JP2012108067A - Thickness measuring method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a thickness measuring method by which the need to parallelism correcting of a probe and a measurement table is eliminated, it is not necessary to use any special probe, a thickness dimension of an object to be measured can be measured highly accurately, and a measuring force can also be adjusted.SOLUTION: A thickness measuring method includes a preparation step of preparing a measuring tool 3 having a tool body 31 having a lower end face 31A2 and an upper end face 31B1 which are parallel to each other and an auxiliary weight 32 which is removably mounted in the tool body 31 and of which the weight can be adjusted, a reference position setting step of placing the lower end face 31A2 on a measurement table 15, abutting a probe 18 to the upper end face 31B1 and setting a moving amount of a spindle 17 at such a time as a reference position, and a measurement step of placing a film 2 on the measurement table 15, then placing the lower end face 31A2 on the film 2, abutting the probe 18 to the upper end face 31B1, and determining a thickness dimension T of the film 2 from a difference between a moving amount of the spindle 17 at such a time and the reference position.

Description

  The present invention relates to a thickness measuring method.

  Conventionally, as a thickness measurement method for measuring the thickness of a film as an object to be measured, it is provided so that it can be moved in the vertical direction and in a direction to move closer to and away from the measurement table. The film is placed on the measurement table using a measuring instrument having a spindle having a flat measuring element and an urging means for urging the spindle in a direction in which the flat measuring element of the spindle protrudes downward. A thickness measurement method is known in which a film is sandwiched between a flat probe and a measurement table, and the thickness dimension of the film is measured from the amount of movement of the spindle.

  Further, in such a conventional thickness measuring method, it is necessary to correct the warp of the film, but depending on the material of the film, the pressing force (measurement force) for pressing the film required to correct the warp of the film differs. Therefore, it is necessary to adjust the measuring force. As a solution to this problem, a method is known in which an auxiliary weight whose weight can be adjusted is detachable between the flat probe and the spindle, and the measuring force is adjusted by changing the weight of the auxiliary weight ( For example, see Patent Document 1).

JP 2010-197338 A

In such a conventional thickness measuring method, it is necessary to perform a paralleling operation in order to make the flat probe and the measurement table parallel. In order to perform this paralleling operation, the flat probe is joined to the spindle while the flat probe and the measurement table are in contact with each other. For this reason, it is difficult to replace the probe, and a flat probe having a special shape must be used. In addition, due to the deflection caused by the movement of the spindle, the flat probe and the measurement table may not be parallel during the movement range of the spindle, that is, the flat probe and the film may not be parallel. become unable.
Furthermore, the method described in Patent Document 1 can adjust the measurement force, but cannot solve the above-described problem.

  The object of the present invention is that it is not necessary to use a measuring element and a measuring table in parallel, a special measuring element is not required, the thickness dimension of the object to be measured can be measured with high accuracy, and the measuring force is adjusted. Another object of the present invention is to provide a thickness measuring method that can be used.

The thickness measuring method of the present invention includes a main body, a spindle that is movable in a vertical direction on the main body and that is movable in a direction approaching and separating from the measurement table, and a measuring element on the lower end. Thickness measurement that measures the thickness dimension of the object to be measured using a measuring device that measures the dimension of the object to be measured from the amount of movement of the spindle. A jig body having a first reference surface at one end and a second reference surface parallel to the first reference surface at the other end, and detachably attached to the jig body Preparing a measurement jig having an auxiliary weight whose weight can be adjusted; placing the first reference surface of the measurement jig on the measurement table; and placing the first reference surface of the measurement jig on the second reference surface of the measurement jig At this time, contact the probe A reference position setting step for setting the amount of movement of the spindle as a reference position, and after placing the object to be measured on the measurement table, place the first reference surface of the measuring jig on the object to be measured. And a measuring step of bringing the measuring element into contact with the second reference surface of the measuring jig and obtaining a thickness dimension of the object to be measured from a difference between the moving amount of the spindle and the reference position at this time. It is characterized by that.

  According to such a configuration, since the jig body having the first reference surface and the second reference surface that are parallel to each other is used in the reference position setting step and the measurement step, the parallel operation of the measuring element and the measurement table is performed. It becomes unnecessary. Further, it is not necessary to use a special measuring element as in the prior art, and even if the spindle moves, it is between the first reference surface and the second reference surface of the jig body and the measurement table, that is, the first of the jig body. Since the reference surface and the second reference surface and the object to be measured remain parallel, the thickness dimension of the object to be measured can be measured with high accuracy. The measuring force of the measuring instrument is the sum of the urging force applied to the object to be measured by the urging means in the spindle and the measuring element, the weight of the jig body, and the weight of the auxiliary weight. According to the above configuration, the auxiliary weight whose weight can be adjusted is used in the reference position setting step and the measurement step, so that the measurement force can be adjusted. For example, even if the measurement object is a different material, Warpage can be reliably corrected, and the thickness dimension of the object to be measured can be measured appropriately.

