JP2012064883A - Imaging device, and method of manufacturing the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an imaging device 1 that can be arranged in a narrow space.SOLUTION: An imaging device 1 has: an imaging element chip 10 having an imaging element 11 on a first main surface 14, and an external connection terminal 13 connected with the imaging element 11 on a second main surface 15; a wiring board 30 having a wiring layer 32 connected with the external connection terminal 13, and that is arranged within a projection plane 10S of the imaging element chip 10 by being folded at a folding part 30Y; and a bonding layer 20 arranged within the projection plane 10S of the imaging element chip 10, and that bonds the imaging element chip 10 and the wiring board 30.

Description

  The present invention relates to an imaging apparatus including a solid-state imaging element chip and a method for manufacturing the imaging apparatus, and more particularly to an imaging apparatus including a solid-state imaging element chip mounted on a flip chip and a manufacturing method for the imaging apparatus.

  An imaging apparatus including a solid-state imaging element chip is used, for example, provided at the distal end portion of an electronic endoscope. In order to relieve the pain of the patient, it is important to reduce the diameter and shorten the tip of the electronic endoscope.

  As shown in FIG. 1, Japanese Patent Laid-Open No. 2000-199863 discloses an image pickup apparatus 101 having an image pickup element chip 120, a pattern film 130, a wiring board 140, and a signal cable 150. The wiring board 140, the electronic component 146 mounted on the wiring board 140, and the terminal portion of the signal cable 150 are within the projection plane of the image sensor chip 120.

  As shown in FIG. 2, the wiring board 140 is a T-shaped multilayer ceramic board including a vertically oriented substrate 140A and a horizontally oriented substrate 140B orthogonal to the substrate 140A. The bonding pads 124 provided on the outer periphery of the image sensor 123 and the bonding pads (not shown) provided on the vertically oriented substrate 140A coupled to the back surface of the image sensor chip 120 form a wiring pattern. They are connected by a pattern film 130. An electronic component 146 is mounted on the horizontally oriented substrate 140B, and a signal cable 150 is connected to a terminal portion 143 formed at the end.

  However, in the imaging apparatus 101, the outer dimension of the imaging apparatus is increased by the thickness (several tens of μm to several hundreds of μm) of the pattern film 130 by arranging the pattern film 130 on the side surface of the imaging element chip 120. There is a risk that the tip of the electronic endoscope having the diameter may become an obstacle. And when the image pick-up element chip | tip 120 becomes smaller, the influence of the thickness of the pattern film 130 will become more remarkable.

  Japanese Patent Laid-Open No. 2001-13662 discloses a flip chip mounting method in which a semiconductor element having a conductive post on an input / output electrode terminal is crimped / heated to a circuit board in a state of being covered with a semi-cured resin.

  However, since the entire bonding surface of the semiconductor element is covered with a resin that is a bonding layer, if a flexible wiring board larger than the semiconductor element is bonded to the semiconductor element via the bonding layer, the flexible wiring board can be bent even if it is bent. The wiring board could not be accommodated within the projection surface of the semiconductor element. That is, the projection surface of the flexible wiring board becomes larger than the projection surface of the semiconductor element by the thickness of the plate and the curvature radius of the bent portion.

  That is, it may not be easy to dispose the imaging device in a narrow space.

JP 2000-199863 A Japanese Patent Laid-Open No. 2001-13662

  It is an object of the present invention to provide an imaging device that can be disposed in a narrow space, and a method for manufacturing the imaging device.

  An imaging device according to an embodiment of the present invention includes an imaging device chip having an imaging device on a first main surface and an external connection terminal connected to the imaging device on a second main surface, and the external connection terminal. A wiring board that has a connected wiring layer and is bent in a bent portion so as to be arranged in the projection plane of the imaging element chip; and the imaging board that is arranged in the projection plane of the imaging element chip; A bonding layer for bonding the chip and the wiring board;

  According to another aspect of the present invention, there is provided a method for manufacturing an imaging apparatus, comprising: a plurality of imaging elements on a first principal surface; and external connection terminals connected to the imaging elements on a second principal surface. An image pickup device substrate manufacturing step of manufacturing the image pickup device substrate, and a bonding patterned on the second main surface of the image pickup device substrate in a shape including the plurality of external connection terminals connected to the respective image pickup devices A bonding layer forming step for forming a layer, a singulation step for dividing the imaging element substrate into imaging element chips having outer dimensions larger than the bonding layer, and a projection plane of the imaging element chip. A bonding step of connecting the wiring layer of the wiring board to the external connection terminal via the bonding layer.

