JP2012102652A - Vacuum pump - Google Patents

Abstract

PROBLEM TO BE SOLVED: To efficiently reduce heat radiated from a vacuum pump to the vacuum device side.SOLUTION: A heat exchanger having a plate-shaped heat shielding member having an inclined face not parallel to both the axis of the vacuum pump and an intake opening surface, is arranged in an upper area of a rotary blade and a fixed blade (a blade) on the intake port side of the vacuum pump, and a net-shaped heat shielding member supported by the heat exchanger is also arranged in an upper area on the intake port side of the vacuum pump. A cooling mechanism of contacting with the heat exchanger is arranged on the outer periphery of the heat exchanger. The net-shaped heat shielding member is molded by a mesh of the opening ratio being low in a central part having a diameter equal to an intake port side end surface area of a rotor of the vacuum pump, and is molded by a mesh of the opening ratio being high in an area (an area for arranging the rotary blade and the fixed blade) for enclosing the periphery of the central part, so that the heat radiated to the vacuum device side can be efficiently reduced while restraining reduction in exhaust performance of a gas transfer mechanism of the vacuum pump.

Description

  The present invention relates to a vacuum pump, and more particularly to a vacuum pump having a radiant heat reduction structure that suppresses heat generated in a vacuum pump body from being conducted to a vacuum device.

Among various vacuum pumps, a turbo molecular pump is often used to realize a high vacuum environment.
The turbo molecular pump is configured such that the rotor rotates at a high speed inside a casing forming an exterior body having an intake port and an exhaust port. Fixed blades are arranged in multiple stages on the inner peripheral surface of the casing, and rotor blades are arranged radially and in multiple stages on the rotor. Thus, when the rotor rotates at high speed, the gas is sucked from the intake port and discharged from the exhaust port by the action of the rotary blade and the fixed blade.
Since the turbo molecular pump with such a structure performs exhaust processing by rotating the turbine at high speed, the pump body may be heated to a high temperature state due to collision heat of gas molecules or heat generated from the motor, etc. The heat radiated from the turbo molecular pump generated in this way may have an adverse effect if it is conducted to the vacuum device side.

For example, vacuum devices that are kept in a vacuum by performing exhaust processing using a vacuum pump such as a turbo molecular pump include semiconductor manufacturing equipment chambers, electron microscope measurement rooms, surface analysis equipment, and microfabrication equipment. and so on. Since such a vacuum device is affected by heat due to the process and measurement characteristics of the vacuum device, an error occurs in the measurement, and thus there is a high need to suppress the transmission of heat.
Specifically, in the case of a surface analysis device or a microfabrication device, when heated by heat radiated from a vacuum pump, there may be a problem that errors in measurement accuracy and processing accuracy increase.
Thus, when the vacuum apparatus itself is affected by the heat radiated from the vacuum pump disposed in the vacuum apparatus, it is difficult to realize more precise processing and higher-precision measurement. Met.
Therefore, conventionally, as in the following patent document, in order to reduce the influence of heat radiated from the vacuum pump, a technique for preventing overheating on the vacuum apparatus side by suppressing the transfer of heat from the vacuum pump has been proposed. .

JP 2005-337071 A JP 2004-239258 A

In Patent Document 1, a radiant heat reduction structure including a heat shield mechanism and a cooling mechanism is provided upstream of the gas transfer mechanism of the vacuum pump to reduce the influence of radiant heat received by the vacuum chamber (vacuum apparatus). Technology is disclosed.
More specifically, in the heat shield mechanism, the support, the uppermost spacer, and the surface treatment with an emissivity of 0.8 or more on the downstream surface and an emissivity of 0.1 or less on the upstream surface are performed. The heat shield plate is arranged so that the region projected onto the gas transfer mechanism side of the vacuum pump is substantially equal to the region where the rotor part of the vacuum pump faces the intake port. .
In addition, the cooling mechanism is configured by a water cooling system including a cooling pipe and a cooling pipe jacket provided on the outer peripheral portion of the uppermost spacer through the casing (vacuum pump casing) so as to surround the casing.
In the radiant heat reduction structure having these heat shield mechanism and cooling mechanism, the heat shield plate absorbs heat, and the heat transferred from the heat shield plate to the uppermost plate is discharged by the cooling system to the outside. , Suppressing the radiation of heat to the vacuum device.
Patent Document 2 discloses a technique capable of adjusting the temperature at a different position from the intake port so that the gas temperature is appropriate for the operation state of the pump, upstream of the gas transfer mechanism of the vacuum pump. Yes. The temperature adjustment function is performed by a structural member installed between the vacuum chamber and the suction port of the vacuum pump.

However, in Patent Document 1, it is assumed that the influence of radiant heat from the blades (rotary blades and fixed blades of a vacuum pump) is not so great, and as shown in FIGS. ) Was only arranged so that the region projected on the gas transfer mechanism side of the vacuum pump was substantially equal to the region where the rotor part of the vacuum pump was facing the intake port. That is, the heat shield plate 80 is not provided above the rotary blades 9 and the fixed blades 15, and only the support portions 81 are provided.
Similarly, in Patent Document 2, a heat shield member is not provided on the upper part of the rotor disk 10 (rotary blade) and the stator disk 12 (fixed blade), and an annular groove installed in the structural portion 18. The temperature of the structure portion 18 itself is adjusted with a temperature adjusting liquid introduced into the structure, and the temperature of the introduced gas is adjusted by contact between the structure portion 18 and the gas or radiation from the structure portion.
Therefore, in the conventional techniques (Patent Document 1 and Patent Document 2), the radiant heat emitted from the rotor blades and the fixed blades cannot be sufficiently shielded.
Moreover, in patent document 2, since temperature control is independent of the cooling circulation of a pump, it was expensive.
Therefore, the present invention also relates to the heat radiated from the vacuum pump to the vacuum device side with respect to the radiant heat from the entire surface of the intake port of the vacuum pump in which the vacuum device is disposed, particularly from the blade (rotary blade or fixed blade) portion. An object of the present invention is to provide a vacuum pump that can be efficiently reduced with a simple configuration.

