JP2012018868A - Organic el device, manufacturing method of organic el device, and electronic equipment - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a manufacturing method of an organic EL device for solving the problem that deterioration of display quality arises in some cases, for example, due to occurrence of spots because a thickness of an overlapping double-layered color filter is substantially a sum of thicknesses of the two layers and causes a step bump and succeeding processing is performed in the state of containing the step bump, although the color filter can constitute a light shielding layer performing a light shielding function by laminating two layers of color filters since the color filters cut off light other than light in predetermined wavelength regions.SOLUTION: A light shielding part 122 of the organic EL device is configured so that a blue color filter 105 has a reverse taper shape, a red color filter 106 has a shape which is complementary to the reverse taper shape of the blue color filter 105, and thereby, it has an overlapping double-layered color filter. Thus, since a thickness of the overlapping region of the blue color filter 105 and red color filter 106 can be suppressed, the light shielding part 122 can be configured in the state of keeping the high display quality.

Description

  The present invention relates to an organic EL device, a method for manufacturing the organic EL device, and an electronic apparatus.

  A high-definition micro display that integrates organic EL elements with dimensions of 7 μm or less, for example, as a display element that is lightweight, thin, and does not require a backlight for head-mounted displays (HMD), electronic viewfinders (EVF), and mobile mini projectors There is a need for (organic EL devices).

  An organic EL element is an element that emits light by itself, and can be made thinner and lighter than a liquid crystal element that requires a backlight. In addition, as a feature of the self-light-emitting element, it is excellent in black reproduction, and a light color similar to the color of light emitted from the front is emitted for light emitted in an oblique direction. An organic EL device in which such elements are integrated has a portion superior in image quality to a liquid crystal device. In order to make the organic EL device correspond to a color image, Patent Document 1 discloses a configuration in which a color filter is overlaid on an emission surface of an organic EL element having a protective layer on a substrate body so as to correspond to a color image.

  And in order to suppress the color mixture by the light emitted in the diagonal direction with respect to the emission surface of each organic EL element, the black matrix which optically interrupts between each organic EL element is used. As the material constituting the black matrix, for example, chromium is used as a metal material. In this case, a method of obtaining a black matrix by forming a chromium film once and then etching using a photoresist as a mask is known.

  Further, a method of forming a black matrix by directly exposing and etching using a photoresist using a black resin as a photoresist is known (for example, see Patent Document 2 and Patent Document 3).

  A method of forming a black matrix by stacking two color filters is generally known. Since the color filter blocks light other than light in a predetermined wavelength range, the color mixture of light can be practically sufficiently suppressed by stacking two layers of color filters. In particular, when an organic EL element is used, light is emitted with high directivity in the normal direction of the emission surface of the organic EL element. Therefore, the method of stacking two layers of color filters emits light in an oblique direction. This is an effective method for reducing the color mixture of light caused by the above.

JP 2002-72905 A JP 2008-152182 A JP 2008-181909 A

However, when a metal material is used as a constituent material of the black matrix, the metal material generally requires a film forming process at a high temperature. For this reason, the organic EL element is damaged and is difficult to apply. In addition, when a metal material is used, it is necessary to separately etch the metal material using a photoresist. Therefore, there exists a subject that the number of manufacturing processes increases.
In addition, when black resin is used, black absorbs light. Therefore, when the black resin precursor is exposed as a black matrix precursor, exposure is performed on the substrate side and the exposed surface side of the black matrix precursor. The intensity of light used for the light takes different values due to light absorption. For this reason, when a black matrix is formed by developing after exposure, a cross-sectional shape correlated with the light intensity is formed, resulting in a defect.

  Further, in the technique of stacking two layers of color filters, the thickness of the region where the color filters overlap is approximately the sum of the thicknesses of the two layers, so that it protrudes from the periphery. The subsequent processes are performed in a state including this step. Therefore, the organic EL device formed using this process has a problem that display image quality is lowered, for example, spots occur. In particular, this problem has a great influence when a fine structure for increasing the pixel density is provided.

  SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following forms or application examples.

  Application Example 1 An organic EL device according to this application example includes a first organic EL element located on the first surface side of a substrate, a second organic EL element adjacent to the first organic EL element, A first color filter that covers the first organic EL element and has a reverse taper shape on at least a part of a side surface, and a reverse taper shape that covers the second organic EL element and that the first color filter includes. And a second color filter having a shape filling a gap between the region and the substrate and blocking light having a wavelength transmitted by the first color filter.

  According to this, since the region where the first color filter and the second color filter overlap becomes a region that blocks light, the light that the organic EL element emits in an oblique direction can be blocked. For this reason, it is possible to prevent color mixing due to the penetration of light into adjacent organic EL elements.

  Application Example 2 An organic EL device according to this application example includes a first organic EL element located on the first surface side of the substrate, a second organic EL element adjacent to the first organic EL element, A first color filter that covers the first organic EL element and that has a reverse tapered shape on at least a part of a side surface thereof, and is thicker than the first color filter that covers the second organic EL element, and And a second color filter that fits with the first color filter and blocks light having a wavelength that is transmitted through the first color filter.

  According to this, since the first color filter and the second color filter are fitted, particularly light emitted from the first organic EL element in an oblique direction is blocked. Therefore, it is possible to prevent color mixing due to the intrusion of light into adjacent organic EL elements.

  Application Example 3 In the organic EL device according to the application example described above, the second color filter is higher than the first color filter, and the second color filter is in a region protruding from the first color filter. The second color filter has a reverse taper shape in which the second color filter spreads in a direction away from the organic EL element in the thickness direction.

  According to the application example described above, since the first color filter and the second color filter can be formed under manufacturing conditions having an inversely tapered shape when the side surfaces are open, the cost and time required for process development can be reduced. It becomes possible to do.