  ADVANTAGE OF THE INVENTION According to this invention, the imaging device which can be arrange | positioned in a narrow space, and the manufacturing method of the said imaging device can be provided.

It is a perspective view for demonstrating the structure of a well-known imaging device. It is an exploded view for demonstrating the structure of the wiring board of a well-known imaging device. It is sectional drawing for demonstrating the structure of the imaging device of 1st Embodiment. It is an exploded view for demonstrating the structure of the imaging device of 1st Embodiment. It is a perspective view when it sees from the 1st main surface side for demonstrating the image pick-up element board | substrate preparation process of the manufacturing method of the imaging device of 1st Embodiment. It is a perspective view when it sees from the 2nd main surface side for demonstrating the image pick-up element board | substrate preparation process of the manufacturing method of the imaging device of 1st Embodiment. It is a perspective view when it sees from the 2nd main surface side for demonstrating the joining layer formation process of the manufacturing method of the imaging device of 1st Embodiment. It is a perspective view when it sees from the 2nd main surface side for demonstrating the individualization process of the manufacturing method of the imaging device of 1st Embodiment. It is sectional drawing for demonstrating the joining process of the manufacturing method of the imaging device of 1st Embodiment. It is sectional drawing for demonstrating the connection process of the manufacturing method of the imaging device of 1st Embodiment. It is sectional drawing for demonstrating the bending process of the manufacturing method of the imaging device of 1st Embodiment. It is sectional drawing for demonstrating the imaging device of the modification 1 of 1st Embodiment. It is sectional drawing for demonstrating the imaging device of the modification 2 of 1st Embodiment. It is sectional drawing for demonstrating the imaging device of 2nd Embodiment. It is an exploded view for demonstrating the imaging device of 3rd Embodiment. It is sectional drawing for demonstrating the imaging device of 3rd Embodiment. It is sectional drawing for demonstrating the manufacturing method of the imaging device of 4th Embodiment. It is sectional drawing for demonstrating the manufacturing method of the imaging device of 5th Embodiment. It is explanatory drawing for demonstrating the cross-section of the endoscope of 6th Embodiment.

<First Embodiment>
As shown in FIGS. 3 and 4, the imaging device 1 of the present embodiment includes an imaging element chip 10, a bonding layer 20, and a wiring board 30. The imaging element chip 10 is flip-chip mounted on the wiring board 30 via the bonding layer 20.

  Note that all the drawings are schematic diagrams for explanation, and for example, a component shown thick in a sectional view is not necessarily thicker than a component shown thinner than that. Some components may not be shown.

  As will be described later, the imaging element chip 10 is manufactured at a wafer level using a silicon substrate which is a semiconductor substrate. The first main surface 14 of the image sensor chip 10 is formed with a COMS image sensor as the image sensor 11 and a connection terminal 16 connected to the image sensor 11. The imaging element 11 may be a CCD or the like. Note that the wiring from the image sensor 11 to the connection terminal 16 is not shown.

  The connection terminal 16 is connected to the external connection terminal 13 on the second main surface 15 and the back surface wiring 19 through a through wiring 12 made of TSV (Through-Silicon Via) or the like.

  The through wiring 12 is formed on the outer peripheral portion of the imaging element 11 formed on the first main surface 14, but the external connection terminal 13 on the second main surface 15 is preferably disposed on the inner peripheral side. . That is, when the position of the external connection terminal 13 is close to the outer periphery of the image sensor chip 10, it may be difficult to arrange the wiring board 30 on the projection surface 10 </ b> S of the image sensor chip 10. For this reason, in the imaging element chip 10, the back surface wiring 19 is used in order to dispose the external connection terminal 13 on the inner peripheral side of the through wiring 12 forming portion.

