JP2012021869A - Sensor element array and manufacturing method thereof - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a sensor element array having sensitivity in a plurality of directions at low cost.SOLUTION: A sensor element array comprises a first sensor element, a second sensor element, and a sheet substrate having the arranged first and second sensor elements. The sheet substrate has a slit with a broadened gap and includes a substrate surface at a position where the first sensor element is arranged, which is set at a crossing angle to a substrate surface at a position where the second sensor element is arranged.

Description

  The present invention relates to a sensor element array and a manufacturing method thereof.

  In a tactile sensor for a robot or the like, a triaxial force distribution sensor capable of detecting a surface distribution of a stress in a normal direction of a surface and a stress in two directions parallel to the surface (so-called shear stress) is required.

  In Patent Document 1 below, a large number of cantilevers having an external force detection function are arranged in the film-like elastic body so that the deformation directions of the cantilevers are different from each other, thereby detecting the deformation of the film-like elastic body. It is described to do.

JP 2007-218906 A

  However, in order to arrange a large number of cantilevers as in Patent Document 1, there is a problem that the manufacturing cost is high because handling is difficult and a large number of wirings are required.

  The present invention has been made in view of the above technical problems. Some aspects of the present invention relate to inexpensively providing sensor element arrays that are sensitive in multiple directions.

In some aspects of the present invention, the sensor element array includes a first sensor element and a second sensor element, and a sheet substrate on which the first sensor element and the second sensor element are disposed, A notch is formed in the sheet substrate, and a gap between the notches is widened, and the substrate surface at the position where the first sensor element is arranged in the sheet substrate and the second sensor element are arranged. The substrate surface at the location is formed at an intersecting angle.
According to this aspect, the notch gap formed in the sheet substrate is widened, and the substrate surface at the position where the first sensor element is arranged in the sheet substrate and the second sensor element are arranged. Since the substrate surface at the location is formed at an intersecting angle, the manufacturing cost of the sensor element array having sensitivity in a plurality of directions can be reduced.

In the above-described aspect, it is desirable that the sheet substrate is a flexible substrate.
According to this, the sensor element array can be attached to a curved surface such as a body surface of the robot.

In the above-described aspect, it is desirable to further include an elastic layer that covers at least one surface of the sheet substrate.
According to this, if the external force applied to the sensor element is removed, the distortion is also released by the elastic force, so that the removal of the external force can be detected.

In the above-described aspect, the notch formed in the sheet substrate includes a first notch and a second notch, and the first sensor element includes the first sheet bending line and the first notch formed in the sheet substrate. The second sensor element is disposed at a position surrounded by the second sheet bend line formed on the sheet substrate and the second notch, and the first sheet bending is disposed. It is desirable that the line and the second sheet bending line are formed at an intersecting angle, and the sheet substrate is bent at each of them.
According to this, since the sheet substrate on which the sensor element and the cut are formed may be bent by the sheet bending line, the manufacturing cost of the sensor element array having sensitivity in a plurality of directions can be reduced.

In the above-described aspect, the end of the sheet substrate is separated in a direction intersecting the cutting direction, and the substrate surface at the position where the first sensor element is arranged in the sheet substrate, and the second sensor It is desirable that the substrate surface at the place where the element is arranged is formed at an intersecting angle.
According to this, by separating the end portion of the sheet substrate in a direction intersecting with the direction of the cut, the substrate surface at the position where the first sensor element is disposed in the sheet substrate, and the second sensor element Is formed at an angle that intersects the substrate surface at the location where the is disposed, the manufacturing cost of the sensor element array having sensitivity in a plurality of directions can be reduced.

In the above-described aspect, the first sensor element or the second sensor element may be a strain sensor configured by a conductor layer patterned on a sheet substrate.
The sheet substrate may be a polymer film having piezoelectricity.
Further, the first sensor element or the second sensor element may be an optical sensor.

In some embodiments of the present invention, a method for manufacturing a sensor element array includes a step (a) of arranging a first sensor element and a second sensor element on a sheet substrate and a step before or after the step (a). A step (b) for forming a cut in the sheet substrate between (a) and a step (c), and a substrate at a position where the first sensor element is arranged in the sheet substrate by widening the gap of the cut. Forming a surface and a substrate surface at a location where the second sensor element is disposed at an intersecting angle (c);
It comprises.
According to this aspect, the manufacturing cost of the sensor element array having sensitivity in a plurality of directions can be reduced.

