JP2012064935A5 - - Google Patents

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Publication number
JP2012064935A5
JP2012064935A5 JP2011178849A JP2011178849A JP2012064935A5 JP 2012064935 A5 JP2012064935 A5 JP 2012064935A5 JP 2011178849 A JP2011178849 A JP 2011178849A JP 2011178849 A JP2011178849 A JP 2011178849A JP 2012064935 A5 JP2012064935 A5 JP 2012064935A5
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JP
Japan
Prior art keywords
electrode needle
optical fiber
processing chamber
imaging unit
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2011178849A
Other languages
English (en)
Japanese (ja)
Other versions
JP5846805B2 (ja
JP2012064935A (ja
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Publication date
Application filed filed Critical
Priority to JP2011178849A priority Critical patent/JP5846805B2/ja
Priority claimed from JP2011178849A external-priority patent/JP5846805B2/ja
Publication of JP2012064935A publication Critical patent/JP2012064935A/ja
Publication of JP2012064935A5 publication Critical patent/JP2012064935A5/ja
Application granted granted Critical
Publication of JP5846805B2 publication Critical patent/JP5846805B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2011178849A 2010-08-19 2011-08-18 微粒子捕集装置及び真空処理装置 Expired - Fee Related JP5846805B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011178849A JP5846805B2 (ja) 2010-08-19 2011-08-18 微粒子捕集装置及び真空処理装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2010184080 2010-08-19
JP2010184080 2010-08-19
JP2011178849A JP5846805B2 (ja) 2010-08-19 2011-08-18 微粒子捕集装置及び真空処理装置

Publications (3)

Publication Number Publication Date
JP2012064935A JP2012064935A (ja) 2012-03-29
JP2012064935A5 true JP2012064935A5 (https=) 2014-08-28
JP5846805B2 JP5846805B2 (ja) 2016-01-20

Family

ID=46060273

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011178849A Expired - Fee Related JP5846805B2 (ja) 2010-08-19 2011-08-18 微粒子捕集装置及び真空処理装置

Country Status (1)

Country Link
JP (1) JP5846805B2 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102063997B1 (ko) * 2017-07-25 2020-01-08 주식회사 지유디이에스 정전기 공기 필터 및 이를 이용한 공기 정화 장치

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6054748A (ja) * 1983-09-05 1985-03-29 Dengen Autom Kk 集塵電極の集塵限界検出装置
JPH07117459B2 (ja) * 1987-10-20 1995-12-18 富士通株式会社 真空内測定装置
JPH0243961A (ja) * 1988-08-03 1990-02-14 Anelva Corp 真空処理装置の集麈装置
US6184489B1 (en) * 1998-04-13 2001-02-06 Nec Corporation Particle-removing apparatus for a semiconductor device manufacturing apparatus and method of removing particles
JP3301408B2 (ja) * 1998-04-13 2002-07-15 日本電気株式会社 半導体製造装置のパーティクル除去装置及びパーティクルの除去方法
JP2001160537A (ja) * 1999-12-02 2001-06-12 Sharp Corp 電子デバイスの製造装置および電子デバイスの製造方法
JP2004247680A (ja) * 2003-02-17 2004-09-02 Sharp Corp ダスト捕集・回収装置
US20080142481A1 (en) * 2006-12-18 2008-06-19 White John M In-situ particle collector

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