JP2012083242A - Particle measuring method and particle measuring device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a particle measuring device and a particle measuring method which enable accurate, continuous, and periodical measurement of large-size particles which float in the air and then sediment, with stable measurement accuracy.SOLUTION: The invention comprises: a collection process for collecting on a collection surface, particles which float in the air and then sediment; an image-capturing process for capturing images of the particles collected on the collection surface; and a measurement process for measuring particles.

Description

  The present invention relates to a particle measuring method and a particle measuring apparatus.

  Conventionally, in manufacturing and assembling processes for precision instruments and the like, relatively large particles floating in the air in the process adhere to the parts and the like constituting the precision instrument being assembled and affect the quality. For this reason, the particle | grains which float in the air are measured, and when there are many particles, the manufacturing assembly process is cleaned.

  As a particle measuring method, it is known to measure the number of particles floating in the air and the particle size (length) of the particles by a particle counter. The particle counter sucks air to be measured, and introduces the air as sample air into an optical unit provided inside the particle counter. The optical unit projects laser scattered light onto the sample air, so that particles contained in the air reflect the laser scattered light, and the optical unit performs measurement by receiving the reflected laser scattered light. .

  Also, using a surface such as a silicon wafer, the particles that settle in the air (spontaneously falling) are collected, and the collected particles are observed with a microscope, and the number of particles and the particle size are measured. The method of doing is known. Patent Document 1 discloses a fine particle measurement method in which fine particles in a liquid or gas are collected as contaminants on a filter for impurity filtration, and the number of particles is classified according to the particle diameter to indicate the degree of contamination.

JP 2008-20241 A

  However, the particles floating in the air have a higher sedimentation speed in the air when the particle diameter is large (approximately 10 μm or more). For this reason, it is considered that particles having a large particle diameter are difficult to be sucked as sample air. In addition, it often adheres to the inner wall of a pipe (for example, a vinyl tube or the like) for introducing sample air, and it is difficult to reach the optical part. For this reason, when particles having a large particle size floating in the air are measured with a particle counter, there is a problem that the number of particles is measured smaller than the particles actually floating.

  Next, the method of collecting particles on the surface of a silicon wafer, etc., observing with a microscope, and measuring is often performed by visual observation by an operator. For this reason, the time required for measurement differs depending on the proficiency level of the worker, and there is also a problem that the measurement accuracy varies. Furthermore, there is a problem that it is not easy to perform measurement continuously and regularly because of measurement by an operator. Patent Document 1 does not mention the above-described problem.

  For this reason, there is a need for a particle measurement device and a particle measurement method that can accurately and continuously measure particles with a large particle size that float and settle in the air with no variation in measurement accuracy. It had been.

  SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following forms or application examples.

  Application Example 1 The particle measurement method according to this application example includes a collection step of collecting particles that float in air and settles on a collection surface, and an image that captures the particles collected on the collection surface. The method includes a step and a measurement step for measuring particles.

  According to such a particle measuring method, it is possible to accurately measure a particle having a large particle diameter by collecting the particle having a large particle diameter that floats and settles in the air on the collecting surface and images the particle. it can.

  Application Example 2 In the particle measurement method according to the application example described above, the measurement process converts the imaging data captured in the imaging process into image data of particles, and the particle quantity measurement and length based on the image data It is preferable to provide a measurement processing step for performing measurement including measurement.

  According to such a particle measurement method, the captured particle is imaged, converted into image data, and measured, so that the size of the particle is determined by the number of pixels on which the particle is imaged, The size of the particle can be measured by multiplying by the size of the pixel. Moreover, the measurement of the number of particles can be measured with a unit in which the pixels in which the particles are imaged are connected as one particle.

  (Application example 3) In the particle measurement method according to the application example, the measurement process includes reference image data serving as a reference of particles, and includes an image comparison process for comparing the reference image data with the image data. Is preferred.

  According to such a particle measurement method, the comparison between the reference image data and the captured image data is performed on the surface pattern and transparency of the particle by the image comparison step, and the same as the reference image data. Particles can be detected.

  Application Example 4 In the particle measurement method according to the application example described above, it is preferable that the imaging process captures an image from a direction opposite to the particle sedimentation direction with reference to the collection surface.

