JP2012079583A

JP2012079583A - Light source

Info

Publication number: JP2012079583A
Application number: JP2010224850A
Authority: JP
Inventors: Yoshiki Matsuura; 恵樹松浦
Original assignee: Hamamatsu Photonics KK
Current assignee: Hamamatsu Photonics KK
Priority date: 2010-10-04
Filing date: 2010-10-04
Publication date: 2012-04-19
Anticipated expiration: 2030-10-04
Also published as: JP5479292B2

Abstract

PROBLEM TO BE SOLVED: To provide a light source capable of extending a service life by suppressing contamination of a window material.SOLUTION: A light source 1 comprises: a light-emitting cylinder part 3A for housing a light-emitting part 2 which generates light by discharging; a light guide cylinder part 3B whose one end side is connected to the light-emitting cylinder part 3A so that the light guide cylinder part 3B communicates with the light-emitting cylinder part 3A, and which guides the light generated by the light-emitting part 2 to an emission window part 4 arranged on the other end side of the light guide cylinder part 3B; and a reflection cylinder part 9 whose one end side is abutted on the light-emitting part 2 in the light-emitting cylinder part 3A and whose other end side is inserted in the light guide cylinder part 3B, and in which a reflection surface 9a for reflecting light is formed on an inner wall surface. An opening portion 9c penetrating toward the reflection surface 9a is formed on a side face on the one end side of the reflection cylinder part 9.

Description

本発明は、内部で放電によって発生させた光を出射する光源に関する。 The present invention relates to a light source that emits light generated by discharge inside.

従来から、光源から効率よく光を放射させるための構造が検討されている。例えば、下記特許文献１に記載の重水素ランプでは、放電容器内に陽極及び陰極を取り巻くように遮蔽囲みを有し、その遮蔽囲みの一部に光反射材を設けたような構造が提案されている。 Conventionally, a structure for efficiently emitting light from a light source has been studied. For example, in the deuterium lamp described in Patent Document 1 below, a structure has been proposed in which a discharge enclosure has a shielding enclosure surrounding an anode and a cathode, and a light reflecting material is provided in a part of the shielding enclosure. ing.

特開平７−６７３７号公報Japanese Patent Laid-Open No. 7-6737 特開２００８−３１１０６８号公報JP 2008-311068 A 特開２０１０−２７２６８号公報JP 2010-27268 A 実開平５−１７９１８号公報Japanese Utility Model Publication No. 5-17918 特公平４−５７０６６号公報Japanese Examined Patent Publication No. 4-57066

しかしながら、上述した従来の重水素ランプでは、陽極及び陰極を含む放電部で生じたスパッタ物が光取り出し窓に向けて飛散して付着しやすく、寿命が短くなる傾向にあった。 However, in the conventional deuterium lamp described above, the spatter generated in the discharge part including the anode and the cathode tends to scatter and adhere toward the light extraction window, and the lifetime tends to be shortened.

そこで、本発明は、かかる課題に鑑みて為されたものであり、窓材の汚染を抑制して寿命を長くすることが可能な光源を提供することを目的とする。 Therefore, the present invention has been made in view of such problems, and an object of the present invention is to provide a light source capable of suppressing the contamination of the window material and extending the lifetime.

上記課題を解決するため、本発明の光源は、放電によって光を発生させる発光部を収容する第１の筐体と、一端側が第１の筐体に連通するように接続されて、発光部から発生した光を、他端側に設けられた出射窓部に導く第２の筐体と、一端側が第１の筐体内の発光部に当接し、他端側が第２の筐体内に挿入されており、内壁面に光を反射する反射面が形成された筒状部材と、を備え、筒状部材の一端側の側面には、反射面に向けて貫通する開口部が形成されている。 In order to solve the above-described problems, a light source of the present invention is connected to a first housing that houses a light emitting section that generates light by discharge, and one end side communicates with the first housing. A second housing that guides the generated light to an exit window provided on the other end side, one end abuts on the light emitting portion in the first housing, and the other end is inserted into the second housing. And a cylindrical member having a reflection surface that reflects light on the inner wall surface, and an opening penetrating toward the reflection surface is formed on a side surface on one end side of the cylindrical member.

このような光源によれば、第１の筐体内の発光部から発せられた光が、第１の筐体に連通する第２の筐体内から発光部にかけて挿入された筒状部材の内部に導かれることにより、第２の筐体に設けられた出射窓部から出射される。ここで、筒状部材の内壁面には反射面が形成されているので、発光部から出射された光が筒状部材の内部の反射面によって反射されつつ第２の筐体の一端側から他端側に導かれる結果、発光部から発せられた光を損失することなく第２の筐体の出射窓部まで導くことができる。併せて、筒状部材の一端側の側面には開口部が形成されているので、発光部で生じたスパッタ物を筒状部材の外部に放出することができ、筒状部材の反射面や出射窓部へのスパッタ物の付着を抑制することができる。その結果、長寿命化を図りつつ、出射窓部からの光の取り出し効率を向上させることができる。 According to such a light source, the light emitted from the light emitting unit in the first housing is guided into the cylindrical member inserted from the second housing communicating with the first housing to the light emitting unit. As a result, the light is emitted from the emission window provided in the second casing. Here, since the reflection surface is formed on the inner wall surface of the cylindrical member, the light emitted from the light emitting portion is reflected from the reflection surface inside the cylindrical member, and the other side from the one end side of the second casing. As a result of being guided to the end side, the light emitted from the light emitting part can be guided to the emission window part of the second casing without loss. In addition, since an opening is formed on the side surface on the one end side of the cylindrical member, the sputtered matter generated in the light emitting portion can be discharged to the outside of the cylindrical member, and the reflection surface and the emission of the cylindrical member can be emitted. Adhesion of the sputtered material to the window portion can be suppressed. As a result, it is possible to improve the light extraction efficiency from the exit window while extending the life.

筒状部材の開口部は、第１の筐体内に配置されている、ことが好ましい。この場合、発光部で生じたスパッタ物が第１の筐体内に放出されるので、出射窓部への飛散をさらに抑制することができ、寿命をより一層延ばすことができる。 It is preferable that the opening of the cylindrical member is disposed in the first housing. In this case, since the sputtered matter generated in the light emitting portion is released into the first casing, scattering to the emission window portion can be further suppressed, and the life can be further extended.

また、筒状部材の開口部は、筒状部材の一端側の縁部を切り欠くことにより形成されていることも好適である。かかる開口部を備えれば、より発光部に近い部分においてスパッタ物を放出することができるので、筒状部材における反射面の大部分、及び出射窓部におけるスパッタ物の付着をさらに抑制することができ、寿命をより一層延ばすことができる。 Moreover, it is also suitable that the opening part of a cylindrical member is formed by notching the edge part of the one end side of a cylindrical member. If such an opening is provided, the sputtered material can be emitted at a portion closer to the light emitting portion, and therefore, it is possible to further suppress the adhesion of the sputtered material at the majority of the reflecting surface of the cylindrical member and at the exit window. And the life can be further extended.

また、筒状部材の一端側の周縁に沿って、複数の開口部が等間隔に形成されている、ことも好適である。かかる構成を採れば、効率よくスパッタ物を放出できるので、出射窓部への飛散をさらに抑制することができ、寿命をより一層延ばすことができる。 It is also preferable that a plurality of openings are formed at equal intervals along the peripheral edge on one end side of the cylindrical member. By adopting such a configuration, the sputtered material can be efficiently discharged, so that scattering to the exit window can be further suppressed, and the life can be further extended.

また、筒状部材の外壁面は、筒状部材の材料よりも熱放射率が大きい材料からなる、ことも好適である。かかる構成を採れば、筒状部材がより放熱されやすく、出射窓部におけるスパッタ物の付着をさらに抑制することができ、寿命をより一層延ばすことができる。さらに、筒状部材の外壁面の略全面に、筒状部材の材料よりも熱放射率の大きい材料を含む熱放射膜が形成されていてもよく、この場合、容易に筒状部材の外壁面の熱放射率を高めることができ、筒状部材がさらに放熱されやすく、出射窓部におけるスパッタ物の付着をさらに抑制することができ、寿命をより一層延ばすことができる。 It is also preferable that the outer wall surface of the cylindrical member is made of a material having a higher thermal emissivity than the material of the cylindrical member. By adopting such a configuration, the cylindrical member can be radiated more easily, the adhesion of the sputtered material at the exit window can be further suppressed, and the life can be further extended. Further, a heat radiation film containing a material having a higher heat emissivity than the material of the cylindrical member may be formed on substantially the entire outer wall surface of the cylindrical member. In this case, the outer wall surface of the cylindrical member can be easily formed. The thermal emissivity can be increased, the cylindrical member can be further radiated of heat, the adhesion of the sputtered material at the exit window can be further suppressed, and the life can be further extended.