In the invention according to claim 1, an exterior body in which an intake port and an exhaust port are formed, a rotation shaft included in the exterior body and rotatably supported, and a rotor portion fixed to the rotation shaft, A rotor blade disposed radially from the outer peripheral surface of the rotor portion; and a stationary blade disposed so as to project from the inner side surface of the exterior body toward the rotation shaft. A gas transfer mechanism that transfers the gas to the exhaust port, and a heat exchanger that includes a plurality of plate-shaped heat shield members that are disposed at the intake port and have non-parallel and non-perpendicular inclined surfaces with respect to the rotation axis. A vacuum pump comprising:
According to a second aspect of the present invention, the vacuum pump according to the first aspect, further comprising a net-shaped net-shaped heat shield member disposed upstream of the gas transfer mechanism and supported by the heat exchanger. I will provide a.
According to a third aspect of the present invention, there is provided the vacuum pump according to the first or second aspect, further comprising a cooling mechanism for cooling the heat exchanger.
According to a fourth aspect of the present invention, the mesh-shaped heat shield member has a disk shape having an outer diameter substantially coinciding with the inner diameter of the intake port, and the rotating shaft and the rotor portion are projected onto the mesh-shaped heat shield member. The center portion, which is a region to be formed, has a lower opening ratio of the mesh shape than the peripheral portion, which is a region where the heat exchanger is projected onto the mesh shape heat shield member. The vacuum pump according to at least one of items 3 is provided.
According to a fifth aspect of the present invention, the plate-shaped heat shield member of the heat exchanger is formed such that the emissivity of the surface facing the intake port is smaller than the emissivity of the other surfaces. A vacuum pump according to at least one of claims 1 to 4 is provided.
In the invention according to claim 6, when the plate-shaped heat shield member is viewed from the normal direction of the disk plane, at least a part of the projections of the adjacent plate-shaped heat shield members overlap. Accordingly, an invisible part is formed behind the heat exchanger, and the vacuum pump according to at least one of claims 1 to 5 is provided.
In the invention according to claim 7, the heat exchanger includes a circular heat exchanger member having a plate member formed by processing one circular plate member and a press fixed blade, and the press fixed blade is the plate. The vacuum pump according to claim 1, wherein the vacuum pump is a shape heat shield member.
In the invention according to claim 8, the heat exchanger is formed by laminating a plurality of the circular heat exchanger members so that the plate members and the press fixed blades are in close contact with each other. When the shape heat shield member is viewed from the normal direction field of view of the disk plane, at least part of the projections of the two adjacent plate shape heat shield members overlap each other, so that the invisible part is behind the heat exchanger. The vacuum pump according to claim 7 is provided.
In the invention according to claim 9, the heat exchanger is formed by laminating a plurality of the circular heat exchanger members so that the plate members are in close contact with each other and the press fixed blades are separated from each other. When viewed from the normal direction visual field of the disk plane of the formed plate-shaped heat shield member, at least part of the projections of the two adjacent plate-shaped heat shield members overlap, The vacuum pump according to claim 7, wherein an invisible part is formed in the back.
In the invention of claim 10, in the heat exchanger, when a plurality of the circular heat exchanger members are stacked, the emissivity of the circular heat exchanger member disposed on the uppermost surface on the inlet side is: The emissivity of the circular heat exchanger member that is formed smaller than the emissivity of the circular heat exchanger member that is arranged elsewhere, or is arranged on the lowermost surface on the exhaust port side, The emissivity of the circular heat exchanger member formed is larger than the emissivity of the arranged circular heat exchanger member, or the emissivity of the circular heat exchanger member arranged on the uppermost surface on the inlet side is the emissivity of the other surface. And the emissivity of the circular heat exchanger member disposed on the lowermost surface on the exhaust port side is larger than the emissivity of the other circular heat exchanger members. The truth of claim 8 or claim 9, To provide a pump.
According to an eleventh aspect of the present invention, the exterior body includes a flange portion having a heat insulating member on the inlet side, and the vacuum according to at least one of the first to tenth aspects. Provide a pump.

  According to the present invention, it is possible to reduce the amount of heat radiated from the entire surface of the suction port of the vacuum pump, in particular, from the blade (rotary blade or fixed blade) portion and transmitted to the vacuum apparatus.

It is the figure which showed the schematic structural example of the turbo-molecular pump provided with the radiation heat reduction structure which concerns on embodiment of this invention. It is the figure which showed an example of the radiant heat reduction structure which concerns on embodiment of this invention. It is a figure for demonstrating an example of the heat exchanger which concerns on embodiment of this invention. It is a figure for demonstrating an example of the heat insulation member which concerns on embodiment of this invention. It is a figure for demonstrating an example of the cooling mechanism which concerns on embodiment of this invention. It is the figure which showed schematic structure of the turbo-molecular pump provided with the radiation heat reduction structure which concerns on embodiment of this invention, and also the heat insulating material. It is the schematic which showed the heat exchange press blade | wing which concerns on the modification 1 and the modification 2 of embodiment of this invention. It is a figure for demonstrating the heat insulation member which concerns on the modification 3 of embodiment of this invention. It is a figure for demonstrating the radiation heat reduction structure which concerns on the prior art. It is a figure for demonstrating the radiation heat reduction structure which concerns on the prior art.

(I) Outline of Embodiment A vacuum pump according to an embodiment of the present invention has a radiant heat reduction structure having a heat shield mechanism and a cooling mechanism.
This heat-shielding mechanism is an inclined surface that is not parallel to either the axis of the vacuum pump or the inlet port surface, which is disposed on the suction port side of the vacuum pump and located above the rotor blades and fixed blades (blades). A heat exchanger having a plate-shaped heat shield member with a mesh shape, and a net-shaped heat shield member disposed in a region located in the upper part on the suction port side of the vacuum pump.
Furthermore, a cooling mechanism for cooling the heat exchanger is disposed on the outer periphery of the heat exchanger so as to be in contact with the heat exchanger.
The heat exchanger having a plate-shaped heat shield member can receive heat (electromagnetic waves) conducted from the rotary blades and fixed blades (blades) of the vacuum pump, thereby reducing the heat radiated from the blades to the vacuum device. Since the net-shaped heat shield member receives the heat radiated from the suction port of the vacuum pump, the heat radiated from the suction port to the vacuum device can be reduced.
Furthermore, since the heat exchanger is cooled by a cooling mechanism disposed on the outer periphery of the heat exchanger, the heat radiated from the blade to the vacuum device can be shut off (insulated) and simultaneously cooled. Heat radiation can be reduced more efficiently.

(Ii) Details of Embodiments Hereinafter, preferred embodiments of the present invention will be described in detail with reference to FIGS.
In the present embodiment, a turbo molecular pump will be described as an example of a vacuum pump.
FIG. 1 is a diagram illustrating a schematic configuration example of a turbo molecular pump 1 including a radiant heat reduction structure (a heat shielding mechanism and a cooling mechanism) according to an embodiment of the present invention.
1 shows a cross-sectional view of the turbo molecular pump 1 in the axial direction.
FIG. 1 also shows a part of the vacuum chamber 90 connected to the turbo molecular pump 1.
The vacuum chamber 90 connected to the turbo molecular pump 1 is a part of a vacuum device used as a chamber of a semiconductor manufacturing apparatus, a surface analysis apparatus, or a microfabrication apparatus, for example, and is configured by a vacuum chamber wall 91, A vacuum vessel having a connection port with the molecular pump 1.