In the above aspect, the notch formed in the step (b) includes the first notch that surrounds the first sensor element placement location together with the first sheet bending line, and the second sensor element placement location as the second notch. A second notch that surrounds the sheet bend line, wherein the first sheet bend line and the second sheet bend line are formed at an intersecting angle, and in step (c), the first and second sheets It is desirable to bend the sheet substrate at the bend line.
According to this, since the sheet substrate on which the sensor element and the cut are formed may be bent by the sheet bending line, the manufacturing cost of the sensor element array having sensitivity in a plurality of directions can be reduced.

In the above-described aspect, in step (c), the end of the sheet substrate is pulled away in a direction intersecting the cut direction, and the substrate surface of the sheet substrate where the first sensor element is disposed; It is desirable to form the substrate surface at the place where the second sensor element is disposed at an intersecting angle.
According to this, by separating the end portion of the sheet substrate in a direction intersecting with the direction of the cut, the substrate surface at the position where the first sensor element is disposed in the sheet substrate, and the second sensor element Is formed at an angle that intersects the substrate surface at the location where the is disposed, the manufacturing cost of the sensor element array having sensitivity in a plurality of directions can be reduced.

In the above-described aspect, the cut formed in step (b) includes a first cut and a second cut parallel to the first cut, and the ends of the first and second cuts are: It is desirable to be in a position shifted from each other in the direction of these cuts.
According to this, by separating both ends of the sheet substrate in parallel, the substrate surface at the position where the first sensor element is disposed in the sheet substrate, and the substrate surface at the position where the second sensor element is disposed, However, the manufacturing cost of the sensor element array having sensitivity in a plurality of directions can be reduced.

The perspective view of the sensor element array which concerns on the 1st Embodiment of this invention FIG. 1 is an enlarged plan view of a surrounding line A in FIG. The perspective view of the sensor element array which concerns on the 2nd Embodiment of this invention. The perspective view which shows the basic composition of the sensor element array which concerns on 2nd Embodiment. The perspective view which shows the basic composition of the 1st modification in 2nd Embodiment. The top view which shows the basic composition of the 2nd modification in 2nd Embodiment.

  Hereinafter, embodiments of the present invention will be described in detail. In addition, this embodiment demonstrated below does not unduly limit the content of this invention described in the claim. Further, not all of the configurations described in the present embodiment are essential as a solution means of the present invention. The same constituent elements are denoted by the same reference numerals, and description thereof is omitted.

<1. First Embodiment>
FIG. 1 is a perspective view of a sensor element array according to the first embodiment of the present invention. FIG. 1 (A) shows a state before widening the notch gap in the sheet substrate 10 constituting the sensor element array, and FIG. 1 (B) shows the state on both surfaces of the sheet substrate 10 after widening the notch gap. The state which formed the elastic body layers 11 and 12 is shown.
The sensor element array 1 shown in FIG. 1B includes, in addition to the sheet substrate 10, elastic layers 11 and 12 formed on both surfaces of the sheet substrate, and first to third sensor elements 13a to 13c. is doing.

  The sheet substrate 10 is formed with U-shaped cuts 14a to 14c, and one sensor element 13a to 13c is disposed inside each of the cuts 14a to 14c. The inner portions of the cuts 14a and 14c are bent at the sheet bending lines 15a and 15c, respectively, so that the gaps between the cuts 14a and 14c are widened. The sensor elements 13a and 13c are disposed in regions surrounded by the cuts 14a and 14c and the sheet bending lines 15a and 15c, respectively. Note that the inner portion of the cut 14b is not bent.

  The sheet bending lines 15 a and 15 c are formed at angles that intersect each other on the sheet substrate 10. Accordingly, the substrate surfaces in the inner portions of the cuts 14a and 14c bent by the sheet bending lines 15a and 15c are formed at angles that intersect each other. Moreover, the board | substrate surface in the inner part of the notches 14a and 14c is formed in the angle which also intersects with the substrate surface in the inner part of the notches 14b.

