JP2012030207A - Fluid mixer, fluid mixing and transporting channel, and fluid mixing method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a fluid mixer, a fluid mixing and transporting channel, and a fluid mixing method which can homogeneously mix a transported fluid containing a fluid having a physically different property by merely installing a plurality of cylindrical nozzles in a fluid transportation channel.SOLUTION: A plurality of cylindrical nozzles are installed in the inside of a fluid transportation pipe and cyclone currents are swirled in the mutually opposed directions by a front and a rear cylindrical nozzles of a plurality of the cylindrical nozzles to mix the fluids with physically different properties, make the transported fluids homogeneous, and transport the obtained homogeneous fluid.

Description

  The present invention relates to a fluid mixer, a fluid mixing / transporting path, and a fluid mixing method, and more specifically, transporting fluid containing physically different fluids is homogenized and transported by simply providing a plurality of cylindrical nozzles in the fluid transporting path. In particular, fluid mixing that can supply a stable source gas to a reaction furnace of a semiconductor manufacturing apparatus and can shorten a transportation path from the gas supply source to the reaction furnace. Related to the vessel.

In the semiconductor manufacturing technology, a source gas for ion implantation doping such as arsenic is diluted with arsine or hydrogen. In such a case, a gas mixer is used to dilute the raw material gas (Patent Document 1).
A liquid raw material, which is a process material of a semiconductor manufacturing apparatus such as a CVD apparatus, is vaporized and gasified by a vaporizer and sent to a reaction furnace such as a CVD apparatus. In the atomizer provided in the vaporizer, the raw material liquid of the organometallic material is atomized (misted) with a carrier gas, and the mist of a plurality of raw material liquids is cyclone mixed through the spiral groove to gasify the liquid raw material. (Patent Document 2).

  Further, in the field of semiconductor manufacturing, there is a gas transport path in which twisted members twisted in opposite directions are continuously arranged and mixed. Similar to this, apart from the field of semiconductors, there is known a multiphase fluid mixing apparatus that mixes fluids of different densities in a transport path through which fluids such as petroleum are mixed, homogenized and transported (Patent Document 3). ). In this method, a twisting plate that forms a turning circuit is provided inside the transport path, and a flow of a swirling fluid is generated by passing the twisting plate to mix and homogenize fluids having different densities.

Special table 2008-543563 JP 2003-268552 A JP 2001-162150 A

The thing shown by patent document 1 is mixing by simply joining two types of gas which are physically different in a pipe line by a T-shaped pipe. In this way, even if two types of gas are merged and mixed in a T-shaped tube, when gases of different qualities flow through the pipe, the gas flow in the transport pipe becomes a laminar flow. There is a problem that the mixed state tends to be different in concentration at the tube center side, and the material is not sufficient as a stable raw material gas to supply a stable raw material gas to a reaction furnace or the like.
In the method of mixing the mist of the raw material liquid and the carrier gas as in Patent Document 2, it is necessary to form a plurality of long spiral grooves in the transport pipe. Moreover, recently, a raw material gas for liquid raw materials of low vapor pressure materials (solid raw materials are dissolved and liquefied) with strict temperature control conditions such as high dielectric constant materials, low dielectric constant materials, low resistance materials, and ferroelectric materials. Is mixed with carrier gas and transported. Therefore, the gas mixing by the cyclone transport by the spiral groove is required to take a long spiral groove, and the mixed gas is likely to cause a temperature change on the wall surface of the spiral groove. Accordingly, there is a problem that the raw material is recondensed to generate flakes and particles.

Further, it is conceivable to use a gas mixed by a twisted plate or the like as in Patent Document 3 in the semiconductor manufacturing technology, but in the field of semiconductor technology, a twisted twisted member is continuously arranged and mixed. However, since the swirl flow (cyclone flow) generated by a twisted plate or the like inside the transport pipe does not become a strong swirl flow, to obtain sufficient homogeneous mixing, the distance of the transport pipe Must be lengthened. Therefore, it becomes difficult to shorten the transportation path from the gas supply source to the reaction furnace.
In the next-generation semiconductor manufacturing, in order to suppress the generation of flakes and particles due to recondensation of raw materials, and to supply a more stable raw material gas to the reactor, a transportation path from the gas supply source to the reactor This is one of the required items.
An object of the present invention is to solve such problems of the prior art, and homogenize transport fluid containing fluids of physically different qualities by simply providing a plurality of cylindrical nozzles in the fluid transport path. It is an object of the present invention to provide a fluid mixer and a fluid mixing transport path or fluid mixing method capable of mixing.
Another object of the present invention is to provide a fluid mixer capable of supplying a stable source gas to a reaction furnace of a semiconductor manufacturing apparatus and shortening a transport path from the gas supply source to the reaction furnace, and It is to provide a fluid mixing / transporting path or a fluid mixing method.