  The convex external connection terminal 13 connected to the through wiring 12 is a gold bump, a copper bump, a solder bump, or the like.

  The wiring board 30 is a flexible multilayer wiring board whose base material is a flexible resin such as polyimide. The wiring board 30 includes a wiring layer 32 made of copper or the like connected to the external connection terminal 13 of the imaging element chip 10 via a connection portion (connection pad) 31. The connection part 31 may be a part of the outermost layer of the wiring layer 32.

  And the wiring board 30 is arrange | positioned in the projection surface 10S of the image pick-up element chip 10 by being bent by the bending part 30Y.

  For the sake of convenience, the wiring board 30 is expressed as being divided into a joint portion 30X, a bent portion 30Y, and an extended portion 30Z. However, the wiring board 30 of the present embodiment is a single flexible wiring board, and the division The boundaries of are not clearly defined. The wiring board may be a rigid flexible wiring board in which at least the bent part 30Y has flexibility, and the joining part 30X and the extending part 30Z are formed of a hard substrate. In the rigid flexible wiring board, the boundary of the section is clear.

  The block 40 is a reinforcing member when the wiring board 30 is bent at the bent portion 30Y. The block 40 is made of a metal material having a high thermal conductivity such as aluminum or copper, or a resin such as polycarbonate. A plate material may be used instead of the block as long as it has a function as a reinforcing member.

  A cable 45 connected to the wiring layer 32 of the extending portion 30Z of the wiring board 30 transmits a signal and the like between the imaging element chip 10 and a control unit and a signal processing unit (not shown).

  An electronic component 33 is mounted on the inner surface of the extended portion 30 </ b> Z of the wiring board 30. As the electronic component 33, a necessary component is selected from a chip capacitor, a chip resistor, a signal processing IC, a driver IC, a power supply IC, a diode, a coil, a reed switch, or the like. Of course, when the electronic component 33 is unnecessary, it is not necessary to mount it.

  The bonding layer 20 is made of, for example, an anisotropic conductive film (ACF), and electrically connects the connection terminal 16 and the connection portion 31, and functions to seal the connection portion and reinforce the connection portion. Have The thickness of the bonding layer 20 is preferably equal to or greater than the height of the external connection terminal 13 so that a void or the like cannot be formed in the bonding space. For this reason, the imaging element chip 10 and the wiring board 30 are bonded to each other through the bonding layer 20 while applying pressure. The solder may be dissolved or the resin may be cured by heating or UV light irradiation during the pressure bonding.

  Note that a microlens may be formed on the image sensor 11 of the image sensor chip 10, or a cover glass may be bonded via an air gap.

  In the imaging apparatus 1, (imaging element chip projection surface 10S) ≧ (wiring board projection surface 30S) ≧ bonding layer projection surface 20S). In other words, the wiring board 30 is disposed in the projection plane of the imaging element chip 10, and the bonding layer 20 is disposed in the projection plane of the wiring board 30.

  The projection plane is a plane parallel to the plane of the image sensor 11, in other words, a vertical projection plane with respect to a plane parallel to the first main surface 14 and the like.

  Since the cross-sectional area of the imaging device 1 is the projection surface of the imaging element chip 10, the imaging device 1 can be disposed in a narrow space. The endoscope in which the imaging device 1 is disposed at the distal end can reduce the diameter of the distal end.

  Next, a method for manufacturing the imaging device 1 will be described with reference to FIGS.

<Image sensor substrate manufacturing process>
As shown in FIGS. 5 and 6, the first main surface 14 has a plurality of imaging elements 11 and a plurality of connection terminals 16 connected to the respective imaging elements 11. The image sensor substrate 10W1 having the external connection terminals 13 connected to the respective connection terminals 16 is manufactured.

  In the image pickup device substrate 10W1 shown in FIGS. 5 and 6, 100 image pickup devices 11, 400 connection terminals 16, and 400 external connection terminals 13 arranged in a 10 × 10 matrix in one wafer. Are made. That is, one imaging element 11 has four connection terminals 16, and each connection terminal 16 is connected to each external connection terminal 13.

  The greater the number of image sensors 11 and the like formed on one image sensor substrate 10W1, the better the mass productivity.