  In the thickness measuring method of the present invention, the jig body has a plate-like pressing element having the first reference surface at one end and the second reference surface formed at a right angle with respect to the pressing element. It is preferable that the first reference surface is formed in a larger area than the second reference surface.

  According to such a configuration, the first reference surface having a larger area than the second reference surface comes into contact with the object to be measured, and the object to be measured is pressed by the presser having such a first reference surface. Even a soft object to be measured can be uniformly pressed by the pressing element, and the thickness dimension of the object to be measured can be accurately measured.

  In the thickness measuring method of the present invention, it is preferable that the auxiliary weight has a plurality of weight pieces each having an insertion hole that can be inserted into the measuring rod from the second reference surface side of the measuring rod.

  According to such a configuration, since the weight piece can be attached to the measurement rod by simply inserting the insertion hole formed in the weight piece into the measurement rod, the weight of the auxiliary weight can be easily adjusted, and thus the measurement force can be reduced. Easy to adjust.

The perspective view which shows the measuring device which concerns on embodiment of this invention. It is a figure which shows the measuring method which concerns on embodiment of this invention, (A) is a figure which shows a reference position setting process, (B) is a figure which shows a measuring process.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
The measuring instrument 1 shown in FIG. 1 includes a base 11, and a protruding head portion 13 is integrally formed on a column 12 erected on the base 11. In the present embodiment, the base 11, the column 12, and the head portion 13 constitute a main body. A digital display 14 is provided on the front surface of the head unit 13. A measurement table 15 for placing a film 2 (see FIG. 2) as an object to be measured is provided on the upper surface of the base 11, and an operation panel 16 having a power source and other various switches is provided on the front surface of the base 11. It has been incorporated. A thickness measuring device (not shown) for measuring the thickness dimension T of the film 2 is incorporated in the head portion 13.

As shown in FIGS. 1 and 2, the thickness measuring apparatus includes a spindle 17 having a measuring element 18 at the lower end.
The spindle 17 is held by a holder (not shown) provided in the thickness measuring device, and is provided so as to be movable together with the holder in a vertical direction (up and down direction in FIG. 2) and in a direction approaching and separating from the measurement table 15. Yes. Further, the spindle 17 is urged in a direction in which the measuring element 18 protrudes downward (downward direction in FIG. 2) by an urging means (not shown) provided in the thickness measuring device. Examples of the urging means include a disc-shaped weight (not shown) provided in the thickness measuring device. The weight is arranged at a predetermined position, and the moment acting on the holder side is slightly increased by the lever principle. Therefore, the spindle 17 is always urged downward in FIG. 2 using this weight.

  On the holder, a main scale (not shown) having a predetermined scale is erected in the vertical direction in FIG. The scale surface of the main scale and the axes of the spindle 17 and the measuring element 18 are arranged on a straight line. An index scale (not shown) having a predetermined scale and a movement amount detector (not shown) incorporating a light source, a light receiving element, and a detection circuit (not shown) are provided at a position facing the main scale. The amount of movement in the vertical direction in FIG. 2, that is, the amount of movement of the probe 18 in the vertical direction in FIG. 2 is detected. The detected movement amount is displayed on the digital display 14. Note that the movement amount detection means for detecting the movement amount of the spindle 17 is not limited to this movement amount detector.

The measuring jig 3 shown in FIG. 2 has a jig body 31 and an auxiliary weight 32.
The jig body 31 has a pressing element 31A and a measuring rod 31B. The pressing element 31A has a disk shape, and has an upper end surface 31A1 and a lower end surface 31A2 as a first reference surface parallel to the upper end surface 31A1. Both the upper end surface 31A1 and the lower end surface 31A2 are formed in parallel to the mounting surface 15a of the measurement table 15.
The measuring rod 31B has a cylindrical shape and is formed at right angles to the pressing element 31A. The measuring rod 31B has an upper end surface 31B1 as a second reference surface and a lower end surface 31B2 parallel to the upper end surface 31B1. Both the upper end surface 31B1 and the lower end surface 31B2 are formed in parallel to the mounting surface 15a of the measurement table 15. Therefore, the lower end surface 31A2 of the pressing element 31A and the upper end surface 31B1 of the measuring rod 31B are parallel to each other and also parallel to the placement surface 15a. Further, the lower end surface 31A2 of the pressing element 31A is formed with a larger area than the upper end surface 31B1 of the measuring rod 31B.