In order to achieve such an object, the fluid mixer and the fluid mixing / transporting path of the present invention are characterized by a fluid transporting pipe, an outer diameter and an opening fixed to the inside of the fluid transporting pipe and smaller than the inner diameter of the fluid transporting pipe. A blowout port through which a cylinder shaft is disposed along the tube axis direction of the fluid transport pipe, the head is closed, and a transport fluid containing physically different quality fluids is blown outward or inward. And a plurality of cylindrical nozzles formed on the side surface. A cyclone flow is generated when the transport fluid blown from the outlets of each of the plurality of cylindrical nozzles hits the circular inner wall surface of the fluid transport pipe from an oblique direction or by hitting the circular inner wall surface of the cylindrical nozzle from an oblique direction. The plurality of cylindrical nozzles are arranged at predetermined intervals, and the outlets of the front and rear cylindrical nozzles are arranged so that the rotation direction of the cyclone flow is opposite.
Further, the fluid mixing method of the present invention is characterized in that the transport fluid blown out from each of the plurality of cylindrical nozzles is applied to the circular inner wall surface of the fluid transport pipe from an oblique direction or obliquely applied to the circular inner wall surface of the cylindrical nozzle. The air outlets of the front and rear cylindrical nozzles are arranged so that the rotation direction of the cyclone flow of the transport fluid that generates a cyclone flow from the front and rear and the front and rear cylindrical nozzles is reversed.

Thus, in the present invention, a plurality of cylindrical nozzles are arranged inside the fluid transport pipe, and the cyclone flow is swung in the opposite direction by the cylindrical nozzles before and after the plurality of cylindrical nozzles. , Transporting fluids that are physically different in quality by homogenizing the transport fluid.
Accordingly, it is not necessary to provide a plurality of long spiral grooves or twisted twist members in the transport pipe, and a mixer that generates a strong cyclone flow in the fluid transport pipe can be easily formed with a short pipe length. . In addition, since the mixer can be made as a fluid transport pipe, the transport path from the gas supply source to the reactor can be shortened particularly in the field of semiconductor manufacturing.
As a result, it becomes possible to mix and homogenize and transport the transport fluid containing physically different quality fluids in the fluid transport line by simply providing a plurality of cylindrical nozzles in the fluid transport path. In a semiconductor manufacturing apparatus or the like, a stable source gas can be supplied to a reaction furnace, and a transport path from a gas supply source to the reaction furnace can be shortened.

FIG. 1A is an explanatory diagram of a pipe cross section of a gas mixing / transporting passage of an embodiment to which a fluid mixer using a plurality of cylindrical nozzles of the present invention is applied, and FIG. It is a cross-sectional explanatory drawing in the blower outlet position of each cylindrical nozzle. Fig.2 (a) is explanatory drawing about the cylindrical nozzle which produces | generates a cyclone flow, FIG.2 (b)-(d) is the front view of the cylindrical nozzle, a longitudinal cross-sectional view, and a cross-sectional view. FIG. 3A is a cross-sectional explanatory view of a gas mixing / transporting passage of another embodiment to which a fluid mixer using a plurality of cylindrical nozzles of the present invention is applied, and FIG. It is a cross-sectional explanatory drawing in the blower outlet position of each cylindrical nozzle. 4A to 4C are a front view, a longitudinal sectional view, and a transverse sectional view of the cylindrical nozzle. FIG. 5 is a cross-sectional view of a gas mixing / transporting passage of still another embodiment to which a fluid mixer using a plurality of cylindrical nozzles of the present invention is applied.

In FIG. 1 (a), 10 is a gas mixing transport line, and 1 is the gas mixer. The gas mixer 1 is disposed between the gas junction pipe 2 and the transport pipe 3. The gas junction pipe 2 receives, for example, the liquid source gas 4a and the dilution gas 4b and flows the combined gas to the gas mixer 1 as the mixed gas 4c. Alternatively, the gas merging pipe 2 is a merging pipe for a reaction gas composed of an inert gas such as the gasified or misted liquid source gas 4a and the carrier gas 4b, and the mixed gas is supplied to the semiconductor processing apparatus. It hits the transport pipe that flows as raw material gas.
The gas junction pipe 2 forms a T-shaped pipe line, and the liquid source gas 4a is supplied in the straight direction, and the dilution gas 4b or the carrier gas 4b is supplied from the right angle direction. Two systems of physically different qualities join together inside the intersecting T-junction, and these gases are sent to the gas mixer 1 through the gas junction pipe 2 as a mixed gas 4c.
Here, the inner diameters of the gas mixer 1, the gas merging pipe 2, and the transport pipe 3 are equal, and are about 20 mmφ to 30 mmφ.
Here, the physical quality is different from the case of different materials such as liquid source gas and dilution gas, liquid source gas and carrier gas, and liquid source gas that is completely vaporized from mist of the liquid source. This also includes the case where the mass, particle size, etc. are different.
The mixed gas 4c flowing from the gas merging pipe 2 to the transport pipe 3 is transported to the gas mixer 1 as a laminar flow although two gas lines are mixed in the gas merging pipe 2. However, the mixed gas 4 (hereinafter referred to as gas 4) flowing out to the transport pipe 3 through the gas mixer 1 is a cyclone flow (swirl flow). As a result, the mixed gas is homogenized, and the gas 4 is transported at a uniform temperature by the cyclone effect without any temperature difference between the tube center portion where the gas 4 flows and the tube peripheral portion.