  Application Example 4 In the organic EL device according to the application example described above, the first organic EL element emits light at a position having an optical path length aligned with light having a wavelength that is transmitted through the first color filter. A first transflective reflector that transmits a part of the second organic EL element, wherein the second organic EL element transmits light at a position having an optical path length aligned with light having a wavelength that is transmitted by the second color filter. A second transflective reflector that partially transmits light is provided.

  According to the application example described above, the first organic EL element relatively intensifies and emits light in the first wavelength range, and the second organic EL element relatively emits light in the second wavelength range. Reinforce and inject. Therefore, since the light component causing color mixing is reduced in advance, it is possible to suppress the occurrence of color mixing.

  Application Example 5 A manufacturing method of an organic EL device according to this application example includes a first organic EL element and a second organic EL element adjacent to the first organic EL element on the first surface side. A step of forming a substrate, a step of forming a first color filter having a reverse taper shape covering the first organic EL element, and a second color filter precursor on the first surface side of the substrate Applying a body and filling a side surface of the first color filter with the second color filter precursor.

  According to this, by filling the space between the reverse tapered region of the first color filter and the substrate, the first color filter and the second color filter overlap each other (shield light) while suppressing the thickness. It becomes possible to provide the manufacturing method for obtaining.

  [Application Example 6] A method of manufacturing an organic EL device according to the application example described above, wherein the side surface of the second color filter precursor is opened after the step of filling with the second color filter precursor. And a step of processing the region that is formed into a reverse taper shape.

  According to the application example described above, since both the first color filter and the second color filter can be formed under manufacturing conditions having an inversely tapered shape, it is possible to reduce costs and time for process development.

  [Application Example 7] A method of manufacturing an organic EL device according to the application example, wherein the second color filter is formed after the step of filling with the second color filter precursor or the step of processing into a reverse taper shape. And a step of heating the precursor at a temperature of 100 ° C. or higher and 120 ° C. or lower for a time of 30 minutes or longer and 150 minutes or shorter.

  According to the application example described above, it is possible to provide the first color filter and the second color filter that can withstand the manufacturing process while maintaining the inversely tapered shape.

  Application Example 8 In the method for manufacturing an organic EL device according to the application example, the thickness of the second color filter obtained by heating the second color filter precursor is larger than that of the first color filter. It is characterized by being thick.

  According to the application example described above, the second color filter covers at least a part of a region where the first color filter overlaps in plan view. Therefore, the light emitted in the oblique direction from the first organic EL element and the second organic EL element is shielded by the first color filter and the second color filter, so that the first color filter and It is possible to provide a manufacturing method that can prevent color mixing in which light is mixed with the second color filter.

  Application Example 9 An electronic apparatus according to this application example includes the organic EL device described in the application example.

  According to this, it is possible to provide an electronic device with little color mixing even when viewed obliquely.

  Application Example 10 An electronic apparatus according to this application example includes an organic EL device formed by using the method for manufacturing an organic EL device described in the application example.

  According to this, it is possible to provide an electronic device with little color mixing even when viewed obliquely.

(A) is a top view of an organic electroluminescent apparatus provided with the structure where the taper shape of the color filter overlapped, (b) is the sectional view on the A-A 'line of (a). (A) is a top view of an organic electroluminescent apparatus provided with the structure which color filters fitted, (b) is the sectional view on the A-A 'line of (a). (A)-(d) is process sectional drawing which shows the manufacturing method of an organic electroluminescent apparatus provided with the structure where the taper shape overlapped. (A)-(d) is process sectional drawing which shows the manufacturing method of an organic electroluminescent apparatus provided with the structure where the taper shape overlapped. (A)-(d) is process sectional drawing which shows the manufacturing method of an organic electroluminescent apparatus provided with the structure which color filters fitted. (A)-(f) is schematic which shows the example of the electronic device using an organic EL apparatus. (A) is a polymer material that emits red, (b) is a polymer material that emits green, and (c) is a structural formula of a polymer material that emits blue.

  Hereinafter, embodiments embodying the present invention will be described with reference to the drawings.

(First embodiment: Organic EL device having a configuration in which tapered shapes are overlapped)
FIG. 1A is a plan view of an organic EL device having a configuration in which tapered shapes are overlapped according to this application example, and FIG. 1B is a cross-sectional view taken along line AA ′ in FIG. The organic EL device 100 includes a substrate body 115, an element substrate 116 as a substrate, a pixel electrode 110 as a first electrode, a transparent conductor layer 120 as a conductor, a transparent conductor layer 121 as a conductor, and an organic functional layer 111 that emits light. , A common electrode 112 as a second electrode, a protective layer 113, a blue color filter 105, a red color filter 106, and a green color filter 107. The pixel electrode 110 is sandwiched vertically with the common electrode 112 from a TFT (TFT 131, 132, 133: see FIG. 3A) (not shown) through a metal support (metal support 136: see FIG. 3B). The organic functional layer 111 is electrically driven. The short side of the pixel electrode 110 has a length of 5 μm, for example.

In this specification, the blue color filter 105, the red color filter 106, and the green color filter 107 are also referred to as color filters. The word “upper” is used to indicate a direction from the substrate body 115 toward the common electrode 112. The word “down” is used to indicate the opposite direction to “up”.
The “first surface side” is the surface side of the element substrate 116 on which the pixel electrode 110 is formed.
The “side surface” is a surface surrounding the color filter in plan view.
Further, “horizontal” refers to a direction in which the organic EL elements 101, 102, 103 are adjacent to each other, that is, a direction in which organic EL elements of different colors are adjacent to each other.
In the present embodiment, the organic EL elements 101, 102, and 103 have a rectangular shape, but this is not intended to be particularly limited to a rectangular shape. For example, an elliptical shape, a circular shape, or a square shape is used. Also good. In addition, the organic EL elements 101, 102, and 103 constituting the organic EL device 100 are generally in the form of a square as a set. However, in the present embodiment, since the horizontal side mainly has structural features, it is horizontally long. It is described in. In addition, the gaps between the organic EL elements 101, 102, and 103 are illustrated with enlarged dimensions in order to improve visibility in FIGS.