  The auxiliary weight 32 can be attached to and detached from the jig main body 31, and is formed in a disc shape with an insertion hole 322 that can be inserted into the measuring rod 31B from the upper end surface 31B1 side of the measuring rod 31B. A plurality of weight pieces 321 having the same value. In the present embodiment, the auxiliary weight 32 is configured by stacking up to four weight pieces 321 vertically in FIG. Each weight piece 321 can be attached to the measurement rod 31B by inserting the insertion hole 322 into the measurement rod 31B, and the weight piece 321 can be detached from the measurement rod 31B via the insertion hole 322. Therefore, the weight W2 of the auxiliary weight 32 can be adjusted by changing the number of weight pieces 321 attached to the measuring rod 31B.

Next, a thickness measuring method for measuring the thickness dimension T of the film 2 using the measuring instrument 1 and the measuring jig 3 will be described.
First, in a preparation process, a start switch (not shown) formed on the operation panel 16 is pressed to drive a drive machine (not shown) provided in the thickness measuring device. By driving the driving machine, the measuring element 18 is raised by a predetermined amount via the holder and the spindle 17 and stopped. Then, the measurement jig 3 is prepared.

  Thereafter, in the reference position setting step shown in FIG. 2A, the lower end surface 31A2 of the pressing element 31A is placed on the placement surface 15a of the measurement table 15, and the two weight pieces 321 are placed on the measurement bar 31B at the lowest position. Put on top and bottom in order from the side. Then, a lowering switch (not shown) of the operation panel 16 is pressed to drive the drive unit, the holder and the spindle 17 are moved downward, and the probe 18 is attached to the upper end surface 31B1 of the measuring rod 31B on which the two weight pieces 321 are mounted. Abut. At this time, a reset button (not shown) on the operation panel 16 is pressed to set the display on the digital display 14 to zero. Thereby, the amount of movement of the spindle 17 at this time is set as the reference position. When the display on the digital display 14 is set to 0, a lift switch (not shown) of the operation panel 16 is pressed to drive the drive unit, and the holder, spindle 17 and measuring element 18 are moved upward, and the measuring element 18 is moved to the upper end surface. A predetermined distance from 31B1.

2B, the film 2 is placed on the placement surface 15a of the measurement table 15, and two weight pieces 321 are mounted on the film 2 in the reference position setting step. The lower end surface 31A2 of the pressing element 31A of the jig body 31 is placed.
At this time, when the film 2 is warped so as to be convex upward, it is conceivable that the weight W2 of the auxiliary weight 32 is light. In such a case, one or two weight pieces 321 are further attached to the measuring rod 31B, and the weight W2 of the auxiliary weight 32 is adjusted to change the weight W21 shown in FIG. ) To make the film 2 parallel to the mounting surface 15 a of the measurement table 15 by correcting the warp of the film 2.

  When a measurement switch (not shown) on the operation panel 16 is operated to the measurement mode, the holder, the spindle 17 and the measuring element 18 are moved downward, and the measurement is performed on the upper end surface 31B1 of the measuring bar 31B on which the four weight pieces 321 are mounted. The child 18 is contacted. Then, the movement amount of the probe 18 at this time, that is, the movement amount of the spindle 17 is detected by the movement amount detector, and the detected movement amount is displayed on the digital display 14. The thickness dimension T of the film 2 is obtained from the difference between the amount of movement of the spindle 17 at this time and the reference position of the spindle 17 set in the reference position setting step. In this embodiment, since the display of the digital display 14 is set to 0 at the reference position of the spindle 17, the display value displayed on the digital display 14 in the state shown in FIG. It becomes the thickness dimension T.

The thickness measuring method of the present embodiment as described above has the following effects.
In the thickness measurement method of the present embodiment, the jig body 31 having the lower end surface 31A2 and the upper end surface 31B1 that are parallel to and parallel to the mounting surface 15a of the measurement table 15 in the reference position setting step and the measurement step. Accordingly, the parallel operation of the measuring element 18 and the measurement table 15 becomes unnecessary. Further, it is not necessary to use a special measuring element as in the prior art, and even if the spindle 17 moves in the vertical direction in FIG. 2, the lower end surface 31A2, the upper end surface 31B1 and the measuring table 15, that is, the lower end surface 31A2 and Since the space between the upper end surface 31B1 and the film 2 remains parallel, the thickness dimension T of the film 2 can be measured with high accuracy. The measuring force F of the measuring instrument 1 includes an urging force f1 applied to the film 2 by the urging means in the spindle 17 and the measuring element 18, a self-weight W1 of the jig body 31, and a weight W2 of the auxiliary weight 32. Is the sum of In the thickness measurement method of this embodiment, in the reference position setting step and the measurement step, the auxiliary weight 32 whose weight W2 can be adjusted from the weight W21 shown in FIG. 2 (A) to the weight W22 shown in FIG. 2 (B). Therefore, even if the film 2 is made of a different material, the warp of the film 2 can be reliably corrected, and the thickness dimension T of the film 2 can be measured appropriately.