The gas mixer 1 is provided between the gas junction pipe 2 and the transport pipe 3 by being welded to these at welding points S1 and S6.
The gas mixer 1 includes a pipe body 5 and three cylindrical nozzles 6, 7, 8 fixed inside the pipe body 5 at a predetermined interval. The outer diameter of each cylindrical nozzle 6, 7, 8 is smaller than the inner diameter of the tube body 5 and is about 10 mmφ to 15 mmφ.
The predetermined interval between the cylindrical nozzles 6, 7, and 8 can be arbitrarily selected as long as the flow of the gas 4 as the cyclone flow can be maintained up to the subsequent cylindrical nozzle. Conversely, even if it is close to the extent that the head and the bottom are in contact with each other, it may be sufficient if the distance at which the cyclone flow of the gas 4 in the previous stage is transmitted to the subsequent stage is maintained.
By the way, this gas mixer 1 is provided with edge flanges (edge projections) on both sides, and the same edge flange (edge projection) is provided on the gas junction pipe 2 and the transport pipe 3, and bolts are passed through the edge flanges. The gas mixer 1 may be provided between the transport pipe line composed of the gas junction pipe 2 and the transport pipe 3 by being pressed and fixed by coupling or the like.

The gas mixer 1 is configured by alternately connecting three cylindrical nozzle pipes 51 provided with a cylindrical nozzle and two connecting pipes 52 and joining them with welding lines S2 to S5. . A nozzle fixing disk 53 is welded and fixed to the cylindrical nozzle tube 51 in advance as a node for closing the tube. A hole 54 corresponding to the outer diameter of each of the cylindrical nozzles 6, 7, 8 is formed in the nozzle fixing disk 53 at a position eccentric from the center of the nozzle fixing disk 53 (see FIG. 1B). . Therefore, the pipe body 5 is constituted by a pipe of the cylindrical nozzle pipe 51 and two connection pipes 52.
The cylindrical nozzles 6, 7, 8 are respectively inserted into the respective holes 54 of the nozzle fixing disk 53 of the three cylindrical nozzle tubes 51 and fixed by welding. As a result, three cylindrical nozzle tubes 51 are formed, and each of these cylindrical nozzle tubes 51 is alternately arranged with two connecting tubes 52 interposed therebetween and welded.

The cylindrical nozzles 6, 7 and 8 are respectively provided with outlets 6a, 7a and 8a on their side surfaces. The heads 6b, 7b, 8b of the respective cylindrical nozzles 6, 7, 8 are formed in a hemispherical shape and are closed.
In Fig.1 (a), the blower outlets 6a and 8a are shown as the continuous line, and the blower outlet 7a is shown as the dotted line. As shown in FIG. 1B, the cylindrical nozzle 6 and the cylindrical nozzle 8 have a cylindrical nozzle tube 51 and a cylindrical nozzle in which the outlets 6a and 8a are located at the same position and the cylindrical nozzle 6 is provided. The cylindrical nozzle tube 51 provided with 8 has the same structure. On the other hand, as shown in FIG.1 (b), the position of the blower outlet 7a of the cylindrical nozzle 7 exists in a different position so that it may be arrange | positioned in the opposite direction mutually with respect to the blower outlets 6a and 8a.
That is, the air outlets 6a and 8a indicated by solid lines are directed to the drawing front side, and the positions of the air outlets 7a indicated by dotted lines are directed to the rear surface side of the drawing and the blowing direction of the gas 4 is different.
In FIG. 1A, for convenience of explanation, the cylindrical nozzle 6 is a partial sectional view, but the cylindrical nozzles 7 and 8 are not sectional views.
Each outlet 6a, 7a, 8a is a long hole having a short diameter (shortest diameter) of 3 mmφ and a long diameter (longest diameter) of about 10 mmφ.

