JP2012086933A - Fall prevention fence and conveyance system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent an object-to-be-conveyed from falling from a carrier vehicle, and to achieve an efficient conveyance of the object-to-be-conveyed.SOLUTION: A fall prevention fence 600 is provided along a track on the lower side of the carrier vehicle 200 for conveying the object-to-be-conveyed 400 by traveling on the track 100 laid on a ceiling. The fall prevention fence comprises a longitudinal member which is provided in such a manner as to be elongated in a direction along the track, and a traverse member which is provided in such a manner as to be elongated in a direction of crossing the track and connected to the longitudinal member. One of the longitudinal and traverse members can be attached to/detached from the other member so as to be capable of forming an area through which the object-to-be-conveyed passes.

Description

  The present invention relates to a technical field of a fall prevention fence that prevents a transported object from falling from a transport vehicle that travels along a track laid on a ceiling, for example, and a transport system that includes the fall prevention fence.

  In semiconductor manufacturing, as one of factory automation, silicon wafers, which are materials, are stored in containers (for example, FOUP) and automatically transported by a overhead traveling transport device with a hoist (so-called OHT: Overhead Hoist Transport). There is. The OHT grips and conveys the top flange of the FOUP with a gripping part (gripper). However, the FOUP may fall due to damage to the flange, for example, and may hit an underlying person or object. In addition, total damage to the wafer during FOUP is inevitable.

  As a measure for preventing the fall of the FOUP during the conveyance, the conventional FOUP has been relatively light, and it has been considered sufficient to provide a fall prevention device on the OHT vehicle side. However, as the diameter of the wafer increases (specifically, for example, 300 mm is changed to 450 mm), the FOUP also becomes larger and heavier. Response alone has been considered inadequate.

  For this reason, a technique for installing a fall prevention fence under the OHT track has been proposed. For example, Patent Documents 1 and 2 disclose a fence for preventing a load from falling from an OHT vehicle.

Japanese Utility Model Publication No. 2-27965 Japanese Patent Laid-Open No. 62-290696

  In a semiconductor manufacturing factory, it is preferable that a new semiconductor manufacturing apparatus can be easily accommodated when an attempt is made to add a new semiconductor manufacturing apparatus in the future. Since semiconductor manufacturing equipment is very expensive, it is almost always the case that the number of equipment is gradually increased according to the production volume, rather than installing all the manufacturing equipment for the full production volume from the beginning.

  However, the fall prevention fences described in Patent Documents 1 and 2 are provided so as to be fixed to the track. Therefore, when a semiconductor manufacturing device is added, a large or complete remodeling work is required to deliver the FOUP at the additional location (that is, transfer between the transport vehicle and the new semiconductor manufacturing device). It will be. That is, there is a technical problem that even if the fall prevention fence is prevented from falling simply by using the fall prevention fence, it becomes difficult to cope with future expansion of the apparatus.

  The present invention has been made in view of, for example, the above-described problems, and provides a fall prevention fence and a transport system that can prevent a transported object from falling and can easily cope with a layout change. Is an issue.

  In order to solve the above-described problem, the fall prevention fence of the present invention is provided on the lower side of a transport vehicle that transports an object to be transported by traveling on a track laid on a ceiling so as to follow the track. A longitudinal member provided so as to extend in a direction along the track, a transverse member provided so as to extend in a direction intersecting the raceway, and connected to the longitudinal member; One member of the longitudinal member and the transverse member is detachable from the other member so as to form a region through which the conveyed object passes.

  The fall prevention fence of the present invention is provided along the track on the lower side of the transport vehicle that transports the object to be transported by traveling on the track laid on the ceiling. The fall prevention fence receives the object to be dropped that is caused by, for example, breakage of the flange of the object to be conveyed, and prevents the object from falling to the ground immediately below. Therefore, it is possible to prevent the conveyed object from falling and colliding with a person or an object. By providing the fall prevention fence at a position close to the transport vehicle, it is possible to reduce the impact caused by the drop on the transported object.