It should be noted that the present invention is not limited to the above-described embodiments, and modifications, improvements, and the like within the scope that can achieve the object of the present invention are included in the present invention.
In the above embodiment, the film 2 has been described as an object to be measured. However, the film 2 is suitable for a relatively soft material such as paper, plastic, or felt fabric, but the material is not limited.
In the above embodiment, the measuring instrument 1 as shown in FIG. 1 has been described as the measuring instrument. However, the measuring instrument 1 may be provided with a spindle and a measuring element, and may be an indicator or a dial gauge. In this case, measurement is performed by attaching these indicators and dial gauges to a stand having a measurement table.
In the above-described embodiment, the disk-shaped weight has been described as the biasing means. However, a spring that biases the spindle 17 downward in FIG. 2 may be used, or a disk-shaped weight and a spring may be used. You may use together.

In the embodiment, in the reference position setting step, the jig body 31 is first placed on the placement surface 15 a of the measurement table 15, and the auxiliary weight 32 is attached to the jig body 31. The auxiliary weight 32 may be attached in advance, and the jig body 31 on which the auxiliary weight 32 is attached in advance may be placed on the placement surface 15a.
In the above-described embodiment, the jig body 31 is described as having the pressing element 31A and the measuring rod 31B. It may be a simple substance.

In the above-described embodiment, the auxiliary weight 32 has been described as being configured by vertically stacking up to four weight pieces 321. However, the auxiliary weight 32 may be a single unit that is integrally formed as a whole.
In the above-described embodiment, the auxiliary weight 32 is described as being configured by vertically stacking up to four weight pieces 321 having the same weight as the outer shape. However, the auxiliary weight 32 is configured by vertically stacking four or more. The weight pieces 321 may have different external shapes and weights.

  The present invention can be used in a thickness measuring method.

1 ... Measuring instrument 2 ... Film (object to be measured)
3 ... Measurement jig 11 ... Base (main body)
12 ... Column (body)
13 ... Head (body)
DESCRIPTION OF SYMBOLS 15 ... Measurement table 17 ... Spindle 18 ... Measuring element 31 ... Jig body 31A ... Presser 31B ... Measuring rod 31A2 ... Lower end surface (1st reference surface)
31B1 ... Upper end surface (second reference surface)
32 ... Auxiliary weight 321 ... Weight piece 322 ... Insertion hole T ... Thickness dimensions W2, W21, W22 ... Weight

Claims (3)

A main body, a spindle that is movable in a vertical direction on the main body and movable in a direction approaching and separating from the measurement table, and has a measuring element at a lower end; and the spindle in a direction in which the measuring element of the spindle protrudes downward A thickness measuring method for measuring the thickness dimension of the object to be measured using a measuring device that measures the dimension of the object to be measured from the amount of movement of the spindle,
A jig main body having a first reference surface at one end and a second reference surface parallel to the first reference surface at the other end, and detachably attached to the jig main body, the weight can be adjusted. A preparation step of preparing a measuring jig having a proper auxiliary weight;
The first reference surface of the measurement jig is placed on the measurement table, and the measuring element is brought into contact with the second reference surface of the measurement jig, and the amount of movement of the spindle at this time is set as a reference position. A reference position setting process,
After placing the object to be measured on the measurement table, the first reference surface of the measuring jig is placed on the object to be measured, and the measuring element is applied to the second reference surface of the measuring jig. And a measuring step for obtaining a thickness dimension of the object to be measured from a difference between the amount of movement of the spindle and the reference position at this time. In the thickness measuring method according to claim 1,
The jig body has a plate-like pressing element having the first reference surface at one end, and a measuring rod formed at a right angle to the pressing element and having the second reference surface at the other end, The thickness measuring method, wherein the first reference surface is formed in a larger area than the second reference surface. In the thickness measuring method according to claim 2,
The thickness measurement method, wherein the auxiliary weight has a plurality of weight pieces in which insertion holes that can be inserted into the measurement rod from the second reference plane side of the measurement rod are formed at the center.

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