(Vacuum pump)
Below, the structure of the turbo-molecular pump 1 is demonstrated.
The turbo molecular pump 1 is a vacuum pump for exhausting the vacuum chamber 90. The turbo molecular pump 1 is a so-called composite wing type molecular pump including a turbo molecular pump part and a thread groove type pump part.
A casing 2 that forms an exterior body of the turbo molecular pump 1 has a substantially cylindrical shape, and constitutes a casing of the turbo molecular pump 1 together with a base 3 provided at a lower portion (exhaust port 6 side) of the casing 2. is doing. And inside this housing | casing, the gas transfer mechanism which is a structure which makes the turbo molecular pump 1 exhibit an exhaust function is accommodated.
This gas transfer mechanism is roughly divided into a rotating part that is rotatably supported and a fixed part that is fixed to the casing.

An inlet 4 for introducing gas into the turbo molecular pump 1 is formed at the end of the casing 2. A flange portion 5 is formed on the end surface of the casing 2 on the intake port 4 side so as to project to the outer peripheral side.
In the present embodiment, the turbo molecular pump 1 and the vacuum chamber wall 91 are configured such that the radiant heat reduction structure (the heat exchanger 20, the heat shield member 30, and the cooling mechanism (cooling) is disposed on the flange portion 5 of the turbo molecular pump 1. Tube) 40) and are connected by fixing using a fastening member such as a bolt. The radiant heat reduction structure will be described later.
The base 3 is formed with an exhaust port 6 for exhausting gas from the turbo molecular pump 1.

The rotating part is provided on the shaft 7 which is a rotating shaft, the rotor 8 disposed on the shaft 7, a plurality of rotating blades 9 provided on the rotor 8, and the exhaust port 6 side (screw groove type pump part). It is comprised from the cylindrical rotation member 10 grade | etc.,. The shaft 7 and the rotor 8 constitute a rotor part.
Each rotor blade 9 is composed of blades extending radially from the shaft 7 at a predetermined angle from a plane perpendicular to the axis of the shaft 7.
The cylindrical rotating member 10 is a cylindrical member having a cylindrical shape concentric with the rotation axis of the rotor 8.

A motor part 11 for rotating the shaft 7 at a high speed is provided in the middle of the shaft 7 in the axial direction.
Further, radial magnetic bearing devices 12 and 13 for supporting the shaft 7 in a radial direction (radial direction) in a non-contact manner on the intake port 4 side and the exhaust port 6 side with respect to the motor portion 11 of the shaft 7. An axial magnetic bearing device 14 is provided at the lower end of the shaft 7 to support the shaft 7 in the axial direction (axial direction) in a non-contact manner.

A fixing portion is formed on the inner peripheral side of the housing. The fixed portion is composed of a plurality of fixed blades 15 provided on the intake port 4 side (turbo molecular pump portion), a thread groove spacer 16 provided on the inner peripheral surface of the casing 2, and the like.
Each fixed wing 15 is composed of a blade that is inclined by a predetermined angle from a plane perpendicular to the axis of the shaft 7 and extends from the inner peripheral surface of the housing toward the shaft 7.
The fixed wings 15 of each stage are separated from each other by a cylindrical spacer 17.
In the turbo molecular pump section, the fixed blades 15 are formed in a plurality of stages alternately with the rotor blades 9 in the axial direction.

A spiral groove is formed in the thread groove spacer 16 on the surface facing the cylindrical rotary member 10. The thread groove spacer 16 faces the outer peripheral surface of the cylindrical rotary member 10 with a predetermined clearance (gap) therebetween. The direction of the spiral groove formed in the thread groove spacer 16 is a direction toward the exhaust port 6 when gas is transported in the spiral groove in the rotational direction of the rotor 8.
Further, the depth of the spiral groove becomes shallower as it approaches the exhaust port 6, and the gas transported through the spiral groove is compressed as it approaches the exhaust port 6.

Further, when the turbo molecular pump 1 is used for semiconductor manufacturing, there are many processes in which various process gases are applied to the semiconductor substrate in the semiconductor manufacturing process, and the turbo molecular pump 1 evacuates the chamber. In addition, it is used to exhaust these process gases from the chamber. When these process gases are cooled when they are exhausted and become a certain temperature, they become solid, and products may be deposited in the exhaust system. Then, when this type of process gas becomes a solid at a low temperature in the turbo molecular pump 1 and adheres to and accumulates inside the turbo molecular pump 1, the deposit narrows the pump flow path, and the turbo molecular pump 1 It may cause a decrease in performance.
In order to prevent this state, a temperature sensor (not shown) such as a thermistor is embedded in the base 3, and a heater (not shown) is used to keep the temperature of the base 3 at a constant high temperature (set temperature) based on a signal from the temperature sensor. (No)) and cooling control (TMS; Temperature Management System) by the water cooling pipe 18 is performed.
The turbo molecular pump 1 configured as described above performs evacuation processing in the vacuum chamber 90.

Here, all objects radiate thermal energy in the form of electromagnetic waves unless the absolute temperature is zero. For example, in the turbo molecular pump 1 described above, collision heat of gas (gas) molecules and electromagnetic waves (heat) generated from the motor unit 11 are radiated in the process of performing exhaust processing by rotating the rotating unit at a high speed. The turbo molecular pump 1 may be heated to a high temperature state by the radiant heat that is electromagnetic waves.
Further, when the inside of the vacuum chamber 90 is in a high temperature state because the radiant heat of the turbo molecular pump 1 is transmitted to the vacuum chamber 90 through the intake port 4, the apparatus, the sample and the like handled by the vacuum chamber 90 are affected. May end up.
Therefore, reducing the electromagnetic wave (radiant heat) radiated from the vacuum pump and reaching the vacuum chamber 90 leads to reducing the influence of the thermal radiation of the turbo molecular pump 1 on the vacuum chamber 90.
Here, in general, radiation heat is most intense in a direction perpendicular to the surface. That is, in the turbo molecular pump 1, the influence of the radiant heat radiated from the side surface of the intake port 4 of the rotor 8 toward the vacuum chamber 90 which is the vertical direction is the strongest.
Therefore, the turbo molecular pump 1 according to the embodiment of the present invention is provided with a radiant heat reduction structure for absorbing heat radiated from the upper surface of the rotor 8 on the intake port 4 side in the vertical direction from the vertical direction.