  The fall prevention member of the present invention is installed so as to be suspended from, for example, a ceiling or a track, and is provided so as to extend in a direction along the track (in other words, a direction along the traveling direction of the transport vehicle). And a traversing member provided to extend in a direction intersecting the track (in other words, a direction intersecting with the extending direction of the longitudinal member). The longitudinal member and the transverse member are connected to each other, and are configured to receive a falling transported object. In addition, the fall prevention member does not need to be provided in the entire lower area of the track, and may be partially provided in a place where there is a high risk of being dropped.

  Here, in particular, one of the longitudinal member and the transverse member is detachable with respect to the other member so as to form a region through which the object to be conveyed passes. That is, by partially removing one of the members, a gap is provided in the fall prevention fence, and the conveyed object can be passed below the fall prevention fence using the gap. In addition to one member, the other member may be detachable.

  More specifically, the fall prevention member of the present invention is configured, for example, by attaching one detachable member to the other member fixed relatively to the track. And one member is removed partially in the location which wants to pass a to-be-conveyed object below a fall prevention fence. Thereby, delivery of a to-be-conveyed object is realizable between the conveyance vehicle which drive | works above a fall prevention fence, and the semiconductor manufacturing apparatus, storage place, etc. which are arrange | positioned below a fall prevention fence.

  The position and size of the place where the above-mentioned transported object is to be transferred change due to a change in system specifications (for example, a change in the layout of the apparatus) or the like. In other words, the place where the object to be conveyed should be able to be delivered below the fall prevention fence may not always be the same place but may change. If the fall prevention fence is fixed here, the position and size of the place where the object can be delivered cannot be changed. However, according to the fall prevention fence of the present invention, the position and size of the gap in the fall prevention fence can be changed by detaching one member from the other member. Therefore, it is possible to flexibly cope with a change in system specifications.

  One of the longitudinal member and the transverse member may not be configured to be detachable. For example, it may be fixed to the other member in a non-detachable manner at a place where there is no possibility of delivering the object to be transported across the fall prevention fence. Contrary to the configuration described above, there may be a portion in which the other member is configured to be detachable from the one member.

  As described above, according to the fall prevention fence of the present invention, it is possible to easily cope with the layout change of the factory manufacturing apparatus.

  In one aspect of the fall prevention fence of the present invention, the one member is detachable in units of length in a direction along the track of the conveyed object.

  According to this aspect, since the position and size of the gap in the fall prevention fence can be adjusted in units of length in the direction along the track of the conveyed object, adjustment of the gap in the fall prevention fence in accordance with the system specification change is preferable. Can be done. In other words, since the position and size of the gap can be adjusted based on the width of the object to be transported, which is the object to be passed, the operation can be performed relatively easily.

  In addition, when the size of the gap completely matches the width of the conveyed object, the conveyed object cannot be passed. For this reason, it is desirable that the gap in the fall prevention fence can be adjusted on the basis of a value including a slight margin (specifically, about 20 mm to 50 mm) in the width of the conveyed object. That is, the “width of the object to be transported” according to this aspect does not need to be a value that completely matches the width of the object to be transported, and may be a value determined based on the width of the object to be transported. .

  Further, the “width of the object to be conveyed” does not need to be set to the size of one of the removable members. That is, the “width of the object to be conveyed” may be realized by removing one of the plurality of members.

  In another aspect of the fall prevention fence of the present invention, the one member is a rod-like member that can be attached and detached independently for each one.

  According to this aspect, since one member of the longitudinal member and the transverse member is configured as a rod-like member that can be independently detached, the position and size of the gap in the fall prevention fence are extremely finely adjusted. be able to. Moreover, the structure of the attachment / detachment mechanism can be made relatively easy.

  In another aspect of the fall prevention fence of the present invention, the one member is a flat plate member having a plurality of air holes.

  According to this aspect, since one member of the longitudinal member and the transverse member is configured as a flat plate-like member, it is possible to increase the strength of the fall prevention fence or cope with a fine fallen object. . Further, since one member has a plurality of vent holes, it is possible to suppress, for example, turbulence in the air flow in a clean room. Note that one member according to this aspect may be configured as, for example, a metal plate, or may be configured as a member in which a metal frame is stretched.

  In another aspect of the fall prevention fence according to the present invention, a pair of the longitudinal members are provided as the other member with an interval through which the conveyed object can pass, and the transverse member is the one of the transverse members. A plurality of members are installed between the pair of longitudinal members at intervals such that the conveyed object cannot pass.

