JP2012103072A5

JP2012103072A5 -

Info

Publication number: JP2012103072A5
Application number: JP2010250948A
Authority: JP
Filing date: 2010-11-09
Publication date: 2013-12-12
Anticipated expiration: 2030-11-09

Description

上述した課題を解決し、目的を達成するために、本発明にかかる位置合わせ装置は、撮像部を有する光学ユニットと基板とを相対移動させ、レシピに登録された前記基板上の測定座標位置に光学ユニットを位置決めする位置合せ装置であって、前記測定座標位置、検査測定のための高倍レシピ画像、および前記高倍レシピ画像の視野領域が含まれる低倍レシピ画像を記憶する記憶部と、前記測定座標位置において前記撮像部により高倍率で撮像された検査画像を前記低倍レシピ画像と同等の画素分解能となるように縮小処理し、この縮小画像が前記低倍レシピ画像のどの位置にあるか検索する検索部と、前記検索部による検索結果に基づいて前記縮小画像と前記低倍レシピ画像に設定された前記高倍レシピ画像の視野領域とのずれ量と方向を算出する算出部と、前記算出部で算出した位置情報をもとに、前記基板上の測定座標位置に前記光学ユニットの視野が合うように前記光学ユニットと前記基板を相対移動させた後、前記撮像部で検査画像を撮像させる制御を行う制御部と、を備えたことを特徴とする。 In order to solve the above-described problems and achieve the object, an alignment apparatus according to the present invention moves an optical unit having an imaging unit and a substrate relative to each other to a measurement coordinate position on the substrate registered in a recipe. An alignment apparatus for positioning an optical unit, the storage unit storing the measurement coordinate position, a high-magnification recipe image for inspection measurement, and a low-magnification recipe image including a field area of the high-magnification recipe image, and the measurement The inspection image captured at a high magnification by the imaging unit at the coordinate position is reduced so as to have a pixel resolution equivalent to that of the low-magnification recipe image, and the position of the reduced-magnification recipe image is searched. a search unit that, the shift amount and direction of the viewing area of the set the high magnification recipe image the said reduced image to the low-magnification recipe image based on the search result by the search unit A calculation unit for output, based on the position information calculated by the calculation unit, after the substrate and the optical unit so that the field of view of the optical unit is aligned to the measurement coordinate position on the substrate are relatively moved, wherein And a control unit that controls the imaging unit to capture the inspection image.

上述した課題を解決し、目的を達成するために、本発明にかかる位置合わせ方法は、撮像部を有する光学ユニットと基板とを相対移動させ、レシピに登録された前記基板上の測定座標位置に光学ユニットを位置決めする位置合せ方法であって、前記測定座標位置、検査測定のための高倍レシピ画像、および前記高倍レシピ画像の視野領域が含まれる低倍レシピ画像を記憶部に登録させるレシピ登録ステップと、前記測定座標位置に前記光学ユニットを移動させ、前記測定座標位置において前記撮像部により前記高倍レシピ画像と同等の倍率で撮像する検査画像撮像ステップと、前記検査画像撮像ステップで取得された検査画像を前記低倍レシピ画像と同等の画素分解能となるように縮小処理する縮小処理ステップと、縮小処理ステップで縮小された縮小画像が前記低倍レシピ画像のどの位置にあるか検索する検索ステップと、前記検索ステップによる検索結果に基づいて前記縮小画像と前記低倍レシピ画像に設定された前記高倍レシピ画像の視野領域とのずれ量と方向を算出する算出ステップと、前記算出ステップで算出した位置情報をもとに、前記基板上の測定座標位置に前記光学ユニットの視野が合うように前記光学ユニットと前記基板を相対移動させた後、前記撮像部で検査画像を撮像させる移動撮像ステップと、を含むことを特徴とする。 In order to solve the above-described problems and achieve the object, the alignment method according to the present invention moves the optical unit having the imaging unit and the substrate relative to each other to the measurement coordinate position on the substrate registered in the recipe. An alignment method for positioning an optical unit , wherein a recipe registration step is performed to register a low-magnification recipe image including the measurement coordinate position, a high-magnification recipe image for inspection measurement, and a field area of the high-magnification recipe image in a storage unit. And an inspection image imaging step in which the optical unit is moved to the measurement coordinate position and the imaging unit captures an image at a magnification equivalent to the high-magnification recipe image at the measurement coordinate position, and the inspection acquired in the inspection image imaging step and reduction processing step of the reduction process the image so that the a low-magnification recipe image equivalent pixel resolution, reduction in the reduction process step A search step of the reduced image searches whether the position of the low-magnification recipe image throat that, the field of view of the search the said reduced image based on the search result of step low magnification recipe the high magnification recipe image set in the image A calculation step for calculating a deviation amount and a direction from the region; and the optical unit and the substrate so that the field of view of the optical unit matches the measurement coordinate position on the substrate based on the position information calculated in the calculation step. the after relative movement, characterized in that it comprises a, a moving image capturing step of capturing an inspection image by the imaging unit.