また、筒状部材の一端側の熱放射率は、筒状部材の他端側の熱放射率よりも大きい、ことも好適である。かかる構成を採れば、より発光部に近い部分においてスパッタ物を捕捉することができるので、筒状部材における反射面の大部分、及び出射窓部におけるスパッタ物の付着をさらに抑制することができ、寿命をより一層延ばすことができる。さらに、筒状部材の一端側の外壁面には、筒状部材の他端側の外壁面の材料よりも熱放射率の大きい材料を含む熱放射膜が形成されていてもよく、この場合、容易に一端側の外壁面の熱放射率を他端側の外壁面の熱放射率よりも大きくすることができ、より発光部に近い部分においてスパッタ物を捕捉することができるので、筒状部材における反射面の大部分、及び出射窓部におけるスパッタ物の付着をさらに抑制することができ、寿命をより一層延ばすことができる。 It is also preferable that the thermal emissivity on one end side of the cylindrical member is larger than the thermal emissivity on the other end side of the cylindrical member. By adopting such a configuration, it is possible to capture the spatter in a portion closer to the light emitting portion, so it is possible to further suppress the most part of the reflection surface in the cylindrical member, and the adhesion of the spatter in the exit window portion, The lifetime can be further extended. Further, the outer wall surface on one end side of the tubular member may be formed with a heat radiation film containing a material having a higher heat emissivity than the material of the outer wall surface on the other end side of the tubular member. The thermal emissivity of the outer wall surface on the one end side can be easily made larger than the thermal emissivity of the outer wall surface on the other end side, and the sputtered material can be captured at a portion closer to the light emitting part. It is possible to further suppress the adhesion of most of the reflecting surface and the sputtered material on the exit window, thereby further extending the life.

本発明によれば、窓材の汚染を抑制して寿命を長くすることができる。 According to the present invention, it is possible to extend the life by suppressing the contamination of the window material.

本発明の第１実施形態に係る光源の構成を示す断面図である。It is sectional drawing which shows the structure of the light source which concerns on 1st Embodiment of this invention. （ａ）は、図１の反射筒部の断面図、（ｂ）は、図１の反射筒部の端面図である。(A) is sectional drawing of the reflective cylinder part of FIG. 1, (b) is an end elevation of the reflective cylinder part of FIG. 図１の光源における反射筒部の組み込み状態を示す側面図である。It is a side view which shows the incorporating state of the reflection cylinder part in the light source of FIG. 本発明の第２実施形態に係る光源の構成を示す断面図である。It is sectional drawing which shows the structure of the light source which concerns on 2nd Embodiment of this invention. （ａ）は、図４の反射筒部の側面図、（ｂ）は、図４の反射筒部の端面図である。(A) is a side view of the reflection cylinder part of FIG. 4, (b) is an end view of the reflection cylinder part of FIG. 本発明の第３実施形態に係る光源の構成を示す断面図である。It is sectional drawing which shows the structure of the light source which concerns on 3rd Embodiment of this invention. （ａ）は、本発明の変形例にかかる反射筒部の断面図、（ｂ）は、（ａ）の反射筒部の端面図である。(A) is sectional drawing of the reflective cylinder part concerning the modification of this invention, (b) is an end elevation of the reflective cylinder part of (a). 本発明の変形例に係る光源の構成を示す断面図である。It is sectional drawing which shows the structure of the light source which concerns on the modification of this invention. （ａ）は、本発明の変形例にかかる反射筒部の一部を示す側面図、（ｂ）は、（ａ）の反射筒部の端面図、（ｃ）は、（ａ）の反射筒部の斜視図である。(A) is a side view showing a part of a reflecting cylinder part according to a modification of the present invention, (b) is an end view of the reflecting cylinder part of (a), and (c) is a reflecting cylinder of (a). It is a perspective view of a part. （ａ）は、本発明の変形例にかかる反射筒部の一部を示す側面図、（ｂ）は、（ａ）の反射筒部の端面図、（ｃ）は、（ａ）の反射筒部の斜視図である。(A) is a side view showing a part of a reflecting cylinder part according to a modification of the present invention, (b) is an end view of the reflecting cylinder part of (a), and (c) is a reflecting cylinder of (a). It is a perspective view of a part. （ａ）は、本発明の変形例にかかる反射筒部の一部を示す側面図、（ｂ）は、（ａ）の反射筒部の端面図、（ｃ）は、（ａ）の反射筒部の斜視図である。(A) is a side view showing a part of a reflecting cylinder part according to a modification of the present invention, (b) is an end view of the reflecting cylinder part of (a), and (c) is a reflecting cylinder of (a). It is a perspective view of a part. （ａ）は、本発明の変形例にかかる反射筒部の一部を示す側面図、（ｂ）は、（ａ）の反射筒部の端面図、（ｃ）は、（ａ）の反射筒部の斜視図である。(A) is a side view showing a part of a reflecting cylinder part according to a modification of the present invention, (b) is an end view of the reflecting cylinder part of (a), and (c) is a reflecting cylinder of (a). It is a perspective view of a part. （ａ）は、本発明の変形例にかかる反射筒部の一部を示す側面図、（ｂ）は、（ａ）の反射筒部の端面図、（ｃ）は、（ａ）の反射筒部の斜視図である。(A) is a side view showing a part of a reflecting cylinder part according to a modification of the present invention, (b) is an end view of the reflecting cylinder part of (a), and (c) is a reflecting cylinder of (a). It is a perspective view of a part.

以下、図面を参照しつつ本発明に係る光源の好適な実施形態について詳細に説明する。なお、図面の説明においては同一又は相当部分には同一符号を付し、重複する説明を省略する。また、各図面は説明用のために作成されたものであり、説明の対象部位を特に強調するように描かれている。そのため、図面における各部材の寸法比率は、必ずしも実際のものとは一致しない。 Hereinafter, preferred embodiments of a light source according to the present invention will be described in detail with reference to the drawings. In the description of the drawings, the same or corresponding parts are denoted by the same reference numerals, and redundant description is omitted. Each drawing is made for the purpose of explanation, and is drawn so as to particularly emphasize the target portion of the explanation. Therefore, the dimensional ratio of each member in the drawings does not necessarily match the actual one.

［第１実施形態］
図１は、本発明の第１実施形態に係る光源の構成を示す断面図である。同図に示す光源１は、質量分析装置の光イオン化源等の分析機器用光源や真空除電用光源として使用されるいわゆる重水素ランプである。 [First Embodiment]
FIG. 1 is a cross-sectional view showing a configuration of a light source according to the first embodiment of the present invention. A light source 1 shown in the figure is a so-called deuterium lamp used as a light source for an analytical instrument such as a photoionization source of a mass spectrometer or a light source for vacuum static elimination.

この光源１は、重水素ガスを放電させて光を発生させる発光部２が収容された略円筒状の発光筒部（第１の筐体）３Ａと、この発光筒部３Ａに連通すると共に発光筒部３Ａの側壁から発光部２の発生させる光の光軸Ｘに沿って突出する略円筒状の導光筒部（第２の筐体）３Ｂとが一体的に接続されたガラス製の密封容器３を備えている。この密封容器３には、重水素ガスが数百Ｐａ程度封入されている。より詳細には、導光筒部３Ｂは、光軸Ｘに沿った方向の一端側が発光筒部３Ａに一体化されて連通しており、他端側は発光部２から発生した光を外部に出射させる出射窓部４によって封止されている。この出射窓部４の材質は、例えば、ＭｇＦ_２（フッ化マグネシウム）、ＬｉＦ（フッ化リチウム）、石英ガラス、サファイアガラス等である。 The light source 1 communicates with the light emitting cylinder part 3A and emits light while communicating with the light emitting cylinder part (first housing) 3A in which a light emitting part 2 for generating light by discharging deuterium gas is housed. A glass seal in which a substantially cylindrical light guide tube portion (second housing) 3B protruding along the optical axis X of light generated by the light emitting portion 2 from the side wall of the tube portion 3A is integrally connected. A container 3 is provided. This sealed container 3 is filled with about several hundred Pa of deuterium gas. More specifically, the light guide tube portion 3B has one end side in the direction along the optical axis X integrated and communicated with the light emitting tube portion 3A, and the other end side communicates light generated from the light emitting portion 2 to the outside. It is sealed by the exit window 4 that emits light. The material of the exit window 4 is, for example, MgF ₂ (magnesium fluoride), LiF (lithium fluoride), quartz glass, sapphire glass, or the like.

