JP2012065000A5 - - Google Patents
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- JP2012065000A5 JP2012065000A5 JP2010205225A JP2010205225A JP2012065000A5 JP 2012065000 A5 JP2012065000 A5 JP 2012065000A5 JP 2010205225 A JP2010205225 A JP 2010205225A JP 2010205225 A JP2010205225 A JP 2010205225A JP 2012065000 A5 JP2012065000 A5 JP 2012065000A5
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- vibrating piece
- piezoelectric vibrating
- electrode
- extraction electrode
- excitation
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- 230000005284 excitation Effects 0.000 claims description 25
- 238000000605 extraction Methods 0.000 claims description 24
- 239000000758 substrate Substances 0.000 claims description 23
- 239000010453 quartz Substances 0.000 claims description 19
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 19
- 239000000853 adhesive Substances 0.000 claims description 7
- 230000001070 adhesive effect Effects 0.000 claims description 7
- 239000013078 crystal Substances 0.000 claims description 7
- 238000001039 wet etching Methods 0.000 description 2
Description
本発明は、上述の課題の少なくとも一部を解決するためになされたものであり、以下の適用例として実現することが可能である。
［適用例１］ＡＴカットの圧電素板をウエットエッチング加工した圧電振動片であって、前記圧電振動片においてＸ軸方向に長辺を有するスリットと、前記スリットと前記圧電振動片のＺ′軸側の端部との間に配置されたマウント部と、を有し、前記端部は、Ｘ軸方向に延びた第１端面及び第２端面と、段差部と、を有し、前記段差部は、前記第１端面と前記第２端面との間に配置され、Ｚ′軸方向の段差を有することを特徴とする圧電振動片。
また、本適用例にかかる圧電振動片は、ＡＴカットされた水晶基板と、前記水晶基板の主面に設けられている第１の励振電極と、前記第１の励振電極に対して前記水晶基板の−Ｚ′軸側に設けられ、前記第１の励振電極から引き出されている第１の引出電極と、前記水晶基板の前記主面と反対側の主面に設けられている第２の励振電極と、前記第２の励振電極に対して前記水晶基板の−Ｚ′軸側に設けられ、前記第２の励振電極から引き出されている第２の引出電極と、を備え、前記水晶基板の−Ｚ′軸側の端部には、Ｘ軸方向の成分を含むように延びている第１端面及び第２端面と、第１の段差部と、を有し、前記第１の引出電極は前記第１端面側に、前記第２引出電極は前記第２端面側に、それぞれ配置され、前記第１の段差部は、前記第１端面と前記第２端面との間に配置され、Ｚ′軸方向の成分を含む段差を有していることを特徴としていてもよい。
SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following application examples.
Application Example 1 A piezoelectric vibrating piece obtained by wet-etching an AT-cut piezoelectric element plate, the slit having a long side in the X-axis direction in the piezoelectric vibrating piece, and the Z ′ axis of the slit and the piezoelectric vibrating piece A mount portion disposed between the first end surface and the second end surface extending in the X-axis direction, and a step portion, and the step portion. Is disposed between the first end face and the second end face and has a step in the Z′-axis direction.
The piezoelectric vibrating piece according to this application example includes an AT-cut quartz crystal substrate, a first excitation electrode provided on a main surface of the quartz crystal substrate, and the quartz crystal substrate with respect to the first excitation electrode. A second extraction electrode provided on the −Z′-axis side of the first extraction electrode and extracted from the first excitation electrode, and a second excitation surface provided on a main surface opposite to the main surface of the quartz substrate. An electrode, and a second extraction electrode provided on the −Z′-axis side of the quartz substrate with respect to the second excitation electrode and drawn from the second excitation electrode, The end on the −Z′-axis side has a first end surface and a second end surface extending so as to include a component in the X-axis direction, and a first step portion, and the first extraction electrode is The second extraction electrode is disposed on the first end surface side, and the second step electrode is disposed on the second end surface side. 1 is disposed between the end face and the second end face, it may be characterized by having a step comprising Z 'axial component.
［適用例２］前記スリットのＸ軸方向に長辺を有する端面にはＺ軸方向に長辺を有する第２の段差部が配置されたことを特徴とする適用例１に記載の圧電振動片。
スリットのＸ軸方向に長辺を有する端面にも上述同様にＸ軸方向に延びた谷部が形成されるため、導電性接着剤がこの端面に及ぶ場合にも導電性接着剤同士が短絡する虞がある。しかし、この端面にも段差部を設けることにより、導電性接着剤同士の短絡を防止して圧電振動片の実装時の歩留を高めることができる。
また、ある態様では、前記第１および前記第２の励振電極の少なくとも一方の励振電極と前記第１および前記第２の励振電極の少なくとも一方の引出電極との間にスリットを有し、前記スリットには、Ｚ′軸方向の成分を含む第２の段差部が設けられていることを特徴とする。
Application Example 2 The piezoelectric vibrating piece according to Application Example 1, wherein a second step portion having a long side in the Z-axis direction is disposed on an end surface having a long side in the X-axis direction of the slit. .