As shown in FIG. 1B, the cylinder axes (centers of the cylinders) of the cylindrical nozzles 6 to 8 are arranged at positions that are eccentric with respect to the center of the pipe body 5 of the cylindrical nozzle pipe 51.
The structure of this cylindrical nozzle will be described with reference to FIGS. 2A to 2D, taking the cylindrical nozzle 6 as an example. 2A is an explanatory diagram of a cylindrical nozzle that generates a cyclone flow, and FIGS. 2B to 2D are a front view, a longitudinal sectional view, and a transverse sectional view of the cylindrical nozzle. . For convenience of explanation, only the cylindrical nozzle 6 is shown in FIG. 2A, and the cylindrical nozzles 7 and 8 are omitted.
As shown in FIG. 2B, the cylindrical nozzle 6 protrudes along the axial direction of the tube body 5 of the cylindrical nozzle tube 51 in the transport direction of the gas 4 from the disk member 61 and the disk member 61. The nozzle portion 62 has a hemispherically closed head.
The nozzle part 62 is provided with a blower outlet 6a on a side surface, and the blowout flow is ejected in the lateral direction (not in the cylinder axis direction of the nozzle part 62 but in a direction substantially perpendicular to this). The opening at the bottom of the nozzle portion 62 communicates with the opening of the disk member 61, and the bottom of the cylindrical nozzle 6 is an opening 63 that receives the gas 4 c.

As shown in FIGS. 2A, 2 </ b> C, and 2 </ b> D, the position of the cylindrical axis of the cylindrical nozzle 6 is such that the outlet 6 a is close to the circular inner wall surface 53 of the cylindrical nozzle tube 51. Is offset by a predetermined amount (= Δd, see FIG. 2D) from the position of the tube axis of the cylindrical nozzle tube 51 (the center line O) toward the circular inner wall surface 51b.
As a result, the air outlet 6a provided on the side surface of each cylindrical nozzle 6 is located in the vicinity of the circular inner wall surface 51b at the gas outlet position as shown in FIG. It arrange | positions so that it may respond | correspond to the circular inner wall surface 51b corresponding to the blowing position.
As a result, since the gas 4 is blown out along the circular inner wall surface 51b from the lateral direction of the cylindrical nozzle 6 (substantially perpendicular to the tube axis of the transport pipeline), the generated cyclone flow of the gas 4 is generated. Has a short waveform space period and a strong cyclone flow. The strength of the cyclone flow is related to the flow velocity of the gas 4, the outlet 6a, and the opening diameter, but the outlet 6a is smaller than the opening 63, and the gas 4 is injected by being throttled by a cylinder. By doing so, it becomes stronger than a spiral groove or a twisted twisted member.
The above is the same for each of the outlets 7a and 8a of the cylindrical nozzles 7 and 8 so that the gas 4 to be blown strikes the circular inner wall surface 51b of the cylindrical nozzle tube 51 from an oblique direction to form a cyclone flow. An oval shape is perforated on the side surface of the cylindrical nozzle 6. Each of the air outlets 6a to 8a may be oval.

Moreover, as shown in FIG.2 (c), the flow which is going to reversely flow out of the flow of the gas 4 which flowed out by offsetting a blower outlet to the circular inner wall surface 51b side, and the outer wall surface of a cylindrical nozzle, and a circular inner wall surface It flows in between 51b. As a result, the pressure in this region rises, and the pressure in the wider space where the blow-out flow that does not flow backward flows is lower. The circular inner wall surface 51b bends along the circular inner wall surface 51b in the tangential direction.
In particular, as shown in FIG. 2D, the flow of the gas blown out by tilting the blow outlet by θ with respect to the tangent line T is easy to follow along the circular inner wall surface 51b, and the cyclone flow is easily generated. As a result, the inclination of the blown flow with respect to the tangent T at the position where the blown flow hits the circular inner wall surface 51b of the cylindrical nozzle tube 51 is reduced, and a cyclone flow is generated simply by hitting the circular inner wall 51b obliquely. The cyclone flow can be generated more efficiently than the case.
Of course, the offset may be such that the outer wall surface of each of the cylindrical nozzles 6 to 8 contacts the circular inner wall surface 51b of the cylindrical nozzle tube 51.