発光筒部３Ａに収容されている発光部２は、陰極部５、陽極部６、陽極部６と陰極部５との間に配置された中心部にアパーチャーが形成された放電路制限部７、及びこれらを取り囲んで配置する収容ケース８によって構成されている。この収容ケース８の導光筒部３Ｂ側の面には、発光部２で発生した光を取り出すための矩形状の光通過口８ａが、導光筒部３Ｂの出射窓部４に対向するように形成されると共に、この光通過口８ａを取り囲むように導光筒部３Ｂの側壁に沿って円形状に延びる壁部からなる固定リング８ｂが固定されている。このような発光部２は、陰極部５と陽極部６との間に電圧が印加されると、その間に存在する重水素ガスを電離、放電させて形成したプラズマ状態を放電路制限部７によって絞り込んで高密度のプラズマ状態にすることによって発生した光（紫外光）を、収容ケース８の光通過口８ａから光軸Ｘに沿った方向に向けて出射させる。 The light emitting part 2 accommodated in the light emitting cylinder part 3A includes a cathode part 5, an anode part 6, a discharge path limiting part 7 having an aperture formed in the central part disposed between the anode part 6 and the cathode part 5, And a housing case 8 surrounding and arranging them. On the surface of the housing case 8 on the side of the light guide cylinder part 3B, a rectangular light passage port 8a for taking out light generated in the light emitting part 2 faces the emission window part 4 of the light guide cylinder part 3B. In addition, a fixing ring 8b including a wall portion extending in a circular shape along the side wall of the light guide tube portion 3B is fixed so as to surround the light passage port 8a. When a voltage is applied between the cathode part 5 and the anode part 6, the light emitting part 2 has a discharge path restriction part 7 that forms a plasma state formed by ionizing and discharging deuterium gas existing between the cathode part 5 and the anode part 6. Light (ultraviolet light) generated by narrowing down into a high-density plasma state is emitted in a direction along the optical axis X from the light passage port 8a of the housing case 8.

なお、上記の発光部２は、発光筒部３Ａの端面に設けられたステム部に立設されたステムピン（図示せず）によって、発光筒部３Ａ内に保持されている。すなわち、この光源１は、光軸Ｘが発光筒部３Ａの管軸に対して交差するサイドオン型の光源である。 The light emitting unit 2 is held in the light emitting tube portion 3A by a stem pin (not shown) provided upright on a stem portion provided on the end surface of the light emitting tube portion 3A. That is, the light source 1 is a side-on type light source in which the optical axis X intersects the tube axis of the light emitting cylinder portion 3A.

このような密封容器３内の出射窓部４と、発光筒部３Ａと導光筒部３Ｂとを接続する部位との間には、略円筒状の反射筒部（筒状部材）９が挿入固定されている。この反射筒部９は、図２に示すように、アルミニウム製の金属ブロック部材が複数組み合わされて、導光筒部３Ｂの内径よりも小さい外径を有する略円筒状の形状をなしている。 Between the exit window portion 4 in the sealed container 3 and a portion connecting the light emitting tube portion 3A and the light guide tube portion 3B, a substantially cylindrical reflecting tube portion (tubular member) 9 is inserted. It is fixed. As shown in FIG. 2, the reflecting cylinder portion 9 is formed in a substantially cylindrical shape having an outer diameter smaller than the inner diameter of the light guiding cylinder portion 3B by combining a plurality of metal block members made of aluminum.

また、反射筒部９自体の内壁面は、反射筒部９の中心軸線に沿って曲面、又は段階的に傾斜角が変化する多段面である反射面９ａとして形成されている。すなわち、この反射面９ａは、出射窓部４の外側の所望の面または点に光を集光できるように、反射筒部９の中心軸方向の両端がテーパー状に形成されている。より具体的には、反射筒部９の長手方向の中心部から発光筒部３Ａ側の端部にかけて反射面９ａで囲まれる空間の径が徐々に小さくなるように、反射面９ａが反射筒部９の中心軸、すなわち、光軸Ｘに対して傾斜して形成されている。また、反射筒部９の長手方向の中心部から出射窓部４側の端部にかけて反射面９ａで囲まれる空間の径が徐々に小さくなるように、反射面９ａが反射筒部９の中心軸に対して傾斜して形成されている。なお、反射面９ａのテーパー状部は、反射筒部９の中心軸方向の両端ではなく、どちらか一方、例えば発光部２側（一端側）のみを前述したようなテーパー状に形成し、出射窓部４側（他端側）は反射面９ａを反射筒部９の中心軸に対して平行に形成しても良い。この反射面９ａは、所望の面または点に光を集光したり発散したりできるように設定されている。このような反射面９ａは、発光部２によって発生した光を正反射可能な鏡面状態に加工されており、例えば、金属ブロック部材を切削加工し、その内壁に、バフ研磨、化学研磨、電解研磨、それらから派生した研磨方法による研磨、又は、それらを複合した研磨方法による研磨を施した後、洗浄処理や不純物ガス成分を除去するための真空処理等を施すことによって形成される。本実施形態においては、反射筒部９は２つの部材を組み合わせて形成されており、このように複数個の金属ブロック部材で反射面９ａが形成される場合には、金属ブロック部材ごとの長さと内径との比（アスペクト比）が小さくできるために、加工整形時に平坦度が出しやすくなる結果、反射面９ａの鏡面度が高くなる。 Further, the inner wall surface of the reflecting cylinder portion 9 itself is formed as a reflecting surface 9a which is a curved surface along the central axis of the reflecting cylinder portion 9 or a multi-step surface whose inclination angle changes stepwise. In other words, the reflecting surface 9 a is tapered at both ends in the central axis direction of the reflecting cylinder portion 9 so that light can be condensed on a desired surface or point outside the emission window portion 4. More specifically, the reflecting surface 9a is formed in the reflecting cylinder portion so that the diameter of the space surrounded by the reflecting surface 9a gradually decreases from the longitudinal center portion of the reflecting tube portion 9 to the end portion on the light emitting tube portion 3A side. 9 is inclined with respect to the central axis of 9, that is, the optical axis X. Further, the reflecting surface 9a is the central axis of the reflecting tube portion 9 so that the diameter of the space surrounded by the reflecting surface 9a gradually decreases from the longitudinal center portion of the reflecting tube portion 9 to the end portion on the exit window portion 4 side. It is formed to be inclined with respect to. In addition, the taper-shaped part of the reflective surface 9a is not the both ends of the central direction of the reflective cylinder part 9, but only one side, for example, the light emission part 2 side (one end side) is formed in the taper shape as mentioned above, and is emitted. On the window part 4 side (the other end side), the reflection surface 9 a may be formed in parallel to the central axis of the reflection cylinder part 9. The reflection surface 9a is set so that light can be condensed or diverged on a desired surface or point. Such a reflective surface 9a is processed into a mirror surface state capable of specularly reflecting light generated by the light emitting unit 2. For example, a metal block member is cut and the inner wall thereof is buffed, chemically polished, or electrolytically polished. These are formed by performing polishing by a polishing method derived from them, or polishing by a polishing method in which they are combined, and then performing a cleaning process or a vacuum process for removing impurity gas components. In the present embodiment, the reflecting cylinder portion 9 is formed by combining two members, and when the reflecting surface 9a is formed by a plurality of metal block members, the length of each metal block member is Since the ratio (aspect ratio) with the inner diameter can be reduced, flatness is easily obtained during processing and shaping, and as a result, the specularity of the reflecting surface 9a is increased.

また、反射筒部９の外壁面（側面）９ｂの長手方向の一端側の縁部には、その外壁面９ｂの他端側に向けて、反射筒部９の中心軸に沿って切り欠かれた開口部９ｃが形成されている。このように切り欠きによって開口部９ｃを設けるので、開口部の加工が容易である。また、詳細には、開口部９ｃは反射筒部９の一端側の周縁に沿って等間隔に３箇所形成されており、隣接する開口部９ｃの間には発光部２の固定リング８ｂに嵌め込むための突出部９ｄが３箇所形成されている。このように開口部９ｃを等間隔に形成する結果、突出部９ｄも等間隔に設けられるため、突出部９ｄ自体の強度、及び固定時の強度も確保することができる。 Further, an edge on one end side in the longitudinal direction of the outer wall surface (side surface) 9b of the reflecting cylinder portion 9 is cut out along the central axis of the reflecting cylinder portion 9 toward the other end side of the outer wall surface 9b. Opening 9c is formed. Thus, since the opening 9c is provided by the notch, the opening can be easily processed. More specifically, the openings 9c are formed at three equal intervals along the peripheral edge on the one end side of the reflecting tube portion 9, and are fitted into the fixing ring 8b of the light emitting portion 2 between the adjacent openings 9c. Three protrusions 9d for insertion are formed. As a result of forming the openings 9c at equal intervals in this manner, the protrusions 9d are also provided at equal intervals, so that the strength of the protrusions 9d themselves and the strength at the time of fixation can be ensured.