  The connection terminal 16 is connected to the external connection terminal 13 via a through wiring 12 (see FIG. 3) that penetrates the silicon substrate. The through wiring 12 is produced by forming the through hole by wet etching or dry etching and then making the inner surface of the through hole conductive. The through hole is preferably a via hole formed from the second main surface 15 side and having the back surface of the connection terminal 16 as an etching stop layer. The through wiring 12 and the external connection terminal 13 are connected by a back surface wiring 19.

  Note that, instead of the through wiring 12, the connection terminal 16 and the external connection terminal 13 may be connected by a known side surface wiring or the like after an individualization process described later. The imaging element substrate 10W1 may be substantially circular.

<Joint layer forming step>
As shown in FIG. 7, a bonding layer 20 patterned in a shape including a plurality of external connection terminals 13 connected to each of the image pickup devices 11 is formed on the second main surface 15 of the image pickup device substrate 10W1. That is, a plurality of bonding layers 20 are patterned and formed at a wafer level.

  As described above, since one image pickup device 11 is connected to the four external connection terminals 13, the bonding layer 20 is patterned so as to cover the four external connection terminals 13. The plurality of bonding layers 20 is referred to as a bonding layer group 20W. That is, in the bonding layer forming step, the bonding layer group 20W is formed on the second main surface 15, and the imaging element substrate 10W2 with the bonding layer is manufactured.

  For example, the bonding layer 20 formed using a film such as an anisotropic conductive film is etched through a metal mask layer or the like after bonding a film-like resin to the entire surface of the second main surface 15 of the imaging element substrate 10W1. Patterning is performed by processing or ashing processing.

  Further, as the bonding layer 20, a non-conductive film (NCF: Non Conductive Film) or the like may be used, or NCP (non-conductive resin paste), ACP (anisotropic conductive resin paste)) instead of a film-like resin, Alternatively, a liquid resin such as a solder particle-containing resin may be used. In the case of using a liquid resin, the patterned bonding layer 20 can be formed by using an inkjet method, a screen printing method, or the like instead of the etching process after masking.

  In the case where the bonding layer 20 is made of a nonconductive material, the region of the external connection terminal 13 may be removed by patterning (see FIG. 15).

  When the bonding layer 20 contains a curable resin, the bonding layer 20 is preferably in an uncured state or a semi-cured state when the bonding layer 20 is formed. This is because the connecting portion 31 and the connecting terminal 16 can be more reliably connected by performing a curing process by heating, UV irradiation, or the like in a bonding process described later.

  Note that the outer shape (projected shape) of the bonding layer 20 does not have to be the square shown in FIG. 4 or the like, and may be a rectangle or an ellipse as long as the shape includes the external connection terminal 13. For example, when the outer shape of the image sensor 11 is rectangular, the outer shape of the bonding layer 20 may also be rectangular.

<Individualization process>
As shown in FIG. 8, the imaging element substrate 10W2 with the bonding layer is cut and separated into individual imaging element chips 1W1. In order to be cut between the bonding layer 20 and the bonding layer, the bonding layer 20 is formed at the center of the second main surface 15 of the imaging element chip 1W1.

  A wire saw, a blade dicing apparatus, a laser dicing apparatus, or the like is used for the wafer cutting process in the singulation process.

<Joint process>
(Connection process)
As shown in FIGS. 9 and 10, the connection part 31 of the wiring board 30 and the connection terminal 16 are connected via the bonding layer 20. At this time, in order to securely connect the image sensor chip 10 and the wiring board 30 with certainty, the bonding process is performed while applying pressure to the image sensor chip 10 and the wiring board 30. That is, it is preferable to perform pressure bonding.

  The thickness of the bonding layer 20 is larger than the height of the external connection terminal 13. For this reason, the bonding layer projection surface 20S after pressure bonding shown in FIG. 10 is larger than the bonding layer projection surface 20S0 before pressure bonding shown in FIG. That is, the bonding layer 20 extends to the side surface side.

  Although not shown in FIG. 9 or the like, the electronic component 33 may be mounted in advance on the wiring board 30 as shown in FIG. 3 or the like.