FIG. 1B is a cross-sectional explanatory diagram of the three cylindrical nozzles 6, 7 and 8 at the outlet positions. The air outlets 6a and 8a of the cylindrical nozzle 6, the cylindrical nozzle 8, and the air outlet 7a of the cylindrical nozzle 7 are arranged symmetrically across the vertical center line Ov. Therefore, these directions of blowing out the gas 4 are reversed, and strike the diagonal inner wall surface of the cylindrical nozzle tube 51 from an oblique direction. The former is counterclockwise when viewed from the gas traveling side, and the latter is clockwise. Become.
Returning to FIG. 1 (a), this cyclone flow will be described. As shown in FIG. 1 (b), the gas 4 blown out from the blowout port 6a of the cylindrical nozzle 6 has a vertical center line Ov. Since it is located on the left side, a cyclone flow that strikes the circular inner wall surface 51b of the cylindrical nozzle tube 51 obliquely on the left side of the tube inner wall surface and moves along the circular inner wall surface 51b and turns counterclockwise. The gas 4 that has become the cyclone flow passes through the connection pipe 52 and reaches the next cylindrical nozzle 7. In the cylindrical nozzle 7, as shown in FIG.1 (b), since the blower outlet 7a is located in the pipe inner wall surface right side symmetrical with the blower outlet 6a with respect to the longitudinal centerline Ov, it became a cyclone flow. The gas 4 strikes the circular inner wall surface 51b of the cylindrical nozzle tube 51 obliquely on the right side of the tube inner wall surface, moves along the circular inner wall surface 51b, and becomes a cyclone flow rotating in the clockwise direction contrary to the above.

Further, in the cylindrical nozzle 8, as shown in FIG. 1 (b), since the outlet 8a is located on the left side of the inner wall surface of the pipe, like the outlet 6a, the circular inner wall surface of the cylindrical nozzle pipe 51 on the left side of the inner wall surface of the pipe. Since it moves along the circular inner wall surface 51b by hitting 51b obliquely, the gas 4 that has become a cyclone flow swirls clockwise as opposed to the case of the cylindrical nozzle 7 described above.
Thereby, the relationship between the front and rear outlets 6a and 7a of the cylindrical nozzles 6 and 7 and the outlets 7a and 8a of the cylindrical nozzles 7 and 8 is arranged so that the rotational direction of the cyclone flow is reversed. Yes.
As a result, the gas 4 containing physically different gases is reversed twice in the flow direction, and is homogenized by the swirling of the reverse rotation. Moreover, the gas 4c flowing in the laminar flow through the gas merging pipe 2 flows through the gas mixer 1 as a cyclone flow from the blowout port 8a of the cylindrical nozzle to the transport pipe 3.

FIG. 3A is a cross-sectional explanatory view of a gas mixing / transporting passage of another embodiment to which a fluid mixer using a plurality of cylindrical nozzles of the present invention is applied, and FIG. It is a cross-sectional explanatory drawing in the blower outlet position of each cylindrical nozzle.
As shown in FIG. 3 (a), 11 is a gas mixer corresponding to the gas mixer 1 of FIG. 1 (a), but the cylindrical nozzles 12, 13, and 14 are respectively shown in FIG. 1 (a). Unlike the cylindrical nozzles 6, 7, and 8 shown, the pipe body 9 is fixed in the tube body 9 in the direction opposite to that of FIG. Moreover, in the cylindrical shape, the cylindrical length is short and has a cap shape, and the cylindrical shafts of the cylindrical nozzles 12, 13, 14 are connected to the axes of the gas merging pipe 2 and the transport pipe 3. It is arranged in the center so as to coincide with the axis of the tube body 9 without being offset so as to coincide.
The reason is that a fluid is blown from the outside to the inside of the cylindrical nozzle and is applied obliquely to a circular inner wall surface inside the cylindrical nozzle to generate a cyclone flow.

The cylindrical nozzle tube 91 in FIG. 3A corresponds to the cylindrical nozzle tube 51 in FIG. 1A, but is a tube in which a cylindrical nozzle is integrally formed at the tip. Is different. Therefore, when the cylindrical nozzle side of the cylindrical nozzle tube 91 is a head, the head side and the tube end portion of the cylindrical nozzle tube 91 on the rear side of the head are connected to the connecting tube 92. The gas mixer 11 including the cylindrical nozzles 12, 13, and 14 is formed by welding and fixing the two cylindrical nozzle tubes 91 via the connection tube 92. In this case, the connecting pipe 92 can be omitted, and the pipe end on the rear side of the cylindrical nozzle pipe 91 in the previous stage can be directly connected to the head of the cylindrical nozzle pipe 91.
The connecting pipe 92 here corresponds to the connecting pipe 52 in FIG. Further, a connecting pipe 92 that is slightly longer than the other connecting pipes 92 is connected to the front end portion of the cylindrical nozzle pipe 91 having the cylindrical nozzle 22, and the respective pipes are connected at welding locations S7 to S13.

