JP2012051039A - Method of manufacturing glass thin sheet - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a manufacturing method of a glass thin sheet capable of manufacturing the glass thin sheet excellent in flatness and parallelism without reducing production efficiency.SOLUTION: This manufacturing method of the glass thin sheet includes a preparing process of preparing a dummy sheet 5 formed by respectively sticking a suction pad to both surfaces of a rigid substrate, an installation process of respectively sucking and installing a glass sheet 6 to and on the suction pad of both surfaces of the dummy sheet 5, a polishing process of polishing one surface 61 on the surface sheet side of the respective glass sheets 6 by relatively moving an upper surface sheet 1, a lower surface sheet 2 and a pair of glass sheets 6, by sandwiching the pair of glass sheets 6 installed on the dummy sheet 5 between the upper surface sheet 1 and the lower surface sheet 2 of a double-sided polishing machine by holding the pair of glass sheets 6 in a work holding hole 71 of a carrier 7, and a removal process of providing a pair of glass thin sheets by removing the pair of glass sheets 6 of polishing one surface from the dummy sheet 5.

Description

  The present invention relates to a method for producing a glass sheet, and more particularly to a method for producing a glass sheet using a double-side polishing machine.

  In recent years, there has been a demand for further thinning of a glass plate material excellent in insulation, chemical durability, translucency, and the like against the background of weight reduction and thinning of electronic and electrical equipment such as a liquid crystal display.

  In order to obtain a glass thin plate with good flatness and parallelism, it is necessary to polish the glass surface. Conventionally, however, the glass surface is mainly polished using a double-side polishing machine (see below). Patent Document 1). For example, as shown in FIG. 5, a glass plate held in a work holding hole 31 of a carrier 3 between a pair of upper and lower upper and lower surface plates 1 and 2 each having a polishing pad affixed to each other. 4 while sandwiching 4 and supplying a slurry-like abrasive, the upper surface plate 1 and the lower surface plate 2 and the glass plate 4 are moved relative to each other to polish the upper and lower surfaces of the glass plate 4, and the required flatness, Manufactures glass sheets that satisfy parallelism.

Japanese Patent Laid-Open No. 5-38671

  However, as the glass plate to be polished becomes thinner, the glass plate itself is more easily deformed, and the carrier also needs to be made thinner as the glass plate becomes thinner. There was a problem that it was easy to come off. Therefore, conventionally, as the glass plate is made thinner, the polishing speed by the polishing machine has to be reduced, and the production efficiency of the glass thin plate is greatly reduced.

  The present invention was made in view of the above-mentioned problems in the method for producing a glass thin plate using a conventional double-side polishing machine, and a glass thin plate with good flatness and parallelism was produced. It aims at providing the manufacturing method of the glass thin plate which can be manufactured well.

In the present invention, a work held in a work holding hole of a carrier is sandwiched between a pair of upper and lower upper and lower surface plates each having a polishing pad affixed to each other, and the abrasive is supplied while the abrasive is being supplied. A method of manufacturing a glass thin plate using a double-side polishing machine that polishes both the upper and lower surfaces of the workpiece by moving the upper platen and the lower platen relative to the workpiece,
A preparation step of preparing a dummy plate formed by sticking suction pads to both surfaces of a rigid substrate, and a glass plate is sucked to each of the suction pads on both sides of the dummy plate prepared by the preparation step. A mounting step of attaching a pair of the glass plates, and a pair of the glass plates attached to the dummy plate by the mounting step, being held in the work holding holes of the carrier, between the upper surface plate and the lower surface plate And sandwiching the upper surface plate and the lower surface plate with a pair of the glass plates to polish one surface on the surface plate side of each glass plate, and one surface on the surface plate side by the polishing step. A removal step of removing the pair of polished glass plates from the dummy plate to obtain a pair of thin glass plates.

  Further, the present invention is characterized in that, in the attaching step, the suction pad of the dummy plate is wetted with water and bonded together while pressing the glass plate with a predetermined load, and then a drying step is performed.

  The present invention is characterized in that the drying step is performed by natural drying.

  As described above, according to the method for manufacturing a glass thin plate according to the present invention, the glass plate to be polished can be adsorbed and fixed to the dummy plate having a predetermined rigidity through the suction pad. Even if it is thin, the glass plate can be polished based on the flatness of the dummy plate without deformation of the glass plate during polishing, and a thin glass plate having predetermined flatness and parallelism can be produced. be able to.

  In addition, since the glass plate can be adsorbed and fixed to the dummy plate, the glass plate can be held by the carrier via the dummy plate, and it is not necessary to make the carrier thinner than the glass plate as in the prior art. Therefore, it is not necessary to reduce the polishing speed of the polishing machine in order to prevent the glass plate from being detached from the thinned carrier as in the prior art, and the glass thin plate can be produced without reducing the production efficiency.

  Further, according to the method for manufacturing a glass thin plate according to the present invention, a pair of glass plates adsorbed and fixed on both surfaces of the dummy plate can be polished simultaneously, so that two glass thin plates can be manufactured at the same time. The production efficiency of the thin plate can be greatly improved.