(Bending process)
As shown in FIG. 11, the wiring board 30 is bent and the wiring board projection surface 30 </ b> S is disposed in the imaging element chip projection surface 10 </ b> S. Note that the width of the block 40 is preferably wider than the width of the bonding layer 20 in order to prevent the bonding layer 20 from being stressed when bent.

  When the bending angle θv is approximately 90 degrees or less, the wiring board 30 is disposed in the imaging element chip projection surface 10S, but the bending angle θv is preferably 90 to 50 degrees. FIG. 11 shows a U-shaped case in which both the left and right sides of the wiring board 30 are bent. However, in the wiring board arranged within the projection plane 10S even after one end is short, the other end It may be an L-shape that is bent only.

  Note that the radius of curvature R of the bent portion varies depending on the type of the wiring board 30 and the like, but is about 0.1 mm, for example. The bonding layer 20 is patterned into a shape and size in consideration of the enlargement of the projection surface 20S by pressure bonding and the curvature radius R of the bent portion.

  In order to bend at a predetermined angle and a predetermined position, and to reduce stress on the joint at the time of bending, the block 40 is joined to the back surface of the joint 30X of the wiring board 30 in the block joining step before the bending. Further, after bending, the block 40 and the extended portion 30Z of the wiring board 30 in contact with the block 40 are joined.

  Note that it is also possible to mount the low-profile electronic component 33 in the space between the outer side surface of the wiring board 30 after being bent and the projection surface 10S of the imaging element chip.

<Cable connection process>
The wiring layer 32 of the extending portion 30Z of the wiring board 30 and the signal cable 45 are connected. The cable connection is performed by, for example, solder bonding.

  Since the cable 45 has flexibility, the cable 45 does not have to be disposed in the space in the projection surface 10S of the image pickup chip over the entire length in order to reduce the diameter of the imaging device 1. The cable 45 only needs to have at least a connection portion with the wiring board 30 disposed in the projection surface 10S.

  As described above, the manufacturing method of the image pickup apparatus 1 according to the present embodiment includes a plurality of image pickup devices on the first main surface, and the external connection connected to each of the image pickup devices on the second main surface. An image sensor substrate manufacturing step of manufacturing an image sensor substrate having a terminal, and a pattern including a plurality of the external connection terminals connected to the respective image sensors on the second main surface of the image sensor substrate. A bonding layer forming step for forming a bonding layer, an individualization step for dividing the imaging element substrate into imaging element chips having outer dimensions larger than the bonding layer, and a projection plane of the imaging element chip. A bonding step of connecting the wiring layer of the wiring board to be arranged and the external connection terminal via the bonding layer.

  According to this embodiment, the imaging device 1 that can be disposed in a narrow space can be manufactured.

<Modification 1 and Modification 2 of the first embodiment>
Next, Modification 1 and Modification 2 of the first embodiment will be described. Since the modification is similar to that of the first embodiment, similar constituent elements are given one alphabetic character at the end of the reference numerals, the same reference numerals are assigned to the same constituent elements, and description thereof is omitted.

  The projection surface of the bonding layer 20 </ b> A of the imaging device 1 </ b> A according to Modification 1 of the first embodiment shown in FIG. 12 is substantially coincident with the projection surface of the wiring board 30. Further, the projection surface of the bonding layer 20B of the imaging device 1B according to the second modification of the first embodiment shown in FIG. 13 is larger than the projection surface of the wiring board 30.

  However, in the imaging device 1A and the imaging device 1B, the projection planes of the bonding layers 20A and 20B and the projection plane of the wiring board 30 are both within the projection plane of the imaging element chip 10.

  For this reason, the imaging device 1A, the imaging device 1B, and the manufacturing method of the present modification have the same effects as the imaging device 1 and the like of the first embodiment.

  In the manufacturing method of the image pickup apparatus 1B, for example, after connecting the connection portion 31 of the wiring board 30 and the connection terminal 16 of the image pickup element chip 10 by soldering, a liquid resin is poured into a gap between the bonding surfaces to thereby form a bonding layer. 20B may be formed.

Second Embodiment
Next, a second embodiment will be described. Since the second embodiment is similar to the first embodiment and the like, similar constituent elements are appended with one alphabetic character at the end of the reference numerals, and the same constituent elements are assigned the same reference numerals and description thereof is omitted.