Unlike the cylindrical nozzles 6, 7, and 8 in FIG. 1A, the cylindrical nozzles 12, 13, and 14 are each provided with three blowing holes.
This will be described below with reference to FIG. 4 by taking the cylindrical nozzle 12 as an example. As shown in FIG. 4C, the side surface of the cylindrical nozzle 12 is provided with three outlet holes 12a, 12b, 12c. Yes.
As shown in the cross-sectional view of FIG. 4B, the air outlets 12 a, 12 b, and 12 c are connected in a tangential direction to a circular inner wall surface of the cylindrical nozzle 12 along a plane orthogonal to the cylindrical axis of the cylindrical nozzle 12. Thus, the three holes are perforated obliquely with respect to the outer peripheral side surface so as to be equidistant from the outer periphery of the cylindrical nozzle 12 on the outer peripheral side surface.
As shown in the example of the cylindrical nozzle 12 in FIG. 4C, the joining of each hole in the tangential direction is orthogonal to the cylinder axis of the cylindrical nozzle 12 when the inner diameter of the cylindrical nozzle 12 is 10 mmφ. The inclination angle θ is an inclination of about θ = 60 ° with respect to the normal N standing at the connection location in the plane.

As shown in FIG. 4A, the cylindrical nozzle 12 includes a cap-shaped nozzle portion 121 and a flange portion 122 serving as a collar portion of the cap. The flange portion 122 is a disk member corresponding to the disk member 61 of FIG. 2A, has a thickness of 1 mm, the tube inner diameter of the cylindrical nozzle tube 91 is 15 mmφ, and the tube thickness is 1 mm. Then, it becomes a disk with an outer diameter of 17 mmφ. The maximum outer diameter of the cylindrical nozzle 12 is 12.0 mmφ.
Each outlet 12a, 12b, 12c is formed in the height position of 2.5 mm-5 mm from the surface of the flange part 122. As shown in FIG. This is because the blowout flow of the gas 4 does not sufficiently hit the circular inner wall surface of the cylindrical nozzle 12 if the position of the blowout port is not separated from the surface of the flange portion 122 by more than double the hole diameter.

The outer diameter of the cylindrical nozzle 12 at a position where it is coupled to the flange portion 122 is larger than half the inner diameter of the cylindrical nozzle tube 91, and the cap-shaped head of the cylindrical nozzle 12 is closed in a hemispherical shape. Has been. The height is 12 mm, and the hole diameter of the air outlets 12a, 12b, 12c is, for example, 2.0 mmφ, which is selected from the range of 1.0 mmφ to 5 mmφ.
The inner diameter of the cylindrical nozzle tube 91 is larger than the outer diameter of the cylindrical nozzle 12, and the inner diameter of the cylindrical nozzle 12 may be equal to or smaller than the inner diameter of the cylindrical nozzle tube 91.
Although the cylindrical nozzles 13 and 14 have the same structure as described above, as shown in FIG. 3B, the air outlets 12a, 12b and 12c or the air outlets 14a, 14b and 14c and the air outlet 13a. , 13b, and 13c are symmetrically arranged with the holes centered on the center line Ov as in the symmetrical arrangement with the center line Ov on the vertical side in the embodiment of FIG.
That is, the air outlets 12a, 12b, and 12c of the cylindrical nozzle 12 and the air outlets 14a, 14b, and 14c of the cylindrical nozzle 14 are respectively located in the cylindrical nozzles 12 and 14 when viewed from the gas 4 traveling direction side. It is perforated obliquely with respect to the side wall surface so as to flow in the clockwise direction. On the other hand, the air outlets 13a, 13b, 13c of the cylindrical nozzle 13 are opposite in perforation direction, and the side wall surface so that the gas 4 flows into the cylindrical nozzle 13 in the counterclockwise direction. Are perforated obliquely in the opposite direction.
As a result, the gas 4 containing physically different gases is reversed twice in the flow direction as in the embodiment of FIG. 1, and is homogenized through this reversal of rotation.

FIG. 5 shows a position between the two cylindrical nozzles 16 having the same structure without arranging the positions of the blowing holes symmetrically with respect to the blowing holes of the cylindrical nozzles 6 and 8 as in the cylindrical nozzle 7 of FIG. One cylindrical nozzle 16a having a different perforation direction of the air outlet is arranged, and the direction of the middle cylindrical nozzle 16a among these three is opposite to the other cylindrical nozzles 16 with respect to the flow of the gas 4 (reverse direction). It is aimed at.
The gas mixer 15 is welded between the gas junction pipe 2 and the transport pipe 3 at welding points S14 and S19. The three cylindrical nozzle pipes 51a and the two connecting pipes 52a and 52b, each having the cylindrical nozzles 16 and 16a, are alternately connected and connected by welding lines S15 to S18. . The connecting pipe 52a is longer than the connecting pipe 52b.
The cylindrical axes of the two cylindrical nozzles 16 and one cylindrical nozzle 16a are not offset so as to coincide with the axes of the gas merging pipe 2 and the transport pipe 3, and the pipes of the cylindrical nozzle pipe 51a It is arranged in the center so as to coincide with the axis of the tube main body composed of the two connecting tubes 52a and 52b.
As shown in FIG. 1A, reference numeral 53 denotes a nozzle fixing disk of the cylindrical nozzle tube 51a, and reference numeral 54 denotes the cylindrical nozzle 16 provided on the fixed disk 53 or the cylindrical nozzle 16a. A hole corresponding to the outer diameter.