  According to such a particle measuring method, the captured particles can be imaged without disturbing the sedimentation of the particles by imaging from the opposite direction to the sedimentation direction of the particles.

  Application Example 5 In the particle measurement method according to the application example described above, it is preferable to include a removal step for removing particles.

  According to such a particle measurement method, it is possible to suppress redundant measurement of particles by including the removal step. Therefore, it is possible to continuously collect and measure the next particle.

  Application Example 6 In the particle measurement method according to the application example described above, it is preferable that the removal step is performed by attaching particles to a viscous elastic member.

  According to such a particle measuring method, scattering of the removed particles can be suppressed by attaching the particles to the elastic member having viscosity and removing the particles.

  (Application example 7) The particle measuring apparatus according to this application example images a collection unit having a collection surface for collecting particles that float in the air and settles, and particles collected by the collection unit. An imaging unit and a measurement unit that measures particles are provided.

  According to such a particle measuring apparatus, the particle measuring apparatus has a collecting surface that collects particles having a large particle diameter that floats and settles in the air, and includes an imaging unit that images the collected particles. It is possible to accurately measure particles having a large diameter.

  Application Example 8 In the particle measuring apparatus according to the application example described above, the measurement processing unit converts the imaging data captured by the imaging unit into image data of particles, and the particle quantity measurement and length based on the image data. It is preferable to include a measurement unit that performs measurement including measurement.

  According to such a particle measuring apparatus, a particle measuring apparatus that can obtain a measurement result in which variation in measurement accuracy is suppressed by including a measuring unit that captures captured particles, converts them into image data, and performs measurement. Can be realized.

  Application Example 9 In the particle measuring apparatus according to the application example described above, the measurement unit includes a reference image data storage unit that stores reference image data serving as a particle reference, and compares the reference image data with the image data. An image comparison unit is preferably provided.

  According to such a particle measuring device, the image comparison unit that compares the reference image data with the converted image data is provided, and for example, the reference image data is compared by comparing the pattern of the surface of the particles, the transparency, and the like. A particle measuring apparatus that can detect particles having the same particle shape can be realized.

  Application Example 10 In the particle measuring apparatus according to the application example described above, the collection unit is configured to include a transparent plate-like member, and the imaging unit is disposed in a direction opposite to the particle settling direction to perform imaging. It is preferable.

  According to such a particle measuring apparatus, the collection unit is configured by a transparent plate-like member, and the imaging unit is arranged in a direction opposite to the particle settling direction, so that the particle settling is not hindered. Imaging can be performed.

  Application Example 11 In the particle measuring apparatus according to the application example described above, it is preferable that the collection unit is configured integrally or separately from the imaging unit.

  According to such a particle measuring apparatus, the collection unit is configured to be integrated with or separate from the imaging unit, and thereby selects a particle collection method according to an environment in which particles are collected and measured. Can do.

  Application Example 12 In the particle measuring apparatus according to the application example described above, it is preferable to include a removal unit that removes particles.

  According to such a particle | grain measuring apparatus, it can suppress that particle | grains are measured repeatedly by providing a removal part. Therefore, a particle measuring apparatus capable of continuously collecting and measuring the next particle can be realized.

  Application Example 13 In the particle measuring apparatus according to the application example described above, it is preferable that the removal unit includes an elastic member having a viscosity to which particles are attached.

  According to such a particle measuring apparatus, the removal unit includes an elastic member having a viscosity, so that the removal of particles after the removal can be suppressed by attaching and removing the particles.

The block diagram which shows typically the structure of the particle | grain measuring apparatus based on 1st embodiment. The flowchart which shows each process of the particle | grain measuring method based on 1st embodiment. The figure which shows typically arrangement | positioning with the particle | grain collection part and imaging part which concern on the particle | grain measuring apparatus of FIG. The figure which shows typically arrangement | positioning with the collection part of particle | grains, and an imaging part based on 2nd embodiment. The block diagram which shows typically the structure of the particle | grain measuring apparatus based on 3rd embodiment. The flowchart which shows each process of the particle | grain measuring method based on 3rd embodiment. The figure which shows typically arrangement | positioning of the imaging part and removal part of a particle which concern on the particle | grain measuring apparatus of FIG.