The organic EL device 100 includes an organic EL element 101 as a first organic EL element adjacent in plan view, an organic EL element 102 as a second (first) organic EL element, and a second organic EL element. The organic EL element 103 is provided. The organic EL element 102 becomes the second organic EL element when the organic EL element 101 is selected as the combination partner, and becomes the first organic EL element when the organic EL element 103 is selected as the combination partner. .
Here, the organic EL elements 101, 102, and 103 are shown to include a substrate body 115 and a color filter. However, in this drawing, the visibility is lowered due to overlapping lines, so the positions are shifted. This is because the organic EL elements 101, 102, and 103 do not include the substrate body 115 and the color filter.

The positional relationship with the blue color filter 105, the red color filter 106, and the green color filter 107 may be changed in any order. For example, the positional relationship between the red color filter 106 and the blue color filter 105 may be interchanged. In this case, by replacing the organic EL elements 101, 102, and 103 together, it is possible to cope with the case where the characteristics of the organic EL elements 101, 102, and 103 are changed.
Here, as shown in FIGS. 1A and 1B, the description is continued for the case where the positional relationship of the blue color filter 105, the red color filter 106, and the green color filter 107 is used.

  In the case where the blue color filter 105 is regarded as the first color filter and the red color filter 106 is regarded as the second color filter, the red color filter 106 has a reverse taper shape of the blue color filter 105 in a region overlapping with the blue color filter 105. It has a shape to fill. This region where the blue color filter 105 and the red color filter 106 that blocks the blue wavelength light transmitted by the blue color filter 105 overlap functions as a light shielding unit 122 that blocks light. It is preferable that the light shielding portion 122 covers the gap between the pixel electrodes 110 so as to avoid color mixing and not reduce the light emission efficiency.

  In the case where the red color filter 106 is regarded as the first color filter and the green color filter 107 is regarded as the second color filter, the green color filter 106 has a reverse taper shape of the red color filter 106 in an area overlapping the red color filter 106. It has a shape to fill. This region where the red color filter 106 and the green color filter 107 that blocks light having a red wavelength transmitted through the red color filter 106 overlap functions as a light shielding portion 123 that blocks light. It is preferable that the light-shielding portion 123 covers the gap between the pixel electrodes 110 so as to avoid color mixing and not reduce luminous efficiency.

  When the blue color filter 105 is regarded as the first color filter and the green color filter 107 is regarded as the second color filter, the green color filter 107 has an inversely tapered shape of the blue color filter 105 in a region overlapping with the blue color filter 105. It has a shape to fill. This region where the blue color filter 105 and the green color filter 107 that blocks light of the blue wavelength transmitted by the blue color filter 105 overlap functions as a light shielding unit 124 that blocks light. It is preferable that the light shielding portion 124 covers the gap between the pixel electrodes 110 so as to avoid color mixing and not reduce the light emission efficiency.

FIG. 1B illustrates these relationships. Here, the light shielding portions 122, 123, and 124 are illustrated so as to include a part of the protective layer 113. However, in the drawing, the visibility is lowered due to the overlapping of the lines, and therefore, the positions are shifted and described. This is because the protective layer 113 is not included.
As shown in FIG. 1B, by providing the light shielding portions 122, 123, and 124, it is possible to suppress the occurrence of color mixing. Further, since organic EL elements 101, 102, and 103 having different light intensity spectra are used, it is possible to further suppress color mixing. Hereinafter, the configuration of the organic EL elements 101, 102, and 103 will be described.

  The organic EL element 101 as the first organic EL element includes a pixel electrode 110, an organic functional layer 111, and a common electrode 112. The common electrode 112 serving as a first transflective reflector that folds a part of light is used with, for example, a magnesium-silver alloy (Mg: Ag = about 10: 1 alloy) with a thickness of about 10 nm. Therefore, it has a slight light reflection function. Since the organic EL element 101 does not include the transparent conductor layer 120 and the transparent conductor layer 121 as compared with the organic EL elements 102 and 103, the optical path length is short. Therefore, an optical resonator that selects blue light corresponding to the shortest wavelength is formed between the common electrode 112 and the pixel electrode 110. Therefore, the organic EL element 101 selectively emits light having a blue wavelength corresponding to the shortest wavelength.

  The organic EL element 102 as the second organic EL element includes a pixel electrode 110, a transparent conductor layer 120, a transparent conductor layer 121, an organic functional layer 111, and a common electrode 112. The above-described magnesium-silver alloy is used for the common electrode 112 as the second transflective reflector that turns back part of the light. Therefore, it has a slight light reflection function. Since the organic EL element 102 includes the transparent conductor layer 120 and the transparent conductor layer 121 as compared with the organic EL element 101, the optical path length is longer than that of the organic EL element 101. Therefore, an optical resonator that selects red light corresponding to light having the longest wavelength between the common electrode 112 and the pixel electrode 110 is formed. Therefore, the organic EL element 102 selectively emits light having a red wavelength.

  When the organic EL element 101 is viewed as the first organic EL element, the organic EL element 103 corresponding to the second organic EL element includes the pixel electrode 110, the transparent conductor layer 121, the organic functional layer 111, and the common electrode 112. including. The common electrode 112 as the second transflective reflector that turns back part of the light uses a magnesium-silver alloy in the same manner as described above. Therefore, it has a slight light reflection function. Since the organic EL element 103 includes the transparent conductor layer 121 as compared with the organic EL element 101, the optical path length is longer when compared with the organic EL element 101, and the transparent conductor layer 120 is compared with the organic EL element 102. Since it is not provided, the optical path length is short. Therefore, an optical resonator that selects green light corresponding to an intermediate wavelength is formed between the common electrode 112 and the pixel electrode 110. Therefore, the organic EL element 103 selectively emits light having a green wavelength.