Since a trough extending in the X-axis direction is also formed on the end surface having the long side in the X-axis direction of the slit, the conductive adhesive is short-circuited even when the conductive adhesive reaches this end surface. There is a fear. However, by providing a step portion on this end face, it is possible to prevent a short circuit between the conductive adhesives and to increase the yield when mounting the piezoelectric vibrating piece.
In one embodiment, a slit is provided between at least one excitation electrode of the first and second excitation electrodes and at least one extraction electrode of the first and second excitation electrodes, and the slit Is provided with a second step portion including a component in the Z′-axis direction.
［適用例３］前記段差部は、前記端部からＺ′軸方向へ突き出た凸部、または前記端部の一部を切り欠く凹部であることを特徴とする適用例１または２に記載の圧電振動片。
これにより、段差部は圧電振動片の外形を形成する工程と同時に形成することが可能であるので、コストをかけることなく圧電振動片の実装の歩留を高めることができる。
また、ある態様では、前記第１の段差部は、前記端部からＺ′軸方向の成分を含むように突き出た凸部および前記端部の一部を切り欠く凹部の少なくとも一方の形状を含むことを特徴とする。
[Application Example 3] In the application example 1 or 2, the step portion is a convex portion protruding in the Z′-axis direction from the end portion or a concave portion in which a part of the end portion is notched. Piezoelectric vibrating piece.
Accordingly, the stepped portion can be formed simultaneously with the step of forming the outer shape of the piezoelectric vibrating piece, so that the yield of mounting the piezoelectric vibrating piece can be increased without cost.
In one embodiment, the first stepped portion includes at least one shape of a convex portion protruding from the end portion so as to include a component in the Z′-axis direction and a concave portion notching a part of the end portion. It is characterized by that.
［適用例４］前記マウント部の前記第１端面側及び前記第２端面側にそれぞれ設けられ、前記圧電振動片に形成された励振電極に接続された一対の引出電極を有し、前記一対の引出電極のいずれか一方が反対面に引き回されることにより、前記一対の引出電極は前記圧電振動片の同一面に配置されたことを特徴とする適用例１乃至３のいずれか１例に記載の圧電振動片。
また、ある態様では、前記第１の引出電極または前記第２の引出電極の一方が、前記水晶基板の他方の主面に引き回されていることを特徴とする。
Application Example 4 The present invention includes a pair of extraction electrodes provided on the first end surface side and the second end surface side of the mount portion, respectively, and connected to excitation electrodes formed on the piezoelectric vibrating piece. In any one of the application examples 1 to 3, the pair of extraction electrodes are arranged on the same surface of the piezoelectric vibrating piece by drawing one of the extraction electrodes to the opposite surface. The piezoelectric vibrating piece according to the description.
In one embodiment, one of the first extraction electrode and the second extraction electrode is routed to the other main surface of the quartz substrate.
［適用例５］前記圧電振動片は、薄肉にウエットエッチング加工された薄肉部を有し、前記スリットを挟むように前記薄肉部と前記マウント部とが配置され、前記励振電極は、前記薄肉部に配置されたことを特徴とする適用例１乃至４のいずれか１例に記載の圧電振動片。
これにより、圧電振動片の高周波化を図ることができる。
また、ある態様では、前記水晶基板は、薄肉部を有し、前記薄肉部には、前記第１の励振電極および前記第２の励振電極が設けられている。
Application Example 5 The piezoelectric vibrating piece includes a thin portion that is thinly etched by wet etching, the thin portion and the mount portion are disposed so as to sandwich the slit, and the excitation electrode includes the thin portion 5. The piezoelectric vibrating piece according to any one of Application Examples 1 to 4, wherein the piezoelectric vibrating piece is disposed in the area.
Thereby, the high frequency of the piezoelectric vibrating piece can be achieved.
In one embodiment, the quartz substrate has a thin portion, and the thin excitation portion is provided with the first excitation electrode and the second excitation electrode.
［適用例６］前記薄肉部は、前記マウント部の反対側の端部までを薄肉にウエットエッチング加工された形状であることを特徴とする適用例５に記載の圧電振動片。
これにより、圧電振動片の自由端側が軽量化されるので、実装後の圧電振動片の耐衝撃性を高めることができる。
また、ある態様では、記薄肉部は、前記水晶基板のＺ′軸側の端部まで含まれていることを特徴とする。
[Application Example 6] The piezoelectric vibrating piece according to Application Example 5, wherein the thin-walled portion has a shape that is wet-etched into a thin-walled portion up to the opposite end of the mount portion.
Thereby, since the free end side of the piezoelectric vibrating piece is reduced in weight, it is possible to improve the impact resistance of the piezoelectric vibrating piece after mounting.
In one embodiment, the thin-walled portion is included up to the end on the Z′-axis side of the quartz crystal substrate.