The gas mixer 15 is a gas mixer corresponding to the gas mixer 11 of FIG. 3A, but the two cylindrical nozzles 16 and the one cylindrical nozzle 16a are the gas of FIG. Similar to the cylindrical nozzle 6 of the mixer 11, it is a long cylindrical cylindrical nozzle. Out of these, the first and last cylindrical nozzles 16 have holes 17 a, 18 a, and 19 a that are vertically perforated along the cylinder axis of the cylindrical nozzle 16 on the cylinder side surface. These blowout holes 17a, 18a, and 19a are formed by vertically arranging three small holes similar to the blowout holes 12a in FIG. Although not visible in the figure, there are air outlets 17b, 18b, 19b and air outlets 17c, 18c, 19c which are perforated in the circumferential direction in the same manner as the air outlets 12b, 12c of the embodiment shown in FIG. Is not visible in the figure.
That is, the air outlets 17a, 18a, 19a to the air outlets 17c, 18c, 19c are connected to the circular inner wall surface of the cylindrical nozzle 16 in a tangential direction along a plane orthogonal to the cylindrical axis of the cylindrical nozzle 16. Three holes in the circumferential direction are provided in each of the outer peripheral side surfaces so as to be obliquely drilled with respect to the outer peripheral side surface so as to be equidistant from the outer periphery of the cylindrical nozzle 16.
As a result, the blowout holes 17a, 18a, 19a to the blowout openings 17c, 18c, 19c have the same relationship as that shown in the sectional view of the cylindrical nozzle 12 or the cylindrical nozzle 14 in FIG. In addition, the cylindrical nozzle 16 is provided with a total of nine outlet holes of 3 × 3.

The cylindrical nozzle 16a disposed between the beginning and the end of the gas mixer 15 is provided in the gas mixer 15 with the head direction reversed with respect to the cylindrical nozzle 16, and the blowout holes 20a, 21a, 22a are provided. Are vertically perforated on the cylinder side surface along the cylinder axis of the cylinder nozzle 16a. These blowout holes 20a, 21a, and 22a are formed by vertically arranging three small holes similar to the blowout holes 13a of FIG.
The perforation direction of the blowout holes 20a, 21a, and 22a is such that the direction of the hole shadow in the dotted line portion is the same as that of the cylindrical nozzle 16 as shown in FIG. Is the opposite. This is because the holes are drilled in the direction opposite to the blowout holes 17a, 18a, 19a in the tangential direction.
In the figure, since the head of the cylindrical nozzle 16a is inverted with respect to the front and rear cylindrical nozzles 16, the drilling directions along the tangent lines of the blowout holes 20a, 21a, and 22a are the same. The cyclone flow is blown to the outside of the cylinder at the cylindrical nozzle 16, and flows into the cylinder at the cylindrical nozzle 16a, so that the direction of the cyclone flow is reversed.
Although not visible in the figure, there are 20b, 21b, 22b drilled in the circumferential direction and the outlets 20c, 21c, 22c in the same manner as in the embodiment shown in FIG. A total of nine outlet holes are provided in 3 × 3.
Here, the gas 4 blown outward from the blowout ports of the front and rear cylindrical nozzles 16 becomes a cyclone flow rotating counterclockwise as seen from the gas traveling direction as shown in the figure. On the other hand, the direction of the middle cylindrical nozzle 16a is opposite to that of the front and rear cylindrical nozzles 16 and the outlet is opposite, so that the flow of the gas 4 flowing into this is opposite as shown in the figure. Direction. That is, a cyclone flow that rotates counterclockwise as viewed from the gas traveling direction is generated. As a result, the direction of the cyclone flow of the generated gas 4 is opposite to that of the front and rear cylindrical nozzles 16. As a result, the cyclone flow of the gas 4 is reversed every time it passes through the cylindrical nozzle. Done.
Of course, the direction of the middle cylindrical nozzle 16a may be arranged in the same direction as the cylindrical nozzle 16 without being reversed.