  For example, ITO (indium tin oxide) can be used as the transparent conductor layer 120 and the transparent conductor layer 121 that control the optical path length of the organic EL elements 101, 102, and 103. ITO has a higher light transmittance than a magnesium-silver alloy, and by using ITO and a magnesium-silver alloy, it is possible to form an optical resonator having a high wavelength selectivity. In this case, the common electrode 112 also serves as a first transflective reflector and a second transflective reflector.

As described above, by using the organic EL elements 101, 102, and 103, it is possible to configure the organic EL device 100 having a structure that is stronger against color mixing. As described above, the positional relationship between the blue color filter 105, the red color filter 106, and the green color filter 107 may be changed in any order, but the positional relationship between the blue color filter 105, the red color filter 106, and the green color filter 107. By taking this, the following effects can be obtained.
By assigning the organic EL element 101 to blue, since blue light is emitted through the inversely tapered portions of the light shielding portions 122 and 124, the organic EL device 100 with less blue attenuation can be formed. A substance that emits blue light that can be used in the organic EL device 100 generally has low emission efficiency. Therefore, by increasing the emission efficiency to the outside, it is possible to maintain the blue light intensity while maintaining the reliability of the organic EL device 100.
Then, by assigning the organic EL element 102 to red, red light is emitted through the reverse taper portion of the light-shielding portion 123, so that the organic EL device includes the red organic EL element 102 with the second smallest attenuation after blue 100 can be formed. A substance that emits red light that can be used in the organic EL device 100 generally has the second lowest luminous efficiency after blue. Therefore, it is possible to maintain the light intensity of red while maintaining the reliability of the organic EL device 100 by increasing the emission efficiency to the outside next to blue.
Then, by assigning the organic EL element 103 to green, it is possible to form the organic EL device 100 in which color mixture is suppressed. Since green has high visibility, it is possible to provide the organic EL device 100 in which color mixture is suppressed by blocking green light in the forward tapered regions of the light shielding portions 123 and 124. The positional relationship with the blue color filter 105, the red color filter 106, and the green color filter 107 may be changed in any order.

  In the present embodiment, the case where the organic EL elements 101, 102, and 103 having different light intensity spectra are used has been described. However, this is not an essential requirement, and the same structure as the organic EL elements 101, 102, and 103 is used. And having the same light intensity spectrum may be used. In this case, the manufacturing process can be shortened.

  For the organic functional layer 111, a known low-molecular material capable of emitting white fluorescence or phosphorescence can be used. For example, anthracene, pyrene, 8-hydroxyquinoline aluminum, bisstyrylanthracene derivative, tetraphenyl A butadiene derivative, a coumarin derivative, an oxadiazole derivative, a distyrylbenzene derivative, a pyrrolopyridine derivative, a perinone derivative, a cyclopentadiene derivative, or a thiadiazolopyridine derivative may be used. In addition, these low molecular materials can be doped with rubrene, quinacridone derivatives, phenoxazone derivatives, DCM, DCJ, perinone, perylene derivatives, coumarin derivatives, and diazaindacene derivatives.

  Further, as the polymer material, a substance having a structural formula shown in FIGS. 7A, 7B, and 7C may be used. (A) emits red, (b) emits green, and (c) emits blue. It is possible to emit white light by overlapping these layers.

  Furthermore, examples of the polymer material include polyfluorene derivatives (PF), polyparaphenylene vinylene derivatives (PPV), polyphenylene derivatives (PP), polyparaphenylene derivatives (PPP), polyvinyl carbazole (PVK), polythiophene derivatives, poly A substance containing a polysilane such as methylphenylsilane (PMPS) can be suitably used. These polymer materials include, for example, polymer materials such as perylene dyes, coumarin dyes, rhodamine dyes, rubrene, perylene, 9,10-diphenylanthracene, tetraphenylbutadiene, Nile red, coumarin 6 A low molecular weight material containing quinacridone can be used by doping, but is not limited thereto.

  The organic functional layer 111 may have a multilayer structure. For example, as a material for injecting and transporting holes, for example, a mixture of polystyrene dioxythiophene polythiophene derivative and polystyrene sulfonic acid can be used. . This substance has a function of injecting holes into the light emitting layer and a function of transporting holes.

  It is also preferable to provide a thin film in which an alkali metal is contained in a transparent material BCP (bathocupline) as the electron injection layer.

  As another example, the common electrode 112 may include a material containing magnesium (Mg), lithium (Li), calcium (Ca), aluminum (Al), or silver (Ag). In addition to this, the common electrode 112 can be formed with the same effect by using, for example, MgAgAl, LiF, LiAl, LiFAl, Ca alone, or Ba alone. Further, a layer obtained by laminating these metal thin layers and a transparent conductive material such as ITO, tin oxide, or zinc oxide may be used as the common electrode 112.

(Second embodiment: Organic EL device having a configuration in which color filters are fitted to each other)
FIG. 2A is a plan view of an organic EL device having a configuration in which color filters are fitted to each other according to this application example, and FIG. 2B is a cross-sectional view taken along the line AA ′ in FIG. As in the first embodiment, the organic EL device 100 includes a substrate body 115, an element substrate 116 as a substrate, a pixel electrode 110 as a first electrode, a transparent conductor layer 120 as a conductor, a transparent conductor layer 121 as a conductor, An organic functional layer 111 that emits light, a common electrode 112 as a second electrode, a protective layer 113, a blue color filter 105 as a first color filter that selectively transmits, for example, blue as light in the first wavelength range, For example, a red color filter 106 as a second color filter that selectively transmits red as light in the second wavelength range, and a second color filter that selectively transmits green as light in the second wavelength range, for example. Green color filter 107. The positional relationship with the blue color filter 105, the red color filter 106, and the green color filter 107 may be changed in any order. For example, the positional relationship between the red color filter 106 and the blue color filter 105 may be interchanged. In this case, by replacing the organic EL elements 101, 102, and 103 together, it is possible to cope with the case where the characteristics of the organic EL elements 101, 102, and 103 are changed.
Here, as shown in FIGS. 2A and 2B, the description will be continued for the case where the positional relationship of the blue color filter 105, the red color filter 106, and the green color filter 107 is used.