  As shown in FIGS. 14A to 14C, the imaging devices 1C, 1D, and 1E according to the second embodiment have notches 17C, 17D, and 17C on the side surfaces of the imaging device chips 10C, 10D, and 10E, respectively. 17E is formed, and the cross section of the cutout portion 17C is rectangular so that the outer dimension (projection plane) of the second main surface 15 is smaller than the outer dimension (projection plane) of the first main surface 14. The cross section of the portion 17D has a tapered shape, and the cross section of the notch portion 17E has a slope (curved surface) shape.

  In the imaging devices 1C, 1D, and 1E of the present embodiment, the size of the projection surface 20S of the bonding layer 20 in the bonding process is restricted by the notches 17C, 17D, and 17E. For example, when the bonding layer 20 is formed of a liquid resin, the projected area of the bonding layer 20 increases due to capillary action, and the bonding layer 20 also increases due to pressure applied during pressure bonding. However, the size of the bonding layer 20 is regulated by the notches 17C, 17D, and 17E. In other words, the spread of the bonding layer 20 is suppressed by the notches 17C, 17D, and 17E.

  For this reason, the imaging devices 1C, 1D, and 1E and the manufacturing method of the present embodiment form the bonding layer 20 in the predetermined projection plane more reliably in addition to the effects of the imaging device 1 and the like of the first embodiment. Can do. For this reason, the imaging devices 1C, 1D, and 1E can more reliably arrange the wiring board 30 in the projection plane of the imaging element chips 10C, 10D, and 10E.

<Third Embodiment>
Next, a third embodiment will be described. Since the third embodiment is similar to the first embodiment or the like, similar constituent elements are given one alphabetic letter at the end of the reference numerals, and the same constituent elements are given the same reference numerals, and description thereof is omitted.

  As shown in FIGS. 15 and 16A, in the imaging device 1F of the present embodiment, a groove 18F having a rectangular cross section is formed on the second main surface 15 of the imaging element chip 10F. As shown in FIG. 15, the groove portion 18 </ b> F only needs to be formed at a position parallel to at least the bent portion 30 </ b> Y of the wiring board 30. That is, when a wiring board that is bent in an L shape is used, only one groove 18F is required. Conversely, the groove may have a shape surrounding the bonding layer 20.

  Further, as shown in FIG. 16B, the groove portion 18G of the imaging device 1G has a V-shaped cross section, and as shown in FIG. 16C, the groove portion 18H of the imaging device 1H has a U-shaped cross section. is there. The groove portions 18F, 18G, and 18H may be formed up to the end surface of the second main surface 15 of the imaging element chip 10F.

  In the imaging devices 1F, 1G, and 1H of the present embodiment, the size of the projection surface of the bonding layer 20 in the bonding process is regulated by the grooves 18F, 18G, and 18H. For example, when the bonding layer 20 is formed of a liquid resin, the bonding layer 20 spreads due to a capillary phenomenon, but the size is regulated by the groove portions 18F, 18G, and 18H.

  For this reason, the imaging devices 1F, 1G, and 1H and the manufacturing method of the present embodiment have the effects that the imaging devices 1C, 1D, and 1E of the second embodiment have. Furthermore, since the grooves 18F, 18G, and 18H can be formed at the wafer level, the manufacturing is easier than the imaging devices 1C, 1D, and 1E of the second embodiment.

  As already described, the bonding layer 20F1 of the imaging device 1F illustrated in FIG. 15 is the hole 20F1 from which the region in contact with the external connection terminal 13 is removed during patterning.

<Fourth embodiment>
Next, a fourth embodiment will be described. Since the fourth embodiment is similar to the first embodiment and the like, similar constituent elements are given one alphabetic character at the end of the reference numerals, and the same reference numerals are given to the same constituent elements, and the description thereof is omitted.

  The structure of the imaging device 1J of the fourth embodiment is substantially the same as that of the imaging device 1 of the first embodiment. However, the manufacturing method is different.