  Also, in the attachment process of adsorbing the glass plate to the dummy plate, if the drying process is performed after wetting the adsorption pad with water and bonding the glass plate together, the moisture at the peripheral edge of the adsorption pad is evaporated and adsorbed By removing the moisture between the pad surface and the glass surface at the peripheral edge of the pad, the adsorption force due to the intermolecular force between the pad surface and the glass plate can be increased. It can be surely prevented. In addition, if this drying step is performed by natural drying, the suction pad and the glass plate can be dried with almost no thermal stress, and the glass plate can be more securely fixed to the suction pad.

It is a schematic side view explaining the preparation process and attachment process in the manufacturing method of the glass thin plate of this embodiment. It is a partial cross section principal part side view explaining the grinding | polishing process in the manufacturing method of the glass thin plate of this embodiment. It is a principal part top view explaining the grinding | polishing process in the manufacturing method of the glass thin plate of this embodiment. It is a schematic side view explaining the removal process in the manufacturing method of the glass thin plate of this embodiment. It is a partial cross section principal part side view explaining the manufacturing method of the glass thin plate using the conventional double-side polisher.

  As shown in FIGS. 1 to 4, the glass thin plate manufacturing method of the present embodiment mainly has a preparation step for preparing the dummy plate 5 and the glass plates 6 to be polished are adsorbed to both surfaces of the dummy plate 5. A mounting step for attaching, a polishing step for polishing each one surface of the pair of glass plates 6 attached to the dummy plate 5, and a removal step for removing each glass plate 6 whose one surface has been polished from the dummy plate 5 to obtain a pair of glass thin plates 62. And is composed of.

  As shown in FIG. 1, the preparation step is performed by obtaining dummy plates 5 having predetermined flatness and parallelism by sticking suction pads 52 to both surfaces of the rigid substrate 51. In the present embodiment, the longitudinal 152 × width 152 × thickness 3.0 mm of the rigid substrate 51 made of crystallized glass having predetermined flatness and parallelism has a flatness and parallelism of 152 × vertical 152 × The dummy plate 5 is obtained by sticking a suction pad 52 made of a polyurethane foam resin having a width of 152 × thickness of 0.25 mm using a double-sided adhesive sheet (not shown). The suction pad 52 has a large number of dense micropores composed of closed cells and open cells on the pad surface 53, and the glass plate 6 can be sucked to the pad surface 53 as described below.

  As shown in FIG. 1, the attachment process is performed by adsorbing and fixing the glass plates 6 to the adsorption pads 52 on both the front and back surfaces of the dummy plate 5. In the present embodiment, the suction pad 52 of the dummy plate 5 is wetted with water, and the glass plate 6 having a length of 150 × width of 150 × thickness of 0.1 mm is bonded while being pressed with a predetermined load. Like to do. This drying step is performed by natural drying at room temperature for about 48 hours.

  As shown in FIGS. 2 and 3, the polishing process is performed by using a known double-side polishing machine. That is, a pair of glass plates 6 attached to the dummy plate 5 is held in a work holding hole 71 of a carrier 7 having a thickness of 2.8 mm and sandwiched between an upper surface plate 1 and a lower surface plate 2 of a double-side polishing machine, While supplying the slurry-like abrasive, the upper platen 1 and lower platen 2 and each glass plate 6 are moved relative to each other to polish one surface 61 on the surface plate side of each glass plate 6.

  The upper surface plate 1 and the lower surface plate 2 of the double-side polishing machine are driven and rotated in opposite directions, and a polishing pad (not shown) is attached to each of the opposing surfaces. As shown in FIG. 3, the double-side polishing machine includes a sun gear 81 that is driven and rotated in opposite directions, and an internal gear 82 that surrounds the sun gear 81, and the carrier 7 includes the sun gear 81 and the inner gear 82. It rotates with revolving around the sun gear 81 by meshing with the gear 82. As a result, the polishing pad attached to the upper surface plate 1 and the lower surface plate 2 and the one surface 61 of each glass plate 6 held by the carrier 7 move relative to each other, and the one surface 61 of each glass plate 6 is polished. The In this embodiment, each glass plate 6 is polished to a thickness of 20 μm by this polishing step.

  In the removal step, first, the pair of polished glass plates 6 are removed from the double-side polishing machine and the carrier 7 together with the dummy plate 5, and then each polished glass plate 6 is removed from the dummy plate 5 as shown in FIG. By doing. In this embodiment, each glass plate 6 is removed from the dummy plate 5 by applying a shower-like water flow. In this way, two thin glass plates 62 of 150 × 150 × 20 μm in thickness are manufactured at the same time.

  As described above, according to the glass thin plate manufacturing method of the present embodiment, the glass plate 6 to be polished can be adsorbed and fixed to the dummy plate 5 having a predetermined rigidity via the adsorption pad 52. Even if the power glass plate 6 is thin, the glass plate 6 is not deformed at the time of polishing, and the glass plate 6 can be polished based on the flatness of the dummy plate 5. It is possible to manufacture a glass thin plate 62 having the following.

