JP2012014795A - Magnetic recording device and method for inspecting magnetic recording device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a magnetic recording device capable of being inspected on a discrete track medium in the same way as a conventional magnetic recording medium including a magnetic recording layer composed of a continuous film.SOLUTION: The magnetic recording device includes: a head slider including a recording and reproducing element; recording tracks with a width L1 which enable magnetic recording; wide land tracks with a width L2 wider than the width L1 of the recording tracks; and a magnetic recording medium having non-recording sections with a width G1 provided between the adjacent recording tracks. The width L1 of the recording track is narrower than a bottom reproduction width BRW of the recording and reproducing element, and the width L2 of the wide land track is wider than the bottom reproduction width BRW of the recording and reproducing element.

Description

  The present invention relates to a magnetic recording apparatus and a method for inspecting a magnetic recording apparatus.

  In order to improve the recording density of a magnetic recording medium, a discrete track in which a magnetic recording layer between recording tracks is removed or modified to form a non-recording portion, and interference related to recording and reproduction between adjacent recording tracks is suppressed. A discrete track type magnetic recording apparatus using a medium is effective.

  By the way, in the magnetic recording apparatus, a head slider flying height inspection, a recording / reproducing element voltage / current inspection, and a signal deterioration inspection are performed. Based on the results of these inspections, the parameters of the magnetic recording apparatus are adjusted.

  Since the magnetic recording medium mounted on the conventional magnetic recording apparatus includes a magnetic recording layer made of a continuous film having no non-recording portion, the above-described inspection and parameter adjustment based on the inspection result can be easily performed. Can do.

  However, it is difficult to perform the flying height inspection of the head slider, the voltage / current inspection of the recording / reproducing element, and the signal deterioration inspection using the discrete track on the discrete track medium.

  So far, there has been disclosed a discrete track medium in which a groove for adjusting the lift applied to the magnetic head is provided in the outer region or the inner region with respect to the data region in which the discrete track is formed.

  However, with such a medium, it is difficult to adjust parameters other than the flying height of the head slider.

JP 2005-38476 A

  An object of the present invention is to provide a magnetic recording apparatus capable of performing the same inspection on a discrete track medium as a conventional magnetic recording medium including a magnetic recording layer made of a continuous film.

  According to the embodiment, a head slider including a recording / reproducing element, a recording track having a width L1 capable of magnetic recording, a wide land track having a width L2 wider than the width L1 of the recording track, and an adjacent recording track are provided. A recording medium having a non-recording portion having a width G1, the recording track width L1 being narrower than the recording tail width BRW of the recording / reproducing element, and the wide land track width L2 being the recording / reproducing element. A magnetic recording device wider than the reproduction base width BRW is provided.

1 is a plan view of a magnetic recording medium according to an embodiment. The top view which shows an example of arrangement | positioning of a recording track and a wide land track. The schematic diagram of a servo area and a data area. The top view which shows an example of the magnetic pattern in a servo area | region and a data area | region. 1 is a block diagram of a magnetic recording apparatus according to an embodiment. 1 is a plan view of a first magnetic recording medium according to an embodiment. The figure explaining the measuring method of reproduction | regeneration hem width BRW. FIG. 6 is a plan view of a second magnetic recording medium according to the embodiment. FIG. 6 is a plan view of a third magnetic recording medium according to the embodiment. FIG. 9 is a plan view of a fourth magnetic recording medium according to the embodiment. FIG. 10 is a plan view of a fifth magnetic recording medium according to the embodiment. Sectional drawing which shows the manufacturing method of the DTR medium which concerns on embodiment.

Hereinafter, embodiments will be described with reference to the drawings.
FIG. 1 is a schematic plan view of a magnetic recording medium (DTR medium) 1 according to the embodiment. FIG. 1 shows a data area 2 and a servo area 3. The data area 2 is an area where user data is recorded. As will be described in detail later, a recording track (discrete track) composed of a patterned magnetic recording layer is formed in the data area 2 and a wide land track 12 having a width L2 wider than the width L1 of the recording track. Is formed. In FIG. 1, the wide land track 12 is formed only in the middle portion of the medium, but it may be formed in a plurality of regions, for example, three regions of an inner circumferential portion, a middle circumferential portion, and an outer circumferential portion. The shape of the servo area 3 on the medium surface is an arc shape corresponding to a locus drawn when the head slider accesses. The length in the circumferential direction of the servo area 3 is longer as the radial position is closer to the outer circumferential side. In FIG. 1, 15 servo areas 3 are illustrated, but 100 or more servo areas 3 are formed in an actual medium.