  Here, since the second embodiment has many portions that overlap with the first embodiment, description will be given with an emphasis on the difference from the first embodiment. The main difference from the first embodiment is that a structure in which the color filters are fitted to each other is provided. Further, in order to form a fitted structure, the color filters are thicker in the order of the blue color filter 105, the red color filter 106, and the green color filter 107. The portion that rises more than the adjacent color filters has a reverse taper shape in which the color filters spread in the direction away from the substrate body 115 in the thickness direction.

In this case, light emitted in an oblique direction from the organic EL elements 101 (blue), 102 (red), and 103 (green) always passes through color filters of other colors. Therefore, it is possible to effectively suppress color mixing. As described above, the positional relationship between the blue color filter 105, the red color filter 106, and the green color filter 107 may be changed in any order, but the positional relationship between the blue color filter 105, the red color filter 106, and the green color filter 107. By taking this, the following effects can be obtained.
By assigning the organic EL element 101 to blue, it is possible to form the organic EL device 100 in which the blue color filter 105 is thin, that is, blue is less attenuated. A substance that emits blue light that can be used in the organic EL device 100 generally has low emission efficiency. Therefore, by increasing the emission efficiency to the outside, it is possible to maintain the blue light intensity while maintaining the reliability of the organic EL device 100.
Then, by assigning the organic EL element 102 to red, it is possible to form the organic EL device 100 in which red attenuation is the second smallest (thin) after blue. A substance that emits red light that can be used in the organic EL device 100 generally has the second lowest luminous efficiency after blue. Therefore, it is possible to maintain the light intensity of red while maintaining the reliability of the organic EL device 100 by increasing the emission efficiency to the outside next to blue.
Then, by assigning the organic EL element 103 to green, it is possible to form the organic EL device 100 in which color mixture is suppressed. Since green has high visibility, it is possible to provide the organic EL device 100 in which color mixture is suppressed by blocking the green color with the blue color filter 105 and the red color filter 106.
In addition, since the color filter can be formed in a uniform manner under the manufacturing conditions of an inversely tapered shape, it is possible to reduce the cost and time required for process development.
In addition, since the color filters are fitted to each other, light emitted in an oblique direction can be reliably stopped, so that color mixing can be suppressed.
It is not essential to have a reverse taper shape in which the color filter spreads in the direction away from the substrate body 115 in the thickness direction. For example, a right-angle shape or a forward taper shape with respect to the substrate body 115 is formed. Even if it is, it is possible to suppress color mixing.
Further, it is preferable that the light shielding portions 122, 123, and 124 cover the gaps of the pixel electrodes 110 so as to avoid color mixture and not reduce the light emission efficiency.

  In this embodiment, the case where the organic EL elements 101, 102, and 103 having different light intensity spectra are used has been described. However, this is not an essential requirement, and the organic EL elements 101, 102, and 103 have the same structure. Those having the same light intensity spectrum may be used. In this case, the manufacturing process can be shortened.

(3rd Embodiment: Manufacturing method of an organic electroluminescent apparatus provided with the structure with which the color filters provided with a taper shape overlapped)
FIGS. 3A to 3D and FIGS. 4A to 4D are process cross-sectional views illustrating a method for manufacturing an organic EL device having a configuration in which color filters having a tapered shape overlap each other.
As a color filter, a case where the blue color filter 105, the red color filter 106, and the green color filter 107 are laminated in this order will be described. As described above, the blue color filter 105, the red color filter 106, and the green color filter 107 are used. The positional relationship may be changed in any order. For example, the positional relationship between the red color filter 106 and the blue color filter 105 (see FIGS. 2A and 2B) may be interchanged. In this case, when the characteristics of the organic EL elements 101, 102, and 103 are changed, it can be dealt with by replacing the organic EL elements 101, 102, and 103 together. Hereinafter, a manufacturing method is demonstrated using FIG. 3 (a)-(d) and FIG. 4 (a)-(d).

First, the buffer layer 130 using, for example, silicon oxide is formed on the glass substrate body 115. The buffer layer 130 is formed, for example, by a plasma CVD (chemical vapor deposition) method or the like, and has a thickness of about 200 nm. As the source gas used in this step, for example, a mixed gas of monosilane and nitrogen oxide, or a combination of TEOS (tetraethoxysilane, Si (OC ₂ H ₅ ) ₄ )) and oxygen is preferable. As the film forming temperature, a condition in which the surface temperature of the substrate body 115 is 150 ° C. to 450 ° C. can be used. Here, the surface side on which the buffer layer 130 is formed is defined as the first surface side. Subsequently, by heating the substrate body 115 to form a polysilicon layer, performing a photolithography process, and further forming a gate oxide film, forming a gate electrode, ion implantation, and forming a sidewall, TFTs 131, 132, and 133 using polycrystalline silicon as channels are formed. FIG. 3A shows a state after the steps so far are completed.
Note that, instead of the method of directly forming polycrystalline silicon, for example, amorphous silicon may be deposited and then subjected to laser annealing to form polycrystalline silicon. Further, instead of laser annealing, a process of converting amorphous silicon into polysilicon by heat treatment may be used. Furthermore, amorphous silicon may be used as it is, or an oxide semiconductor may be used.

  Next, after forming an interlayer insulating film 135 and opening a contact hole, a metal support 136 is formed, and an element substrate 116 as a substrate is formed. FIG. 3B shows the state after the steps so far are completed. Through the steps so far, the element substrate 116 as a substrate is formed.