さらに、反射筒部９の外壁面９ｂの略全面には、高熱放射率の材料を含む熱放射膜１０が形成されている。このような熱放射膜１０の材料としては、酸化アルミニウム等の反射筒部９の材料よりも熱放射率の高いものが用いられる。また、熱放射膜１０は、例えば熱放射膜１０を構成する材料を反射筒部９の外壁面９ｂ上に蒸着や塗布等によって積層することで形成されるが、特に本実施形態のように反射筒部９がアルミニウムからなる場合には、反射筒部９の外壁面９ｂを酸化処理することで熱放射膜１０としての酸化アルミニウムの層を形成しても良い。 Furthermore, a heat radiation film 10 containing a material having a high heat emissivity is formed on substantially the entire outer wall surface 9b of the reflecting cylinder portion 9. As a material of such a heat radiation film 10, a material having a higher heat emissivity than that of the material of the reflecting cylinder portion 9 such as aluminum oxide is used. The heat radiation film 10 is formed, for example, by laminating the material constituting the heat radiation film 10 on the outer wall surface 9b of the reflecting tube portion 9 by vapor deposition or coating, and is particularly reflective as in the present embodiment. When the tube portion 9 is made of aluminum, an aluminum oxide layer as the heat radiation film 10 may be formed by oxidizing the outer wall surface 9b of the reflecting tube portion 9.

また、反射筒部９の外壁面９ｂの長手方向の他端側の周縁部には、その外壁面９ｂに沿って、段差状の突出部となるように円形状に切り欠かれた切り欠き部１１が形成されている。この切り欠き部１１は、反射筒部９を密封容器３内で位置決めするために設けられる。 In addition, a notch portion that is cut out in a circular shape so as to form a stepped protrusion along the outer wall surface 9b at the peripheral edge portion on the other end side in the longitudinal direction of the outer wall surface 9b of the reflecting cylinder portion 9 11 is formed. This notch portion 11 is provided for positioning the reflecting cylinder portion 9 in the sealed container 3.

このような反射筒部９は、突出部９ｄが発光部２の収容ケース８に当接するまで、開口部９ｃが形成された一端側の縁部から、導光筒部３Ｂの管軸（光軸Ｘ）に沿って挿入されると共に、切り欠き部１１にばね部材１２が外壁面９ｂに沿って取り付けられた後に、導光筒部３Ｂの他端側が出射窓部４によって封止される（図１及び図３）。このとき、反射筒部９は、その外壁面９ｂが導光筒部３Ｂの内壁面１３と離間した状態で収容ケース８の固定リング８ｂの内側に嵌め込まれる（図３）。このばね部材１２は、金属部材、例えば耐熱性の高いステンレスやインコネル材からなる、反射筒部９の位置決め用の部材であり、切り欠き部１１と出射窓部４との間に配置されて、反射筒部９を、光軸Ｘに沿って出射窓部４側から発光部２側に付勢することにより、収容ケース８に押し当てる機能を有する。これにより、反射筒部９は、密封容器３内の出射窓部４と発光部２との間において、一端側の突出部９ｄが発光部２の収容ケース８に当接し、かつ、他端側が導光筒部３Ｂに挿入されて出射窓部４に接近した状態で、位置決めされる。また、収容ケース８の固定リング８ｂには、反射筒部９の開口部９ｃに対応する位置に開口８ｃが形成されており、反射筒部９が収容ケース８の固定リング８ｂに嵌め込まれると、発光筒部３Ａ内に位置する反射筒部９の外壁面９ｂの端部には、反射面９ａに貫通する開口部９ｃが開口８ｃを介して発光筒部３Ａの内部空間と連通した状態で複数配置されることになる。 Such a reflection cylinder portion 9 extends from the edge portion on one end side where the opening 9c is formed until the protruding portion 9d contacts the housing case 8 of the light emitting portion 2 from the tube axis (optical axis) of the light guide cylinder portion 3B. X) and after the spring member 12 is attached to the cutout portion 11 along the outer wall surface 9b, the other end side of the light guide tube portion 3B is sealed by the emission window portion 4 (FIG. 1 and FIG. 3). At this time, the reflecting cylinder portion 9 is fitted inside the fixing ring 8b of the housing case 8 with the outer wall surface 9b being separated from the inner wall surface 13 of the light guide cylinder portion 3B (FIG. 3). The spring member 12 is a metal member, for example, a member for positioning the reflecting cylinder portion 9 made of stainless steel or Inconel material having high heat resistance, and is disposed between the notch portion 11 and the emission window portion 4. The reflecting cylinder portion 9 has a function of pressing against the housing case 8 by urging the reflecting cylinder portion 9 along the optical axis X from the exit window portion 4 side to the light emitting portion 2 side. As a result, the reflecting cylinder portion 9 has a protruding portion 9d on one end abutting against the housing case 8 of the light emitting portion 2 between the emission window portion 4 and the light emitting portion 2 in the sealed container 3, and the other end side is Positioning is performed while being inserted into the light guide tube portion 3B and approaching the exit window portion 4. Further, the fixing ring 8b of the housing case 8 has an opening 8c formed at a position corresponding to the opening 9c of the reflecting cylinder portion 9, and when the reflecting cylinder portion 9 is fitted into the fixing ring 8b of the housing case 8, At the end portion of the outer wall surface 9b of the reflecting tube portion 9 located in the light emitting tube portion 3A, a plurality of openings 9c penetrating the reflecting surface 9a are communicated with the internal space of the light emitting tube portion 3A through the openings 8c. Will be placed.

以上説明した光源１によれば、発光筒部３Ａの発光部２から発せられた光が、発光筒部３Ａに連通する導光筒部３Ｂから発光部２にかけて挿入された反射筒部９の内部に導かれることにより、導光筒部３Ｂに設けられた出射窓部４から出射される。ここで、反射筒部９の内壁面には反射面９ａが形成されているので、発光部２から出射された光が反射筒部９の内部の反射面９ａによって反射されつつ導光筒部３Ｂの一端側から他端側に導かれる結果、発光部２から発せられた光を損失することなく導光筒部３Ｂの出射窓部４まで導くことができる。このとき、反射面９ａの傾斜角を適切に設定することで、出射窓部４の外部における出射光の分布を平行光、発散光、及び収束光にすることもでき、所定の照射面での光強度の均一性を高めることもできる。それに併せて、出射窓部４からの光の取り出し効率を向上させ、出射光の総光量及び照射面上での光量を増加させることができる。また、従来の重水素ランプでは出射窓からの光放射パターンが、その出射窓からの距離に応じて変化し、放射光の弱い抜けの部分が生じやすい傾向にあるが、光源１ではそのような光照射パターンの抜けの部分の発生を低減することができる。 According to the light source 1 described above, the light emitted from the light emitting portion 2 of the light emitting tube portion 3A is inserted into the light emitting portion 2 from the light guide tube portion 3B communicating with the light emitting tube portion 3A. The light is emitted from the emission window portion 4 provided in the light guide tube portion 3B. Here, since the reflection surface 9a is formed on the inner wall surface of the reflection tube portion 9, the light guide tube portion 3B is reflected while the light emitted from the light emitting portion 2 is reflected by the reflection surface 9a inside the reflection tube portion 9. As a result of being guided from one end side to the other end side, the light emitted from the light emitting portion 2 can be led to the emission window portion 4 of the light guide tube portion 3B without loss. At this time, by appropriately setting the inclination angle of the reflecting surface 9a, the distribution of the outgoing light outside the outgoing window portion 4 can be parallel light, divergent light, and convergent light. The uniformity of the light intensity can also be improved. At the same time, the light extraction efficiency from the exit window 4 can be improved, and the total amount of emitted light and the amount of light on the irradiation surface can be increased. Further, in the conventional deuterium lamp, the light radiation pattern from the exit window changes depending on the distance from the exit window, and there is a tendency that a weak omission portion of the emitted light tends to occur. It is possible to reduce the occurrence of missing portions of the light irradiation pattern.

併せて、反射筒部９の一端側の外壁面９ｂ（側面）には開口部９ｃが形成され、固定リング８ｂの対応した位置にも開口８ｃが形成されているので、発光部２で生じたスパッタ物を反射筒部９の外部に放出することができ、反射筒部９の反射面９ａや低温度部の出射窓部４へのスパッタ物の付着を抑制することができる。その結果、長寿命化を図りつつ、出射窓部４における光の透過率を向上させることができる。なお、この開口部９ｃは発光筒部３Ａ内に位置しているので、発光部２で生じたスパッタ物が発光筒部３Ａ内に放出されて発光筒部３Ａ内に捕捉されやすい。その結果、出射窓部４へのスパッタ物の飛散をさらに抑制することができ、寿命がより長くなる。 At the same time, an opening 9c is formed on the outer wall surface 9b (side surface) on one end side of the reflecting tube portion 9, and an opening 8c is formed at a corresponding position of the fixing ring 8b. The sputtered material can be discharged to the outside of the reflecting cylinder portion 9, and adhesion of the sputtered material to the reflecting surface 9 a of the reflecting tube portion 9 and the emission window portion 4 of the low temperature portion can be suppressed. As a result, it is possible to improve the light transmittance in the exit window 4 while extending the life. Since the opening 9c is located in the light emitting cylinder 3A, the spatter generated in the light emitting part 2 is easily released into the light emitting cylinder 3A and easily captured in the light emitting cylinder 3A. As a result, scattering of the sputtered material to the exit window portion 4 can be further suppressed, and the lifetime becomes longer.