［適用例７］前記薄肉部は、前記圧電振動片のＸ軸方向の端部までを薄肉にウエットエッチング加工された形状であることを特徴とする適用例６に記載の圧電振動片。
これにより、実装後の圧電振動片の耐衝撃性をさらに高めることができる。
また、ある態様では、前記薄肉部は、前記水晶基板のＸ軸方向の端部まで含まれていることを特徴とする。
[Application Example 7] The piezoelectric vibrating piece according to Application Example 6, wherein the thin-walled portion has a shape that is wet-etched thinly to the end in the X-axis direction of the piezoelectric vibrating piece.
Thereby, the impact resistance of the piezoelectric vibrating piece after mounting can be further enhanced.
Moreover, in a certain aspect, the said thin part is contained to the edge part of the X-axis direction of the said quartz substrate, It is characterized by the above-mentioned.
［適用例８］適用例３乃至７のいずれか１例に記載の圧電振動片の前記一対の引出電極が配置された面を基板側に向け、前記一対の引出電極と前記基板とを導電性接着剤を介して接続したことを特徴とする圧電振動子。
これにより、実装時の導電性接着剤同士の短絡を防止した圧電振動子となる。
また、本適用例にかかる圧電振動子は、圧電振動片の第１引出電極および前記第２の引出電極と前記基板とを導電性接着剤を介して接続したことを特徴としていてもよい。
Application Example 8 The surface of the piezoelectric vibrating piece according to any one of Application Examples 3 to 7 on which the pair of extraction electrodes is disposed is directed to the substrate side, and the pair of extraction electrodes and the substrate are electrically conductive. A piezoelectric vibrator characterized by being connected through an adhesive.
As a result, a piezoelectric vibrator is obtained in which a short circuit between the conductive adhesives during mounting is prevented.
The piezoelectric vibrator according to this application example may be characterized in that the first extraction electrode and the second extraction electrode of the piezoelectric vibrating piece and the substrate are connected via a conductive adhesive .
Claims (8)
前記水晶基板の主面に設けられている第１の励振電極と、
前記第１の励振電極に対して前記水晶基板の−Ｚ′軸側に設けられ、前記第１の励振電極から引き出されている第１の引出電極と、
前記水晶基板の前記主面と反対側の主面に設けられている第２の励振電極と、
前記第２の励振電極に対して前記水晶基板の−Ｚ′軸側に設けられ、前記第２の励振電極から引き出されている第２の引出電極と、
を備え、
前記水晶基板の−Ｚ′軸側の端部には、Ｘ軸方向の成分を含むように延びている第１端面及び第２端面と、第１の段差部と、を有し、
前記第１の引出電極は前記第１端面側に、前記第２引出電極は前記第２端面側に、それぞれ配置され、
前記第１の段差部は、前記第１端面と前記第２端面との間に配置され、Ｚ′軸方向の成分を含む段差を有していることを特徴とする圧電振動片。 An AT-cut quartz substrate;
A first excitation electrode provided on the main surface of the quartz substrate;
A first extraction electrode provided on the −Z′- axis side of the quartz crystal substrate with respect to the first excitation electrode and led out from the first excitation electrode;
A second excitation electrode provided on a main surface opposite to the main surface of the quartz substrate;
A second extraction electrode provided on the −Z′-axis side of the quartz crystal substrate with respect to the second excitation electrode and led out from the second excitation electrode;
With
The end on the −Z′-axis side of the quartz substrate has a first end surface and a second end surface that extend so as to include a component in the X-axis direction , and a first stepped portion,
The first extraction electrode is disposed on the first end surface side, and the second extraction electrode is disposed on the second end surface side, respectively.
The first step portion, the disposed between the first end surface and the second end surface, the piezoelectric resonator element, characterized in that it possess a step comprising Z 'axial component.
前記スリットには、Ｚ′軸方向の成分を含む第２の段差部が設けられていることを特徴とする請求項１に記載の圧電振動片。 A slit is provided between at least one excitation electrode of the first and second excitation electrodes and at least one extraction electrode of the first and second excitation electrodes;
2. The piezoelectric vibrating piece according to claim 1, wherein the slit is provided with a second step portion including a component in the Z′-axis direction .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010205225A JP2012065000A (en) | 2010-09-14 | 2010-09-14 | Piezoelectric vibration piece, piezoelectric vibrator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010205225A JP2012065000A (en) | 2010-09-14 | 2010-09-14 | Piezoelectric vibration piece, piezoelectric vibrator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2012065000A JP2012065000A (en) | 2012-03-29 |
| JP2012065000A5 true JP2012065000A5 (en) | 2013-10-24 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010205225A Withdrawn JP2012065000A (en) | 2010-09-14 | 2010-09-14 | Piezoelectric vibration piece, piezoelectric vibrator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2012065000A (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014057236A (en) * | 2012-09-13 | 2014-03-27 | Seiko Epson Corp | Vibration piece, vibrator, oscillator, electronic apparatus and moving body |
| JP6386298B2 (en) * | 2014-08-28 | 2018-09-05 | 京セラ株式会社 | Manufacturing method of crystal element |
| JP6560035B2 (en) * | 2015-06-29 | 2019-08-14 | 京セラ株式会社 | Thickness sliding crystal element |
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2010
- 2010-09-14 JP JP2010205225A patent/JP2012065000A/en not_active Withdrawn
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