  The manufacturing method of the image pickup apparatus 1J according to the present embodiment includes an image pickup element that has an image pickup element on a first main surface and has an external connection terminal connected to the image pickup element on a second main surface. A chip manufacturing step, a bonding layer forming step of forming a bonding layer that can be disposed in a projection plane of the imaging element chip on a flexible wiring board, the wiring layer of the wiring board, the external connection terminal, and the A bonding step of bonding via a bonding layer; and a bending step of bending the wiring board by a bending portion so as to be arranged in the projection plane of the imaging element chip.

  That is, as shown in FIG. 17, in the imaging element chip manufacturing process, the imaging element chip 10 is manufactured by the same method as the wafer process already described. On the other hand, the bonding layer 20 is formed in a region including the connection portion on the wiring board 30 in the bonding layer forming step. At this time, the bonding layer 20 has a shape and a size that can be arranged in the projection plane of the imaging element chip 10.

  Then, after the imaging element chip 10 and the wiring board 30 on which the bonding layer 20 is formed are bonded in the bonding layer forming process, the bending process is performed.

  The manufacturing method of the imaging device 1J of the present embodiment has the same effects as the manufacturing method of the imaging device 1 of the first embodiment.

<Fifth Embodiment>
Next, a fifth embodiment will be described. Since the fifth embodiment is similar to the first embodiment and the like, similar constituent elements are appended with one alphabetic character at the end of the reference numerals, and the same reference numerals are assigned to the same constituent elements, and description thereof is omitted.

  The structure of the imaging device 1K according to the fifth embodiment is substantially the same as that of the imaging device 1 according to the first embodiment. However, the manufacturing method is different.

  The manufacturing method of the image pickup apparatus 1K according to the present embodiment is an image pickup element that produces an image pickup element chip having an image pickup element on a first main surface and an external connection terminal connected to the image pickup element on a second main surface. A chip manufacturing step, a wiring board manufacturing step of manufacturing a wiring board bent by a bent portion so as to be arranged in a projection plane of the imaging element chip, a wiring layer of the wiring board, and the external connection terminal And a bonding step of bonding via a bonding layer disposed in the projection plane of the imaging element chip.

  That is, as shown in FIG. 18, in the manufacturing method of the imaging device 1K, the wiring board 30 is bent at the bent portion 30Y in the wiring board manufacturing process before the joining process. In the bonding step, the bent wiring board 30 is bonded to the imaging element chip 10 via the bonding layer 20.

  Note that the bonding layer 20 may be formed on the imaging element chip 10 or may be formed on the wiring board 30. Further, a film-like resin cut into a predetermined size may be sandwiched between the imaging element chip 1 and the wiring board 30 by pressure bonding.

  The manufacturing method of the imaging device 1K of the present embodiment has the same effects as the manufacturing method of the imaging device 1 of the first embodiment.

<Sixth Embodiment>
Next, as a third embodiment, an imaging unit of the endoscope 50 in which the imaging device 1L is incorporated at the distal end portion of the insertion portion will be described. The optical system 51 schematically shown in FIG. 19 and the imaging device 1L are fixed around the optical axis O by a frame portion 52. Note that a glass substrate portion 35 having a function of protecting the image pickup device 11 during manufacture is bonded to the first main surface of the image pickup device 1L.

The imaging device 1L is accommodated in a shield frame 53 having a small diameter, for example, a diameter of 3 mm. The inside of the shield frame 53 is filled with a non-conductive resin filler 55 having a high thermal conductivity. An electronic component 33 is mounted on the extended portion 30Z of the wiring board 30 bent after the block 40 is disposed, and a cable 45 is connected to the rear end portion.
The imaging device 1L has the same structure as the imaging device 1 already described.

  The endoscope 50 having the above-described structure, that is, the imaging device 1 or the like at the distal end portion of the insertion portion can be reduced in diameter.

  The present invention is not limited to the above-described embodiment, and various changes and modifications can be made without departing from the scope of the present invention.

