JP2012106341A5 - - Google Patents

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Publication number
JP2012106341A5
JP2012106341A5 JP2012055615A JP2012055615A JP2012106341A5 JP 2012106341 A5 JP2012106341 A5 JP 2012106341A5 JP 2012055615 A JP2012055615 A JP 2012055615A JP 2012055615 A JP2012055615 A JP 2012055615A JP 2012106341 A5 JP2012106341 A5 JP 2012106341A5
Authority
JP
Japan
Prior art keywords
fluororesin
group
cmp apparatus
thermoplastic resin
adhesive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2012055615A
Other languages
English (en)
Japanese (ja)
Other versions
JP2012106341A (ja
JP5472344B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2012055615A priority Critical patent/JP5472344B2/ja
Priority claimed from JP2012055615A external-priority patent/JP5472344B2/ja
Publication of JP2012106341A publication Critical patent/JP2012106341A/ja
Publication of JP2012106341A5 publication Critical patent/JP2012106341A5/ja
Application granted granted Critical
Publication of JP5472344B2 publication Critical patent/JP5472344B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2012055615A 2012-03-13 2012-03-13 Ｃｍｐ装置 Expired - Fee Related JP5472344B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2012055615A JP5472344B2 (ja) 2012-03-13 2012-03-13 Ｃｍｐ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012055615A JP5472344B2 (ja) 2012-03-13 2012-03-13 Ｃｍｐ装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2006070032A Division JP2007245266A (ja) 2006-03-14 2006-03-14 Ｃｍｐ装置

Publications (3)

Publication Number Publication Date
JP2012106341A JP2012106341A (ja) 2012-06-07
JP2012106341A5 true JP2012106341A5 (enrdf_load_stackoverflow) 2012-11-22
JP5472344B2 JP5472344B2 (ja) 2014-04-16

Family

ID=46492538

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012055615A Expired - Fee Related JP5472344B2 (ja) 2012-03-13 2012-03-13 Ｃｍｐ装置

Country Status (1)

Country Link
JP (1) JP5472344B2 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7224128B2 (ja) * 2018-08-09 2023-02-17 株式会社荏原製作所 基板用洗浄具、基板洗浄装置、基板処理装置、基板処理方法および基板用洗浄具の製造方法
KR20230073308A (ko) * 2020-09-30 2023-05-25 다이킨 고교 가부시키가이샤 불소 수지, 적층체 및 튜브

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3286682B2 (ja) * 1992-10-15 2002-05-27 東ソー株式会社 ポリフェニレンスルフィド樹脂組成物および光反射用成形品
JP2003133270A (ja) * 2001-10-26 2003-05-09 Jsr Corp 化学機械研磨用窓材及び研磨パッド
JP2003179021A (ja) * 2001-12-11 2003-06-27 Sony Corp 化学機械研磨装置
JP2005288286A (ja) * 2004-03-31 2005-10-20 Nippon Paper Industries Co Ltd ハードコートフィルムの製造方法及びハードコートフィルム

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