In order to manufacture the sensor element array 1 according to the first embodiment, for example, as shown in FIG. 1A, sensor elements 13a to 13c are arranged on a sheet substrate 10 such as polyimide and connected to the sensor elements. The wiring to be formed is formed.
Next, cuts 14a to 14c are formed around the sensor element. The cuts 14a to 14c can be formed by a method such as punching.
Next, as shown in FIG. 1B, the inner portions of the cuts 14a and 14c are bent at sheet bending lines 15a and 15c, respectively.
After that, by forming elastic body layers 11 and 12 such as silicon rubber on both surfaces of the sheet substrate 10, the sensor elements 13 a to 13 c are embedded in the elastic body layers 11 and 12.

  2A is an enlarged plan view of the encircled line A in FIG. 1, and FIGS. 2B and 2C are cross-sectional views taken along the line BB in FIG. 2A and C- FIG. FIG. 2 shows an example in which strain sensors are formed as the sensor elements 13a to 13c.

As shown in FIG. 2A, the first sensor element 13a is obtained by connecting wiring portions 17 to both ends of a conductive portion 16 patterned on the sheet substrate 10. Both the conductive part 16 and the wiring part 17 can be made of a metal such as copper (Cu). As shown in FIGS. 2B and 2C, a cover film 18 such as polyimide may be formed on the conductive portion 16 and the wiring portion 17.
With this configuration, in the first sensor element 13a, the electrical resistance of the conductive portion 16 changes according to the strain generated in the inner portion of the cut 14a due to external force. Therefore, the first sensor element 13a can detect an external force in a predetermined direction.

Here, the case where the conductive portion 16 serving as the first sensor element 13a is patterned on the sheet substrate 10 has been described. However, the sheet substrate 10 is formed of a ferroelectric polymer film or the like, and an inner portion of the cut 14a. By forming electrodes on the both surfaces of the substrate, a voltage generated by the piezoelectric effect may be detected according to the strain of the ferroelectric polymer. Further, an arbitrary sensor element may be attached to the sheet substrate 10.
Although the first sensor element 13a has been described here, the same applies to the second and third sensor elements 13b and 13c. In the first embodiment, since the first to third sensor elements 13a to 13c are oriented in different directions, a plurality of sensor element arrays are used as tactile sensors or three-axis force distribution sensors used in a robot or the like. The surface distribution of the external force in the direction can be detected.
Moreover, although the case where notches are formed after the sensor elements 13 a to 13 c are arranged on the sheet substrate 10 has been described here, the sensor elements 13 a to 13 c may be arranged after the notches are formed in the sheet substrate 10.

According to the first embodiment, since the sheet substrate 10 is a flexible substrate such as polyimide, the sensor element can be easily arranged along a curved surface such as a body surface of the robot.
In the first embodiment, the sensor element is embedded by covering at least one surface of the sheet substrate 10 with the elastic layers 11 and 12. Accordingly, the sensor element that detects the strain due to the external force can also detect the removal of the external force because the strain is also released by the elastic force if the external force is removed.

  Here, an example in which strain sensors are formed as the sensor elements 13a to 13c has been shown. However, by forming a sensor element having sensitivity in a predetermined direction, for example, an optical sensor, on a sheet substrate, the surface of light in a plurality of directions. The distribution may be detected.

<2. Second Embodiment>
3A and 3B are perspective views of the sensor element array according to the second embodiment of the present invention, in which FIG. 3A shows a state before widening the notch gap, and FIG. It shows the state after widening the gap. FIG. 3 shows only the sheet substrate 20. Since the elastic layer and the sensor element are the same as those described in the first embodiment, illustration is omitted.

  As shown in FIG. 3 (A), the flexible sheet substrate 20 made of polyimide or the like has first to fourth cuts 24a to 24d and many other cuts, but the sheet substrate 20 is cut into a plurality of cuts. They are connected together without any problems. As shown in FIG. 3B, when the end portions 20a to 20h of the sheet substrate 20 are pulled outward (in the direction of the arrow in FIG. 3A), the gaps such as the cuts 24a to 24d are widened. As a result, the orientation of a part of the substrate surface of the sheet substrate 20 changes.

For example, the orientation of the substrate surface in the region X around the second notch 24b of the sheet substrate rotates around an axis along the first notch 24a.
Further, the orientation of the substrate surface in the region Y around the fourth cut 24d rotates around an axis along the third cut 24c.
Further, the orientation of the substrate surface in the region Z between the first cut 24a and the third cut 24c does not change much.