  Hereinafter, an embodiment will be described based on the drawings with respect to the particle measuring method and the particle measuring apparatus 1. In the drawings shown below, the dimensions and ratios of the respective constituent elements are described differently from the actual constituent elements in order to make each constituent element large enough to be recognized on the drawings. Yes.

(First embodiment)
FIG. 1 is a block diagram schematically showing the configuration of the particle measuring apparatus 1 according to this embodiment. FIG. 2 is a flowchart showing each step of the particle measuring method according to the present embodiment. FIG. 3 is a diagram schematically illustrating the arrangement of the particle collecting unit 10 and the imaging unit 20 according to the particle measuring apparatus 1 of FIG. 1.
With reference to FIGS. 1 to 3, the outline of the configuration of the particle measuring apparatus 1 and the flow of the particle measuring method will be described first.

  The particle measuring device 1 of the present embodiment is a device that collects particles that settle out of particles floating in the air, and measures the number and length of the particles. As shown in FIG. 1, the particle measuring apparatus 1 according to the present embodiment is captured by a collection unit 10 that collects particles that settle, an imaging unit 20 that captures particles collected by the collection unit 10, and an image. A measurement processing unit 40 that measures the quantity and length of particles based on data, an operation unit 31 that gives an instruction to the measurement processing unit 40 and operates, and a display unit 32 that displays the measurement results. ing. The measurement processing unit 40 measures the number and length of particles and compares the reference image with a measurement unit 41, an output unit 43 that outputs the measurement and comparison results to the display unit 32, and records the measurement results. A recording unit 44 and a storage unit 45 that stores the measurement result are provided. The measurement unit 41 also includes an imaging data conversion unit 410 that converts imaging data into image data, an image comparison unit 420 that compares the converted image data with reference image data, and reference image data that serves as a reference for comparison. And an image storage unit 421 for storing.

  In addition, the collection part 10 is comprised separately from the imaging part 20 (particle-measurement apparatus 1 main body). In the present embodiment, the imaging unit 20, the measurement processing unit 40, the operation unit 31, and the display unit 32 are housed in an exterior housing (not shown). In addition, a cable (not shown) that connects each component, a power supply unit (not shown) that supplies power to each component, and the like are also housed inside the exterior housing.

  Moreover, as shown in FIG. 2, the particle measuring method was picked up in order of the collection step P110 for collecting the particles that settle, the imaging step P120 for imaging the particles collected in the collection step P110, and the imaging. A measurement processing step P140 for measuring the quantity and length of particles based on the data, an operation step P131 for giving an instruction to the measurement processing step P140 and an operation, and a display step P132 for displaying the measurement result are configured. ing. The measurement processing step P140 includes an imaging data conversion step P141 that converts imaging data into image data, an image comparison step P142 that compares the converted image data with reference image data, and reference image data that serves as a reference for comparison. Is stored, an output process P144 for outputting the comparison result to the display process P132, a recording process P145 for recording the measurement result, and a storage process P146 for storing the measurement result.

  As shown in FIG. 3, the collection part 10 of this embodiment is comprised with the transparent plate-shaped member. Specifically, the collection unit 10 uses a transparent glass plate. Further, the collection unit 10 includes a collection surface 11 and collects particles 70 that have settled on the collection surface 11. The collection unit 10 may be a transparent plate member such as an acrylic resin plate.

  The arrangement relationship between the imaging unit 20 and the collection unit 10 will be described. As shown in FIG. 3, the imaging unit 20 is relative to the lower surface of the collection unit 10, in other words, the back surface 12 that is opposite to the direction in which particles collected on the collection surface 11 settle (the direction of gravity). Installed. Therefore, the imaging unit 20 images the particles 70 through the transparent glass plate of the collection unit 10. The imaging unit 20 is installed on the upper surface of the exterior housing with the light receiving surface (not shown) constituting the imaging unit 20 facing in the direction opposite to the particle settling direction.

  Here, the particle | grains which float in the air which are the measuring objects of the particle | grain measuring apparatus 1 of this embodiment are demonstrated.