  FIG. 2 is a plan view showing an example of the arrangement of recording tracks and wide land tracks. The data area 2 is divided into sectors by the servo area 3. In the data area 2, a plurality of recording tracks (discrete tracks) 11 having a width L1 and a wide land track 12 having a width L2 are formed extending in the circumferential direction. The recording track 11 is used for magnetic recording of user data, and the wide land track 12 is used for medium inspection. A region between adjacent recording tracks 11 along the radial direction and a region between the recording track 11 and the wide land track 12 are non-recording portions 20. The width L2 of the wide land track 12 is wider than the width L1 of the recording track 11.

  FIG. 3 is a schematic diagram of the servo area and the data area. FIG. 4 is a plan view showing an example of a magnetic pattern in the servo area and the data area.

  The servo area 3 includes a preamble part 31, an address part 32, a burst part 33, and the like. In the preamble part 31, the address part 32, and the burst part 33 of the servo area 3, a magnetic pattern for giving a servo signal and a non-recording part are formed. These parts have the following functions.

  The preamble section 31 is provided for performing PLL processing for synchronizing the servo signal reproduction clock and AGC processing for maintaining the signal reproduction amplitude appropriately with respect to time deviation caused by rotational eccentricity of the media. In the preamble portion 31, convex recording portions are repeatedly formed in the circumferential direction by continuously forming a substantially circular arc without being divided in the radial direction.

  In the address portion 32, a servo signal recognition code called a servo mark, sector information, cylinder information, and the like are formed by a Manchester code at the same pitch as the circumferential pitch of the preamble portion 31. In particular, since the cylinder information has a pattern in which the information changes for each servo track, it is converted to a gray code that minimizes the change from the adjacent track so that the influence of address misreading during the seek operation is reduced. From, it is recorded as Manchester code.

  The burst unit 33 is an off-track detection area for detecting the off-track amount from the on-track state of the cylinder address, and includes four types of marks (A, B, C, and D bursts whose pattern phases are shifted in the radial direction). Called). In each burst, a plurality of marks are arranged in the circumferential direction at the same pitch as the preamble portion. The radial period of each burst is proportional to the period at which the address pattern changes, in other words, the servo track period. Each burst is formed in about 10 cycles in the circumferential direction and is repeated in the radial direction at a cycle twice as long as the servo track cycle.

  The mark shape of the burst portion 33 is designed to be a rectangle or, more precisely, a parallelogram taking into account the skew angle at the time of head access, but it is somewhat rounded depending on the stamper processing accuracy and processing performance such as transfer formation. Shape. The mark may be formed as a non-recording portion or a recording portion. Although the details of the principle of detecting the position from the burst unit 33 are omitted, the off-track amount is calculated by calculating the average amplitude value of the reproduction signal of each ABCD burst.

  As shown in FIG. 4, in both the recording track 11 and the wide land track 12, the recording / reproducing element is positioned using the servo pattern.

  In the embodiment, the magnetic pattern and the non-recording portion constituting the recording track, the wide land track, and the servo pattern may be distinguished by the difference in the thickness of the magnetic recording layer, or the characteristic change of the magnetic recording layer, for example, the difference in the crystal state You may distinguish. When the magnetic pattern and the non-recording portion are distinguished from each other by the difference in thickness of the magnetic recording layer, all of the magnetic recording layer in the concave portion may be removed or a part of the magnetic recording layer in the concave portion may be left. Further, the surface may be flattened after the nonmagnetic material is embedded in the recesses between the magnetic patterns.

  Next, the magnetic recording apparatus according to the embodiment will be described. FIG. 5 is a block diagram of the magnetic recording apparatus according to the embodiment. In this figure, the head slider is shown only on the upper surface of the magnetic recording medium. However, perpendicular magnetic recording layers having discrete tracks are formed on both surfaces of the magnetic recording medium, and the down head / up is formed on the upper and lower surfaces of the magnetic recording medium. Each head is provided.

  The disk drive includes a main body called a head disk assembly (HDA) 100 and a printed circuit board (PCB) 200.

  A head / disk assembly (HDA) 100 includes a magnetic recording medium (DTR medium) 1, a spindle motor 101 that rotates the magnetic recording medium 1, an actuator arm 103 that rotates about a pivot 102, and a tip of the actuator arm 103. A suspension 104 mounted on the head, a head slider 105 supported by the suspension 104 and including a reproducing head and a recording head, a voice coil motor (VCM) 106 that drives the actuator arm 103, and a head amplifier that amplifies the input / output signals of the head. (Not shown). A head amplifier (HIC) is provided on the actuator arm 103 and connected to a printed circuit board (PCB) 200 through a flexible cable (FPC) 120. If the head amplifier (HIC) is provided on the actuator arm 103 as described above, the noise of the head signal can be effectively reduced, but the head amplifier (HIC) may be fixed to the HDA body.

  As described above, the magnetic recording medium 1 has the perpendicular magnetic recording layers formed on both surfaces, and the servo areas are formed on each of the both surfaces so as to coincide with the trajectory of the head movement. The specifications of the magnetic recording medium satisfy the outer diameter and inner diameter suitable for the drive, recording / reproducing characteristics, and the like. The radius of the arc formed by the servo area is given as the distance from the pivot to the magnetic head element.