According to this aspect, as the other fixed member, the pair of longitudinal members are provided with an interval through which the conveyed object can pass. In addition, as one of the removable members, a plurality of traversing members are
It is constructed between a pair of longitudinal members at intervals such that the conveyed object cannot pass. That is, a plurality of transverse members are provided so as to fill a gap between the pair of longitudinal members. The plurality of traversing members are typically arranged at equal intervals.

  According to the configuration described above, it is possible to suitably adjust the position and size of the gap in the fall prevention fence by removing a necessary number of traversing members. Further, finer adjustment is possible as compared with the case where the longitudinal member is configured as one of the removable members. Therefore, it is possible to deal with a change in system specifications more flexibly.

  In order to solve the above problems, the transport system of the present invention has a track laid on the ceiling, a transport vehicle that travels along the track and transports the object to be transported, and the above-described fall prevention fence of the present invention (however, its Including various aspects), and a delivery unit that is provided below the part where the one member of the fall prevention fence is partially removed, and delivers the object to be transported to and from the carriage. Is provided.

  According to the transport system of the present invention, the transported object is transported as the transport vehicle loaded with the transported object travels on the track laid on the ceiling. The above-described fall prevention fence according to the present invention is provided on the lower side of the transport vehicle, and prevents an object to be transported being transported by the transport vehicle from accidentally falling to the ground. On the lower side of the fall prevention fence, there is provided a delivery unit for delivering the object to be conveyed with the transport vehicle. The delivery unit is, for example, a semiconductor manufacturing apparatus or a storage shelf that temporarily stores a transferred object.

  In the present invention, the above-mentioned delivery part is provided below the part where one member of the fall prevention fence is partially removed. Thereby, it is possible to reliably realize delivery of the object to be conveyed between the transport vehicle and the delivery unit. Therefore, it is possible to prevent the transported object from falling and to efficiently transport the transported object.

  The effect | action and other gain of this invention are clarified from the form for implementing invention demonstrated below.

It is a top view which shows the whole structure of the conveyance system which concerns on embodiment. It is a side view which shows the structure of the conveyance vehicle which concerns on embodiment. It is a perspective view which shows the transfer operation | movement of the conveyance vehicle which concerns on embodiment. It is a perspective view which shows the horizontal transfer operation | movement of the conveyance vehicle which concerns on embodiment. It is a perspective view which shows the structure of the fall prevention fence which concerns on embodiment. It is a top view which shows the specific structure of the fall prevention fence which concerns on embodiment. It is a top view which shows the clearance gap provided in the fall prevention fence which concerns on embodiment. It is a perspective view (the 1) which shows the attachment / detachment mechanism of the fall prevention fence which concerns on embodiment. It is a perspective view (the 2) which shows the attachment / detachment mechanism of the fall prevention fence which concerns on embodiment. It is a perspective view (the 3) which shows the attachment / detachment mechanism of the fall prevention fence which concerns on embodiment. It is a top view (the 1) showing a modification of a fall prevention fence concerning an embodiment. It is a top view (the 2) showing the modification of the fall prevention fence concerning an embodiment.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

  First, the overall configuration of the transport system according to the present embodiment will be described with reference to FIG. FIG. 1 is a plan view showing the overall configuration of the transport system according to this embodiment.

  In FIG. 1, the transport system according to the present embodiment includes a track 100, a transport vehicle 200, and a controller 300.

  The track 100 is laid on the ceiling, for example, and is made of a metal such as aluminum, stainless steel, or iron.

  A plurality of transport vehicles 200 are arranged on the track 100, and can travel the FOUP that is a transported object by traveling along the track 100.

  The transport vehicle 200 has an on-vehicle controller 205. The on-vehicle controller 205 receives a conveyance command from the controller 300 and controls the traveling of the conveyance vehicle 200. The on-board controller 205 not only controls the travel of the transport vehicle 200 but also has a function of comprehensively controlling each device provided in the transport vehicle 200.

  The controller 300 includes, for example, an arithmetic circuit, a memory, and the like, and is configured to be able to give a conveyance command to the conveyance vehicle 200 via the on-vehicle controller 205.