The turbo molecular pump 1 according to the embodiment of the present invention has a radiant heat reduction structure for reducing the influence of the radiant heat that the vacuum chamber 90 receives. The structure is such that transmission of the radiated heat is prevented, heat is easily absorbed, and is not easily radiated to the vacuum chamber 90 side.
More specifically, in the turbo molecular pump 1 according to the present embodiment of the present invention, the heat exchanger 20, the heat shield member (net-shaped heat shield member) 30, and the cooling pipe 40 are disposed upstream of the gas transfer mechanism (inlet port). 4 side).

(Radiation heat reduction structure)
Hereinafter, the radiant heat reduction structure provided in the turbo molecular pump 1 according to the embodiment of the present invention will be described.
FIG. 2 is a diagram for illustrating an example of a radiant heat reduction structure according to the embodiment of the present invention.
As shown in FIG. 2, the radiant heat reduction structure according to the embodiment of the present invention can be broadly divided into a heat exchanger 20 and a heat shield member 30 as a heat shield mechanism, a cooling pipe 40 as a cooling mechanism, and a shield. It is comprised by the member (heat exchanger holding member 60) holding a heat mechanism and a cooling mechanism.
These radiant heat reduction structures are arranged so as to be parallel to the mounting surface of the turbo molecular pump 1 so as to face the surface of the turbo molecular pump 1 where the inlet 4 is formed.
In the present embodiment, the heat exchanger 20 and the heat shield member 30 are separable, but the present invention is not limited to this. For example, it is also possible to adopt a configuration in which the heat transfer is improved at each joint (connector).

(I) Heat exchanger First, the heat exchanger 20 which concerns on embodiment of this invention is demonstrated, referring FIG.1, FIG.2, and FIG.3.
FIG. 3 is a diagram for explaining an example of the heat exchanger 20 according to the embodiment of the present invention.
FIG. 3A shows a plan view of one half of the heat exchanger 20 shown in FIG. 2 cut along AA (diameter direction) when viewed from the intake port 4 side.
FIG. 3B shows a cut surface when the heat exchanger 20 shown in FIG. 2 is cut along AA.
FIG. 3C shows a cross-sectional view of the cut surface when cut along BB in FIG. 3A as viewed from the center side (the inner rim 22 side described later).

As shown in FIG. 1, the heat exchanger 20 according to the embodiment of the present invention is disposed at the upper part on the intake port side of the turbo molecular pump 1, and as shown in FIG. A thick disk-shaped member having a diameter larger than the inner diameter of one intake port 4, and the heat radiated from the rotary blade 9 and the fixed blade 15 of the turbo molecular pump 1 to the vacuum chamber 90. Functions as a fixed wing for shielding.
The heat exchanger 20 is manufactured from, for example, an aluminum casting.
In addition, the heat exchanger 20 according to the embodiment of the present invention includes an outer rim 21, an inner rim 22, and an axis of a vacuum pump disposed between (supported by) the outer rim 21 and the inner rim 22. And a plurality of plate-shaped heat shield members (heat exchange fixed blades 23) having oblique inclined surfaces that are not parallel to the inlet surface.
As shown in FIGS. 3A and 3B, the heat exchange fixed blade 23 of the present embodiment extends from the inner radius of the outer rim 21 toward the inner rim 22 in the direction from the outer rim 21 to the outer rim 22. It has a length L corresponding to the length obtained by subtracting the radius, and has a length L and a thickness T as shown in FIG. It is a plate-like member having an angle θ) and is provided radially.
In addition, although the heat exchange fixed blade 23 of this embodiment was set as the structure provided radially so that adjacent heat exchange fixed blades 23 may be arrange | positioned at equal intervals, arrangement | positioning intervals are restricted to this. There is no.
The heat exchanger 20 is preferably integrally formed in order to improve heat conduction in each joint portion (connection portion) of the outer rim 21, the inner rim 22, and the heat exchange fixed blade 23. It is preferable that it is a seamless integral structure formed by machining.
Further, the circular portion having the inner rim 22 as the outer diameter is a cavity, and the diameter of the circular portion substantially coincides with the diameter of the portion where the rotor blade 9 of the turbo molecular pump 1 does not exist (FIG. 1D). It is configured as follows.
The heat exchanger 20 configured as described above is provided in a portion (region) located above the rotary blade 9 and the fixed blade 15 (blade) on the intake port side of the turbo molecular pump 1.

Moreover, the heat exchanger 20 of this embodiment also plays the role of a support member for supporting a heat shield member 30 described later.
Further, the heat exchanger 20 not only functions as a support member, but also conducts heat through the heat exchange fixed blade 23 to a cooling pipe 40 described later and radiates the heat to the outside of the turbo molecular pump 1 from there. It also has the function of
The outer end (outer rim 21) of the heat exchanger 20 is fixed to the heat exchanger holding member 60 with a bolt (not shown).

The area and volume in contact with the radiant heat radiated from the rotor blade 9 and the stationary blade 15 of the turbo-molecular pump 1 are increased by the heat exchange fixed blade 23 arranged as described above (the area and the volume to absorb the radiant heat are increased). Therefore, the heat capacity of the heat exchanger 20 is increased.
As a result, since the absorption rate of heat radiated from the blades of the turbo molecular pump 1 in the heat exchange fixed blade 23 can be improved, the amount of heat radiated to the vacuum chamber 90 side can be reduced.

Moreover, in the heat exchanger 20 of this embodiment, when the heat exchanger 20 is seen from the upper part (FIG. 3 (a)), the heat exchange fixed blade 23 increases an invisible part (that is, reduces a visible part). It is desirable to be configured as follows. In other words, it is desirable to reduce the aperture ratio in the heat exchanger 20. A configuration for reducing the aperture ratio will be described later.
Here, the “invisible portion” in the present embodiment is a portion where the back of the heat exchange fixed blade 23 cannot be seen from between the heat exchange fixed blades 23 when the heat exchanger 20 is viewed from the intake port 4 side. That's it.

Further, the heat exchange fixed blade 23 of the present embodiment may be configured by a press fixed blade.
Here, the press fixed blade will be described.
The press fixed wing is a thin metal plate made of a circular metal plate (for example, made of stainless steel or aluminum), and is pressed using an etching process, a punching process, a die cutting process, or a cutting method such as laser or plasma. A plurality of slits for forming the fixed wing are formed, and the press fixed wing cut out by the slit is bent at a predetermined angle by press working or the like.
A configuration in which a press fixed blade is used as the heat exchange fixed blade 23 in the present embodiment will be described later.