  The printed circuit board (PCB) 200 is equipped with four main system LSIs. These are a disk controller (HDC) 210, a read / write channel IC 220, an MPU 230, and a motor driver IC 240.

  The MPU 230 is a control unit of the drive drive system, and includes a ROM, a RAM, a CPU, and a logic processing unit that realize the head positioning control system according to the present embodiment. The logic processing unit is an arithmetic processing unit configured by a hardware circuit, and performs high-speed arithmetic processing. The operation software (FW) is stored in the ROM, and the MPU controls the drive according to the FW.

  A disk controller (HDC) 210 is an interface unit in the hard disk, and exchanges information with an interface between the disk drive and a host system (for example, a personal computer), an MPU, a read / write channel IC, and a motor driver IC. Manage.

  The read / write channel IC 220 is a head signal processing unit related to read / write, and includes a circuit for processing recording / reproduction signals such as head amplifier (HIC) channel switching and read / write.

  The motor driver IC 240 is a drive driver unit for the voice coil motor (VCM) 77 and the spindle motor 72. The motor driver IC 240 controls the spindle motor 72 at a constant rotation, and supplies the VCM operation amount from the MPU 230 to the VCM 77 as a current value. Drive the moving mechanism.

  Next, the pattern of the recording track, wide land track, and non-recording portion in the magnetic recording medium according to the embodiment will be described in more detail.

  FIG. 6 is a plan view of the first magnetic recording medium according to the embodiment. In FIG. 6, a plurality of recording tracks 11 having a width L1 and a wide land track 12 having a width L2 extending in the circumferential direction are formed in the data area. The width L2 of the wide land track is wider than the width L1 of the recording track. . The width L1 of the recording track is narrower than the reproduction bottom width BRW of the recording / reproducing element, and the width L2 of the wide land track is wider than the reproduction bottom width BRW of the recording / reproducing element. The recording tracks 11 adjacent to each other along the radial direction and the recording track 11 and the wide land track 12 are divided by a non-recording portion 20 having the same width. As described above, the recording track 11 is used for magnetic recording of user data, and the wide land track 12 is used for inspection of a medium.

  The reproduction bottom width BRW (bottom read width) of the recording / reproducing element is a value indicating a width in which the recording / reproducing element can detect the magnetic recording signal on the medium in the cross track direction.

  With reference to FIG. 7 (a) and (b), the measuring method of BRW is demonstrated concretely.

  (1) A signal having a constant frequency is recorded on the wide land track 12 by the recording head.

  (2) As shown in FIG. 7A, the read element 50 is moved in the cross track direction, the signal recorded in (1) is read, and the wide land track on which the signal is recorded from the center position of the read element 50 The distance to the end of the 12 reproducing elements 50 is defined as an offset. FIG. 7B shows a signal intensity profile with respect to the offset.

  (3) In the profile obtained in (2), the offset distance at which the signal is detected by the reproducing element 50 corresponds to the distance from the center of the reproducing element 50 to the end of the wide land track 12 where the signal can be detected. . A value obtained by doubling this distance is BRW.

  In addition, the measuring method of BRW is not limited to said method. For example, the same measurement as described above may be performed on both sides of the reproducing element 50 and the offset distances on both sides of the reproducing element 50 may be added. Alternatively, a signal intensity profile of the reproducing element with respect to a recording track having a very narrow width may be acquired, and a distance between positions where the signal intensity rises at both ends of the profile may be measured.

  In the magnetic recording apparatus according to the embodiment, parameter adjustment is performed based on the characteristics of the reproduction signal inspected on the wide land track 12. The characteristics of the reproduction signal inspected on the wide land track 12 are required to be equivalent to those of the reproduction signal inspected on a medium having a magnetic recording layer made of a continuous film. Accordingly, it is desirable that the width L2 of the wide land track 12 is wider than the reproduction skirt width BRW of the reproduction element.

  On the other hand, since the reproduction signal is not inspected on the recording track 11, it is not necessary to make the width L1 of the recording track 11 wider than the reproduction skirt width BRW. On the contrary, in order to read the user data recorded on the recording track 11 with high signal intensity by reading the user data using the central portion of the high-sensitivity reproducing element, the reproduction skirt width BRW of the reproducing element is set to the width of the recording track 11. It is desirable to make it wider than L1.

  FIG. 8 is a plan view of the second magnetic recording medium according to the embodiment. The magnetic recording medium of FIG. 8 differs from the magnetic recording medium of FIG. 6 in that the first nonmagnetic portion 21 between two adjacent recording tracks 11 (strictly, the nonmagnetic portion on both sides of the recording track 11 is narrower). When the width of the first nonmagnetic portion 21 is defined as G1, the second land having a width G2 wider than the width G1 of the first nonmagnetic portion 21 on both sides of the wide land track 12. The nonmagnetic part 22 is provided.