  Although illustration is omitted here, a plurality of fall prevention fences for preventing the FOUP from dropping from the transport vehicle such as a buffer for temporarily storing the FOUP and a semiconductor manufacturing apparatus are provided at positions along the track 100. Is provided. The configuration of the fall prevention fence will be described in detail later.

  Next, a more specific configuration of the transport vehicle will be described with reference to FIG. FIG. 2 is a side view showing the configuration of the transport vehicle.

  In FIG. 2, the transport vehicle 200 includes a traveling unit 210, a main body unit 220, a moving unit 230, an elevating control unit 235, an elevating belt 240, and a gripping unit 250.

  The transport vehicle 200 travels along the track 100 while the traveling roller 215 rolls by applying a propulsive force by the traveling unit 210 using, for example, a linear motor composed of a track-side magnet. In addition, the power supply to the conveyance vehicle 200 is performed by non-contact power feeding. A main body 220 is attached to the lower surface of the traveling unit 210 so as to hang.

  A moving part 230 is attached to the main body part 220. The moving unit 230 can move to the side of the track 100 (that is, the horizontal direction in the drawing). Further, turning is possible if necessary. A lifting control unit 235 is attached to the lower surface of the moving unit 230.

  A gripping part 250 that grips the FOUP is attached to the lower surface of the lift control part 235 by a lift belt 240. The gripping part 250 can move up and down with respect to the main body part 220 by unwinding or winding up the lifting belt 240 of the lifting control part 235.

  Next, a method for transferring FOUP using a transport vehicle will be described with reference to FIGS. Here, FIGS. 3 and 4 are perspective views showing a method for transferring the FOUP of the transport vehicle according to the embodiment.

  In FIG. 3, when the transport vehicle 200 transfers the FOUP 400 on the port 510 located directly below the track 100, first, the transport vehicle 200 travels on the track 100 and the FOUP 400 installed on the port 510. Stop above. Then, fine adjustment of the position of the grip portion 250 and the FOOP 400 is performed.

  Subsequently, as shown in the figure, the elevating belt 240 is unwound by the elevating control unit 235. As a result, the grip portion 250 is lowered to the position of the FOUP 400, and the FOUP 400 is gripped.

  When the FOUP 400 is gripped, the elevating belt 240 is wound up, and the grip portion 250 and the gripped FOUP 400 are raised to the position of the main body portion 220. Then, the transport vehicle 200 travels again on the track 100, and the FOUP 400 is transported.

  In FIG. 4, when the FOUP 400 is installed in the side buffer 520 at a position deviated to the side of the track 100, the elevating control unit 235 moves up and down after the moving unit 230 moves to the side of the track 100. The belt 240 is unwound and the gripping portion 250 is lowered to the position of the FOUP 400. By operating in this way, the FOUP 400 can be laterally transferred from the track unit 100.

  In the present embodiment, the transport vehicle 200 having the moving unit 230, that is, the transport vehicle having the lateral transfer mechanism is described as an example, but even if the transport vehicle 200 does not have the lateral transfer mechanism, The present invention is applicable.

  Next, the fall prevention fence which concerns on this embodiment is demonstrated with reference to FIGS.

  First, the whole structure of the fall prevention fence which concerns on this embodiment is demonstrated with reference to FIG. FIG. 5 is a perspective view showing the configuration of the fall prevention fence according to the embodiment.

  In FIG. 5, the fall prevention fence 600 according to the present embodiment is provided along the track 100 so as to cover the lower side of the transport vehicle 200 traveling on the track 100. The fall prevention fence 600 is provided so as to be suspended from the ceiling, for example.

  In particular, the fall prevention fence 600 according to the present embodiment is partially provided with a gap at a location where the transport vehicle 200 delivers the FOUP 400 below the fall prevention fence 600. Specifically, the transport vehicle 200 delivers the FOUP 400 to and from the semiconductor manufacturing apparatus 550 in the drawing. Therefore, the fall prevention fence 600 at a position overlapping with the semiconductor manufacturing apparatus 530 is partially removed, and the FOUP 400 can be transferred between the transport vehicle 200 and the semiconductor manufacturing apparatus 530.