  Depending on the size of the particles floating in the air, the sedimentation speed of the particles varies. It is generally known that the falling of an object is an action due to gravity, and the action of gravity also works on floating particles. The particle settling rate increases with time if the air resistance is not taken into consideration. However, air resistance acts on particles that settle, and gravity acting on the particles at a certain sedimentation speed balances with air resistance. After equilibration, the sedimentation speed is constant until landing on the floor or the like. It is known that the end velocity of particle sedimentation can be obtained from the Stokes equation. For example, when particles having the same composition differ only in particle diameter (size), the calculated value by the Stokes equation of the sedimentation speed is 35 μm / second for particles of 1 μm, and 3045 μm / second for 10 μm. This shows that the sedimentation rate of particles having a large particle diameter is fast.

  Therefore, there is a need for a particle measuring apparatus 1 that collects and measures particles having a high sedimentation speed. Therefore, the particle measuring apparatus 1 of the present embodiment is a particle measuring apparatus that collects particles having a high sedimentation speed of approximately 10 μm or more on the collection surface and measures the particles.

  Next, the operation of the particle measuring apparatus 1 will be described together with the particle measuring method with reference to FIGS. As a pre-operation for starting the measurement, the collection surface 11 is cleaned. Cleaning removes the particles adhering to the collection surface 11 with a cloth or the like. Next, the collection part 10 is installed in the place which measures particle | grains. This work is performed by an operator. The execution of this work is the collection process P110.

  In the installed collection unit 10 (collection surface 11), relatively large particles of approximately 10 μm or more out of the particles floating in the installed upper space settle and are collected. When the collection is completed, the operator collects the collection unit 10 and places it on the imaging unit 20. After this operation, an operator or the like gives an operation instruction from the operation unit 31 and operates in the measurement processing unit 40 in the particle measuring apparatus 1 main body. In addition, according to the operation instruction of the operation unit 31, the imaging unit 20 operates to capture the captured particles. This corresponds to the imaging process P120.

  The imaging unit 20 includes a light receiving element that changes light into an electrical signal, and in this embodiment, a charge-coupled device (Charge-Coupled-Device) is used. Although not shown, the light receiving surface of the charge coupled device includes a color filter, a microlens array, and an optical filter in the order of disposition from the light receiving surface. Note that the size of the particles that can be measured by the particle measuring device 1 is determined by the size of the light receiving element. For example, if the light receiving element has a resolution of 6400 dpi, the size of the element is 3.97 μm, and this size is the smallest particle that can be theoretically measured.

  Next, the operation in the measurement processing unit 40 will be described. The measurement processing unit 40 is configured as a personal computer (hereinafter referred to as a PC). The imaging data conversion unit 410 is configured as an input / output interface of a PC constituting the measurement processing unit 40, an arithmetic processing device, and a temporary storage device. The imaging data conversion unit 410 converts the imaging data captured by the imaging unit 20 into image data that can be measured and compared by the image comparison unit 420. This operation corresponds to the imaging data conversion process P141.

  The PC constituting the measurement processing unit 40 is operated by a software program that executes each process of the measurement processing unit 40. The image comparison unit 420 and the image storage unit 421 are executed by a dedicated image processing application software program. The image processing application software processes a signal output in 256 steps (8 bits) according to the intensity of light received by the light receiving element (charge coupled device) in the imaging unit 20. The image processing application software converts a signal output from the light receiving element into image data, and determines whether particles are captured in the pixels of the image data based on the converted image data. Judgment as to whether or not a particle is imaged on a pixel is performed on a pixel basis. In this embodiment, the determination is made in units of four pixels, and the presence / absence of particles imaged between the light receiving elements is also determined. Further, the image processing application software is used to compare the image serving as a reference for comparison with the captured image in units of pixels and specify the type and size of the particles.

  Next, the operation of the operation unit 31 will be described. The operation unit 31 includes a keyboard and a mouse. The operation unit 31 gives an instruction to the measurement processing unit 40 to operate the particle measuring apparatus 1 and execute particle measurement. This operation corresponds to the operation process P131.