  The method for manufacturing a magnetic recording medium according to the embodiment includes an imprint process in which a concavo-convex pattern is transferred by pressing a stamper against a resist applied on a magnetic recording layer, as will be described later. In the imprint process, the resist corresponding to the non-recording portion is pushed in by the convex portion of the stamper, and the extruded resist moves to the stamper concave portion corresponding to the recording portion adjacent to the non-recording portion. The pattern is transferred. Since the resist pattern thus formed functions as a mask when the magnetic recording layer is processed, the magnetic recording layer cannot be processed if the thickness of the convex resist is insufficient.

  Since the width of the concave portion of the stamper corresponding to the wide land track is wider than the width of the concave portion of the stamper corresponding to the recording track, in order to secure the thickness of the convex portion of the resist on the wide land track, Requires more resist. That is, it is necessary to supply more resist from the stamper convex portion in the vicinity of the concave portion of the stamper corresponding to the wide land track. For this purpose, a second nonmagnetic portion 22 having a width G2 wider than the width G1 of the first nonmagnetic portion 21 between two adjacent recording tracks 11 is provided on both sides of the wide land track 12. Is preferred.

  FIG. 9 is a plan view of a third magnetic recording medium according to the embodiment. As shown in FIG. 9, it is not always necessary to provide the second non-magnetic portion 22 having the width G2 on both sides of the wide land track 12, and the width G2 is set in the vicinity of the wide land track 12 within the sweep width of the head slider 105. A second non-recording portion 22 may be provided.

  Here, the flying height of the head slider is affected by the unevenness of the medium surface below. Specifically, the flying height of the head slider decreases as the concave portion is wider than the convex portion, and the flying height of the head slider increases as the convex portion is wider than the concave portion. In the magnetic recording medium according to the embodiment, since the width L2 of the wide land track 12 is wider than the width L1 of the recording track 11, if the wide land track 12 is positioned below the head slider 105, the head slider 105 May increase the flying height. In order to avoid such a variation in the flying height of the head slider 105, it is preferable to provide a second non-recording portion 22 having a width G2 in the vicinity of the wide land track 12 within the sweep width of the head slider 105. As shown in FIG. 9, the sweep width W of the head slider 105 refers to the radial length of the head slider 105 projected onto the medium when a skew angle is generated in the head slider 105. Therefore, the sweep width W of the head slider 105 is the smallest at a position where the skew angle is zero. In the embodiment, it is sufficient that the second non-recording portion 22 having the width G2 is included in the vicinity of the wide land track 12 within the sweep width of the head slider 105 at the position where the skew angle is zero.

  A normal head slider generally has a medium-facing size of a rectangle of 1 mm × 1 mm in length and width. Therefore, the non-recording portion 22 having a width G2 within a range of 1 mm in the radial direction of the medium from the wide land track 12. Is preferably provided.

  Since the wide land track 12 and the second non-recording portion 22 have different radial positions, only one of the wide land track 12 and the second non-recording portion 22 is often within the sweep width of the head slider 105. For this reason, it is preferable that the radial distance between the wide land track 12 and the second non-recording portion 22 is short. Accordingly, as shown in FIG. 8, it is preferable that the wide land track 12 and the second non-recording portion 22 are adjacent to each other.

  FIG. 10 shows a plan view of a fourth magnetic recording medium according to the embodiment. In the magnetic recording medium shown in FIG. 10, the width G2 of the second non-recording portion 22 provided in the vicinity of the wide land track 12 is wider than the reproduction tail width BRW of the recording / reproducing element.

  A DTR medium is required to have a characteristic that magnetic recording is not performed on a non-recording portion. However, depending on processing variations that occur when the medium is manufactured, the non-recording portion may be in a state where magnetic recording is possible. By performing signal inspection of the non-recording portion at the time of shipment of the apparatus, it is possible to sort out defective media.

  As shown in FIG. 10, when the width G2 of the second non-recording part 22 is larger than the reproduction skirt width BRW of the recording / reproducing element, the magnetic recording head is made to access the second non-recording part 22, The signal of only the second non-recording part 22 can be read without being affected by the adjacent magnetic pattern, and the characteristics of the non-recording part can be evaluated.

FIG. 11 is a plan view of a fifth magnetic recording medium according to the embodiment. In the magnetic recording medium of FIG. 11, the width L2 of the wide land track 12, the width L1 of the recording track 11, and the 21 width G1 of the first non-recording portion have the following relationship: L2 ≧ L1 + 2G1
Meet.

  Considering reproduction on the target recording track 11 by the reproducing element, in order to suppress the interference of the reproduction signal from the adjacent recording track 11, the reproducing skirt width BRW of the reproducing element is the width L1 of the recording track 11 and both sides thereof. It is desired that the width is smaller than the sum of the widths G1 of the two non-recording portions 21, and BRW <L1 + 2G1. On the other hand, as described above, the reproduction skirt width BRW of the reproduction element is desired to be narrower than the width L2 of the wide land track 22, and BRW <L2.

