020-09-16 Koninklijke Philips N.V. Two-dimensional force sensor
JP2023006241A (ja) * 2021-06-30 2023-01-18 セイコーエプソン株式会社 圧電センサーおよびハンド
JP2023006242A (ja) * 2021-06-30 2023-01-18 セイコーエプソン株式会社 圧電センサーおよびハンド

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6136937Y2 (enrdf_load_stackoverflow) * 1980-09-04 1986-10-25
JPH073377B2 (ja) * 1990-04-02 1995-01-18 株式会社村田製作所 圧電型圧力分布センサ
JP2006093424A (ja) * 2004-09-24 2006-04-06 Ngk Insulators Ltd 圧電／電歪デバイス
JP2008082947A (ja) * 2006-09-28 2008-04-10 Hiroshima Univ 挟み込み剪断力センサおよび挟み込み剪断力測定装置
EP2202501A1 (en) * 2008-12-23 2010-06-30 ETH Zürich Hollow piezoelectric device for distingishing forces and torques
JP5560980B2 (ja) * 2010-07-14 2014-07-30 セイコーエプソン株式会社 センサー素子アレイ及びその製造方法

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