Moreover, in the heat exchanger 20 of this embodiment, different surface treatment is given to both surfaces of the heat exchange fixed blade 23, respectively.
More specifically, a surface having a high emissivity is provided on the downstream side surface (surface on the exhaust port 6 side) of the heat exchange fixed blade 23, that is, the surface facing the gas transfer mechanism including the rotary blade 9, the fixed blade 15 and the like. Processing has been applied. The emissivity indicates the absorptance of thermal energy (electromagnetic wave), and the higher the emissivity, the higher the absorptance of heat, and the lower the emissivity, the lower the absorptance of heat.
Examples of the surface treatment having a high emissivity applied to the downstream side surface of the heat exchange fixed blade 23 include an alumite coating process and a ceramic coating process in which the emissivity is 0.8 or more.
In this way, by performing a surface treatment with high emissivity on the downstream side surface of the heat exchange fixed blade 23, the heat exchange rate of the heat radiated from the rotary blade 9 or the fixed blade 15 in the heat exchange fixed blade 23 is further improved. Can be made.
That is, since the heat exchange fixed blade 23 that has been surface-treated as described above can absorb more radiation heat from the turbo molecular pump 1, the amount of heat radiated to the vacuum chamber 90 side can be reduced. Can do.

On the other hand, the upstream side surface of the heat exchange fixed blade 23, that is, the surface facing the vacuum chamber 90 is subjected to surface treatment with low emissivity.
As the surface treatment with low emissivity applied to the upstream side surface of the heat exchange fixed blade 23 of the present embodiment, for example, electrolytic polishing treatment, gold plating treatment, aluminum plating treatment such that the emissivity is 0.1 or less. Etc.
The electrolytic polishing treatment is a method for obtaining a polishing effect by causing a metal polishing object to be a + (plus) electrode of an electrode and passing a direct current through the electrolytic solution to dissolve the metal surface.
In this way, by performing a surface treatment with low emissivity on the upstream side surface of the heat exchange fixed blade 23, the amount of heat radiated from the heat exchange fixed blade 23 to the vacuum chamber 90 side can be reduced. After the radiant heat from the molecular pump 1 is absorbed by the heat exchange fixed blade 23, the amount of heat radiated again to the vacuum chamber 90 side can be reduced.

As described above, in the heat exchanger 20 according to the present embodiment, heat (electromagnetic waves) radiated from the rotor blades 9 and the fixed blades 15 of the turbo molecular pump 1 is absorbed at a high rate on the lower surface of the heat exchange fixed blades 23. On the other hand, since the amount of heat radiated again to the vacuum chamber 90 side is reduced on the upper surface, the heat radiated from the turbo molecular pump 1 to the vacuum device can be further reduced.
In the present embodiment, each of the upstream surface and the downstream surface is configured to perform each process, but the present invention is not limited to this. For example, the surface treatment is not performed on both the upstream surface and the downstream surface, but a treatment corresponding to one of the surfaces (a surface treatment with a low emissivity on the upstream surface or a surface treatment with a high emissivity on the downstream surface). You may comprise so that.

(Ii) Heat shield member Next, a heat shield member (net-shaped heat shield member) 30 according to an embodiment of the present invention will be described with reference to FIGS. 1, 2, and 4.
FIG. 4 is a view for explaining an example of the heat shield member 30 according to the embodiment of the present invention.
FIG. 4A shows an example of the entire image of the heat shield member 30 according to the embodiment of the present invention, and FIG. 4B shows a mesh portion of the heat shield member 30 according to the embodiment of the present invention. An enlarged view of is shown.
As shown in FIG. 4, the heat shield member 30 of the present embodiment is a mesh-shaped heat shield member, and a plurality of locations on the circumference are fixed to the heat exchanger holding member 60 with a fixture such as a bolt.
The mesh portion of the heat shield member 30 according to the present embodiment has a honeycomb (honeycomb) structure in which regular hexagons are arranged without gaps. However, the mesh shape of the mesh portion is not limited to this, for example, a rectangular or circular shape. Any shape can be applied as long as the cavities are mesh-shaped without gaps.
For example, the heat shield member 30 may be configured to use a protective mesh that has been conventionally used to prevent the fall of foreign matter.

  The heat shield member 30, which is a net-shaped heat shield member, receives the heat radiated from the intake port 4 of the turbo molecular pump 1, thereby reducing the heat radiated from the intake port 4 to the vacuum chamber 90 of the vacuum apparatus. it can.

(Iii) Cooling mechanism Next, a cooling mechanism according to an embodiment of the present invention will be described with reference to FIGS. 1, 2, and 5.
FIG. 5 is a view for explaining an example of the cooling mechanism according to the embodiment of the present invention.
In the embodiment of the present invention, in order to effectively cool the heat transmitted to the heat exchange fixed blade 23, or in order to cool the heat shield mechanism (heat exchanger 20, heat shield member 30) efficiently, A heat exchanger holding member 60 having an annular cooling pipe 40 is disposed on the outer peripheral portion of the exchanger 20 so as to be in contact with the heat exchanger 20.
As shown in FIG. 5, the heat exchanger holding member 60 is provided in the outer peripheral part via the outer rim 21 of the heat exchanger 20 of this embodiment. That is, the heat exchange fixed blade 23 of the heat exchanger 20 is cooled by the cooling pipe 40 through the outer rim 21. Further, each heat exchange fixed blade 23 is connected (supported) by the inner rim 22 and the outer rim 21.
As described above, since all the heat exchange fixed blades 23 are connected to the cooling pipe 40 in a form in which heat enters and exits due to heat conduction, the cooling pipe 40 is connected to all the heat exchange fixed blades via the heat exchanger holding member 60. 23 is structured to be cooled.

Inside the heat exchanger holding member 60, a cooling pipe (for example, a water cooling pipe) is disposed so as to surround the heat exchanger 20.
The cooling pipe 40 of the present embodiment is a tubular member and is disposed inside the heat exchanger holding member 60. In the cooling pipe 40 of the present embodiment, a liquid cooling method for cooling the cooling pipe 40 provided inside the heat exchanger holding member 60 by flowing a coolant as a heat medium so that the cooling agent absorbs heat. Is used.

The turbo molecular pump 1 of the present embodiment is provided with the water cooling pipe 18 as described above, and the liquid using the cooling pipe 40 of the cooling mechanism so that the water used in the water cooling pipe 18 of the turbo molecular pump 1 can be used together. The cooling method was adopted.
With this configuration, it is not necessary to separately prepare an additional device for the cooling mechanism (cooling pipe 40), so that it is possible to prevent an increase in installation space and cost.
In the present embodiment, the cooling mechanism employs a water cooling method as described above, but a coolant other than water is used, or the outer periphery of the heat shield mechanism (heat exchanger 20, heat shield member 30) or a part of the outer periphery. It is also possible to employ an air cooling method in which a fan is provided to cool around the heat shield mechanism.