  In the magnetic recording apparatus of the embodiment, the flying height of the head slider and the current / voltage of the recording / reproducing element are adjusted based on the result of the inspection on the wide land track 12. The recording width MWW (magnetic write width) of the recording element before adjustment varies depending on the flying height of the head slider, the current voltage of the recording / reproducing element, and the like. In order to correctly grasp the measurement value at the time of adjustment in the inspection, it is necessary to widen the width L2 of the wide land track 12 to some extent. On the other hand, since the recording track 11 performs recording / reproduction with the optimum values after the inspection and adjustment on the wide land track 12, there is no need to allow for the width of the recording track 11 and the non-recording portions 21 at both ends. In order to increase the recording density, it is desirable to form the recording tracks 11 occupying most of the area on the medium with a narrow track pitch. For these reasons, the width L2 of the wide land track 12 is preferably equal to or wider than the sum L1 + 2G1 of the width l1 of the recording track 11 and the widths of the two non-recording portions 21 on both sides thereof.

  In the magnetic recording medium of the embodiment, it is preferable that the number of wide land tracks is smaller than the number of recording tracks. Although the wide land track is used in the inspection process, it is not used for magnetic recording of user data. Therefore, the recording area decreases as the area occupied by the wide land track increases. In addition, the inspection process using the wide land track does not need to be performed on the entire surface of the medium, and may be performed on a part of the medium, such as the inner periphery, the inner periphery, the intermediate periphery, and the outer periphery of the medium. Therefore, in order to secure the recording capacity, it is preferable that the number of wide land tracks is smaller than the number of recording tracks.

  In the magnetic recording medium of the embodiment, it is preferable to have one or more recording tracks on the inner peripheral side and the outer peripheral side of the wide land track. The magnetic recording apparatus of the embodiment has a head slider that floats on a rotating magnetic recording medium. The flying height of the head slider is affected by the uneven shape of the medium surface. Particularly, in the vicinity of the wide land track, the width of the magnetic pattern (convex portion) and the width of the second non-recording portion (concave portion) are sharper than those of the recording track (convex portion) and the first non-recording portion (concave portion). Therefore, the flying height of the head slider is easily affected. In order to minimize this influence, it is desirable that the medium shape near the wide land track is close to the recording track. Specifically, it is preferable that recording tracks are formed on both sides of the wide land track. Therefore, as shown in FIG. 6, it is preferable to have one or more recording tracks 11 on the inner peripheral side and the outer peripheral side of the wide land track 12.

  In the magnetic recording apparatus of the embodiment, since the reproducing head and the recording head are arranged at a distance in the track direction on the head slider, the angle of the slider tilted according to the skew angle with respect to the track direction is set at the time of recording / reproducing. Requires head position adjustment. It is preferable to perform evaluation at a position where the offset amount is reduced by providing a wide land track at a position where the skew angle of the recording / reproducing head is zero.

  In the magnetic recording apparatus of the embodiment, as shown in FIG. 5, the head slider 105 including the recording / reproducing element is attached to the tip of the suspension 104 via the actuator arm 103, and the locus of the head is a voice call motor ( VCM) 106 is arcuate along the rotation of actuator arm 103 driven. Therefore, the angle of the recording / reproducing element with respect to the recording track, that is, the skew angle varies depending on the position of the actuator arm 103.

  The inspection of the magnetic recording apparatus of the embodiment is preferably performed at a position where the skew angle of the recording / reproducing element is zero. Therefore, in the magnetic recording medium of the embodiment, the wide land track to be inspected is preferably provided at a position where the skew angle is zero. However, the wide land track in the magnetic recording medium of the embodiment does not necessarily have to be provided only at the position where the skew angle is zero, and a plurality of areas are provided so that inspection can be performed in various areas from the inner peripheral part to the outer peripheral part. May be provided.

  In the magnetic recording apparatus according to the embodiment, the recording / reproducing head is levitated on the wide land track to perform recording / reproducing, thereby performing any of the flying height inspection of the head slider, the voltage / current inspection of the recording / reproducing element, and the signal deterioration inspection. Inspection is performed, and various parameters of the magnetic recording apparatus are adjusted based on the inspection result.

  A method of manufacturing a DTR medium according to the embodiment will be described with reference to FIGS.

  First, an imprint stamper is manufactured as shown in FIGS. As shown in FIG. 12A, an electron beam resist 42 is applied on a stamper substrate 41. As the substrate, a Si substrate or a glass substrate is preferably used. As shown in FIG. 12B, a pattern corresponding to the non-recording portion between the recording tracks and between the recording track and the wide land track is drawn with an electron beam, and development processing is performed, whereby irregularities are formed on the surface of the resist 42. Form a pattern. As shown in FIG. 12C, a Ni electroformed layer is formed on the electron beam resist 42 on the substrate 41, and the stamper 43 having an uneven pattern is obtained by peeling the Ni electroformed layer. The concavo-convex pattern transferred to the surface of the stamper 43 has a form in which the concavo-convex pattern of the resist 42 is inverted. The stamper material is preferably Ni, but is not limited thereto.