  Next, operations in the image comparison unit 420 and the image storage unit 421 will be described. The image comparison unit 420 and the image storage unit 421 are configured by a PC arithmetic processing device and a temporary storage device that constitute the measurement processing unit 40, and software. The image comparison unit 420 measures the size (length) of the particles imaged by the imaging unit 20 and the number of particles based on the image data converted by the imaging data conversion unit 410. The particle size is measured by multiplying the number of pixels on which particles are imaged and the size of the pixels. For the measurement of the number of particles, a unit in which pixels in which the above-described particles are imaged is connected is measured as one particle. Further, the image storage unit 421 stores reference image data serving as a reference to be compared with the converted image data. The image comparison unit 420 compares the converted image data with reference image data used as a reference for comparison, and detects the surface pattern, transparency, and the like of similar particles. This operation corresponds to the image comparison process P142 and the image storage process P143.

  Next, the operation in the output unit 43 will be described. The output unit 43 includes an input / output interface of a PC that constitutes the measurement processing unit 40, an arithmetic processing device, a temporary storage device, and software. The output unit 43 outputs the result of measurement and comparison performed by the image comparison unit 420 to the display unit 32 and the recording unit 44. This operation corresponds to the output process P144.

  Next, the operation on the display unit 32 will be described. The display unit 32 includes a liquid crystal display device and a lamp. The display unit 32 displays the operation state of the measurement processing unit 40, the measurement result, and the like. This operation corresponds to the display process P132.

  Next, the operation in the recording unit 44 will be described. The recording unit 44 includes an input / output interface of a PC that constitutes the measurement processing unit 40, software, and a printing device (not shown). The recording unit 44 prints and records the measurement result output from the output unit 43 by the printing device. In addition, the measurement result is recorded and transmitted to the storage unit 45. This operation corresponds to the recording process P145.

  Next, the operation in the storage unit 45 will be described. The storage unit 45 is configured as a hard disk device of a PC that constitutes the measurement processing unit 40. The storage unit 45 stores the measurement result transmitted from the recording unit 44 in the hard disk device. This operation corresponds to the storage process P146. When the storage process P146 is completed, a series of measurement processes is completed.

  According to the first embodiment described above, the following effects can be obtained.

  According to the particle measuring device 1 and the particle measuring method according to the present embodiment, particles that float and settle in the air are collected on the collection surface 11 and the collected particles 70 are imaged. Among the particles floating on the surface, particles that settle with a large particle diameter can be collected, and the number and length of the collected particles 70 can be measured.

  According to the particle measuring apparatus 1 and the particle measuring method according to the present embodiment, the particle size is measured by converting the image data into image data and measuring the number of pixels on which the particle is imaged. And the size of the pixel can be multiplied to measure the size of the particle. In addition, the number of particles can be measured using a unit in which the pixels on which the above-described particles are imaged are connected as one particle. Therefore, variation in measurement accuracy can be suppressed as compared with measurement performed by an operator using a microscope. Moreover, the particle | grain measuring method and the particle | grain measuring apparatus 1 which are not influenced by the skill level of an operator are realizable.

  According to the particle measuring apparatus 1 and the particle measuring method according to the present embodiment, the image comparison step P142 compares the reference image data with the imaged image data by comparing the pattern of the surface of the particle, the transparency, and the like. Thus, particles similar to the reference image data can be detected. Therefore, the type of the measured particle can be easily specified.

  According to the particle measuring apparatus 1 and the particle measuring method according to the present embodiment, the particle measuring apparatus 1 and the collection unit 10 are configured separately, thereby collecting and measuring particles at a plurality of measurement locations. be able to. Moreover, it can respond to the environment which performs various measurement by selecting the member of the collection part 10. FIG. For example, when the collection part 10 is comprised with the glass plate which has heat resistance, it collects the particle | grains which float in a heating furnace, and measures particle | grains by measuring the particle | grains with the particle | grain measuring apparatus 1 after collection | recovery of particle | grains. It is possible to measure particles that float and settle in an environment where it is difficult to install the measuring device 1.

  According to the particle measuring apparatus 1 and the particle measuring method according to the present embodiment, the captured particles can be imaged without disturbing the sedimentation of the particles by imaging from the direction opposite to the sedimentation direction of the particles. it can. Since the imaging unit 20 is installed at the lower part of the collection unit 10 and captures an image, the collection unit formed of an opaque member such as a filter paper is used to capture the collected particles. Imaging can be performed without directing the surface 11 toward the light receiving surface of the imaging unit 20.