The heat exchanger holding member 60 of the present embodiment is configured separately from the casing 2 and attached to the casing 2 with a fixture such as a bolt. However, the method of configuring the heat exchanger holding member 60 is limited to this. It is not something.
For example, a groove may be formed on the outer peripheral surface of the casing 2, and a coolant may be allowed to flow in the groove to provide the function of the cooling pipe 40.
Further, solder or heat conduction paste is attached to the gap between the cooling pipe 40 and the heat exchanger holding member 60 or the contact portion between the cooling pipe 40 and the casing 2 to further increase the efficiency of heat exchange in the cooling pipe 40. You may make it improve.

As described above, in the present embodiment, by disposing the cooling pipe 40 on the outer periphery of the heat exchanger, the heat radiated to the heat exchange fixed blade 23 of the heat exchanger 20 is effectively cooled, that is, the heat Can be quickly discharged to the outside.
In this way, the heat radiated from the blades (the rotary blades 9 and the fixed blades 15 of the turbo molecular pump 1) to the vacuum device can be shut off (insulated) and simultaneously cooled. The heat radiated to the 90 side can be reduced more efficiently.

(Iv) Heat Insulating Material FIG. 6 is a diagram showing a schematic configuration of a turbo molecular pump 1 including a radiation heat reducing structure according to an embodiment of the present invention and a heat insulating material 50, and the axial direction of the turbo molecular pump 1 FIG.
In addition, the same code | symbol is used for the same part (overlapping part) as FIG. 1 mentioned above, and detailed description is abbreviate | omitted.
The heat insulating material 50 according to the present embodiment is a heat insulating member disposed on the flange portion 5 on the intake port 4 side of the casing 2 so that heat from the casing 2 of the turbo molecular pump 1 is not transmitted, and heat such as rubber. It is made of a material having high resistance, that is, a material having low thermal conductivity.
With this configuration, the heat of the turbo molecular pump 1 can be reduced from being transmitted from the casing 2 of the turbo molecular pump 1 to the vacuum device side through the heat exchanger holding member 60.

The heat shield mechanism according to the embodiment of the present invention described above can be variously modified as follows.
(Modification of heat exchanger)
First, Modification 1 and Modification 2 of the heat exchanger according to the embodiment of the present invention will be described with reference to FIG.
FIG. 7 is a schematic diagram illustrating a heat exchange press blade 230 according to Modification 1 and Modification 2 of the embodiment of the present invention. FIG. 7A and FIG. ) Is a cross-sectional view of the cut surface taken along BB in FIG.
In Modification 1 and Modification 2 of the present embodiment, the heat exchange fixed blade is composed of the press fixed blade described above (hereinafter, heat exchange press blade 230).
As described above, in order to reduce the radiant heat from the turbo-molecular pump 1, the more invisible parts formed by the heat exchange fixed blades 23 (FIG. 3) in the heat exchanger 20 (that is, visible) The smaller the part, the better.
Therefore, in Modification 1 and Modification 2 of the present embodiment, a method for increasing the invisible portion formed by the heat exchange press blade 230 will be described.

For example, as shown in FIG. 7A, in the first heat exchange press fixed blade 231 formed of one first plate member 2310, the first heat exchange press fixed blades 231 are in the manufacturing process. Pitch interval (corresponding to d1) cannot be reduced beyond a certain level. Therefore, a visible part corresponding to d1 is inevitably formed.
(Modification 1)
Therefore, in the heat exchange press blade 230 according to the first modification of the embodiment of the present invention, as shown in FIG. 7A, the first plate member 2310 on which the first heat exchange press fixed blade 231 is formed. And the second plate member 2320 on which the second heat exchange press fixed blade 232 is formed, and each heat exchange press fixed blade (the first heat exchange press fixed blade 231, the second heat exchange press fixed blade). 232) and the first plate member 2310 and the second plate member 2320 are stacked so as to overlap each other with a substantially the same angle with respect to the horizontal plane (plate member surface) (stacked). )It is configured.
By adopting such a configuration, the first heat exchange press fixed blade 231 (or the second heat exchange press fixed blade 232) is formed only by the first plate member 2310 (or the second plate member 2320). The visible portion d1 formed in the configuration can be reduced to d2.
That is, the invisible part formed only by the first heat exchange press fixed blade 231 (or the second heat exchange press fixed blade 232) increases, and the aperture ratio of the heat exchange press blade 230 can be reduced. Therefore, the radiant heat from the turbo molecular pump 1 can be reduced more efficiently.

(Modification 2)
Next, Modification 2 of the embodiment of the present invention will be described with reference to FIG.
The heat exchange press blade 330 according to the second modification of the embodiment of the present invention includes a first plate member 3310 on which a first heat exchange press fixed blade 331 is formed, as shown in FIG. The second plate member 3320 on which the second heat exchange press fixed blade 332 is formed is connected to each heat exchange press fixed blade (first heat exchange press fixed blade 331, second heat exchange press fixed blade 332). Have substantially the same angle with respect to a horizontal plane (plate member surface), and a region where the first heat exchange press fixed blade 331 is projected and a region where the second heat exchange press fixed blade 332 is projected. So that there is no gap between the region where the first heat exchange press fixed blade 331 is projected and the region where the second heat exchange press fixed blade 332 is projected. Further, the first plate member 3310 and the second plate member 3320 And arranged to overlap without gaps (stacked with) it is constructed.
With this configuration, the first heat exchange press fixed blade 331 is configured only by the first plate member 3310 (or the second heat exchange fixed blade 332 is formed only by the second plate member 3320). The visible part d3 formed in the case can be made as small as possible.
That is, the invisible part formed only by the first heat exchange press fixed blade 331 (or the second heat exchange fixed blade 332) is increased, the aperture ratio of the heat exchange press blade 330 is reduced, and the turbo molecular pump The radiant heat from 1 can be further reduced.