  Next, as shown in FIGS. 12D to 12G, a DTR medium is manufactured by using an imprint method. The concave portion on the surface of the stamper 43 corresponds to a magnetic pattern (recording track or wide land track), and the convex portion corresponds to a non-recording portion. On the stamper, a portion corresponding to the wide land track is a concave portion wider than the recording track, and a portion corresponding to the second non-recording portion provided in the vicinity of the wide land track is from the first non-recording portion between the recording tracks. It is a wide convex part.

  As shown in FIG. 12D, a magnetic recording layer 52 is formed on the medium substrate 51. An imprint resist 53 is applied on the magnetic recording layer 52. As shown in FIG. 12 (e), the stamper 43 is opposed to the resist 53 on the surface of the medium substrate 51 and pressed between the stamper 43 and the medium substrate 51 to press the uneven pattern on the surface of the stamper 43 to the resist 53. After the transfer, the stamper 43 is peeled off.

  During imprinting, if the distance between the wide land track and the wide second non-recording portion is 1 mm or more, it is pushed away by the wide convex portion on the stamper corresponding to the second non-recording portion. The resist does not reach the wide concave portion on the stamper corresponding to the wide land track. As a result, the convex portion of the resist corresponding to the wide land track may not be sufficiently high. In this case, the magnetic recording layer on the surface of the wide land track may be etched when the magnetic recording layer in the resist recess is etched in a later step.

On the other hand, if the distance between the wide land track and the wide second non-recording portion is within 1 mm, the convex portion of the resist corresponding to the wide land track is sufficiently high. in this case,
When the magnetic recording layer in the resist concave portion is etched in a later process, the magnetic recording layer on the surface of the wide land track is not etched.

  As shown in FIG. 12F, the magnetic recording layer 52 is etched using the resist 53 to which the uneven pattern has been transferred as a mask to form a recess corresponding to the non-recording portion. As shown in FIG. 12G, the non-recording portion 54 is formed by filling the concave portion with a non-magnetic material and flattening the surface. Note that it is not necessary to completely planarize the medium surface, and irregularities may remain on the medium surface. Thereafter, a carbon protective film 55 is formed on the entire surface. Further, a lubricant is applied on the carbon protective film 55 to manufacture a DTR medium.

  Hereinafter, the inspection method and adjustment method of the magnetic recording apparatus in the embodiment will be described.

[Adjustment of head flying height]
The recording / reproducing element was positioned on the wide land track, and an unmodulated continuous rectangular wave was recorded at a recording wavelength λ ₁ [nm]. The flying height adjustment amount was set to D ₀ so that the maximum flying height of the head was H ₀ [nm], and the positioning error amount PE ₀ was obtained. Positioning error amount PE is acquired while sequentially setting the head flying height adjustment amount so as to be slightly lower than the maximum flying height H _0, and the first flying height adjustment amount that satisfies PE> PE ₀ is obtained. The flying height adjustment amount D ₁ corresponding to H ₁ = 0 [nm] was set. The previously recorded unmodulated continuous rectangular wave is reproduced, the reproduced signal is sequentially A / D converted, and the amplitude V of the signal component (fundamental wave component) of the recording wavelength λ ₁ [nm] in the reproduced signal is obtained by fast Fourier transform. ₁ and the amplitude V ₃ of the signal component (third harmonic component) of λ ₃ = λ ₁ ÷ 3 [nm] in the reproduction signal was calculated, and the amplitude ratio R ₀ = V ₁ / V ₃ was obtained. The amplitude ratio R was obtained in the same manner while sequentially setting the flying height adjustment amount D so that the head flying height was gradually higher than the minimum flying height H ₁ . Further, the flying height H [nm] when the amplitude ratio is R was sequentially estimated by the following equation.

H = K (3 · λ ₃ ) log (R / R ₀ ) / 4π (1)
In the equation (1), R represents the acquired amplitude ratio, R ₀ represents the amplitude ratio at the minimum flying height H ₀ , and log represents the natural logarithm. K represents a measurement correction coefficient, and depends on the design of the concavo-convex pattern of each medium.

  Here, in the conventional magnetic recording apparatus incorporated in the DTR medium, since the correction coefficient K changes according to the design of the concave / convex pattern of the recording track, it is necessary to calculate the correction coefficient K for every design change of the concave / convex pattern. For this reason, it took a long time to adjust the head flying height.