また、反射筒部９自体をアルミニウム製の金属ブロック部材等の金属部材で構成することで、鏡面度の高い反射面の加工が容易になるので、発生した光を効果的に集光することができる。さらに、例えば反射筒部９の内部に金属等からなる反射膜を形成した場合と異なり、温度上昇と低下を繰り返す際の、構成材料の膨張係数の違いから発生する反射面９ａの剥離または脱落等による性能劣化や異物発生を抑制することができ、長寿命化を実現することができる。加えて、発生する紫外光が透過することなく、また、紫外光によって劣化することもないので、発生した光をより効率よく取り出すことができる。 In addition, since the reflecting cylinder portion 9 itself is made of a metal member such as an aluminum metal block member, it is easy to process a reflecting surface having a high specularity, so that the generated light can be effectively collected. it can. Further, for example, unlike the case where a reflection film made of metal or the like is formed inside the reflection cylinder portion 9, the reflection surface 9 a is peeled off or dropped off due to the difference in the expansion coefficient of the constituent materials when the temperature is repeatedly increased and decreased. It is possible to suppress the performance deterioration and the generation of foreign matter due to the above, and it is possible to realize a long life. In addition, since the generated ultraviolet light is not transmitted and is not deteriorated by the ultraviolet light, the generated light can be taken out more efficiently.

さらに、反射筒部９の外壁面９ｂと、導光筒部３Ｂの内壁面１３とは離間しているので、反射筒部９と導光筒部３Ｂとの熱膨張率の違いにより、反射筒部９の位置ずれや反射筒部９または導光筒部３Ｂの破損を防止することができる。 Further, since the outer wall surface 9b of the reflecting tube portion 9 and the inner wall surface 13 of the light guide tube portion 3B are separated from each other, the reflecting tube is caused by a difference in thermal expansion coefficient between the reflecting tube portion 9 and the light guide tube portion 3B. It is possible to prevent the position shift of the portion 9 and the damage of the reflection tube portion 9 or the light guide tube portion 3B.

また、反射筒部９は、金属部材からなる位置決め部材であるばね部材１２によって付勢されて収容ケース８の固定リング８ｂに嵌め込まれることによって密封容器３内で位置決めされているので、発生する紫外光によって劣化することなく、密封容器３に対する反射筒部９の位置を安定化して、出射窓部４からの光の取り出し効率を保つことができる。ここで、ばね部材１２により収容ケース８に押圧する構造を採用することで、密封容器３に対して反射筒部９を安定して固定することができると共に、反射筒部９の中心軸方向に沿った熱膨張が発生してもばね部材１２によって発光筒部３Ａに対する位置ずれを吸収することができる。 In addition, the reflecting cylinder portion 9 is positioned in the sealed container 3 by being urged by a spring member 12 which is a positioning member made of a metal member and fitted into the fixing ring 8b of the housing case 8, so that the generated ultraviolet rays are generated. Without being deteriorated by light, the position of the reflecting cylinder portion 9 with respect to the sealed container 3 can be stabilized, and the light extraction efficiency from the emission window portion 4 can be maintained. Here, by adopting a structure in which the spring member 12 is pressed against the housing case 8, the reflecting cylinder portion 9 can be stably fixed to the sealed container 3, and in the central axis direction of the reflecting cylinder portion 9. Even if thermal expansion occurs along the line, the spring member 12 can absorb the displacement with respect to the light emitting cylinder portion 3A.

さらに、図２に示すように、反射筒部９の外壁面９ｂの略全面に熱放射膜１０が形成されることにより、反射筒部９の内面に周辺や封入ガスよりも低温の領域を形成することができ、その領域に発光筒部３Ａからのスパッタ物等の異物を捕捉して、異物の出射窓部４への拡散や付着及びそれに伴う光透過率の低下を抑制することができる。 Further, as shown in FIG. 2, the heat radiation film 10 is formed on the substantially entire surface of the outer wall surface 9b of the reflecting cylinder portion 9, thereby forming a region lower in temperature than the surroundings and the enclosed gas on the inner surface of the reflecting cylinder portion 9. It is possible to capture foreign matter such as sputtered matter from the light emitting tube portion 3A in the region, and to suppress diffusion and adhesion of the foreign matter to the emission window portion 4 and the accompanying decrease in light transmittance.

また、このような光源１を光イオン化源としてガスクロマトグラフ質量分析装置（ＧＣ/ＭＳ）や液体クロマトグラフ質量分析装置（ＬＣ/ＭＳ）といった質量分析装置（ＭＳ）に使用することで、高感度化、窓材の汚染抑制、そして、良好な時間応答特性を実現することが可能となる。まず、照射面の光量を飛躍的に増加できることで試料との接触確率を向上でき、従来の光イオン化源と比べ感度を大幅（１０倍近く）に向上できる。また、各種ＭＳに適した集光性を実現する事が可能となり、次のような点から測定感度が高められる。すなわち、ＭＳの場合、イオン化室においてイオンを弁別部へ導入する為の電界分布が有効な部分に集中照射可能である。また、ＧＣ/ＭＳの場合、イオン化室の数ｍｍ程度の開口から光を有効に集中導入可能である。また、ＬＣ/ＭＳの場合、イオンを弁別部に導入するアパーチャー近辺に集光しイオン密度を高めることが可能であり、試料の噴出し口から光イオン化源の窓部を遠ざけ窓部の汚染の抑制できると共に、従来より集光性が高められるためイオン化源から遠ざけても感度が劣化しない。つまり、試料の高密度部に高密度の光を当てることでイオン化効率を高められて高感度化が実現され、試料の噴出し口から光イオン化源の窓部を遠ざけることで窓部の汚染を抑制することができ、試料の噴出し口に集光することで応答速度を速くすることができる。 Further, by using such a light source 1 as a photoionization source in a mass spectrometer (MS) such as a gas chromatograph mass spectrometer (GC / MS) or a liquid chromatograph mass spectrometer (LC / MS), high sensitivity is achieved. It is possible to suppress window material contamination and realize a good time response characteristic. First, since the amount of light on the irradiated surface can be dramatically increased, the probability of contact with the sample can be improved, and the sensitivity can be greatly improved (nearly 10 times) as compared with a conventional photoionization source. In addition, it is possible to realize a light collecting property suitable for various MSs, and the measurement sensitivity can be increased from the following points. In other words, in the case of MS, it is possible to concentrate and irradiate a portion where the electric field distribution for introducing ions to the discrimination portion is effective in the ionization chamber. In the case of GC / MS, light can be effectively concentrated and introduced from an opening of about several mm in the ionization chamber. In the case of LC / MS, it is possible to increase the ion density by concentrating the ions in the vicinity of the aperture where the ions are introduced into the discriminating unit. In addition to being able to suppress it, the light condensing performance is improved so that the sensitivity does not deteriorate even if the ionization source is moved away. In other words, high-sensitivity can be achieved by applying high-density light to the high-density part of the sample to achieve high sensitivity, and the window part of the photo-ionization source can be kept away from the sample outlet by removing the window of the photo-ionization source. It can be suppressed, and the response speed can be increased by condensing at the ejection port of the sample.

［第２実施形態］
図４は、本発明の第２実施形態に係る光源の構成を示す断面図、図５（ａ）は、図４の反射筒部の側面図、図５（ｂ）は、図４の反射筒部の端面図である。同図に示す光源１０１は、反射筒部１０９の位置決め構造等が第１実施形態のものと異なる。 [Second Embodiment]
4 is a cross-sectional view showing a configuration of a light source according to the second embodiment of the present invention, FIG. 5A is a side view of the reflecting cylinder portion of FIG. 4, and FIG. 5B is a reflecting cylinder of FIG. It is an end view of a part. The light source 101 shown in the figure is different from that of the first embodiment in the positioning structure of the reflecting cylinder portion 109 and the like.