Thus, the substrate surfaces in these regions X, Y, and Z are formed at angles that intersect each other. Therefore, the sensor elements are arranged in advance in these regions X, Y, and Z, respectively, and the end of the sheet substrate 20 is pulled outward (in the direction of the arrow in FIG. Similar to the configuration, a sensor element array having sensitivity in a plurality of directions can be formed.
The notch may be formed after the sensor element is arranged on the sheet substrate 20, or the sensor element may be arranged after the notch is formed in the sheet substrate 20.

FIG. 4 is a perspective view showing a basic configuration of a sensor element array according to the second embodiment. FIG. 4 is an enlarged view of a portion indicated by a surrounding line IV in FIGS. 3 (A) and 3 (B).
As shown in FIG. 4A, the first cut 24a and the second cut 24b formed in the sheet substrate 20 are substantially parallel. The end portion 29a of the first cut 24a and the end portion 29b of the second cut 24b are located at positions shifted from each other in the direction of the cut.

  The both ends of the sheet substrate 20 in which such a cut is formed are separated in a direction parallel to the substrate surface of the sheet substrate 20 and intersecting the cut direction (the direction indicated by the arrow in FIG. 4A), When trying to widen the notch gap, the sheet substrate 20 is connected at the notch ends 29a and 29b, so the sheet substrate 20 tends to deform. Since the sheet substrate 20 is not easily deformed in a direction parallel to the substrate surface of the sheet substrate 20, the sheet substrate 20 has a region around the second notch 24b as shown in FIG. The substrate surface is bent while being rotated around the axis along the notch 24a.

As a result, the sheet substrate 20 has a region X in which the orientation of the substrate surface rotates about the axis along the first notch 24a and a region Z in which the orientation of the substrate surface does not change much.
By arbitrarily combining such basic configurations on the plane of the sheet substrate 20, a sensor element array having sensitivity in multiple directions can be configured.
In FIG. 3, since the substrate surface further includes a region Y that rotates around the axis along the third cut 24c, a sensor element array having sensitivity in multiple directions can be configured. .

  Further, according to the second embodiment, the sensor element can be arranged in a wider range than the original state shown in FIG. 3A, and the sheet substrate can have excellent stretchability. .

<2-1. First Modification>
FIG. 5 is a perspective view showing a basic configuration of a first modification of the second embodiment. In FIG. 4 described above, the end 29b of the second cut 24b connects the sheet substrate 20 at both ends of the second cut 24b, whereas in the first modification shown in FIG. The end portions 29e and 29f of the second cuts 24e and 24f connect the sheet substrate 20 only at one end of each of the first and second cuts 24e and 24f.

  As shown in FIG. 5A, the first cut 24e and the second cut 24f formed in the sheet substrate 20 are substantially parallel. The end portion 29e of the first notch 24e and the end portion 29f of the second notch 24f are in positions shifted from each other in the direction of these notches.

  The both ends of the sheet substrate 20 in which such a notch is formed are separated in a direction parallel to the substrate surface of the sheet substrate 20 and intersecting the direction of the notch (the direction indicated by the arrow in FIG. 5A), When trying to widen the notch gap, the sheet substrate 20 is connected at the notch end portions 29e and 29f, so the sheet substrate 20 tends to be deformed. Since the sheet substrate 20 is not easily deformed in a direction parallel to the substrate surface of the sheet substrate 20, the sheet substrate 20 has a first region between the notches 24e and 24f as shown in FIG. The substrate surface is bent while rotating around the axis along the notch 24e.

As a result, the sheet substrate 20 has a region X in which the orientation of the substrate surface rotates around the axis along the first cut 24e and a region Z in which the orientation of the substrate surface does not change much.
By arbitrarily combining such basic configurations on the plane of the sheet substrate 20, a sensor element array having sensitivity in multiple directions can be configured.

<2-2. Second Modification>
FIG. 6 is a perspective view showing a basic configuration of a second modification of the second embodiment. In FIGS. 4 and 5 described above, the first and second cuts are substantially parallel to each other, whereas in the basic configuration of the second modification shown in FIG. 6, only one cut 24g is provided. Have.
As shown in FIG. 6A, the sheet substrate 20 is connected at an end 29g of the cut 24g.