  Next, each member which comprises the fall prevention fence which concerns on this embodiment, and the adjustment method of a clearance gap are demonstrated with reference to FIG. FIG. 6 is a top view showing a specific configuration of the fall prevention fence according to the embodiment. FIG. 7 is a top view showing a gap provided in the fall prevention fence according to the embodiment.

  In FIG. 6, the fall prevention fence 600 (see FIG. 5) according to the present embodiment includes a longitudinal member 610 extending in a direction along the track 100 and a transverse member 620 extending in a direction intersecting the track 100. Configured.

  The longitudinal member 610 is made of, for example, aluminum, stainless steel, iron, resin, or the like, and is fixed to the track 100. Further, a pair of the longitudinal members 610 are provided with an interval through which the FOUP 400 can pass.

  Similar to the longitudinal member 620, the transverse member 620 is made of, for example, aluminum, stainless steel, iron, resin, or the like. The transverse members 620 are installed at equal intervals so as to fill a gap between the pair of longitudinal members 610.

  In FIG. 7, in particular, in the fall prevention fence 600 according to the present embodiment, the traversing member 620 is configured to be detachable from the longitudinal member 610. Therefore, if the traversing member 620 is partially removed as shown in the figure, a region through which the FOUP 400 can pass can be formed. Therefore, the transport vehicle 200 can deliver the FOUP 400 to and from the semiconductor manufacturing apparatus 530 (see FIG. 5) and the like existing below the fall prevention fence 600.

  Further, since the traversing member 620 is configured as a rod-like member that can be attached and detached one by one, the position and size of the gap can be adjusted very suitably. The position and size of a location where the FOUP 400 can be delivered vary depending on a change in system specifications. Specifically, the location where the gap is to be changed varies depending on the location of the semiconductor manufacturing apparatus 530 shown in FIG. 5 or the installation of a new apparatus. Therefore, the effect peculiar to the present embodiment that the position and size of the gap can be finely adjusted is extremely effective in practice.

  In the fall prevention fence 600 according to the present embodiment, the size of the gap can be adjusted at least in the length unit in the direction along the track 100 of the FOUP. In the above-described embodiment, since the transport vehicle 200 grips and transports the FOUP 400 that is a transported object in the lateral direction (that is, the direction in which the opening or the lid faces sideways), the detachable unit of the traversing member 620 can be attached. Is a width unit of FOUP400. On the other hand, when the FOUP 400 is gripped and conveyed in either the front or rear direction, the detachable unit of the traversing member 620 is the depth unit of the FOUP.

  Next, the attachment / detachment mechanism of the fall prevention fence according to the present embodiment will be described with reference to FIGS. Here, FIGS. 8 to 10 are perspective views showing the attachment / detachment mechanism of the fall prevention fence according to the embodiment.

  In FIG. 8, a plurality of grooves are provided on the upper surface of the longitudinal member 610a constituting the fall prevention fence 600 according to the present embodiment. On the other hand, grooves corresponding to the grooves provided in the longitudinal member 610 are provided at both ends of the transverse members 620a and 620b. Therefore, if the longitudinal member 610a and the groove of the transverse member 620a or 620b are engaged with each other, the transverse member 620 can be attached to the longitudinal member 610 relatively easily.

  In FIG. 9, the longitudinal member 610b which comprises the fall prevention fence 600 which concerns on this embodiment is provided with the several hole. On the other hand, protrusions corresponding to holes provided in the longitudinal member 610 are provided at both ends of the transverse member 620c. The protrusion of the traversing member 620c is configured to be extendable and contractable by a spring or the like. Therefore, if the projecting portion of the traversing member 620c is contracted, it can be inserted into the hole provided in the longitudinal member 610b. Therefore, the transverse member 620 can be attached very preferably. In addition, if the protrusion part of the traversing member 620c is comprised so that expansion and contraction is possible, the other does not need to be extendable.

  In FIG. 10, a plurality of holders are provided on the longitudinal member 610 c constituting the fall prevention fence 600 according to the present embodiment. Therefore, it is possible to suitably attach the rod-shaped transverse member 620d to the longitudinal member 610c. In such a configuration, each of the longitudinal member 610 and the transverse member 620 does not need to be processed into a special shape as in the examples shown in FIGS. It can be simple.