In addition, as shown in FIG. 7A, the heat exchange press blade 230 of Modification 1 described above is the first upper surface 230U of the heat exchange press blade 230 (that is, the first heat exchanger press blade 230 disposed above the heat exchange press blade 230). Of the plate member 2310 and the first heat exchange press fixed blade 231 and the lower surface 230D of the heat exchange press blade 230 (that is, the lower surface of the heat exchange press blade 230). The surface of the second plate member 2320 and the surface of the second heat exchange press fixed blade 232 on the exhaust port 6 side may be subjected to different surface treatments.
More specifically, the lower surface 230D of the heat exchange press blade 230 of the first modification, that is, the surface facing the gas transfer mechanism including the rotary blade 9 and the fixed blade 15 is subjected to a surface treatment with high emissivity. The Examples of the surface treatment having a high emissivity applied to the lower surface 230D of the heat exchange press blade 230 include an alumite coating process and a ceramic coating process in which the emissivity is 0.8 or more.
As described above, by applying a surface treatment with high emissivity to the lower surface 230D of the heat exchange press blade 230 of the first modification, the heat exchange press blade 230 of the first modification radiates from the rotary blade 9 and the fixed blade 15 and the like. Heat absorption rate can be improved.
That is, more heat can be absorbed by the heat exchange press blade 230 (the lower surface 230D), and the amount of heat radiated to the vacuum chamber 90 side can be reduced.
On the other hand, the upper surface 230U of the heat exchange press blade 230 of the first modification, that is, the surface facing the vacuum chamber 90 is subjected to a surface treatment with low emissivity. Examples of the surface treatment with low emissivity applied to the upper surface 230U of the heat exchange press blade 230 include, for example, electrolytic polishing treatment, gold plating treatment, aluminum plating treatment such that the emissivity is 0.1 or less. .

In the above description, the first plate member 2310 and the first heat exchange press fixed blade 231 disposed on the upper side of the heat exchange press blade 230 are disposed on one side of the vacuum chamber 90 and on the lower side of the heat exchange press blade 230. The second plate member 2320 and the second heat exchange press fixed blade 232 are configured so as to be subjected to different surface treatments on one side of the exhaust port 6 as described above. A surface treatment with low emissivity is performed on the “entire surface” of the first plate member plate 2310 disposed on the vacuum chamber 90 side, while a second surface disposed on the exhaust port 6 side. The plate member 2320 may be subjected to a surface treatment with a high emissivity on the “entire surface”.
Alternatively, the surface treatment is not performed on both the upper and lower sides, but a treatment corresponding to one of the surfaces (a surface treatment with a low emissivity on the upstream surface or a surface treatment with a high emissivity on the downstream surface) is performed. May be.

Similarly, in the heat exchange press blade 330 of Modification 2 described above, as shown in FIG. 7B, the upper surface 330U of the heat exchange press blade 330 (that is, the first disposed on the upper side of the heat exchange press blade 330). One plate member 3310, and the surface on the vacuum chamber 90 side of each of the first heat exchange press fixed blade 331 and the second heat exchange press fixed blade 332 of the first plate member 3310 and the second plate member 3320 ), The lower surface 330D of the heat exchange press blade 330 (that is, the second plate member 3320 disposed below the heat exchange press blade 330, and the first plate member 3310 and the first plate member 3320 first). The surface of each of the heat exchange press fixed blades 331 and the second heat exchange press fixed blades 332 on the exhaust port 6 side) may be subjected to different surface treatments.
More specifically, in the heat exchange press blade 330 according to the second modification, the surface (the lower surface 330D of the heat exchange press blade 330) facing the gas transfer mechanism including the rotary blade 9, the fixed blade 15 and the like has the radiation described above. Surface treatment with a high rate is performed, and the surface treatment with the low emissivity described above is performed on the surface facing the vacuum chamber 90 (the upper surface 330U of the heat exchange press blade 330).
Alternatively, the surface treatment is not performed on both the upper and lower sides, but a treatment corresponding to one of the surfaces (a surface treatment with a low emissivity on the upstream surface or a surface treatment with a high emissivity on the downstream surface) is performed. May be.

Thus, in the heat exchange press blades 230 and 330 according to Modification 1 and Modification 2 of the present embodiment, the surface treatment with a low emissivity on the upstream side surface (230U or 330U) of the heat exchange press blade 230 (or 330). And heat radiated from the rotary blade 9 and the fixed blade 15 of the turbo molecular pump 1 by applying a surface treatment with high emissivity to the downstream side surface (230D or 330D) of the heat exchange press blade 230 (or 330). (Electromagnetic wave) is received at a high absorption rate on the downstream side surface (230D or 330D) of the heat exchange press blade 230, while the amount of heat radiated again to the vacuum chamber 90 side is reduced on the upstream side surface (230U or 330U). be able to.
As a result, after the radiant heat from the turbo molecular pump 1 is absorbed by the heat exchange press blade 230 (or the heat exchange press blade 330), the amount of heat radiated again to the vacuum chamber 90 side can be reduced, The heat radiated from the turbo molecular pump 1 to the vacuum device can be further reduced.

  In addition, in Modification 1 and Modification 2 of the present embodiment, the number of plate members to be stacked to form one heat exchange press blade is two in consideration of the exhaust performance. There is no limit. For example, a configuration may be adopted in which a plurality of plate members such as three, four,.

(Modification of heat shield member-Modification 3)
Next, a modified example (modified example 3) of the heat shield member 30 according to the embodiment of the present invention will be described with reference to FIGS. 1 and 8.
Here, in general, in a net-shaped heat shield member, the lower the aperture ratio of the mesh portion (mesh), the worse the gas flow. Therefore, in the third modification, the heat shield member 300 in which the aperture ratio of the net-shaped heat shield member is not uniform is provided.
FIG. 8A is a diagram illustrating an example of an overall image of the heat shield member 300 according to the third modification of the embodiment of the present invention as viewed from the vacuum chamber 90 side.
8B shows the central portion E of the heat shield member 300 shown in FIG. 8A, and FIG. 8C shows the central portion E of the heat shield member 300 shown in FIG. 8A. It is the figure which showed the enlarged view of the surrounding peripheral part F. FIG.
As shown in FIG. 8 (a), the heat shield member 300 according to the modified example 3 has a central portion E formed with a mesh portion having a low aperture ratio (region where the mesh is fine; mesh size is small) at the center. Further, the area surrounding the periphery of the central part E has a peripheral part F formed with a net-like part (area where the mesh is coarse; mesh size is large) having a higher aperture ratio than the central part E on the same plane.
Note that the size (diameter) of the central portion E of the heat shield member 300 according to the third modified example is the end face on the intake port 4 side of the rotor 8 (FIG. 1D) in order to minimize the influence on the exhaust performance. It is almost equal to the area. That is, the region projected on the intake port 4 side of the region where the gas transfer path is formed (the region where the rotary blade 9 and the fixed blade 15 are disposed) and the E portion of the heat shield member 300 are on the intake port 4 side. So that it does not overlap the projected area.
In other words, the E portion of the heat shield member 300 has a region where the central portion E of the heat shield member 300 is projected on the intake port 4 side and an end surface region of the rotor 8 on the intake port 4 side is projected on the intake port 4 side. The area is arranged so as to overlap.
Further, the outer diameter of the central portion E of the heat shield member 300 of the third modification is configured to substantially match the inner diameter of the inner rim 22 of the heat exchanger 20, and the central portion of the heat shield member 300 of the third modification. The outer diameter of the region surrounding E (peripheral portion F) is configured to match the outer diameter of the outer rim 21 of the heat exchanger 20.