  An attempt is made to separate both ends of the sheet substrate 20 in which such a cut is formed in a direction parallel to the substrate surface of the sheet substrate 20 and intersecting the cut direction (the direction indicated by the arrow in FIG. 6A). Then, the notch gap tends to spread in a fan shape centering on the end 29g. Since the sheet substrate 20 is not easily deformed in a direction parallel to the substrate surface of the sheet substrate 20, the sheet substrate 20 bends the substrate surface near the notch end portion 29g as shown in FIG. 6B. become.

  By arbitrarily combining such basic configurations on the plane of the sheet substrate 20, a sensor element array having sensitivity in multiple directions can be configured.

DESCRIPTION OF SYMBOLS 1 ... Sensor element array, 10 ... Sheet substrate, 11, 12 ... Elastic body layer, 13a-13c ... Sensor element, 14a-14c ... Notch, 15a-15c ... Sheet bending line, 16 ... Conductive part, 17 ... Wiring part, 18 ... cover film, 20 ... sheet substrate, 20a-20h ... end of sheet substrate, 24a-24g ... notch, 29a-29g ... end of notch

Claims (12)

A first sensor element and a second sensor element;
A sheet substrate on which the first sensor element and the second sensor element are disposed;
Comprising
A notch is formed in the sheet substrate, a gap between the notches is widened, and a substrate surface at a position where the first sensor element is arranged in the sheet substrate, and the second sensor element A sensor element array formed at an angle at which the substrate surface at the location where the is disposed intersects. In claim 1,
A sensor element array, wherein the sheet substrate is a flexible substrate. In claim 1 or 2,
A sensor element array further comprising an elastic layer covering at least one surface of the sheet substrate. In any one of Claims 1 thru | or 3,
The cut formed in the sheet substrate includes a first cut and a second cut,
The first sensor element is disposed at a position surrounded by a first sheet bending line formed on the sheet substrate and the first cut.
The second sensor element is disposed at a position surrounded by a second sheet bending line formed on the sheet substrate and the second cut.
The sensor element array in which the first sheet bend line and the second sheet bend line are formed at intersecting angles, and the sheet substrate is bent at each. In any one of Claims 1 thru | or 3,
An end portion of the sheet substrate is separated in a direction intersecting with the direction of the notch, and a substrate surface at a position where the first sensor element is arranged in the sheet substrate, and the second sensor A sensor element array in which the substrate surface at a position where the elements are arranged is formed at an intersecting angle. In any one of Claims 1 thru | or 5,
The first sensor element or the second sensor element is a sensor element array that is a strain sensor configured by a conductive layer patterned on the sheet substrate. In any one of Claims 1 thru | or 5,
The sensor element array, wherein the sheet substrate is a polymer film having piezoelectricity. In any one of Claims 1 thru | or 5,
The first sensor element or the second sensor element is a sensor element array that is an optical sensor. A step (a) of disposing a first sensor element and a second sensor element on a sheet substrate;
Before the step (a) or between the step (a) and the step (c), the step (b) of forming a cut in the sheet substrate;
An angle at which the gap between the notches is widened and intersects the substrate surface at the location where the first sensor element is disposed and the substrate surface at the location where the second sensor element is disposed in the sheet substrate. Forming the step (c);
A method for manufacturing a sensor element array comprising: In claim 9,
The notch formed in the step (b) includes a first notch surrounding the place where the first sensor element is arranged together with a first sheet bend line, and a place where the second sensor element is located is a second sheet bend line. A second notch surrounding with,
The first sheet bend line and the second sheet bend line are formed at an intersecting angle,
A method for manufacturing a sensor element array, wherein the sheet substrate is bent at the first and second sheet bending lines in the step (c). In claim 9,
In step (c), the end of the sheet substrate is pulled away in a direction intersecting the cut direction, and the substrate surface of the sheet substrate where the first sensor element is disposed; A method for manufacturing a sensor element array, wherein a substrate surface at a location where a second sensor element is disposed is formed at an intersecting angle. In claim 11,
The notch formed in step (b) includes a first notch and a second notch parallel to the first notch,
The method for manufacturing a sensor element array, wherein the ends of the first and second cuts are shifted from each other in the cut direction.

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