すなわち、光源１０１に内蔵される反射筒部１０９には、その外壁面１０９ｂの出射窓部４側の端部において、位置決め部材としての金属バンド１１２が固定されている。この金属バンド１１２には、バネ性を有する複数の爪部１１２ａが反射筒部１０９の外周に沿って形成されており、金属バンド１１２は、その端部が重ね溶接されることにより外壁面１０９ｂ上に固定されている。このような反射筒部１０９は、導光筒部３Ｂの内壁面１３に沿って密封容器３内に挿入され、金属バンド１１２を除く外壁面１０９ｂが内壁面１３と離間するように固定される。このような構造により、反射筒部１０９は、金属バンド１１２の爪部１１２ａのバネ力により、その端部に形成された突出部１０９ｄが収容ケース８に溶接された平板状の固定リング８ｂの開口部に嵌め込まれた状態で収容ケース８に押し当てられ、密封容器３内で光軸Ｘに沿った方向に位置決めされる。それとともに、反射筒部１０９は、金属バンド１１２の爪部１１２ａにより、その外壁面１０９ｂと導光筒部３Ｂの内壁面１３とが一定距離を保って離間された状態で光軸Ｘの垂直な方向にも位置決めされる。また、反射筒１０９の金属バンド１１２装着部に、同バンドの幅に合わせた溝を形成する事で、導光筒部３Ｂの内径を大きくする事なく、金属バンド１１２から導光筒部３Ｂの内壁面１３への距離を大きく取れ、爪部１１２ａの角度を大きくする事が可能となり、爪部１１２ａのバネ力を強める事ができる。 That is, a metal band 112 as a positioning member is fixed to the reflection cylinder portion 109 built in the light source 101 at the end portion of the outer wall surface 109b on the emission window portion 4 side. A plurality of claw portions 112a having spring properties are formed on the metal band 112 along the outer periphery of the reflecting cylinder portion 109, and the end portion of the metal band 112 is overlapped and welded to the outer wall surface 109b. It is fixed to. Such a reflection cylinder part 109 is inserted into the sealed container 3 along the inner wall surface 13 of the light guide cylinder part 3B, and is fixed so that the outer wall surface 109b excluding the metal band 112 is separated from the inner wall surface 13. With such a structure, the reflecting cylinder 109 has an opening of the flat fixing ring 8b in which the protruding portion 109d formed at the end thereof is welded to the housing case 8 by the spring force of the claw 112a of the metal band 112. It is pressed against the housing case 8 in a state of being fitted into the part, and is positioned in the direction along the optical axis X in the sealed container 3. At the same time, the reflecting tube portion 109 is perpendicular to the optical axis X in a state where the outer wall surface 109b and the inner wall surface 13 of the light guide tube portion 3B are spaced apart from each other by the claw portion 112a of the metal band 112. Also positioned in the direction. In addition, by forming a groove that matches the width of the metal band 112 of the reflection tube 109, the inner diameter of the light guide tube portion 3B can be increased from the metal band 112 to the light guide tube portion 3B. The distance to the inner wall surface 13 can be increased, the angle of the claw portion 112a can be increased, and the spring force of the claw portion 112a can be increased.

このような光源１０１によっても、反射筒部１０９と導光筒部３Ｂとの熱膨張率の違いにより、反射筒部１０９の位置ずれや反射筒部１０９または導光筒部３Ｂの破損を防止することができる。また、反射筒部１０９は、位置決め部材である金属バンド１１２によって付勢されて収容ケース８の固定リング８ｂに嵌め込まれることによって密封容器３内で位置決めされているので、密封容器３に対する反射筒部１０９の位置を安定化して、出射窓部４からの光の取り出し効率を保つことができる。 Also with such a light source 101, the position difference of the reflection cylinder part 109 and the damage of the reflection cylinder part 109 or the light guide cylinder part 3B are prevented due to the difference in thermal expansion coefficient between the reflection cylinder part 109 and the light guide cylinder part 3B. be able to. Further, since the reflecting cylinder portion 109 is positioned in the sealed container 3 by being urged by the metal band 112 as a positioning member and fitted in the fixing ring 8b of the housing case 8, the reflecting cylinder portion with respect to the sealed container 3 is positioned. The position 109 can be stabilized and the light extraction efficiency from the exit window 4 can be maintained.

さらに、反射筒部１０９の一端側の外壁面１０９ｂ（側面）には開口部１０９ｃが形成され、固定リング８ｂに塞がれることなく開口が露出されているので、発光筒部３Ａで生じたスパッタ物を反射筒部１０９の外部に放出することができ、反射筒部１０９の反射面１０９ａや低温度部の出射窓部４へのスパッタ物の付着を抑制することができる。 Further, since an opening 109c is formed on the outer wall surface 109b (side surface) on one end side of the reflecting cylinder portion 109 and the opening is exposed without being blocked by the fixing ring 8b, spatter generated in the light emitting cylinder portion 3A. An object can be discharged to the outside of the reflecting cylinder part 109, and adhesion of sputtered substances to the reflecting surface 109a of the reflecting cylinder part 109 and the emission window part 4 of the low temperature part can be suppressed.

［第３実施形態］
図６は、本発明の第３実施形態に係る光源の構成を示す断面図である。同図に示す光源２０１は、本発明をキャピラリ放電管に適用した場合の例である。 [Third Embodiment]
FIG. 6 is a cross-sectional view showing a configuration of a light source according to the third embodiment of the present invention. A light source 201 shown in the figure is an example when the present invention is applied to a capillary discharge tube.

光源２０１は、発光筒部２０３Ａと導光筒部２０３Ｂとが接続されたガラス製の密封容器２０３を備えている。この発光筒部２０３Ａには、陰極部２０５、陽極部２０６、及び陽極部２０６と陰極部２０５との間に配置されたキャピラリ２０７によって構成された発光部２０２が収容されている。そして、密封容器２０３内には水素（Ｈ_２）、キセノン（Ｘｅ）、アルゴン（Ａｒ）、クリプトン（Ｋｒ）等のガスが封入されている。このような発光部２０２は、陰極部２０５と陽極部２０６との間に電圧が印加されると、その間に存在するガスを電離、放電させ、電子をキャピラリ２０７内に収束させてプラズマ状態にすることによって、光軸Ｘに沿って導光筒部２０３Ｂ側に向けて光を出射させる。例えば、封入ガスとしてＫｒを、出射窓部４の材料としてＭｇＦ_２を用いた場合には、１１７／１２２ｎｍの波長での発光が可能とされ、封入ガスとしてＡｒを、出射窓部４の材料としてＬｉＦを用いた場合には、１０５ｎｍの波長での発光が可能とされる。 The light source 201 includes a sealed container 203 made of glass to which a light emitting tube portion 203A and a light guide tube portion 203B are connected. The light emitting cylinder portion 203A accommodates a light emitting portion 202 configured by a cathode portion 205, an anode portion 206, and a capillary 207 disposed between the anode portion 206 and the cathode portion 205. A gas such as hydrogen (H ₂ ), xenon (Xe), argon (Ar), and krypton (Kr) is sealed in the sealed container 203. When a voltage is applied between the cathode unit 205 and the anode unit 206, the light emitting unit 202 ionizes and discharges the gas existing between the cathode unit 205 and the anode unit 206, and converges the electrons into the capillary 207 to form a plasma state. Thus, the light is emitted along the optical axis X toward the light guide tube portion 203B. For example, when Kr is used as the sealed gas and MgF ₂ is used as the material of the exit window 4, it is possible to emit light at a wavelength of 117/122 nm. Ar as the fill gas is used as the material of the exit window 4. When LiF is used, light emission at a wavelength of 105 nm is possible.

この陰極部２０５は、発光筒部２０３Ａと導光筒部２０３Ｂとを隔てる部位に配置された接続部材としての役割も有する。詳細には、陰極部２０５は、導光筒部２０３Ｂの出射窓部４に対向するように形成された、反射筒部９の位置決め用に反射筒部９の外径形状に合わせた寸法の窪みを設けた固定リング２０５Ａと、導光筒部２０３Ｂに封着され、固定リング２０５Ａと合わせて真空保持可能に接合するための封着リング２０５Ｂとの２重構造を成している。なお、陰極部２０５に対して別途反射筒部９の位置決め用の部材を取り付けても良い。 The cathode portion 205 also has a role as a connection member disposed at a portion separating the light emitting tube portion 203A and the light guide tube portion 203B. More specifically, the cathode portion 205 is formed so as to be opposed to the emission window portion 4 of the light guide cylinder portion 203B, and is a recess having a size matched to the outer diameter shape of the reflection cylinder portion 9 for positioning the reflection cylinder portion 9. A fixing ring 205A provided with a sealing ring 205B, which is sealed to the light guide tube portion 203B and joined together with the fixing ring 205A so as to be able to hold a vacuum, forms a double structure. In addition, a member for positioning the reflecting cylinder portion 9 may be separately attached to the cathode portion 205.

このような光源２０１の密封容器２０３への反射筒部９の組み込み時には、陰極部２０５の固定リング部材２０５Ａ及び封着リング２０５Ｂを、それぞれ、発光筒部２０３Ａ及び導光筒部２０３Ｂに接合しておく。そして、反射筒部９を固定リング２０５Ａの内側に嵌め込むようにしながら、導光筒部２０３Ｂの内壁面と離間するように挿入した後に、固定リング部材２０５Ａ及び封着リング２０５Ｂを重ね合わせて真空保持可能に接合して組み上げる。なお、反射筒部９を陰極部２０５に溶接し固定した後に、導光筒部２０３Ｂを陰極部２０５に真空保持可能に接合することで組み上げても良い。 At the time of assembling the reflecting cylinder part 9 into the sealed container 203 of such a light source 201, the fixing ring member 205A and the sealing ring 205B of the cathode part 205 are joined to the light emitting cylinder part 203A and the light guide cylinder part 203B, respectively. deep. Then, while inserting the reflecting cylinder portion 9 inside the fixing ring 205A so as to be separated from the inner wall surface of the light guiding cylinder portion 203B, the fixing ring member 205A and the sealing ring 205B are overlapped and vacuumed. Join and assemble to hold. In addition, after the reflecting cylinder part 9 is welded and fixed to the cathode part 205, the light guiding cylinder part 203B may be assembled to the cathode part 205 so as to be vacuum-maintainable.