  On the other hand, in the magnetic recording apparatus incorporating the DTR medium having the wide land track according to the embodiment, the correction factor K of the wide land track can be uniquely determined regardless of the design of the concavo-convex pattern. For this reason, it is not necessary to derive the correction coefficient K while adjusting the head flying height, and the head flying height adjustment time can be shortened.

The sequentially estimated flying height H [nm] is compared with the target flying height H ₁ [nm] to obtain the flying height adjustment amount D ₁ when H ≧ H ₁ [nm], and based on this The head flying height could be adjusted.

[Adjustment of read element bias voltage]
The recording / reproducing element was positioned on a wide land track, and a modulation signal was recorded with a linear recording density LD [Mbit / mm ² ]. While changing the bias voltage of the reproducing element from VB ₀ [mV] to VB ₂ [mV] (VB ₀ <VB ₂ ), the previously recorded signal was reproduced and demodulated to calculate the error rate ER. Of the obtained error rates, VB ₁ corresponding to the lowest value ER ₁ was used as the bias voltage of the reproducing element. In this way, the optimum reproducing element bias voltage with the lowest error rate could be determined.

[Current adjustment of recording element]
The recording / reproducing element is positioned on a recording track that is not a wide land track, the recording current is changed from Iw ₀ [mA] to Iw ₂ [mA] (Iw ₀ <Iw ₂ ), and the linear recording density LD [Mbit / mm ² ]. The modulated signal was recorded at The signal recorded at each recording current was reproduced and demodulated, and the error rate ER was calculated. Of the obtained error rates, the lowest value ER ₁ was obtained, and ER ₁ > ER _t compared with the error rate ER _t allowed as the recording / reproducing performance of the magnetic recording apparatus. Then, it was found that the recording / reproducing performance was insufficient.

  Here, in the conventional magnetic recording apparatus incorporated in the DTR medium, it is specified whether the cause of insufficient recording / reproducing performance depends on the design or quality of the recording / reproducing element or on the design or quality of the medium. Was impossible.

In the magnetic recording apparatus incorporating the DTR medium having the wide land track according to the embodiment, when the recording / reproducing element is positioned on the wide land track and the inspection similar to the above is performed, ER ₁ <ER _{t is obtained} . The desired recording / reproducing performance of the apparatus was satisfied. From the result of this inspection, it was clear that there was a problem with the design or quality of the medium, and it was possible to determine that the design or quality of the medium should be improved in order to satisfy the recording / reproducing performance.

[Signal deterioration inspection]
The recording / reproducing element was positioned on a recording track that was not a wide land track, and a modulation signal was recorded with a linear recording density LD [Mbit / mm ² ]. At the elapsed time t ₀ shortly after recording, the previously recorded signal was reproduced and demodulated to calculate the error rate ER ₀ . From the elapsed time t ₀ to t ₁ (t ₀ <t ₁ ), the previously recorded signal was reproduced and demodulated at regular time intervals, and the error rate ER was sequentially calculated. In order to estimate the deterioration rate of recording quality, an error rate increase rate ΔER / t per unit time between t ₀ and t ₁ was derived by approximation from the result of the error rate ER calculated sequentially. The error rate ER ₀ + (ΔER / t × t ₂ ) was calculated by extrapolating the derived error rate increase rate to the desired product life t ₂ . When this error rate is compared with an error rate ERT that is allowed to guarantee the recording holding performance of the magnetic recording apparatus, ER0 + (ΔER / t × t2)> ERT, and the combination of the head and the medium makes magnetic recording. It was found that the record retention performance of the device was insufficient.

  Here, in the conventional magnetic recording apparatus incorporated in the DTR medium, it is specified whether the cause of the insufficient recording retention performance depends on the design or quality of the recording / reproducing element or on the design or quality of the medium. Was impossible.

In the magnetic recording apparatus incorporating the DTR medium having the wide land track according to the embodiment, when the recording / reproducing element is positioned on the wide land track and the inspection similar to the above is performed, ER ₁ <ERT is obtained, and the magnetic recording apparatus The desired record retention performance was satisfied. From the result of this inspection, it was clear that there was a problem with the design or quality of the medium, and it was possible to determine that the design or quality of the medium should be improved in order to satisfy the record holding performance.

[Inspection of non-recording part]
In the magnetic recording apparatus A or B incorporating the recording medium A or B, the recording / reproducing element is positioned on the wide land track and on the second non-recording portion having a width G2 wider than BRW on both sides of the wide land track. In each case, a signal having a constant frequency was recorded and then reproduced to measure the signal intensity. The ratio of the signal intensity at the non-recording portion to the signal intensity at the wide land track was 0.0% for apparatus A and 30% for apparatus B.

  Next, the adjacent recording test was performed several times on the recording track. As a result, the device A passed and the device B failed. Analysis of the structures of the recording media A and B confirmed that the magnetic recording layer in the concave portion was completely removed in the recording medium A, whereas the magnetic recording layer remained in the concave portion in the recording medium B. .