As described above, the number of outlets of each cylindrical nozzle in the embodiment may be one or more, and may be more than three.
In the embodiment, the gas mixer is provided with three cylindrical nozzles for generating a cyclone flow. However, the number of cylindrical nozzles may be plural, and three or more cylindrical nozzles may be provided. Of course it is good.
Furthermore, in the embodiment, an example is given in which two systems of gas are mixed as a gas mixer in the semiconductor manufacturing technology. However, the object of mixing of the present invention is not limited to gas, and is generally applicable to fluids including liquids. Of course you can. Therefore, the applied technical field is not limited to the semiconductor technical field.
In addition, the gas mixer in the embodiment is provided in the rear stage of the T-shaped gas junction pipe, but the gas mixer is in front of the mixer, or the inlet of a device such as a vaporizer or the like. Of course, it may be an output port or the like.

1, 11 ... Gas mixer, 2 ... Gas junction pipe, 3 ... Transport pipe,
4 ... gas, 5,9 ... tube body,
6, 7, 8, 12, 13, 14 ... cylindrical nozzle,
DESCRIPTION OF SYMBOLS 10 ... Gas mixing transport pipe, 51, 91 ... Cylindrical nozzle pipe, 52, 92 ... Connection pipe,
53 ... Nozzle fixing disk, 54 ... Hole, 61 ... Disk member,
62, 121 ... Nozzle part, 122 ... Flange part.

Claims (9)

A fluid transport pipe, an outer diameter smaller than the inner diameter of the fluid transport pipe fixed to the inside of the fluid transport pipe, and an open bottom, the cylinder axis of which is arranged along the tube axis direction of the fluid transport pipe; A plurality of cylindrical nozzles formed on the side surface of a blowout port for blowing out a transport fluid containing a fluid of a physically different quality with its head closed.
The transport fluid blown out from the outlets of each of the plurality of cylindrical nozzles hits the circular inner wall surface of the fluid transport pipe from an oblique direction, or hits the circular inner wall surface of the cylindrical nozzle from an oblique direction. The plurality of cylindrical nozzles are arranged at predetermined intervals, and the blowout ports of the front and rear cylindrical nozzles are arranged so that the rotation direction of the cyclone flow is reversed. Fluid mixer.   The cylinder axis of the cylindrical nozzle is offset by a predetermined amount toward the inner wall side of the fluid transport pipe with respect to the tube axis of the fluid transport pipe, and the transport fluid is the fluid transport pipe of the fluid transport pipe corresponding to the outlet position of the fluid. The fluid mixer according to claim 1, wherein the fluid mixer is blown in a direction transverse to the direction of the cylinder axis along the circumference of the circular inner wall surface.   The fluid of physically different quality is gas or mist, and all of the transport fluid flows into the bottom, and the predetermined amount of offset is caused by the outer wall surface of the cylindrical nozzle on the circular inner wall surface of the fluid transport pipe. The fluid mixer according to claim 2, wherein the fluid mixer is in contact.   A cylindrical axis of the cylindrical nozzle is disposed so as to coincide with a pipe axis of the fluid transport pipe, the outlet is perforated obliquely with respect to an outer wall side surface of the cylindrical nozzle, and the transport fluid is The fluid mixer according to claim 1, wherein the fluid mixer is blown in a direction transverse to the direction of the cylinder axis so as to follow a circumference of a circular inner wall surface of the cylindrical nozzle.   The said blower outlet is pierced so that it may connect to the circular inner wall face of the said cylindrical nozzle in a tangential direction along the surface orthogonal to the cylinder axis | shaft of the said cylindrical nozzle, and the plurality is provided. Fluid mixer.   The outer diameter of the cylindrical nozzle is larger than ½ of the inner diameter of the fluid transport pipe, the head of the cylindrical nozzle is closed in a hemispherical shape, and the cylindrical nozzle is short and flat. 6. The fluid mixer according to claim 5, wherein the fluid mixer has a hat shape.   The fluid mixer according to claim 1, wherein the plurality of cylindrical nozzles is three.   A fluid mixing and transporting path provided with the fluid mixer according to claim 1. A plurality of outlets are formed on the side surface of the transport fluid containing the physically different fluids flowing through the conduits of the fluid transport pipe and the head is closed, and the transport fluid flows into the bottom of the opening. A cylindrical nozzle is arranged at a predetermined interval inside the fluid transport pipe along the axial direction of the fluid transport pipe,
The transport fluid blown from each of the plurality of cylindrical nozzles is applied to the circular inner wall surface of the fluid transport pipe from an oblique direction or is applied to the circular inner wall surface of the cylindrical nozzle from an oblique direction to generate a cyclone flow and The fluid mixing method of arranging the positions of the outlets of the front and rear cylindrical nozzles so that the rotation direction of the cyclone flow of the transport fluid blown from the cylindrical nozzle is opposite.

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