このような光源２０１によっても、反射筒部９と導光筒部２０３Ｂとの熱膨張率の違いにより、反射筒部９の位置ずれや反射筒部９または導光筒部２０３Ｂの破損を防止することができる。また、反射筒部９は、位置決め部材であるばね部材１２によって付勢されて陰極部２０５の固定リング２０５Ａに嵌め込まれることによって密封容器２０３内で位置決めされているので、密封容器２０３に対する反射筒部９の位置を安定化して、出射窓部４からの光の取り出し効率を保つことができる。 Even with such a light source 201, the displacement of the reflecting cylinder part 9 and the damage of the reflecting cylinder part 9 or the light guiding cylinder part 203B are prevented by the difference in thermal expansion coefficient between the reflecting cylinder part 9 and the light guiding cylinder part 203B. be able to. Further, since the reflecting cylinder portion 9 is positioned in the sealed container 203 by being urged by the spring member 12 as a positioning member and fitted into the fixing ring 205A of the cathode portion 205, the reflecting cylinder portion with respect to the sealed container 203 is placed. 9 can be stabilized, and the light extraction efficiency from the exit window 4 can be maintained.

さらに、反射筒部９の一端側には開口部９ｃが形成されているので、発光筒部２０３Ａで生じたスパッタ物を反射筒部９の外部に放出することができ、反射筒部９の反射面９ａや低温度部の出射窓部４へのスパッタ物の付着を抑制することができる。 Further, since the opening 9c is formed on one end side of the reflecting cylinder part 9, the sputtered matter generated in the light emitting cylinder part 203A can be discharged to the outside of the reflecting cylinder part 9, and the reflection of the reflecting cylinder part 9 It is possible to suppress the adhesion of the sputtered material to the surface 9a and the exit window 4 of the low temperature part.

また、反射筒部９の外壁面９ｂの長手方向の一端側に熱放射膜１０が形成されることにより、発光部２０２に近接する反射筒部９の内側に周辺や封入ガスよりも低温の部分を形成することができ、その部分に発光筒部２０３Ａからのスパッタ物等の異物を捕捉して、異物の出射窓部４への拡散及びそれに伴う光透過率の低下を抑制することができる。特に、発光筒部２０３Ａに近い外壁面９ｂの一部に熱放射膜１０を形成することにより、外壁面９ｂの一端側の熱放射率が外壁面９ｂの他端側の熱放射率よりも大きくなる結果、発光筒部２０３Ａに近い側、つまり出射窓部４から遠い位置にスパッタ物が付着しやすくなるため、出射窓部４の汚染がより低減される。 Further, the heat radiation film 10 is formed on one end side in the longitudinal direction of the outer wall surface 9 b of the reflecting cylinder portion 9, so that a portion at a lower temperature than the periphery and the enclosed gas is formed inside the reflecting cylinder portion 9 close to the light emitting portion 202. In this portion, foreign matter such as sputtered matter from the light emitting cylinder portion 203A can be captured, and the diffusion of the foreign matter to the exit window portion 4 and the accompanying decrease in light transmittance can be suppressed. In particular, by forming the heat radiation film 10 on a part of the outer wall surface 9b near the light emitting cylinder portion 203A, the heat emissivity on one end side of the outer wall surface 9b is larger than the heat emissivity on the other end side of the outer wall surface 9b. As a result, since the sputtered material easily adheres to the side closer to the light emitting cylinder portion 203A, that is, the position far from the emission window portion 4, the contamination of the emission window portion 4 is further reduced.

なお、本発明は、前述した実施形態に限定されるものではない。例えば、反射筒部９，１０９には、金属部材の内壁を研磨加工することにより反射面９ａ，１０９ａが形成されていたが、反射面を蒸着やスパッタにより成膜してもよい。詳細には、アルミニウム等の金属部材、又はガラス、セラミック等の部材に切削加工や成型加工を施して下地を作製し、その下地に必要に応じて研磨加工を施した後、下地の鏡面にアルミニウム、ロジウム、誘電体多層膜等を蒸着やスパッタすることにより反射面を形成することができる。また、反射筒部９，１０９は複数の金属ブロック部材から形成されていたが、一体形成されても良い。 In addition, this invention is not limited to embodiment mentioned above. For example, although the reflecting surfaces 9a and 109a are formed on the reflecting cylinder portions 9 and 109 by polishing the inner wall of the metal member, the reflecting surfaces may be formed by vapor deposition or sputtering. Specifically, a metal member such as aluminum, or a member such as glass or ceramic is cut or molded to prepare a base, and the base is polished as necessary, and then the mirror surface of the base is made of aluminum. The reflective surface can be formed by vapor deposition or sputtering of rhodium, a dielectric multilayer film or the like. Moreover, although the reflection cylinder parts 9 and 109 were formed from the some metal block member, they may be integrally formed.

また、反射筒部９，１０９の開口部９ｃ，１０９ｃ及び突出部９ｄ，１０９ｄの形状としては、様々な形状を採用することができる。例えば、図７に示す本発明の変形例にかかる反射筒部２０９のように、外壁面９ｂの一端側の周縁に沿って２箇所の開口部２０９ｃが形成され、その２箇所の開口部９ｃを挟むように２箇所の突出部２０９ｄが形成されていてもよい。 Various shapes can be adopted as the shapes of the opening portions 9c and 109c and the projecting portions 9d and 109d of the reflecting cylinder portions 9 and 109. For example, like the reflecting cylinder portion 209 according to the modification of the present invention shown in FIG. 7, two openings 209c are formed along the peripheral edge on one end side of the outer wall surface 9b, and the two openings 9c are formed. Two protruding portions 209d may be formed so as to be sandwiched.

また、上述した実施形態では、反射筒部９，１０９を発光筒部３Ａ，２０３Ａ側に設けられた固定用の部材に押し当てることにより固定していたが、レーザ溶接やスポット溶接等により固定用の部材に直接固定しても良い。このとき、反射筒部を直接固定用部材に溶接することが困難な場合は、溶接可能な構造体を反射筒部に嵌合等で固定し、当該構造体と固定部材とを溶接することで固定しても良い。なお、レーザ溶接の場合は、発光筒部３Ａ，２０３Ａのガラス部材越しに溶接を行うことも可能である。 In the above-described embodiment, the reflecting tube portions 9 and 109 are fixed by pressing against the fixing members provided on the light emitting tube portions 3A and 203A side. However, the reflecting tube portions 9 and 109 are fixed by laser welding or spot welding. It may be directly fixed to the member. At this time, if it is difficult to weld the reflecting cylinder part directly to the fixing member, a weldable structure is fixed to the reflecting cylinder part by fitting or the like, and the structure and the fixing member are welded. It may be fixed. In the case of laser welding, it is also possible to perform welding through the glass members of the light emitting tube portions 3A and 203A.

図８には、本発明の変形例である光源３０１として、２つの異なる材料からなる金属ブロック部材からなる反射筒部３０９がレーザ溶接やスポット溶接によって発光部２の収容ケース８に固定された構造を示している。詳細には、アルミニウムからなる反射筒部３０９の本体部の発光部２側の端部に開口部３０９Ｃを有するステンレス製の固定部を圧入および固定し、その固定部と収容ケース８の固定リング８ｂとの接触部分をレーザ溶接やスポット溶接によって溶接し固定する。同図に示す光源３０１では、導光筒部３０３Ｂを短くされているが、反射筒部３０９をそれに合わせて設計することで出射光の分布を平行光や拡散光にもすることができると共に、照射面上での光強度の均一性を高めることもできる。また、光源３０１のように、反射筒部３０９の突出部３０９ｄを、荷電粒子の流れを阻害しない範囲で放電路制限部７に近くなるように、収容ケース８内に伸ばして配置させてもよい。これにより、反射筒部３０９によるスパッタ物の捕捉を、発光部２の内部から行うことができ、低温度部の出射窓部４へのスパッタ物の付着をより抑制することができる。さらに、反射筒部３０９の突出部３０９ｄを含む固定部の内壁面を反射面となるように形成すると、発光部２から発せられた光を損失することなく出射窓部４まで導くことができる。 In FIG. 8, as a light source 301 which is a modified example of the present invention, a reflecting cylinder portion 309 made of a metal block member made of two different materials is fixed to the housing case 8 of the light emitting portion 2 by laser welding or spot welding. Is shown. Specifically, a stainless steel fixing portion having an opening 309C is press-fitted and fixed at the end of the reflecting tube portion 309 made of aluminum on the light emitting portion 2 side of the main body, and the fixing portion and the fixing ring 8b of the housing case 8 are fixed. Weld and fix the contact area with laser welding or spot welding. In the light source 301 shown in the figure, the light guide tube portion 303B is shortened, but by designing the reflection tube portion 309 to match it, the distribution of the emitted light can be made parallel light or diffused light, It is also possible to improve the uniformity of light intensity on the irradiated surface. Further, like the light source 301, the protruding portion 309 d of the reflecting cylinder portion 309 may be extended and arranged in the housing case 8 so as to be close to the discharge path limiting portion 7 within a range that does not hinder the flow of charged particles. . Thereby, the capture of the sputtered matter by the reflecting cylinder portion 309 can be performed from the inside of the light emitting portion 2, and adhesion of the sputtered matter to the emission window portion 4 in the low temperature portion can be further suppressed. Furthermore, if the inner wall surface of the fixed part including the projecting part 309d of the reflecting cylinder part 309 is formed to be a reflecting surface, the light emitted from the light emitting part 2 can be guided to the emission window part 4 without loss.