  Next, the pixel electrode 110, the transparent conductor layer 120 that controls the optical path length of the optical resonator, and the transparent conductor layer 121 are formed. Specifically, for example, ITO (indium / tin / oxide) is laminated as a transparent conductor, and ITO in a region where the transparent conductor layer 120 is unnecessary is removed by a photolithographic etching method. Next, ITO is laminated again, and the transparent conductor layer 121 is formed by removing ITO in an area where the transparent conductor layer 121 is unnecessary by a photolithographic etching method. FIG. 3C shows the state after the steps so far are completed. In the present embodiment, the case where the optical resonator is configured to configure different light intensity spectra has been described. However, this is not an essential requirement, and those having the same light intensity spectrum may be used. In this case, the process of forming the transparent conductor layer 120 and the transparent conductor layer 121 can be omitted.

  Next, the organic functional layer 111 is formed. For example, the organic functional layer 111 can be formed by stacking a blue light emitting layer, a red light emitting layer, and a green light emitting layer. As an example, the organic functional layer 111 can be made of a known low-molecular material capable of emitting white fluorescence or phosphorescence, such as anthracene, pyrene, 8-hydroxyquinoline aluminum, bisstyrylanthracene derivative, Tetraphenylbutadiene derivatives, coumarin derivatives, oxadiazole derivatives, distyrylbenzene derivatives, pyrrolopyridine derivatives, perinone derivatives, cyclopentadiene derivatives, and thiadiazolopyridine derivatives may be used. In addition, these low molecular materials can be doped with rubrene, quinacridone derivatives, phenoxazone derivatives, DCM, DCJ, perinone, perylene derivatives, coumarin derivatives, and diazaindacene derivatives.

  Examples of the polymer material include polyfluorene derivative (PF), polyparaphenylene vinylene derivative (PPV), polyphenylene derivative (PP), polyparaphenylene derivative (PPP), polyvinyl carbazole (PVK), polythiophene derivative, poly A substance containing a polysilane such as methylphenylsilane (PMPS) can be suitably used. These polymer materials include, for example, polymer materials such as perylene dyes, coumarin dyes, rhodamine dyes, rubrene, perylene, 9,10-diphenylanthracene, tetraphenylbutadiene, Nile red, coumarin 6 A low molecular weight material containing quinacridone can be used by doping, but is not limited thereto.

  Further, a multilayer structure may be formed as the organic functional layer 111. For example, a mixture of a polythiophene derivative of polystyrene dioxythiophene and polystyrene sulfonic acid can be used as a material for forming a hole injection / transport layer. In this case, it has a function of injecting holes into the light emitting layer and a function of transporting holes.

  It is also preferable to form a thin film in which an alkali metal is contained in a transparent material BCP (bathocupline) as the electron injection layer.

  Next, the common electrode 112 is formed. As the common electrode 112, for example, MgAg (a material in which Mg and Ag are mixed at a weight ratio of Mg: Ag = 10: 1) is co-evaporated (Mg and Ag are vapor-deposited simultaneously using another vapor deposition source). It is preferable to form the film by using the method described above. Here, the thickness of MgAg is preferably about 10 nm because the light transmittance and the electrical resistance value are balanced, but this thickness need not be limited to this value. The film thickness may be set to another value in order to prioritize the electric resistance value. Subsequently, the protective layer 113 is formed. FIG. 3D shows the state after the steps so far are completed. When the common electrode 112 has an optical resonator structure, it also functions as a first and second transflective reflector.

  Next, the blue color filter 105 is formed. Specifically, an acrylic negative color resist containing a blue pigment is applied and formed using a wet method (photolithographic etching method). When the pigment concentration is high, when the wet method is used, light used for exposure is absorbed in the color resist, so that the amount of exposure on the element substrate 116 side is smaller than that on the surface side, so that the color resist size is thinner. . Therefore, when the blue color filter 105 is formed by a wet method, an inversely tapered shape is obtained. FIG. 4A shows a process cross-sectional view after the steps so far are completed.

Next, a red color filter precursor 106a is formed. The red color filter precursor 106 a is formed to have substantially the same thickness as the blue color filter 105 in a state where the red color filter 106 is modified. As the red color filter precursor 106a, an acrylic negative color resist containing a red pigment can be used.
Here, a mechanism for filling the space between the blue color filter 105 and the protective layer 113 and maintaining a flat shape will be described.
Since the red color filter precursor 106a has fluidity, the gap between the blue color filter 105 and the protective layer 113 is filled with the red color filter precursor 106a by flowing.
When light is irradiated, the red color filter precursor 106a takes a reverse taper shape after development in the region not touching the side surface of the blue color filter 105, as in the case of the blue color filter 105. That is, the region where the side surface of the red color filter precursor 106a is opened can be processed into a reverse taper shape by light irradiation and development. FIG. 4B shows a process cross-sectional view after the steps so far are completed. In FIG. 4B, the region where the red color filter precursor 106a remains is illustrated using different hatching.

  Next, a development process is performed, and post-baking is performed at 100 ° C. or higher and 120 ° C. or lower for 30 minutes or longer and 150 minutes or shorter to improve the solvent resistance without destroying the reverse tapered shape, thereby forming the red color filter 106. FIG. 4C shows a state where the steps so far are finished.

  Next, the green color filter 107 is formed. The green color filter 107 is formed to have the same thickness as the blue color filter 105 and the red color filter 106. FIG. 4D shows a process cross-sectional view after the steps so far are completed.

  Through the above steps, a color filter having the shape shown in the first embodiment can be formed. In the present embodiment, the case where the organic EL elements 101, 102, and 103 having different light intensity spectra are formed has been described. However, this is not an essential requirement, and the same structure as the organic EL elements 101, 102, and 103 is used. And having the same light intensity spectrum may be used. In this case, the manufacturing process can be shortened.