  It takes about 1 hour to perform the above-mentioned multiple adjacent recording test. On the other hand, the inspection of the non-recording portion performed by positioning on the second non-recording portion having a width G2 wider than BRW on both sides of the wide land track is completed in about 1 minute. Therefore, by performing the evaluation based on the inspection of the non-recording portion in advance to eliminate defective products, the pass rate in the multiple adjacent recording test can be increased, and the inspection time can be shortened.

[Example of manufacturing DTR media]
The manufactured DTR media is 1.8 inches in diameter. The unevenness of the surface on which the magnetic pattern and the non-recording portion were formed was 10 nm. A wide land track having a width of 50 μm was formed. The following three types of DTR media were manufactured by changing the design of the second non-recording portion.

  (1) A DTR medium in which the second non-recording portion having the width G2 is not provided. (2) A DTR medium provided with a second non-recording portion having a width G2 of 25 μm at a position 1 mm away from the wide land track. (3) A DTR medium in which a second non-recording portion having a width G2 of 25 μm is provided on both sides of a wide land track having a width of 50 μm.

  Recording and reproduction were performed using a 1 mm × 1 mm head slider with a flying height of 10 nm from the medium surface. In the DTR medium of (1), when the head slider accessed the region including the wide land track, the flying height increased by 0.05 nm and the signal intensity decreased. In the DTR medium of (2), the flying height did not change when the head slider accessed the area including the wide land track and the second non-magnetic part 1 mm away. In the DTR medium (3), when the head slider accessed the area including the wide land track and the second nonmagnetic portions on both sides, the flying height did not change in most areas.

  In addition, another DTR medium was manufactured. The manufactured DTR media is 1.8 inches in diameter. The track pitch of the recording tracks was 325 kTPI (78 nm), the recording track width L1 was 52 nm, and the first non-recording portion width G1 between the recording tracks was 26 nm. The width L2 of the wide land track was 300 nm, and the width G2 of the second non-recording portion provided on both sides of the wide land track was 150 nm. The reproducing skirt width BRW of the reproducing element was 120 nm. The recording area was formed from the inner periphery of 9 mm from the center of the medium to the outer periphery of 23 mm from the center of the medium. Three wide land tracks were formed at an interval of 100 recording tracks, each in a radius position of 10 mm, 17 mm, and 21 mm.

  Although several embodiments of the present invention have been described, these embodiments are presented by way of example and are not intended to limit the scope of the invention. These novel embodiments can be implemented in various other forms, and various omissions, replacements, and changes can be made without departing from the scope of the invention. These embodiments and modifications thereof are included in the scope and gist of the invention, and are included in the invention described in the claims and the equivalents thereof.

  DESCRIPTION OF SYMBOLS 1 ... Magnetic recording medium (DTR medium), 2 ... Data area, 3 ... Servo area, 11 ... Recording track, 12 ... Wide land track, 20 ... Non-recording part, 21 ... 1st non-recording part, 22 ... 2nd Non-recording part, 31 ... Preamble part, 32 ... Address part, 33 ... Burst part, 41 ... Stamper substrate, 42 ... Electron beam resist, 43 ... Stamper, 50 ... Reproducing element, 51 ... Media substrate, 52 ... Magnetic Recording layer 53 ... resist 54 ... non-recording part 55 ... carbon protective film 100 ... head disk assembly (HDA) 101 ... spindle motor 102 ... pivot 103 ... actuator arm 104 ... suspension 105 ... head Slider 106 Voice coil motor (VCM) 120 Flexible cable (FPC) 200 Printed circuit board PCB), 210 ... disk controller (HDC), 220 ... read / write channel IC, 230 ... MPU, 240 ... motor driver IC.

Claims (5)

A head slider including a recording / reproducing element;
A magnetic recording medium having a recording track having a width L1 capable of magnetic recording, a wide land track having a width L2 wider than the width L1 of the recording track, and a non-recording portion having a width G1 provided between adjacent recording tracks; And a width L1 of the recording track is narrower than a reproducing base width BRW of the recording / reproducing element, and a width L2 of the wide land track is wider than a reproducing base width BRW of the recording / reproducing element.   The sweep width of the head slider includes the wide land track, and a second non-recording portion having a width G2 wider than the width G1 of the non-recording portion and wider than the playback skirt width BRW of the recording / reproducing element. Item 2. The magnetic recording device according to Item 1.   The magnetic recording apparatus according to claim 2, wherein the second non-recording portion is adjacent to the wide land track.   The inspection method for a magnetic recording apparatus according to claim 1, wherein the wide land track is used to select a flying height inspection of the head slider, a voltage / current inspection of the recording / reproducing element, and a signal deterioration inspection. Inspection method for magnetic recording apparatus.   The magnetic recording apparatus inspection method according to claim 2, wherein the second non-recording portion is used to inspect the magnetic characteristics of the non-recording portion.

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