(Second embodiment)
FIG. 4 is a diagram schematically illustrating the arrangement of the particle collection unit and the imaging unit according to the second embodiment. With reference to FIG. 4, the structure of the particle | grain measuring apparatus 1 of this embodiment and the flow of the particle | grain measuring method are demonstrated.

  This embodiment is different from the particle measuring apparatus 1 described in the first embodiment described above in that the imaging unit 20 and the collection unit 10 are integrally configured. In addition, since it is the same as that of 1st embodiment, the same code | symbol is attached | subjected to the same structure and process, and description is abbreviate | omitted or simplified.

  The particle measuring apparatus 1 of the present embodiment is a particle measuring apparatus 1 that collects particles that settle on a light receiving surface (to be described later) of the imaging unit 20 and measures the collected particles. The particle measuring apparatus 1 of the present embodiment includes an imaging unit 20 that collects particles that settle and captures the collected particles.

  As shown in FIG. 4, the imaging unit 20 of the present embodiment has a light receiving surface (not shown) that constitutes the imaging unit 20 as a collection surface 21, and faces the exterior casing in a direction opposite to the direction in which particles settle. It is installed on the upper surface of the body. Accordingly, the particle measuring device 1 is installed at a place where particles are measured to collect and measure particles. Note that, in the installed imaging unit 20 (collection surface 21), among the particles floating in the installed upper space, relatively large particles of approximately 10 μm or more settle and collect as in the first embodiment. And then imaged. This operation is the collection step P110.

  According to the second embodiment described above, the following effects can be obtained.

  According to the particle measuring apparatus 1 and the particle measuring method of the present embodiment, the collection unit 10 is configured integrally with the imaging unit 20 and performs particle collection and measurement. Therefore, since the operator does not place the collection unit 10 on the imaging unit 20, the measurement can be simplified. In addition, the measurement of particles can be started or ended at the time set by the operation unit 31, for example, by executing the program. In addition, it is possible to measure particles collected continuously at time intervals set by the operation unit 31.

(Third embodiment)
FIG. 5 is a block diagram schematically showing the configuration of the particle measuring apparatus 1 according to the third embodiment. FIG. 6 is a flowchart showing each step of the particle measuring method. FIG. 7 is a diagram schematically illustrating the arrangement of the particle imaging unit and the removal unit according to the particle measuring apparatus 1 of FIG. 5.

  With reference to FIGS. 5 to 7, the configuration of the particle measuring apparatus 1 of the present embodiment and the flow of the particle measuring method will be described. In this embodiment, the removal process which removes the particle | grains collected by the collection surface and the removal part 50 which performs a removal process are provided. This is different from the particle measuring apparatus 1 and the particle measuring method described in the second embodiment. In addition, since the configuration of the particle measuring apparatus 1 and the particle measuring step are the same as those of the second embodiment described above, the same reference numerals are given to the same components and steps, and the description thereof is omitted or simplified. .

  As shown in FIG. 5, the particle measuring apparatus 1 of the present embodiment includes a removing unit 50 that removes the particles 70 collected on the collecting surface 21 in addition to the configuration of the particle measuring apparatus 1 in the second embodiment. It is configured.

  As shown in FIG. 6, the particle measurement method of the present embodiment includes a removal step P150 that removes the particles 70 collected on the collection surface 21 after the measurement processing step P140 is completed. . In addition, as a pre-operation for starting measurement, the removal unit 50 is operated to remove particles adhering to the collection surface 21. This work is performed by an operator's operation instruction from the operation unit 31.

  The arrangement relationship between the imaging unit 20 and the removal unit 50 will be described. As shown in FIG. 7, the removing unit 50 is disposed in close contact with the collection surface 21 of the imaging unit 20. Note that the arrangement of the imaging unit 20 is installed on the upper surface of the exterior housing, as in the second embodiment.