(4th Embodiment: Manufacturing method of an organic electroluminescent apparatus provided with the structure which color filters fitted into each other)
Since the fourth embodiment has many portions that overlap with the third embodiment, only the portions that are different from the third embodiment will be described. The main difference from the third embodiment is that a structure in which the color filters are fitted to each other is provided. Further, in order to form a fitted structure, the color filters are thicker in the order of the blue color filter 105, the red color filter 106, and the green color filter 107. In addition, a portion that rises more than the adjacent color filters has a reverse taper shape in which the color filters expand in a direction away from the substrate body 115 in the thickness direction.
5A to 5D are process cross-sectional views illustrating a method for manufacturing an organic EL device having a configuration in which color filters are fitted to each other. Hereinafter, description will be given based on this drawing.
Here, the case where the blue color filter 105, the red color filter 106, and the green color filter 107 are laminated in this order will be described as the color filter, but the blue color filter 105, the red color filter 106, and the green color are similar to the manufacturing method described above. The positional relationship with the color filter 107 may be changed in any order. For example, the positional relationship between the red color filter 106 and the blue color filter 105 (see FIGS. 2A and 2B) may be interchanged. In this case, even when the organic EL elements 101, 102, and 103 are replaced together, the light emission characteristics of the organic EL elements 101, 102, and 103 can be changed.

  First, using the manufacturing process of the third embodiment, the layers up to the protective layer 113 are formed as shown in FIG.

  Next, the blue color filter 105 is formed. Specifically, an acrylic negative color resist containing a blue pigment is applied and formed using a wet method (photolithographic etching method). When the pigment concentration is high, when a wet method is used, light used for exposure is absorbed in the color resist. Therefore, when the blue color filter 105 is formed by the wet method, a reverse tapered shape is obtained. And it is suitable to perform post-baking at 100 ° C. or higher and 120 ° C. or lower in order to improve the solvent resistance without breaking this reverse tapered shape. FIG. 5A shows the state after the steps so far.

  Next, the red color filter 106 is formed. Specifically, for example, a red color filter precursor 106a made of an acrylic negative color resist containing a red pigment instead of a blue pigment is used to perform the same treatment by a wet method. Since the red color filter precursor 106 a has fluidity, the gap between the reverse tapered region of the blue color filter 105 and the protective layer 113 is filled. Here, the red color filter precursor 106 a is preferably thicker than the thickness for forming the blue color filter 105. By increasing the thickness, light emitted in an oblique direction from the adjacent organic EL element 101 (see FIG. 2B) can be shielded. Then, by performing the same processing as that of the blue color filter 105, the region whose side surface is open (for example, the region protruding from the blue color filter 105) spreads in the direction away from the element substrate 116 in the thickness direction. In a region having an inversely tapered shape and having a side surface in contact with the side surface of the blue color filter 105 as another substance, a shape according to the side shape of the blue color filter 105 is taken. FIG. 5B shows the state after the steps so far are completed.

  Next, a development process is performed, and post-baking is performed at 100 ° C. or higher and 120 ° C. or lower for 30 minutes or longer and 150 minutes or shorter in order to improve the solvent resistance without breaking the reverse tapered shape. FIG. 5C shows the state after the steps so far are completed.

  Next, the green color filter 107 is formed. Specifically, the same processing is performed using an acrylic negative color resist containing a green pigment instead of a red pigment. Here, the acrylic negative color resist containing the green pigment is preferably thicker than the thickness for forming the red color filter 106. By increasing the thickness, light emitted in an oblique direction from the adjacent organic EL elements 102 and 101 (see FIG. 2B) can be shielded.

  In addition, it is not essential that the region protruding from the adjacent color filter has a reverse taper shape in which the color filter spreads in a direction away from the substrate body 115 in the thickness direction. Even if a shape or a forward tapered shape is formed, color mixing can be suppressed.

(Electronics)
FIG. 6 shows an example of an electronic apparatus using the organic EL device described above and the organic EL device formed by using the method for manufacturing the organic EL device. FIG. 6A shows an application example to a mobile phone, and the mobile phone 230 includes an antenna unit 231, an audio output unit 232, an audio input unit 233, an operation unit 234, and the organic EL device 100. Thus, the organic EL device of the present invention can be used as a display unit of the mobile phone 230. FIG. 6B shows an application example to a video camera. The video camera 240 includes an image receiving unit 241, an operation unit 242, an audio input unit 243, and the organic EL device 100. Thus, the organic EL device of the present invention can be used as a finder or a display unit. FIG. 6C shows an application example to a portable personal computer. The computer 250 includes a camera unit 251, an operation unit 252, and the organic EL device 100. Thus, the organic EL device of the present invention can be used as a display unit.

  FIG. 6D shows an application example to a head mounted display. The head mounted display 260 includes a band 261, an optical system storage unit 262, and the organic EL device 100. Thus, the organic EL device of the present invention can be used as an image display. FIG. 6E shows an application example to a rear type projector. The projector 270 includes a casing 271 that includes a synthesis optical system 273, a mirror 274, a mirror 275, a screen 276, and the organic EL device 100. Thus, the organic EL device of the present invention can be used as an image display. FIG. 6F shows an application example to a front projector. The projector 280 includes an optical system 281 and an organic EL device 100 in a housing 282, and can display an image on a screen 283. Thus, the organic EL device of the present invention can be used as an image display.

  The organic EL device of the present invention is not limited to the above example and can be applied to various electronic devices. For example, it can be used for a fax machine with a display function, a finder for a digital camera, a portable TV, a DSP device, a PDA, an electronic notebook, an electric bulletin board, a display for advertisements, and the like.

  The organic EL device 100, the method for manufacturing the organic EL device 100, and the electronic apparatus described above have the following characteristics, for example.

  Since two layers of color filters can be stacked without creating a step, the display image quality can be kept high. Therefore, for example, it is possible to suppress the occurrence of spots. In addition, since there is no step in the area where the color filters overlap (layers where light is blocked), even if the area where the color filters overlap is narrowed to maintain the light emission efficiency, for example, the color filter may have a shape abnormality or peeling. Can be prevented. This functions effectively particularly when a configuration in which the tapered shapes overlap is provided.

  By forming the color filters in the order of the blue color filter 105, the red color filter 106, and the green color filter 107, it is possible to obtain blue transmittance with low luminous efficiency and suppress green leakage with high visibility. .