DESCRIPTION OF SYMBOLS 1, 1A-1L ... Image pick-up device, 10 ... Image pick-up element chip, 10S ... Image pick-up element chip projection surface, 10W1, 10W2 ... Image pick-up element board | substrate, 11 ... Image pick-up element, 12 ... Through wiring, 13 ... External connection terminal, 14th DESCRIPTION OF SYMBOLS 1 main surface, 15 ... 2nd main surface, 16 ... Connection terminal, 17C-17D ... Notch part, 18F-18H ... Groove part, 19 ... Back surface wiring, 20 ... Joining layer, 20S ... Joining layer projection surface, 20W DESCRIPTION OF SYMBOLS ... Bonding layer group, 30 ... Wiring board, 30S ... Wiring board projection surface, 31 ... Connection part, 32 ... Wiring layer, 33 ... Electronic component, 40 ... Block, 45 ... Signal cable, 50 ... Endoscope, 101 ... Imaging Device 120 ... Imaging device chip 123 ... Imaging device 124 ... Bonding pad 130 ... Pattern film 140 ... Wiring board 143 ... Terminal part 146 ... Electronic component 150 ... Signal cable

Claims (13)

An image sensor chip having an image sensor on a first main surface and an external connection terminal connected to the image sensor on a second main surface;
A wiring board having a wiring layer connected to the external connection terminal and being arranged in a projection plane of the imaging element chip by being bent at a bent portion;
An image pickup apparatus, comprising: a bonding layer that is disposed in the projection plane of the image pickup element chip and joins the image pickup element chip and the wiring board.   The notch part is formed in the side surface of the said image pick-up element chip | tip, The outer dimension of the said 2nd main surface is smaller than the outer dimension of the said 1st main surface, The Claim 1 or Claim 2 characterized by the above-mentioned. Imaging device.   The imaging device according to claim 1, wherein a groove that regulates a size of the bonding layer is formed on the second main surface of the imaging element chip.   The imaging device according to any one of claims 1 to 3, wherein the bonding layer is formed using a film-like resin or a liquid-like resin.   5. The imaging apparatus according to claim 1, wherein the imaging element chip has a through wiring or a side wiring that connects the imaging element and the external connection terminal. 6.   The imaging device according to claim 1, wherein the wiring board has flexibility.   The imaging device according to claim 1, wherein the bonding layer is disposed in a projection plane of the wiring board. An image pickup device substrate manufacturing step of manufacturing an image pickup device substrate having a plurality of image pickup devices on a first main surface and having external connection terminals connected to the respective image pickup devices on a second main surface;
A bonding layer forming step of forming a bonding layer patterned in a shape including a plurality of the external connection terminals connected to the respective imaging elements on the second main surface of the imaging element substrate;
A singulation process for dividing the image sensor substrate into image sensor chips having an outer size larger than the bonding layer;
An image pickup apparatus comprising: a bonding step of connecting a wiring layer of a wiring board disposed in a projection plane of the image pickup element chip and the external connection terminal via the bonding layer. Production method.   The joining step includes a connecting step in which the wiring board having flexibility is connected to the imaging element chip via the joining layer, and a bending in which the wiring board is bent and disposed in a projection plane of the imaging element chip. The method according to claim 8, further comprising: a step. An image sensor chip manufacturing step of manufacturing an image sensor chip having an image sensor on a first main surface and an external connection terminal connected to the image sensor on a second main surface;
A bonding layer forming step of forming a bonding layer that can be disposed in a projection plane of the imaging element chip on a flexible wiring board;
A bonding step of bonding the wiring layer of the wiring board and the external connection terminal via the bonding layer;
And a bending step of bending the wiring board by a bending portion so as to be disposed within a projection surface of the imaging element chip. An image sensor chip manufacturing step of manufacturing an image sensor chip having an image sensor on a first main surface and an external connection terminal connected to the image sensor on a second main surface;
A wiring board manufacturing step of manufacturing a wiring board bent by a bent portion so as to be arranged in the projection plane of the imaging element chip;
A bonding step of bonding the wiring layer of the wiring board and the external connection terminal via a bonding layer disposed in a projection plane of the imaging element chip. . A notch forming step of forming a notch on the side surface of the image sensor chip,
12. The method of manufacturing an imaging device according to claim 8, wherein an outer dimension of the second main surface is smaller than an outer dimension of the first main surface.   13. The imaging device according to claim 8, further comprising: a groove portion forming step of forming a groove portion that regulates a size of the bonding layer on the second main surface. Production method.

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