  Moreover, since the glass plate 6 can be adsorbed and fixed to the dummy plate 5, the glass plate 6 can be held by the carrier 7 via the dummy plate 5, and the carrier 7 can be held more than the glass plate 6 as in the prior art. There is no need for thinning. Therefore, it is not necessary to reduce the polishing speed of the polishing machine in order to prevent the glass plate from being detached from the thinned carrier as in the prior art, and the glass thin plate can be produced without reducing the production efficiency.

  Moreover, according to the manufacturing method of the glass thin plate of this embodiment, since a pair of glass plate 6 adsorbed-fixed on both surfaces of the dummy plate 5 can be grind | polished simultaneously, the two glass thin plates 62 can be manufactured simultaneously. The production efficiency of the glass thin plate 62 can be greatly improved.

  Further, according to the method for producing a glass thin plate of the present embodiment, the glass plate 6 to be polished can be attached by water attachment with the suction pad 52 without using wax or the like, so that the wax or the like is conventionally used. There is no difficulty that the flatness and parallelism of the glass thin plate 62 are impaired due to variations in the thickness of the glass. Further, since no wax or the like is used, the glass thin plate 62 can be removed from the dummy plate 5 without using an organic solvent, and there is no possibility of harming the environment.

  Moreover, according to the manufacturing method of the glass thin plate of this embodiment, in the attachment process which adsorb | sucks the glass plate 6 to the dummy plate 5, after the adsorption pad 52 is wetted with water and the glass plate 6 is bonded together, a drying process is performed. As a result, the moisture between the periphery of the suction pad 52 is evaporated and the moisture between the pad surface 53 and the glass surface at the periphery of the suction pad 52 is removed, whereby the molecules of the pad surface 53 and the glass plate 6 are removed. It is possible to increase the adsorption force due to the interfacial force, and reliably prevent misalignment or peeling of the glass plate 6 during polishing. Moreover, since this drying step is performed by natural drying, the suction pad 52 and the glass plate 6 can be dried with little thermal stress, and the glass plate 6 can be more securely fixed to the suction pad 52. Can do.

  As mentioned above, although the manufacturing method of the glass thin plate of this embodiment was demonstrated, this invention can be implemented also in other embodiment.

  For example, in the above-described embodiment, the rigid substrate 51 of the dummy plate 5 is made of crystallized glass that is excellent in low thermal expansion, mechanical strength, and the like, but other materials such as synthetic resin materials may be employed. it can. Various design changes can be made as long as necessary rigidity, flatness, parallelism, and the like can be secured. Further, the suction pad 52 of the dummy plate 5 is not limited to the foamed polyurethane resin, and any other material can be adopted as long as necessary adsorbability, flatness, parallelism, etc. can be secured. .

  In addition, the present invention can be carried out in a mode in which various improvements, modifications and variations are added based on the knowledge of those skilled in the art without departing from the spirit of the present invention. It may be implemented in a form in which any invention specific matter is replaced with another technology within a range where the same action or effect occurs, or the invention specific matter configured integrally may be constituted by a plurality of members. In addition, the invention specific items constituted by a plurality of members may be implemented in an integrated configuration.

DESCRIPTION OF SYMBOLS 1 Upper surface plate 2 Lower surface plate 3 Carrier 31 Work holding hole 4 Glass plate 5 Dummy plate 51 Rigid substrate 52 Adsorption pad 6 Glass plate 61 One side 62 of a surface plate side Glass thin plate 7 Carrier 71 Work holding hole

Claims (3)

A work held in a work holding hole of a carrier is sandwiched between a pair of upper and lower upper and lower surface plates each having a polishing pad affixed to each other, and the upper surface plate and A method for producing a glass thin plate using a double-side polishing machine that polishes both the upper and lower surfaces of the work by relatively moving the lower platen and the work,
A preparation step of preparing a dummy plate formed by sticking suction pads to both sides of a rigid substrate;
An attachment step of attaching a pair of the glass plates to the dummy plate by adsorbing the glass plates to the suction pads on both sides of the dummy plate prepared by the preparation step;
The pair of glass plates attached to the dummy plate in the attaching step is held in the work holding hole of the carrier and sandwiched between the upper surface plate and the lower surface plate, and the upper surface plate and the lower surface plate A polishing step of relatively moving the glass plate and the pair of glass plates to polish one side of the surface plate side of each glass plate;
A removal step of removing a pair of glass plates polished on one side of the surface plate side by the polishing step from the dummy plate to obtain a pair of glass thin plates;
A method for producing a glass thin plate, comprising:   2. The glass thin plate according to claim 1, wherein in the attaching step, the suction pad of the dummy plate is wetted with water and bonded while pressing the glass plate with a predetermined load, and then a drying step is performed. Manufacturing method.   The method for producing a glass sheet according to claim 2, wherein the drying step is performed by natural drying.

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