  By arranging optical resonators corresponding to the respective colors in the organic EL elements 101, 102, and 103, the emission spectrum of the organic EL elements 101, 102, and 103 can be narrow-banded, thereby further suppressing color mixing. It becomes possible.

  By fitting the color filters, light emitted in an oblique direction passes through a color filter of another color, so that light emitted in the oblique direction can be reliably shielded. Therefore, it is possible to suppress color mixing.

  The blue color filter 105, the red color filter 106, and the green color filter 107 are thickened and fitted in this order to increase blue transmittance with low luminous efficiency and suppress green leakage with high visibility. Is possible. In addition, when the color filters are fitted to each other (two layers are stacked), a region where the color filters overlap with each other with a thickness smaller than the sum of the thicknesses of the color filters (region that blocks light) can be configured. Therefore, for example, it is possible to suppress the occurrence of spots due to a step between color filters.

  When the pigment concentration is high, when a wet method is used, light used for exposure is absorbed in the color resist, so that the exposure amount of the color resist on the substrate side is reduced as compared with the color resist on the surface side. For this reason, in particular, when a negative color resist is used, an inversely tapered shape can be easily obtained, so that it can be manufactured in a process with a high process margin.

  By setting the post-bake temperature to 100 ° C or higher and 120 ° C or lower, it becomes possible to improve the solvent resistance without breaking the reverse taper shape, and it is possible to process at a lower temperature than the process of changing the taper shape by post-bake. Thus, it is possible to form a color filter while suppressing characteristic fluctuations of the color filter and the organic EL elements 101, 102, and 103.

  Since the positional relationship with the blue color filter 105, the red color filter 106, and the green color filter 107 can be changed in any order, the degree of freedom in the manufacturing process can be increased.

  DESCRIPTION OF SYMBOLS 100 ... Organic EL device, 101 ... Organic EL element as 1st organic EL element, 102 ... Organic EL element as 2nd organic EL element, 103 ... Organic EL element as 3rd organic EL element, 105 ... A blue color filter as a first color filter, 106 ... a red color filter as a second (1) color filter, 106a ... a red color filter precursor as a second color filter precursor, 107 ... a second color Green color filter as filter, 110... Pixel electrode as first electrode, 111... Organic functional layer, 112... Second electrode, first transflective reflector, common electrode as second transflective reflector , 113 ... protective layer, 115 ... substrate body, 116 ... element substrate as substrate, 120 ... transparent conductor layer as conductor, 121 ... conductor Transparent conductor layer, 122 ... light shielding part, 123 ... light shielding part, 124 ... light shielding part, 130 ... buffer layer, 131 ... TFT, 132 ... TFT, 133 ... TFT, 135 ... interlayer insulating film, 136 ... metal column, 230: Cellular phone, 231 ... Antenna unit, 232 ... Audio output unit, 233 ... Audio input unit, 234 ... Operation unit, 240 ... Video camera, 241 ... Image receiving unit, 242 ... Operation unit, 243 ... Audio input unit, 250 ... Computer, 251 ... Camera unit, 252 ... Operation unit, 260 ... Head mounted display, 261 ... Band, 262 ... Optical system storage unit, 270 ... Projector, 271 ... Housing, 273 ... Composite optical system, 274 ... Mirror, 275 ... Mirror ... 276 ... Screen 280 ... Projector 281 ... Optical system 282 ... Housing 283 ... Screen

Claims (10)

A first organic EL element located on the first surface side of the substrate;
A second organic EL element adjacent to the first organic EL element;
A first color filter covering the first organic EL element and having a reverse tapered shape on at least a part of a side surface;
Covering the second organic EL element and blocking light having a wavelength transmitted by the first color filter, which has a shape that fills a gap between the reverse tapered region of the first color filter and the substrate. A second color filter;
An organic EL device comprising: A first organic EL element located on the first surface side of the substrate; a second organic EL element adjacent to the first organic EL element;
A first color filter covering the first organic EL element and having a reverse tapered shape on at least a part of a side surface;
A second layer that covers the second organic EL element, is thicker than the first color filter, is fitted with the first color filter, and blocks light having a wavelength that is transmitted through the first color filter. A color filter,
An organic EL device comprising:   3. The organic EL device according to claim 2, wherein the second color filter is raised from the first color filter and protrudes from the second organic EL element in a region protruding from the first color filter. An organic EL device comprising a reverse taper shape in which the second color filter spreads in a direction away from the thickness direction. The organic EL device according to claim 1,
The first organic EL element includes a first transflective reflector that transmits part of light at a position having an optical path length aligned with light having a wavelength that is transmitted by the first color filter,
The second organic EL element includes a second transflective reflector that transmits a part of light at a position having an optical path length aligned with light having a wavelength that is transmitted by the second color filter. A characteristic organic EL device. Forming a substrate including a first organic EL element and a second organic EL element adjacent to the first organic EL element on a first surface side;
Forming a first color filter having a reverse taper shape covering the first organic EL element;
Applying a second color filter precursor to the first surface side of the substrate and filling a side surface of the first color filter with the second color filter precursor;
The manufacturing method of the organic electroluminescent apparatus characterized by the above-mentioned.   6. The method of manufacturing an organic EL device according to claim 5, wherein after the step of filling with the second color filter precursor, an open area of the side surface of the second color filter precursor is formed. And a process of processing into an inversely tapered shape. 7. The method of manufacturing an organic EL device according to claim 5, wherein the second color filter precursor is provided after the step of filling with the second color filter precursor or the step of processing into a reverse taper shape. Heating at a temperature of 100 ° C. to 120 ° C. for a period of 30 minutes to 150 minutes,
A method for producing an organic EL device, further comprising:   8. The method of manufacturing an organic EL device according to claim 7, wherein a thickness of the second color filter formed by heating the second color filter precursor is thicker than that of the first color filter. A method for manufacturing an organic EL device.   An electronic apparatus comprising the organic EL device according to claim 1.   An electronic apparatus comprising the organic EL device formed by using the method for manufacturing an organic EL device according to claim 5.

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