JP2012065000A5 - - Google Patents
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- Publication number
- JP2012065000A5 JP2012065000A5 JP2010205225A JP2010205225A JP2012065000A5 JP 2012065000 A5 JP2012065000 A5 JP 2012065000A5 JP 2010205225 A JP2010205225 A JP 2010205225A JP 2010205225 A JP2010205225 A JP 2010205225A JP 2012065000 A5 JP2012065000 A5 JP 2012065000A5
- Authority
- JP
- Japan
- Prior art keywords
- vibrating piece
- piezoelectric vibrating
- electrode
- extraction electrode
- excitation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 230000005284 excitation Effects 0.000 claims description 25
- 238000000605 extraction Methods 0.000 claims description 24
- 239000000758 substrate Substances 0.000 claims description 23
- 239000010453 quartz Substances 0.000 claims description 19
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 19
- 239000000853 adhesive Substances 0.000 claims description 7
- 230000001070 adhesive effect Effects 0.000 claims description 7
- 239000013078 crystal Substances 0.000 claims description 7
- 238000001039 wet etching Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010205225A JP2012065000A (ja) | 2010-09-14 | 2010-09-14 | 圧電振動片、圧電振動子 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010205225A JP2012065000A (ja) | 2010-09-14 | 2010-09-14 | 圧電振動片、圧電振動子 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2012065000A JP2012065000A (ja) | 2012-03-29 |
| JP2012065000A5 true JP2012065000A5 (cg-RX-API-DMAC10.html) | 2013-10-24 |
Family
ID=46060301
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010205225A Withdrawn JP2012065000A (ja) | 2010-09-14 | 2010-09-14 | 圧電振動片、圧電振動子 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2012065000A (cg-RX-API-DMAC10.html) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014057236A (ja) * | 2012-09-13 | 2014-03-27 | Seiko Epson Corp | 振動片、振動子、発振器、電子機器及び移動体 |
| JP6386298B2 (ja) * | 2014-08-28 | 2018-09-05 | 京セラ株式会社 | 水晶素子の製造方法 |
| JP6560035B2 (ja) * | 2015-06-29 | 2019-08-14 | 京セラ株式会社 | 厚みすべり水晶素子 |
| JP7663482B2 (ja) * | 2021-11-30 | 2025-04-16 | 京セラ株式会社 | 圧電振動素子及び圧電デバイス |
| JP7741737B2 (ja) * | 2022-01-25 | 2025-09-18 | 京セラ株式会社 | 圧電素子及び圧電デバイス |
| TWI810007B (zh) | 2022-08-04 | 2023-07-21 | 台灣晶技股份有限公司 | 諧振器 |
| JP2024030292A (ja) * | 2022-08-24 | 2024-03-07 | セイコーエプソン株式会社 | 振動デバイス |
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2010
- 2010-09-14 JP JP2010205225A patent/JP2012065000A/ja not_active Withdrawn