上述した課題を解決し、目的を達成するために、本発明にかかる位置合わせプログラムは、撮像部を有する光学ユニットと基板とを相対移動させ、レシピに登録された基板上の測定座標位置に光学ユニットを合わせる位置合わせ装置に、前記測定座標位置、検査測定のための高倍レシピ画像、および前記高倍レシピ画像の視野領域が含まれる低倍レシピ画像を記憶部に登録させるレシピ登録手順と、前記測定座標位置に前記光学ユニットを移動させ、前記測定座標位置において前記撮像部により前記高倍レシピ画像と同等の倍率で撮像する検査画像撮像手順と、前記検査画像撮像手順で取得された検査画像を前記低倍レシピ画像と同等の画素分解能となるように縮小処理する縮小処理手順と、縮小処理手順で縮小された縮小画像が前記低倍レシピ画像のどの位置にあるか検索する検索手順と、前記検索手順による検索結果に基づいて前記縮小画像と前記低倍レシピ画像に設定された前記高倍レシピ画像の視野領域とのずれ量と方向を算出する算出手順と、前記算出手順で算出した前記位置情報をもとに、前記基板上の測定座標位置に前記光学ユニットの視野が合うように前記光学ユニットと前記基板を相対移動させた後、前記撮像部で検査画像を撮像させる移動撮像手順と、を実行させることを特徴とする。 In order to solve the above-described problems and achieve the object, an alignment program according to the present invention moves an optical unit having an imaging unit and a substrate relative to each other, and optically positions the measurement coordinate position on the substrate registered in the recipe. the alignment device to align the unit, the measuring coordinate positions, inspecting high-magnification recipe image, and a recipe registration procedure for registering a low-magnification recipe image including the viewing area of the high magnification recipe image in the storage unit, the measurement for measurement The optical unit is moved to a coordinate position, and an inspection image imaging procedure in which the imaging unit captures an image at a magnification equivalent to the high-magnification recipe image at the measurement coordinate position, and an inspection image acquired by the inspection image imaging procedure is magnification and reduction processing procedure of reduction processing so that the recipe image equivalent to the pixel resolution is reduced images reduced by the reduction procedure wherein the low dancing A search procedure for searching whether which position of the pin image, the shift amount and direction of the search procedure the said reduced image based on the search result by set in the low magnification recipe image field of view area of the high magnification recipe image a calculating procedure calculates for, on the basis of the position information calculated by the calculation procedure, after the substrate and the optical unit so that the field of view of the optical unit is aligned to the measurement coordinate position on the substrate are relatively moved, And a moving imaging procedure for causing the imaging unit to capture an inspection image.

Claims

An alignment apparatus that relatively moves an optical unit having an imaging unit and a substrate, and positions the optical unit at a measurement coordinate position on the substrate registered in a recipe ,
A storage unit that stores the measurement coordinate position, a high-magnification recipe image for inspection measurement, and a low-magnification recipe image including a field area of the high-magnification recipe image ;
The inspection image captured at a high magnification by the imaging unit at the measurement coordinate position is reduced so as to have a pixel resolution equivalent to that of the low-magnification recipe image, and the reduced image is located at any position of the low-magnification recipe image. and to search for the search unit or,
A calculation unit that calculates a shift amount and a direction between the reduced image and the visual field region of the high-magnification recipe image set in the low-magnification recipe image based on a search result by the retrieval unit;
Based on the position information calculated by the calculation unit , the optical unit and the substrate are relatively moved so that the field of view of the optical unit matches the measurement coordinate position on the substrate, and then the inspection image is displayed by the imaging unit. A control unit that performs control of imaging, and
An alignment apparatus comprising:

The alignment apparatus according to claim 1, wherein the high-magnification recipe image is an enlarged image of a part of the low-magnification recipe image and includes a pattern to be measured.

The alignment apparatus according to claim 1, wherein an area of a visual field area of the low-magnification recipe image is twice or more an area of a visual field area of the high-magnification recipe image.

The alignment apparatus according to claim 1, wherein the high-magnification recipe image and the low-magnification recipe image have the same visual field center position.

An alignment method of positioning an optical unit at a measurement coordinate position on the substrate registered in a recipe by relatively moving an optical unit having an imaging unit and the substrate ,
A recipe registration step for registering the measurement coordinate position, a high-magnification recipe image for inspection measurement, and a low-magnification recipe image including a visual field area of the high-magnification recipe image in a storage unit;
An inspection image imaging step of moving the optical unit to the measurement coordinate position and imaging at the measurement coordinate position by the imaging unit at a magnification equivalent to the high-magnification recipe image;
A reduction processing step for reducing the inspection image acquired in the inspection image imaging step so as to have a pixel resolution equivalent to that of the low-magnification recipe image ;
A search step for searching in which position of the reduced-size recipe image the reduced image reduced in the reduction processing step ;
A calculation step for calculating a deviation amount and a direction between the reduced image and the visual field region of the high-magnification recipe image set in the low-magnification recipe image based on a retrieval result by the retrieval step;
Based on the position information calculated in the calculation step, the optical unit and the substrate are relatively moved so that the field of view of the optical unit is aligned with the measurement coordinate position on the substrate, and then an inspection image is captured by the imaging unit. A moving imaging step to image;
A registration method characterized by comprising:

To the alignment device that moves the optical unit having the imaging unit relative to the substrate and aligns the optical unit with the measurement coordinate position on the substrate registered in the recipe ,
Recipe registration procedure for registering the measurement coordinate position, a high-magnification recipe image for inspection measurement, and a low-magnification recipe image including a field area of the high-magnification recipe image in a storage unit;
An inspection image imaging procedure for moving the optical unit to the measurement coordinate position and imaging at the measurement coordinate position by the imaging unit at a magnification equivalent to the high-magnification recipe image;
A reduction processing procedure for reducing the inspection image acquired in the inspection image imaging procedure so as to have a pixel resolution equivalent to that of the low-magnification recipe image;
A search procedure for searching in which position in the low-magnification recipe image the reduced image reduced in the reduction processing procedure ;
A calculation procedure for calculating a shift amount and a direction between the reduced image and the field-of-view area of the high-magnification recipe image set in the low-magnification recipe image based on a search result by the search procedure;
Based on the position information calculated in the calculation procedure, the optical unit and the substrate are moved relative to each other so that the field of view of the optical unit matches the measurement coordinate position on the substrate, and then an inspection image is obtained by the imaging unit. Moving imaging procedure for imaging
An alignment program characterized in that