In this way, the E portion of the heat shield member 300 is arranged not only on the entire surface of the intake port 4 but only on the upper portion of the cylindrical portion of the rotor 8 at the intake port 4 (excluding the region where the rotor blades 9 are disposed). In other words, the arrangement is such that the central portion E, which is a mesh portion having a low opening ratio of the heat shield member 300, does not reach the region where the exhaust resistance of the gas transferred by the action of the gas transfer mechanism is increased. That is.
With the configuration as described above, it is possible to suppress a reduction in the exhaust performance of the turbo molecular pump 1 due to the provision of the heat shield member 300 having the central portion E formed with a mesh having a low aperture ratio.

  In addition, in order to efficiently prevent the radiation of heat from the central portion of the intake port 4 (upper part of the cylindrical portion of the rotor 8), the mesh aperture ratio of the central portion (E) of the heat shield member 300 is reduced so The mesh opening ratio of the heat shield member 300 in (F) is configured to be larger than that of the center portion, but the heat exchange fixed blade 23 (or heat exchange press) described above is directly below the portion corresponding to the F portion. Since the fixed blades 231, 232, 331, 332) are provided, the thermal emissivity of the other part (F) is not inferior to that of the central part (E).

  According to the embodiment and the modification described above, since heat transmitted from the turbo molecular pump to the vacuum device can be reduced, an increase in the internal temperature of the vacuum chamber of the vacuum device can be appropriately suppressed. Thereby, it is possible to realize more precise processing and higher-accuracy measurement inside the vacuum chamber.

DESCRIPTION OF SYMBOLS 1 Turbo molecular pump 2 Casing 3 Base 4 Intake port 5 Flange part 6 Exhaust port 7 Shaft 8 Rotor 9 Rotary blade 10 Cylindrical rotating member 11 Motor part 12, 13 Radial direction magnetic bearing apparatus 14 Axial direction magnetic bearing apparatus 15 Fixed blade 16 Thread groove spacer 17 Spacer 18 Water-cooled tube 20 Heat exchanger 21 Outer rim 22 Inner rim 23 Heat exchange fixed blades 230 and 330 Heat exchange press blades 231 and 331 First heat exchange press fixed blades 232 and 332 Second heat exchange press fixed wing 230 U, 330 U heat exchanger pre-scan wing upper surface 230D, the lower surface of the 330D heat exchanger pre-scan blade 2310 first plate member 2320 second plate member 30 heat insulating member 300 heat shield 40 cooling mechanism (cooling pipe)
DESCRIPTION OF SYMBOLS 50 Heat insulating material 60 Heat exchanger holding member 80 Conventional heat shield plate 81 Conventional support part 90 Vacuum chamber 91 Vacuum chamber wall

Claims (11)

An exterior body in which an intake port and an exhaust port are formed;
A rotating shaft enclosed in the outer body and rotatably supported; a rotor portion fixed to the rotating shaft; rotary blades arranged radially from an outer peripheral surface of the rotor portion; A fixed wing arranged to project from the inner side surface toward the rotating shaft, and a gas transfer mechanism for transferring the gas sucked from the intake port to the exhaust port;
A heat exchanger having a plurality of plate-shaped heat shield members disposed on the intake port and having inclined surfaces that are non-parallel and non-perpendicular to the rotation axis;
A vacuum pump comprising:   The vacuum pump according to claim 1, further comprising a net-shaped net-shaped heat shield member disposed upstream of the gas transfer mechanism and supported by the heat exchanger.   The vacuum pump according to claim 1, further comprising a cooling mechanism that cools the heat exchanger.   The mesh-shaped heat shield member has a disk shape having an outer diameter substantially coinciding with the inner diameter of the intake port, and a central portion that is an area where the rotating shaft and the rotor portion are projected onto the mesh-shaped heat shield member. The aperture ratio of the mesh shape is lower than at least one of the above-mentioned mesh shape, and the opening ratio of the mesh shape is lower than the peripheral portion that is a region projected onto the mesh shape heat shield member. The vacuum pump according to item.   The plate-shaped heat shield member included in the heat exchanger is formed such that an emissivity of a surface facing the intake port is smaller than an emissivity of another surface. The vacuum pump according to at least one of them.   When the plate-shaped heat shield member is viewed from the normal direction of the disk plane, the heat exchanger has at least a part of projections of the adjacent plate-shaped heat shield members to overlap each other. 6. The vacuum pump according to claim 1, wherein an invisible part is formed behind the vacuum pump. 7.   The heat exchanger includes a plate member formed by processing one circular plate member and a circular heat exchanger member having a press fixed blade, and the press fixed blade is the plate-shaped heat shield member. The vacuum pump according to at least one of claims 1 to 5, characterized in that   The heat exchanger is formed by laminating a plurality of the circular heat exchanger members so that the plate members and the press fixed blades are in close contact with each other. When viewed from the normal direction field of view, at least part of the projections of the two plate-shaped heat shield members adjacent to each other overlap to form an invisible portion behind the heat exchanger. The vacuum pump according to claim 7.   The heat exchanger is formed by laminating a plurality of the circular heat exchanger members so that the plate members are in close contact with each other and the press fixing blades are separated from each other, and the plate-shaped heat shield formed by the lamination. Forming an invisible part behind the heat exchanger by overlapping at least a part of the projections of the two adjacent plate-shaped heat shield members when viewed from the normal direction visual field of the disk plane of the member The vacuum pump according to claim 7. In the heat exchanger, when laminating a plurality of the circular heat exchanger members,
The emissivity of the circular heat exchanger member disposed on the uppermost surface on the inlet side is formed smaller than the emissivity of the circular heat exchanger member disposed elsewhere, or
The emissivity of the circular heat exchanger member disposed on the lowermost surface on the exhaust port side is formed larger than the emissivity of the circular heat exchanger member disposed elsewhere, or
The circular heat exchanger member disposed on the uppermost surface on the inlet side is formed so that the emissivity of the circular heat exchanger member is smaller than the emissivity of the other surface, and is disposed on the lowermost surface on the exhaust port side. The emissivity of the heat exchanger member is formed larger than the emissivity of the other circular heat exchanger members,
The vacuum pump according to claim 8 or 9, characterized in that.   The vacuum pump according to any one of claims 1 to 10, wherein the exterior body includes a flange portion having a heat insulating member on the intake port side.

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