  The configuration of the fall prevention fence 600 is not limited to the above-described configuration, and any one of the longitudinal member 610 and the transverse member 620 constituting the fall prevention fence 600 may be detachable. Below, the modification of the fall prevention fence which concerns on this embodiment is demonstrated with reference to FIG.11 and FIG.12. Here, FIGS. 11 and 12 are top views showing modifications of the fall prevention fence according to the embodiment.

  In FIG. 11, the fall prevention fence 600 according to the present embodiment may be configured such that a plurality of longitudinal members 610 can be attached to and detached from the transverse member 620 fixed along the track 100. That is, the configuration opposite to that shown in FIG. In this case, compared to the fall prevention fence 600 shown in FIG. 6, the degree of freedom of the position and size at which the gap can be formed is reduced, but the position and size of the gap can be adjusted relatively easily. . In addition, it becomes possible to adjust a gap more suitably by setting the length of the longitudinal member 610 according to the width of the FOUP 400.

  In FIG. 12, the fall prevention fence 600 which concerns on this embodiment may be comprised using not only a rod-shaped member but a flat member. Specifically, as shown in the figure, if the longitudinal member 610 is a flat plate member, the original function of the fall prevention fence 600 for preventing the FOUP 400 from dropping can be enhanced. For example, when the FOUP 400 corresponding to a 450 mm wafer is transported, the load resistance performance of the fall prevention fence 600 is preferably about 24 kg or more.

  In FIG. 12, the traversing member 620 is configured as a member in which a metal frame (a metal, a resin, or the like is not limited) is stretched on a metal frame, but may be configured by, for example, an expanded metal or a punching metal. Absent. Even when a flat plate-like member is used, it is possible to suppress the turbulence of the air flow in the clean room by increasing the air permeability as described above.

  As described above, according to the transport system according to the present embodiment, one of the longitudinal member 610 and the transverse member 620 constituting the fall prevention fence 600 is detachable, so the position of the gap It is possible to suitably adjust the size. Therefore, it is possible to prevent the transported object from falling and to efficiently transport the transported object.

  The present invention is not limited to the above-described embodiment, and can be appropriately changed without departing from the gist or concept of the invention that can be read from the claims and the entire specification. And a transport system are also included in the technical scope of the present invention.

  DESCRIPTION OF SYMBOLS 100 ... Track, 200 ... Conveyance vehicle, 205 ... On-board controller, 210 ... Traveling part, 215 ... Traveling roller, 220 ... Main part, 230 ... Moving part, 235 ... Lifting control part, 240 ... Lifting belt, 250 ... Gripping part , 300 ... Controller, 400 ... FOUP, 510 ... Port, 520 ... Side buffer, 530 ... Semiconductor manufacturing equipment, 600 ... Fall prevention fence, 610 ... Longitudinal member, 620 ... Cross member

Claims (6)

A fall prevention fence provided along the track on the lower side of the transport vehicle that transports the object to be transported by traveling on the track laid on the ceiling,
A longitudinal member provided to extend in a direction along the track;
Provided so as to extend in a direction intersecting the track, and provided with a transverse member connected to the longitudinal member,
One of the longitudinal member and the transverse member can be attached to and detached from the other member so as to form a region through which the conveyed object passes.   The fall prevention fence according to claim 1, wherein the one member is detachable in units of length in a direction along the track of the transported object.   The fall prevention fence according to claim 1 or 2, wherein said one member is a rod-like member which can be detached and attached independently for every one.   The fall prevention fence according to claim 1 or 2, wherein the one member is a flat plate member having a plurality of air holes. A pair of the longitudinal members are provided as the other member with an interval through which the conveyed object can pass.
The traversing member, as the one member, is installed between a pair of the traversing members at intervals such that the transported object cannot pass through the traversing member. Fall prevention fence according to one item A track laid on the ceiling,
A transport vehicle that travels along the track and transports the object to be transported;
The fall prevention fence according to any one of claims 1 to 5,
The one side member in the fall prevention fence is provided in the lower part of the part where it was removed partially, and it has a delivery part which delivers the object to be conveyed between the conveyance vehicles. Conveying system.

Images