また、反射筒部３０９の一端側に固定する溶接用の構造体としては、様々な形状のものを採用することができる。 Moreover, as the welding structural body fixed to one end side of the reflecting cylinder portion 309, various shapes can be employed.

例えば、図９及び図１０には、図８の反射筒部３０９を構成する金属ブロック部材のうち、収容ケース８の固定リング８ｂと溶接固定される固定部としての金属ブロック部材のみを、本発明の変形例として示す。これらの図に示す反射筒部４０９，５０９のように、反射筒部９の開口部９ｃ、突出部９ｄと同様に形成された開口部４０９ｃ、及び突出部４０９ｄを有するステンレス製の固定部４１５や、反射筒部２０９の開口部２０９ｃ、突出部２０９ｄと同様に形成された開口部５０９ｃ及び突出部５０９ｄを有するステンレス製の固定部５１５を、反射筒部４０９の本体部に圧入および固定し、これと収容ケース８の固定リング８ｂとを溶接することができる。 For example, FIG. 9 and FIG. 10 show only the metal block member as the fixing portion welded and fixed to the fixing ring 8b of the housing case 8 among the metal block members constituting the reflecting cylinder portion 309 of FIG. It shows as a modified example. Like the reflecting cylinders 409 and 509 shown in these drawings, the opening 9c of the reflecting cylinder 9, the opening 409c formed in the same manner as the protruding part 9d, and the stainless steel fixing part 415 having the protruding part 409d A stainless steel fixing portion 515 having an opening 509c and a protrusion 509d formed in the same manner as the opening 209c and the protrusion 209d of the reflection cylinder 209 is press-fitted and fixed to the main body of the reflection cylinder 409. And the fixing ring 8b of the housing case 8 can be welded.

また、図１１及び図１２に示すように、反射筒部９の突出部９ｄの先端部の外周に、突出部９ｄの先端が突出するようにステンレス製のＣ型止め輪等の止め輪６１５を固定し、その止め輪６１５の突出部９ｄ側の面と収容ケース８の反射筒部固定用部材とを溶接することで反射筒部９を発光部２に対して固定してもよい。 11 and 12, a retaining ring 615 such as a stainless steel C-shaped retaining ring is provided on the outer periphery of the distal end portion of the projecting portion 9d of the reflecting cylinder portion 9 so that the distal end of the projecting portion 9d projects. The reflecting tube portion 9 may be fixed to the light emitting portion 2 by welding the surface of the retaining ring 615 on the protruding portion 9d side and the reflecting tube portion fixing member of the housing case 8.

さらに、図１３に示すように、反射筒部９の突出部９ｄの外周部にステンレス製のシート材７１５を帯状に巻き付け、その終端部を重ね合わせて溶接することにより固定してもよい。このシート材７１５の突出部９ｄの先端側には、反射筒部９の中心軸に対して垂直に延びる複数のつば部７１５ａが設けられており、このつば部７１５ａと収容ケース８の反射筒部固定用部材とを溶接することで反射筒部９を固定することができる。また、つば部７１５ａを設けないでシート材７１５と収容ケース８の反射筒部固定用部材との近接部分を溶接することにより反射筒部９を固定してもよい。また、このシート材７１５には、開口部９ｃに対応する箇所にスパッタ物を放出可能な穴部７１５ｂがあわせて複数設けられる。 Furthermore, as shown in FIG. 13, a stainless steel sheet material 715 may be wound around the outer peripheral portion of the protruding portion 9d of the reflecting cylinder portion 9 in a band shape, and the terminal portions may be overlapped and welded. A plurality of collar portions 715 a extending perpendicularly to the central axis of the reflecting cylinder portion 9 are provided on the distal end side of the projecting portion 9 d of the sheet material 715, and the collar portions 715 a and the reflecting cylinder portion of the housing case 8 are provided. The reflective cylinder portion 9 can be fixed by welding the fixing member. Further, the reflecting cylinder portion 9 may be fixed by welding the proximity portion between the sheet material 715 and the reflecting cylinder portion fixing member of the housing case 8 without providing the collar portion 715a. In addition, the sheet material 715 is provided with a plurality of holes 715b through which sputtered material can be discharged at locations corresponding to the openings 9c.

また、光源１，１０１，２０１では、反射筒部９，１０９の外壁面９ｂ，１０９ｂの一部又は全体に熱放射膜１０が形成されているが、逆に、外壁面９ｂ，１０９ｂの他端側に、反射筒部９，１０９の素材よりも熱放射率の低い材料を形成してもよい。これにより、相対的に一端側の放熱性が向上し、熱放射膜１０と同様の効果が期待できる。また、反射筒部９，１０９の一端側を構成する金属ブロック部材の材料を、他端側を構成する金属ブロック部材の材料よりも熱放射率の大きい材料で構成しても良い。 Further, in the light sources 1, 101, 201, the heat radiation film 10 is formed on a part or the whole of the outer wall surfaces 9b, 109b of the reflecting tube portions 9, 109, but conversely, the other ends of the outer wall surfaces 9b, 109b. On the side, a material having a lower thermal emissivity than the material of the reflecting tube portions 9 and 109 may be formed. Thereby, the heat dissipation of the one end side improves relatively and the effect similar to the heat radiation film | membrane 10 can be anticipated. Moreover, you may comprise the material of the metal block member which comprises the one end side of the reflection cylinder parts 9 and 109 with a material with a larger heat emissivity than the material of the metal block member which comprises the other end side.

１，１０１，２０１，３０１…光源、２，２０２…発光部、３Ａ，２０３Ａ，３０３Ａ…発光筒部（第１の筐体）、３Ｂ，２０３Ｂ，３０３Ｂ…導光筒部（第２の筐体）、４…出射窓部、９，１０９，２０９，３０９，４０９，５０９…反射筒部（筒状部材）、９ａ，１０９ａ…反射面、９ｂ，１０９ｂ…外壁面（側面）、９ｃ，１０９ｃ，２０９ｃ，３０９ｃ，４０９ｃ，５０９ｃ…開口部、１０…熱放射膜。 DESCRIPTION OF SYMBOLS 1,101,201,301 ... Light source, 2,202 ... Light emission part, 3A, 203A, 303A ... Light emission cylinder part (1st housing | casing), 3B, 203B, 303B ... Light guide cylinder part (2nd housing | casing) ) 4, exit window portion, 9, 109, 209, 309, 409, 509 ... reflective tube portion (tubular member), 9a, 109a ... reflective surface, 9b, 109b ... outer wall surface (side surface), 9c, 109c, 209c, 309c, 409c, 509c ... opening, 10 ... heat radiation film.

Claims

A first housing that houses a light emitting unit that generates light by electric discharge;
A second casing that is connected so that one end side communicates with the first casing, and guides the light generated from the light emitting section to an emission window provided on the other end side;
A cylindrical member in which one end side is in contact with the light emitting portion in the first casing, the other end side is inserted in the second casing, and a reflection surface that reflects the light is formed on an inner wall surface;
With
On the side surface on the one end side of the cylindrical member, an opening that penetrates toward the reflecting surface is formed.
A light source characterized by that.

The opening of the cylindrical member is disposed in the first housing.
The light source according to claim 1.

The opening of the cylindrical member is formed by cutting out an edge portion on the one end side of the cylindrical member.
The light source according to claim 1, wherein the light source is a light source.

A plurality of the openings are formed at equal intervals along the peripheral edge on the one end side of the cylindrical member.
The light source according to claim 1, wherein the light source is a light source.

The outer wall surface of the cylindrical member is made of a material having a larger thermal emissivity than the material of the cylindrical member.
The light source according to claim 1, wherein the light source is a light source.

A heat radiation film including a material having a larger thermal emissivity than the material of the cylindrical member is formed on substantially the entire outer wall surface of the cylindrical member.
The light source according to claim 5.

The thermal emissivity on the one end side of the cylindrical member is larger than the thermal emissivity on the other end side of the cylindrical member,
The light source according to claim 1, wherein the light source is a light source.

On the outer wall surface on the one end side of the cylindrical member, a heat radiation film containing a material having a larger heat emissivity than the material of the outer wall surface on the other end side of the cylindrical member is formed.
The light source according to claim 7.