  Next, the configuration of the removing unit 50 will be described. Although the removal part 50 is comprised with the roller formed with the elastic member which has viscosity, illustration is abbreviate | omitted, it is provided with the drive part which drives a roller. Specifically, a roller formed of butyl synthetic rubber is used. The removal part 50 makes a roller adhere closely to the collection surface 21, and rotates the particle 70 currently collected by the collection surface 21 to a roller, and removes particle | grains. The removal unit 50 is preferably a rubber member that has viscosity and does not transfer the viscosity to the collection surface 21. For example, urethane rubber can also be used.

  According to the third embodiment described above, the following effects can be obtained.

  According to the particle measuring apparatus 1 of the present embodiment, the removal unit 50 includes the elastic member having viscosity, so that the particles once measured can be measured repeatedly by attaching and removing the particles. It is possible to suppress the scattering of the removed particles. Therefore, for example, it is possible to continuously measure particles that settle for a certain period of time without an operator. Further, since the removed particles are held by the roller of the removing unit 50, the particles removed after the measurement can be collected as a sample.

  DESCRIPTION OF SYMBOLS 1 ... Particle measuring device, 10 ... Collection part, 11 ... Collection surface, 12 ... Back surface, 20 ... Imaging part, 21 ... Collection surface, 31 ... Operation part, 32 ... Display part, 40 ... Measurement processing part, 41 ... Measurement unit, 43 ... Output unit, 44 ... Recording unit, 45 ... Storage unit, 50 ... Removal unit, 70 ... Particle, 410 ... Imaging data conversion unit, 420 ... Image comparison unit, 421 ... Image storage unit, P110 ... Capture Collection process, P120 ... imaging process, P131 ... operation process, P132 ... display process, P140 ... measurement processing process, P141 ... imaging data conversion process, P142 ... image comparison process, P143 ... image storage process, P144 ... output process, P145 ... Recording process, P146 ... Preservation process, P150 ... Removal process.

Claims (13)

A collection process for collecting particles that float in the air and settle on the collection surface;
An imaging step of imaging the particles collected on the collection surface;
A measuring step for measuring the particles;
A particle measuring method comprising: The particle measuring method according to claim 1,
The measurement step includes a measurement processing step of converting the image data captured in the imaging step into image data of the particles and performing measurement including measurement of the number of particles and measurement of length based on the image data. A particle measuring method characterized by the above. The particle measurement method according to claim 1 or 2, wherein
The particle measurement method characterized in that the measurement step includes reference image data serving as a reference for the particles, and includes an image comparison step for comparing the reference image data with the image data. A particle measuring method according to any one of claims 1 to 3, wherein
In the particle measuring method, the imaging step includes imaging from a direction opposite to a sedimentation direction of the particles with the collection surface as a reference. A particle measuring method according to any one of claims 1 to 4, wherein
A particle measuring method comprising a removing step for removing the particles. The particle measuring method according to claim 5,
In the removing step, the particle is attached to an elastic member having viscosity to remove the particle. A collection part having a collection surface for collecting particles that float and settle in the air;
An imaging unit for imaging the particles collected in the collection unit;
A measurement processing unit for measuring the particles;
A particle measuring apparatus comprising: The particle measuring apparatus according to claim 7,
The measurement processing unit includes a measurement unit that converts imaging data captured by the imaging unit into image data of the particles, and performs measurement including quantity measurement and length measurement of the particles based on the image data. Particle measuring device characterized by The particle measuring apparatus according to claim 7 or 8, wherein
The measurement unit includes a reference image data storage unit that stores reference image data serving as a reference for the particles, and includes an image comparison unit that compares the reference image data with the image data. Particle measuring device. The particle measuring apparatus according to any one of claims 7 to 9, wherein
The said collection part has a transparent plate-shaped member, and arrange | positions the said imaging part in the reverse direction with respect to the sedimentation direction of the said particle | grain, The particle | grain measuring apparatus characterized by the above-mentioned. The particle measuring device according to any one of claims 7 to 10, wherein
The particle collecting apparatus, wherein the collection unit is configured integrally with or separate from the imaging unit. The particle measuring device according to any one of claims 7 to 11,
A particle measuring apparatus comprising a removing unit for removing the particles. The particle measuring apparatus according to claim 12, wherein
The particle removing apparatus, wherein the removing unit includes an elastic member having a viscosity for adhering the particles.

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